Patents Issued in January 31, 2013
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Publication number: 20130026565Abstract: A device having a salicide block spacer on a second side of a gate is disclosed. The use of the salicide block spacer indirectly reduces the blocking effects during the implantation processes, thereby lowering the Rdson without compromising the breakdown voltage of the device.Type: ApplicationFiled: July 25, 2011Publication date: January 31, 2013Applicant: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Purakh Raj VERMA, Guowei ZHANG
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Publication number: 20130026566Abstract: A non-volatile semiconductor memory device according to an embodiment includes: a p-type semiconductor substrate; a p-type first p well which is formed in the semiconductor substrate and in which a bit line connecting transistor configured to connect a bit line of a memory cell and a sense amplifier unit is formed; and an n-type first N well which surrounds the first P well and which is configured to electrically isolate the first P well from the semiconductor substrate.Type: ApplicationFiled: March 21, 2012Publication date: January 31, 2013Applicant: Kabushiki Kaisha ToshibaInventors: Hiroyuki KUTSUKAKE, Kikuko Sugimae
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Publication number: 20130026567Abstract: A method and circuit in which the drive strength of a FinFET transistor can be selectively modified, and in particular can be selectively reduced, by omitting the LDD extension formation in the source and/or in the drain of the FinFET. One application of this approach is to enable differentiation of the drive strengths of transistors in an integrated circuit by applying the technique to some, but not all, of the transistors in the integrated circuit. In particular in a SRAM cell formed from FinFET transistors the application of the technique to the pass-gate transistors, which leads to a reduction of the drive strength of the pass-gate transistors relative to the drive strength of the pull-up and pull-down transistors, results in improved SRAM cell performance.Type: ApplicationFiled: October 8, 2012Publication date: January 31, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventor: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
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Publication number: 20130026568Abstract: A semiconductor power device is supported on a semiconductor substrate with a bottom layer functioning as a bottom electrode and an epitaxial layer overlying the bottom layer as the bottom layer. The semiconductor power device includes a plurality of FET cells and each cell further includes a body region extending from a top surface into the epitaxial layer. The body region encompasses a heavy body dopant region. An insulated gate is disposed on the top surface of the epitaxial layer, overlapping a first portion of the body region. A barrier control layer is disposed on the top surface of the epitaxial layer next to the body region away from the insulated gate. A conductive layer overlies the top surface of the epitaxial layer covering a second portion of the body region and the heavy body dopant region extending over the barrier control layer forming a Schottky junction diode.Type: ApplicationFiled: January 31, 2012Publication date: January 31, 2013Inventor: Anup Bhalla
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Publication number: 20130026569Abstract: In one general aspect, an apparatus can include a substrate, a gate electrode, and a gate dielectric having at least a portion disposed between the gate electrode and the substrate. The apparatus can include a heavily doped drain region disposed within the substrate, and a lightly doped drain region within the substrate and in contact with the heavily doped drain region. The apparatus can also include a medium doped drain region disposed within the lightly doped drain region and having a dopant concentration between a dopant concentration of the heavily doped drain region and a dopant concentration of the lightly doped drain region.Type: ApplicationFiled: July 27, 2011Publication date: January 31, 2013Inventor: Jifa Hao
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Publication number: 20130026570Abstract: After formation of a semiconductor device on a semiconductor-on-insulator (SOI) layer, a first dielectric layer is formed over a recessed top surface of a shallow trench isolation structure. A second dielectric layer that can be etched selective to the first dielectric layer is deposited over the first dielectric layer. A contact via hole for a device component located in or on a top semiconductor layer is formed by an etch. During the etch, the second dielectric layer is removed selective to the first dielectric layer, thereby limiting overetch into the first dielectric layer. Due to the etch selectivity, a sufficient amount of the first dielectric layer is present between the bottom of the contact via hole and a bottom semiconductor layer, thus providing electrical isolation for the ETSOI device from the bottom semiconductor layer.Type: ApplicationFiled: July 27, 2011Publication date: January 31, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Su Chen Fan, Balasubramanian S. Haran, David V. Horak
