Abstract: A laser groove machining method for forming bottomed grooves in a surface of a workpiece using a laser, wherein an emitting position of a laser beam which is to be emitted onto the workpiece is shifted relatively along groove forming positions at a high speed of 150 mm/min. or faster. Thus, melted portions which are melted by the laser beam can easily be separated, cooled and removed by shifting the laser beam emitting position at high speed. In addition, water may be jetted to the workpiece so as to form a pillar of water so that the laser beam is emitted through the interior of the pillar of water so formed.

Abstract: A multi-axis laser machine in which the working efficiency can be improved even when machining positions in respective systems are different from each other. The positioning operation of a laser positioning unit for positioning an optical path of a laser beam in an axis and the positioning operation of another laser positioning unit for positioning another optical path of the laser beam in another axis are performed independently of each other. An arbitration unit monitors the laser positioning units as to whether they have finished positioning or not. The arbitration unit operates a deflection unit (AOM) so as to supply the laser beam to one of the laser positioning units which has finished positioning. Incidentally, when the laser positioning units finish positioning simultaneously, the arbitration unit supplies the laser beam to the laser positioning units in a predetermined sequence.

Abstract: High-frequency AC voltage with a frequency in a range of from 60 to 100 kHz supplied from a power source at 3 to 15 kV is applied to an electrical conductor within about 30 cm of a cableway. The high-frequency AC voltage generates an alternating electric field. Capacitive AC current associated with the alternating electric field flows through the ice on the cableway and on the electrical conductor, causing dielectric loss heat that melts the ice.

Abstract: An electric heating assembly includes a cooking plate (4) having a lower surface (6) relative to which is supported an electric heater (10) and an upper surface (8) adapted to receive a cooking utensil (12) on a heating zone (14) overlying the electric heater. The electric heater incorporates an electric heating element (22) and a temperature-responsive device (32) adapted to monitor temperature of the cooking utensil through the cooking plate at a predetermined region (34) of the overlying heating zone. The predetermined region is provided with visual identification (44) on the upper surface of the cooking plate for location of the cooking utensil at least partially over the visual identification.

Abstract: A self heating thermal protector located in close proximity to a remotely located incandescent light fixture for controlling the flow of current to the lighting fixture by measuring the rate of heat flow from a dedicated heat source. Current is permitted to flow to the lighting fixture when the temperature of the self heating thermal detector is sufficient to avoid deterioration of electrical components such as plastic parts and wire insulation in the associated fixture. The thermal detector interrupts the flow of current to the associated fixture when the temperature of the self heating thermal protector increases to a temperature that is not safe.

Abstract: An electrical resistance heating element having a glow zone and two power supply terminals. The glow zone of the element is tubular. A tubular union is provided between each of the power supply terminals and a respective end of the glow zone, wherein the inner diameter of the union is smaller than the inner diameter of the glow zone. A transition region extends between each union and a respective glow zone end and has a progressively decreasing wall thickness in the direction from the union toward the glow zone.

Abstract: An in-line heater for use in semiconductor wet chemical processing comprises a single crystal alumina substrate, a resistive heating element disposed on the single crystal alumina substrate, and a protective layer disposed over the resistive heating element. The single crystal alumina substrate has a moderate coefficient of thermal expansion (CTE) that is substantially equivalent to the CTEs of the resistive heating element and the protective layer. Therefore, cracking between the substrate and the protective layer can be minimized. The in-line heater in accordance with this invention exhibits an excellent corrosion-resistance capability even at high temperature and can carry a wide variety of corrosive chemicals including hydrofluoride solution.

Abstract: Non-invasive microwave analysis systems and methods determine scattered phase data for a liquid in a container. A transmitter antenna situated within coupling liquid separated from the container by a flexible membrane transmits microwaves that scatter from the container and the liquid in the container. One or more receiver antennas within the coupling liquid convert the microwaves into microwave electronic signals that are processed to determine the scattered phase data. Non-invasive microwave analysis systems and methods image a portion of a biological subject. A transmitter antenna situated within coupling liquid separated from the subject by a flexible membrane transmits microwaves that scatter from the container and the subject. One or more receiver antennas within the coupling liquid convert the microwaves into microwave electronic signals that are processed to reconstruct a cross-sectional image of the subject.

