Patents Issued in April 13, 2017
  • Publication number: 20170104066
    Abstract: A method for adjusting a threshold voltage includes depositing a strained liner on a gate structure to strain a gate dielectric. A threshold voltage of a transistor is adjusted by controlling an amount of strain in the liner to control an amount of work function (WF) modulating species that diffuse into the gate dielectric in a channel region. The liner is removed.
    Type: Application
    Filed: October 12, 2015
    Publication date: April 13, 2017
    Inventors: Takashi Ando, Mohit Bajaj, Terence B. Hook, Rajan K. Pandey, Rajesh Sathiyanarayanan
  • Publication number: 20170104067
    Abstract: A method for manufacturing a semiconductor device is described that comprises providing a substrate, forming a plurality of fins having a first semiconductor material, replacing a first portion of at least one of the fins with a second semiconductor material, and distributing the second semiconductor material from the first portion to a second portion of the at least one of the fins.
    Type: Application
    Filed: December 19, 2016
    Publication date: April 13, 2017
    Inventors: Yi-Jing Lee, Cheng-Hsien Wu, Chih-Hsin Ko, Clement Hsingjen Wann
  • Publication number: 20170104068
    Abstract: A vertically integrated circuit device can include a substrate having a first region reserved for first functional circuits of the vertically integrated circuit device, where the first functional circuits has a substantially constant top surface level across the first region and having a second region reserved for second functional circuits of the vertically integrated circuit device and spaced apart from the first region. The second functional circuits can have a varied top surface level across the second region. A doped oxidation suppressing material can be included in the substrate and can extend from the first region to the second region at an interface of the substrate with the first functional circuits and the second functional circuits, respectively.
    Type: Application
    Filed: August 30, 2016
    Publication date: April 13, 2017
    Inventors: DONG-SIK LEE, YOUNGWOO KIM, JINHYUN SHIN, JUNG HOON LEE
  • Publication number: 20170104069
    Abstract: Embodiments of an apparatus and methods for providing three-dimensional complementary metal oxide semiconductor devices comprising modulation doped transistors are generally described herein. Other embodiments may be described and claimed, which may include forming a modulation doped heterostructure, comprising forming an active portion having a first bandgap and forming a delta doped portion having a second bandgap.
    Type: Application
    Filed: December 17, 2016
    Publication date: April 13, 2017
    Applicant: Intel Corporation
    Inventors: Ravi Pillarisetty, Mantu Hudait, Marko Radosavljevic, Willy Rachmady, Gilbert Dewey, Jack Kavalieros
  • Publication number: 20170104070
    Abstract: A semiconductor device comprises a semiconductor substrate and a semiconductor fin. The semiconductor substrate has an upper surface and a recess extending downwards into the semiconductor substrate from the upper surface. The semiconductor fin is disposed in the recess and extends upwards beyond the upper surface, wherein the semiconductor fin is directly in contact with semiconductor substrate, so as to form at least one semiconductor hetero-interface on a sidewall of the recess.
    Type: Application
    Filed: November 13, 2015
    Publication date: April 13, 2017
    Inventors: Chien-Hung Chen, Shih-Hsien Huang, Yu-Ru Yang, Huai-Tzu Chiang, Hao-Ming Lee, Sheng-Hao Lin, Cheng-Tzung Tsai, Chun-Yuan Wu
  • Publication number: 20170104071
    Abstract: A graphene device and a method of operating the same are provided. The graphene device includes: an active layer including a plurality of meta atoms spaced apart from each other, each of the meta atoms having a radial shape, and a graphene layer that contacts each of the plurality of meta atoms; and a dielectric layer covering the active layer.
    Type: Application
    Filed: March 15, 2016
    Publication date: April 13, 2017
    Applicants: SAMSUNG ELECTRONICS CO., LTD., INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI U NIVERSITY
    Inventors: Unjeong KIM, Younggeun ROH, Yeonsang PARK, Chihun IN, Hyunyong CHOI
  • Publication number: 20170104072
    Abstract: A semiconductor device according to an embodiment includes a SiC semiconductor layer, a gate electrode, a gate insulating film provided between the SiC semiconductor layer and the gate electrode, and a region that is provided between the SiC semiconductor layer and the gate insulating film and includes at least one element selected from the group consisting of antimony (Sb), scandium (Sc), yttrium (Y), lanthanum (La), and lanthanoids (Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu). The concentration of the at least one element is equal to or greater than 1×1019 cm?3 and equal to or less than 2.4×1022 cm?3.
    Type: Application
    Filed: December 21, 2016
    Publication date: April 13, 2017
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Tatsuo SHIMIZU, Takashi SHINOHE
  • Publication number: 20170104073
    Abstract: Methods and structures for improving the performance of integrated semiconductor transistors operating at high frequency and/or high power are described. Two capacitors may be connected to an input of a semiconductor transistor and tuned to suppress second-harmonic generation and to transform and match the input impedance of the device. A two-stage tuning procedure is described. The transistor may comprise gallium nitride and may be configured as a power transistor capable of handling up to 1000 W of power. A tuned transistor may operate at frequencies up to 6 GHz with a peak drain efficiency greater than 60%.
