Abstract: A display control device is provided which includes characteristic value-calculating unit for calculating a characteristic value based on an input image signal, a conversion characteristic-calculating unit for determining a conversion characteristic from the characteristic value, and a signal-converting unit for converting the input image signals in accordance with the determined conversion characteristic. The conversion characteristic has a low level region segment, which is close to the origin of axes respectively representing the input image signal and an output image signal of the display control device, a high level region segment, which is close to a full scale point, and a middle level region segment, which is positioned between the low level region and high level region, and the slope in the middle level region is set so as to be larger than both of the slopes of the low level region and the high level region.

Abstract: One embodiment of the present invention provides a system that facilitates displaying multiple two-dimensional (2D) windows with related content within a three-dimensional (3D) display model. The system starts by receiving a command to display a first window within the 3D display model. In response to the command, the system displays the content of the first window on a first surface of a 3D object. Next, the system receives a command to display a second window within the 3D display model, wherein content of the second window is related to content of the first window. The system then displays content of the second window on a second surface of the 3D object.

Abstract: A photosensitive body has a photosensitive layer. An optical scanning device has a deflector deflecting a light flux emitted from a light source, and scans the surface of the photosensitive body by the thus-deflected light flux. A dot is formed at a center between adjacent light fluxes as a result of the adjacent light fluxes being overlapped with one another in a sub-scan direction. A ratio of a static beam-spot diameter Ws in the sub-scan direction on the surface of the photosensitive body defined by 1/e2 of the maximum value in the exposure distribution of the beam spot to an interval L between adjacent scan lines satisfies the following formula: 1.2<Ws/L<4.5.

Abstract: A quick-release printhead mounting assembly and thermal printer incorporating same, including a printing component, a printer housing, and, a component retention feature attached to or molded into the printer housing adapted for receiving and releasably fixing the printing component to the housing. The retention feature holds the printhead in a fixed position relative to the housing and, therefore, also relative to the platen of the printer. The printing component is advantageously a printhead, such as a thermal printhead, or the combination of a thermal printhead and a heat sink.

Abstract: An image forming device includes a main frame of the image forming device having a body, a drum shaft which is positioned and supported by the body of the main frame of the image forming device, a photoconductive drum which is provided removably in the main frame of the image forming device and supported rotatably on the drum shaft, and an optical writing head which includes positioning pins and is positioned relatively with respect to the photoconductive drum. By contacting the positioning pins against a circumferential body of the drum shaft, the optical writing head is positioned relatively with respect to the photoconductive drum.

Abstract: An imaging apparatus forming an image by performing scanning by deflecting a light beam includes a data conversion part that converts multi-bit input image data into data specifying a pulse width or intensity of the light beam. The image data is input to the data conversion part a given number of times in succession, and the data conversion part performs a different data conversion for each of scanning lines of the given number based on the input image data.

Abstract: Detecting fire and non-fire conditions includes receiving a plurality of frames of video information, determining an energy indicator for each of a subset of the plurality of frames, detecting a fire condition in response to the energy indicator for each of the subset of the plurality of frames forming a pattern as a function of time corresponding to a fire condition, and detecting a non-fire condition in response to the energy indicator for each of the subset of the plurality of frames forming a pattern as a function of time corresponding to a non-fire condition. Detecting fire and non-fire conditions may also include comparing energy indicators for each of the subset of the plurality of frames to a reference frame. The reference frame may correspond to a video frame taken when no fire is present, a video frame immediately preceding each of the subset of the plurality of frames, or a video frame immediately preceding a frame that is immediately preceding each of the subset of the plurality of frames.

Abstract: An arrangement for maintaining even tube burn-in. The arrangement identifies active and inactive display regions on a display unit when video content is displayed on the display unit. When inactive display regions are identified the arrangement monitors the duration that the active display regions remain active. After the active display regions become inactive and a predetermined time period has passed the arrangement displays a corrective image on the identified inactive regions. The predetermined time period may be set by a user or based on the user's viewing habits.

Abstract: A photosensitive region includes a semiconductor substrate 40 made of a P-type semiconductor, and N-type semiconductor regions 41, 42 and 43 formed on the surface of the semiconductor substrate 40. Accordingly, the first photosensitive portion includes a portion of the semiconductor substrate 40 and the semiconductor regions 41, thus configuring a photodiode. The photosensitive region on one side contained in the second photosensitive region includes a portion of the semiconductor substrate 40 and the semiconductor regions 42, thus configuring a photodiode. The photosensitive region on the other side contained in the second photosensitive region includes a portion of the semiconductor substrate 40 and the semiconductor regions 43, thus configuring a photodiode. Each of the semiconductor regions 42 and 43 is in a shape of an approximate triangle, and is formed so that one side of the regions 42 is adjacent to one side of the region 43, and vice versa, in one pixel.