Abstract: A toaster-cum-microwave oven includes a toasting chamber, a heating device, a humidity measuring device for measuring an inside humidity of the toasting chamber and producing a humidity signal indicating the measured inside humidity, a switching device for selectively cutting or allowing a power supply to the heating device, and a controlling device. The controlling device receives the humidity signal, calculates a rate of change of humidity using the humidity signal, compares the rate of change of humidity with a predetermined value, and controls the switching device to cut the power supply to the heating device after a remaining cooking time has lapsed if the rate of change of humidity is equal to or greater than the predetermined value.

Abstract: Devices, systems, and methods for processing sample materials. The sample materials may be located in a plurality of process chambers in the device, which is rotated during heating of the sample materials.

Abstract: Apparatus for circularizing an optical beam and directing the beam into an optical system has mutually perpendicular X, Y, and Z axes. The Z-axis is the propagation axis of the beam. A detector arrangement receives a sample of the optical beam. The detector arrangement has four detector elements arranged in four quadrants defined by an x-axis and a y-axis of the detector arrangement, perpendicular to each other. The x and y-axes of the quadrant detector are arranged at 45 degrees to the X and Y-axes of the apparatus. Signals from the four detector elements provide information on the extent to which the beam is not circular and on any displacement of the beam in the X and Y-axes.

Abstract: Provided is a solar position tracing sensor having a high resolving power by using a temperature coefficient and heat conductivity of fine patterns on a printed circuit board (PCB). The solar position tracing sensor is reliable and has a wide application ranges for both celestial and terrestrial applications. It can be produced in mass at cheep cost. The solar position tracing sensor includes: a light condenser for condensing and filtering sunlight; a PCB having light reception patterns on the top and bottom surfaces; a heat protection plate for preventing the temperature of the entire PCB from being increased; a reference voltage supplier for providing a reference voltage source to find out a specific light reception pattern whose temperature is increased from radiation of the sunlight; and a voltmeter for measuring alteration in voltage based on the alteration in a temperature coefficient of the light reception pattern with increased temperature.

Abstract: The present invention provides an illumination management system that includes a first LED that outputs a first signal when exposed to a first spectrum of light, the first signal indicating an intensity of light from the first spectrum; a second LED that outputs a second signal when exposed to a second spectrum of light, the second signal indicating an intensity of light from the second spectrum and wherein the second spectrum includes at least some wavelengths that are not in said first spectrum. In some embodiments, more LEDs could be included in the system for associating the presence of light energy from different parts of the light spectrum. Also included is light control circuitry, coupled to the LEDs, configured to generate a lighting control signal that can be output to one or more lights to adjust the lights to a desired light level, wherein the lighting control signal varies in response to said first and second signals.

Abstract: A light beam detection device includes a light-receiving element for receiving a light beam and outputting a detection signal. A light detection circuit generates and outputs a light-emission signal based on the detection signal. A light-emitting element emits light based on the light-emission signal. The light-receiving element and the light-emitting element are arranged on a detection member. A supporting member supports the detection member. A driving device moves the supporting member in a reciprocative manner in an X axis direction and a Y axis direction to form a detection region with the detection member. The light-emitting means forms an afterimage on the detection region when the light beam irradiates the detection region.

Abstract: For providing a photoelectric conversion device that can prevent radiation noise by a low-cost and simple mounting method, the photoelectric conversion device having a photoelectric conversion element is provided in which a conductive member such as a thin metal sheet is stuck on the photoelectric conversion element.

Abstract: The present invention provides a small, high-performance imaging device and its application to products at low cost by preventing noise superimposed on a timing pulse feed line from affecting the output of an imaging chip. The imaging device includes two chips: an imaging chip 101 including a sensor 102 and an image processing chip 106 including an image processing circuit 110. The transistors of all circuits in the imaging chip 101 are formed as either nMOS or pMOS transistors. The imaging chip 101 is stacked on the image processing chip 106.

Abstract: A digital pixel sensor, comprising a first switch coupled between a first voltage and a first node, turned on or off by a rest signal to provide a first voltage to the first node when turned on; a light sensing unit coupled to the first node generating a transformation current responsive to the intensity of an incident light source and thereby discharging the first node, and a decision device coupled with the first node and a reference signal to output an intensity reference signal corresponding to the intensity of the incident light source when the voltage at the first node is discharged to a level below that of the reference signal.

