Patents Issued in March 6, 2008
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Publication number: 20080054149Abstract: The principles of the present invention relate to a collapsible computer platform suitable for use on a seatback tray of an airplane, train, or the like. One example embodiment includes a first platform which may be used to place a laptop or other portable computing device on. The collapsible platform also includes two or more support assemblies. The support assemblies have a top portion coupled to the first platform and a second portion configured to rest on a surface. The support assemblies are configured to be collapsible relative to the first platform and to define a cavity or open space between the first platform and the surface on which the support assemblies rest when the deployed. The defined cavity may provide an open space for storage and work while a laptop computer is placed on the first platform.Type: ApplicationFiled: August 30, 2006Publication date: March 6, 2008Inventor: Paul Sean Freebairn
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Publication number: 20080054150Abstract: The present invention provides mechanisms for tilting the seat of a tractor or similar vehicle. In some embodiments, a cam shaft provides dual opposing cams positioned under the seat, so that when the cam shaft is rotated, the cams tilt the seat to one side or another. A switch connects an electric motor to a power supply, such as the battery of the vehicle, so the vehicle's operator can activate the motor to rotate the cam shaft and thereby tilt the seat to a desired angle. When the vehicle traverses a slope and tilts to one side, the inventive mechanisms are useful to return the seat to a level position relative to the horizon, thereby allowing the operator to better maintain control of the vehicle and keep his or her back straight. This provides potentially greater safety and comfort for the operator.Type: ApplicationFiled: October 17, 2006Publication date: March 6, 2008Inventor: Lyle J. Stuby
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Publication number: 20080054151Abstract: A pair of restraining plates are pivotally installed in a housing of a lock unit. The restraining plates have respective cam portions that are arranged to put therebetween a striker when the restraining plates are pivoted in respective given directions. A biasing member is arranged to bias one of the restraining plates to pivot in the given direction thereof, and a transmission mechanism is arranged between the restraining plates to induce a synchronized pivoting of the two restraining plates. Thus, when one of the restraining plates is pivoted in the given direction thereof, the other of the restraining plates is pivoted in the given direction thereof. With this arrangement, once the striker is locked by the lock unit, at least one of the cam portions of the restraining plates is pressed against the striker thereby to suppress or at least minimize undesirable play of the lock unit relative to the striker.Type: ApplicationFiled: March 30, 2007Publication date: March 6, 2008Inventors: Ryoji Shimura, Katsumi Nakagome
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Publication number: 20080054152Abstract: A series-type engine mount provided in a selectively combined arrangement (B-1), (B-2) or (B-3), with an mount body (A). (A) A fluid-filled mount body has an elastic body connecting a first and second mounting member; a pressure receiving chamber defined by the elastic body; an equilibrium chamber defined by a flexible layer; a first orifice passage connection the pressure receiving and equilibrium chambers; a medial chamber; a second orifice passage connecting the medial and equilibrium chambers; a pressure fluctuation transmitting mechanism; a pressure regulating rubber plate; an air chamber; and an air passage connected to the air chamber with a port. (B-1) The port is open to an atmosphere to expose the air chamber to atmosphere. (B-2) The port is connected alternatively to atmosphere and vacuum via a static pressure switching valve. (B-3) The port is cyclically switched between connection to atmosphere and vacuum via a dynamic pressure switching valve.Type: ApplicationFiled: October 3, 2007Publication date: March 6, 2008Applicant: TOKAI RUBBER INDUSTRIES, LTD.Inventors: Hajime Maeno, Atsushi Muramatsu
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Publication number: 20080054153Abstract: The invention concerns a microphone holder for fixing at least one microphone and a microphone with microphone holder. The object of the present invention is to provide a microphone holder which ensures a greater degree of flexibility in terms of the adjustability and positionability of a microphone with respect to the acoustic source. A microphone holder for fixing at least one microphone comprising a holding portion having a holding device for holding a microphone, and a clamping portion for fixing the microphone holder, wherein the holding portion has an adjusting device for adjusting the holding device along the holding portion, wherein the holding portion is of a substantially arcuate configuration.Type: ApplicationFiled: August 31, 2005Publication date: March 6, 2008Inventors: Gerd Soehnholz, Dieter Fleischer
