Patents Issued in August 16, 2007
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Publication number: 20070187574Abstract: An electronic imaging device is provided that includes a plurality of sensor elements, such as multiple photosensor arrays, wherein some of the sensor elements have a different numerical aperture value than the others, and wherein the sensor elements can be arranged such that their electrical signals can be combined to produce a composite electrical signal.Type: ApplicationFiled: December 28, 2006Publication date: August 16, 2007Applicant: GE Inspection Technologies, LPInventor: Raymond A. Lia
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Publication number: 20070187575Abstract: A solid-state image sensor includes a plurality of light-receiving elements arranged in a light-receiving area, and a plurality of micro-lenses corresponding to the light-receiving elements, and has a flattening film formed on the plurality of the micro-lenses. At a center of the light-receiving area, the micro-lenses are placed in positions directly above corresponding photodiodes, and placed in positions which are progressively offset from positions directly above the corresponding photodiodes, towards a center of the light receiving area, as micro-lenses are located farther from the center of the light-receiving area.Type: ApplicationFiled: April 11, 2007Publication date: August 16, 2007Inventors: Hiroshi Sakoh, Masato Kobayashi, Nobukazu Teranishi
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Publication number: 20070187576Abstract: A solid-state image sensor includes a plurality of light-receiving elements arranged in a light-receiving area, and a plurality of micro-lenses corresponding to the light-receiving elements, and has a flattening film formed on the plurality of the micro-lenses. At a center of the light-receiving area, the micro-lenses are placed in positions directly above corresponding photodiodes, and placed in positions which are progressively offset from positions directly above the corresponding photodiodes, towards a center of the light receiving area, as micro-lenses are located farther from the center of the light-receiving area.Type: ApplicationFiled: April 11, 2007Publication date: August 16, 2007Inventors: Hiroshi Sakoh, Masato Kobayashi, Nobukazu Teranishi
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Publication number: 20070187577Abstract: A photoswitch includes first and second signal sources for outputting first and second input signals that switch between high and low logic states according to intensity of ambient light, and a latch circuit having set and reset nodes coupled electrically and respectively to the first and second signal sources, and an output node coupled electrically to a switch circuit. When the first and second input signals respectively have the high and low logic states, the output node drives the switch circuit to an on state. When the first and second input signals respectively have the low and high logic states, the output node drives the switch circuit to an off state. When the first and second input signals both have the low logic state, the output node maintains the switch circuit at a current one of the on and off states.Type: ApplicationFiled: February 10, 2006Publication date: August 16, 2007Inventor: Te-Shu Kao
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Publication number: 20070187578Abstract: A device assembly (16) for a precision apparatus (10) includes a device housing (30), a device (32), a device mover assembly (34), and a measurement system (36). The device mover assembly (34) moves the device (32) relative to the device housing (30) about a first axis and about a second axis that is orthogonal to the first axis. The measurement system (36) monitors movement of the device (32). The measurement system (36) monitors movement of the device (32) and can include a first sensor assembly (260) that monitors movement about the first axis and a second sensor assembly (262) that monitors movement about a second axis. Each sensor assembly (260) (262) can include a sensor adjuster (474) (476) that adjusts the position of a portion of the respective sensor assembly (260) (262) to independently tune the sensor assemblies (260) (262) and independently enhance the performance of each sensor assembly (260) (262). Further, each sensor assembly (260) (262) can be a magnetic type sensor.Type: ApplicationFiled: January 16, 2007Publication date: August 16, 2007Inventors: Evan Drake Green, Carl Iacono, Jan-Willem Pieterse
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Publication number: 20070187579Abstract: The invention relates to an apparatus for checking bank notes which scans the bank notes to be checked by means of a semiconductor array. The inventive apparatus for checking bank notes has two linear semiconductor arrays formed of at least three layers which are sensitive to light of different wavelengths, a first linear semiconductor array scanning the bank notes in a defined range of spectral sensitivity of the semiconductor (e.g. in the visible range), and a second linear semiconductor array scanning the bank notes in a range different therefrom (e.g. of invisible infrared light). From the signals of the two arrays a color image of the bank note and at least one image in the range of invisible light are obtained by suitable combination. The inventive apparatus has the advantage that it can be realized simply and economically, and provides good check results since it avoids artifacts which can be caused for example by parallactic errors.Type: ApplicationFiled: May 21, 2004Publication date: August 16, 2007Inventors: Bernd Wunderer, Klaus Thierauf, Norbert Holl, Dieter Stein
