Patents Issued in September 12, 2013
  • Publication number: 20130234302
    Abstract: A semiconductor structure including a double patterned structure and a method for forming the semiconductor structure are provided. A positive photoresist layer is formed on a negative photoresist layer, which is formed over a substrate. An exposure process is performed to form a first exposure region in the positive photoresist layer and to form a second exposure region in the negative photoresist layer in response to a first and a second intensity thresholds of the exposure energy. A positive-tone development process is performed to remove the first exposure region from the positive photoresist layer to form first opening(s). The second exposure region in the negative photoresist layer is then etched along the first opening(s) to form second opening(s) therein. A negative-tone development process is performed to remove portions of the negative photoresist layer outside of remaining second exposure region to form a double patterned negative photoresist layer.
    Type: Application
    Filed: March 7, 2013
    Publication date: September 12, 2013
    Applicant: SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
    Inventor: SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
  • Publication number: 20130234303
    Abstract: A metal shield structure is provided for an integrated circuit (IC) having at least a first metal contact coupled to a fixed potential and a second metal contact. A first passivation layer is located between the first and second metal contacts and on a first portion of the first metal contact and a first portion of the second metal contact, leaving a second portion of the first metal contact and a second portion of the second metal contact uncovered by the first passivation layer. A metal shield layer is provided on the second portion of the first metal contact and on the first passivation layer, and a second passivation layer is formed on the metal shield layer.
    Type: Application
    Filed: March 8, 2012
    Publication date: September 12, 2013
    Applicant: POLAR SEMICONDUCTOR, INC.
    Inventors: Roger Carroll, Greg Nelson
  • Publication number: 20130234304
    Abstract: When a material of an organic substrate is glass epoxy and a material of a semiconductor chip is silicon or gallium arsenide, a substrate warp sometimes occurs because of a difference between thermal expansion coefficients of the materials. The shape of the antenna formed on the organic substrate due to such a substrate warp, so that the characteristics of the antenna are sometimes shifted from desired values. An antenna is provided on the substrate on which a semiconductor chip is mounted, and is covered with a resin. The resin has enough hardness to suppress the warp caused by joining the semiconductor chip and the substrate and a transformation of the antenna. By changing a connection relation of adjustment vias after the manufacture of the semiconductor device, the characteristic of the antenna can be changed.
    Type: Application
    Filed: March 2, 2013
    Publication date: September 12, 2013
    Applicant: RENESAS ELECTRONICS CORPORATION
    Inventor: Naoya Tamaki
  • Publication number: 20130234305
    Abstract: A transmission line structure for semiconductor RF and wireless circuits, and method for forming the same. The transmission line structure includes embodiments having a first die including a first substrate, a first insulating layer, and a ground plane, and a second die including a second substrate, a second insulating layer, and a signal transmission line. The second die may be positioned above and spaced apart from the first die. An underfill is disposed between the ground plane of the first die and the signal transmission line of the second die. Collectively, the ground plane and transmission line of the first and second die and underfill forms a compact transmission line structure. In some embodiments, the transmission line structure may be used for microwave applications.
    Type: Application
    Filed: March 9, 2012
    Publication date: September 12, 2013
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Ling LIN, Hsiao-Tsung YEN, Feng Wei KUO, Ho-Hsiang CHEN, Chin-Wei KUO
  • Publication number: 20130234306
    Abstract: A lead frame has a flag, a peripheral frame, and main tie bars coupling the flag to the peripheral frame. At least one cross tie bar extends between two of the main tie bars and an inner row of external connector pads extending from an inner side of the cross tie bar and an outer row of external connector pads extending from an outer side of the cross tie bar. Both an inner non-electrically conductive support bar and an outer non-electrically conductive support bar are attached across the two of the main tie bars. The inner non-electrically conductive support bar is attached to upper surfaces of the two of the main tie bars and to upper surfaces of the inner row of the external connector pads.
    Type: Application
    Filed: September 6, 2012
    Publication date: September 12, 2013
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Shunan Qiu, Zhigang Bai, Haiyan Liu
  • Publication number: 20130234307
    Abstract: A package includes a first plated area, a second plated area, a die attached to the first plated area, and a bond coupling the die to the second plated area. The package further includes a molding encapsulating the die, the bond, and the top surfaces of the first and second plated areas, such that the bottom surfaces of the first and second plated areas are exposed exterior to the package. Additional embodiments include a method of making the package.
    Type: Application
    Filed: September 4, 2012
    Publication date: September 12, 2013
    Applicant: UTAC THAI LIMITED
    Inventors: Somchai Nondhasittichai, Saravuth Sirinorakul
  • Publication number: 20130234308
    Abstract: A reconfigured wafer of resin-encapsulated semiconductor packages is obtained by supporting with a resin, thereafter, a grinding process is performed on top and backside surfaces to expose only a bump interconnection electrode on a surface of a semiconductor chip. Further, a chip-scale package is obtained by a dicing process along a periphery of the chip.
