Patents Issued in July 20, 2004
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Patent number: 6765169Abstract: A chamber cover fixing is for arc quenching chambers for low voltage switchgears operating in air. The arc quenching chamber cover is fixed to the arch quenching chamber, by use of interlocking guide and lock elements, without the use of screws. In addition to the sliding guide elements in the arc quenching chamber housing and in the arc quenching chamber cover, one or several clips or locking grooves for engaging the clips are provided.Type: GrantFiled: March 28, 2003Date of Patent: July 20, 2004Assignee: Siemens AktiengesellschaftInventor: Michael Kruschke
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Patent number: 6765170Abstract: A method of single sided spot welding includes the steps of providing a metal tube having a convex surface portion and providing a metal sheet for welding to the metal tube. The method also includes the steps of contacting the metal sheet with the convex surface portion of the metal tube and contacting the metal sheet with a welding electrode. The method further includes the steps of supplying power to the welding electrode for melting metal and solidifying the molten metal to form a weld nugget between the metal sheet and the metal tube.Type: GrantFiled: December 17, 2002Date of Patent: July 20, 2004Assignee: General Motors CorporationInventors: Chih-Chang Chen, Chi-Mou Ni, Michael Gerard Poss, Alexander Michael Turley, Daniel C. Hutchinson
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Patent number: 6765171Abstract: This invention provides a method of welding a flange nut to a workpiece surface using an improved design of a welding electrode. The electrode comprises a parts-receiving recess adapted to receive a stem portion of the nut, while maintaining a clearance between the recess and the stem. This clearance allows electrical current to be directed toward the flange portion of the nut. As a result, electrical contact between the workpiece and projections underlying the flange is greatly improved, thereby produce higher quality spot welds and increasing the life of the electrode tip.Type: GrantFiled: February 28, 2003Date of Patent: July 20, 2004Assignee: General Motors CorporationInventors: James Franklin Hengel, David P. Kelly, Pei-Chung Wang
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Patent number: 6765172Abstract: A method is described that involves scanning a laser beam across and applying a stretching force to a fusion region that is formed by a neighboring pair of optical fibers that include a core and a cladding layer. The scanning and applying occurs while the optical permissiveness of an optical path that flows through the fusion region is monitored.Type: GrantFiled: December 2, 2002Date of Patent: July 20, 2004Assignee: Wavesplitter Technologies, Inc.Inventors: Xu Liu, Tracy Brewer, Frank Liang
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Patent number: 6765173Abstract: A process for producing a lead-acid battery, in which a lead bushing 1 cast in a lid b of an assembled lead-acid battery A and a pole 2 inserted through an insertion hole 3 in the lead bushing 1 are welded together by applying a laser beam 4b thereto. At the time of the laser welding, as desired, a jig 7 is so placed around the lead bushing 1 as to surround it and the laser welding is carried out.Type: GrantFiled: October 23, 2003Date of Patent: July 20, 2004Assignee: Furukawa Battery Co., Ltd.Inventor: Toshikazu Suzuki
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Patent number: 6765174Abstract: A laser groove machining method for forming bottomed grooves in a surface of a workpiece using a laser, wherein an emitting position of a laser beam which is to be emitted onto the workpiece is shifted relatively along groove forming positions at a high speed of 150 mm/min. or faster. Thus, melted portions which are melted by the laser beam can easily be separated, cooled and removed by shifting the laser beam emitting position at high speed. In addition, water may be jetted to the workpiece so as to form a pillar of water so that the laser beam is emitted through the interior of the pillar of water so formed.Type: GrantFiled: January 31, 2002Date of Patent: July 20, 2004Assignee: Denso CorporationInventors: Takeshi Fukushima, Yoshiyuki Horie, Akira Sasaki
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Patent number: 6765175Abstract: The laser irradiation apparatus of the present invention is configured to include a laser and at least two mirrors each having a concave surface for unidirectionally homogenizing an energy density of laser light emitted from the laser. A focal position of a first mirror exists between the first mirror and an irradiation surface. A focal position of a second mirror does not exist between the second mirror and the irradiation surface, but exists behind the irradiation surface. The laser irradiation apparatus thus configured enables laser irradiation of, for example, semiconductor films.Type: GrantFiled: November 25, 2002Date of Patent: July 20, 2004Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Koichiro Tanaka, Tomoaki Moriwaka
