Boat of substrate processing apparatus

Description

FIG. 1 is a front, top and right side perspective view of a boat of substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a rear elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and

FIG. 8 is an enlarged portion view, labeled FIG. 8 in FIG. 2.

FIG. 9 is an enlarged cross-sectional view taken along line 9-9 in FIG. 2 thereof;

FIG. 10 is an enlarged cross-sectional view taken along line 10-10 in FIG. 2 thereof;

FIG. 11 is a perspective view of the area shown in FIG. 8 thereof; with portions that form no part of the claimed design removed for illustrative clarity.

FIG. 12 is a front elevational view of FIG. 11 thereof;

FIG. 13 is a rear elevational view of FIG. 11 thereof;

FIG. 14 is a right side elevational view of FIG. 11 thereof;

FIG. 15 is a left side elevational view of FIG. 11 thereof;

FIG. 16 is a top elevational view of FIG. 11 thereof; and,

FIG. 17 is a bottom plan elevational view of FIG. 11.

The dot-dashed lines define the bounds of the claimed design and form no part thereof. The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design. The dot-dot-dash broken lines in the FIG. 2 are used for reference purposes only, and form no part of the claimed design.

Claims

The ornamental design for a boat of substrate processing apparatus, as shown and described.