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Publication number: 20130026571Abstract: A finFET block architecture includes a first set of semiconductor fins having a first conductivity type, and a second set of semiconductor fins having a second conductivity type. An inter-block insulator is placed between outer fins of the first and second sets. A patterned gate conductor layer includes a first plurality of gate traces extending across the set of fins in the first block without crossing the inter-block insulator, and a second plurality of gate traces extending across the set of fins in the second block without crossing the inter-block insulator. Patterned conductor layers over the gate conductor layer are arranged in orthogonal layout patterns, and include an inter-block connector arranged to connect gate traces in the first and second blocks.Type: ApplicationFiled: July 29, 2011Publication date: January 31, 2013Applicant: Synopsys, Inc.Inventors: JAMIL KAWA, VICTOR MOROZ, DEEPAK SHERLEKAR
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Publication number: 20130026572Abstract: A finFET block architecture suitable for use of a standard cell library, is based on an arrangement including a first set of semiconductor fins in a first region of the substrate having a first conductivity type, and a second set of semiconductor fins in a second region of the substrate, the second region having a second conductivity type. A patterned gate conductor layer including gate traces in the first and second regions, arranged over channel regions of the first and second sets of semiconductor fins is used for transistor gates. Patterned conductor layers over the gate conductor layer are arranged in orthogonal layout patterns, and can include a plurality of floating power buses over the fins in the first and second regions.Type: ApplicationFiled: July 29, 2011Publication date: January 31, 2013Applicant: Synopsy, Inc.Inventors: JAMIL KAWA, Victor Moroz, Deepak Sherlekar
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Publication number: 20130026573Abstract: The present invention puts forward a body-contact SOI transistor structure and method of making. The method comprises: forming a hard mask layer on the SOI; etching an opening exposing SOI bottom silicon; wet etching an SOI oxide layer through the opening; depositing a polysilicon layer at the opening followed by anisotropic dry etching; depositing an insulating dielectric layer at the opening followed by planarization; forming a gate stack structure by deposition and etching, and forming source/drain junctions of the transistor using ion implantation. By using the present invention, body contact for SOI field-effect transistors can be effectively formed, thereby eliminating floating-body effect in the SOI field-effect transistors, and improving heat dissipation capability of the SOI transistors and associated integrated circuits.Type: ApplicationFiled: April 19, 2011Publication date: January 31, 2013Applicant: FUDAN UNIVERSITYInventors: Dongping Wu, Shili Zhang
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Publication number: 20130026574Abstract: In an inverted staggered type TFT (100), contact layers (150a and 150b) that electrically connect a channel layer (140) to source and drain electrodes (160a and 160b), respectively, include n+ amorphous silicon layers (151a and 151b), n+ microcrystalline silicon layers (152a and 152b), and n+ microcrystalline silicon layers (153a and 153b). The n+ microcrystalline silicon layers (152a and 152b) have a lower crystallization rate than the n+ microcrystalline silicon layers (153a and 153b) and are formed between the n+ amorphous silicon layers (151a and 151b) and the n+ microcrystalline silicon layers (153a and 153b). In this case, since the film thickness of incubation layers formed on surfaces of the n+ amorphous silicon layers (151a and 151b) decreases, the resistance value of the contact layers (150a and 150b) decreases. By this, the contact resistance of the TFT (100) decreases and the mobility can be increased.Type: ApplicationFiled: January 25, 2011Publication date: January 31, 2013Inventors: Kenji Nakanishi, Masao Moriguchi, Atsuyuki Hoshino
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Publication number: 20130026575Abstract: Roughly described, an integrated circuit device has formed on a substrate a plurality of transistors including a first subset of at least one transistor and a second subset of at least one transistor, wherein all of the transistors in the first subset have one underlap distance and all of the transistors in the second subset have a different underlap distance. The transistors in the first and second subsets preferably have different threshold voltages, and preferably realize different points on the high performance/low power tradeoff.Type: ApplicationFiled: July 28, 2011Publication date: January 31, 2013Applicant: SYNOPSYS, INC.Inventors: Victor Moroz, James D. Sproch