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Publication number: 20080054154Abstract: A wire harness projection guidance system comprises a support stand for supporting a wire harness board used to construct a wire harness. A projector is mounted to the support stand for projecting an image onto a wire harness board supported on the support stand. A memory stores data representing wire route for each of a plurality of individual wires in a wire harness. A programmed processing system is operatively coupled to the memory and the projector for generating a series of images to be projected by the projector. Each image in the series represents one of the stored wire routes for an associated individual wire.Type: ApplicationFiled: March 27, 2007Publication date: March 6, 2008Inventor: Xiao Lin
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Publication number: 20080054155Abstract: A lens assembly and method of adjusting a lens assembly using an electrically active polymer element. The assembly comprises a lens; a pixel array for receiving an image through said lens via an optical path; a moveable element for changing the optical properties of said optical path; and at least one electrically active polymer for changing volume in response to an applied voltage, said polymer being coupled to said moveable element such that changes in volume of said polymer causes movement of said moveable element.Type: ApplicationFiled: August 31, 2006Publication date: March 6, 2008Inventor: Dean A. Klein
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Publication number: 20080054156Abstract: The invention relates to a method for adjusting focus in an automated microscope. The method may comprise the steps of: providing an optical detector for image acquisition, wherein the optical detector comprises an array of sensor pixels; designating a region of interest in the array of sensor pixels to emulate a confocal aperture; directing a light beam to illuminate an object according to a predefined pattern, thereby forming an image of the illuminated pattern at the optical detector, wherein the image of the illuminated pattern substantially overlaps the designated region of interest; detecting a light intensity from sensor pixels located within the designated region of interest; and adjusting a relative focal position of an objective lens based on the detected light intensity.Type: ApplicationFiled: October 31, 2007Publication date: March 6, 2008Applicant: GENERAL ELECTRIC COMPANYInventor: PAVEL FOMITCHOV
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Publication number: 20080054157Abstract: A photodetector to be incorporated in an optical pickup device, comprising: a photodiode that a laser light emitted from a laser diode is applied to and that outputs a signal corresponding to light amount of the laser light; and a translucent resin member configured to cover the photodiode, including a light receiving portion that the laser light is applied to and that causes the laser light to be applied to the photodiode, and a peripheral portion provided around the light receiving portion, the light receiving portion being smaller in thickness than the peripheral portion.Type: ApplicationFiled: August 16, 2007Publication date: March 6, 2008Applicants: SANYO ELECTRIC CO., LTD., SANYO OPTEC DESIGN CO., LTD.Inventors: Ryoichi Kawasaki, Kenichirou Kawabuchi
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Publication number: 20080054158Abstract: A method to dynamically stabilize a target image formed on an image plane of an imaging device located in a moving vehicle. The method includes setting an origin in the image plane of the imaging device at an intersection of a first axis, a second axis and a third axis, imaging a target so that an image centroid of the target image is at the origin of the image plane, monitoring sensor data indicative of a motion of the vehicle, and generating pan and tilt output to stabilize the image centroid at the origin in the image plane to compensate for vehicle motion and target motion. The pan and tilt output are generated by implementing exponentially stabilizing control laws. The implementation of the exponentially stabilizing control laws is based at least in part on the sensor data.Type: ApplicationFiled: September 5, 2006Publication date: March 6, 2008Applicant: Honeywell International Inc.Inventors: Kartik B. Ariyur, Saad J. Bedros, Vassilios Morellas
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Publication number: 20080054159Abstract: An ambient light processing system for controlling a display device by sensing ambient light and a method using the system. The ambient light processing system includes a photo-detector, an amplification unit an analog-to-digital converter and a controller. The photo-detector outputs a sensed signal corresponding to the luminous intensity of the ambient light. The amplification unit amplifies the sensed signal with a high amplification factor to output a first amplified signal and amplifies the sensed signal with a low amplification factor to output a second amplified signal. The analog-to-digital converter respectively converts the first amplified signal and the second amplified signal into a first digital signal and a second digital signal. The controller outputs a first control signal and a second control signal for controlling the display device in response to the first digital signal and the second digital signal.Type: ApplicationFiled: May 8, 2007Publication date: March 6, 2008Inventors: Jae-suk Yu, Dong-yul Lee
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Publication number: 20080054160Abstract: Optical devices and techniques for using optical polarization of light to transmit through an optical path four times to quadruple a total delay in the light through the optical path.Type: ApplicationFiled: September 4, 2007Publication date: March 6, 2008Applicant: GENERAL PHOTONICS CORPORATIONInventor: Xiaotian Steve Yao