    Type: Application
    Filed: February 13, 2013
    Publication date: September 12, 2013
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Hiroshi Yamada, Yutaka Onozuka, Atsuko Iida, Kazuhiko Itaya
  • Publication number: 20130234309
    Abstract: Technique capable of achieving reliability improvement of a semiconductor device even if temperature rising of an operation guarantee temperature of the semiconductor device is performed is provided. Gap portions are provided among a plurality of pads, and a glass coat composed of, for example, a silicon oxide film or a silicon nitride film is embedded in the gap portions. The glass coat is provided in order to secure electrical insulation among the pads, and coats outer edge portions of the pads. Trenches are formed so as to be adjacent to regions, which are coated with the glass coat, of the outer edge portions of the pads.
    Type: Application
    Filed: February 14, 2013
    Publication date: September 12, 2013
    Applicant: RENESAS ELECTRONICS CORPORATION
    Inventors: Shiko Shin, Takayuki Saito, Hiroshi Horibe
  • Publication number: 20130234310
    Abstract: A flip chip package may include package substrate, a semiconductor chip, conductive bumps, a molding member and a heat sink. The semiconductor chip may be arranged over an upper surface of the package substrate. The conductive bumps may be interposed between a lower surface of the semiconductor chip and the upper surface of the package substrate to electrically connect the semiconductor chip and the package substrate with each other. The molding member may be formed on the upper surface of the package substrate to cover the semiconductor chip. The heat sink may make contact with the semiconductor chip to dissipate a heat in the semiconductor chip. An ultrasonic wave may pass through only one interface between the semiconductor chip and the molding member, so that scattering of the ultrasonic wave may be suppressed.
    Type: Application
    Filed: October 15, 2012
    Publication date: September 12, 2013
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Han-Shin Youn, Kyong-Soon Cho
  • Publication number: 20130234311
    Abstract: In accordance with an embodiment a semiconductor component includes an electrically conductive structure formed over a portion of a semiconductor material. An electrical interconnect having a top surface and opposing edges contacts the electrically conductive structure. A protective structure is formed on the top surface and the opposing edges of the electrical interconnect and over a portion of the electrically conductive structure, wherein the protective structure forms a seal that protects the electrical interconnect.
    Type: Application
    Filed: May 8, 2013
    Publication date: September 12, 2013
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Michael J. Seddon, Francis J. Carney
  • Publication number: 20130234312
    Abstract: Terminal assembly portions, lying on a front surface side of a case, are aligned in a left-right direction in a portion raised from a bottom of the case so that opening faces of the terminal assembly portions are positioned above circuit formation regions. Wiring terminal plates are led out into the terminal assembly portions, and disposed adjacent to each other. After each wiring terminal plate is connected by a laser welding to one end of one external connection terminal plate formed integrally with a cover, these welded portions are sealed with a second mold resin portion made of gel or an insulating resin such as epoxy. By so doing, even when the terminal junction area and distance between terminal junctions in the terminal assembly portions are small, it is possible to increase the joint strength of the terminals, and also secure withstand voltage.
    Type: Application
    Filed: March 7, 2013
    Publication date: September 12, 2013
    Applicant: FUJI ELECTRIC CO., LTD
    Inventor: Kenji SUZUKI
  • Publication number: 20130234313
    Abstract: An article of manufacture includes a semiconductor die (110) having an integrated circuit (105) on a first side of the die (110), a diffusion barrier (125) on a second side of the die (110) opposite the first side, a mat of carbon nanotubes (112) rooted to the diffusion barrier (125), a die attach adhesive (115) forming an integral mass with the mat (112) of the carbon nanotubes, and a die pad (120) adhering to the die attach adhesive and (115) and the mat (112) of carbon nanotubes for at least some thermal transfer between the die (110) and the die pad (120) via the carbon nanotubes (112). Other articles, integrated circuit devices, structures, and processes of manufacture, and assembly processes are also disclosed.
    Type: Application
    Filed: March 8, 2012
    Publication date: September 12, 2013
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: James Cooper Wainerdi, Luigi Colombo, John Paul Tellkamp, Robert Reid Doering
  • Publication number: 20130234314
    Abstract: A fabrication method for integrating chip(s) onto a flexible substrate in forming a flexible micro-system. The method includes a low-temperature flip-chip and a wafer-level fabrication process. Using the low-temperature flip-chip technique, the chip is bonded metallically onto the flexible substrate. To separate the flexible substrate from the substrate, etching is used to remove the sacrificial layer underneath the flexible substrate. The instant disclosure applies standardized micro-fabrication process for integrating chip(s) onto the flexible substrate. Without using special materials or fabrication procedures, the instant disclosure offers a cost-effective fabrication method for flexible micro-systems.