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Publication number: 20070187580Abstract: A photoluminescent light source includes an excitation light source operable to emit light at a primary wavelength and a photoluminescent material optically coupled to the excitation light source. The photoluminescent material has a characteristic to emit light at a secondary wavelength in response to absorbing light at the primary wavelength. Scanned beam systems employing photoluminescent light sources and methods of using the photoluminescent light sources are also disclosed.Type: ApplicationFiled: February 14, 2006Publication date: August 16, 2007Inventors: Martin Kykta, John Lewis, Clarence Tegreene, Christopher Wiklof
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Publication number: 20070187581Abstract: An optical encoder includes an incoherent light source; a first grating, which is an amplitude grating having a first grating period, for spatial amplitude modulation of the incoherent light from the light source; a second grating, which is a phase grating having a second grating period, for spatial phase modulation of light from the first grating; a third grating, which is an amplitude grating having a third grating period, for spatial amplitude modulation of light from the second grating; and a light detecting element for detecting lights from the third grating. The encoder detects relative displacement between the respective gratings. The optical transfer function from the light source to the light detecting element is enhanced, and the efficiency in utilizing light is improved.Type: ApplicationFiled: August 5, 2004Publication date: August 16, 2007Applicant: MITSUBISHI DENKI KABUSHIKI KAISHAInventors: Yoichi Ohmura, Toru Oka, Hajime Nakajima
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Publication number: 20070187582Abstract: An encoder having a code scale, an illumination system, and a plurality of photodetectors is disclosed. The code scale has a plurality of tracks that are illuminated by the illumination system. Each photodetector receives light from a corresponding one of the tracks and generates a signal indicative of a quantity of light received from that track. Each photodetector is limited to detecting light in a band of wavelengths corresponding to that track. Each track generates light in a band of wavelengths corresponding to that track, and the band of wavelengths corresponding to one of the tracks is different from the band of wavelengths corresponding to the tracks that are next to that track. The tracks can include alternating reflective and absorptive stripes, alternating transmissive and reflective stripes, or alternating luminescent and absorptive stripes.Type: ApplicationFiled: February 16, 2006Publication date: August 16, 2007Inventors: Yee Chin, Kean Ng
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Publication number: 20070187583Abstract: In a photoelectric encoder (incremental encoder and absolute encoder) having a detector that is displaceable relative to a scale having a predetermined pattern (incremental pattern and pseudorandom pattern) formed thereon, the detection range, to be simultaneously detected, of the pattern is divided in at least the detection direction, and a plurality of light-receiving systems are provided to detect each of the respective detection areas, whereby measurement of a wide detection range is enabled by using a small-sized and simple optical system and light-receiving system.Type: ApplicationFiled: February 15, 2007Publication date: August 16, 2007Applicant: MITUTOYO CORPORATIONInventors: Toru Yaku, Hiroaki Kawada
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Publication number: 20070187584Abstract: A linear electric field ion mass spectrometer having an evacuated enclosure with means for generating a linear electric field located in the evacuated enclosure and means for injecting a sample material into the linear electric field. A source of pulsed ionizing radiation injects ionizing radiation into the linear electric field to ionize atoms or molecules of the sample material, and timing means determine the time elapsed between ionization of atoms or molecules and arrival of an ion out of the ionized atoms or molecules at a predetermined position.Type: ApplicationFiled: February 14, 2006Publication date: August 16, 2007Inventors: Herbert Funsten, William Feldman
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Publication number: 20070187585Abstract: To provide comprehensive MS-MS analysis, a time-nested separation is employed using two time-of-flight (TOF) mass spectrometers. Parent ions are separated in a slow and long TOF1, operating at low ion energy (1 to 100 eV), and fragment ions are mass analyzed in a fast and short TOF2, operating at much higher (keV) energy. A low energy fragmentation cell between TOF1 and TOF2 is tailored to accelerate fragmentation and dampening steps, mostly by shortening the cell and employing higher gas pressure. Slow separation in TOF1 becomes possible with an introduction of novel TOF1 analyzers. Higher performance is expected with the use of novel hybrid TOF1 analyzers, combining radio frequency (RF) and quadratic DC fields. An RF field retains low-energy ions within a TOF1 analyzer, while a quadratic DC field improves resolution by compensating for a large relative energy spread.Type: ApplicationFiled: March 27, 2007Publication date: August 16, 2007Applicant: LECO CORPORATIONInventor: Anatoli Verentchikov