    Type: Application
    Filed: October 8, 2015
    Publication date: April 13, 2017
    Applicant: M/A-COM Technology Solutions Holdings, Inc.
    Inventors: Walter H. Nagy, Lyndon Pattison
  • Publication number: 20170104074
    Abstract: In an embodiment, a III-V nitride semiconductor device comprises an AlGaN epitaxial layer and a metal electrode. The AlGaN epitaxial layer is a C-plane n-type or undoped layer, and the AlGaN epitaxial layer has an epitaxial surface consisting of one or more semi-polar planes. The metal electrode is directly formed on the one or more semi-polar planes.
    Type: Application
    Filed: November 25, 2015
    Publication date: April 13, 2017
    Inventors: Wei-Hung Kuo, Suh-Fang Lin, Kun-Fong Lin, Chia-Lung Tsai
  • Publication number: 20170104075
    Abstract: Methods and structures for improving the performance of integrated semiconductor transistors operating at high frequency and/or high power are described. Two capacitors may be connected to an input of a semiconductor transistor and tuned to suppress second-harmonic generation and to transform and match the input impedance of the device. A two-stage tuning procedure is described. The transistor may comprise gallium nitride and may be configured as a power transistor capable of handling up to 1000 W of power. A tuned transistor may operate at frequencies up to 6 GHz with a peak drain efficiency greater than 60%.
    Type: Application
    Filed: September 6, 2016
    Publication date: April 13, 2017
    Applicant: MACOM Technology Solutions Holdings, Inc.
    Inventors: Walter H. Nagy, Lyndon Pattison
  • Publication number: 20170104076
    Abstract: In an embodiment, a semiconductor device includes a Group III-nitride-based High Electron Mobility Transistor (HEMT) configured as a bidirectional switch. The Group III nitride-based HEMT includes a first input/output electrode, a second input/output electrode, a gate structure arranged between the first input/output electrode and the second input/output electrode, and a field plate structure.
    Type: Application
    Filed: October 12, 2016
    Publication date: April 13, 2017
    Inventors: Gerhard Prechtl, Oliver Haeberlen, Clemens Ostermaier
  • Publication number: 20170104077
    Abstract: A semiconductor device includes a substrate and a first active layer disposed over the substrate. The semiconductor device also includes a second active layer disposed on the first active layer such that a lateral conductive channel arises between the first active layer and the second active layer. a source, gate and drain contact are disposed over the second active layer. A conductive charge distribution structure is disposed over the second active layer between the gate and drain contacts. The conductive charge distribution structure is capacitively coupled to the gate contact.
    Type: Application
    Filed: December 22, 2016
    Publication date: April 13, 2017
    Inventor: Alexey Kudymov
  • Publication number: 20170104078
    Abstract: A semiconductor device is manufactured by forming a gate electrode adjacent to a body region in a semiconductor substrate, forming a field plate trench in a main surface of the substrate, the field plate trench having an extension length in a first direction parallel to the main surface, and forming a field electrode and a field dielectric layer in the field plate trench so that the field electrode is insulated from an adjacent drift zone by the field dielectric layer. The extension length of the field plate trench in the first direction is less than double an extension length of the field electrode in a second direction that is perpendicular to the first direction and is parallel to the main surface. The extension length in the first direction is more than half the extension length in the second direction.
    Type: Application
    Filed: December 22, 2016
    Publication date: April 13, 2017
    Inventors: David Laforet, Oliver Blank, Franz Hirler, Ralf Siemieniec
  • Publication number: 20170104079
    Abstract: The present invention provides a vacuum tube nonvolatile memory and the method of manufacturing it. The vacuum tube nonvolatile memory comprises oxide-nitride-oxide composite structure as gate dielectric layer, wherein the nitride layer can trap charges and provide better insulating block capability between the gate and vacuum channel. The present structure exhibits superior program and erase speed as well as the retention time. It also provides with excellent gate controllability and negligible gate leakage current due to adoption of the gate insulator.
    Type: Application
    Filed: May 23, 2016
    Publication date: April 13, 2017
    Inventors: DEYUAN XIAO, RICHARD R. CHANG
  • Publication number: 20170104080
    Abstract: The present teachings relate to curable linear polymers that can be used as active and/or passive organic materials in various electronic, optical, and optoelectronic devices. In some embodiments, the device can include an organic semiconductor layer and a dielectric layer prepared from such curable linear polymers. In some embodiments, the device can include a passivation layer prepared from the linear polymers described herein. The present linear polymers can be solution-processed, then cured thermally (particularly, at relatively low temperatures) and/or photochemically into various thin film materials with desirable properties.