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Publication number: 20080054161Abstract: An automatic exterior light control includes an image array sensor and a controller. The image array sensor includes an array of pixel sensors, and is configured and mounted such that a field of view of the image array sensor substantially passes through an associated windshield area that is wiped by a windshield wiper. The controller is connected to the image array sensor and configured to receive at least a portion of at least one image from the image array sensor that is substantially free of windshield surface contamination.Type: ApplicationFiled: November 7, 2007Publication date: March 6, 2008Applicant: DONNELLY CORPORATIONInventors: Kenneth Schofield, Mark Larson, Keith Vadas
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Publication number: 20080054162Abstract: An optical semiconductor device of the present invention includes: a light-receiving element which converts light into an electric signal; an amplifier circuit having an input terminal to which the light-receiving element is connected, and which amplifies the electric signal; a connection wire to which the signal amplified by the amplifier circuit is outputted; an output circuit having an input terminal to which the connection wire is connected, and which performs current amplification on the signal amplified by the amplifier circuit and outputs the current-amplified signal to an output terminal; a feedback resistor connected between the input of the amplifier circuit and the output terminal; and a shield wire connected to a potential outputted from the output circuit or a potential resulting from a voltage follower of the potential outputted from the output circuit, and which shields the connection wire from noise.Type: ApplicationFiled: June 13, 2007Publication date: March 6, 2008Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.Inventors: Hideo FUKUDA, Shinichi MIYAMOTO
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Publication number: 20080054163Abstract: A logarithmic-compression analog-digital conversion circuit, includes: a logarithmic amplifier; and a converter. The logarithmic amplifier is configured to logarithmically convert an input current to a voltage using forward characteristics of a p-n junction, and configured to output the voltage. The converter is configured to output a digital signal based on the output voltage of the logarithmic amplifier while reducing temperature dependence of the logarithmic amplifier by successively comparing the output voltage with a voltage generated from a reference voltage source which has a temperature dependence.Type: ApplicationFiled: August 24, 2007Publication date: March 6, 2008Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Hiroshi Suzunaga
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Publication number: 20080054164Abstract: Methods, devices, and systems for improving (i.e., reducing) the settling time of an output signal read from a photo sensor and improving the PSRR of the supply voltage are disclosed, wherein a detected charge in a pixel is converted to a voltage and drives a source follower transistor. A bias transistor is coupled in series with the source follower transistor and includes an output therebetween. The bias transistor is driven to source a reduced current when the voltage results from a readout of a reset value of the pixel and the bias transistor is driven to source an enhanced current when the voltage results from a readout of a sensed signal value.Type: ApplicationFiled: August 31, 2006Publication date: March 6, 2008Inventor: Robert Johansson
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Publication number: 20080054165Abstract: A photoelectric-conversion apparatus includes a photoelectric-conversion area where a plurality of photoelectric-conversion elements configured to convert incident light into electrical charges, a plurality of floating-diffusion areas, a plurality of transfer-MOS transistors configured to transfer electrical charges of the photoelectric-conversion element to the floating-diffusion area, and a plurality of amplification-MOS transistors configured to read and transmit a signal generated based on the transferred electrical charges to an output line are provided. An antireflection film is provided on a light-receiving surface of the photoelectric-conversion element. The gate of the amplification-MOS transistor is electrically connected to one floating-diffusion area by providing one conductor in a single contact hole, and the anti-reflection film covers the photoelectric-conversion area except a base part of the contact hole.Type: ApplicationFiled: August 7, 2007Publication date: March 6, 2008Applicant: CANON KABUSHIKI KAISHAInventors: Mineo Shimotsusa, Shigeru Nishimura, Shunsuke Takimoto
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Publication number: 20080054166Abstract: A detachably coupled image intensifier and image sensor combination is disclosed along with systems and methods for using the detachably coupled image intensifier and image sensor combination. In one embodiment, there are at least two fiber optic plates aligned between the image intensifier and image sensor, and an oil or a gel is used to fill some or all of the gap(s) between pair(s) of adjacent fiber optic plates. In one embodiment, the detachably coupled image intensifier and image sensor combination is used for sample inspection.Type: ApplicationFiled: October 30, 2007Publication date: March 6, 2008Applicant: Applied Materials Israel Ltd.Inventors: Tal KUZNIZ, Avishay GUETTA