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Publication number: 20070187586Abstract: Mass spectrometers for trace gas leak detection and methods for operating mass spectrometers are provided. The mass spectrometer includes an ion source to ionize trace gases, such as helium, a magnet to deflect the ions and a detector to detect the deflected ions. The ion source includes an electron source, such a filament. The method includes operating the electron source at an electron accelerating potential relative to an ionization chamber sufficient to ionize the trace gas but insufficient to form undesired ions, such as triply charged carbon.Type: ApplicationFiled: February 15, 2006Publication date: August 16, 2007Inventors: J. Geist, Jeffrey Diep, Peter Williams, Charles Perkins
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Publication number: 20070187587Abstract: The present invention is directed to a method for determining the presence of a residue on or within a fingerprint using matrix-assisted mass spectrometric techniques. The matrix-assisted mass spectrometric technique can be selected from Matrix-Assisted Laser Desorption/Ionization Mass Spectrometry Time-Of-Flight Mass Spectrometry (MALDI-TOF-MS) and/or Surface Assisted Laser Desorption/Ionisation Time-Of-Flight Mass Spectrometry (SALDI-TOF-MS).Type: ApplicationFiled: August 9, 2006Publication date: August 16, 2007Applicant: UNIVERSITY OF SUNDERLANDInventors: Frederick Rowell, Brendan Theaker
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Publication number: 20070187588Abstract: The present invention provides a tandem type mass analysis system capable of carrying out the differential analysis with high efficiency by the tandem type mass analysis. A predetermined number of m/z regions are set up for carrying out the mass analysis with the all ions included therein being dissociated collectively for each m/z region so as to obtain measurement MS2 data. By comparing the measurement MS2 data with reference MS2 data stored in a reference data base, a difference thereof is detected. For the m/z region with a differential component detected, the mass analysis is carried out collectively without dissociation for the all ions included therein so as to obtain measurement MS1 data. By comparing the measurement MS1 data with the reference MS1 data, a difference thereof is detected. From the difference thereof, a parent ion considered to be the differential component factor is presumed for carrying out the mass analysis with the same being dissociated.Type: ApplicationFiled: January 18, 2007Publication date: August 16, 2007Inventors: Kiyomi Yoshinari, Yasushi Terui, Toshiyuki Yokosuka, Kinya Kobayashi, Atsumu Hirabayashi
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Publication number: 20070187589Abstract: A desorption atmospheric pressure chemical ionization (DAPCI) system delivers a primary ion beam composed of an inert, high velocity gas and solvent ions to a surface to effect desorption and ionization of both volatile and non-volatile species present on surfaces. A electrode having a tapered tip is connected to a high voltage power supply. The tapered tip projects outward from a capillary carrying a high-speed flow of gas. A vapor of a solvent is mixed into the annular gas flow surrounding the needle. The gaseous solvent vapor is ionized in close proximity to the tapered tip by virtue of the high voltage applied to the electrode. The high-speed flow of gas and solvent vapor ions extending outward from the capillary is directed toward a substrate on which an analyte of interest may have been deposited.Type: ApplicationFiled: January 16, 2007Publication date: August 16, 2007Inventors: Robert Cooks, Bogdan Gologan, Zoltan Takats, Justin Wiseman, Ismael Cotte-Rodriguez
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Publication number: 20070187590Abstract: The invention, in various embodiments, is directed to an analyzer using a solid-state flow generator to provide effluent flow along a flow path and deliver a sample to an ion mobility based filter and detector for analysis.Type: ApplicationFiled: April 17, 2007Publication date: August 16, 2007Inventors: Raanan Miller, John Wright
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Publication number: 20070187591Abstract: Ion mobility spectrometer. The spectrometer includes an enclosure for receiving a sample therewithin and an electron beam window admits an electron beam into the enclosure to ionize the sample in an ionization region. A shutter grid is spaced apart from the ionization region and means are provided for sample ion preconcentration upstream of the shutter grid. The ion preconcentration is effective to reduce space charge resulting in a lowered threshold detection level.Type: ApplicationFiled: September 12, 2006Publication date: August 16, 2007Inventors: Leslie Bromberg, Kamal Hadidi, Daniel Cohn
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Publication number: 20070187592Abstract: A mass spectrometer includes a main magnet having spaced-apart polepieces which define a gap, the main magnet producing a magnetic field in the gap, an ion source to generate ions and to accelerate the ions into the magnetic field in the gap, the ion source located outside the gap, and an ion detector to detect a selected species of the ions generated by the ion source and deflected by the magnetic field. The ion detector is located in the gap at a natural focus point of the selected species of ions. The mass spectrometer may be used in a trace gas leak detector.Type: ApplicationFiled: February 15, 2006Publication date: August 16, 2007Inventors: J. Geist, Jeffrey Diep, Peter Williams, Charles Perkins
