Patents Issued in April 14, 2022
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Publication number: 20220115486Abstract: A display substrate includes: a base substrate including a display area and a peripheral area pixel units in the display area, each including a pixel drive circuit and a light emitting device the light emitting device including a first electrode, a second electrode, and a light emitting layer; a first power trace located in the peripheral area and electrically connected to the first electrode; a second power trace located in the peripheral area and electrically connected to the second electrode; a planarization layer with at least a portion thereof being located in the peripheral area. An orthographic projection of the planarization layer on the base substrate at least partially overlaps an orthographic projection of each of the first and second power traces on the base substrate, the first and second power traces are located in different layers, and a portion of the planarization layer is located between the first and second power traces.Type: ApplicationFiled: May 19, 2020Publication date: April 14, 2022Inventors: Zhidong Yuan, Dacheng Zhang, Yongqian Li, Lang Liu, Zhongyuan Wu, Can Yuan, Meng Li
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Publication number: 20220115487Abstract: A display substrate and a manufacturing method thereof, and a display device are provided. The display substrate includes a display region and a peripheral region. The display region includes an opening, and the peripheral region includes an opening peripheral region at least partially in the opening; the first conductive pattern is configured to transmit an electrical signal for the display region and includes first wire groups arranged side by side in a first direction, and each first wire group includes at least two first wires arranged side by side in the first direction; in a direction perpendicular to the base substrate, the first wire is insulated from the semiconductor pattern and the second conductive pattern, respectively; and the semiconductor pattern is electrically connected to the second conductive pattern through via holes in the opening peripheral region, and the via holes are between adjacent first wire groups in the first direction.Type: ApplicationFiled: May 13, 2020Publication date: April 14, 2022Applicants: Chengdu BOE Optoelectronics Technology Co., Ltd., BOE TECHNOLOGY GROUP CO., LTD.Inventors: Xiaoqing SHU, Mengmeng DU, Xiangdan DONG, Rong WANG
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Publication number: 20220115488Abstract: A display device may include a substrate including a display area and a non-display area surrounding at least a portion of the display area, a first organic insulating layer disposed on the substrate in the non-display area, a first conductive layer disposed on the first organic insulating layer and including first discharge holes, a second organic insulating layer disposed on the first conductive layer, and a transparent conductive layer disposed on the second organic insulating layer and including second discharge holes that respectively overlap the first discharge holes.Type: ApplicationFiled: May 13, 2021Publication date: April 14, 2022Inventors: Kwangsik Shin, Tae Wook Kim, Joohong Seo
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Publication number: 20220115489Abstract: A display device includes a first light emitting element in a first display area, a first pixel circuit in a first non-display area spaced from the first display area and connected to the first light emitting element, an insulating layer covering the first pixel circuit, a metal wiring on the insulating layer, connected to the first pixel circuit, and extending from the first non-display area to a second non-display area between the first display area and the first non-display area, and a transparent wiring on the insulating layer, connecting the first light emitting element and the metal wiring, and extending from the first display area to a surface of the metal wiring, where a trench is defined in a surface of the insulating layer in the second non-display area, and the metal wiring is in the trench in the second non-display area.Type: ApplicationFiled: June 24, 2021Publication date: April 14, 2022Inventors: GWUI-HYUN PARK, KOICHI SUGITANI, HYE IN KIM, CHULWON PARK, PIL SOON HONG
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Publication number: 20220115490Abstract: A display device includes an array substrate including a pixel array disposed in a display area, an encapsulation substrate, and a sealing member disposed between the array substrate and the encapsulation substrate to combine the array substrate with the encapsulation substrate. The array substrate includes a signal transfer wing overlapping the sealing member and electrically connected to the pixel array, an insulation layer covering the signal transfer wiring and including an inorganic material, a power transfer wiring disposed on the insulation layer, overlapping the sealing member and having a multi-wiring structure, and an expansion pattern connected to the power transfer wiring, having a thickness smaller than an entire thickness of the power transfer wiring and overlapping the sealing member and the signal transfer wiring. An outer edge of the expansion pattern is disposed within a sealing area where the sealing member is disposed.Type: ApplicationFiled: July 16, 2021Publication date: April 14, 2022Inventors: Sang-Ho MOON, Chungi YOU, Taejong EOM
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Publication number: 20220115491Abstract: A display apparatus includes: a substrate comprising a display area and a peripheral area outside the display area; a first insulating layer covering the peripheral area; a plurality of first pads on the first insulating layer in the peripheral area; a second insulating layer on the first insulating layer in the peripheral area, the second insulating layer having an opening exposing the plurality of first pads; and a first wiring comprising a 1-1st wiring and a 1-2nd wiring, wherein, in a plan view, the 1-1st wiring is under the first insulating layer to cross the opening of the second insulating layer in the peripheral area, the 1-2nd wiring is electrically connected to the 1-1st wiring outside the opening in the second insulating layer, and the 1-2nd wiring is between the first insulating layer and the second insulating layer.Type: ApplicationFiled: July 20, 2021Publication date: April 14, 2022Inventors: Changwon Jeong, Wonmi Hwang, Geurim Lee, Jaewon Cho