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Publication number: 20130026576Abstract: An integrated circuit ESD protection circuit (270) is formed with a combination device consisting of a gated diode (271) and an output buffer MOSFET (272) where the body tie fingers of a first conductivity type (307) are formed in the substrate (301, 302) and isolated from the drain regions of a second conductivity type (310) using a plurality of diode poly fingers (231, 232) which are interleaved with a plurality of poly gate fingers (204, 205) forming the output buffer MOSFET (272).Type: ApplicationFiled: July 29, 2011Publication date: January 31, 2013Inventor: Michael A. Stockinger
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Publication number: 20130026577Abstract: A high-frequency power amplifier of the type to be mounted in an RF module for mobile phones having high-frequency power field effect transistors and gate protective diodes which are coupled between the gates and the sources of the high-frequency power field effect transistors. The gate protective diodes have an n type region formed over the main surface of a p type epitaxial layer, a first p type region formed at the center of the main surface of the n type region, a second p type region formed over the main surface of the epitaxial layer around the n type region from the periphery of the main surface of the n type region, and p+ type buried layers for coupling the second p type region to a substrate body. The distance between the end portions of the p+ type buried layers and the n+ type region is 7 ?m or more.Type: ApplicationFiled: October 5, 2012Publication date: January 31, 2013Inventors: Hideyuki ONO, Tetsuya IIDA
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Publication number: 20130026578Abstract: A semiconductor device includes a substrate, a gate dielectric layer on the substrate, and a gate electrode stack on the gate dielectric layer. The gate electrode stack includes a metal filling line, a wetting layer, a metal diffusion blocking layer, and a work function layer. The wetting layer is in contact with a sidewall and a bottom surface of the metal filling line. The metal diffusion blocking layer is in contact with the wetting layer and covers the sidewall and the bottom surface of the metal filling line with the wetting layer therebetween. The work function layer covers the sidewall and the bottom surface of the metal filling line with the wetting layer and the metal diffusion blocking layer therebetween.Type: ApplicationFiled: July 28, 2011Publication date: January 31, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventor: Hsueh Wen TSAU
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Publication number: 20130026579Abstract: A method for manufacturing a semiconductor device includes forming a first dummy gate on a substrate, performing a doping process to the substrate, thereby forming a source and a drain at sides of the first dummy gate, performing a first high temperature annealing to activate the source and drain, forming an inter-layer dielectric (ILD) material on the substrate, removing the first dummy gate to create an ILD trench, forming a first high-k dielectric layer within the ILD trench, forming a first dummy cap portion within the ILD trench over the first high-k dielectric layer, performing a second high-temperature annealing to reduce defects in the first high-k dielectric layer, and thereafter, replacing the first dummy cap portion with a first metal gate electrode.Type: ApplicationFiled: July 26, 2011Publication date: January 31, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wei-Yuan Lu, Kuan-Chung Chen, Chun-Fai Cheng
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Publication number: 20130026580Abstract: A semiconductor device having an SRAM which includes: a monolithic first active region in which a first transistor and a fifth transistor are disposed; a second active region separated from the first active region, in which a second transistor is disposed; a monolithic third active region in which a third transistor and a sixth transistor are disposed; and a fourth active region separated from the third active region, in which a fourth transistor is disposed. Each driver transistor is divided into a first transistor and a second transistor (or a third transistor and a fourth transistor) and these driver transistors are disposed over different active regions.Type: ApplicationFiled: July 26, 2012Publication date: January 31, 2013Inventors: Masao Morimoto, Noriaki Maeda, Yasuhisa Shimazaki
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Publication number: 20130026581Abstract: In a semiconductor device comprising sophisticated high-k metal gate structures formed in accordance with a replacement gate approach, semiconductor-based resistors may be formed above isolation structures substantially without being influenced by the replacement gate approach. Consequently, enhanced area efficiency may be achieved compared to conventional strategies, in which the resistive structures may have to be provided on the basis of a gate electrode metal, while, nevertheless, a low parasitic capacitance may be accomplished due to providing the resistive structures above the isolation structure.Type: ApplicationFiled: September 27, 2012Publication date: January 31, 2013Applicant: GLOBALFOUNDRIES INC.Inventor: GLOBALFOUNDRIES Inc.