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Patent number: 6765176Abstract: A device (1) for machining materials by means of a laser beam (2) comprises a lens arrangement (4) through which passes the light emitted by a laser source. Said lens arrangement (4) is tilted relative to the optical axis (5) and arranged eccentrically in order to change the cross-sectional area of the laser beam (2), particularly from an elliptical to a circular geometry, and at the same time to compensate an inclination angle of the laser beam passing through the lens arrangement in relation to the optical axis. This makes it possible to ensure the quality of the cut surface through essentially corresponding entry and exit cross-sectional areas of the laser beam (2) on the material, without the laser beam (2) having to be circularly polarized for this purpose. The costs for producing the device (1) can thereby be kept comparatively low.Type: GrantFiled: May 29, 2002Date of Patent: July 20, 2004Assignee: LPKF Laser & Electronics AGInventor: Gennadij Kusnezow
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Patent number: 6765177Abstract: The present invention provides a laminated glass sheet for windshield that includes a transparent conductive film and enables ITS communication. The laminated glass sheet includes a first bus-bar aranged along an upper end of the laminated glass sheet, and a second bus-bar arranged along a lower end of the laminated glass sheet, and the first busbar includes a protruding portion that extends toward the second bus-bar, and the transparent conductive film is not formed in a concave portion that is formed by the protruding portion. Since the concave portion can be used for the communication, the conductive film may be free from an opening.Type: GrantFiled: January 24, 2003Date of Patent: July 20, 2004Assignee: Nippon Sheet Glass Company, LimitedInventors: Tatsuya Noguchi, Satoshi Furusawa
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Patent number: 6765178Abstract: Embodiments of the invention generally provide an apparatus and a method for providing a uniform thermal profile to a plurality of substrates during heat processing. In one embodiment, a cassette containing one or more heated substrate supports is moveably disposed within a heating chamber having an about uniform thermal profile therein to more uniformly heat the substrates.Type: GrantFiled: December 18, 2001Date of Patent: July 20, 2004Assignee: Applied Materials, Inc.Inventors: Quanyuan Shang, Janine Kardokus, Akihiro Hosokawa
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Patent number: 6765179Abstract: An electric radiant heater (11, 111) is provided having an active sensor (21, 121) for detecting the position of a cooking vessel on a glass ceramic plate over the radiant heater (11, 111). The sensor (21, 121) is mad from electrically conductive material and is part of an inductive resonant circuit of a control operating by resonant circuit detuning. It also covers a heating zone (17, 117) of the radiant heater (11, 111). The sensor (21, 121) runs substantially linearly and, unlike conventional sensor coils, has a loopless construction. It is e.g. possible to stretch a wire (121) or also to use the tube (21) of a rod regulator.Type: GrantFiled: July 9, 2002Date of Patent: July 20, 2004Assignee: E.G.O. Elektro-Geraetebau GmbHInventors: Eugen Wilde, Erich John, Wilfried Schilling
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Patent number: 6765180Abstract: A cycle skipping power control apparatus comprising: a power controller adapted for receiving a power command and a switch closure feedback signal and for generating a high resolution pulse command; and a pulse generator adapted for receiving the high resolution pulse command and, optionally, the power command, and generating a compensated enable pulse and the switch closure feedback signal.Type: GrantFiled: December 22, 2002Date of Patent: July 20, 2004Assignee: General Electric CompanyInventors: Harry Kirk Mathews, Jr., John Stanley Glaser
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Patent number: 6765181Abstract: An apparatus and process are provided for induction heat treatment of electrically conductive workpieces. The inductor assembly is formed from a single piece inductor that utilizes an electrically non-conductive top, side and bottom frames to hold flux concentrators in place over the sides of the inductor. Flux concentrators can be changed by unfastening the frame members, removing the existing flux concentrators, inserting new flux concentrators, and fastening the frame members. One or more of the frame members may serve as a receiving chamber for supply of a quench medium to an induction heated workpiece positioned in an opening in the inductor.Type: GrantFiled: September 16, 2003Date of Patent: July 20, 2004Assignee: Inductoheat, Inc.Inventors: Madhu S. Chatterjee, Byron L. Taylor, Micah Robert Black
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Patent number: 6765182Abstract: The heating effect of a microwave susceptor can be improved by providing a pattern of microwave transparent areas in the susceptor. The transparent areas are preferably circles having a diameter of about 0.5 inch. The distance between adjacent circles is preferably about 0.5 inch. The susceptor may be used to brown and crispen the crust of frozen pizza heated in a microwave oven. The crust of the pizza is browner, especially at its central area, than the crust of pizza heated using a conventional susceptor.Type: GrantFiled: April 9, 2002Date of Patent: July 20, 2004Assignee: Graphic Packaging International, Inc.Inventors: Lorin R. Cole, Terrence P. Lafferty