Abstract: In an X-ray imaging apparatus, an optical sensor (phototimer detection unit) corresponding to a conventional photomultiplier is incorporated in a two-dimensional sensor (on a signal line), and a signal from the phototimer detection unit is integrated and monitored, thereby performing exposure control. This makes it possible to incorporate the phototimer detection unit without affecting the aperture ratio of pixels which influence the performance of the X-ray imaging apparatus and the characteristics of a MIS type photoelectric conversion unit, thereby performing proper exposure control.

Abstract: A monitor for intrusion detection features a detecting arrangement for detecting an intruding object in a 3-dimensional area and outputting corresponding detection information, a setting arrangement for setting information necessary for monitoring the position or actions of the intruding object in the 3-dimensional area, a monitoring information generating arrangement for generating monitoring information concerning the position or actions of the intruding object in the 3-dimensional area, on the basis of the detection information generated by the detecting arrangement and the setting information by the setting arrangement, and an external output arrangement for outputting an control output or a display output according to the monitoring information concerning the position or actions of the intruding object generated by the monitoring information generating means.

Abstract: System and method for obtaining information about occupancy of a compartment in a movable object in which at least first and second optical imagers obtain images of a common area of the compartment and spaced apart from one another. Processing circuitry derives information from the images obtained by the imagers. A light source may illuminate the common area of the compartment and be interposed between the imagers. The processing circuitry can include a microprocessor with at least one pattern recognition algorithm and be arranged to determine the distance between the imagers and an object in the common area by locating a specific feature in the common area by first locating the feature in only the image obtained by one imager, then determining the location of the same feature in the image obtained by another imager, and determining the distance of the feature from the imagers by triangulation.

Abstract: A method and system for detecting the presence of an object or the distance between the system and an object supports the provision of rapid and reliable obstacle detection. A transmitter emits generally linear beams of electromagnetic radiation with a transmitted radiation pattern within a defined spatial zone. A camera collects an image of the defined spatial zone. A data processor detects a presence of an object in the collected image based on an observed illumination radiation pattern on an object formed by at least one of the generally linear beams. A distance estimator estimates a distance between the object and the optical device based on a change (e.g., an observed shift in one or more positions of generally linear beams) from the transmitted radiation pattern to the observed illumination radiation pattern.

Abstract: A security sensor system includes beam projecting and receiving units (1) and (2). The proper range of the received beam level is adjusted with change in time of the received beam level so that in the case that the received beam level departs from the proper range, the amount of beam projected from the beam projecting unit (1) can be adjusted to enable the received beam level to fall within the proper range. The unit (2) includes a received beam level detector (27), a level setting circuit (28) for setting a proper range of the received beam level, a request signal output circuit (30) for outputting a request signal requesting an adjustment of the amount of beam, and a transmitter (33) for transmitting the request signal to the unit (1). The unit (1) includes a beam projecting power adjustor (15) operable in response to the request signal.

Abstract: A method for position measurement that includes scanning a plurality of graduation periods of one incremental graduation by a detector arrangement extending over a length of one measurement range, a reference marking being integrated with one of the graduation periods, and generating a plurality of periodic scanning signals, of which at least one is locally modified by the reference marking. The method includes detecting the at least one scanning signal, modified by the reference marking, from among the plurality of periodic scanning signals. The method further includes determining an absolute position of the reference marking within the length of said measurement range as a function of the scanning signal detected.

Abstract: An ion attachment mass spectrometry method causes positively charged metal ions generated in a metal ion generation region to attach to molecules of a measured gas in an attachment region to generate attached ions, and then performs mass spectrometry on the attached ions in a mass spectrometry region. In the method, further, a pressure of the attachment region is set so as to be included in a pressure range enabling free flight of the metal ions and the attached ions in the attachment region, an electrostatic field is formed for decelerating the metal ions in the attachment region, and only the measured gas is introduced to the attachment region. Thereby, quantitative analysis enabling accurate measurement of the concentration of the measured gas is realized.

Abstract: The present invention relates to an improved ion mobility spectrometer and method for the analysis of chemical samples. The improvements are realized in the optimization of resolution and sensitivity. Increases in sensitivity are realized by preserving a narrow spatial distribution of migrating ions through the use of periodic/hyperbolic field focusing. Use of a plurality of drift cells and a new RF field focusing interface are discussed.

