Abstract: A lightweight, low cost throttle body and throttle valve placed in the body, both formed of resins, that resolve the problem of excessively large gap formation is disclosed. Circumferentially oriented filler contained in a resin forming a throttle valve compensates to make the radial linear expansion coefficient of the throttle valve substantially equal to that of a bore. Grooves are formed on concentric circles in the throttle valve to orient filler circumferentially. A throttle valve provided with circumferentially oriented filler can be formed by impregnating an aggregate formed by circumferentially arranging the filler with a resin and curing the resin. A rib is formed in a part near a throttle shaft to control molding shrinkage so that the roundness of the bore is small.

Abstract: A closed throttle position of a vehicle internal combustion engine is determined by storing a plurality of signal values representative of previous foot-off position values of an accelerator pedal (10) within a normal range of pedal positions, determining a current foot-off position value of the accelerator pedal, comparing the current foot-off position value to an average of the previous stored foot-off position values, and using the average as the closed pedal position to determine a closed throttle position when the comparison is indicative of an abnormal pedal position.

Abstract: A two-cycle internal combustion engine has an ignition timing that varies with engine speed. A plurality of ignition patterns (the relationship between ignition timing and engine speed) are used. The engine exhaust gas temperature is sensed and is used to determine the particular ignition pattern used at a particular time.

Abstract: The present invention relates to a method for detecting combustion misses in a multi-cylinder internal combustion engine, having at least one first engine control unit which controls at least the injection and firing of a first subset of the cylinders of the internal combustion engine, and having at least one further engine control unit which controls the injection and firing of a further subset of cylinders and in which the detection of combustion misses for the first and the further subset of cylinders is additionally carried out; the control units using an engine control program which is interrupted by interrupt routines, in phase-synchronism with the rotational movement of the crankshaft, in which at least the data required for the injection and firing are processed; and in which method the detection of combustion misses is based on establishing and evaluating crankshaft segment times in which the crankshaft covers an associated circle-segment angle range; and the crankshaft segment times likewise being e

Abstract: A control system for an internal combustion engine is disclosed. The engine has an exhaust gas recirculation passage for recirculating a portion of exhaust gases from the engine to an intake system and an exhaust gas recirculation control valve for controlling an amount of exhaust gases recirculated through the exhaust gas recirculation passage. A valve opening amount of the exhaust gas recirculation control valve is detected. A fuel amount to be supplied to the engine is calculated according to the valve opening amount of the exhaust gas recirculation control valve. An average valve opening value, a change rate of which is smaller than that of the detected valve opening amount is used to calculate a correction value for correcting the fuel supply amount. The fuel supply amount is corrected according to the calculated correction value from a time at which an opening of the exhaust gas recirculation control valve is detected.

Abstract: A fuel injection system carries out a multi-injection. A preceding injection affects a pressure in a combustion chamber at a succeeding injection. In order to ensure an amount and timing of a succeeding injection, the ECU carries out a compensating process. In one embodiment, an injection period for the succeeding injection is corrected by varying a corrective value in accordance with parameters indicative of a pressure deviation. In another embodiment, each of the injection amounts for preceding and succeeding injections is corrected in accordance with deviations from a standard pressure respectively. The deviation is determined based on an intake pressure.

Abstract: The present invention relates to engines having multiple hydraulic devices. For instance a multi-cylinder diesel engine might include both an a fuel injector and an engine compression release brake. Traditionally, each of these hydraulic devices has been controlled by an individual actuator control valve. However, engineers have learned that decreasing the number of engine components can increase engine robustness. In addition, engineers have learned that de-coupling fluid pressure to the needle valve member hydraulic surface from fluid pressure lines to other injector components can result in greater control of the injector. Therefore, the present invention utilizes a single actuator control valve to control both hydraulic devices for an engine cylinder and to provide independent control of fluid pressure to the needle valve member closing hydraulic surface.