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Patent number: 6765183Abstract: A microwave oven food & drink enclosure assembly for keeping the insides of the microwave oven clean from splatters. The microwave oven food & drink enclosure assembly includes a plurality of panels being detachably attached to form an enclosure in which food and drink can be supported in a microwave oven to keep interior walls of the microwave oven clean during the use thereof; and also includes an assembly of connecting the panels together.Type: GrantFiled: June 16, 2003Date of Patent: July 20, 2004Inventor: Christopher J. Torres
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Patent number: 6765184Abstract: A smoke guiding apparatus of a wall-mounted microwave oven. A driving circuit of the smoke guiding apparatus includes limit switches which are turned on or off according to a moving position of a guide plate of the smoke guiding apparatus, a relay coil which is supplied with power in response to an exhaust motor of the microwave oven being operated, and a plurality of relay switches which are turned on or off by the supply of power to the relay coil. The driving circuit is implemented without using a conventional microcomputer. Accordingly, the entire manufacturing cost of the microwave oven is reduced. The instant smoke guiding apparatus can be applied to mechanical microwave ovens which are not provided with microcomputers. Furthermore, the driving circuit can drive a smoke guiding apparatus having an AC feed motor, as well as a DC feed motor, thus enabling the AC feed motor to be applied to the smoke guiding apparatus.Type: GrantFiled: December 9, 2002Date of Patent: July 20, 2004Assignee: Samsung Electronics Co., Ltd.Inventor: Ha-Yeong Yang
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Patent number: 6765185Abstract: The contrast between solder balls and substrate of a Ball Grid Array (BGA) as visualized by a camera of a computer vision system is improved sufficiently to enable reliable recognition in the poor contrast situation when the balls are silver colored and the substrate background is white or light colored by illuminating the BGA with polarized light, and the camera viewing the light reflected from the BGA via a polarization filter oriented to not pass light reflected from the solder balls but to pass light reflected from the substrate.Type: GrantFiled: October 4, 2001Date of Patent: July 20, 2004Assignee: Koninklijke Philips Electronics N.V.Inventor: Michael Thomas Swab
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Patent number: 6765186Abstract: An imager includes an array of imager cells coupled to a multi-mode controller. The multi-mode controller includes circuitry that implements several modes of operation, including a high-light mode, a low-light mode, and a Snap mode. The high-light mode provides charge accumulation in a photoreceptor potential well, a readout potential well, and a sense node potential well. The low-light mode provides charge accumulation in the photoreceptor potential well constrained by an integration potential well. The Snap mode of operation simultaneously transfers accumulated charge for a set of the imager cells to their sense nodes. In addition, the multi-mode controller may select one of a plurality of V+ integration voltages for setting up a selected charge capacity in one of the imager cells. Thus, the V+ integration voltage may be increased to provide charge capacity to address increased light levels.Type: GrantFiled: April 30, 2002Date of Patent: July 20, 2004Assignee: ESS Technology, Inc.Inventor: James Janesick
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Patent number: 6765187Abstract: Provided are imaging apparatus and radiation detecting apparatus with high sensitivity. An imaging apparatus has a photoelectric conversion layer 16 for converting incident light into charge, on an insulating substrate, an electrode layer 17 formed on the photoelectric conversion layer 16, and a protective layer 37 formed on the electrode layer 17, and satisfies relations of na−nb≦1.5 and nb−nc≦1.5 where na is a refractive index of the photoelectric conversion layer 16, nb a refractive index of the electrode layer 17, and nc a refractive index of the protective layer 37.Type: GrantFiled: June 25, 2002Date of Patent: July 20, 2004Assignee: Canon Kabushiki KaishaInventors: Takamasa Ishii, Masakazu Morishita, Chiori Mochizuki
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Patent number: 6765188Abstract: In a video receiver, a photodiode is terminated with one or more junction diodes to provide an output voltage that is a log function of the incident optical power. The termination with the diode provides a nonlinear resistance which converts the output current of the photodiode to a voltage, with the output voltage being the log of the input current due to the nonlinear resistance characteristic associated with junction diodes. The subject system eliminates the necessity of providing a transimpedance amplifier used to obtain a voltage from the photo current of a photodetector and also the requirements for a log amplifier to provide the log of the voltage to give the receiver a wide dynamic range. In one embodiment a PIN diode is provided with a series of termination diodes, with the larger of the number of diodes, the more voltage that is available. The series-connected termination diodes provide a passive low noise system for converting the photo current to a log voltage.Type: GrantFiled: January 4, 2002Date of Patent: July 20, 2004Assignee: BAE Systems Information and Electronic Systems Integration Inc.Inventor: Lester R. Brodeur