    Type: Application
    Filed: July 13, 2016
    Publication date: April 13, 2017
    Inventors: Shaofeng Lu, Antonio Facchetti, Xiang Yu, Darwin Scott Bull, Karen K. Chan
  • Publication number: 20170104081
    Abstract: A method for preparing a TiAl alloy thin film, wherein a reaction chamber is provided, in which at least one substrate is placed; an aluminum precursor and a titanium precursor are introduced into the reaction chamber, wherein the aluminum precursor has a molecular structure of a structural formula (I); and the aluminum precursor and the titanium precursor are brought into contact with the substrate so that a titanium-aluminum alloy thin film is formed on the surface of the substrate by vapor deposition. The method solves the problem of poor step coverage ability and the problem of incomplete filling with regard to the small-size devices by the conventional methods. Meanwhile, the formation of titanium-aluminum alloy thin films with the aid of plasma is avoided so that the substrate is not damaged by plasma.
    Type: Application
    Filed: June 6, 2016
    Publication date: April 13, 2017
    Inventors: Yuqiang DING, Chao ZHAO, Jinjuan XIANG
  • Publication number: 20170104082
    Abstract: A semiconductor device that a fin structure, and a gate structure present on a channel region of the fin structure. A composite spacer is present on a sidewall of the gate structure including an upper portion having a first dielectric constant, a lower portion having a second dielectric constant that is less than the first dielectric constant, and an etch barrier layer between sidewalls of the first and second portion of the composite spacer and the gate structure. The etch barrier layer may include an alloy including at least one of silicon, boron and carbon.
    Type: Application
    Filed: October 9, 2015
    Publication date: April 13, 2017
    Inventors: XIUYU CAI, CHUN-CHEN YEH, QING LIU, RUILONG XIE
  • Publication number: 20170104083
    Abstract: A High Electron Mobility Transistor (HEMT) and a method of forming the same are disclosed. The method includes epitaxially growing a first III-V compound layer and epitaxially growing a second III-V compound layer over the first III-V compound layer, wherein a first native oxide layer is formed on the second III-V compound layer. The method further includes in-situ treating the first native oxide layer with a first gas, thereby converting the first native oxide layer into a first crystalline oxide layer. The method further includes forming a first crystalline interfacial layer over the first crystalline oxide layer and forming a dielectric passivation layer over the first crystalline interfacial layer.
    Type: Application
    Filed: October 9, 2015
    Publication date: April 13, 2017
    Inventors: Han-Chin Chiu, Cheng-Yuan Tsai
  • Publication number: 20170104084
    Abstract: The present disclosure provides a method for forming a transistor, including: forming a base structure, containing a first gate structure, an active layer covering the first gate structure, and an insulating structure in the active layer; forming a second gate structure on the active layer; forming a source-drain region, including a source region and a drain region in the active layer each on a different side of the second gate structure; and forming a first interlayer dielectric layer covering the base structure and the second gate structure. The method also includes: forming a first contact hole that exposes the first gate structure by etching the first interlayer dielectric layer and the insulating structure; and forming a second contact hole that exposes the second gate structure and a third contact hole that exposes the drain region by etching the first interlayer dielectric layer.
    Type: Application
    Filed: September 29, 2016
    Publication date: April 13, 2017
    Inventors: HERB HE HUANG, CLIFFORD IAN DROWLEY, HAI TING LI, JI GUANG ZHU
  • Publication number: 20170104085
    Abstract: This invention provides a semiconductor structure and a forming method thereof. The method for forming the semiconductor structure comprises providing a substrate having a dummy gate; forming source-drain regions in the substrate located in the two sides of the dummy gate, wherein the source-drain region is doped with deuterium; removing the dummy gate; and forming a gate structure having a gate oxide layer in the location of the dummy gate, wherein the deuterium enters the gate oxide layer. In the obtained semiconductor structure, stable covalent bonds can be formed in the gate oxide layer interface because of the deuterium entry, thereby the problems of dangling bonds can be solved. Accordingly, the device recovery against hot carrier effect can be enhanced, and the affections of the device properties caused by hot carrier effect can be reduced.
    Type: Application
    Filed: May 23, 2016
    Publication date: April 13, 2017
    Inventor: DEYUAN XIAO
  • Publication number: 20170104086
    Abstract: A method comprises providing a structure defined by a silicon material on a buried oxide layer of a substrate; causing a nucleation of a III-V material in a sidewall of the structure defined by the silicon material; adjusting a growth condition to facilitate a first growth rate of the III-V material in directions along a surface of the sidewall and a second growth rate of the III-V material in a direction laterally from the surface of the sidewall, wherein the second growth rate is less than the first growth rate; and processing the silicon material and the III-V material to form a fin.