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Publication number: 20080054167Abstract: In the photoelectric encoder of the invention, as a light passing zone PZ of a movable object 21 travels by one pitch P, an output signal OUT2 of a second logical operation unit 26b comes to be delayed in phase by 45° with respect to an output signal OUT1 of a first logical operation unit 26a. Therefore, an output having a resolution two times higher than that of the movable object having a phase difference of 90° can be obtained, where the width of each of light receiving elements 22a-22d is (¼)P. Accordingly, the width of each of the light receiving elements can be made two times larger, compared with the case where the width of each of the light receiving elements is (?)P as in conventional optical encoders. Thus, the output strength of the detection signal can be increased, so that the S/N ratio can be improved.Type: ApplicationFiled: August 29, 2007Publication date: March 6, 2008Inventors: Masato SASAKI, Norikazu OKADA
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Publication number: 20080054168Abstract: An improved near-field scanning optical microscope probe is disclosed. The near-field scanning optical microscope probe includes a probe body and two electrodes extending from the probe body to form a probe tip. In addition, a light-emitting diode is disposed between the two electrodes at the probe tip to act as a light source for the near-field scanning optical microscope probe.Type: ApplicationFiled: August 31, 2007Publication date: March 6, 2008Inventors: Kazunori Hoshino, Xiaojing Zhang
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Publication number: 20080054169Abstract: An optical encoder has subtracters serving as signal processing circuits, adders serving as an arithmetic processing section, comparators serving as an A/D converting section, exclusive-or circuits, and output circuits as a digital signal section. Two signals, A1+ and A1?, different in phase by 180 degrees from each other are input to a subtracter, which has an adjustable resistor whose resistance is adjustable. Adjustment of the resistance of the adjustable resistor reduces the DC offset of a signal, {(A1+)?(A1?)}, and a signal, {(A1?)?(A1+)}.Type: ApplicationFiled: September 5, 2007Publication date: March 6, 2008Inventor: Norikazu OKADA
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Publication number: 20080054170Abstract: An optical encoder is comprised of three component parts, which are an emission-side light-pervious resin 6 by which a light emitting chip 1 is sealed, a reception-side light-pervious resin 8 by which a light receiving chip 2 is sealed, and an outer casing 4 to which a lens 3 is integrated and in which the emission-side light-pervious resin 6 and the reception-side light-pervious resin 8 are housed. Thus, the optical encoder can be reduced in parts count, allowing the development cost to be reduced, as compared with the case where the lens 3 for collimating light derived from the light emitting chip 1 and the outer casing 4 are provided as independent component parts.Type: ApplicationFiled: August 28, 2007Publication date: March 6, 2008Inventor: Kazuaki Okano
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Publication number: 20080054171Abstract: The invention relates to a target for a laser desorption/ionisation mass spectrometer, comprising a substrate that is at least partially coated with a carbon-containing layer comprising a material selected from the group consisting of diamond, amorphous carbon, DLC (diamond-like carbon), graphite, nanotubes, nanowires, fullerenes and mixtures thereof.Type: ApplicationFiled: April 4, 2004Publication date: March 6, 2008Inventors: Gunther Bonn, Isabel Feuerstein, Christian Huck, Muhammad Najam-Al-Haq, Matthias Rainer, Gunther Stecher, Georg Schwarzmann, Doris Steinmuller-Nethl, Detlef Steinmuller
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Publication number: 20080054172Abstract: A gas monitoring apparatus capable of real-time detection of a kind of chemical warfare agent, namely diphenylcyanoarsine (DC) and/or diphenylchloroarsine (DA). Atmospheric pressure chemical ionization mass spectrometry is carried out in the positive ionization mode, the total amount of DC and DA is determined from the intensity of an ion common to DC and DA, the DC concentration is determined from the intensity of an ion specific to DC, and the difference between them is regarded as the DA concentration.Type: ApplicationFiled: February 9, 2007Publication date: March 6, 2008Inventors: Yasuo Seto, Isaac Ohsawa, Hiroshi Sekiguchi, Hisashi Maruko, Yasuaki Takada, Akihiko Okumura, Hidehiro Okada, Hisashi Nagano, Izumi Waki
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Publication number: 20080054173Abstract: According to an aspect of the present invention, there are provided an ion trap mass spectrometry method and an ion trap mass spectrometry device using a mass spectrometer, the mass spectrometer including: an ion source part for ionizing a sample; an ion trap part for trapping ions generated in the ion source; a main high frequency power source for applying a main high frequency voltage to the ion trap part, and an auxiliary high frequency power source for applying an auxiliary high frequency voltage thereto; and a detector for detecting the ions ejected from the ion trap. The ion trap mass spectrometry method and the ion trap mass spectrometry device includes the steps of: accumulating desired ions into the ion trap part by ejecting undesired ions while accumulating ions into the ion trap part; and ejecting undesired ions that remain in the ion trap part and leaving the desired ions in the ion trap part are repeated alternately.Type: ApplicationFiled: August 10, 2007Publication date: March 6, 2008Inventors: Hiroyuki Yasuda, Shinji Nagai, Tetsuya Nishida
