Vacuum transfer robot
Claims
The ornamental design for a vacuum transfer robot, as shown and described.
| D323332 | January 21, 1992 | Ishii et al. |
| 5950495 | September 14, 1999 | Ogawa et al. |
| 6102649 | August 15, 2000 | Ogawa et al. |
| 6109860 | August 29, 2000 | Ogawa et al. |
| 6155131 | December 5, 2000 | Suwa et al. |
| 6190114 | February 20, 2001 | Ogawa et al. |
| 6364599 | April 2, 2002 | Suwa et al. |
| RE37731 | June 11, 2002 | Ogawa et al. |
| 7056080 | June 6, 2006 | Ogawa et al. |
| 7114907 | October 3, 2006 | Ogawa et al. |
| D552138 | October 2, 2007 | Kondo et al. |
| 7306423 | December 11, 2007 | Ogawa et al. |
| D625748 | October 19, 2010 | Yoshino |
| 20020114690 | August 22, 2002 | Ishigame |
| 20030012631 | January 16, 2003 | Pencis et al. |
| 20030014155 | January 16, 2003 | Pencis et al. |
| 20050079043 | April 14, 2005 | Ogawa et al. |
| 20050118010 | June 2, 2005 | Ogawa et al. |
| 20050217053 | October 6, 2005 | Kim et al. |
| 20070004058 | January 4, 2007 | Lee et al. |
| 20070183868 | August 9, 2007 | Son |
| 20080023293 | January 31, 2008 | Uratani et al. |
| 20080118338 | May 22, 2008 | Huang et al. |
| 20090093906 | April 9, 2009 | Takizawa et al. |
| 20090142163 | June 4, 2009 | Genetti et al. |
| 20100101357 | April 29, 2010 | Aoki et al. |
| 20100161124 | June 24, 2010 | Kimura |
Type: Grant
Filed: Dec 22, 2011
Date of Patent: Nov 5, 2013
Assignee: Ulvac, Inc. (Chigasaki-shi, Kanagawa)
Inventor: Takahiro Yoshino (Chigasaki)
Primary Examiner: Phillip S Hyder
Application Number: 29/409,384