    Type: Application
    Filed: October 7, 2015
    Publication date: April 13, 2017
    Inventors: Sanghoon Lee, Brent A. Wacaser, Devendra K. Sadana, Effendi Leobandung
  • Publication number: 20170104087
    Abstract: Methods for forming a fin field effect transistor (FinFET) device structure are provided. The method includes providing a first fin structure and a second fin structure extending above a substrate and forming an isolation structure over the substrate, and the an upper portion of the first fin structure and an upper portion of the second fin structure protrudes from the isolation structure. The method also includes forming a first transistor and a second transistor on the first fin structure and the second fin structure, and the first transistor includes a first gate dielectric layer. The method further includes forming an inter-layer dielectric (ILD) structure between the first transistor and the second transistor, and a portion of the first gate dielectric layer above the isolation structure is in direct contact with a sidewall of the ILD structure.
    Type: Application
    Filed: December 22, 2016
    Publication date: April 13, 2017
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Che-Cheng CHANG, Yung-Jung CHANG
  • Publication number: 20170104088
    Abstract: A portion of a bulk silicon (Si) is formed into a fin, having a fin base and, on the fin base, an in-process fin. The fin base is doped Si and the in-process fin is silicon germanium (SiGe). The in-process SiGe fin has a source region and a drain region. Boron is in-situ doped into the drain region and into the source region. Optionally, boron is in-situ doped by forming an epi-layer, having boron, on the drain region and on the source region, and drive-in annealing to diffuse boron in the source region and the drain region.
    Type: Application
    Filed: December 20, 2016
    Publication date: April 13, 2017
    Inventors: Vladimir MACHKAOUTSAN, Jeffrey Junhao XU, Stanley Seungchul SONG, Mustafa BADAROGLU, Choh Fei YEAP
  • Publication number: 20170104089
    Abstract: A change in electrical characteristics of a semiconductor device including an oxide semiconductor is prevented, and the reliability of the semiconductor device is improved. An oxide semiconductor is formed over a substrate; an insulator is formed over the oxide semiconductor; a metal oxide is formed over the insulator; a conductor is formed over the metal oxide; a portion of the oxide semiconductor is exposed by removing the conductor, the metal oxide, and the insulator over the oxide semiconductor; plasma treatment is performed on a surface of the exposed portion of the oxide semiconductor; and a nitride insulator is formed over the exposed portion of the oxide semiconductor and over the conductor. The plasma treatment is performed in a mixed atmosphere of an argon gas and a nitrogen gas.
    Type: Application
    Filed: October 6, 2016
    Publication date: April 13, 2017
    Inventors: Junichi KOEZUKA, Masami JINTYOU, Yukinori SHIMA, Yasuharu HOSAKA, Yasutaka NAKAZAWA, Takashi HAMOCHI, Takahiro SATO, Shunpei YAMAZAKI
  • Publication number: 20170104090
    Abstract: Variation in electrical characteristics of a semiconductor device including an oxide semiconductor is inhibited and the reliability thereof is improved. The oxide semiconductor is formed over a substrate. An insulator is formed over the oxide semiconductor. A metal oxide is formed over the insulator. A conductor is formed over the metal oxide. The conductor, the metal oxide, and the insulator over the oxide semiconductor are removed to expose a portion of the oxide semiconductor. Plasma treatment is performed on a surface of the exposed portion of the oxide semiconductor. A nitride insulator is formed over the exposed portion of the oxide semiconductor and the conductor.
    Type: Application
    Filed: October 6, 2016
    Publication date: April 13, 2017
    Inventors: Junichi KOEZUKA, Masami JINTYOU, Yukinori SHIMA, Yasuharu HOSAKA, Yasutaka NAKAZAWA, Takashi HAMOCHI, Takahiro SATO, Shunpei YAMAZAKI
  • Publication number: 20170104091
    Abstract: A nitride semiconductor device includes: a first nitride semiconductor layer serving as an electron transit layer; a second nitride semiconductor layer formed on the first nitride semiconductor layer, the second nitride semiconductor layer having a band gap greater than that of the first nitride semiconductor layer and serving as an electron supply layer; a third nitride semiconductor layer formed on the second nitride semiconductor layer, the third nitride semiconductor layer having a band gap greater than that of the first nitride semiconductor layer and smaller than that of the second nitride semiconductor layer; and a gate part formed on the third nitride semiconductor layer, wherein the gate part has a fourth nitride semiconductor layer formed on the third nitride semiconductor layer and includes an acceptor type impurity, and a gate electrode formed on the fourth nitride semiconductor layer.
    Type: Application
    Filed: September 22, 2016
    Publication date: April 13, 2017
    Applicant: ROHM CO., LTD.