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Publication number: 20130026582Abstract: Semiconductor devices are formed without zipper defects or channeling and through-implantation and with different silicide thicknesses in the gates and source/drain regions, Embodiments include forming a gate on a substrate, forming a nitride cap on the gate, forming a source/drain region in the substrate on each side of the gate, forming a wet cap fill layer on the source/drain region on each side of the gate, removing the nitride cap from the gate, and forming an amorphized layer in a top portion of the gate. Embodiments include forming the amorphized layer by implanting low energy ions.Type: ApplicationFiled: July 26, 2011Publication date: January 31, 2013Applicant: GLOBALFOUNDRIES Inc.Inventors: Peter Javorka, Glyn Braithwaite
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Publication number: 20130026583Abstract: A vibrating device has a package having an accommodating space in the interior thereof and a gyro element and an IC chip accommodated in the accommodating space. The package has a plate-like bottom plate having an IC chip mounting area and a vibrating element mounting area. The IC chip mounting area includes an IC chip mounting surface on which the IC chip is mounted. The vibrating element mounting area is arranged in parallel with the IC chip mounting area and includes a vibrating element mounting surface on which the gyro element is mounted. The thickness of the IC chip mounting area is smaller than that of the vibrating element mounting area. The IC chip mounting surface is located closer to a bottom side than the vibrating element mounting surface.Type: ApplicationFiled: July 24, 2012Publication date: January 31, 2013Applicant: SEIKO EPSON CORPORATIONInventors: Norihito MATSUKAWA, Atsushi ONO, Mitsuhiro TATEYAMA, Tsunenori SHIBATA
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Publication number: 20130026584Abstract: A micro-electromechanical system (MEMS) device can include a substrate and a first beam suspended relative to a substrate surface. The first beam can include a first portion and a second portion that are separated by an isolation joint made of an insulative material. The first and second portions can each include a first semiconductor and a first dielectric layer. The MEMS device can also include a second beam suspended relative to the substrate surface. The second beam can include a second semiconductor and a second dielectric layer to promote curvature of the second beam. The MEMS device can also include a third beam suspended relative to the substrate surface. The third beam consists essentially of a first material. The second beam is configured to move relative to the third beam in response to an acceleration along an axis perpendicular to the surface of the substrate.Type: ApplicationFiled: August 10, 2012Publication date: January 31, 2013Applicant: Kionix, Inc.Inventors: Scott G. ADAMS, Andrew J. MINNICK, Charles W. BLACKMER, Mollie K. DEVOE
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Publication number: 20130026585Abstract: According to an embodiment, a magnetoresistive random access memory (MRAM) device comprises a bottom electrode, a stack, a dielectric material, a dielectric layer, and a conductive material. The bottom electrode is over a substrate, and the stack is over the bottom electrode. The stack comprises a magnetic tunnel junction (MTJ) and a top electrode. The dielectric material is along a sidewall of the stack, and the dielectric material has a height greater than a thickness of the MTJ and less than a stack height. The dielectric layer is over the stack and the dielectric material. The conductive material extends through the dielectric layer to the top electrode of the stack.Type: ApplicationFiled: July 26, 2011Publication date: January 31, 2013Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Fu-Ting Sung, Shih-Chang Liu, Chia-Shiung Tsai
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Publication number: 20130026586Abstract: An antenna is provided. This antenna is contained within a package that is secured to an IC (which allows radiation to propagated away for a printed circuit board so as to reduce interference), and this antenna includes two loop antennas that are shorted to ground and that “overlap” and includes a “via wall.” With this configuration, circular polarization can be achieved by varying the relative phases of the input signals, and the “via wall” improves efficiency by reducing surface waves.Type: ApplicationFiled: July 26, 2011Publication date: January 31, 2013Applicant: Texas Instruments IncorporatedInventors: Eunyoung Seok, Srinath Ramaswamy, Brian P. Ginsburg, Vijay B. Rentala, Baher Haroun
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Publication number: 20130026587Abstract: Pixel sensor cells with an opaque mask layer and methods of manufacturing are provided. The method includes forming a transparent layer over at least one active pixel and at least one dark pixel of a pixel sensor cell. The method further includes forming an opaque region in the transparent layer over the at least one dark pixel.Type: ApplicationFiled: July 25, 2011Publication date: January 31, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Jeffrey P. GAMBINO, Robert K. LEIDY, Mark D. LEVY
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Publication number: 20130026588Abstract: The object is to improve the conversion efficiency of a photoelectric conversion device. This object can be achieved by a photoelectric conversion device including an electrode and a semiconductor layer which is provided on one main surface of the electrode and contains a I-III-VI group compound semiconductor, wherein the semiconductor layer includes a connection layer that is located at a position on the one main surface side of the electrode and has a tendency that, the closer to the one main surface, the greater a quotient obtained by dividing an amount of substance of a I-B group element by an amount of substance of a III-B group element becomes.Type: ApplicationFiled: April 12, 2011Publication date: January 31, 2013Applicant: KYOCERA CORPORATIONInventors: Shintaro Kubo, Rui Kamada, Yusuke Miyamichi, Shuji Nakazawa
