Patents Issued in January 3, 2017
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Patent number: 9536671Abstract: An electronic component includes: a laminate busbar structure comprising at least two busbar layers separated by an insulating layer; a transistor connected to the laminate busbar structure on a first side thereof; and a capacitor that is mounted on the first side of the laminate busbar structure and is positioned further away from the laminate busbar structure than the transistor, the capacitor having respective planar terminals parallel to each other and perpendicular to the laminate busbar structure, each of the planar terminals comprising a rectangular member with one side thereof connected to the capacitor and an opposite end connected to a corresponding one of the busbar layers.Type: GrantFiled: December 1, 2014Date of Patent: January 3, 2017Assignee: TELSA MOTORS, INC.Inventors: Robert James Ramm, Dino Sasaridis, Colin Campbell, Wenjun Liu
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Patent number: 9536672Abstract: This invention provides a storage module formed using a plurality of storage cells. The each storage cell includes a storage unit that stores a charge, a polyhedral container that houses the storage unit and has two opposing surfaces, and a pair of electrode terminals that output and input the charge of the storage unit. The electrode terminals include a positive electrode terminal that projects externally from an end portion of the container and has a joint surface that is formed to be substantially coplanar with one of the two opposing surfaces of the container and joined to an electrode terminal of an adjacent storage cell, and a negative electrode terminal that projects externally from the end portion of the container and has a joint surface that is formed to be substantially coplanar with another of the two surfaces and joined to an electrode terminal of an adjacent storage cell.Type: GrantFiled: September 15, 2010Date of Patent: January 3, 2017Assignee: UD TRUCKS CORPORATIONInventors: Shigemi Kobayashi, Shuuichi Araki, Kazumasa Honda, Masami Takeda
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Patent number: 9536673Abstract: A capacitor whose electrical properties can be stable under a variety of different conditions is provided. The solid electrolyte of the capacitor is formed from a combination of an in situ polymerized conductive polymer and a hydroxy-functional nonionic polymer. One benefit of such an in situ polymerized conductive polymer is that it does not require the use of polymeric counterions (e.g., polystyrenesulfonic anion) to compensate for charge, as with conventional particle dispersions, which tend to result in ionic polarization and instable electrical properties, particularly at the low temperatures noted above. Further, it is believed that hydroxy-functional nonionic polymers can improve the degree of contact between the polymer and the surface of the internal dielectric, which unexpectedly increases the capacitance performance and reduces ESR.Type: GrantFiled: July 15, 2013Date of Patent: January 3, 2017Assignee: AVX CorporationInventors: Jan Petrzilek, Martin Biler
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Patent number: 9536674Abstract: Provided is an electrolytic solution suitable for use in a 100 WV class electrolytic capacitor having low inductance at low temperatures and high durability in high-temperature use conditions. This electrolytic solution for an electrolytic capacitor contains: a mixed organic solvent including sulfolane and ?-butyrolactone; water; an electrolyte selected from the group consisting of a quaternized pyridinium salt of carboxylic acid and a quaternized imidazolinium salt of carboxylic acid; boric acid; and mannitol; and has a mass ratio of boric acid and mannitol in the range of 1:1.2 to 1:1.6, and a total amount of boric acid and mannitol of 10.0 to 14.5% by mass of the total electrolytic solution, the water content being 1.5 to 2.0% by mass of the total electrolytic solution.Type: GrantFiled: September 28, 2013Date of Patent: January 3, 2017Assignee: NIPPON CHEMI-CON CORPORATIONInventor: Shingo Takeuchi
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Patent number: 9536675Abstract: Provided is a polymerization liquid for electropolymerization, which uses a solvent that is mainly composed of water, which is greatly increased in the amount of a monomer contained therein, and which is capable of quickly forming a conductive polymer layer having high conductivity and heat resistance, A polymerization liquid for electropolymerization of the present invention contains: a solvent that is composed of 100-80% by mass of water and 0-20% by mass of an organic solvent; at least one monomer having a pi-conjugated double bond; at least one supporting electrolyte; and at least two nonionic surfactants. The at least two nonionic surfactants are composed of at least one acetylenol surfactant and at least one water-soluble nonionic surfactant other than the acetylenol surfactant. Due to the combination of the two nonionic surfactants, the amount of the monomer emulsified with the solvent can be greatly increased.Type: GrantFiled: August 28, 2013Date of Patent: January 3, 2017Assignee: NIPPON CHEMI-CON CORPORATIONInventors: Kenji Machida, Kenji Tamamitsu, Ryo Muroi
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Patent number: 9536676Abstract: A dye-sensitized solar cell module includes a plurality of dye-sensitized solar cells electrically connected in series. The dye-sensitized solar cell includes a first electrode that comprises a transparent substrate, and a transparent conductive film provided on the transparent substrate, a second electrode that faces the first electrode, an oxide semiconductor layer that is provided on the first electrode or the second electrode, and an annular sealing section that joins the first electrode and the second electrode. The transparent substrate is composed of a transparent substrate that is common to the plurality of dye-sensitized solar cells. The second electrodes of two adjoining dye-sensitized solar cells are separated apart from each other. The sealing section includes an annular first sealing section that is provided between the first electrode and the second electrode, and the first sealing sections that are adjoining are integrated together.Type: GrantFiled: August 30, 2013Date of Patent: January 3, 2017Assignee: FUJIKURA LTD.Inventors: Kouki Shimohira, Kenichi Okada