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Publication number: 20220115492Abstract: A display device includes an active pattern disposed on a substrate, a first transistor, a first scan line, a first power voltage line, a first electrode pattern and an organic light-emitting layer disposed on the substrate. The first transistor includes a first gate electrode disposed in a first overlapping area of the active pattern where the first gate electrode overlaps the active pattern. The first scan line is disposed adjacent to the first gate electrode. The first power voltage line includes a first electrode portion and a second electrode portion. The first electrode portion overlaps the first gate electrode. The second electrode portion extends from the first electrode portion in a direction crossing the first scan line and overlaps the first scan line.Type: ApplicationFiled: December 21, 2021Publication date: April 14, 2022Applicant: Samsung Display Co., LTD.Inventors: Yong Sung PARK, Wonjang KI, Dae-Hyun NOH, Minsu LEE, Seung Bin LEE
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Publication number: 20220115493Abstract: A display panel and a fabricating method thereof, and a displaying device. The display panel includes a substrate, a resistance reducing trace, an inter-layer-medium layer and a signal line. The substrate is divided into a plurality of sub-pixel regions and a pixel separating region. The resistance reducing trace is provided on the pixel separating region of the substrate. The inter-layer-medium layer is provided on the substrate, and the inter-layer-medium layer has an opening exposing the resistance reducing trace. The signal line is provided within the opening, the signal line is connected to the resistance reducing trace, the signal line is distributed in a column direction along the display panel, and in a row direction along the display panel, a width of the opening is greater than or equal to a width of the signal line.Type: ApplicationFiled: May 25, 2021Publication date: April 14, 2022Applicants: Hefei Xinsheng Optoelectronics Technology Co., Ltd., BOE Technology Group Co., Ltd.Inventors: Yongchao Huang, Can Yuan, Liusong Ni, Chao Wang, Jiawen Song, Zhiwen Luo, Jun Liu, Leilei Cheng, Qinghe Wang, Tao Sun
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Publication number: 20220115494Abstract: A display device includes: a plurality of pixels disposed in a display area; a plurality of first voltage lines electrically connected to the plurality of pixels, the plurality of first voltage lines including a plurality of first common voltage lines extending in a first direction and a plurality of second common voltage lines extending in a second direction intersecting the first direction; and a plurality of second voltage lines electrically connected to the pixels, the plurality of second voltage lines including a plurality of first driving voltage lines extending in the first direction and a plurality of second driving voltage lines extending in the second direction. The number of the first common voltage lines are greater than the number of the first driving voltage lines.Type: ApplicationFiled: June 29, 2021Publication date: April 14, 2022Inventors: HYUK KIM, YANG-HWA CHOI, JUNGHWAN HWANG
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Publication number: 20220115495Abstract: A tiled display includes: first and second display devices disposed adjacent to each other, the first and second display devices including display areas each having light-emitting areas, and a seam between adjacent ones of the display areas. Each of the first and second display devices includes: a first base part in the display areas, a first support layer on the first base part in the display areas and the seam, a display layer on the first support layer in the display areas and the seam, a second support layer on the display layer in the display areas and the seam, and a second base part on the second support layer in the display areas. The first support layer of the second display device is disposed on the second support layer of the first display device in the seam.Type: ApplicationFiled: September 2, 2021Publication date: April 14, 2022Inventors: Dong Hee SHIN, Byoung Sun NA, Yong Hee LEE
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Publication number: 20220115496Abstract: An integrated circuit device including a first electrode layer including a first metal and having a first thermal expansion coefficient; a dielectric layer on the first electrode layer, the dielectric layer including a second metal oxide including a second metal that is different from the first metal, and having a second thermal expansion coefficient that is less than the first thermal expansion coefficient; and a first stress buffer layer between the first electrode layer and the dielectric layer, the first stress buffer layer including a first metal oxide including the first metal, and being formed due to thermal stress of the first electrode layer and thermal stress of the dielectric layer.Type: ApplicationFiled: May 10, 2021Publication date: April 14, 2022Inventors: Jungmin PARK, Hanjin LIM, Haeryong KIM, Younglim PARK, Cheoljin CHO
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Publication number: 20220115497Abstract: An integrated circuit has an isolation capacitor structure that reduces the risk of breakdown from high electric fields at the edge of the top metal plate of the capacitor. The capacitor structure includes a bottom metal plate above a substrate. A first dielectric layer of a first dielectric material is formed between the bottom metal plate and the top metal plate. The capacitor structure also includes a thin narrow ring formed of a second dielectric material located under a portion of the top metal plate. The second dielectric material has a higher dielectric constant than the first dielectric material. The thin narrow ring follows the shape of the edge of the top metal plate with a portion of the ring underneath the top metal plate and a portion outside the edge of the top metal plate to thereby be located at a place of the maximum electric field.Type: ApplicationFiled: December 20, 2021Publication date: April 14, 2022Inventors: Dan B. Kasha, Russell Croman, Stefan N. Mastovich, Thomas C. Fowler
