Vacuum transfer robot
Latest Ulvac, Inc. Patents:
Claims
The ornamental design for a vacuum transfer robot, as shown and described.
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Type: Grant
Filed: Dec 22, 2011
Date of Patent: Nov 5, 2013
Assignee: Ulvac, Inc. (Chigasaki-shi, Kanagawa)
Inventor: Takahiro Yoshino (Chigasaki)
Primary Examiner: Phillip S Hyder
Application Number: 29/409,384