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Publication number: 20070187593Abstract: A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a drive circuit for driving the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.Type: ApplicationFiled: January 26, 2007Publication date: August 16, 2007Applicant: CANON KABUSHIKI KAISHAInventors: Susumu Yasuda, Junichi Seki, Takao Kusaka, Nobuki Yoshimatsu
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Publication number: 20070187594Abstract: A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a memory for storing characteristic information of the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.Type: ApplicationFiled: January 26, 2007Publication date: August 16, 2007Applicant: CANON KABUSHIKI KAISHAInventors: Takao Kusaka, Nobuki Yoshimatsu, Susumu Yasuda, Junichi Seki
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Publication number: 20070187595Abstract: To provide a consistent, high-speed, high-precision measurement method based on an electron beam simulation by reflecting the apparatus characteristics of a CD-SEM in an electron beam simulation, the present invention discloses a method for measuring a measurement target pattern with a CD-SEM, the method comprising the steps of performing an electron beam simulation on various target pattern shapes, which is reflected apparatus characteristic and image acquisition conditions; creating SEM simulated waveforms; storing a combination of the created SEM simulated waveforms and pattern shape information corresponding to the created SEM simulated waveforms as a library; comparing an acquired actual electron microscope image with the SEM simulated waveforms; selecting the SEM simulated waveform that is most similar to the actual electron microscope image; and estimating the shape of the measurement target pattern from the pattern shape information corresponding to the selected SEM simulated waveform.Type: ApplicationFiled: February 9, 2007Publication date: August 16, 2007Inventors: Maki Tanaka, Chie Shishido
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Publication number: 20070187596Abstract: A detector for detecting a particle is disclosed. The detector includes a charge emitter that emits a charge in response to receipt of the particle, an anode for receiving the emitted charge, and electronics for determining whether there is received charge on the anode. The anode may include a pad for receiving the charge and a plurality of conduits (such as transmission lines) for transmitting the charge to the electronics. The anode may be designed to reduce the variance in the path length from the pad of the anode to the electronics. For example, the plurality of conduits in the anode may be constructed such that the transit time of the charge from the pad varies less than a predetermined time. Further, a capacitive element may be included in the detector in order to capacitively couple with the charge emitter. The capacitive element may include a grid that is in the same layer as the pads of the anode in order to provide a short and less variable circuit return path to the charge emitter.Type: ApplicationFiled: October 19, 2006Publication date: August 16, 2007Inventors: Henry Frisch, Harold Sanders, Fukun Tang, Tim Credo
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Publication number: 20070187597Abstract: A focused ion beam system capable of acquiring surface structure information, internal structure information, and internal composition information about a sample simultaneously from the same field of view of the sample. A method of sample preparation and observation employs such focused ion beam system to accurately set a sample processing position based on information about the structure and composition of the sample acquired from multiple directions of the sample, and to process and observe the sample. The system includes, in order to acquire the sample structure and composition information simultaneously, a secondary electron detector, a transmission electron detector, and an energy dispersive X-ray spectroscope or an electron energy loss spectroscope, and employs a stub having the sample rotating and tilting function. The method includes a marking process.Type: ApplicationFiled: January 18, 2007Publication date: August 16, 2007Inventors: Yuya Suzuki, Takeo Kamino, Toshie Yaguchi, Mitsuru Konno, Tsuyoshi Ohnishi
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Publication number: 20070187598Abstract: A scanning electron microscope, by which an image of unevennesses on the surface of a sample may be obtained in a high-resolution manner and a high contrast one, is provided according to the present invention. A sample image is obtained by use of the scanning electron microscope with a configuration in which a positive voltage is applied in order to accelerate a primary electron beam, and an electric field shielding plate, a magnetic field shielding plate, or an electromagnetic field shielding plate is arranged on the upper side of an object lens.Type: ApplicationFiled: January 19, 2007Publication date: August 16, 2007Inventors: Ichiro Tachibana, Mitsugu Sato, Atsuko Fukada, Naomasa Suzuki, Muneyuki Fukuda