    Type: Application
    Filed: April 24, 2013
    Publication date: September 12, 2013
    Applicant: NATIONAL CHIAO TUNG UNIVERSITY
    Inventors: TZU-YUAN CHAO, CHIA-WEI LIANG, YU-TING CHENG
  • Publication number: 20130234315
    Abstract: Structures and methods for detecting solder wetting of pedestal sidewalls. The structure includes a semiconductor wafer having an array of integrated circuit chips, each of the integrated circuit chips having an array of chip pedestals having respective chip solder columns on top of the chip pedestals, the pedestals spaced apart a first distance in a first direction and a spaced apart second distance in second direction perpendicular to the first direction; and at least one monitor structure disposed in different regions of the wafer from the integrated circuit chips, the monitor structure comprising at least a first pedestal and a first solder column on a top surface of the first pedestal and a second pedestal and a second solder column on a top surface of the second pedestal, the first and the second pedestals spaced apart a third distance, the third distance less than the first and the second distances.
    Type: Application
    Filed: March 8, 2012
    Publication date: September 12, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Timothy H. Daubenspeck, Jeffrey P. Gambino, Christopher D. Muzzy, Wolfgang Sauter, Timothy D. Sullivan
  • Publication number: 20130234316
    Abstract: The invention provides a semiconductor chip structure having at least one aluminum pad structure and a polyimide buffering layer under the aluminum pad structure, wherein the polyimide buffering layer is self-aligned to the aluminum pad structure, and a method of forming the same. The method includes forming a polyimide buffering layer on a substrate, forming an aluminum pad structure on the buffering layer, and, using the aluminum pad structure as a mask, etching the substrate to remove the polyimide buffering layer from the substrate everywhere except under the aluminum pad structure.
    Type: Application
    Filed: March 9, 2012
    Publication date: September 12, 2013
    Applicant: International Business Machines Corporation
    Inventors: Timothy H. Daubenspeck, Jeffrey P. Gambino, Christopher D. Muzzy, Wolfgang Sauter, Timothy D. Sullivan
  • Publication number: 20130234317
    Abstract: Packaging methods and packaged semiconductor devices are disclosed. In one embodiment, a packaging method includes providing a first die, partially packaging the first die, and forming a plurality of solder balls on a surface of the partially packaged first die. An epoxy flux is disposed over the plurality of solder balls. A second die is provided, and the second die is partially packaged. The plurality of solder balls is coupled to the partially packaged second die.
    Type: Application
    Filed: March 9, 2012
    Publication date: September 12, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Tse Chen, Wei-Hung Lin, Yu-Peng Tsai, Chun-Cheng Lin, Chih-Wei Lin, Ming-Da Cheng, Chung-Shi Liu
  • Publication number: 20130234318
    Abstract: A semiconductor device has a substrate and first conductive layer formed over the substrate. An insulating layer is formed over the first substrate with an opening over the first conductive layer. A second conductive layer is formed within the opening of the insulating layer. A portion of the second conductive layer is removed to expose a horizontal surface and side surfaces of the second conductive layer below a surface of the insulating layer. The second conductive layer has non-linear surfaces to extend a contact area of the second conductive layer. The horizontal surface and side surfaces can be stepped surfaces or formed as a ring. A third conductive layer is formed over the second conductive layer. A plurality of bumps is formed over the horizontal surface and side surfaces of the second conductive layer. A semiconductor die is mounted to the substrate.
    Type: Application
    Filed: March 9, 2012
    Publication date: September 12, 2013
    Applicant: STATS ChipPAC, Ltd.
    Inventors: JaeHyun Lee, KiYoun Jang, KyungHoon Lee, TaeWoo Lee
  • Publication number: 20130234319
    Abstract: Some embodiments include a planarization method. A liner is formed across a semiconductor substrate and along posts that extending upwardly from the substrate. Organic fill material is formed over the liner and between the posts. A planarized surface is formed which extends across the posts and across one or both of the liner and the fill material. Some embodiments include a semiconductor construction containing a semiconductor die. Electrically conductive posts extend through the die. The posts have upper surfaces above a backside surface of the die, and have sidewall surfaces extending between the backside surface and the upper surfaces. A liner is across the backside surface of the die and along the sidewall surfaces of the posts. Electrically conductive caps are over the upper surfaces of the posts, and have rims along the liner adjacent the sidewall surfaces of the posts.
    Type: Application
    Filed: March 12, 2012
    Publication date: September 12, 2013
    Applicant: MICRON TECHNOLOGY, INC.