Abstract: An injector is provided which includes a nozzle valve element, a control volume, and an injection control valve including a control valve member for controlling fuel flow from the control volume so as to control nozzle valve movement. Importantly, the injector includes a nozzle valve lift detecting device for detecting nozzle valve lift and providing a nozzle valve element lift feedback signal. Feedback signals are improved and control valve member oscillations are minimized by positioning a valve seat associated with the control valve member a spaced distance from the control volume, positioning a drain orifice such that the nozzle valve element restricts flow through a drain circuit when in an open position and extending the control valve member from the valve seat to the control volume to form an end wall of the control volume.

Abstract: In common rail fuel injection systems, a sensed rail pressure is used to determine control signals to produce desired injection characteristics. Because rail pressure fluctuates, especially during cold start procedures, and because the rail pressure must be sensed before the injection event to be controlled, the accuracy of the timing and quantity of the injection event can be compromised if the rail pressure at the start of the injection event is different from the sensed rail pressure. In order to produce more accurate fuel injection characteristics, the rail pressure is sensed after the end of control signal for an immediately preceeding injection event but at least a predetermined time before the start of control signal for a succeeding injection event.

Abstract: A fuel rail for an automotive vehicle with a spark-ignited, reciprocating piston internal combustion engine is provided. The fuel rail has a tubular body with a fuel inlet and a plurality of injector outlets. A damper is provided with a lower cup connected to the tubular body. The damper also has an upper cup with a diaphragm sealably separating the cups.

Abstract: An apparatus and a process are provided for determining a temperature at a predetermined location in an internal combustion engine. The temperature at a bridge between two exhaust valves of an internal combustion engine can be measured only with great effort during operation. It is proposed to measure a temperature at a location in the internal combustion engine that is easier to access and to determine the bridge temperature with the aid of a computation model on the basis of the engine rpm, the quantity of injected fuel, the temperature of the charge air, and the coolant temperature.

Abstract: A fuel supply module mounting structure for a fuel tank (1) is disclosed having a fuel tank module (6) comprised of a tilting mechanism (TM) disposed between an upper plate (5) and a case (8,30) and operative to cause the case to be tilted in a direction away from a valve (20) in response to vertically upward movement of the case in a value beyond a given amount of stroke upon abutting engagement of the case with a bottom wall portion (3) of the fuel tank, avoiding interference between the valve (20) and a pump (9) contained in the case (8,30).

Abstract: The invention is in a regulator and converter operated to fumigate a volatile material, preferably a liquified petroleum gas (LPG), under vacuum, into an intake air flow of an internal combustion diesel engine to provide, on demand generated by an operator closing a throttle, passage of LPG to the regulator and converter wherein it is vaporized and the LPG vapors are passed into the engine intake air flow that travels into the engine. The injection of LPG vapors provides for an increase in engine output power and an improvement in fuel percentage of burn. The regulator and converter is connected the engine coolant system to receive a hot coolant flow, heating an LPG flow path therethrough to vaporize the LPG with the LPG vapors then directed from the regulator and converter into the engine intake air flow.

Abstract: The bypass valve system of a turbo-charged engine includes a compressor coupled between an air intake and a cylinder. The system also includes a bypass valve coupled in a bypass passage between an intake manifold and the air intake. The bypass valve is configured to selectively open and close the bypass passage in response to a change in pressure downstream of the compressor. A throttle position sensor is configured to generate an electric signal that is proportional to a degree of opening of a throttle valve. Also, an electronic control unit (ECU) is configured to output an activating signal when a sudden closure of the throttle valve is detected based on the electric signal. Finally, a solenoid valve is configured to supply pressure downstream of the compressor to the bypass valve when it receives the activating signal.

Abstract: Method and arrangement for regulating the rotational speed of a crankshaft included in an internal combustion engine during a gear changing process of a gearbox connected to the internal combustion engine. The arrangement includes a compressor mounted in connection with the air inlet of the internal combustion engine. A transmission having a variable gear ratio is located between the crankshaft and a driving shaft arranged in connection with the compressor, and a control means is arranged to control the gear ratio between the crankshaft and the compressor. When changing from a higher to lower gear, the control means is arranged to control the gear ratio between crankshaft and compressor so that the gear ratio between these components is reduced, and wherein moment of inertia is transferred from compressor to crankshaft resulting in an acceleration of the crankshaft.