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Publication number: 20130026589Abstract: A miniaturization active sensing module includes a substrate unit, an active sensing unit, and an optical unit. The substrate unit includes a substrate body, a plurality of first bottom conductive pads disposed on the bottom side of the substrate body, and a plurality of first conductive tracks embedded in the substrate body. The substrate body has at least one first groove formed therein. The active sensing unit includes at least one active sensing chip embedded in the first groove. The active sensing chip has at least one active sensing area and a plurality of electric conduction pads disposed on the top side thereof, and each first conductive track has two ends electrically contacted by one electric conduction pad and one first bottom conductive pad, respectively. The optical unit includes at least one optical element, disposed on the substrate body, for protecting the active sensing area.Type: ApplicationFiled: September 23, 2011Publication date: January 31, 2013Applicants: LITE-ON TECHNOLOGY CORPORATION, SILITEK ELECTRONIC (GUANGZHOU) CO., LTD.Inventors: YING-CHENG WU, KANG-WEI LEE
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Publication number: 20130026590Abstract: A method for manufacturing a sloped structure is disclosed. The method includes the steps of: (a) forming a sacrificial film above a substrate; (b) forming a first film above the sacrificial film; (c) forming a second film having a first portion connected to the substrate, a second portion connected to the first film, and a third portion positioned between the first portion and the second portion; (d) removing the sacrificial film; and (e) bending the third portion of the second film after the step (d), thereby sloping the first film with respect to the substrate.Type: ApplicationFiled: July 3, 2012Publication date: January 31, 2013Applicant: SEIKO EPSON CORPORATIONInventor: Takahiko YOSHIZAWA
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Publication number: 20130026591Abstract: A solid-state image pickup apparatus including a substrate and a solid-state image pickup device. The substrate includes an opening portion. The solid-state image pickup device is mounted as a flip chip on a lower surface of the substrate on a circumference of the opening portion and receives and photo-electrically converts light that is taken in by a lens set on an upper surface of the substrate and enters from the opening portion. The circumference of the opening portion of the substrate is thinner than other portions of the substrate.Type: ApplicationFiled: July 10, 2012Publication date: January 31, 2013Applicant: Sony CorporationInventor: Toshiaki IWAFUCHI
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Publication number: 20130026592Abstract: A method of forming a focal plane array by: forming a first wafer having sensing material provided on a surface, which is covered by a sacrificial layer, the sensing material being a thermistor material defining at least one pixel; providing supporting legs for the pixel within the sacrificial layer, covering them with a further sacrificial layer and forming first conductive portions in the surface of the sacrificial layer that are in contact with the supporting legs; forming a second wafer having read-out integrated circuit (ROIC), the second wafer being covered by another sacrificial layer, into which is formed second conductive portions in contact with the ROIC; bringing the sacrificial oxide layers of the first wafer and second wafer together such that the first and second conductive portions are aligned and bonding them together such that the sensing material is transferred from the first wafer to the second wafer when a sacrificial bulk layer of the first wafer is removed; and removing the sacrificial lType: ApplicationFiled: March 1, 2011Publication date: January 31, 2013Applicant: SensoNor Technologies ASInventors: Adriana Lapadatu, Gjermund Kittilsland
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Publication number: 20130026593Abstract: A thin film photovoltaic device comprising a relief textured transparent cover plate, a layer of transparent conductive oxide having a layer thickness of less than 700 nm, a light absorbing active layer and a reflective back electrode, where the layer of transparent conductive oxide is a non-textured layer.Type: ApplicationFiled: March 31, 2011Publication date: January 31, 2013Applicants: SCHĂśCO TF GMBH & CO. KG, SOLAREXCEL B.V.Inventors: Ko Hermans, Benjamin Slager, Bart Clemens Kranz, Andreas Hofmann
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Publication number: 20130026594Abstract: An image sensor includes front-side and backside photodetectors of a first conductivity type disposed in a substrate layer of the first conductivity type. A front-side pinning layer of a second conductivity type is connected to a first contact. The first contact receives a predetermined potential. A backside pinning layer of the second conductivity type is connected to a second contact. The second contact receives an adjustable and programmable potential.Type: ApplicationFiled: July 29, 2011Publication date: January 31, 2013Inventors: John P. McCarten, Robert Michael Guidash
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Publication number: 20130026595Abstract: A semiconductor light-receiving device includes a semiconductor light-receiving element that has a first electrode and a second electrode, a first wiring coupled to the first electrode, and a second wiring coupled to the second electrode, a width of the second wiring being smaller than a width of the first wiring.Type: ApplicationFiled: July 26, 2012Publication date: January 31, 2013Applicant: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.Inventor: Yuji Koyama