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Patent number: 9536677Abstract: A dye-sensitized solar cell includes a first electrode; a second electrode that faces the first electrode; an electrolyte that is disposed between the first electrode and the second electrode; and an annular encapsulation unit that surrounds the electrolyte together with the first electrode and the second electrode, and connects the first electrode and the second electrode. In the dye-sensitized solar cell, the sealing portion has a resin sealing section formed of a resin. At least one interface of a first interface between the first electrode and the sealing portion, and a second interface between the second electrode and the sealing portion, constitutes a wide width section having the broadest sealing width among the sealing widths of the sealing portion, and the sealing portion has a narrow width section having a narrower sealing width than the wide width section.Type: GrantFiled: December 30, 2013Date of Patent: January 3, 2017Assignee: FUJIKURA LTD.Inventors: Kenichi Okada, Katsuhiro Doi
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Patent number: 9536678Abstract: Embodiments described herein relate generally to electric double layer capacitors having an electrolyte formulation that includes a quantity of a stabilizing additive such that the electrochemical double layer capacitors retain cell capacitance for longer periods of time, generate less gas during operation, and experience less long term ESR. In some embodiments, an electrolyte formulation includes an ionic species, a solvent, and a stabilizer. In some embodiments the stabilizer contains a moiety that promotes adsorption to a surface, such as a carbon surface, and a moiety that promotes polarity of the stabilizer. In some embodiments, the solvent can be a nitrile compound and the stabilizer can be a compound of the formula I: Such that R is H, saturated or unsaturated, linear or branched, acyclic carbon group, OH, halogen NH2, NO2, S(O)2CF3, or monocyclic or polycyclic aryl, and n is an integer from 0 to 5.Type: GrantFiled: June 27, 2014Date of Patent: January 3, 2017Assignee: IOXUS, INC.Inventors: George Lane, Ken Rudisuela
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Patent number: 9536679Abstract: A method of manufacturing trenched electrochemical double layer capacitors is provided. One aspect of the method employs state-of-the art processes used in semi-conductor wafer manufacturing such as photolithography etching for creating trenches in the electrodes of the double layer capacitor. Another aspect of the method employs a die-saw process, which is scalable and low-cost. The trenched super/ultra capacitors made by the disclosed methods have the combined advantage of higher energy storage capacity than conventional planar super/ultra capacitors due to the increased surface area and higher power density than commonly used Li-ion batteries due to the faster charging time and higher instantaneous energy burst power. The manufacturing processes also have the advantage of better manufacturability, scalability and reduced manufacturing cost.Type: GrantFiled: January 5, 2016Date of Patent: January 3, 2017Inventor: Johnny Duc Van Chiem
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Patent number: 9536680Abstract: A jumper is for an electrical switching apparatus having a plurality of poles. Each of the poles comprises a terminal. The terminal of a first one of the poles is proximate the terminal of a second one of the poles. The jumper includes a jumper member having an attachment portion and a heat sink portion. The attachment portion is structured to electrically connect the terminal of the first one of the poles to the terminal of the second one of the poles. The heat sink portion includes a plurality of spaced apart heat transfer members that are arranged in a plurality of rows and a plurality of columns.Type: GrantFiled: June 18, 2014Date of Patent: January 3, 2017Assignee: EATON CORPORATIONInventors: Kevin Lee Sippel, Kenneth Martin Fischer
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Patent number: 9536681Abstract: A multi-pole switching device (1) for a busbar system includes a movable front cover (3), which is movably attached to the housing of the switching device and which locks at least one receiving unit (4) for receiving a component when the multi-pole switching device (1) is switched on.Type: GrantFiled: July 8, 2013Date of Patent: January 3, 2017Assignee: Woehner GmbH & Co. KGInventors: Alex Buettner, Philipp Steinberger, Joram Masel
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Patent number: 9536682Abstract: Devices, systems, methods, and kits for remotely operating a switch are described herein. An example embodiment of a system for remotely operating a switch comprises a plate, a connecting member, a first fastener, a second fastener, a first attachment member, a second attachment member, a first wire member, a second wire member, and a pulling member. The plate has a body that defines a first bend and a second bend and is releasably attached to the handle of a switch. During use, an operator utilizes the first and second wire members to moved the switch between an open state and a closed state.Type: GrantFiled: February 24, 2015Date of Patent: January 3, 2017Assignee: ONE ENERGY ENTERPRISES LLCInventors: Jereme Kent, John Everett, Chelsea Bumb