Abstract: The present invention relates to an electronically driven pressure boosting system that is used to boost the torque output of an internal combustion engine. Engine operating parameters are fed to an engine control unit (ECU). A supercharger is controlled by the ECU and when powered by an electrical supply system boosts engine torque. When the supercharger is in an idle mode of operation at low supercharger speeds it does not boost torque, and when it is in a boost mode of operation at high supercharger speeds, it does boost engine toque. The supercharger requires a lag time to accelerate from an idle speed to a boost speed. The electronic control system monitors the engine operating parameter(s) and calculates therefrom a likelihood that the engine torque will need to be boosted by the compressor.

Abstract: A combustion control system for a spark-ignition internal combustion engine includes a variable piston stroke characteristic mechanism changing a compression ratio of the engine, sensors detecting engine operating conditions, i.e., engine speed and engine load, and at least one of a variable lift and working angle control mechanism simultaneously continuously changing an intake-valve lift and an intake-valve working angle and a variable phase control mechanism changing an angular phase at a central angle corresponding to a maximum valve lift point of the intake valve. Also provided is a control unit that controls the variable piston stroke characteristic mechanism, and at least one of the variable lift and working angle control mechanism and the variable phase control mechanism, depending on the engine operating conditions.

Abstract: A crankcase ventilation system for an internal-combustion engine with exhaust gas turbocharging, has a first vent pipe which is connected on one side with the crankcase space and on the other side with an intake pipe of the internal-combustion engine. Viewed in the flow direction, the first vent pipe leads in behind a throttle valve arranged in the intake pipe. A second vent pipe is connected on one side with the crankcase space and on the other side with the suction side of a compressor. In the first vent pipe, a return valve is arranged which, in a supercharging pressure operation of the internal-combustion engine, prevents that the excess pressure existing in the intake pipe spreads over into the crankcase space. A return valve is arranged in the second vent pipe and the vacuum level for both vent pipes can be adjusted by way of a common pressure regulator.

Abstract: A method for air/fuel operation of an engine. The engine is supplied fuel from both a fuel purging system to purge fuel in a fuel supply and feed such purged fuel to an intake manifold of the engine and a fuel injection system to inject fuel from such fuel supply into a cylinder of such engine. The method includes producing a first air/fuel ratio control signal in accordance with measured exhaust gas oxygen emission from the engine; producing a second air/fuel ratio control signal in accordance with fuel transport delay through the fuel purging system; combining the first and second air/fuel ratio control signals into a composite control signal; and feeding such composite control signal to the fuel injection system. Producing the first air/fuel ratio control signal comprises determining fuel flow rate through the purge system.

Abstract: A weapon is disclosed for discharging high velocity, non-lethal projectiles utilizing pressurized gas. The weapon includes a housing having a handle and a projectile storage cylinder sized and shaped to receive a plurality of substantially spherical-shaped projectiles. A discharge barrel is mounted proximate the projectile storage cylinder and has an open muzzle end and a closed base end, while a projectile loading chamber is disposed at the barrel base end and communicates with the projectile storage cylinder. An enclosure is provided in the housing for receiving a removable pressurized gas storage source. A gas discharge cell communicates with the gas storage source in the enclosure and is adapted to receive a charge of compressed gas for selective projectile discharge.

Abstract: A barbecue device includes front and rear leg members disposed under and pivoted to a support plate. The leg members are pivotable relative to the support plate for moving between a first position, in which lower ends of the leg members are moved away from each other, and a second position, in which the lower ends of the leg members are moved toward each other. A cook unit is disposed removably on the support plate. The support plate and the leg members cooperatively define an accommodating space thereamong for receiving the cook unit when the cook unit is removed from the support plate. A retaining unit is mounted on one of the leg members, and engages releasably the other one of the leg members for retaining the leg members at the second position.