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Publication number: 20130026596Abstract: A method of forming a focal plane array by: preparing a first wafer having sensing material provided on a surface, which is covered by a sacrificial layer; preparing a second wafer including read-out integrated circuit and a contact pad, which is covered by another sacrificial layer into which are formed support legs in contact with the contact pad, the support legs being covered with a further sacrificial layer; bonding the sacrificial layers of the first and second wafers together such that the sensing material is transferred from the first wafer to the second wafer when a sacrificial bulk layer of the first wafer is removed; defining a pixel in the sensing material and forming a conductive via through the pixel for providing a connection between an uppermost surface of the pixel and the supporting legs; and removing the sacrificial layers to release the pixel, with the supporting legs underneath it.Type: ApplicationFiled: March 1, 2011Publication date: January 31, 2013Applicant: SENSONOR TECHNOLOGIES ASInventors: Adriana Lapadatu, Gjermund Kittilsland
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Publication number: 20130026597Abstract: An integrated circuit may include a region containing a thermoelectric material and be configured to be subjected to a temperature gradient resulting from a flow of an electric current in a part of the integrated circuit during its operation, and an electrically conducting output coupled to the region for delivering the electrical energy produced by thermoelectric material.Type: ApplicationFiled: October 8, 2012Publication date: January 31, 2013Applicant: STMICROELECTRONICS (ROUSSET) SASInventor: STMICROELECTRONICS (ROUSSET) SAS
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Publication number: 20130026598Abstract: A Schottky barrier diode includes a first metal layer, a second metal layer separated form the first metal layer, and a semiconductor layer. The semiconductor layer is in Schottky contact with the first metal layer and in ohmic contact with the second metal layer. The semiconductor layer includes an insulated polymer material and a number of carbon nanotubes dispersed in the insulated polymer material.Type: ApplicationFiled: December 13, 2011Publication date: January 31, 2013Applicants: HON HAI PRECISION INDUSTRY CO., LTD., TSINGHUA UNIVERSITYInventors: CHUN-HUA HU, CHANG-HONG LIU, SHOU-SHAN FAN
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Publication number: 20130026599Abstract: A semiconductor device includes an isolation portion penetrating a semiconductor substrate from a first surface to a second surface positioned opposite the first surface. The isolation portion includes a first insulating film and a second insulating film. The first insulating film has a slit portion at a side of the first surface and the slit portion is buried with the second insulating film. The semiconductor device further includes an electrode penetrating the semiconductor substrate that is surrounded by the isolation portion.Type: ApplicationFiled: July 27, 2012Publication date: January 31, 2013Applicant: Elpida Memory, Inc.Inventors: Nobuyuki NAKAMURA, Takuyuki MURAMOTO, Takeo TSUKAMOTO
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Publication number: 20130026600Abstract: Methods of forming air gaps in memory arrays and memory arrays with air gaps thus formed are disclosed. One such method may include forming an isolation region, having a first dielectric, through a charge-storage structure that is over a semiconductor, the isolation region extending into the semiconductor; forming a second dielectric over the isolation region and charge-storage structure; and forming an air gap in the isolation region so that the air gap passes through the charge-storage structure and so that a thickness of the first dielectric is between the air gap and the second dielectric.Type: ApplicationFiled: July 28, 2011Publication date: January 31, 2013Inventors: James Matthew, Gordon Haller, Ronald A. Weimer, John Hopkins, Vinayak K. Shamanna, Sanjeev Sapra
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Publication number: 20130026601Abstract: A semiconductor device comprises a semiconductor substrate, an anorganic isolation layer on the semiconductor substrate and a metallization layer on the anorganic isolation layer. The metallization layer comprises a fuse structure. At least in an area of the fuse structure the metallization layer and the anorganic isolation layer have a common interface.Type: ApplicationFiled: July 29, 2011Publication date: January 31, 2013Applicant: Infineon Technologies AGInventors: Gabriele Bettineschi, Uwe Seidel, Wolfgang Walter, Michael Schrenk, Hubert Werthmann
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Publication number: 20130026602Abstract: A semiconductor device, which exhibits an increased design flexibility for a capacitor element, and can be manufactured with simple method, is provided. A semiconductor device 100 includes: a silicon substrate 101; an interlayer film 103 provided on the silicon substrate 101; a multiple-layered interconnect embedded in the interlayer film 103; a flip-chip pad 111, provided so as to be opposite to an upper surface of an uppermost layer interconnect 105 in the multiple-layered interconnect and having a solder ball 113 for an external coupling mounted thereon; and a capacitance film 109 provided between said uppermost layer interconnect 105 and the flip-chip pad 111. Such semiconductor device 100 includes the flip-chip pad 111 composed of an uppermost layer interconnect 105, a capacitive film 109 and a capacitor element 110.Type: ApplicationFiled: August 23, 2012Publication date: January 31, 2013Applicant: RENESAS ELECTRONICS CORPORATIONInventor: Ryuichi OKAMURA