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Patent number: 9536683Abstract: A touch module is provided, including a hollow frame, a positioning member, and a touch unit. The positioning member includes a main body, an extending portion, and a U-shape structure. The extending portion is connected to the main body and fixed to the frame. The U-shape structure includes a contact portion and a pair of flexible arms. The flexible arms are connected to the main body, wherein the U-shape structure and the main body form a gap therebetween. The contact portion and the extending portion are disposed on opposite sides of the main body, wherein the contact portion is disposed between the two flexible arms. The touch unit is connected to the main body and forms a protrusion, wherein when a force is applied to the touch unit, the protrusion contacts the contact portion.Type: GrantFiled: September 25, 2014Date of Patent: January 3, 2017Assignee: ACER INCORPORATEDInventors: Hsin-Tsung Ho, Han-Tsung Shen, Chung-Jen Ho, Chih-Chun Liu, Chien-Yun Hsu, Yi-Mu Chang
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Patent number: 9536684Abstract: A multi-signaling hinged safety switch for mobile protection barriers includes a fixed member designed to be secured to a stationary part of the barrier and having a pair of axial end holes, a movable member designed to be secured to a pivotal part of the barrier and having a pair of substantially transverse arms located outside the fixed member and pivoted to the axial end holes, an electrical detection system within the fixed member switching one or more electric safety circuits of the barrier at a predetermined switching angle. A pair of cylindrical pins extend in cantilever fashion from the arms and are pivotally inserted in the holes, with mutually spaced opposed ends defining a gap with no axial connection member therein. The detection system includes a pair of detectors each interacting with one end of a pin and having a switching angle that are operatively independent of each other.Type: GrantFiled: December 23, 2013Date of Patent: January 3, 2017Assignee: PIZZATO ELETTRICA S.R.L.Inventors: Marco Pizzato, Giuseppe Pizzato
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Patent number: 9536685Abstract: A touch panel includes a strengthen cover lens and a touch electrode layer. The strengthen cover lens includes a first non-planar sulfate, and is planned with a display region and a peripheral region surrounding the display region. The touch electrode layer is formed, on the first non-planar surface and overlaid on the display region and at least part of the peripheral region for manufacturing a non-planar touch panel.Type: GrantFiled: May 14, 2013Date of Patent: January 3, 2017Assignee: TPK Touch Solutions (Xiamen) Inc.Inventors: Yuh-Wen Lee, Hsiang-Lung Hsia, Feng Chen
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Patent number: 9536686Abstract: A cover for switch is capable of mounting a frame thereon. A protruding portion, which protrudes from a mounting surface on which the frame is to be mounted, is provided with switch operation portions in the front face of the protruding portion. A first wall part, a second wall part and a third wall part are provided upright on the mounting surface, and have a first hole, a second hole and a third hole, through which projecting portions provided in the frame are inserted, respectively. A first raised claw and a second raised claw are provided on a protruding side positioned opposite to the first wall part and the third wall part, for the purpose of fastening a decorative cover for covering the switch operation portions.Type: GrantFiled: March 4, 2015Date of Patent: January 3, 2017Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventor: Taku Haraguchi
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Patent number: 9536687Abstract: A push switch includes a switch contact part for carrying out electrical connection by pressing, a case having a wall part on a periphery thereof and accommodating the switch contact part in a concave portion surrounded by the wall part, and a protective sheet covering the concave portion. The protective sheet and at least a part of an upper surface of the wall part of the case are welded together as a first welding place.Type: GrantFiled: July 7, 2014Date of Patent: January 3, 2017Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Masatsugu Takeuchi, Yutaro Nakagawa
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Patent number: 9536688Abstract: A press button device includes a button unit having a main body with a surrounding wall, and an actuating member protruding from an inner side of the main body for actuating a control switch. A flexible connection unit includes a button-coupling portion connected to the surrounding wall in an airtight manner, a fixed portion radially spaced apart from and surrounding the button-coupling portion, and a deformable portion interconnecting the button-coupling and fixed portions. The deformable portion is elastically displaced relative to the fixed portion when the button unit is pressed, and restores the button unit to its original position when the pressing force thereon is removed.Type: GrantFiled: May 2, 2013Date of Patent: January 3, 2017Assignees: Lite-On Electronics (Gaungzhou) Limited, Lite-On Technology Corp.Inventor: Chih-Hung Su
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Patent number: 9536689Abstract: Provided is a multi-operating switch unit for vehicles including: a housing part; a substrate; a switch shaft part; a rotary switch part; a directional switch part; and a push switch part. The directional switch part has: a directional slide part in which the position thereof can vary in the housing part due to a tilting directional operation of the switch shaft part; a directional switch that is arranged on the substrate and is operated due to the positional variation of the directional slide part; and a directional return part that returns the directional slide part and the switch shaft part. The directional return part has a return plunger; a return elastic part; and a return groove. The return plunger can be movable in the axial length direction of the switch shaft part with respect to the housing part, and the return groove is formed in the directional slide part.Type: GrantFiled: December 10, 2013Date of Patent: January 3, 2017Assignee: DAESUNG ELECTRIC CO., LTDInventors: Sam Jong Noh, Jung Han Kim, Sang Ku Yun, Sung Kyoung Kim