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Publication number: 20070187599Abstract: A charged particle beam apparatus includes: a charged particle source which generates a charged particle beam and which applies the charged particle beam to a specimen having a microstructure formed on a surface thereof; an objective lens which excites at least one of an electric field and a magnetic field to converge the charged particle beam onto the specimen; a deflector which scans the specimen with the charged particle beam; a detector which detects at least one of a secondary charged particle, a reflection charged particle and a back scattering charged particle generated from the specimen by the application of the charged particle beam and which outputs a detection signal; a focusing area arranging unit which arranges a plurality of focusing areas including edge points of the microstructure therein in a surface area of the specimen; deflection controller which controls the deflector so that the focusing areas are sequentially scanned to correspond to excitation conditions while changing stepwise the excType: ApplicationFiled: January 24, 2007Publication date: August 16, 2007Inventors: Hideaki Abe, Hiroshi Motoki
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Publication number: 20070187600Abstract: A substrate inspection apparatus includes: an electron beam irradiation device which emits an electron beam and causes the electron beam to irradiate a substrate to be inspected as a primary beam; an electron beam detector which detects at least one of a secondary electron, a reflected electron and a backscattered electron that are generated from the substrate that has been irradiated by the electron beam, and which outputs a signal that forms a one-dimensional or two-dimensional image of a surface of the substrate; a mapping projection optical system which causes imaging of at least one of the secondary electron, the reflected electron and the backscattered electron on the electron beam detector as a secondary beam; and an electromagnetic wave irradiation device which generates an electromagnetic wave and causes the electromagnetic wave to irradiate a location on the surface of the substrate at which the secondary beam is generated.Type: ApplicationFiled: March 21, 2007Publication date: August 16, 2007Applicant: Kabushiki Kaisha ToshibaInventors: Ichirota Nagahama, Yuichiro Yamazaki, Takamitsu Nagai, Motosuke Miyoshi
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Publication number: 20070187601Abstract: An object of this invention is to provide a charged particle beam apparatus that is capable of handling samples without adhering impurities onto the samples. In a scanning electron microscope in which a lubricant was coated on a sliding portion of a movable member that moves inside a vacuum chamber, a substance from which low molecular components were removed is used as the lubricant. It is thus possible to inhibit sample contamination and suppress the occurrence of defects in a process following measurement of the samples.Type: ApplicationFiled: April 17, 2007Publication date: August 16, 2007Inventors: Hiroaki Mito, Katsuhiro Sasada, Kazuo Kato, Tomohiro Kudo, Tomonori Saeki, Yasuo Yahagi, Masayuki Kobayashi
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Publication number: 20070187602Abstract: The invention relates to a circuit array for the reading out of electronic signals (t1, t4) from high-resolution thermal sensors (1?, 1*) with small signals and small signal dynamics which permits an interference-free reading out of individual elements from a larger sensor array. The invention relates to a circuit array for the interference-free reading out of electronic signals of individual elements of high-resolution arrays of thermal sensors (1?, 1*) such as thermocouples, thermopiles, pyrometers and bolometers.Type: ApplicationFiled: May 21, 2004Publication date: August 16, 2007Inventors: Christian Wennmacher, Reinhard Mikuta, Edmund Burte
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Publication number: 20070187603Abstract: A radiometer sensor includes a target plate and a micro-mechanical spring which supports the target plate above a base support. This construction allows for displacement of the target plate in a direction perpendicular to the base support in response to radiation which is received by a top surface of the target plate. The sensor is enclosed within a housing that defines a sealed interior chamber within which a vacuum has been drawn. The target plate preferably is non-deformable in response to received radiation. Capacitive or piezoelectric sensors are provided to detect the displacement of the target plate, and the measured displacement is correlated to determine a received radiation level. Radiometer sensor output signals are quantized and signal processed so as to make a radiation level determination.Type: ApplicationFiled: February 10, 2006Publication date: August 16, 2007Applicant: STMicroelectronics, Inc.Inventor: Patrick Jankowiak
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Publication number: 20070187604Abstract: A quantum well infrared photodetector (QWIP) focal plane array having structures, each structure having stacked layers of quantum wells and a reflective grating to provide polarization sensitivity. The reflective grating is etched to provide electrical contacts for individual pixels. The reflective gratings comprise grooves, where the grooves for a particular structure run in a particular direction to provide polarization sensitivity. Each structure may comprise groups of quantum well layers, each group sensitive to a particular frequency band. By shorting out unwanted quantum well layers, and by forming the reflective gratings to come into contact with the quantum well layers having a particular frequency band sensitivity, the pixels in the QWIP focal plane array may provide frequency and polarization information.Type: ApplicationFiled: January 16, 2007Publication date: August 16, 2007Inventors: Sumith Bandara, Sarath Gunapala, John Liu