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Publication number: 20130026603Abstract: A method of manufacturing a semiconductor device includes forming an insulating film over a semiconductor substrate, forming a capacitor including a lower electrode, a capacitor dielectric film including a ferroelectric material, and an upper electrode over the insulating film, forming a first protective insulating film over a side surface and upper surface of the capacitor by a sputtering method, and forming a second protective insulating film over the first protective insulating film by an atomic layer deposition method.Type: ApplicationFiled: October 4, 2012Publication date: January 31, 2013Applicant: FUJITSU SEMICONDUCTOR LIMITEDInventor: Fujitsu Semiconductor Limited
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Publication number: 20130026604Abstract: A lateral avalanche photodiode structure including a substrate, a PN diode and a metal layer is provided. The substrate has at least one first electrode area, at least one light receiving area, and at least one second electrode area which are arranged horizontally. The first electrode area is also an avalanche area, and the light receiving area is between the first electrode area and the second electrode area. The PN diode is disposed in the substrate in the first electrode area. The metal layer is disposed on the substrate and covers the first electrode area and the second electrode area, but does not cover the light receiving area.Type: ApplicationFiled: September 22, 2011Publication date: January 31, 2013Applicant: NATIONAL CENTRAL UNIVERSITYInventors: Yue-Ming Hsin, Fang-Ping Chou, Zi-Ying Li, Ching-Wen Wang
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Publication number: 20130026605Abstract: The disclosed WLCSP solution overcomes the limitations of fan-out WLCSP solutions, and other conventional solutions for WLCSP for small, high volume die, by increasing the width of scribe regions between die on a semiconductor substrate to accommodate bonding structures (e.g., solder balls) that partially extend beyond peripheral edges of the die. The scribe regions can be widened in x and y directions on the wafer. The widened scribe regions can be incorporated into the design of the mask set.Type: ApplicationFiled: July 26, 2011Publication date: January 31, 2013Applicant: ATMEL CORPORATIONInventor: Philip S. Ng
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Publication number: 20130026606Abstract: The present invention includes embodiments of a processing method, and resulting structure, for building a chip having a TSV pillar which can be used as an interconnecting structure. The process includes the deposition of a dual diffusion barrier between the TSV and the substrate the TSV is embedded within. The TSV is then exposed from the back side of the substrate so that at least a portion of the TSV protrudes from the substrate and can be used as a contact for connecting the chip to another surface. The resulting TSV is rigid, highly conductive, can be placed in a tightly pitched grid of contacts, and reduces effects of CTE mismatch.Type: ApplicationFiled: July 29, 2011Publication date: January 31, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Mukta G. Farooq, Troy L. Graves-Abe, William F. Landers, Kevin S. Petrarca, Richard P. Volant
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Publication number: 20130026607Abstract: A structure such as an integrated circuit device is described having a line of material with critical dimensions which vary within a distribution substantially less than that of a mask element, such as a patterned resist element, used in manufacturing the line of material.Type: ApplicationFiled: July 25, 2011Publication date: January 31, 2013Applicant: SYNOPSYS, INC.Inventors: Victor Moroz, Lars Bomholt
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Publication number: 20130026608Abstract: The invention relates to a process for manufacturing a semiconductor structure comprising a functionalized layer on a support substrate, comprising the following steps: (a) implanting ionic species in a source substrate comprising the said functionalized layer and a sacrificial buffer layer located under the functionalized layer relative to the direction of implantation, to a depth delimiting the thickness of an upper part of the source substrate comprising the functionalized layer and at least part of the buffer layer; (b) bonding the source substrate to the support substrate; (c) fracturing the source substrate and transferring the upper part of the source substrate to the support substrate; (d) removing the buffer layer by selective etching with respect to the functionalized layer.Type: ApplicationFiled: July 25, 2012Publication date: January 31, 2013Applicant: SOITECInventor: Ionut Radu
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Publication number: 20130026609Abstract: An apparatus configured to be coupled onto a substrate, wherein the apparatus comprises a semiconductor substrate and the semiconductor substrate includes a plurality of trenches defined within a side of the semiconductor substrate. The apparatus further comprises an interconnect layer over portions of the side of the semiconductor substrate, wherein the portions of the side of the semiconductor substrate include the plurality of trenches defined within the side of the semiconductor substrate. Each trench is configured to respectively receive a solder ball to provide an interface between i) the interconnect layer and ii) the substrate to which the apparatus is to be coupled.Type: ApplicationFiled: October 9, 2012Publication date: January 31, 2013Applicant: MARVELL WORLD TRADE LTD.Inventor: Marvell World Trade Ltd.