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Patent number: 9536690Abstract: Synchronized mechanical switches are configured to support electrical switching circuits operating at frequencies equal to or higher than the frequency of the primary AC power supply. Due to near perfect impedances of mechanical switches as well as accurate timing control mechanisms, the mechanical switching circuits provide timely electrical connections to the terminals of the primary AC power supply to generate proper waveforms suitable to power next stage electrical circuits without the need to use semiconductor devices.Type: GrantFiled: November 1, 2013Date of Patent: January 3, 2017Inventor: Jeng-Jye Shau
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Patent number: 9536691Abstract: This specification describes axial relays. One of the axial relays includes first and second adapters positioned along an axis defining an axial direction, a contact extending along the axial direction between the first adapter and the second adapter, and a driver configured to move the contact relative to at least one of the first and second adapters between a first position and a second position by moving the contact along the axial direction or rotating the contact around the axial direction, such that a first end of the contact is conductively coupled to the first adapter and a second end of the contact is conductively coupled to the second adapter when the contact is at the first position, and the first adapter is conductively decoupled from the first end of the first adapter when the contact is at the second position.Type: GrantFiled: July 10, 2015Date of Patent: January 3, 2017Assignee: Google Inc.Inventors: Ryan T. Davis, Jyoti Sastry, Ankit Somani, James C. Schmalzried
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Patent number: 9536692Abstract: A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.Type: GrantFiled: October 13, 2015Date of Patent: January 3, 2017Assignee: PURDUE RESEARCH FOUNDATIONInventors: Ankit Jain, Muhammad Ashraful Alam, Pradeep Nair
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Patent number: 9536693Abstract: A trip assembly is for an electrical switching apparatus. The electrical switching apparatus includes a housing, separable contacts enclosed by the housing, and an operating mechanism for opening and closing the separable contacts. The operating mechanism includes a poleshaft and a trip D-shaft. The trip assembly comprises: a yoke assembly comprising a yoke member and a trip pin coupled to the yoke member, the yoke member being structured to be coupled to the poleshaft; and a link assembly comprising a linking member, the linking member being structured to cooperate with each of the trip pin and the trip D-shaft. When the yoke member moves in response to a trip condition, the linking member is structured to transmit movement of the yoke member into movement of the trip D-shaft.Type: GrantFiled: March 23, 2015Date of Patent: January 3, 2017Assignee: EATON CORPORATIONInventor: Andrew Lawrence Gottschalk
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Patent number: 9536694Abstract: A pole shaft catch assembly is for an electrical switching apparatus, such as a circuit breaker. The circuit breaker includes a housing, separable contacts enclosed by the housing, and an operating mechanism for opening and closing the separable contacts. The operating mechanism includes a pole shaft pivotably coupled to the housing and a yoke assembly coupled to the pole shaft. The pole shaft catch assembly includes a catch arm. The catch arm moves between an engaged position in which the catch arm engages the yoke assembly to restrict movement of the yoke assembly and the pole shaft, and a disengaged position in which the catch arm disengages the yoke assembly. A biasing element biases the catch arm toward the disengaged position. A trigger translates movement of the yoke assembly into movement of the catch arm.Type: GrantFiled: December 4, 2014Date of Patent: January 3, 2017Assignee: EATON CORPORATIONInventors: Andrew L. Gottschalk, Paul R. Rakus, Erik R. Bogdon
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Patent number: 9536695Abstract: A driving method includes providing a field emission cathode device. The field emission cathode device includes a cathode electrode, an electron emission layer electrically connected to the cathode electrode, a first gate electrode spaced from the cathode electrode by a first dielectric layer, and a second grid electrode spaced from the first gate electrode by a second dielectric layer. The second dielectric layer has a second opening. A first voltage is supplied to the cathode electrode, a second voltage is supplied to the first gate electrode, and a third voltage is supplied to the second grid electrode, to extract electrons from the electron emission layer to a space formed by the second opening, until the electrons of the space saturate. The third voltage is greater than the second voltage, such that the electrons of the space are emitted through the second grid electrode.Type: GrantFiled: April 16, 2013Date of Patent: January 3, 2017Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.Inventors: Peng Liu, Shou-Shan Fan
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Patent number: 9536696Abstract: A horizontal multilayer junction-edge field emitter includes a plurality of vertically-stacked multilayer structures separated by isolation layers. Each multilayer structure is configured to produce a 2-dimensional electron gas at a junction between two layers within the structure. The emitter also includes an exposed surface intersecting the 2-dimensional electron gas of each of the plurality of vertically-stacked multilayer structures to form a plurality of effectively one-dimensional horizontal line sources of electron emission.Type: GrantFiled: February 2, 2016Date of Patent: January 3, 2017Assignee: Elwha LLCInventors: Roderick A. Hyde, Jordin T. Kare, Tony S. Pan, Lowell L. Wood, Jr.
