Outer wall of reactor for semiconductor manufacturing apparatus
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The broken lines shown in the drawings represent portions of the outer wall of a reactor for a semiconductor manufacturing apparatus that form no part of the claimed design.
Claims
The ornamental design for an outer wall of a reactor for a semiconductor manufacturing apparatus, as shown and described.
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Type: Grant
Filed: Mar 22, 2016
Date of Patent: Nov 14, 2017
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Hyun Soo Jang (Daejeon), Jeong Ho Lee (Seoul), Young Hoon Kim (Cheonan-si)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/558,834