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Publication number: 20080054174Abstract: An ion mobility spectrometer is described having an ion filter in the form of multiple parallel ion channels defined by conductive layers separated by non-conductive layers. A time-varying electric potential applied to the conductive layers allows the filter to selectively admit ion species. The device may be used without a drift gas flow. Microfabrication techniques are described for producing microscale spectrometers, as are various uses of the spectrometer.Type: ApplicationFiled: August 2, 2005Publication date: March 6, 2008Inventors: Paul Boyle, Andrew Koehl, David Ruiz Alonso
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Publication number: 20080054175Abstract: Systems and methods for calculating ion flux. In one embodiment, a mass spectrometer includes an ion source for emitting a beam of ions from a sample and at least one detector positioned downstream of said ion source. The at least one detector comprises a plurality of detector channels. The mass spectrometer also includes a controller operatively coupled to the plurality of detector channels. The controller is configured to: determine ion abundance data correlated to each detector channel; determine corrected ion abundance data correlated to each detector channel; determine confidence data corresponding to the ion abundance data for each of the detector channels; and determine a confidence weighted abundance estimate of the ion flux correlated to both the ion abundance data and to the confidence data.Type: ApplicationFiled: August 29, 2007Publication date: March 6, 2008Inventors: Nic Bloomfield, Gordana Ivosev
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Publication number: 20080054176Abstract: A laser spray method exhibiting a high detection sensitivity when applied to mass analysis has its sensitivity raised further. In a laser spray method of ionizing a liquid sample by irradiating, with a laser beam, the end of a capillary into which the sample has been introduced, use is made of an infrared laser as the laser beam, at least the end of the capillary is formed of a substance that does not readily absorb the laser beam used, and either the capillary is formed of a conductor and a high voltage is applied thereto, or the capillary is formed of an insulator, a conductive wire is placed inside a small cavity of the capillary and a high voltage is applied to the conductive wire.Type: ApplicationFiled: March 30, 2004Publication date: March 6, 2008Inventor: Kenzo Hiraoka
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Publication number: 20080054177Abstract: A method and apparatus for Flow Injection Analysis (FIA) into Atmospheric Pressure Ion sources (API) including Electrospray (ES) and Atmospheric Pressure Chemical Ionization (APCI) sources whereby the sampling and spray needles are one and the same. The sampling and spray needle configured with an autoinjector apparatus or used in manual injection is introduced directly into a mating ES or APCI probe configured in an API source. Such a sampling and spray needle eliminates the need for injector valves, transfer lines or additional fluid delivery systems in FIA into API sources interfaced to mass spectrometers or other chemical analyzers. The use of a sampling and spray needle configuration reduces component costs, liquid dead volume, sample dilution effects, and minimizes cross contamination effects, solvent consumption and waste while increasing sample throughput.Type: ApplicationFiled: April 26, 2002Publication date: March 6, 2008Inventors: Bruce Andrien, J. Banks, James Boyle
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Publication number: 20080054178Abstract: An improved ion funnel design is disclosed that decreases the axial RF (parasite) fields at the ion funnel exit. This is achieved by addition of one or more compensation electrodes after the conductance limit electrode. Various RF voltage profiles may be applied to the various electrodes minimizing the parasite axial potential wells. The smallest RF aperture that serves as the conductance limiting electrode is further reduced over standard designs. Overall, the ion funnel improves transmission ranges of both low m/z and high m/z ions, reducing RF activation of ions and decreasing the gas load to subsequent differential pumping stages.Type: ApplicationFiled: September 30, 2005Publication date: March 6, 2008Applicant: Battelle Memorial InstituteInventors: Aleksey V. Tolmachev, Richard D. Smith