    Inventor: Taketoshi TANAKA
  • Publication number: 20170104092
    Abstract: A nitride semiconductor device includes: an electron transit layer formed of GaN; an electron supply layer formed on the electron transit layer and to which tensile strain is applied by the electron transit layer, the electron supply layer being formed as an AlxInyGa1-x-yN layer where 0.8?x?1.0 and 0?x+y?1; a passivation film formed on the electron supply layer and formed of SiN, the passivation film having an opening part extending to the electron supply layer; a gate electrode formed on the electron supply layer through a gate insulating film formed within the opening part; and a source electrode and a drain electrode disposed away from the gate electrode to have the gate electrode interposed therebetween, the source electrode and the drain electrode being electrically connected to the electron supply layer. A film thickness of the passivation film is 10 nm or greater.
    Type: Application
    Filed: October 5, 2016
    Publication date: April 13, 2017
    Applicant: ROHM CO., LTD.
    Inventors: Taketoshi TANAKA, Norikazu ITO
  • Publication number: 20170104093
    Abstract: A nitride semiconductor device includes: an electron transit layer including GaxIn1-xN (0<x?1); an electron supply layer formed on the electron transit layer and including AlyIn1-yN (0<y?1); a gate insulating film formed to pass through the electron supply layer to contact the electron transit layer; and a gate electrode facing the electron transit layer with the gate insulating film interposed therebetween, wherein, in the electron transit layer, a portion contacting the gate insulating film and a portion contacting the electron transit layer are flush with each other.
    Type: Application
    Filed: October 6, 2016
    Publication date: April 13, 2017
    Applicant: ROHM CO., LTD.
    Inventors: Shinya TAKADO, Minoru AKUTSU, Taketoshi TANAKA, Norikazu ITO
  • Publication number: 20170104094
    Abstract: III-N transistors with recessed gates. An epitaxial stack includes a doped III-N source/drain layer and a III-N etch stop layer disposed between a the source/drain layer and a III-N channel layer. An etch process, e.g., utilizing photochemical oxidation, selectively etches the source/drain layer over the etch stop layer. A gate electrode is disposed over the etch stop layer to form a recessed-gate III-N HEMT. At least a portion of the etch stop layer may be oxidized with a gate electrode over the oxidized etch stop layer for a recessed gate III-N MOS-HEMT including a III-N oxide. A high-k dielectric may be formed over the oxidized etch stop layer with a gate electrode over the high-k dielectric to form a recessed gate III-N MOS-HEMT having a composite gate dielectric stack.
    Type: Application
    Filed: December 22, 2016
    Publication date: April 13, 2017
    Inventors: Han Wui Then, Marko Radosavljevic, Uday Shah, Niloy Mukherjee, Ravi Pillarisetty, Benjamin Chu-Kung, Jack T. Kavalieros, Robert S. Chau
  • Publication number: 20170104095
    Abstract: A VDMOS includes a substrate; an epitaxial layer; first and second trenches defined in the epitaxial layer; a shielding gate and a control gate formed in the trenches; a body region formed at the epitaxial layer and between the first and second trenches; a N+ source region formed at the body region; a distinct doping region formed in the epitaxial layer underneath the body region, extending towards bottoms of the trenches; a channel defined between the N+ source region and epitaxial layer adjacent to the trenches; an insulating layer defining a contact hole extending into the body region and the first trench; a P+ body pickup region formed in the body region corresponding to the contact hole; and a metal layer haying a butting contact filled in the contact hole, connecting the N+ source region, P+ body pickup region, and control gate and/or shielding gate in the first trench.
    Type: Application
    Filed: June 13, 2016
    Publication date: April 13, 2017
    Inventors: Mau Lam Lai, Yeuk Yin MONG, Duc Quang CHAU
  • Publication number: 20170104096
    Abstract: First polysilicon (poly-1) is deposited into deep trenches that have been formed in a substrate. A first polysilicon polishing process is performed to planarize the exposed surfaces of the poly-1 so that the surfaces are flush with adjacent surfaces. Then, shallow trenches are formed in the substrate between the deep trenches, and second polysilicon (poly-2) is deposited into the shallow trenches. A second polysilicon polishing process is performed to planarize the exposed surface of the poly-2 so that the surface is flush with adjacent surfaces. Metal contacts to the poly-1 and the poly-2 are then formed.
    Type: Application
    Filed: December 21, 2016
    Publication date: April 13, 2017
    Inventors: Kyle Terrill, Yuming Bai, Deva Pattanayak, Zhiyun Luo
  • Publication number: 20170104097
    Abstract: A high voltage integrated device includes a source region and a drain region disposed in a semiconductor layer and spaced apart from each other, a drift region disposed in the semiconductor layer and surrounding the drain region, a channel region defined in the semiconductor layer and between the source region and the drift region, a trench insulation field plate disposed in the drift region, a recessed region provided in the trench isolation field plate, a metal field plate disposed over the trench insulation field plate, and filling the recessed region, a gate insulation layer provided over the channel region and extending over the drift region and over the trench insulation field plate, and a gate electrode disposed over the gate insulation layer.