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Patent number: 9536697Abstract: This invention provides a system and a method for calibrating charge-regulation module in vacuum environment. Means for mounting the charge-regulation module provides motions to the charge-regulation module such that a beam spot, illuminated by the charge-regulation module, on a sample surface can be moved to a pre-determined position which is irradiated by a charged particle beam.Type: GrantFiled: May 19, 2015Date of Patent: January 3, 2017Assignee: HERMES MICROVISION INC.Inventors: Yi-Xiang Wang, Jian Zhang, Yan Zhao
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Patent number: 9536698Abstract: Methods and apparatus for modulating a particle pulse include a succession of Hermite-Gaussian optical modes that effectively construct a three-dimensional optical trap in the particle pulse's rest frame. Optical incidence angles between the propagation of the particle pulse and the optical pulse are tuned for improved compression. Particles pulses that can be modulated by these methods and apparatus include charged particles and particles with non-zero polarizability in the Rayleigh regime. Exact solutions to Maxwell's equations for first-order Hermite-Gaussian beams demonstrate single-electron pulse compression factors of more than 100 in both longitudinal and transverse dimensions. The methods and apparatus are useful in ultrafast electron imaging for both single- and multi-electron pulse compression, and as a means of circumventing temporal distortions in magnetic lenses when focusing ultra-short electron pulses.Type: GrantFiled: August 21, 2015Date of Patent: January 3, 2017Assignee: Massachusetts Institute of TechnologyInventors: Liang Jie Wong, Byron Freelon, Timm Rohwer, Nuh Gedik, Steven Glenn Johnson
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Patent number: 9536699Abstract: The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.Type: GrantFiled: June 25, 2014Date of Patent: January 3, 2017Assignee: Carl Zeiss Microscopy, LLCInventors: John A. Notte, IV, Weijie Huang, Raymond Hill, FHM-Faridur Rahman, Alexander Groholski, Shawn McVey
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Patent number: 9536700Abstract: Provided is a sample observation apparatus including a charged particle optical column that irradiates a sample including an observation target portion that is a concave portion with a charged particle beam at an acceleration voltage, an image generation section that acquires an image including the observation target portion from a signal acquired with irradiation of the charged particle beam, a storage section that stores information representing a relationship between a brightness ratio of a concave portion and its neighboring portion of a reference sample that is irradiated with the charged particle beam at the acceleration voltage and a value that represents a structure of the concave portions of the reference sample in advance, a calculation section that acquires a brightness ratio of the concave portion and its neighboring portion of the image, and a determination section that determines whether or not a defect occurs in the observation target portion based on the information that represents the relatioType: GrantFiled: April 17, 2014Date of Patent: January 3, 2017Assignee: Hitachi High-Technologies CorporationInventors: Yasunori Goto, Takuma Yamamoto
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Patent number: 9536701Abstract: A radiation analyzer includes a primary ray source that generates primary rays, an optical system applies the primary rays emitted from the primary ray source to a sample, an energy-dispersive radiation detector that detects radiation that has been generated from the sample when the primary rays have been applied to the sample, and a support that supports the radiation detector so that the tilt of the center axis (C) of the radiation detector with respect to the optical axis (Z) of the optical system can be changed.Type: GrantFiled: July 15, 2015Date of Patent: January 3, 2017Assignee: JEOL Ltd.Inventor: Yorinobu Iwasawa
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Patent number: 9536702Abstract: A multi-beam particle microscope includes first particle optics in order to direct particle beams onto an object, a detector with detection regions, with a transducer being assigned to each detection region, and a data acquisition system, which has a control computer system, image recording computer systems and a screen. The image recording computer systems receive electrical signals from the transducers and generates a first file, which represents a high resolution image, and a second file, which represents a low resolution image. The control computer system maintains a data structure which represents an assignment of transducers to two-dimensional spatial vectors and depicts the images on the screen, wherein a reference point in each image is arranged on the screen in a coordinate system of the screen at a location which is defined by a sum of a leading vector, which is the same for all images, and the spatial vector.Type: GrantFiled: May 28, 2015Date of Patent: January 3, 2017Assignee: Carl Zeiss Microscopy GmbHInventors: Uwe Lang, Christian Crueger, Nico Kaemmer, Christof Riedesel
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Patent number: 9536703Abstract: This scanning electron microscope is provided with: a deceleration means that decelerates an electron beam (5) when the electron beam is passing through an objective lens; and a first detector (8) and a second detector (7) that are disposed between the electron beam and the objective lens and have a sensitive surface having an axially symmetric shape with respect to the optical axis of the electron beam. The first detector is provided at the sample side with respect to the second detector, and exclusively detects the signal electrons having a high energy that have passed through a retarding field energy filter (9A). When the distance between the tip (13) at the sample side of the objective lens and the sensitive surface of the first detector is L1 and the distance between the tip at the sample side of the objective lens and the sensitive surface of the second detector is L2, then L1/L2?5/9.Type: GrantFiled: July 11, 2014Date of Patent: January 3, 2017Assignee: Hitachi High-Technologies CorporationInventors: Toshihide Agemura, Hideo Morishita