Abstract: In an imaging apparatus, a method of correcting image data, or a storage medium storing a program, a target is imaged in a plurality of imaging regions and image data is output from each of the plurality of imaging regions; based on the image data captured in a first imaging operation, an imbalance in output levels of image data respectively output from the plurality of imaging regions in a second imaging operation is corrected; and an imaging condition in the first imaging operation is controlled in accordance with an imaging condition in the second imaging operation. Accordingly, an imbalance in a plurality of image data simultaneously output from a plurality of output terminals of an imaging device is automatically corrected appropriately even if an imaging condition changes.

Abstract: The digital image shooting device is composed of an image forming lens, an image sensor element, a data processing unit for processing an output signal from the image sensor element into digital image data, an image memory for storing the digital image data; and a lens characteristic correction unit for performing a process of correcting a deterioration of an image quality derived from the image forming lens upon the digital image data by using a lens characteristic of the image forming lens and a position of a frame image photographed. The digital image shooting device is capable of obtaining the image quality which is high enough for the utilization even by using the comparatively low-price lens which does not exhibit a high performance.

Abstract: In an image processing system, the imager gain and the exposure time are adjusted based on a predefined stepping sequence using a stepping table designed to maximize the signal-to-noise ratio in the image. This is achieved by providing a stepping sequence with each step having the largest suitable integration time (exposure) and an appropriate amplifier and digital gain setting, while achieving an equal relative percentage change in image brightness between adjacent sequence steps. The size of the executed AE steps is proportional to the distance between a current image luminance and the target luminance. This is achieved by the capability to skip one or more steps in the stepping sequence, if appropriate, for each relevant executed step, with the number of skipped steps, if any, being proportional to the magnitude of the deviation from the target brightness.

Abstract: A CMOS imager includes an array of active pixel sensors, wherein each pixel is associated with a respective column in the array. The imager also includes multiple circuits for reading out values of pixels from the active sensor array. Each readout circuit can be associated with a respective pair of columns in the array and can include first and second sample-and-hold circuits. The first and second sample-and-hold circuits are associated, respectively, with first and second columns of pixels in the array. Each readout circuit also includes an operational amplifier-based charge sensing circuit that selectively provides an amplified differential output signal based on signals sampled either by the first sample-and-hold circuit or the second sample-and-hold circuit. The readout circuit also has an analog-to-digital converter for converting the differential output to a corresponding digital signal using a successive approximation technique.

Abstract: The invention provides an imaging apparatus in which when a difference in sensitivity between two photosensitive elements having different sensitivities is used to achieve a wide dynamic range, a correction amount of a low sensitivity portion is determined from information of a high sensitivity portion to reduce a burden of an internal process. A black level correction value of a dependent photosensitive pixel is calculated by multiplying a black level correction value of a main photosensitive pixel by the ratio of the cell area of the main photosensitive pixel to the cell area of the dependent photosensitive pixel. It is not necessary to perform control to capture an imaging signal from the dependent photosensitive pixel belonging to an OB portion for determining the black level correction value of the dependent photosensitive pixel.

Abstract: An image sensing device operates in a first and a second picture image mode. The image sensing device includes a pixel area having a first vertical transferring CCD to transfer a first electric charge converted from an optical image and a second vertical transferring CCD to transfer a second electric charge of optical black level respectively. The image sensing device includes a block portion for selectively blocking the first and second electric charge, wherein the first and second electric charges are outputted without block operation of the block portion and transferred to the horizontal CCD in the first picture image mode and wherein the block portion selectively blocks the first electric charge, and the first electric charge unblocked and the second electric charge are transferred to the horizontal CCD at different timing in a second picture image mode.

Abstract: An image pickup element comprising a plurality of pixels, each including a photoelectric conversion section and a wavelength selection section for transmitting to the photoelectric conversion section light of a predetermined wavelength range, wherein the wavelength selection section has a vertex, and wherein, for a pixel located in the peripheral portion of the image pickup element, the vertex of the wavelength selection section is located closer to the center of the image pickup element than to the center of the photoelectric conversion section.