Abstract: The present invention provides a support apparatus for a fuel tank used in connection with a gas barbecue grill assembly. The support apparatus is connected to a portion of the frame assembly of the grill assembly. The support apparatus comprises a housing member with a bracket adapted to engage a portion of the fuel tank and a releasable member operably connected to the housing member. At least one pivot axis member operably connects the support apparatus to a portion of the frame assembly. The support apparatus is rotatable about a generally vertical axis between a first position wherein the fuel tank is substantially within the frame assembly and stored for use, and a second position wherein the fuel tank is substantially beyond the frame assembly and accessible for removal and replacement. The releasable member is adapted to secure the support apparatus in either the first position or the second position.

Abstract: A heating furnace includes a housing and a grill member disposed in the housing. The housing includes a base unit, a surrounding wall unit having a lower part disposed on the base unit, and an upper part, and a cover unit disposed on top of the surrounding wall unit. The surrounding wall unit includes a plurality of upright grating members that cooperate to confine a chamber. Each of the grating members has a pair of upright frame portions. The surrounding wall unit further includes a releasable interlocking unit provided on each adjacent pair of the upright frame portions of the grating members for releasably interconnecting the grating members. One of the grating members is provided with a door panel to permit access into the chamber.

Abstract: A burner assembly that overcomes problems experienced in the prior art. One embodiment provides a burner assembly for burning a fuel gas from a gas source. The assembly has a burner body with a contoured upper surface and a burner pan with a gas inlet aperture therein. The burner body is connected to the burner pan. The burner body and burner pan are spaced apart to form a gas distribution chamber therebetween. The burner body has a plurality of gas apertures extending between the distribution chamber to an upper surface of the burner body. The gas apertures are positioned to allow the fuel gas to flow to selected areas on the burner body's upper surface for combustion to create a desired flame at selected locations relative to the upper surface. In one embodiment is a contoured upper surface with a plurality of peaks and valleys forming simulated coal or ember members.

Abstract: There is provided a propellant-operable self-activating and self-returning metering valve for an aerosol container for dispensing a formulation comprising a substance in a fluid propellant contained therein. There is also provided a canister for use in a metered dose inhaler having the valve thereon.

Abstract: A fluid vaporizing device such as an aerosol generator having a tubular heater in the form of thin film of resistance heating material lining a fluid passage and method for forming the tubular heater within the fluid passage. The tubular heater can be heated to volatilize a fluid within the passage. The fluid vaporizing device can be used for the generation of aerosols containing medicated material.

Abstract: An aerosol generator includes a heater arrangement having multiple heating sections and corresponding flow paths for volatilization of a fluid in liquid form. The flow paths can include first and second flow paths which are parallel to each other and sized such that the first flow path is smaller than the second flow path. During delivery of liquid to the flow paths, a smaller amount of vaporized liquid can be ejected from the first flow path, and the bulk of the vaporized liquid can be ejected from the second flow path.

Abstract: A patient care system comprising an interface unit, an infusion pump unit, and a capnography unit is disclosed. The infusion pump unit is used to administer medical fluids to a patient, including the administration of anesthetics, analgesics, or sedatives. The capnography unit provides monitoring of the patient's expired air, in particular, the end tidal CO2 levels in the expired air and the respiration rate. When the capnography unit indicates to the interface unit that the end tidal CO2 level and/or pulse rate has reached a point outside a specified range, the interface unit initiates visual and audio alarms and controls the infusion pump unit by modifying the flow or by shutting off the pump unit. In patient controlled analgesia applications, the interface unit may block patient-controlled bolus doses of the analgesic until reset by a qualified medical professional or until the measured capnography values return to a normal range.