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Patent number: 9536704Abstract: A method includes capturing a first image of the sample via a detector, wherein the particles of the primary particle beam have a first average energy so that the interaction products detected by the detector predominantly contain sample information from a sample layer lying below the sample surface. The method also includes removing the outermost sample layer with the aid of the cutting device, and capturing a second image of the sample via the detector, wherein the particles of the primary particle beam have a second average energy so that the interaction products detected by the detector predominantly contain sample information from the surface layer of the sample. The method further includes calculating the lateral shift/lateral offset of the sample from a comparison of the first and second images, and compensating for the lateral offset.Type: GrantFiled: September 9, 2013Date of Patent: January 3, 2017Assignee: Carl Zeiss Microscopy GmbHInventors: Matthias Langer, Rainer Arnold, Markus Esseling, Jaroslaw Paluszynski
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Patent number: 9536705Abstract: A writing apparatus includes a writing unit to include a deflector for deflecting a charged particle beam and write a pattern on a target object by the charged particle beam, a decision unit to decide a representative position of a deflection result range in which the charged particle beam was deflected with respect to a writing direction by the deflector, and a correction unit to correct drift of the charged particle beam by using a drift amount at the representative position of the deflection result range.Type: GrantFiled: March 13, 2015Date of Patent: January 3, 2017Assignee: NUFLARE TECHNOLOGY, INC.Inventor: Osamu Iizuka
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Patent number: 9536706Abstract: A dynamic pattern generator (DPG) device and method of making a DPG device are disclosed. The DPG device is used in semiconductor processing tools that require multiple electron-beams, such as direct-write lithography. The device is a self-aligned DPG device that enormously reduces the required tolerances for aligning the various electrode layers, as compared to other design configurations including the non-self-aligned approach and also greatly simplifies the process complexity and cost. A process sequence for both integrated and non-integrated versions of the self-aligned DPG device is described. Additionally, an advanced self-aligned DPG device that eliminates the need for a charge dissipating coating or layer to be used on the device is described. Finally, a fabrication process for the implementation of both integrated and non-integrated versions of the advanced self-aligned DPG device is described.Type: GrantFiled: February 19, 2016Date of Patent: January 3, 2017Assignee: CORPORATION FOR NATIONAL RESEARCH INITIATIVESInventors: Michael A. Huff, Michael Pedersen
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Patent number: 9536707Abstract: An etching method of etching a multilayered film includes etching a multilayered film by generating plasma within a processing vessel of a plasma processing apparatus. In the etching of the multilayered film, a first processing gas containing a hydrogen gas, a hydrogen bromide gas, a fluorine-containing gas, a hydrocarbon gas, a hydrofluorocarbon gas and a fluorocarbon gas is supplied from a first supply unit configured to supply a gas toward a central region of the processing target object and a second supply unit configured to supply a gas toward outer region than the central region; a second processing gas containing a hydrocarbon gas and a fluorocarbon gas is supplied from either one of the first supply unit and the second supply unit; and the first processing gas and the second processing gas are excited.Type: GrantFiled: August 4, 2015Date of Patent: January 3, 2017Assignee: TOKYO ELECTRON LIMITEDInventors: Ryuuu Ishita, Yusuke Saitoh
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Patent number: 9536708Abstract: Provided is a plasma generating device. The plasma generating device includes: an RF power supply providing an RF signal; a plasma chamber providing a space where gas is injected to generate plasma; a first electromagnetic inducer installed at one portion of the plasma chamber and inducing an electromagnetic field in the plasma chamber as the RF signal is applied; a second electromagnetic inducer installed at another portion of the plasma chamber and inducing an electromagnetic field in the plasma chamber as the RF signal is applied; a first load connected to the first electromagnetic inducer; a second load connected to the second electromagnetic inducer; and a controller controlling a power supplied to the first electromagnetic inducer and the second electromagnetic inducer by adjusting at least one impedance of the first load and the second load.Type: GrantFiled: March 27, 2014Date of Patent: January 3, 2017Assignee: PSK Inc.Inventors: Hee Sun Chae, Jeong Hee Cho, Jong Sik Lee, Han Saem Rhee, Hyun Jun Kim
