Outer wall of reactor for semiconductor manufacturing apparatus

- ASM IP Holding B.V.
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Description

FIG. 1 is a perspective view of an outer wall of a reactor for a semiconductor manufacturing apparatus, showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross sectional view taken along line 8-8 of FIG. 6; and,

FIG. 9 is a cross sectional view taken along line 9-9 of FIG. 6.

The broken lines shown in the drawings represent portions of the outer wall of a reactor for a semiconductor manufacturing apparatus that form no part of the claimed design.

Claims

The ornamental design for an outer wall of a reactor for a semiconductor manufacturing apparatus, as shown and described.

Referenced Cited
U.S. Patent Documents
4978567 December 18, 1990 Miller
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D614593 April 27, 2010 Lee
D616390 May 25, 2010 Sato
D716742 November 4, 2014 Jang
D724553 March 17, 2015 Choi
D725053 March 24, 2015 Kaneko
D732644 June 23, 2015 Yamagishi
D733261 June 30, 2015 Yamagishi
D734377 July 14, 2015 Hirakida
D753269 April 5, 2016 Yamagishi
D787458 May 23, 2017 Kim
D790041 June 20, 2017 Jang
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Patent History
Patent number: D802546
Type: Grant
Filed: Mar 22, 2016
Date of Patent: Nov 14, 2017
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Hyun Soo Jang (Daejeon), Jeong Ho Lee (Seoul), Young Hoon Kim (Cheonan-si)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/558,834