Abstract: A gas delivery system, having a gas identification, by which a gas supplied to the gas delivery system is identified, a blender, blending oxygen and the gas to provide a gas mixture with an oxygen flow rate set up by an operator, and at least one flow sensor, to measure a flow rate of the gas mixture. The blender is driven by an actuator motor to various blender positions with the blender positions being calibrated based on the specific heat ratio and the gas constant of the gas. The flow sensor can be installed at the inspiratory circuit, the proximal circuit and the expiratory circuit of the gas delivery system. The flow sensor output is corrected based on the actual conditions, including the temperature, pressure and humidity, and characteristics of the gas mixture.

Abstract: Device (10) may be inserted in a nostril to filter and/or sample air inhaled or exhaled. Air inhaled through device (10) enters aperture (21) and exits through aperture (25). While passing through device (10) the airstream is deflected around deflector (16) and caused to encounter collector (19) extending inwardly from sidewall (18). A liquid or adhesive on collector (19) entraps particles, e.g. allergens, in the airstream, and can be subsequently removed for analysis. Alternatively collector (19) can be replaced by a reservoir for delivery of a pharmaceutical to a subject by inhalation.

Abstract: The device claimed refers to means for human respiration organ protection against dust-like particles—in particular, against allergen-carrying particles. It may be used as a nasal filter, as a filter in respirators, and so forth. The device comprises a hollow body having one or several inlet channels and one outlet orifice that are intended for the passage of inhaled air, with the inner surface of said body having such a shape that is close to the shape of a truncated cone, and said inlet channels are made in the major base of the cone with the direction of the axis of each of the channels being combined out of the tangential component and axial component, while the outlet orifice is made in the vertex (minor base) of the cone, and the inner body surface is covered with a sticky substance capable of retaining dust and allergen particles contained in the inhaled air. Cleaning of inhaled air takes place in filter's “vortex chamber” formed by the body of the above-indicated shape.

Abstract: A protective device comprising a mask part, which covers the wearer's mouth and nose and is provided with means through which air can be supplied inside the mask part to enable breathing. To eliminate problems caused by draught, the mask part is provided with a wall portion, which is arranged to extend from the edge portion of the mask part against the wearer's face inside the mask part so that an interspace connected to the inner space of the mask part is formed between the wall portion and the inner surface of the mask part and that the means through which air for breathing can be supplied inside the mask part are arranged to open into the interspace.

Abstract: An improved ventilator connection tube system designed to improve patient comfort and prevent accidental “pop off” incidents that often occur with standard endotracheal and ventilation tubes. The system includes a modified endotracheal tube that includes a cylindrical-shaped end adapter, an L-shaped elbow connector with a rotating leg member and a fixed leg member, and a ventilator connection tube. In the preferred embodiment, the rotating leg member is perpendicularly aligned on one end of the fixed leg member and slidingly receives the end adapter on the modified endotracheal tube. Disposed around the rotating leg member is a first rotating collar that securely fixes the end adapter to the rotating leg member. The fixed leg member includes a long leg section that slidingly connects to a rotating coupler attached to the ventilator connection tube. A second rotating collar is disposed around the rotating coupler to selectively attach the fixed leg member to the rotating coupler.

Abstract: The invention relates to a manifold (100) for a closed system (1) for endotracheal ventilation and aspiration of a patient, having a first section (115) and a second section (145), an opening (112) configured for allowing influx of a flushing medium to the first section (115), and a passage (118) configured for allowing advancement of the catheter from the first section (115) and into the second section (145). The invention is characterised by a valve body (132) arranged interiorly of the first section (115) and configured for optionally allowing blocking of the passage (118) in a first position and of the opening (112) in a second position.

Abstract: The present invention is directed to a single-use, disposable absorbent laminate containing one or more layers of hydrophilic meltspun material bonded to a breathable film. The meltspun fabric layer may include at least one spunbonded fabric, meltblown fabric or other nonwoven fabric that is made hydrophilic prior to bonding to the film. The filaments or microfibers of the spunbonded or meltblown fabrics may contain a hydrophilic additive in or on the filaments or microfibers. The film of the surgical drape remains breathable while enabling the laminate to resist penetration by liquids and viruses.