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Patent number: 6765189Abstract: A switched multichannel fiber optic power monitoring apparatus, includes a plurality of photodetectors, each connected to a tap of a different optical line for converting an optical signal therefrom to an electrical signal, a single switch having inputs connected to outputs of each of the photodetectors for receiving the output electrical signal from each photodetector and for switching the output electrical signals in a multiplexed manner to an output thereof as a multiplexed electrical signal, an amplifier amplifying the multiplexed electrical signal, an analog to digital converter which converts the amplified electrical signal to a digital signal, and a microprocessor which provides an output measurement signal in response to the digital signal, the microprocessor being connected to the switch to control the length of time that the switch is open for each optical line, and connected with the amplifier to control amplification thereof.Type: GrantFiled: November 20, 2002Date of Patent: July 20, 2004Assignee: Santec U.S.A. CorporationInventors: Saroj Kumar Sahu, Richard A. Cordasco
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Patent number: 6765190Abstract: A multi-element optical detector system includes an electrically resistive screen that is substantially transparent to radiation energy having a wavelength of interest. A plurality of electron transfer elements (e.g., a low work function photoactive material or a carbon nanotube (CNT)-based element) are provided with each having a first end and a second end. The first end of each element is spaced apart from the screen by an evacuated gap. When the radiation energy passes through the screen with a bias voltage applied thereto, transfer of electrons through each element is induced from the first end to the second end such that a quantity indicative of the electrons transferred through each element can be detected.Type: GrantFiled: March 13, 2002Date of Patent: July 20, 2004Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space AdministrationInventor: Jeffrey D. Jordan
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Patent number: 6765191Abstract: The disclosed roller switch has a roller, a flag arm, and a photoelectric detector. The roller is connected to the flag arm and vertical movement of the roller causes the flag arm to move. The movement of the flag arm causes the photoelectric detector to send a signal. The signal may be used to measure the length of a material passing under the roller. The inventive roller switch has a pair of flag arms, and the roller is mounted on a shaft extending between the pair of flag arms. By providing a pair of flag arms connected by the roller, the roller switch is more robust and durable. The roller switch is also capable of pivoting across a conveyor belt.Type: GrantFiled: August 20, 2001Date of Patent: July 20, 2004Assignee: The Goodyear Tire & Rubber CompanyInventors: Brian Darrell Hollis, Robert Albert Lammlein, Jr., Thomas Alan Murray, Raymond Patrick Eckman, William George Burton
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Patent number: 6765192Abstract: The invention relates to a moving assembly for a working system, said assembly including: a boom (22) extending along an axis between first and second ends (31, 33) and a working head (30) mounted on said boom; first and second lateral obstacle sensor systems (40, 42, 77, 83, 90, 92, 100, 102) mounted at each end of the boom; and respective first and second optical systems (50, 52, 60, 62, 75, 79) fixed to the first and second lateral obstacle sensor systems to detect the presence of an obstacle on the path of the boom and movement and/or deformation of one lateral obstacle sensor system relative to the other one.Type: GrantFiled: June 24, 2002Date of Patent: July 20, 2004Assignee: Lectra SAInventors: Denis Maurin, Eric Terrasse
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Patent number: 6765193Abstract: Optical touch switches are implemented based on the use of light total internal reflection and light scattering concepts. The optical touch switch basically consists of a light source, a light guide, a photodetector, and an electronic controller. The fingertip touching on the touching surface of the optical touch switch leads to the change in electrical current produced by the photodetector. As a result, the electronic control box senses this change of electrical current and allows the electrical load to stay at the desired state. Key advantages include ease of implementation, prevention of the light beam incident directly on the user's eyes, and ability to accept both strong and weak mechanical forces from users.Type: GrantFiled: August 21, 2002Date of Patent: July 20, 2004Assignee: National Science and Technology Development AgencyInventor: Sarun Sumriddetchkajorn
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Patent number: 6765194Abstract: An arrangement for determining measured values, in particular measured pressure values, strain values, or temperature value, using a plurality of optical fiber Bragg grating sensors. The optical fiber Bragg grating sensors are combined to form various arrays of optical fiber Bragg grating sensors that are arranged one behind the other, are connected by fiber optics, and exhibit different frequency selectivities. Delay elements are assigned to these arrays. The Bragg grating sensors receive a uniform query signal representing a time-differentiated, frequency-selective light. The frequency-selective Bragg grating sensors of the various arrays generate partial signals. The partial signals, separated temporally from one another by the delay elements, form a sequence of partial signals.Type: GrantFiled: March 22, 2001Date of Patent: July 20, 2004Assignee: DaimlerChrysler AGInventors: Michael Holz, Michael Trutzel
