Substrate processing system carrier
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The broken lines in the drawings illustrate environment that forms no part of the claimed design.
Claims
The ornamental design for a substrate processing system carrier, as substantially shown and described.
5749469 | May 12, 1998 | Williams |
D407073 | March 23, 1999 | Burkhart |
6199291 | March 13, 2001 | Ozee |
6676759 | January 13, 2004 | Takagi |
D489739 | May 11, 2004 | Okugawa |
D616389 | May 25, 2010 | Takahashi |
7792350 | September 7, 2010 | Kiley et al. |
8384033 | February 26, 2013 | Burns et al. |
8397739 | March 19, 2013 | Gregor et al. |
D684546 | June 18, 2013 | Kuzuoka |
8784033 | July 22, 2014 | Kremerman et al. |
9457464 | October 4, 2016 | Kremerman et al. |
9462732 | October 4, 2016 | Robinson |
9579788 | February 28, 2017 | Rosenberg et al. |
9881820 | January 30, 2018 | Wong et al. |
9947517 | April 17, 2018 | Luere et al. |
10014198 | July 3, 2018 | Richardson |
10041868 | August 7, 2018 | Gottscho |
10062589 | August 28, 2018 | Wong et al. |
10062590 | August 28, 2018 | Wong et al. |
10062599 | August 28, 2018 | Genetti et al. |
10103010 | October 16, 2018 | Luere et al. |
10124492 | November 13, 2018 | Genetti et al. |
D908645 | January 26, 2021 | Savandaiah |
D947802 | April 5, 2022 | Sakata |
D954769 | June 14, 2022 | Green |
20030010657 | January 16, 2003 | Zabka |
20070134904 | June 14, 2007 | Wan et al. |
20100194015 | August 5, 2010 | Vekstein et al. |
20150041353 | February 12, 2015 | Adams |
20160211165 | July 21, 2016 | McChesney et al. |
20160211166 | July 21, 2016 | Yan et al. |
20160216185 | July 28, 2016 | Gottscho |
20170053819 | February 23, 2017 | Richardson |
20170113355 | April 27, 2017 | Genetti et al. |
20170115657 | April 27, 2017 | Trussell et al. |
20170117172 | April 27, 2017 | Genetti et al. |
20170119339 | May 4, 2017 | Johnson et al. |
20170133283 | May 11, 2017 | Kenworthy |
20170213758 | July 27, 2017 | Rice et al. |
20170236688 | August 17, 2017 | Caron et al. |
20170236741 | August 17, 2017 | Angelov et al. |
20170236743 | August 17, 2017 | Severson et al. |
20170263478 | September 14, 2017 | McChesney et al. |
20170287682 | October 5, 2017 | Musselman et al. |
20170287753 | October 5, 2017 | Musselman et al. |
20170330786 | November 16, 2017 | Genetti et al. |
20170334074 | November 23, 2017 | Genetti et al. |
20180019107 | January 18, 2018 | Ishizawa |
20180019142 | January 18, 2018 | Wong et al. |
20180032062 | February 1, 2018 | Trussell et al. |
20180040492 | February 8, 2018 | Wong et al. |
20180068879 | March 8, 2018 | Wong et al. |
20180090354 | March 29, 2018 | Sugita et al. |
20180166259 | June 14, 2018 | Ueda |
20180218933 | August 2, 2018 | Luere et al. |
20180233328 | August 16, 2018 | Ueda et al. |
20180277416 | September 27, 2018 | Takahashi et al. |
20180301322 | October 18, 2018 | Sugita et al. |
20180315583 | November 1, 2018 | Luere et al. |
20180315640 | November 1, 2018 | Ueda et al. |
20190088531 | March 21, 2019 | Sarode Vishwanath et al. |
20200122320 | April 23, 2020 | Yoshida et al. |
20200211877 | July 2, 2020 | Raschke |
20210296149 | September 23, 2021 | Green |
10165884 | June 1998 | JP |
2009095783 | May 2009 | JP |
4559317 | October 2010 | JP |
20160016409 | February 2016 | KR |
- International Seach Report and Written Opinion dated Sep. 1, 2020, for application No. PCT/US2020/033774.
- Entegris F300 AutoPds, Wafer Carrier Clean, Secure wafer transport and optimum automation intergartion, https://www.entergris.com.
- Entegris Spectra Foup, Front opening unified pod platform with superior microenvironment control, https:/www.entegris.com/content/dam/shared-product-assets/wafer-processing/datasheet-spectra-foup-2413.pdf, Retrieved May 20, 2019.
Type: Grant
Filed: Jun 2, 2020
Date of Patent: Mar 7, 2023
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Aaron Green (Sunnyvale, CA), Nicholas Michael Bergantz (Sunnyvale, CA)
Primary Examiner: Shawn T Gingrich
Application Number: 29/736,744