Abstract: The filler of a cigarette rod has a tubular portion made of shredded tobacco and surrounding at least one row of spherical inserts made of aromatic material or aerosol. The tubular portion is made by feeding tobacco shreds against the underside of the horizontal lower reach of a foraminous conveyor belt advancing beneath a suction chamber to accumulate a first layer of shreds. The inserts are delivered to the underside of the first layer and are attracted thereto by suction. A second layer of shredded tobacco is assembled by showering shreds against the underside of the first layer where the second layer underlies the spherical inserts. The thus obtained filler is draped into a web of wrapping material to form a cigarette rod ready to be subdivided into sections of unit or multiple unit length. The spherical inserts are expelled from a revolving receptacle under the action of centrifugal force to form a row which is conveyed toward the underside of and advances with the first layer.

Abstract: This invention relates to a filter for tobacco smoke inhaling/generating/producing device, comprising stipulated amounts of specific grain sizes or combination of grain sizes of activated charcoal for effectively reducing from the mainstream smoke the level of p-benzosemiquinone (p-BSQ), a relatively stable highly reactive major harmful oxidant, without significantly affecting the flavor and taste of the smoke while providing comfortable mouthful of smoke and nicotine delivery, so that the said charcoal filter cigarettes becomes potentially less hazardous safer cigarettes and may be acceptable to the smokers with marked reduction in health risk; the said charcoal filters also effectively reduce the level of nitric oxide and tar from the mainstream smoke.

Abstract: An accessory bag is disclosed having a lower surface, side surfaces, the side surfaces and the lower surface forming a compartment area. A rest area is provided within the compartment area for at least partially securing an accessory item in a desired orientation. A cover is associated with one of the side surfaces. The cover includes an open region for forming a hole through the cover. The rest area is accessible through the open region when the cover is in a closed position.

Abstract: The invention is the use of a chelating agent with an ultrasonic device for the treatment of hair and other fibers. The treatment device includes an ultrasound generator, a comb device responsive to the generated ultrasonic waves, a reflector for reflecting the incident ultrasonic waves disposed on the distal end of the comb device, and a chelating agent preferably disposed within the treatment device. The treatment device efficaciously dispenses the chelating agent and ultrasonically treats the fiber.

Abstract: A flossing device having a double-pronged body, a handle, a piece of floss, a feeding spool, a collecting spool, and a means for advancing the floss. A user flosses using a portion of the floss that is disposed in between the two prongs; the user advances the floss by manipulating the handle. Once the user is finished flossing, the user may close the handle so that the prongs close together. When the prongs are closed together, the flossing device may be conveniently stored in the cavity of, for example, a toothbrush holder by placing the closed prongs inside the cavity.

Abstract: An ultrasonic vibrating apparatus and an ultrasonic cleaning apparatus capable of permitting ultrasonic cleaning of a wafer to be carried out using an existing cleaning tank and while keeping the object immersed in cleaning liquid. An ultrasonic wave is irradiated to a cleaned object while keeping it immersed in cleaning liquid stored in a cleaning tank formed with an upper opening. A vibrating plate is securely mounted thereon with an ultrasonic transducer through a wave transmission element and arranged so as to close the upper opening of the cleaning tank in a cover-like manner. The vibrating plate is so arranged that a vibrating surface thereof downwardly faces and is immersed in the cleaning liquid.

Abstract: A semiconductor substrate cleaning apparatus, a method of cleaning a semiconductor substrate and a method of manufacturing a semiconductor device are obtained, in which reduction of production yield of a semiconductor device can be prevented. The semiconductor substrate cleaning apparatus includes a holding member holding a semiconductor substrate and a cleaning member allowing a cleaning medium to be supplied only to a part of a surface of the semiconductor substrate while the semiconductor substrate held by the holding member is fixed. In such a manner, the cleaning medium is supplied to the semiconductor substrate while the semiconductor substrate is not rotated but fixed, whereby only a part of the surface of the semiconductor substrate can be cleaned.