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Publication number: 20070187605Abstract: A temperature detection system for detecting relative or absolute temperatures of objects in a monitored area has at least one infrared (IR) detector and at least one optical element for directing IR radiation within a detector field of view onto the infrared detector. A scanning system is configured to produce relative movement between the optical element and the IR detector such that the detector field of view is scanned across a monitored area to receive IR radiation from objects in the monitored area. A signal processing module for receiving the detector output signal is configured to produce an output profile of the relative temperatures of objects in the monitored area. The IR detector may be a pyroelectric detector.Type: ApplicationFiled: December 11, 2006Publication date: August 16, 2007Applicant: SUREN SYSTEMS, LTD.Inventor: Eric Micko
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Publication number: 20070187606Abstract: A method and tool for conducting NIR overlay metrology is disclosed. Such methods involve generating a filtered illumination beam including NIR radiation and directing that illumination beam onto an overlay target to produce an optical signal that is detected and used to generate overlay metrology measurements. The method is particularly suited to substrate applications having layers of opaque material that are transmissive in the NIR range (e.g., amorphous carbon) and where NIR imaging is used to obtain overlay measurements. A tool implementation includes a means for generating a filtered illumination beam extending into the NIR range and a detector for receiving NIR signal from an NIR illuminated target and a computer for processing the signal data to obtain overlay metrology measurements.Type: ApplicationFiled: November 8, 2006Publication date: August 16, 2007Inventors: Michael Adel, Aviv Frommer
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Publication number: 20070187607Abstract: A multi-pass gas cell that operates with reflected radiation pass through a gas, the reflected radiation transmitted and received by first and second fiber optic ports that are subject to an alignment adjustment, and a mirrored viewing window having a inner reflective surface exposed to an interior of the elongated cell body for reflecting the radiation within the cell body, an outer viewing surface, and a transmittance characteristic that permits a portion of the radiation to pass through the mirrored window, from the inner reflective surface to the outer viewing surface, as a visual indicator of the alignment condition of the reflected radiation relative to the first and second fiber-optic ports.Type: ApplicationFiled: February 5, 2007Publication date: August 16, 2007Inventor: Walter Doyle
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Publication number: 20070187608Abstract: A method of improving energy determination of a Gamma event which interacts with a segmented scintillation detector, the method comprising: identifying radiation events detected by a detector that are likely not to have deposited their full energy in the detector, based only on characteristics of said detected events; and treating the identified radiation events differently from other radiation events that are likely to have deposited their full energy in the detector.Type: ApplicationFiled: March 23, 2007Publication date: August 16, 2007Inventors: Steve Beer, Dan Inbar
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Publication number: 20070187609Abstract: The present invention provides digital imaging architectures comprising detectors coupled to readout circuitry, wherein the readout circuitry functions in particular modes, the use of which can depend on characteristics of the input signals transferred to the readout circuitry from the detectors, or can depend on the characteristics of the output signal required from the readout circuitry. For example, when the input signal has a particular magnitude the readout circuitry can function in a first mode in which the input signal can be amplified to a measurable level, and when the input signal has another magnitude, the readout circuitry can function in an alternate mode in which the input signal can be read out with a different or no amplification. Multiple modes can be implemented to provide various levels of amplification to the input signal, for example, three or more modes of operation of the readout circuitry can be implemented. Furthermore, more than one mode can be used to read out the same input signal.Type: ApplicationFiled: August 12, 2004Publication date: August 16, 2007Inventor: Karim Karim
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Publication number: 20070187610Abstract: According to a radiation imaging apparatus, any separate AEC sensor need not be prepared. Additionally, the apparatus main body can be made compact. To accomplish this, the radiation imaging apparatus has a first optical conversion element that converts incident radiation into an electrical signal, and generates image information on the basis of the electrical signal output from the first optical conversion element. Below a portion that is aligned to the gap between the first optical conversion elements, a plurality of second optical conversion elements which detect the incident amount of the radiation from the gap are formed. Exposure control for the radiation or control of the optical conversion elements is executed on the basis of the detection result by the second optical conversion element.Type: ApplicationFiled: April 18, 2007Publication date: August 16, 2007Applicant: CANON KABUSHIKI KAISHAInventors: Toshiko MORII, Masakazu MORISHITA, Osamu TSUJII, Minoru WATANABE, Takamasa ISHII