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Patent number: 6765195Abstract: This invention presents a two-dimensional absolute optical encoder and a method for determining position of an object in accordance with information from the encoder. The encoder of the present invention comprises a scale having a pattern being predetermined to indicate an absolute location on the scale, means for illuminating the scale, means for forming an image of the pattern; and detector means for outputting signals derived from the portion of the image of the pattern which lies within a field of view of the detector means, the field of view defining an image reference coordinate system, and analyzing means, receiving the signals from the detector means, for determining the absolute location of the object. There are two types of scale patterns presented in this invention: grid type and starfield type.Type: GrantFiled: May 22, 2002Date of Patent: July 20, 2004Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space AdministrationInventor: Douglas B. Leviton
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Patent number: 6765196Abstract: The invention relates to a pressure sensor comprising a housing (12), a membrane (26) arranged in said housing and which can be deflected by the pressure to be measured, a light source (LED) having an optical axis, a light detector having an optical axis and a light blocker (36) that is coupled to the membrane and that can be deflected thereby, the blocker being arranged in the beam path of the light source. The light source and the light detector are arranged inside the housing (12), wherein their optical axes lie parallel to one another. A first prism (40) is assigned to the light source and a second prism (42) is assigned to the light detector in such a way that an uninterrupted beam path from the light source through both prisms to the light detector is obtained. To this end, the light blocker (36) is arranged between the two prisms.Type: GrantFiled: November 22, 2002Date of Patent: July 20, 2004Inventors: Detlef Schulz, Gerhard Kurz
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Patent number: 6765197Abstract: A compound refractive lens for neutrons is provided having a plurality of individual unit Fresnel lenses comprising a total of N in number. The unit lenses are aligned substantially along an axis, the i-th lens having a displacement ti orthogonal to the axis, with the axis located such that ∑ i = 1 N ⁢ ⁢ t i = 0. Each of the unit lenses comprises a lens material having a refractive index decrement &dgr;<1 at a wavelength &lgr;<200 Angstroms.Type: GrantFiled: September 27, 2001Date of Patent: July 20, 2004Assignee: Adelphi Technology Inc.Inventors: Melvin A. Piestrup, Richard H. Pantell, Hector R. Beguiristain
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Patent number: 6765198Abstract: An ion trap mobility spectrometer is provided. The ion trap mobility spectrometer employs algorithms to simultaneously detect and analyze both positive and negative plasmagrams. Selectivity is improved by detecting the presence of peaks in both spectra and setting logic filters which require the presence or absence of certain peaks in both spectra. Selectivity is improved by looking for two peaks in the two spectra.Type: GrantFiled: March 20, 2002Date of Patent: July 20, 2004Assignee: General Electric CompanyInventors: Anthony Jenkins, William J. McGann
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Patent number: 6765199Abstract: A method for processing time-dependent signal data is disclosed. The time-dependent signal data are received in a memory, wherein the time-dependent signal data represent a time-dependent signal, and wherein the time-dependent signal data include representations of time-of-flight values of ions, or values derived from time-of-flight values of ions. The time-dependent signal data are scaled with a time-dependent scaling function.Type: GrantFiled: July 10, 2002Date of Patent: July 20, 2004Assignee: Ciphergen Biosystems, Inc.Inventors: Michael G. Youngquist, Edward Gavin, William E. Rich
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Patent number: 6765200Abstract: In order to provide an equipment that permits easy elimination of interference ions even in a low resolution mass spectrometer, the isotope mass number information and the isotope presence ratio information for each element are stored, and processing is done as is shown in FIG. 1 using such information and the measurement results, and the amount of target elemental ions is calculated by calculating and eliminating the amount of interference caused by other elemental isotopes to the target element. Because of this, when carrying out element analysis using a mass spectrometer with a relatively low resolution, the user can easily obtain the measurement result of the amount of any target elemental ions.Type: GrantFiled: February 23, 2001Date of Patent: July 20, 2004Assignee: Hitachi, Ltd.Inventors: Akira Maekawa, Akira Owada, Yasushi Terui