Abstract: The present invention provides a cleaning sheet that has an enhanced dirt, dust and/or debris pick-up and retention characteristics, which can be used in dry applications and/or wet applications. The cleaning sheet is prepared from a nonwoven web containing plurality of multicomponent multilobal filaments, wherein the multicomponent multilobal filaments have a plurality of raised lobal regions separated by depressed regions. The cleaning sheet also has voids between the plurality of multicomponent multilobal filaments which allow for enhanced dirt, dust and/or debris pick-up and retention. The nonwoven web can be a single layer or a layer of a multilayer laminate. The nonwoven web is optionally electret treated. Also disclosed is a cleaning implement and cleaning kit containing the cleaning sheet.

Abstract: A hand tool adapted to mechanically remove materials such as ice, frost, and/or snow from surfaces such as automobile window glass comprises a longitudinally-extending handle having a front end and a rear end, a scraper disposed adjacent the front end of the handle, a rear grip disposed adjacent the rear end of the handle, and a front grip disposed adjacent the front end of the handle. The rear grip is adapted to facilitate a user applying force to the scraper in a direction generally parallel to the length of the handle to move the scraper along a surface to be scraped, and the front grip is adapted to facilitate a user applying force to the scraper in a direction generally perpendicular to the length of the handle to urge the scraper against the surface to be scraped.

Abstract: A device is described, for dispensing washing agents for a household washing machine, in particular a dishwasher, said dispenser (1) having at least a space (3B) for containing an amount of washing agent necessary for performing a washing cycle, wherein the charging of said amount of washing agent in said space (3B) is performed manually and the dispensing of the washing agent is performed at least partially by gravity. According to the invention, the device comprises at least a dispensing body (3) capable of performing angular or rotary movements around a first axis and angular movements with respect to a second axis.

Abstract: An outer covering wall (26) and an inner covering wall (27), which are capable of surrounding a rotor (24), can be horizontally moved. A wafer carrier waiting portion (30) is disposed right below the rotor (24). A wafer holding member (41) included in a wafer lifter (40) moves into a wafer carrier (C) containing wafers (W) and mounted on a stage (31) (sliding table 32) included in the wafer carrier waiting portion (30), lifts up the wafers (W) and transfers the wafers (W) to the rotor (24). The outer covering wall (26) or the inner covering wall (27) surrounds the rotor (24) to define a processing chamber. The wafers (W) held on the rotor (24) are subjected to a cleaning process in the processing chamber.

Abstract: A system and method have been provided for cleaning integrated circuit and liquid crystal display substrates of organic residue, such as photoresist, using a high concentrate ozonated water. Chilled water is used to increase the ozone concentration in the water to approximately 90 parts per million. The cleaning method is especially effective when used subsequent to an organic stripping process. The etching rates of the combined process are effective, and the use of the high concentrate ozonated water after the organic stripper also removes any contaminants on the substrate accumulated as a result of using the organic stripper.

Abstract: A process for removing residues from the microstructure of an object is provided, which comprises steps of preparing a remover including CO2, an additive for removing the residues and a co-solvent dissolving the additive in said CO2 at a pressurized fluid condition; and bringing the object into contact with the remover so as to remove the residues from the object. An apparatus for implementing the process is also provided.

Abstract: A system for preventing contaminants and particulates from coming into contact with a back side of a workpiece as the workpiece is vacuum held on a chuck or robotic end effector.

Abstract: A wafer guide for supporting at least one semiconductor wafer during a cleaning process, includes side panels having a plurality of side fixing grooves on an upper surface thereof for stabilizing the at least one semiconductor wafer and for maintaining a sufficient distance between a surface of the at least one semiconductor wafer and an adjacent surface; a center panel having a plurality of center fixing grooves on the upper surface thereof for supporting the at least one semiconductor wafer, each of the plurality of center fixing grooves having inner walls, wherein a contact line is formed on each of the inner walls of the center fixing grooves, and wherein the center panel is positioned between the pair of side panels; and a pair of fixing plates, one of the pair of fixing plates being fixedly attached at each end of the center panel and the pair of side panels.