Base plate for a processing chamber substrate support
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Description
The broken lines depict portions of the article that form no part of the claim.
Claims
The ornamental design for a base plate for a processing chamber substrate support, as shown and described.
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Patent History
Patent number: D960216
Type: Grant
Filed: Mar 11, 2022
Date of Patent: Aug 9, 2022
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Shreesha Yogish Rao (Milpitas, CA), Mukund Sundararajan (Bangalore), Cheng-Hsiung Matthew Tsai (Cupertino, CA), Manjunatha P. Koppa (Bengaluru), Steven V. Sansoni (Livermore, CA)
Primary Examiner: Calvin E Vansant
Assistant Examiner: Mark T. Philipps
Application Number: 29/830,409
Type: Grant
Filed: Mar 11, 2022
Date of Patent: Aug 9, 2022
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Shreesha Yogish Rao (Milpitas, CA), Mukund Sundararajan (Bangalore), Cheng-Hsiung Matthew Tsai (Cupertino, CA), Manjunatha P. Koppa (Bengaluru), Steven V. Sansoni (Livermore, CA)
Primary Examiner: Calvin E Vansant
Assistant Examiner: Mark T. Philipps
Application Number: 29/830,409
Classifications