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Publication number: 20080054179Abstract: A method of fabricating sample lamella for transmission electron microscopy (TEM) analysis is provided. A waiting-examination sample having an analysis target on the top surface of that is offered, and at least a mark around the analysis target is defined. A covering layer is covered on the top surface of waiting-examination sample. A holder is attached on the covering layer. A backside polishing process is performed to remove a portion of the waiting-examination sample until the mark is visible under the optical microscopy from the bottom surface of waiting-examination sample. An in-situ lift-out step is performed to pick up a thin membrane containing the analysis target and serve as the sample for TEM analysis.Type: ApplicationFiled: November 3, 2006Publication date: March 6, 2008Applicant: INOTERA MEMORIES, INC.Inventors: Jian-Shing Luo, Lang-Yu Huang
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Publication number: 20080054180Abstract: A charged particle beam column package includes an assembly (e.g., comprising a plurality of layers, which can have a component coupled to one of the layers), and a solid state detector coupled to the assembly. Further, at least one of the layers has interconnects thereon.Type: ApplicationFiled: May 21, 2007Publication date: March 6, 2008Inventors: Charles Silver, Lawrence Muray, James Spallas
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Publication number: 20080054181Abstract: A scintillator plate comprising: (i) a radiation transmissive substrate; (ii) a light absorbing layer formed on the substrate, the light absorbing layer absorbing light of a prescribed wavelength range; and (iii) a scintillator layer formed on the light absorbing layer, the scintillator layer converting radiation to the light having a wavelength absorbable to the light absorbing layer.Type: ApplicationFiled: August 28, 2007Publication date: March 6, 2008Inventors: Masashi Kondo, Yasushi Nagata, Mitsuru Sekiguchi
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Publication number: 20080054182Abstract: An electronic cassette type of radiation detection apparatus having a sensor array including a plurality of sensors for detecting incident radiation has a connecting portion to which detachable additional function modules are connected. A selection unit is provided for changing a radiographing mode from a still image radiographing mode and a moving image radiographing mode into a selectable state in response to a connection of at least one of the additional function modules changes.Type: ApplicationFiled: June 19, 2007Publication date: March 6, 2008Applicant: CANON KABUSHIKI KAISHAInventors: Keigo Yokoyama, Tadao Endo, Toshio Kameshima, Tomoyuki Yagi, Katsuro Takenaka
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Publication number: 20080054183Abstract: An objective is to provide a scintillator panel by which a converted light signal can be efficiently transmitted to suitably realize an FPD exhibiting a high radiation-to-light conversion efficiency. Also provided is a scintillator panel possessing a substrate and provided thereon, a phosphor layer possessing columnar crystals made of cesium iodide, wherein a columnar crystal tip angle is 40-80°. Further, the above-described phosphor is preferably formed via vacuum evaporation.Type: ApplicationFiled: August 28, 2007Publication date: March 6, 2008Applicant: KONICA MINOLTA MEDICAL & GRAPHIC, INC.Inventors: Yasushi NAGATA, Masashi KONDO, Mitsuru SEKIGUCHI
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Publication number: 20080054184Abstract: An electron-optical arrangement provides a primary beam path for a beam of primary electrons and a secondary beam path for secondary electrons. The electron-optical arrangement includes a magnet arrangement having first, second and third magnetic field regions. The first magnetic field region is traversed by the primary beam path and the secondary beam path. The second magnetic field region is arranged in the primary beam path upstream of the first magnetic field region and is not traversed by the secondary beam path. The first and second magnetic field regions deflect the primary beam path in substantially opposite directions. The third magnetic field region is arranged in the secondary beam path downstream of the first magnetic field region and is not traversed by the first beam path. The first and third magnetic field regions deflect the secondary beam path in a substantially same direction.Type: ApplicationFiled: June 13, 2007Publication date: March 6, 2008Applicants: Carl Zeiss SMT AG, Applied Materials IsraelInventors: Rainer Knippelmeyer, Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximilian Haider, Antonio Casares
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Publication number: 20080054185Abstract: The present invention is related to a D/A conversion device, it is provided with a first D/A conversion circuit which receives input of digital data composed of plural bits and outputs a corresponding electric output signal, and a second D/A conversion circuit which receives input of a correction code for the digital data and which outputs a corresponding electric correction signal, wherein the first and second D/A conversion circuits are connected to each other at their respective output terminals so that the electric output signal is corrected by the electric correction signal. The D/A conversion device comprises: storing means 105 for storing correction codes each for one bit of the digital data, the correction codes being determined in correlation with the first D/A conversion circuit 11; and calculating means 107 for performing serial entry and addition of the correction codes each for one bit of the digital data, and outputting a correction code for all bits of the digital data.Type: ApplicationFiled: March 28, 2007Publication date: March 6, 2008Inventors: Takamasa Satoh, Koichi Hidaka, Ryozo Yoshino