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Patent number: 9536709Abstract: A large-sized plasma generator is suited to various surface shapes and has a longer service life and improved energy conservation. An example of the plasma generator (1-1) has a dielectric layer (3), first and second electrodes (4, 5) that are formed within the dielectric layer, an alternating-current power supply (6), and a first metal layer (7). The dielectric layer (3) is composed of polymer resin layers (31, 32) that are formed of a polyimide resin. The electrodes are arranged side by side within the dielectric layer. The first metal layer is formed of a metal having a sterilization effect, and has a plurality of pores (71) in the surface. The first metal layer spans between supporting parts (33, 34) of the polymer resin layer (32), and faces the whole of the electrodes. A gap (S) is formed between the first metal layer and the polymer resin layer.Type: GrantFiled: January 9, 2014Date of Patent: January 3, 2017Assignee: CREATIVE TECHNOLOGY CORPORATIONInventors: Satomi Koyama, Li Luo, Yoshiaki Tatsumi
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Patent number: 9536710Abstract: An apparatus for providing processing gases to a process chamber with improved uniformity is disclosed. One embodiment provides a gas delivery assembly. The gas delivery assembly includes a hub, a nozzle, and one or more gas diffusers disposed in the nozzle. The nozzle has a cylindrical body with a side wall and a top surface. A plurality of injection passages are formed inside the nozzle to deliver processing gases into the process chamber via a plurality of outlets disposed in the side wall. The injection passages are configured to direct process gases out of each outlet disposed in the side wall in a direction which is not radially aligned with a centerline of the hub.Type: GrantFiled: August 6, 2013Date of Patent: January 3, 2017Assignee: APPLIED MATERIALS, INC.Inventors: Vladimir Knyazik, Kyle Tantiwong, Samer Banna, Waheb Bishara
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Patent number: 9536711Abstract: In a plasma processing chamber, a method for processing a substrate is provided. The method includes supporting the substrate in the plasma processing chamber configured with an upper electrode (UE) and a lower electrode (LE), configuring at least one radio frequency power source to ignite plasma between the UE and the LE, and providing a conductive coupling ring, the conductive coupling ring is coupled to the LE to provide a conductive path. The method further includes providing a plasma-facing-substrate-periphery (PFSP) ring, the PFSP ring being disposed above the conductive coupling ring. The method yet further includes coupling the PFSP ring to at least one of a direct current (DC) ground through an RF filter, the DC ground through the RF filter and a variable resistor, a positive DC power source through the RF filter, and a negative DC power source through the RF filter to control plasma processing parameters.Type: GrantFiled: March 13, 2008Date of Patent: January 3, 2017Assignee: Lam Research CorporationInventors: Rajinder Dhindsa, Eric Hudson, Alexei Marakhtanov, Maryam Moravej, Andreas Fischer
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Patent number: 9536712Abstract: In one embodiment, a processing apparatus includes a plasma chamber configured to house a plasma comprising first ions and second ions. The apparatus may further include a resonance RF power supply to generate a drive signal that is coupled to the plasma chamber, the drive signal having a drive frequency. The apparatus may also include a magnet assembly to generate a magnetic field in the plasma chamber, wherein the magnet assembly is configured to generate a first magnetic field strength that imparts a first cyclotron frequency for the first ions that matches the drive frequency of the drive signal, wherein the first magnetic field strength imparts a second cyclotron frequency for the second ions that does not match the drive frequency of the drive signal, and wherein the first ions are selectively driven into a chamber wall of the plasma chamber.Type: GrantFiled: June 9, 2014Date of Patent: January 3, 2017Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: W. Davis Lee, Svetlana Radovanov, Peter F. Kurunczi
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Patent number: 9536713Abstract: This disclosure describes systems, methods, and apparatus for ensuring desirable ignition of plasma in a plasma processing chamber via providing increased instantaneous power during an ignition period for both continuous wave (CW) and pulsed power delivery. The systems, methods, and apparatus can be applied to both initial ignition of a plasma and reignition of a plasma where pulsed power delivery leads to periodic extinction of the plasma.Type: GrantFiled: February 24, 2014Date of Patent: January 3, 2017Assignee: Advanced Energy Industries, Inc.Inventors: Gideon Van Zyl, David W. Madsen, Fernando Gustavo Tomasel
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Patent number: 9536714Abstract: A plate-centering system that has a plate with a holder, in which the plate is centered in the holder both at room temperature and at higher temperatures, independently of the thermal expansion of the plate and the holder, and the plate can freely expand in the holder at higher temperatures. The invention relates in particular to a target having a frame-shaped target mount, which is very well suited for use in a coating source for high power pulsed magnetron sputtering of the target.Type: GrantFiled: April 7, 2014Date of Patent: January 3, 2017Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKONInventors: Siegfried Krassnitzer, Juerg Hagmann, Joerg Kerschbaumer
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Recycling method for tantalum coil for sputtering and tantalum coil obtained by the recycling method