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Publication number: 20130026610Abstract: Lithography methods and devices are shown that include a semiconductor structure such as a mask. Methods and devices are shown that include a pattern of mask features and a composite feature. Selected mask features include doubled mask features. Methods and devices shown may provide varied feature sizes (including sub-resolution) with a small number of processing steps.Type: ApplicationFiled: July 27, 2011Publication date: January 31, 2013Inventor: Durga Prasanna Panda
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Publication number: 20130026611Abstract: A semiconductor substrate (100) has three doped zones (1), (2) and (3), forming a P-N junction (101), the third zone being located between the first zone and the second zone. The P-N junction of the substrate further has a fourth doped zone (4) having a first portion (4A) in contact with the first zone; and a second portion (4B) in contact with the third zone (3), said second portion (4B) extending in the direction of the second zone (2), and not being in contact with the second zone (2); where the fourth zone (4) being doped with the same type of doping as that of the first zone.Type: ApplicationFiled: July 23, 2012Publication date: January 31, 2013Inventors: Olivier Philippe Kellener, Gérard Dubois, Mehdi Mohamed Kanoun, Stephen McArdle
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Publication number: 20130026612Abstract: A passive interposer apparatus with a shielded through silicon via (TSV) configuration is disclosed. The apparatus includes a p-doped substrate, wherein at least an upper portion of the p-doped substrate is heavily p-doped. An interlayer dielectric layer (ILD) is disposed over the upper portion of the p-doped substrate. A plurality of through silicon vias (TSVs) are formed through the ILD and the p-doped substrate. A plurality of shielding lines disposed between the TSVs electrically couple respective second metal contact pads to the upper portion of the p-doped substrate.Type: ApplicationFiled: July 29, 2011Publication date: January 31, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hsiang-Tai LU, Chih-Hsien LIN, Meng-Lin CHUNG
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Publication number: 20130026613Abstract: A method of cutting an electrical fuse including a first conductor and a second conductor, the first conductor including a first cutting target region, the second conductor branched from the first conductor and connected to the first conductor and including a second cutting target region, which are formed on a semiconductor substrate, the method includes flowing a current in the first conductor, causing material of the first conductor to flow outward near a coupling portion connecting the first conductor to the second conductor, and cutting the first cutting target region and the second cutting target region.Type: ApplicationFiled: September 28, 2012Publication date: January 31, 2013Applicant: RENESAS ELECTRONICS CORPORATIONInventor: RENESAS ELECTRONICS CORPORATION
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Publication number: 20130026614Abstract: The present disclosure provides an integrated circuit. The integrated circuit includes an interconnect structure formed on a substrate; a landing metal trace formed on the interconnect structure and coupled to the interconnect structure, wherein the landing metal trace includes a first width T defined in a first direction; and a metal bump post formed on and aligned with the landing metal trace, wherein the metal bump post includes a second width U defined in the first direction, and the second width U is greater than the first width T.Type: ApplicationFiled: March 21, 2012Publication date: January 31, 2013Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, Tin-Hao Kuo, Chen-Shien Chen, Mirng-Ji Lii, Sheng-Yu Wu, Yen-Liang Lin