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Publication number: 20070187611Abstract: An imaging radiation detector includes a scintillator coupled to an array of photodiodes operating in Geiger mode. The array is divided into separate detector pixels, each of which is composed of a multiplicity of photodiode cells with their outputs tied together. While each of the cells operates independently in a binary or digital mode, by tying together the outputs of a multiplicity of adjacent photodiode cells forming a single pixel, the sum of the outputs is proportional to the intensity of generated scintillation photons, similar to the output of a PMT. Appropriate quenching circuitry is provided to rapidly reset the photodiodes after scintillation photon detection.Type: ApplicationFiled: February 14, 2006Publication date: August 16, 2007Inventors: Samir Chowdhury, Jinhun Joung
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Publication number: 20070187612Abstract: An ultraviolet-irradiating device of an optical disk which makes effective use of electric power and has a long life, and an ultraviolet-irradiating method to an optical disk are provided. An ultraviolet-irradiating device 14 of an optical disk for irradiating ultraviolet curable resin A applied to a disk substrate D with ultraviolet rays from an ultraviolet-irradiating unit 143 to cure the ultraviolet curable resin A, wherein an ultraviolet light-emitting diode R is used as an ultraviolet light source of the ultraviolet-irradiating unit 143. According to the present invention, since the ultraviolet light-emitting diode R is used as an ultraviolet light source, lights in a visible region and an infrared region are not emitted like a conventional xenon lamp, that is, only ultraviolet rays required for curing the ultraviolet curable resin can be irradiated, so that power consumption required for light emission of the light source can be reduced.Type: ApplicationFiled: March 8, 2005Publication date: August 16, 2007Inventors: Takao Inoue, Hiroyuki Masuda, Masashi Aki, Mikuni Amo, Masayuki Tsuruha
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Publication number: 20070187613Abstract: A mechanism for supporting a charge collecting electrode in the chamber of an ion detector includes an insulator that is mounted in the chamber and is attached to the electrode. A first magnet is used to establish a magnetic field in the chamber, and a second magnet is attached to the electrode. The magnet on the electrode then interacts with the magnetic field to stabilize the electrode in the chamber between the insulator and the first magnet.Type: ApplicationFiled: February 16, 2006Publication date: August 16, 2007Inventor: Jukka Kahilainen
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Publication number: 20070187614Abstract: An ion guide with two or more ion focusing elements and a gas channeling sleeve is described. An ion transport space within the gas channeling sleeve is in fluid communication with a pumping port. A suction device is used to suction gas out of the ion transport space through the pumping port establishing a gas flow. Ions in the ion transport space are transported from an ion entry end to an ion exit end of the ion guide by the gas flow. Several examples include a multipole ion guide in which rods are used as ion focusing elements. The gas channeling sleeve is fitted about the rods. In another example, toroidal or ring shaped ion focusing elements are used as ion focusing elements. In another example, a set of ion focusing rings are mounted between insulators to form a cylinder with a gas impermeable side wall. The cylinder is itself used as the gas channeling sleeve.Type: ApplicationFiled: February 8, 2007Publication date: August 16, 2007Inventors: Bradley Schneider, Thomas Covey
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Publication number: 20070187615Abstract: A charge monitoring system may include a platen having a surface configured to accept a wafer thereon, and a charge monitor disposed relative to the platen so that an ion beam simultaneously strikes a portion of the charge monitor and a portion of the wafer. The charge monitor is configured to provide a charge monitor signal representative of a charge on a surface of the wafer when the ion beam simultaneously strikes the portion of the charge monitor and the portion of the wafer. The charge monitor signal may depend, at least in part, on a beam potential of the ion beam.Type: ApplicationFiled: February 14, 2006Publication date: August 16, 2007Applicant: Varian Semiconductor Equipment Associates, Inc.Inventors: Russell Low, George Gammel, Peter Kurunczi, Eric Cobb
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Publication number: 20070187616Abstract: Scanning beam display systems using fluorescent screens and various servo feedback control mechanisms to control display imaging qualities, including techniques and mechanism for measuring and correcting pyramidal errors of a polygon scanner.Type: ApplicationFiled: December 13, 2006Publication date: August 16, 2007Inventors: Alan C. Burroughs, Mark A. Pajdowski, David L. Kent, Roger A. Hajjar