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Patent number: 6765201Abstract: An ultraviolet laser-generating device, for use in a defect inspection apparatus and a method thereof, etc., comprising: a laser ray source for irradiating and emitting a basic wave of laser ray therefrom; a wavelength converter device for receiving the basic wave of laser ray emitted from the laser ray source and for converting it into an ultraviolet laser ray composed of a multiplied high harmonic light of the basic wave of laser ray; and a container having an inlet window, upon which the basic wave of laser ray emitted from the laser ray source is incident upon, and an outlet window for emitting the ultraviolet laser ray composed of the multiplied high harmonic light of the basic wave of laser ray, and installing the wavelength converter device therein, wherein the container is hermetically sealed and is filled up with an inert gas, such as nitrogen or argon gas, therein.Type: GrantFiled: January 19, 2001Date of Patent: July 20, 2004Assignee: Hitachi, Ltd.Inventors: Sachio Uto, Minoru Yoshida, Toshihiko Nakata, Shunji Maeda
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Patent number: 6765202Abstract: The microscope (2) is substantially similar to the configuration of a conventional microscope. The microscope (2) comprises a foot element (4) on which a column (6) sits. An arm (8) is mounted or shaped onto the column (6). Located in the vicinity of the front end (10) of the arm (8) is an optical unit (12) that defines an optical axis (16). One or more of the objectives (18) or (22) mounted on the revolving nosepiece (20) are configured as so-called “objectives for scanning electron microscopy” (electron beam objectives). The size of the electron beam objectives is comparable to the size of objectives for conventional microsopes. Because the objectives (18) and (22) are arranged on a revolving nosepiece (20), on a slider, or on another mechanical and/or electromechanical component, it a quick and easy matter to change among different magnifications or illumination types.Type: GrantFiled: February 15, 2001Date of Patent: July 20, 2004Assignee: Leica Microsystems Wetzler GmbHInventor: Fritz Juergen Hohn
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Patent number: 6765203Abstract: A substrate holding pallet assembly of the present invention comprises a pallet for holding a substrate on upper face thereof, and a probe laid on said pallet from above so as to hold said substrate between said pallet and said probe. Also, a substrate inspection device of the invention comprises a chamber having an exhauster for exhausting the chamber into a high vacuum state, an electron beam generator for radiating an electron beam to the substrate, and a secondary electron detector for detecting a secondary electron generated from the substrate by radiation of electron beam from the electron beam generator, a pallet for holding the substrate on upper face thereof, and a probe laid on said pallet from above so as to hold said substrate between said pallet and said probe.Type: GrantFiled: January 31, 2003Date of Patent: July 20, 2004Assignee: Shimadzu CorporationInventor: Alan Abel
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Patent number: 6765204Abstract: The edges of the reticle are detected with respect to the microstructured patterns exposed by the stepper, and the shapes of the microstructured patterns at the surface and at the bottom of the photoresist are detected. The microstructured patterns are evaluated by calculating, and displaying on the screen, the dislocation vector that represents the relationship in position between the detected patterns on the surface and at the bottom of the photoresist. Furthermore, dislocation vectors between the microstructured patterns at multiple positions in a single-chip or single-shot area or on one wafer are likewise calculated, then the sizes and distribution status of the dislocation vectors at each such position are categorized as characteristic quantities, and the corresponding tendencies are analyzed. Thus, stepper or wafer abnormality is detected.Type: GrantFiled: March 18, 2003Date of Patent: July 20, 2004Assignee: Hitachi, Ltd.Inventors: Fumihiro Sasajima, Osamu Komuro, Fumio Mizuno
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Patent number: 6765205Abstract: An electron microscope including an apparatus for x-ray analysis, is capable of performing elemental analysis with X-rays emitted from a specimen by electron beam irradiation, that is, inspection of foreign particles, for enhancement of yields in manufacturing, at high speed and with high precision and high space resolving power. The current quantity of the electron beam is automatically controlled such that an X-ray count rate falls within a range of 1000 to 2000 counts per second, a plurality of X-ray energy regions are set up when checking an X-ray spectrum against reference spectra stored in a database for analysis of the X-ray spectrum, matching is performed for each of the X-ray energy regions, and the distribution of the elements observed is analyzed on the basis of an intensity ratio between X-ray sample spectra obtained by electron beam irradiation at not less than two varied acceleration voltages.Type: GrantFiled: June 24, 2003Date of Patent: July 20, 2004Assignee: Hitachi High-Technologies CorporationInventors: Isao Ochiai, Toshiei Kurosaki, Toshiro Kubo, Naomasa Suzuki