    Type: Application
    Filed: February 5, 2016
    Publication date: April 13, 2017
    Inventor: Sung Kun PARK
  • Publication number: 20170104098
    Abstract: A semiconductor device includes a first semiconductor layer of a first conductivity type formed on one side of a semiconductor substrate; a second semiconductor layer of a second conductivity type formed on the first semiconductor layer; a third semiconductor layer of the first conductivity type formed on the second semiconductor layer; an opening part formed by removing part of the first to third semiconductor layers; a gate insulating film formed so as to cover an inner wall of the opening part; a gate electrode formed inside the opening part via the gate insulating film; a source electrode formed on a surface of the third semiconductor layer; a drain electrode connected to a part corresponding to the gate electrode on another side of the semiconductor substrate; and a fourth electrode formed on the another side of the semiconductor substrate at a part corresponding to the source electrode.
    Type: Application
    Filed: December 21, 2016
    Publication date: April 13, 2017
    Applicant: FUJITSU LIMITED
    Inventors: Toshihiro OHKI, Masato NISHIMORI, Tadahiro IMADA
  • Publication number: 20170104099
    Abstract: A gate insulating film and a gate electrode of non-single crystalline silicon for forming an nMOS transistor are provided on a silicon substrate. Using the gate electrode as a mask, n-type dopants having a relatively large mass number (70 or more) such as As ions or Sb ions are implanted, to form a source/drain region of the nMOS transistor, whereby the gate electrode is amorphized. Subsequently, a silicon oxide film is provided to cover the gate electrode, at a temperature which is less than the one at which recrystallization of the gate electrode occurs. Thereafter, thermal processing is performed at a temperature of about 1000° C., whereby high compressive residual stress is exerted on the gate electrode, and high tensile stress is applied to a channel region under the gate electrode. As a result, carrier mobility of the nMOS transistor is enhanced.
    Type: Application
    Filed: December 19, 2016
    Publication date: April 13, 2017
    Applicant: Renesas Electronics Corporation
    Inventors: Hirokazu SAYAMA, Kazunobu OHTA, Hidekazu ODA, Kouhei SUGIHARA
  • Publication number: 20170104100
    Abstract: Various embodiments include methods and integrated circuit structures. In some cases, a method of forming an integrated circuit structure can include: forming a doped silicon layer over a substrate; forming a plurality of fin structures from the doped silicon layer; forming a plurality of gate structures over the plurality of fin structures, each of the plurality of gate structures separated from a neighboring gate structure by a first pitch; forming a mask over the plurality of gate structures, exposing at least one of the plurality of gate structures; removing the at least one of the plurality of gate structures, wherein two of the remaining gate structures after the removing are separated by a second pitch larger than the first pitch; and forming an epitaxial region over the substrate between the two of the remaining gate structures.
    Type: Application
    Filed: October 9, 2015
    Publication date: April 13, 2017
    Inventors: Emre Alptekin, Lars W. Liebmann, Injo Ok, Balasubramanian Pranatharthiharan, Ravikumar Ramachandran, Soon-Cheon Seo, Charan V.V.S. Surisetty, Mickey H. Yu
  • Publication number: 20170104101
    Abstract: A semiconductor device includes a semiconductor substrate having a channel region interposed between a first active region and a second active region, and a gate structure formed on the channel region. A first dual-layer source/drain region is on the first active region and a second dual-layer source/drain region is on the second active region. The first and second dual-layer source/drain regions include stacked layers formed of different semiconductor materials. A first extension region is embedded in the first active region and a second extension region is embedded in the second active region.
    Type: Application
    Filed: October 12, 2015
    Publication date: April 13, 2017
    Inventors: Kangguo Cheng, Robert H. Dennard, Zhen Zhang
  • Publication number: 20170104102
    Abstract: Embodiments of the present invention disclose a thin film transistor and an array substrate, manufacturing methods thereof, and a display device, which relate to the field of display technology, and can improve drifting of a threshold voltage of a thin film transistor and enhance the stability and reliability of an array substrate. The thin film transistor comprises an active layer and a gate insulating layer, wherein the material of the active layer is a metal oxide semiconductor, and during forming the thin film transistor, the gate insulating layer conveys oxygen to the active layer so as to reduce an interface state density and a movable impurity concentration of a. contact interface between the active layer and the gate insulating layer.