Abstract: The photographing device includes an optical lens, a photographing unit for taking an image of a subject imaged through the optical lens and a light quantity adjustment unit for partially adjusting a light quantity of the image of the subject. The light quantity adjustment unit is provided in an optical path of light carrying the image of the subject and between the optical lens and the photographing unit.

Abstract: A method for detecting an edge and generating an interpolated edge pixel at a target pixel position between two lines of an interlace scan image first determines gradient intensities in the horizontal and vertical directions and then calculates the angle of the edge by comparing the gradient intensities. The interpolated pixel value is calculated from samples in the interlace scan image that lie along the identified angle and are proximate to the target pixel position. The method represents the gradient strengths and the difference between them as bit strings; locates the most significant non-zero bit in the larger gradient value; divides the value of the corresponding bit position in the difference string, and a predetermined number of following positions, by increasing powers of 2; sums the results; subtracts the sum from 1.0 and uses the inverse tangent function to calculate the angle of the edge.

Abstract: A field sequential pulse width modulated display system comprises a digital micromirror device having a plurality of micromirrors that each selectively pivot to reflect light onto a screen to illuminate a corresponding pixel. A driver circuit controls the DMD responsive to sequences of pulse width segments formed by a processor. The processor alters the actuation state of at least one pulse in a first pulse width segment for a given color to alter the pixel brightness with a range lying between first and second pixel brightness boundaries. Further, the processor alters the actuation state of at least one pulse within at least one additional pulse width segment to alter the pixel brightness above the second brightness boundary to make nearly equal the total width of pulses becoming actuated within a segment to the total pulse width becoming de-actuated within the same segment to achieve an incremental change in brightness.

Abstract: A polarization controller includes: a liquid crystal cell; a mechanism for determining a compensation voltage; and a voltage driving circuit for applying the compensation voltage to the liquid crystal cell, where the application of the compensation voltage optimizes an extinction ratio of the liquid crystal cell. The controller controls the extinction ratio using an applied voltage to compensate for temperature changes, liquid crystal cell gap variations, and other errors of the liquid crystal cell. This controller is aimed at liquid crystal devices used in a wide ambient temperature range and is also useful to compensate for the fabrication errors of the liquid crystal switches.

Abstract: A substrate for a liquid crystal display device comprises a TFT substrate for holding opposing substrates arranged opposed to each other as well as a liquid crystal composition obtained by mixing a monomer into liquid crystals. A plurality of bus lines are formed on the TFT substrate intersecting each other through an insulating film, and thin-film transistors are formed close to positions where the plurality of bus lines and intersect each other. A plurality of thin-film transistors for polymerization are formed for applying a voltage to the pixel electrodes at the time of polymerizing the monomer, and a first common electrode wiring for polymerization is electrically connected to the gate electrodes of the plurality of thin-film transistors for polymerization.

Abstract: To provide an electrooptic device which can reliably suppress a substrate floating effect, such as a parasitic bipolar phenomenon, in an SOI-MIS transistor, and which has superior electrical characteristics. An electrooptic device (liquid crystal light valve) of the present invention uses, as one substrate, a composite substrate including a quartz substrate (main substrate 10A) having a first coefficient of thermal expansion, an insulating layer (insulating underlayer 12) formed on the quartz substrate, and a single-crystal silicon layer (semiconductor layer 1a) formed on the insulating layer and having a second coefficient of thermal expansion. A TFT 30 that uses the single-crystal silicon layer as a channel region 1a? is formed on the insulating layer, and at least one line defect D exists in the single-crystal silicon layer that forms the channel region 1a?.

Abstract: The present invention provides a simplifying method for a peeling process as well as peeling and transcribing to a large-size substrate uniformly. A feature of the present invention is to peel a first adhesive and to cure a second adhesive at the same time in a peeling process, thereby to simplify a manufacturing process. In addition, the present invention is to devise the timing of transcribing a peel-off layer in which up to an electrode of a semiconductor are formed to a predetermined substrate. In particular, a feature is that peeling is performed by using a pressure difference in the case that peeling is performed with a state in which plural semiconductor elements are formed on a large-size substrate.