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Patent number: 6765206Abstract: An image reading method for forming an image on a transmission original irradiated with visible light and infrared light by an image forming optical system and reading the image by reading means, comprising an image forming magnification correction step of correcting a difference between the image forming magnification of a visible-light image and the image forming magnification of an infrared-light image by the image forming optical system, so that the image reading apparatus can be miniaturized and simplified and defects such as foreign matters and flaws on the original can adequately be corrected.Type: GrantFiled: May 11, 2000Date of Patent: July 20, 2004Assignee: Canon Kabushiki KaishaInventors: Miho Sugiyama, Hiroyuki Wada
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Patent number: 6765207Abstract: A method of producing a transition edge sensor comprises depositing a sensing material upon a substrate to form a sensing layer having an associated transition temperature. The transition temperature for the sensing layer is selected as desired. The desired transition temperature is produced by controlling the temperature of the substrate for the deposition process.Type: GrantFiled: April 30, 2002Date of Patent: July 20, 2004Assignee: Oxford Instruments Superconductivity LimitedInventors: David John Goldie, Erdan Gu
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Patent number: 6765208Abstract: A dosimetry method exposes more than one thermoluminescence crystals to radiation without using conventional filters, and reads the energy stored in the crystals by converting the energy to light in a conventional manner, and then filters each crystal output in a different portion of the spectrum generated by the crystals.Type: GrantFiled: September 17, 2001Date of Patent: July 20, 2004Assignee: Sandia CorporationInventor: Scottie W. Walker
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Patent number: 6765209Abstract: An IR sensing device including a sensing element configured as a three terminal device, a differential signal processing circuit and an electrical connection to the conductive housing.Type: GrantFiled: October 18, 2001Date of Patent: July 20, 2004Assignee: Melexis NVInventors: Viktor V. Kassovski, Steven J. Verlinden, Roger V. Diels
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Patent number: 6765210Abstract: A bolometer-type infrared sensor using a resistor with a hysteresis in its thermal characteristic of resistance increases the sensitivity. A first temperature controller raises or drops the temperature of the diaphragm from its outside. A second temperature controller raises the temperature of the diaphragm from its inside by supplying electricity to the bolometer film. The first temperature controller defines a lower-side temperature of a temperature cycle while the first and second temperature controllers define an upper-side temperature thereof. The temperature of the diaphragm is controlled according to the temperature cycle. A signal on the diaphragm is read out at the upper-side temperature.Type: GrantFiled: August 1, 2002Date of Patent: July 20, 2004Assignee: NEC CorporationInventor: Naoki Oda
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Patent number: 6765211Abstract: An infrared absorption spectrometer features an optical microcavity, and a waveguide that evanescently couples light into the microcavity. The optical resonance frequency of the microcavity is tuned to coincide with an atomic or molecular resonance frequency of a selected atom or molecule. In this way, light coupled into the microcavity will experience absorption in the presence of an atomic or molecular subtance. The absorption causes a measurable change in the evanescent light coupling into the microcavity. The detection sensitivity of the spectrometer is significantly increased, compared to prior art spectrometers, because of the high Q value of the microcavity and the ensuing long optical path lengths of the resonant modes traveling within the microcavity.Type: GrantFiled: June 28, 2001Date of Patent: July 20, 2004Assignee: The Charles Stark Draper Laboratory, Inc.Inventors: Haig Charles Tapalian, Juha-Pekka Laine
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Patent number: 6765212Abstract: An inspection system for verifying package contents comprises a spectrometer having an input for receiving light energy and a light energy aggregator. The light energy aggregator comprises a light energy input terminal, a light energy output terminal, where the light energy output terminal is coupled to the spectrometer input, and at least two sample probes coupled to the light energy input terminal. Each of the sample probes is configured to direct light energy from a source to the light energy input terminal.Type: GrantFiled: December 20, 2001Date of Patent: July 20, 2004Assignee: Analytical Spectral Devices, Inc.Inventors: Alexander Goetz, Brian Curtiss, Robert J. Faus, Leonid G. Feldman
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Patent number: 6765213Abstract: A semiconductor coincidence detector device including at least a first and a second detector crystal array, each having a first and second surface, an array of pixellated anodes formed on each of the first surfaces, an array of segmented cathodes formed on each of the second surfaces, essentially each of the pixellated anodes being connected to an anode electronic channel for generating a first electrical signal corresponding to the energy of a photon impinging in the semiconductor, and essentially each of the segmented cathodes being connected to a cathode electronic channel for generating an electrical coincidence trigger signal on detection of a photon impinging in the semiconductor, the first electrical signal being read only from anodes located opposite the cathode segment generating the trigger signal.Type: GrantFiled: July 30, 2001Date of Patent: July 20, 2004Assignee: Imarad Imaging Systems Ltd.Inventors: Arie Shahar, Uri El-Hanany, Alex Tsigelman, Shimon Klier, Eldan Halberthal