    Type: Application
    Filed: August 11, 2015
    Publication date: April 13, 2017
    Applicant: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Xiaodi LIU, Gang WANG
  • Publication number: 20170104103
    Abstract: Methods of fabricating a thin-film transistor are provided. The methods include forming a gate electrode above a substrate, a gate insulating layer above the gate electrode, a non-crystalline silicon layer above the gate insulating layer, and a channel protective layer above the non-crystalline silicon layer. The non-crystalline silicon layer and the channel protective layer are processed to form a projecting part. The projecting part has an upper layer composed of the channel protective layer and a lower layer composed of the non-crystalline silicon layer. The projecting part and portions of the non-crystalline silicon layer on sides of the projecting part are irradiated with a laser beam to crystallize at least the non-crystalline silicon layer in the projecting part. An absorptance of the non-crystalline silicon layer for the laser beam is greater in the projecting part than in the portions on the sides of the projecting part.
    Type: Application
    Filed: December 20, 2016
    Publication date: April 13, 2017
    Applicants: JOLED INC., PANASONIC LIQUID CRYSTAL DISPLAY CO., LTD
    Inventors: Hiroshi HAYASHI, Takahiro KAWASHIMA, Genshirou KAWACHI
  • Publication number: 20170104104
    Abstract: Disclosed are a field effect transistor and method for manufacturing the same, and a display device. The field effect transistor includes: a source and a drain which are spaced apart from each other; a semi-conductor layer arranged between the source and the drain; a first gate layer located on a side of the semi-conductor layer; and a second gate layer located on the other side of the semi-conductor layer. The field effect transistor provided by the present disclosure is less energy-consuming; a method for manufacturing the same is low costing; and a display device using the same is also less energy-consuming.
    Type: Application
    Filed: May 19, 2015
    Publication date: April 13, 2017
    Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
    Inventors: Hongyuan Xu, Hsiang Chih Hsiao, Chang I Su
  • Publication number: 20170104105
    Abstract: The present invention discloses an array substrate, a display panel and a display device. The array substrate includes a substrate, a gate line and a data line arranged on the substrate, and a thin film transistor arranged in an overlapping region where the gate line and the data line are overlapped; wherein an orthogonal projection of the thin film transistor on the substrate covers an orthogonal projection of the overlapping region of the gate line and the data line on the substrate. Because of design of a location of the thin film transistor according to the present invention, the opening ratio can be increased, the slightly rubbing region adjacent to the thin film transistor can be reduced; and, because of the closed channel region, levels at various positions of the thin film transistor can be uniform, and a bigger contact area provided for the supporting post, thereby increasing supporting ability of the supporting post and compressive property of the panel.
    Type: Application
    Filed: August 9, 2016
    Publication date: April 13, 2017
    Inventor: Juncai Ma
  • Publication number: 20170104106
    Abstract: A semiconductor device including field-effect transistors (finFETs) and fin capacitors are formed on a silicon substrate. The fin capacitors include silicon fins, one or more electrical conductors between the silicon fins, and insulating material between the silicon fins and the one or more electrical conductors. The fin capacitors may also include insulating material between the one or more electrical conductors and underlying semiconductor material.
    Type: Application
    Filed: December 22, 2016
    Publication date: April 13, 2017
    Inventor: Chung-Hui CHEN
  • Publication number: 20170104107
    Abstract: A solar cell structure is disclosed. The solar cell structure comprises a carrier having a front side and a P-N junction, a solar cell electrically coupled to the front side of the carrier, and an adhesive layer. The adhesive layer bonds the front side of the carrier to the solar cell. The adhesive layer includes conductive particles that electrically couple the carrier to the solar cell.
    Type: Application
    Filed: October 8, 2015
    Publication date: April 13, 2017
    Inventors: Eric M. Rehder, Xiaobo Zhang, Joseph C. Boisvert, Peichen Pien
  • Publication number: 20170104108
    Abstract: Methods for doping an absorbent layer of a p-n heterojunction in a thin film photovoltaic device are provided. The method can include depositing a window layer on a transparent substrate, where the window layer includes at least one dopant (e.g,. copper). A p-n heterojunction can be formed on the window layer, with the p-n heterojunction including a photovoltaic material (e.g., cadmium telluride) in an absorber layer. The dopant can then be diffused from the window layer into the absorber layer (e.g., via annealing).
    Type: Application
    Filed: December 20, 2016
    Publication date: April 13, 2017
    Applicant: First Solar, Inc.
    Inventors: Scott Daniel Feldman-Peabody, Robert Dwayne Gossman
  • Publication number: 20170104109
    Abstract: A semiconductor light receiving device includes a substrate, a semiconductor fine line waveguide provided on the substrate, and a light receiving circuit that is provided on the substrate and that absorbs light propagating through the semiconductor fine line waveguide. The light receiving circuit includes a p type first semiconductor layer, a number of second semiconductor mesa structures provided on the p type first semiconductor layer in such a manner that an n type second semiconductor layer is provided on top of an i type second semiconductor layer, a p side electrode connected to the p type first semiconductor layer in a location between the second semiconductor mesa structures, and an n side electrode connected to the n type second semiconductor layer. The refractive index and the optical absorption coefficient of the second semiconductor layers are greater than the refractive index and the optical absorption coefficient of the first semiconductor layer.