    Inventor: Jaspreet S. Gandhi
  • Publication number: 20130234320
    Abstract: A chip stack structure taking a wafer as a stacking base and stacking chips thereon is provided. The chip stack structure is capable of achieving high density electrode bonding and breaking the bottleneck of requiring interposer to serve as a transferring interface in three dimensional chip package. The chip stack structure is easily fabricated and compatible with wafer level process, so as to reduce processing time and manufacturing cost. A method for fabricating the chip stack structure is also provided.
    Type: Application
    Filed: May 9, 2012
    Publication date: September 12, 2013
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Su-Tsai Lu, Jing-Ye Juang
  • Publication number: 20130234321
    Abstract: The semiconductor device includes a plurality of pillar patterns formed over a semiconductor substrate. Each pillar pattern includes a silicon layer; a bit line junction region formed at the bottom of one side of the pillar pattern, and configured to be in contact the silicon layer; a bit line provided between the pillar patterns, coupled to the bit line junction region, and extending along a first direction; and a gate spaced apart from an upper part of the bit line, extending along a second direction perpendicular to the bit line, and formed at a sidewall of the pillar pattern.
    Type: Application
    Filed: September 10, 2012
    Publication date: September 12, 2013
    Applicant: SK hynix Inc.
    Inventor: Woo Young CHUNG
  • Publication number: 20130234322
    Abstract: A semiconductor device has a plurality of first semiconductor die with an encapsulant deposited over a first surface of the first semiconductor die and around the first semiconductor die. An insulating layer is formed over the encapsulant and over a second surface of the first semiconductor die opposite the first surface. The insulating layer includes openings over the first semiconductor die. A first conductive layer is formed over the first semiconductor die within the openings. A second conductive layer is formed over the first conductive layer to form vertical conductive vias. A second semiconductor die is disposed over the first semiconductor die and electrically connected to the first conductive layer. A bump is formed over the second conductive layer outside a footprint of the first semiconductor die. The second semiconductor die is disposed over an active surface or a back surface of the first semiconductor die.
    Type: Application
    Filed: February 20, 2013
    Publication date: September 12, 2013
    Applicant: STATS CHIPPAC, LTD.
    Inventor: Rajendra D. Pendse
  • Publication number: 20130234323
    Abstract: A semiconductor device comprising stacked substrates through a bump, the bump comprising a solder bump formed on a copper bump wherein the solder bump includes Zn.
    Type: Application
    Filed: March 4, 2013
    Publication date: September 12, 2013
    Applicant: ELPIDA MEMORY, INC.
    Inventor: Toru MIYAZAKI
  • Publication number: 20130234324
    Abstract: A semiconductor device has a first substrate and first conductive pillars formed over the first substrate. Second conductive pillars are formed over the first substrate alternating with the first conductive pillars. The second conductive pillars are vertically offset with respect to the first conductive pillars. First BOT interconnect sites are formed over a second substrate. Second BOT interconnect sites are formed over the second substrate alternating with the first interconnect sites. The second interconnect sites are vertically offset with respect to the first interconnect sites. The first substrate is mounted to the second substrate such that the first conductive pillars are aligned with and electrically connected to the first interconnect sites and the second conductive pillars are aligned with and electrically connected to the second interconnect sites. An underfill material is deposited between the first and second substrates. The first substrate can be a flipchip type semiconductor device.
    Type: Application
    Filed: April 25, 2013
    Publication date: September 12, 2013
    Applicant: STATS ChipPAC, Ltd.
    Inventors: SungWon Cho, KiYoun Jang, YongHee Kang, Hyung Sang Park
  • Publication number: 20130234325
    Abstract: By adding particles of high thermal conductivity and low thermal expansion coefficient into the copper as a composite material and filling with the composite material into the through-via hole, the mismatch of the coefficient of thermal expansion and the stress of the through-silicon via are lowered and the thermal conductivity of the through-silicon via is increased.
    Type: Application
    Filed: April 30, 2013
    Publication date: September 12, 2013
    Applicant: Industrial Technology Research Institute
    Inventors: Ming-Ji Dai, Ra-Min Tain, Chun-Hsien Chien, Heng-Chieh Chien, Sheng-Tsai Wu
  • Publication number: 20130234326
    Abstract: A semiconductor apparatus comprises of a first semiconductor chip having a through silicon via (TSV) and a second semiconductor chip also having a TSV, wherein the respective semiconductor chips are stacked vertically and are connected through a conductive connection member without the assistance of an additional bump between the conductive connection member and the second semiconductor chip.
    Type: Application
    Filed: September 5, 2012
    Publication date: September 12, 2013
    Applicant: SK HYNIX INC.