Patent number: 9536715Abstract: The present invention relates to a method for recycling a tantalum coil for sputtering that is disposed between a substrate and a sputtering target. The method for recycling a tantalum coil for sputtering is characterized in that the whole or partial surface of a spent tantalum coil is subject to cutting (cutting is performed until a re-deposited film and knurling traces are eliminated) so as to eliminate the re-deposited film that was formed during sputtering, and knurling is newly performed to the cut portion. While sputtered grains are accumulated (re-deposited) on the surface of the tantalum coil disposed between the substrate and the sputtering target during sputtering, by eliminating the sputtered grains accumulated on the spent coil by way of cutting after the sputtering is complete, the tantalum coil can be efficiently recycled. Thus, provided is technology capable of lean manufacturing of new coils, improving productivity, and stably providing such coils.Type: GrantFiled: September 14, 2012Date of Patent: January 3, 2017Assignee: JX Nippon Mining & Metals CorporationInventor: Shiro Tsukamoto -
Patent number: 9536716Abstract: When a sample plate 3 is set on a sample stage 2, an irradiation trace formation controller 22 appropriately moves the sample stage 2 and throws a short pulse of high-power laser beam to create an irradiation trace at a predetermined position on the sample plate 3. The irradiation trace has a unique shape. A microscopic image of the irradiation trace is captured and saved in an image storage section 32. After the sample plate 3 is temporarily removed from the stage 2 to apply a matrix to a sample, the sample plate 3 is re-set on the same stage 2. Then, the displacement of the sample plate 3 from its original position is calculated from the difference in the position of the irradiation trace between an image taken at that point in time and the image previously stored in the image storage section 32. Based on the calculated result, an analysis position corrector 24 modifies the position information of an area selected by an operator. Thus, the displacement of the re-set sample plate can be accurately detected.Type: GrantFiled: February 16, 2011Date of Patent: January 3, 2017Assignee: SHIMADZU CORPORATIONInventors: Masahiro Ikegami, Takahiro Harada
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Patent number: 9536717Abstract: This invention relates to mass spectrometry that includes ion trapping in at least one of the stages of mass analysis. In particular, although not exclusively, this invention relates to tandem mass spectrometry where precursor ions and fragment ions are analyzed. A method of mass spectrometry is provided comprising the sequential steps of: accumulating in an ion store a sample of one type of ions to be analyzed; accumulating in the ion store a sample of another type of ions to be analyzed; and mass analyzing the combined samples of the ions; wherein the method comprises accumulating the sample of the one type of ions and/or the sample of another type of ions to achieve a target number of ions based on the results of a previous measurement of the respective type of ions.Type: GrantFiled: March 7, 2014Date of Patent: January 3, 2017Assignee: Thermo Finnigan LLCInventors: Alexander A. Makarov, Oliver Lange, Stevan R. Horning
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Patent number: 9536718Abstract: According to the present invention, there is provided a method of detecting a complex comprising a membrane protein bound to a therapeutic agent by mass spectrometry. The method comprises: (a) providing a solution comprising a detergent micelle in which said complex is contained; (b) providing a mass spectrometer comprising a nanoelectrospray ionization source, a mass analyzer and a detector; (c) vaporizing the solution using the nanoelectrospray ionization source under conditions such that the complex is released from the micelle; (d) ionizing the complex; (e) resolving the ionized complex using the mass analyzer; and (f) detecting the resolved complex using the detector. Also provided is a solution comprising a detergent micelle in which a complex is contained, wherein the complex comprises a membrane protein bound to a therapeutic agent.Type: GrantFiled: June 18, 2012Date of Patent: January 3, 2017Assignee: Oxford University Innovation LimitedInventors: Carol V. Robinson, Sheila Wang, Nelson P. Barrera
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Patent number: 9536719Abstract: A method of mass analysis comprises: generating ions from the sample; delivering the ions to a quadrupole; applying a radio frequency voltage, V, to rods of the quadrupole such that the instantaneous electrical potential of each rod is out of phase with each adjacent rod and a non-oscillatory voltage, U, across each pair of adjacent rods such that a subset of the ions having a range of mass-to-charge (m/z) ratios are selectively transmitted through the quadrupole; varying at least one of voltage U and voltage V such that the range of selectively transmitted m/z ratios is caused to vary and varying at least one additional operational parameter; acquiring a data set comprising a series of temporally-resolved images of spatial distribution patterns of transmitted ions at each combination of U, V and the at least one additional operating parameter; and mathematically deconvolving the data set to generate mass spectra.Type: GrantFiled: April 24, 2015Date of Patent: January 3, 2017Assignee: Thermo Finnigan LLCInventors: Johnathan Wayne Smith, Alan E. Schoen
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Patent number: 9536720Abstract: There is provided an analyzing apparatus including an irradiation unit irradiating a first point with a laser, a convergence unit causing an analysis target to converge at the first point, and a unit analyzing a sample gas including a substance that has been irradiated with the laser at the first point using an ion mobility sensor. One example of the convergence unit includes a unit causing the analysis target to be captured in a carrier substance in a liquid state; and a discharging unit discharging the carrier substance including the analysis target to the first point.Type: GrantFiled: October 31, 2011Date of Patent: January 3, 2017Assignee: ATONARP INC.Inventors: Tomoyoshi Sato, Akira Imai