Abstract: A gate wire is formed on the insulating substrate. The gate wire has gate lines, first and second gate electrodes connected to the gate lines, and gate pads. A gate insulating layer, first and second semiconductor layers and an ohmic contact layer are sequentially formed thereon. A data wire is formed on the ohmic contact layer. The data wire has first and second data lines, data line connectors, first and second source electrodes, first and second drain electrodes, and data pads. A passivation layer is formed on the data wire, and has contact holes respectively exposing the first and the second drain electrodes, and the gate and the data pads. Pixel electrodes, and subsidiary gate and data pads are formed on the passivation layer. As described above, the data line is provided at opposite sides of the pixel area so that variation in the pixel voltage due to the parasitic capacitance between the partitioned areas with different degree of misalignment is reduced.

Abstract: A liquid crystal panel comprising a first substrate and a second substrate, wherein the first substrate protrudes at one side relative to the second substrate and the second substrate protrudes at an opposite side relative to the first substrate.

Abstract: The invention provides an electro-optical device that displays high quality images regardless of temperature circumstances of the surroundings. The electro-optical device can be encased in a mounting case which accommodates a liquid crystal panel in which projection light is incident on an image display region from a light source. The mounting case can include a plate arranged so as to face one surface of the liquid crystal panel, a cover arranged so as to cover the plate and the liquid crystal panel, an adhesive for attaching the plate to the liquid crystal panel, and adhesive pockets provided in at least one of the plate and the cover, for accommodating the adhesive.

Abstract: In a display device, a backlight unit emits light forward. Picture elements are arranged in columns and rows to define a picture element plane and each of the picture elements has a transmitting region to transmit light coming from the backlight unit. Collecting elements are arranged in front of the backlight unit to transmit and collect the light on the picture element plane. Each collecting element is associated with the transmitting region of one of the picture elements. The light transmitted through each collecting element forms a beam spot on the picture element plane. The center of the beam spot is located within the transmitting region associated with the collecting element. Two beam spots, formed on two picture elements that are adjacent to each other in a row direction, have their centers of mass shifted from each other in a column direction on the picture element plane.

Abstract: A liquid crystal display device includes an illumination device, a light control element arranged at a projected light side of the illumination device, a reflective polarizer arranged at an upper portion of the light control element so that the transmission axis of polarized light is adjusted, a liquid crystal display element for controlling polarization of projected light projected from the reflective polarizer, and a screen arranged at an upper portion of the liquid crystal display element. The light control element includes an isotropic medium without birefringence.

Abstract: A reflection electrode has an undulated shape and whose normal direction is distributed unevenly to a specific azimuth angle and whose reflection light intensity depends on said azimuth angle. Openings are formed in that area of the reflection electrode which has a tilt angle of 0 degree to 2 degrees and/or a tilt angle of 10 degrees or higher. The retardation of a liquid crystal layer is changed by making the liquid crystal molecular alignment mode different between the openings and the reflection electrode, so that the intensity of output light is increased in reflection mode as well as in transmission mode. The balance of colors displayed in transmission mode is determined by determining the area of the openings in pixels of each color, and the color temperature is set higher in transmission mode than in reflection mode. This provides a semi-transmission type liquid crystal display which has an excellent visibility in reflection mode as well as in transmission mode.

Abstract: In a liquid crystal display device the reflection of light from a transmissive region is reduced, the contrast of images is enhanced and a display of inverted images is suppressed. The liquid crystal display device includes a first background film made of silicon nitride and a second background film made of silicon oxide over a glass substrate, and thin film transistors and light transmissive pixel portions are formed over the second background film. Each thin film transistor is constituted of a polysilicon film, a gate electrode, a drain electrode and a source electrode, while a gate insulation film, an interlayer insulation film and an organic film are formed over the pixel portion. Further, in the liquid crystal display device external light is reflected, wherein by forming the first background film thicker than the second background film, the inversion of images of a transmissive type liquid crystal panel can be suppressed.

Abstract: An opening formed on a transflective film is close to the edge of a rectangular pixel region. An interval t2 between three sides of the four sides of the opening and the edge of the pixel region is smaller than the width of one concave portion formed on the transflective film thereby permitting the concave portions that contribute the least to reflection to be minimized, and the reflectance of the transflective film to be maximized. The desired reflection characteristic can be obtained using a predetermined number of concave portions.