    Inventors: Chul KIM, Jae Jin LEE, Jong Chern LEE
  • Publication number: 20130234327
    Abstract: An inventive semiconductor device includes: a semiconductor chip; an internal pad provided on a surface of the semiconductor chip for electrical connection; a surface protective film covering the surface of the semiconductor chip and having a pad opening from which the internal pad is exposed; a stress relief layer provided on the surface protective film and having an opening portion through which the internal pad exposed from the pad opening is exposed; a connection pad including an anchor buried in the pad opening and the opening portion and connected to the internal pad, and a projection provided integrally with the anchor as projecting on the stress relief layer, the projection having a width greater than an opening width of the opening portion; and a metal ball provided for external electrical connection as covering the projection of the connection pad.
    Type: Application
    Filed: April 19, 2013
    Publication date: September 12, 2013
    Applicant: ROHM CO., LTD.
    Inventors: Masaki KASAI, Hiroshi OKUMURA
  • Publication number: 20130234328
    Abstract: A method of establishing conductive connections is disclosed. The method includes providing an integrated circuit die having a plurality of solder balls each of which has an oxide layer on an outer surface of the solder ball. The method also includes performing a heating process to heat at least the solder balls and applying a force causing each of a plurality of piercing bond structures on a substrate to pierce one of the solder balls and its associated oxide layer to thereby establish a conductive connection between the solder ball and the piercing bond structure.
    Type: Application
    Filed: April 30, 2013
    Publication date: September 12, 2013
    Applicant: MICRON TECHNOLOGY, INC.
    Inventor: Teck Kheng Lee
  • Publication number: 20130234329
    Abstract: Structures and methods to reduce maximum current density in a solder ball are disclosed. A method includes forming a contact pad in a last wiring level and forming a plurality of wires of the contact pad extending from side edges of the contact pad to respective ones of a plurality of vias. Each one of the plurality of wires has substantially the same electrical resistance.
    Type: Application
    Filed: April 30, 2013
    Publication date: September 12, 2013
    Applicant: Intetnational Business Machines Corporation
    Inventors: Raschid J. BEZAMA, Timothy H. DAUBENSPECK, Gary LaFONTANT, Ian D. MELVILLE, Ekta MISRA, George J. SCOTT, Krystyna W. SEMKOW, Timothy D. SULLIVAN, Robin A. SUSKO, Thomas A. WASSICK, Xiaojin WEI, Steven L. WRIGHT
  • Publication number: 20130234330
    Abstract: In one embodiment, a method of forming a semiconductor package includes applying a film layer having through openings over a carrier and attaching a back side of a semiconductor chip to the film layer. The semiconductor chip has contacts on a front side. The method includes using a first common deposition and patterning step to form a conductive material within the openings. The conductive material contacts the contacts of the semiconductor chip. A reconfigured wafer is formed by encapsulating the semiconductor chip, the film layer, and the conductive material in an encapsulant using a second common deposition and patterning step. The reconfigured wafer is singulated to form a plurality of packages.
    Type: Application
    Filed: March 8, 2012
    Publication date: September 12, 2013
    Applicant: Infineon Technologies AG
    Inventor: Horst Theuss
  • Publication number: 20130234331
    Abstract: In a wiring conversion part which connects a lower conductive film to a first conductive film each functioning as a wiring, a first transparent conductive film is formed into a pattern in which it covers an end surface of the first conductive film, and an angle formed at a corner part in a portion of the first transparent conductive film making contact with a lower first insulating film (outside a width of the first conductive film) is larger than 90 degrees and smaller than 270 degrees or the corner part has an arc shape. A second transparent conductive film is connected to the lower conductive film and the first transparent conductive film, and the first transparent conductive film is connected to the first conductive film, so that the lower conductive film and the first conductive film are electrically connected to each other.
    Type: Application
    Filed: February 28, 2013
    Publication date: September 12, 2013
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventor: Kazunori OKUMOTO
  • Publication number: 20130234332
    Abstract: According to one embodiment, a semiconductor device includes a stacked body in which a plurality of conductive layers and a plurality of insulating layers are alternately stacked. The semiconductor device includes a plurality of contact electrodes, a plurality of first insulating portions, and a plurality of second insulating portions. The plurality of contact electrodes extends in a stacking direction of the stacked body. Each of the contact electrodes reaches corresponding one of the conductive layers. The plurality of first insulating portions respectively is provided between the plurality of contact electrodes and the stacked body. The plurality of second insulating portions respectively is provided between the plurality of first insulating portions and the stacked body.
    Type: Application
    Filed: August 31, 2012
    Publication date: September 12, 2013
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Hiromitsu IINO, Tadashi IGUCHI
  • Publication number: 20130234333
    Abstract: Disclosed are devices and methods related to metallization of semiconductors. A metalized structure can include a first titanium (Ti) layer disposed over a compound semiconductor, a first titanium nitride (TiN) layer disposed over the first Ti layer, and a copper (Cu) layer disposed over the first TiN layer. The first Ti layer and the first TiN layer can be configured as a barrier between the Cu layer and the compound semiconductor. The metalized structure can further include a second TiN layer disposed over the Cu layer and a first platinum (Pt) layer disposed over the second TiN layer.