    Type: Application
    Filed: October 4, 2016
    Publication date: April 13, 2017
    Applicants: FUJITSU LIMITED, Photonics Electronics Technology Research Association
    Inventor: Takasi SIMOYAMA
  • Publication number: 20170104110
    Abstract: Described herein is a method of using the buffer layer of a transparent conductive substrate as a dopant source for the n-type window layer of a photovoltaic device. The dopant source of the buffer layer distributes to the window layer of the photovoltaic device during semiconductor processing. Described herein are also methods of manufacturing embodiments of the substrate structure and photovoltaic device. Disclosed embodiments also describe a photovoltaic module and a photovoltaic structure with a plurality of photovoltaic devices having an embodiment of the substrate structure.
    Type: Application
    Filed: December 19, 2016
    Publication date: April 13, 2017
    Inventor: Markus Gloeckler
  • Publication number: 20170104111
    Abstract: A method of forming a solar cell structure is provided, which includes forming a metal electrode on a substrate, forming an absorber layer on the metal electrode, and forming a buffer layer on the absorber layer. The method also forms a titanium oxide layer on the buffer layer, wherein a thickness of the titanium oxide layer is greater than 0 and less than 10 nm. The method further forms a transparent conductive oxide layer on the titanium oxide layer. The step of forming the titanium oxide layer is atomic layer deposition (ALD) performed at a temperature of 100° C. to 180° C. with a precursor of titanium tetraisopropoxide.
    Type: Application
    Filed: September 30, 2016
    Publication date: April 13, 2017
    Applicant: Industrial Technology Research Institute
    Inventors: Wei-Tse HSU, Sheng-Wen CHAN
  • Publication number: 20170104112
    Abstract: The present invention relates to a paste composition for forming a solar cell front electrode, a solar cell front electrode formed by using the composition, and a solar cell including the front electrode. Specifically, the paste composition includes conductive powder; an inorganic additive; and an organic vehicle, wherein the conductive powder is a metal powder including a mixture of silver (Ag) powder and aluminum (Al) powder, and the inorganic additive includes a lead (Pb)-zinc (Zn)-boron (B)-silicon (Si)-tungsten (W)-based glass frit.
    Type: Application
    Filed: October 10, 2016
    Publication date: April 13, 2017
    Inventors: JU YOUNG WON, BYUNG CHAN BAE, WOO MAN JUNG, HYUN SU JUNG, HYO SUNG JUNG
  • Publication number: 20170104113
    Abstract: A method for forming a back contact on an absorber layer in a photovoltaic device includes forming a two dimensional material on a first substrate. An absorber layer including Cu—Zn—Sn—S(Se) (CZTSSe) is grown over the first substrate on the two dimensional material. A buffer layer is grown on the absorber layer on a side opposite the two dimensional material. The absorber layer is exfoliated from the two dimensional material to remove the first substrate from a backside of the absorber layer opposite the buffer layer. A back contact is deposited on the absorber layer.
    Type: Application
    Filed: October 12, 2015
    Publication date: April 13, 2017
    Inventors: Richard A. Haight, James B. Hannon, Satoshi Oida
  • Publication number: 20170104114
    Abstract: A solar cell module includes a plurality of solar cells each including a semiconductor substrate and first electrodes and second electrodes extended on a back surface of the semiconductor substrate, first conductive lines connected to the first electrodes at crossings between the first electrodes and the first conductive lines through first conductive adhesive layers, second conductive lines connected to the second electrodes at crossings between the second electrodes and the second conductive lines through the first conductive adhesive layers, and an intercell connector extended between a first solar cell and a second solar cell that are adjacent to each other. The first conductive lines connected to the first solar cell and the second conductive lines connected to the second solar cell are commonly connected to the intercell connector.
    Type: Application
    Filed: October 7, 2016
    Publication date: April 13, 2017
    Applicant: LG ELECTRONICS INC.
    Inventors: Bojoong KIM, Minypo KIM, Daeseon HYUN, Hyunjung PARK, Ahreum LEE, Youshin HAN, Youngdo KIM
  • Publication number: 20170104115
    Abstract: A method for manufacturing a back-contact solar cell, comprising the steps of: (i) preparing a semiconductor substrate comprising an n-layer and a p-layer at the back side of the semiconductor substrate; (ii) applying a conductive paste on both the n-layer and the p-layer, wherein the conductive paste comprises a silver (Ag) powder, a palladium (Pd) powder, an additional metal powder selected from the group consisting of molybdenum (Mo), boron (B) and a mixture thereof, a glass frit, and an organic medium; and (iii) firing the applied conductive paste.
    Type: Application
    Filed: October 12, 2016
    Publication date: April 13, 2017
    Inventor: Isao Hayashi