Abstract: The liquid crystal display device is composed of at least one optical retardation compensator plate 2 (and 3) inserted between a liquid crystal display element 1 and polarizer plates 4 and 5. The liquid crystal display element 1 is composed of a pair of electrode substrates 6 and 7 and a liquid crystal layer 8 sealed therebetween. The polarizer plates 4 and 5 flank the liquid crystal display element 1. The optical retardation compensator plate 2 (and 3) has a negative refractive index anisotropy (na=nc>nb). The direction of a principal refractive index nb parallel to the normal to the surface and the direction of either a principal refractive index na or nc in the surface incline either clockwise or counterclockwise around the direction of the principal refractive index nc or na in the surface.

Abstract: A laminated structure which can reduce defect by preventing deposition failure or holes of an insulating film, manufacturing method, and a display unit that employ same are provided. The laminated structure as an anode for organic light-emitting devices is provided on a flat surface of a substrate. In the laminated structure, an adhesive layer made of ITO, a reflective layer made of silver or an alloy containing silver, and a barrier layer made of ITO are layered in this order from the substrate side. A cross sectional shape of the laminated structure in the laminated direction is a forward tapered shape. A sidewall face of the adhesive layer, the reflective layer, and the barrier layer is totally covered by an insulating film, and deposition failure or holes of the insulating film is prevented. A taper angle made by the sidewall face and the flat surface is preferably from about 10° to about 70°.

Abstract: An array substrate for a liquid crystal display device includes a gate line on a substrate having a display region and a non-display region, wherein the non-display region is about a periphery of the display region and the gate line includes a gate pad disposed in the non-display region at one end of the gate line, a data line crossing the gate line, wherein the data line includes a data pad disposed in the non-display region at one end of the data line, a thin film transistor connected to the gate line and the data line, a passivation layer over the gate line and the data line, a pixel electrode on the passivation layer in the display region, a first conductive pattern on the passivation layer in the non-display region and an orientation film on the first conductive pattern.

Abstract: To provide a liquid crystal device a liquid crystal display having a high contrast over wide viewing angles while reducing the color distortion. A liquid crystal display device comprises a first substrate on which a plurality of pixel electrodes are formed, a second substrate on which an opposing electrode is formed, and a liquid crystal layer sandwiched between the first and second substrates, the second substrate further having thereon a plurality of protrusions, each of the protrusions being positioned at a substantially central portion of a corresponding one of the pixel electrodes.

Abstract: A method for manufacturing a liquid crystal display panel includes coating a resin film on one of a pair of substrates facing each other and patterning the resin film to form pillar spacers. The surface of the substrate where the pillar spacers have been formed is optically cleaned, and alignment film is formed on the optically cleaned substrate. In the optical cleaning process, a light source having an emission peak in a wavelength range of 180 nm or less, or 260 nm or more, and not having an emission peak in a wavelength range from 180 nm to 260 nm is used.

Abstract: A liquid crystal display device capable of obtaining high luminance and good display characteristics, a substrate for such a liquid crystal display device, and a manufacturing method of such a substrate, are provided. A color filter substrate holds, together with an array substrate, a liquid crystal having negative dielectric anisotropy. Color filters are formed on a glass substrate and a common electrode is formed on the color filters. Protrusions and auxiliary protrusions for regulating the alignment of the liquid crystal are formed on the common electrode so as to have different sectional shapes.

Abstract: A display formed by skiving with a skiving device including at least one nozzle tip and at least one roller is described. The display has skives that are clean and neat, and has no damage to layers underlying the skived areas.

Abstract: A variable aperture stop with no moving parts is disclosed. The aperture stop comprises a first region comprising a first optically transmissive medium, a second region comprising a second optically transmissive medium, and an electro-optical structure adapted to selectively switch the second region between a first state of optical transmissivity and a second state of optical transmissivity upon application of an electric potential thereto. The electro-optical structure comprises a top optically transmissive conductor, a bottom optically transmissive conductor positioned below and parallel to the top conductor so as to define a space therebetween, the space including the first region and the second region, and an electric voltage applicator coupled to the top conductor and adapted to apply an electric voltage to the top conductor that creates the electric potential between the top and bottom conductors. An apodizable, variable aperture stop with no moving parts is also disclosed.

Abstract: A coating and developing system includes an auxiliary block, a resist film forming unit block and antireflection film forming unit blocks stacked up in layers to form a resist film and an antireflection film underlying the resist film and an antireflection film overlying the resist film in a small space. The coating and developing system can cope with either a case where antireflection films are formed or a case where no antireflection film is formed. Film forming unit blocks, namely, a TCT layer, a COT layer and a BCT layer, and developing unit blocks, namely, DEV layers, are stacked up in layers in a processing block S2. The TCT layer, the COT layer and the BCT layer are used selectively in the case where antireflection films are formed and the case where any antireflection film is not formed. The coating and developing system is controlled by a carrying program.