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Publication number: 20080054186Abstract: There is disclosed an electron beam system in which the third-order aberration S3 with two-fold symmetry is corrected. If a Cs corrector is operated, parasitic aberration S3 (third-order aberration S3 with two-fold symmetry) is produced. A corrective third-order aberration S3? with two-fold symmetry that cancels out the parasitic aberration S3 is produced within a multipole element to correct the parasitic aberration S3. The electron beam is tilted relative to the optical axis within the multipole element producing a hexapole field. The corrective third-order aberration S3? with two-fold symmetry is introduced in each electron forming the tilted electron beam.Type: ApplicationFiled: August 30, 2007Publication date: March 6, 2008Applicant: JEOL LTD.Inventor: Fumio Hosokawa
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Publication number: 20080054187Abstract: A method and an apparatus for calculating a scan signal so that the scan region becomes a scan region which is based on magnification ratio between desired magnification in a scan-line interval direction and desired magnification in a scan-line direction, and performing a calculation for rotating the scan direction with respect to the scan signal in order to suppress a distortion which is caused to occur when the technology where the scan direction of a charged particle beam is rotated is applied to the technology where the charged particle beam is scanned such that the scan-line interval is enlarged.Type: ApplicationFiled: August 22, 2007Publication date: March 6, 2008Inventors: Kouichi Yamamoto, Kaneo Kageyama
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Publication number: 20080054188Abstract: Linear movement direction of the stage and the actual deflection direction of the electron beam deflected by the first command signal for deflecting the electron beam in the linear movement direction of the stage do not necessarily align with each other for reasons such as the disposition precision of the stage driving device, a lens system, and the deflecting device. Therefore, the first command signal output from the first command device is processed based on the angle between the linear movement direction of the stage driven by the stage driving device and the deflection direction of the electron beam deflected by the first command signal so that the deflection direction of the electron beam aligns with the linear movement direction of the stage. With this processed first command signal, the deflection direction of the electron beam can be changed (rotated) to align with the linear movement direction of the stage.Type: ApplicationFiled: September 6, 2007Publication date: March 6, 2008Applicant: FUJIFILM CorporationInventors: Toshihiro USA, Kazunori Komatsu
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Publication number: 20080054189Abstract: A lithographic apparatus includes a radiation source configured to emit radiation to form a radiation beam, the radiation being of a type which can create plasma in a low pressure environment in the apparatus, and an optical component configured to condition the radiation beam, impart the conditioned radiation beam with a pattern in its cross-section to form a patterned radiation beam, project the patterned radiation beam onto a target portion of a substrate, and/or to detect radiation. The optical component is provided with a plasma quenching structure, the plasma quenching structure being configured to provide electron-ion recombination in, on and/or near the optical component.Type: ApplicationFiled: August 30, 2006Publication date: March 6, 2008Applicant: ASML NETHERLANDS B.V.Inventors: Johannes Hubertus Josephina Moors, Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans
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Publication number: 20080054190Abstract: A system for controlling the energy of radiation pulses. A detector monitors energy of the pulses and an optical shutter trims the radiation pulses after a suitable optical delay line. The accuracy of the control of the energy of the radiation pulses can be improved by matching a rate of response of the radiation detector to a rate of response of the optical shutter.Type: ApplicationFiled: September 5, 2006Publication date: March 6, 2008Applicant: ASML Netherlands B.V.Inventor: Oscar Franciscus Jozephus Noordman
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Publication number: 20080054191Abstract: A method of wafer repairing comprises identifying locations and patterns of defective regions in a semiconductor wafer; communicating the locations and patterns of defective regions to a direct-writing tool; forming a photoresist layer on the semiconductor wafer; locally exposing the photoresist layer within the defective regions using an energy beam; developing the photoresist layer on the semiconductor wafer; and wafer-processing the semiconductor wafer under the photoresist layer after exposing and developing.Type: ApplicationFiled: November 2, 2007Publication date: March 6, 2008Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chin-Hsiang Lin, Burn Lin, Tsai-Sheng Gau