Abstract: A method for filtering spurious resonances from an NMR dataset comprises the steps of: (a) creating a first, non-oscillating magnetic field of a predetermined field strength across a sample, (b) intermittently exposing the sample to a second, oscillating magnetic field orthogonal to the first to generate an NMR signal, (c) detecting the NMR signal from the sample, (d) adjusting the first magnetic field to a different predetermined field strength and repeating steps (a) to (c), and (d) comparing the detected signals to obtain an NMR dataset from the sample from which spurious resonances have been filtered.

Abstract: A mass spectrometric apparatus capable of generating and detecting positive and negative ions stably at the same time. The apparatus preferably comprises: an opening through which a sample gas is introduced; an ion source to generate ions of the sample gas; and a mass spectrometer to analyze the mass of the generated ions. The ion source utilized with the mass spectrometric device comprises: a first needle electrode on which a voltage is applied in order to generate positive ions of the sample gas introduced through the opening; a first counter electrode having a first opening through which the sample gas and the positive ions pass; a second counter electrode disposed opposite the first counter electrode having a second opening through which the sample gas and the positive ions pass; a second needle electrode on which voltage is applied in order to generate negative ions of the sample gas; and a vent through which the sample gas is ejected.

Abstract: The invention relates to two-dimensional quadrupole systems along whose axis an axial DC field is superimposed. The invention involves coating the hyperbolic or cylindrical surfaces of quadrupole systems with thin insulating layers and metal films thereupon and generating axial potential gradients or saddle ramps using appropriate electrical supply of DC potentials and superimposed RF voltages to the metal films. Systems of this type can be used in a plurality of ways, ranging from mass filters with high transmission to fragmentation cells with extremely low ion losses.

Abstract: An object of the present invention is to provide a sample image forming method and a charged particle beam apparatus which are suitable for realizing suppressing of the view area displacement with high accuracy while the influence of charging due to irradiation of the charged particle beam is being suppressed. In order to attain the above object, the present invention provide a method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from the sample, the method comprising the steps of forming a plurality of composite images by superposing a plurality of images obtained by a plurality of scanning times; and forming a further composite image by correcting positional displacements among the plurality of composite images and superposing the plurality of composite images, and a charged particle beam apparatus for realizing the above method.

Abstract: The present invention relates to a CDSEM (scanning electron microscope) capable of evaluating and presenting the measurement repeatability as a tool with a high degree of accuracy without being influenced by fluctuations in micro-minute shape that tend to increase with the microminiaturization of semiconductor patterns, and to a method for evaluating accuracy of repeated measurement using the scanning electron microscope. There is provided a function whereby when measuring a plurality of times the same part to be measured, by making use of a micro-minute pattern shape such as the roughness included in the pattern, pattern matching with a roughness template image is performed to correct two-dimensional deviation in position of the part to be measured on an enlarged measurement image acquired, and then an enlarged measurement area image is extracted and acquired. This makes it possible to eliminate variation in measurements caused by the micro-minute pattern shape.

Abstract: It is predicted that an observational direction (or an incident direction of an electron beam) in an observed image actually obtained has some errors compared to a set value. The error portion affects the analysis of the observed image later. Therefore, a convergent electron beam is irradiated on a specimen with a known shape, electrons discharged from the specimen surface are detected, an image of the electron is obtained, an incident direction of the convergent electron beam is estimated based on a geometric deformation on an image of the specimen with a known shape, and a 3D shape or a shape of a cross section of a specimen to be observed from a SEM image of the specimen to be observed is obtained by use of the information of the incident direction of the estimated convergent electron beam.

Abstract: The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first angle and forming a first transmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.

Abstract: Events of interest are detected within a gamma ray detection system. Characteristics of undesired signals, including a multiplicity of events within the signal, a density of events within the signal, and other aspects are determined. The signal is filtered based on its expected characteristics. A signal which does not have the expected characteristics is rejected, and an image is formed that excludes those rejected signals.

Abstract: Using biased, electrical power feedback to an electrical heater, the output signal from a pyroelectric detector is made to follow the waveform of incident electromagnetic radiation. The feedback power is applied to the detector to reduce the rate of change of the detector temperature that would otherwise be caused by the absorbed radiation. The combined signals from the radiation and feedback power produce a response that follows the radiation waveform with a fast rise time and with substantially less droop than previously reported. The high fidelity of the response waveform allows for a substantial simplification of the optical chopper designs and electronics needed to implement electrical calibration. In contrast to previous electrical calibration with pyroelectrics that needed very specialized electronics, with this method a variety instruments can be used for reading pyroelectric signals.

