Base plate for a processing chamber substrate support

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is a top isometric view of a base plate for a processing chamber substrate support, according to the novel design.

FIG. 2 is a bottom isometric view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a back elevation view thereof.

FIG. 7 is a left side elevation view thereof.

FIG. 8 is a right side elevation view thereof.

FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 3; and,

FIG. 10 is a cross-sectional view taken along line 10-10 in FIG. 3.

The broken lines in the drawings depict portions of the article that form no part of the claimed design.

Claims

The ornamental design for a base plate for a processing chamber substrate support, as shown and described.

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Patent History
Patent number: D947914
Type: Grant
Filed: Nov 23, 2020
Date of Patent: Apr 5, 2022
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Shreesha Yogish Rao (Milpitas, CA), Mukund Sundararajan (Bangalore), Cheng-Hsiung Matthew Tsai (Cupertino, CA), Manjunatha P. Koppa (Bengaluru), Steven V. Sansoni (Livermore, CA)
Primary Examiner: Sheryl Lane
Assistant Examiner: Mark T. Philipps
Application Number: 29/759,527