Abstract: An exposure apparatus which exposes substrates to a pattern on a master. The apparatus includes first, second and third chucks which hold the substrates, a first fine adjustment stage which holds the first chuck to perform fine driving, a second fine adjustment stage which holds the second chuck to perform fine driving, a coarse adjustment stage on which the first and second fine adjustment stages are mounted and which can move in an X-Y plane substantially perpendicular to an optical axis, an exposure unit which performs exposure operation for the substrate held by the first chuck, a measurement unit which performs measurement operation for the substrate held by the second chuck, and a controller which drives the coarse adjustment stage and causes the measurement and exposure units to perform the measurement and exposure operations, respectively.

Abstract: An exposure apparatus includes a vacuum chamber, a load-lock chamber disposed between the vacuum chamber and outside the exposure apparatus, a reticle cassette configured to hold a reticle, a conveying unit configured to convey the reticle cassette between the vacuum chamber and the load-lock chamber, and an opening and closing unit configured to open and close the reticle cassette. The opening and closing unit is disposed within the vacuum chamber.

Abstract: An alignment mark for the coarse alignment and fine alignment of a semiconductor wafer in an exposure tool includes a first partial structure for generating a first reflection pattern in the exposure tool for the fine alignment of the semiconductor wafer, and a second partial structure for generating a second reflection pattern in the exposure tool for the coarse alignment of the semiconductor wafer. The first partial structure has a plurality of first structure elements, which are arranged relatively parallel and in a manner lying next to one another with a predetermined distance between midpoints symmetrically around the center of an inner region. The second partial structure has a plurality of second structure elements, formed in a manner corresponding to a pattern stored in the exposure tool and being arranged in the inner region.

Abstract: Systems and techniques for alignment with latent images. In one implementation, a method includes detecting a location of a latent image on a substrate, repositioning the substrate based on the detected location of the latent image, and patterning the substrate.

Abstract: To compensate for birefringence of a mask in a lithographic projection apparatus, the birefringence of a mask is measured and stored as birefringence data in a data storage device. A birefringent compensation element is disposed in the optical path of the lithographic projection apparatus. Appropriate adjustments of the compensation element are determined as those optimally reducing impact of the mask birefringence on the state of polarization at substrate level.

Abstract: A system and method for optimizing an illumination source to print a desired pattern of features dividing a light source into pixels and determining an optimum intensity for each pixel such that when the pixels are simultaneously illuminated, the error in a printed pattern of features is minimized. In one embodiment, pixel solutions are constrained from solutions that are bright, continuous, and smooth. In another embodiment, the light source optimization and resolution enhancement technique(s) are iteratively performed to minimize errors in a printed pattern of features.

Abstract: To compensate for birefringence of a mask in a lithographic projection apparatus, the birefringence of a mask is measured and stored as birefringence data in a data storage device. A birefringent compensation element is disposed in the optical path of the lithographic projection apparatus. Appropriate adjustments of the compensation element are determined as those optimally reducing impact of the mask birefringence on the state of polarization at substrate level.

Abstract: A method of configuring a transfer of an image of a patterning device pattern onto a substrate with a lithographic apparatus. The method includes determining an intermediate illumination arrangement parameter and an intermediate patterning device parameter by varying an initial illumination arrangement parameter and an initial patterning device parameter using a calibrated model until the calculated image of the pattern printed on the substrate is within predetermined specification; calculating a metric that represents a lithographic response of the printed pattern over a process range, where the pattern would be imaged with the intermediate illumination arrangement and patterning device parameters over the process range, and depending on a result of the metric, adjusting the initial patterning device and illumination arrangement parameters.

Abstract: A lithographic apparatus is disclosed. The lithographic apparatus includes an illumination system for providing a beam of radiation on a flat article to be placed in a beam path of the beam of radiation, and an article handler for handling the article during placement or removal of the article. The article handler includes an electrode and a dielectric layer in order to form an electrostatic clamp for electrostatically clamping the article.

Abstract: The present invention includes a substrate support system that features a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. As a result the substrate support system attenuates if not avoids generating non-planarity in a substrate that results from a presence of particulate contaminants. This is achieved by fabricating the pin to be compliant, allowing the same to move to accommodate the presence of the particle while maintaining sufficient planarity in the substrate.