    Type: Application
    Filed: February 22, 2013
    Publication date: September 12, 2013
    Applicant: SKYWORKS SOLUTIONS, INC.
    Inventor: Kezia Cheng
  • Publication number: 20130234334
    Abstract: A semiconductor device includes an interlayer insulation film, an underlying line provided in the interlayer insulation film, a liner film overlying the interlayer insulation film, an interlayer insulation film overlying the liner film. The underlying line has a lower hole and the liner film and the interlayer insulation film have an upper hole communicating with the lower hole, and the lower hole is larger in diameter than the upper hole.. The semiconductor device further includes a conductive film provided at an internal wall surface of the lower hole, a barrier metal provided along an internal wall surface of the upper hole, and a Cu film filling the upper and lower holes. The conductive film contains a substance identical to a substance of the barrier metal. A highly reliable semiconductor device can thus be obtained.
    Type: Application
    Filed: April 22, 2013
    Publication date: September 12, 2013
    Inventors: Kazuyoshi MAEKAWA, Kenichi MORI
  • Publication number: 20130234335
    Abstract: Ni and Pt residuals are eliminated by replacing an SPM cleaning process with application of HNO3 in an SWC tool. Embodiments include depositing a layer of Ni/Pt on a semiconductor substrate, annealing the deposited Ni/Pt layer, removing unreacted Ni from the annealed Ni/Pt layer by applying HNO3 to the annealed Ni/Pt layer in an SWC tool, annealing the Ni removed Ni/Pt layer, and removing unreacted Pt from the annealed Ni removed Ni/Pt layer. Embodiments include forming first and second gate electrodes on a substrate, spacers on opposite sides of each gate electrode, and Pt-containing NiSi on the substrate adjacent each spacer, etching back the spacers, forming a tensile strain layer over the first gate electrode, applying a first HNO3 in an SWC tool, forming a compressive strain layer over the second gate electrode, and applying a second HNO3 in an SWC tool.
    Type: Application
    Filed: March 8, 2012
    Publication date: September 12, 2013
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Clemens Fitz, Jochen Poth, Kristin Schupke
  • Publication number: 20130234336
    Abstract: Processes for forming integrated circuits and integrated circuits formed thereby are provided in which a first dielectric layer including a first dielectric material is formed on an underlying substrate. A first etch mask having at least two patterned recesses is patterned over the first dielectric layer. At least one first-level via is etched in the first dielectric layer through one patterned recess in the first etch mask with a first etchant, and the first-level via is filled with electrically-conductive material. A second dielectric layer including a second dielectric material is formed over the first dielectric layer. A second etch mask having patterned recesses corresponding to the patterned recesses of the first etch mask is patterned over the second dielectric layer. Second-level vias are etched in the second dielectric layer through the patterned recesses in the second etch mask with a second etchant and exposed to the first etchant.
    Type: Application
    Filed: March 12, 2012
    Publication date: September 12, 2013
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Ralf Richter, Hans-Jürgen Thees
  • Publication number: 20130234337
    Abstract: A semiconductor package includes a substrate having opposite first and second surfaces and a ground layer therein. Further, the second surface has at least a recessed portion for exposing portions of the ground layer. The semiconductor package further includes a semiconductor chip disposed on the first surface of the substrate; an encapsulant formed on the first surface of the substrate for encapsulating the semiconductor chip; and a metal layer covering the encapsulant and the substrate and extending to the recessed portion for electrically connecting the ground layer. As such, the space for circuit layout is increased and the circuit layout flexibility is improved.
    Type: Application
    Filed: April 27, 2012
    Publication date: September 12, 2013
    Applicant: SILICONWARE PRECISION INDUSTRIES CO., LTD.
    Inventors: Tsung-Hsien Hsu, Hao-Ju Fang, Hsin-Lung Chung
  • Publication number: 20130234338
    Abstract: According to one embodiment, a semiconductor device includes a plurality of contact electrodes that reach corresponding conductive layers. Each of the contact electrodes includes a columnar portion, a stopper, and a first connection portion. The columnar portion extends in a stacked direction of the stacked body. The stopper covers the side of the columnar portion. The first connection portion is provided at a lower edge of the columnar portion. The first connection portion is in contact with the corresponding conductive layer. A cross-section dimension of the first connection portion in a direction orthogonal to the stacked direction is larger than a cross-section of the lower edge of the columnar portion. An etching rate of a material for the stopper is lower than an etching rate of a material for the first insulating layer.