Abstract: A remote sensing device is provided to detect the emissions of passing vehicles. Preferably, the device detects the emissions of individual vehicles traveling on a roadway of more than one traffic lane. The remote sensing device may preferably detect the emissions due to an individual vehicle in situations where more than one vehicle is present. The device is capable of determining which sensed emission data corresponds to which vehicle exhaust plume.

Abstract: A system of marked medical containers comprises at least two containers having different properties in at least one respect, and at least one machine-readable marking on each of the containers, each marking being designed to allow discrimination between the difference in properties. Each marking allows discrimination between the difference by having at least one area with different absorbence or reflectance when irradiated with radiation in non-visible frequency ranges. A specific container comprises a syringe cartridge type container for use with a preparation delivery device.

Abstract: An apparatus and method for fabricating a high performance reflective material for use on scintillator elements in a computed tomograph (CT) imaging device. Adjacent scintillator elements are separated by gaps filled with a reflective coating layer. In one embodiment, the reflective coating layer consists of a surface level coating layer, an adhesion layer, a metallic reflective layer, and a top layer consisting of either a barrier coating layer or a polymeric encapsulant, or both. In another embodiment, the metallic reflective coating layer is applied to the scintillator element via an electroless metal deposition process utilizing a reducing agent and a metal complex. The CT reflectors formed by either embodiment have improved light output, minimized cross talk, higher geometric efficiency, and decreased performance degradation as compared with current CT reflectors that utilize organic binders and titanium dioxide fillers is achieved.

Abstract: Disclosed is an image intensifier camera capable of rotating an image imaged therein. An image intensifier camera in accordance with the present invention includes an image inverse prism provided between a front lens group and an aperture stop in a fluoroscopic image imaging optical system, and an image pickup device in the intensifier camera of the present invention contains an electric circuit for converting a mirror image back to an original image therein. In accordance with the present invention, the image imaged in the image pickup device may be rotated by a rotatable image inverse prism, so that the image intensifier camera of the present invention has a simple structure, a small volume, high image resolution, and high stability of image quality.

Abstract: A detector for use in imaging applications includes at least one detector array, an array of photodetectors, and a continuous light guide disposed between the detectors and the photodetectors. The light guide is continuous over the entire area of the photodetectors and detectors. The thickness of the light guide is optimized based on the shape of the photodetector array. Each detector array includes a plurality of scintillator elements disposed in an M×N array, where “M” and “N” are independently selectable and are each at least one. A mechanism for maintaining the relative positions of the individual scintillator elements with respect to each other is provided. The retainer is further provided to enhance the separation between the individual detector arrays to define distinct boundaries between the position profiles of the scintillator arrays.

Abstract: A radiographic apparatus includes a columnar crystal phosphor which converts X-rays into visible light, a photodetector which converts the visible light into an electrical signal, and a case (a case lid and case main body) which houses the columnar crystal phosphor and photodetector. A buffer member which buffers a force from outside the case (the case lid and case main body) and a highly rigid member which has higher rigidity than that of the columnar crystal phosphor are arranged between the case (the case lid and case main body) and columnar crystal phosphor.

Abstract: Neutron detectors, advanced detector process techniques and advanced compound film designs have greatly increased neutron-detection efficiency. One embodiment of the detectors utilizes a semiconductor wafer with a matrix of spaced cavities filled with one or more types of neutron reactive material such as 10B or 6LiF. The cavities are etched into both the front and back surfaces of the device such that the cavities from one side surround the cavities from the other side. The cavities may be etched via holes or etched slots or trenches. In another embodiment, the cavities are different-sized and the smaller cavities extend into the wafer from the lower surfaces of the larger cavities. In a third embodiment, multiple layers of different neutron-responsive material are formed on one or more sides of the wafer. The new devices operate at room temperature, are compact, rugged, and reliable in design.

Abstract: One embodiment disclosed relates to a Wien filter for a charged-particle beam apparatus. The charged-particle beam is transmitted through the Wien filter in a first direction. A magnetic field generation mechanism is configured to generate a magnetic field in a second direction which is perpendicular to the first direction, and an electrostatic field generation mechanism is configured to generate an electrostatic field in a third direction which is perpendicular to the first and second directions. The field generation mechanisms are further configured so as to have an offset between the positions of the magnetic and electrostatic fields along the first direction. Another embodiment disclosed relates to a Wien filter type device wherein the magnetic force is approximately twice in strength compared to the electrostatic force. Other embodiments are also disclosed.

