Roller shaft for substrate cleaning

- EBARA CORPORATION
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Description

FIG. 1 is a left side view of a roller shaft for substrate cleaning showing our new design;

FIG. 2 is a right side view thereof;

FIG. 3 is a front view thereof, including a detail view of a portion thereof;

FIG. 4 is a top view thereof, including a detail view of a portion thereof;

FIG. 5 is a cross-section view thereof, taken along the line 5-5 of FIG. 1;

FIG. 6 is an enlarged top perspective view; and,

FIG. 7 is an enlarged left side view thereof.

The broken lines in the figures show portions of the roller shaft that form no part of the claimed design.

Claims

The ornamental design for a roller shaft for substrate cleaning, as shown and described.

Referenced Cited
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Other references
  • Myhandb.bb—Washer—Oval—Diaphragm https://www.myhandb.bb/washer-oval-diaphragm-cxp5233.html (Year: 2023).
  • rosepassion.com P9926-64453160801 https://www.rosepassion.com/en/64453160801-p9926-washer-91153198300-P9926?devise=USD&pays=US (Year: 2023).
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Patent History
Patent number: D992845
Type: Grant
Filed: Nov 13, 2020
Date of Patent: Jul 18, 2023
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Tomoaki Fujimoto (Tokyo), Mitsuru Miyazaki (Tokyo), Takuya Inoue (Tokyo)
Primary Examiner: Kevin K Rudzinski
Assistant Examiner: Richard E Yenchesky
Application Number: 29/758,287
Classifications
Current U.S. Class: Element Or Attachment (D32/25)