    Type: Application
    Filed: August 31, 2012
    Publication date: September 12, 2013
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Tsuneo UENAKA, Yoshiro Shimojo
  • Publication number: 20130234339
    Abstract: After stacking m wafers in each of which a plurality of semiconductor chips are formed, the m wafers are diced to semiconductor chips to form a first chip stack having m of the semiconductor chips stacked, and, after stacking n wafers, the n wafers are diced to semiconductor chips to form a second chip stack having n of the semiconductor chips stacked. Next, the first chip stack is sorted according to the number of defective semiconductor chips included in the first chip stack, and the second chip stack is sorted according to the number of defective semiconductor chips included in the second chip stack. Furthermore, the first chip stack or the second chip stack after sorting are combined to form a third chip stack.
    Type: Application
    Filed: August 31, 2012
    Publication date: September 12, 2013
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Kazuyuki HIGASHI, Yoshiaki Sugizaki
  • Publication number: 20130234340
    Abstract: A vertically stackable die having a chip identifier structure is disclosed. In a particular embodiment, a semiconductor device is disclosed that includes a die comprising a first through silicon via to communicate a chip identifier and other data. The semiconductor device also includes a chip identifier structure that comprises at least two through silicon vias that are each hard wired to an external electrical contact.
    Type: Application
    Filed: April 4, 2013
    Publication date: September 12, 2013
    Applicant: QUALCOMM Incorporated
    Inventor: Jungwon Suh
  • Publication number: 20130234341
    Abstract: A method for manufacturing an interposer substrate includes: forming a conductive portion on a first surface of a semiconductor substrate via a first insulating layer, the conductive portion being formed of a first metal; forming a through hole at a second surface side of the semiconductor substrate located on an opposite side to the first surface so as to expose the first insulating layer; forming a second insulating layer on at least an inner wall surface and a bottom surface of the through hole; exposing the conductive portion by removing portions of the first and second insulating layers using a dry etching method that uses an etching gas containing a fluorine gas, the portions of the first and second insulating layers being located on the bottom surface of the through hole; and forming a conductive layer on the second insulating layer and electrically connecting the conductive layer to the conductive portion, wherein when exposing the conductive portion, forming a tapered portion is performed.
    Type: Application
    Filed: April 24, 2013
    Publication date: September 12, 2013
    Applicant: FUJIKURA LTD.
    Inventor: Satoshi ONAI
  • Publication number: 20130234342
    Abstract: A semiconductor device includes a first semiconductor chip including a plurality of driver circuits and an output switching circuit coupled to the plurality of driver circuits. The device also includes a second semiconductor chip and a plurality of through silicon vias provided on at least one of the first and second semiconductor chips. The output switching circuit is coupled between the plurality of driver circuits and the plurality of the through silicon vias, and outputs each of signals from the plurality of driver circuits to corresponding one of the plurality of through silicon vias.
    Type: Application
    Filed: April 29, 2013
    Publication date: September 12, 2013
    Applicant: Elpida Memory, Inc.
    Inventors: Kayoko Shibata, Hitoshi Miwa, Yoshihiko Inoue
  • Publication number: 20130234343
    Abstract: A substrate (3) in which a through-hole (2) is filled with a filler (4) is prepared, and a structure (6), at least a part of the surface of which has an insulating property, is formed on the surface of the substrate (3). A plated layer (7) is formed on the substrate (3) having the structure (6) formed thereon, and the filler (4) and the structure (6) are removed. Thus, a through-hole substrate (8) is formed, in which the plated layer (7) having an opening (9) communicating with the through-hole (2) is provided on at least one surface of a substrate (1).
    Type: Application
    Filed: April 6, 2012
    Publication date: September 12, 2013
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Takayuki Teshima
  • Publication number: 20130234344
    Abstract: Embodiments of the present disclosure flip-chip packaging techniques and configurations. An apparatus may include a package substrate having a plurality of pads formed on the package substrate, the plurality of pads being configured to receive a corresponding plurality of interconnect structures formed on a die and a fluxing underfill material disposed on the package substrate, the fluxing underfill material comprising a fluxing agent configured to facilitate formation of solder bonds between individual interconnect structures of the plurality of interconnect structures and individual pads of the plurality of pads and an epoxy material configured to harden during formation of the solder bonds to mechanically strengthen the solder bonds. Other embodiments may also be described and/or claimed.
    Type: Application
    Filed: March 6, 2012
    Publication date: September 12, 2013
    Applicant: TRIQUINT SEMICONDUCTOR, INC.