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Publication number: 20070187617Abstract: There is provided a method and a device of monitoring oil oxidation in real time. The method of the present invention comprises the steps of: irradiating ultraviolet light into oil to be monitored; measuring fluorescence emission intensity of the oil in red, green and blue wavelength bands; determining one value measured in a relatively long wavelength band and the other value measured in a relatively short wavelength band among the fluorescence emission intensity measured in the red, green and blue wavelength bands; calculating a fluorescence emission ratio which is defined as a ratio of the value measured in the relatively long wavelength band to the value measured in the relatively short wavelength band; and monitoring a change in the fluorescence emission ratio. It is then determined whether the fluorescence emission ratio reaches a predetermined critical magnitude. When the fluorescence emission ratio reaches the critical magnitude, the necessity of replacing the oil with new one is indicated.Type: ApplicationFiled: April 18, 2006Publication date: August 16, 2007Inventors: Hosung Kong, Eui Yoon, Hung Han, Lyubov Markova, Mikhail Semenyuk, Vladimir Makarenko
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Publication number: 20070187618Abstract: Methods and apparatus are disclosed for removing particles from an ion implantation chamber by introducing at least one sacrificial wafer into the implanter and subjecting it to ion implantation. As the sacrificial wafer is exposed to the ion beam, it becomes charged. Particles present in the implantation chamber are then drawn to a charged wafer surface by electrostatic forces. The sacrificial wafer thus serves as a gettering element, attracting and capturing particulates from the surrounding environment.Type: ApplicationFiled: February 13, 2007Publication date: August 16, 2007Applicant: IBIS TECHNOLOGY CORPORATIONInventor: Robert Dolan
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Publication number: 20070187619Abstract: An electromagnet and related ion implanter system including active field containment are disclosed. The electromagnet provides a dipole magnetic field within a tall, large gap with minimum distortion and degradation of strength. In one embodiment, an electromagnet for modifying an ion beam includes: a ferromagnetic box structure including six sides; an opening in each of a first side and a second opposing side of the ferromagnetic box structure for passage of the ion beam therethrough; and a plurality of current-carrying wires having a path along an inner surface of the ferromagnetic box structure, the inner surface including the first side and the second opposing side and a third side and a fourth opposing side, wherein the plurality of current-carrying wires are positioned to pass around each of the openings of the first and second opposing sides.Type: ApplicationFiled: February 15, 2006Publication date: August 16, 2007Inventors: Peter Kellerman, Keneth Purser
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Publication number: 20070187620Abstract: Disclosed herein is an apparatus and method for partial ion implantation. The apparatus includes a wafer support, an ion beam irradiator capable of generating and irradiating an ion beam entering the wafer, and an ion beam exposure adjustor to adjust exposure of the wafer with respect to the ion beam according to regions of the wafer by setting an exposure opening via combination of ion beam shields for blocking the ion beam with respect to the wafer. The exposure opening enables the wafer to be partially exposed to the ion beam irradiated therethrough. With this apparatus, effective partial ion implantation can be performed to compensate variation of a threshold voltage Vt in a channel of a transistor, thereby providing more uniform characteristics of the transistor.Type: ApplicationFiled: June 9, 2006Publication date: August 16, 2007Applicant: HYNIX SEMICONDUCTOR INC.Inventors: Yong Soo Jung, Seung Woo Jin, Min Yong Lee, Kyoung Bong Rouh
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Publication number: 20070187621Abstract: Ion sources, systems and methods are disclosed.Type: ApplicationFiled: November 15, 2006Publication date: August 16, 2007Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill, Ulrich Mantz, Michael Steigerwald
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Publication number: 20070187622Abstract: A charged particle beam apparatus includes a column, the column having: a charged particle beam source which generates a charged particle beam to apply a charged particle beam to the surface of a substrate, a position where the charged particle beam is irradiated to the substrate being a beam position; and a gas mechanism provided in proximity to the substrate to supply a gas to the surface of the substrate, the gas mechanism having an opening which permits passage of the charged particle beam, a gas supply opening which locally injects the gas to the vicinity of the beam position, and a gas exhaust opening which exhausts the injected gas in the vicinity of the beam position to exhaust the gas.Type: ApplicationFiled: January 25, 2007Publication date: August 16, 2007Inventor: Osamu Nagano
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Method, System and Device for Microscopic Examination Employing Fib-Prepared Sample Grasping Element
Publication number: 20070187623Abstract: A method including, in one embodiment, severing a sample at least partially from a substrate by cutting the substrate with a focused ion beam (FIB), capturing the substrate sample by activating a grasping element, and separating the captured sample from the substrate. The captured sample may be separated from the substrate and transported to an electron microscope for examination.Type: ApplicationFiled: April 17, 2007Publication date: August 16, 2007Applicant: ZYVEX INSTRUMENTS, LLCInventors: George SKIDMORE, Matthew ELLIS, Aaron GEISBERGER, Kenneth BRAY, Kimberly TUCK, Robert Folaron