Abstract: The stimulable phosphor panel includes a support having a substrate or the substrate and a sealing member, a stimulable phosphor layer formed on the substrate being the support through gas phase deposition, a moisture-proof protective layer for sealing the stimulable phosphor layer and a sealing adhesive layer for bonding an outer periphery of the moisture-proof protective layer to the support. The sealing adhesive layer has a moisture permeability of 1,000 g/m2·day or less as an adhesive after curing, a width of 2 mm to 10 mm, and a thickness of 0.5 ?m to 20 ?m. The producing method forms the stimulable phosphor layer on the support through gas phase deposition, forms the adhesive layer and bonds the moisture-proof protective layer to the support through the adhesive layer. The stimulable phosphor panel is capable of preventing deterioration of its characteristics due to moisture absorption over a long period of time.

Abstract: A charged particle beam photolithography machine includes an electron gun, a deflector, a wafer stage, a standard substrate formed with a chip-shaped first mark group having a plurality of first marks and a chip-shaped second mark group having a plurality of second marks, a correction map having misalignment factors of the first marks based on positions of the second marks, and a deflection control unit for controlling an amount of deflection in the deflector. The charged particle is irradiated on a wafer while the deflection control unit makes reference to the correction map and corrects the amount of deflection as equivalent to the misalignment factors.

Abstract: Electrical lead-through systems from atmospheric into vacuum environments are presented. Electrical feed-through structures (EFTS) comprised of a multiplicity of parallel connection lines used to operate e-beam tip-array sources in high vac environments for chip lithography are disclosed. In one embodiment, an EFTS comprises a sheet of insulating material having conductive tracks extending along potions of the sheet and a vacuum seal separating one portion from another portion of the sheet so as to maintain a pressure differential among multiple portions of the sheet.

Abstract: A radiation source comprising: a source of radiation; a plate having an aperture formed therein, said aperture facing the source of radiation; and means for moving the source when no radiation is desired on the side of the plate away from the source.

Abstract: A laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source control system comprises a target delivery system adapted to deliver moving plasma initiation targets and an EUV light collection optic having a focus defining a desired plasma initiation site, a target tracking and feedback system comprising: at least one imaging device providing as an output an image of a target stream track, and a stream track error detector detecting an error in the position of the target stream track in at least one axis generally perpendicular to the target stream track from a desired stream track intersecting the desired plasma initiation site.

Abstract: An image-based technique that measures the orientation of fibers in a moving web of nonwoven material. At least four light spots on one side of the web are illuminated essentially simultaneously with at least four plane-polarized incident substantially perpendicular light beams having different polarization characteristics. Dispersion of the excident light spots is measured on the opposite side of the web along at least one linear section which is at a known angle relative to the plane of polarization of the corresponding plane-polarized incident light beam, wherein at least one such linear section lies substantially across the center of the transmitted excident light spot and extends substantially across the width of the transmitted excident light spot. Variations in the dispersion of the transmitted excident light spot for the at least four plane-polarized light beams are calculated, and the fiber orientation is estimated from the variations.

Abstract: A system is disclosed which utilizes the substantially steady-state temperature of a coated object, in conjunction with an optical detection system, to selectively view defects and features of the object below the coating without the necessity of transient heating or IR illumination and reflectance imaging. The optical detector, such as an IR camera, may be tailored for the wavelengths at which the coating material is substantially transparent, thereby maximizing the viewing clarity of the defects and features under the coating, and distinguishing them from any spurious features on the top surface of the coating. The present system enables the inspection of small or large areas in real time, without requiring complex image acquisition, storage and image processing equipment and software.

Abstract: Provided are a semiconductor memory device and a method of fabricating the same. The semiconductor memory device includes a heating portion interposed between a transistor and a data storing portion, and a metal interconnection layer connected to the data storing portion. The data storing portion includes a chalcogenide material layer which undergoes a phase change due to heating of the heating portion to store data therein. The heating material layer is disposed under the chalcogenide material layer, and the top surface of the heating material layer is oxidized using a plasma oxidation process to increase a resistance value. Accordingly, the heat capacity necessary for the chalcogenide material layer can be transmitted using a small amount of current, and current used in the semiconductor memory device can be further reduced.