    Inventors: Frank J. Juskey, Robert C. Hartmann, Paul D. Bantz
  • Publication number: 20130234345
    Abstract: In at least some implementations, a carburetor having a fuel metering system including a diaphragm assembly that moves in response to pressure changes in a metering chamber to actuate a metering valve may include a flexible diaphragm adapted to carried by a body of the carburetor at a periphery to define part of the metering chamber. The portion of the diaphragm that defines part of the metering chamber defines a chamber projected area of the diaphragm. A backing plate is attached to the flexible diaphragm and arranged to be located outside the metering chamber. The backing plate having an outer perimeter defining a plate projected area, wherein an area ratio of the plate projected area to the chamber projected area is greater than about 0.1.
    Type: Application
    Filed: February 20, 2013
    Publication date: September 12, 2013
    Applicant: WALBRO ENGINE MANAGEMENT, L.L.C.
    Inventors: Matthew A. Braun, Gary J. Burns
  • Publication number: 20130234346
    Abstract: Humidifying apparatus includes a base housing a motor and impeller unit for generating a first air flow. A nozzle includes an interior passage for receiving the first air flow and an air outlet for emitting the first air flow. The nozzle defines an opening through which air from outside the apparatus is drawn by air emitted from the air outlet. The apparatus is configured to humidify a second air flow, which is emitted from a plurality of second air outlets. The second air flow is humidified with water supplied from a water tank mounted on the base. The water tank surrounds at least an upper section of the motor and impeller unit.
    Type: Application
    Filed: March 5, 2013
    Publication date: September 12, 2013
    Applicant: DYSON TECHNOLOGY LIMITED
    Inventors: Mark Joseph STANIFORTH, Daniel James BEAVIS, Jude Paul PULLEN, Peter David GAMMACK
  • Publication number: 20130234347
    Abstract: Humidifying apparatus includes a base housing a motor and impeller unit for generating a first air flow. A removable nozzle includes an interior passage for receiving the first air flow and an air outlet for emitting the first air flow. The nozzle defines an opening through which air from outside the apparatus is drawn by air emitted from the air outlet. The apparatus is configured to humidify a second air flow, which is emitted from a plurality of second air outlets. The second air flow is humidified with water supplied from a water tank mounted on the base. The water tank has a handle which is moveable between a stowed position and a deployed position, and which is biased towards the deployed position. The nozzle is configured to urge the handle towards the stowed position.
    Type: Application
    Filed: March 5, 2013
    Publication date: September 12, 2013
    Applicant: DYSON TECHNOLOGY LIMITED
    Inventors: Mark Joseph STANIFORTH, Daniel James BEAVIS, Jude Paul PULLEN
  • Publication number: 20130234348
    Abstract: Cross flow trays are provided with a support system. The support system interconnects the upper cross flow tray to a downcomer of the lower cross flow tray to provide support for the upper tray. In some aspects, the support system may also interconnect the downcomer of the lower cross flow tray to an upper tray of an underlying pair, providing additional support for the assembly. Such tray assemblies may facilitate easier installation without impeding the performance of the column.
    Type: Application
    Filed: March 8, 2013
    Publication date: September 12, 2013
    Applicant: KOCH-GLITSCH, LP
    Inventors: Izak Nieuwoudt, Darran Matthew Headley, David R. Ewy, Gary W. Gage
  • Publication number: 20130234349
    Abstract: An optical film comprising a first domain of a polymer composition and a second domain disposed inside the first domain, wherein the second domain is a bubble having a morphology anisotropy, and the mean alignment direction of the main chain of the polymer molecule in the first domain differs from the mean direction of the major axis of the second domain, is capable of contributing toward display performance unification and body thickness reduction of an image display device.
    Type: Application
    Filed: April 24, 2013
    Publication date: September 12, 2013
    Applicant: FUJIFILM Corporation
    Inventors: Yujiro YANAI, Yasuyuki Sasada
  • Publication number: 20130234350
    Abstract: In a method and apparatus for micropelletization of a polymeric material, a melt thread of the polymeric material is formed by an extruder. A flowing gas is directed to the melt thread to form Rayleigh disturbances in the melt thread and break up the melt thread into discrete microdroplets. The discrete microdroplets are then solidified to form micropellets.
    Type: Application
    Filed: March 6, 2013
    Publication date: September 12, 2013
    Applicant: WISCONSIN ALUMNI RESEARCH FOUNDATION
    Inventor: Tim Osswald
  • Publication number: 20130234351
    Abstract: An economical makeup restoring kit and method that allows the individual consumer to re-solidify the fragments of a broken powder cake within the powder tray of the original compact case is provided. The makeup restoring kit includes an alcohol dispenser, a mixing/smoothing implement, and a cleaning implement. Variations of the implements are presented. The makeup restoring kit is preferably provided in a kit receptacle suitable for transporting and storing the kit contents.
    Type: Application
    Filed: April 19, 2013
    Publication date: September 12, 2013
    Inventor: Pamela J. Johnson