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Patent number: 6765214Abstract: A radiation dosimeter providing an indication of the dose of radiation to which the radiation sensor has been exposed. The dosimeter contains features enabling the monitoring and evaluating of radiological risks so that a user can concentrate on the task at hand. The dosimeter provides an audible alarm indication that a predetermined time period has elapsed, an audible alarm indication reminding the user to check the dosimeter indication periodically, an audible alarm indicating that a predetermined accumulated dose has been prematurely reached, and an audible alarm indication prior or to reaching the ¾ scale point.Type: GrantFiled: February 13, 2002Date of Patent: July 20, 2004Assignee: The United States of America as represented by the United States Department of EnergyInventors: William J. Kosslow, Gregory S. Bandzuch
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Patent number: 6765215Abstract: The present invention relates to an ionization source having a chamber for ionizing a sample. The ionization chamber has surfaces to reduce the overall interaction with reactive samples. The inner surface walls of the ionization chamber or the ionization chamber may be formed from an inert super alloy. For instance, Inconel™ 625, Inconel™ 601 or Hastelloy®) may comprise the ionization chamber or the surface walls of the ionization chamber. The invention also includes a method for reducing the interaction of a reactive analyte with an ion source.Type: GrantFiled: June 28, 2001Date of Patent: July 20, 2004Assignee: Agilent Technologies, Inc.Inventor: Patrick D. Perkins
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Patent number: 6765216Abstract: A method and device are presented for producing an intensive flow of atoms from an input flow of a molecular gas. Effects of ignition of a gas discharge of a complex type and dissociation of the gas molecules by electron impact in a discharge cell are utilized. The flow of atoms is output from the discharge cell through at least one emitting aperture. The complex gas discharge is composed of a main discharge and two auxiliary discharges of different types ignited in substantially coinciding zones of the discharge cell. The main discharge is an arc Penning discharge ignited in the vicinity of at least one emitting aperture. The first auxiliary discharge is a magnetron discharge with heated cathode, and the second auxiliary discharge is either a Penning discharge, or a Penning discharge with hollow cathode. The dissociation of the gas molecules is thereby carried out in the complex discharge and results in creation of the flow of hot and thermally atoms.Type: GrantFiled: March 4, 2002Date of Patent: July 20, 2004Assignee: Atomic Hydrogen Technologies Ltd.Inventors: Valery A. Kagadei, Dmitry I. Proskurovsky
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Patent number: 6765217Abstract: Charged-particle-beam (CPB) mapping projection-optical systems and adjustment methods for such systems are disclosed that can be performed quickly and accurately. In a typical system, an irradiation beam is emitted from a source, passes through an irradiation optical system, and enters a Wien filter (“E×B”). Upon passing through the E×B, the irradiation beam passes through an objective optical system and is incident on an object surface. Such impingement generates an observation beam that returns through the objective optical system and the E×B in a different direction to a detector via an imaging optical system. An adjustment-beam source emits an adjustment beam used for adjusting and aligning the position of, e.g., the object surface and/or the Wien's condition of the E×B. The adjustment beam can be off-axis relative to the objective-optical system. For such adjusting and aligning, fiducial marks (situated, e.g.Type: GrantFiled: April 28, 1999Date of Patent: July 20, 2004Assignee: Nikon CorporationInventors: Hiroshi Nishimura, Naoto Kihara, Kinya Kato, Toru Takagi, Akihiro Goto, Junji Ikeda, Kazuya Okamoto
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Patent number: 6765218Abstract: In a lithographic projection apparatus the positions and/or orientations of reflective optical elements is dynamically controlled. The position of a reflective optical element such as a mirror in an illumination or projection system is first measured using an absolute position sensor mounted on a reference frame and thereafter measured by a relative position sensor also mounted on said reference frame. The position of the element is controlled in accordance with the measured position, e.g. to maintain it stationary in spite of vibrations that might otherwise disturb it. The absolute sensor may be a capacitive or inductive sensor and the relative sensor may be an interferometer.Type: GrantFiled: March 12, 2003Date of Patent: July 20, 2004Assignee: ASML Netherlands B.V.Inventors: Erik R. Loopstra, Antonius J. J. van Dijsseldonk