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Publication number: 20080054192Abstract: An ion implantation device that suppresses diffusion of an ion beam, can finely control a scanning waveform, and can obtain a large scanning angle of about 10°. In the ion implantation device, first, second, and third chambers are arranged in predetermined places on a beam line, first and second gaps intervene between the first chamber and the second chamber and between the second chamber and the third chamber. The second chamber is electrically insulated from the first and third chambers via first and second electrode pairs attached to the first and second gaps, respectively. The first and second electrode pairs obliquely cross a standard axis of the ion beam at a predetermined angle in opposite directions, and the second chamber is connected to a scanning power source that applies an electric potential having a desired scanning waveform.Type: ApplicationFiled: November 14, 2005Publication date: March 6, 2008Applicant: ULVAC CO., LTD.Inventors: Seiji Ogata, Yuzo Sakurada, Masayuki Sekiguchi, Tsutomu Nishihashi
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Publication number: 20080054193Abstract: The present invention relates to a guide tube for an ion beam in an ion implanter located adjacent a semiconductor wafer. Such guide tubes are provided to confine charged particles used for wafer neutralisation during implantation. According to the invention, a guide tube comprises an axis, open ends to receive an ion beam along said axis, a tube wall substantially parallel with said axis, and at least one opening through the tube wall forming a gas conduction passage from inside to outside the guide tube, said passage having a length aligned at an acute angle to said guide tube axis and a minimum dimension transverse to said length such that a line of sight through the passage perpendicular to said guide tube axis is substantially occluded.Type: ApplicationFiled: July 9, 2007Publication date: March 6, 2008Inventor: Richard Goldberg
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Publication number: 20080054194Abstract: An apparatus and method of doping ions into a substrate are disclosed and include a process chamber having an inner space in which an ion implantation process is performed, a support unit positioned in the process chamber, supporting a substrate and being electrically connected to a first power source for generating a high frequency pulse, a conductive unit separated from the support unit in such a manner that plasma associated with the ion implantation process is generated between the support unit and the conductive unit, wherein the conductive unit comprises a first etch prevention member preventing the conductive unit from being etched by a source gas used to generate the plasma, and a power port electrically connected to a second power source and generating radio frequency (RF) power applied to the conductive unit.Type: ApplicationFiled: August 27, 2007Publication date: March 6, 2008Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Il-Kyoung KIM, No-Hyun HUH, Tae-Won LEE, Sung-Wook PARK, Ki-Young YUN, Won-Soon LEE, Young-Ha YOON, Tae-Sub IM
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Publication number: 20080054195Abstract: A substrate cover includes a frame-like member configured to be placed on a substrate which is to be written using a charged particle beam, and to have an outer perimeter dimension larger than a perimeter end of the substrate and an inner perimeter dimension, being a border between the frame-like member and an inner opening portion, smaller than the perimeter end of the substrate, and a contact point part configured to be provided on an undersurface of the frame-like member, in order to be electrically connected to the substrate.Type: ApplicationFiled: August 14, 2007Publication date: March 6, 2008Applicant: NuFlare Technology, Inc.Inventor: Yuichi TACHIKAWA
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Publication number: 20080054196Abstract: This VSB lithography system includes a first, second and third aperture for forming a single electron beam in each of the rectangular opening portion that are provided, and draws a figure pattern using the single electron beam formed by passing the beam through the first, second and third aperture in sequence. Each of the first, second and third aperture has a mechanism for rotationally driving the aperture around an optical axis up to an arbitrary angle from 0 to 360°. Further, in the third aperture, a mechanism for varying the opening slit width of the rectangular opening portion is provided.Type: ApplicationFiled: September 5, 2007Publication date: March 6, 2008Applicant: Elpida Memory, Inc.Inventor: Masahito Hiroshima
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Publication number: 20080054197Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.Type: ApplicationFiled: August 30, 2007Publication date: March 6, 2008Inventors: Kazuhiro Zama, Koichi Asami, Yusuke Miyazaki
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Publication number: 20080054198Abstract: A method and to a corresponding apparatus for processing information carriers, in particular for reading out storage phosphor plates (2) for storing X-ray information, an information carrier (2) and/or a container (1) in which the information carrier (2) is located being processed, in particular being moved and/or fixed, by at least one mechanical processor (13), the processor (7) being driven by at least one stepper motor (10), and information from the information carrier (2) being read out and/or written in the information carrier.Type: ApplicationFiled: August 9, 2007Publication date: March 6, 2008Applicant: AGFA HEALTHCARE N.V.Inventors: Vladimir Zemanek, Bernd Gerstlauer, Thomas Zehetmaier, Alfred Huber