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Publication number: 20220115498Abstract: A device includes a substrate, and a first semiconductor channel over the substrate. The first semiconductor channel includes a first nanosheet of a first semiconductor material, a second nanosheet of a second semiconductor material in physical contact with a topside surface of the first nanosheet, and a third nanosheet of the second semiconductor material in physical contact with an underside surface of the first nanosheet. The first gate structure is over and laterally surrounding the first semiconductor channel, and in physical contact with the second nanosheet and the third nanosheet.Type: ApplicationFiled: October 14, 2020Publication date: April 14, 2022Inventors: Lung-Kun CHU, Mao-Lin HUANG, Chung-Wei HSU, Jia-Ni YU, Kuo-Cheng CHIANG, Kuan-Lun CHENG, Chih-Hao WANG
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Publication number: 20220115499Abstract: A device includes a thinned semiconductor substrate having a first side and a second side opposite to the first side; and at least one radio frequency device at the first side, wherein the second side of the thinned semiconductor substrate is processed to reduce leakage currents or to improve a radio frequency linearity of the at least one radio frequency device through Bosch etching.Type: ApplicationFiled: December 22, 2021Publication date: April 14, 2022Inventors: Hans Taddiken, Christian Butschkow, Andrea Cattaneo, Henning Feick, Dominik Heiss, Christoph Kadow, Uwe Seidel, Valentyn Solomko, Anton Steltenpohl
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Publication number: 20220115500Abstract: A semiconductor device including an insulating layer on a substrate; channel semiconductor patterns stacked on the insulating layer and vertically spaced apart from each other; a gate electrode crossing the channel semiconductor patterns; source/drain regions respectively at both sides of the gate electrode and connected to each other through the channel semiconductor patterns, the source/drain regions having concave bottom surfaces; and air gaps between the insulating layer and the bottom surfaces of the source/drain regions.Type: ApplicationFiled: December 23, 2021Publication date: April 14, 2022Inventors: Eunhye CHOI, Seung Mo KANG, Jungtaek KIM, Moon Seung YANG, Jongryeol YOO
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Publication number: 20220115501Abstract: A stacked high barrier III-V power semiconductor diode having an at least regionally formed first metallic terminal contact layer and a heavily doped semiconductor contact region of a first conductivity type with a first lattice constant, a drift layer of a second conductivity type, a heavily doped metamorphic buffer layer sequence of the second conductivity type is formed. The metamorphic buffer layer sequence has an upper side with the first lattice constant and a lower side with a second lattice constant. The first lattice constant is greater than the second lattice constant. The upper side of the metamorphic buffer layer sequence is arranged in the direction of the drift layer. A second metallic terminal contact layer is arranged below the lower side of the metamorphic buffer layer sequence. The second metallic terminal contact layer is integrally bonded with a semiconductor contact layer.Type: ApplicationFiled: December 22, 2021Publication date: April 14, 2022Applicant: AZUR SPACE Solar Power GmbHInventors: Daniel FUHRMANN, Gregor KELLER, Clemens WAECHTER
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Publication number: 20220115502Abstract: Fabrication method for a SiC integrated circuit which allows multiple power MOSFETs or LDMOSs to exist in the same piece of semiconductor substrate and still function as individual devices which form the components of a given circuit architecture, for example, and not by limitation, in a half-bridge module. In one example, a deep isolation trench is etched into the silicon carbide substrate surrounding each individual LDMOS device. The trench is filled with an insulating material. The depth of the trench may be deeper than the thickness of an epitaxial layer to ensure electrical isolation between the individual epitaxial layer regions housing the individual LDMOSs. The width of the trench may be selected to withstand the potential difference between the bias levels of the body regions of neighboring power LDMOS devices.Type: ApplicationFiled: November 23, 2021Publication date: April 14, 2022Applicant: CoolCAD Electronics, LLCInventors: Neil GOLDSMAN, Akin AKTURK, Zeynep DILLI, Mitchell Adrian GROSS, Usama KHALID, Christopher James DARMODY
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Publication number: 20220115503Abstract: Provided by the inventive concept are electronic devices, such as semiconductor devices, including p-type oxide materials having and selected for having improved hole mobilities, band gaps, and phase stability, and methods for fabricating electronic devices having such p-type oxide materials.Type: ApplicationFiled: October 12, 2020Publication date: April 14, 2022Inventors: Kyeongjae Cho, Yaoqiao Hu, Darrell Galen Schlom, Suman Datta
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Publication number: 20220115504Abstract: An integrated circuit device includes a substrate having an active area therein, a bit line on the substrate, and a direct contact, which extends between the active area and the bit line and electrically couples the bit line to a portion of the active area. A spacer structure is also provided, which extends on sidewalls of the bit line and on sidewalls of the direct contact. A field passivation layer is provided, which extends between the sidewalls of the direct contact and the spacer structure. The spacer structure and the field passivation layer may include different materials, and the field passivation layer may directly contact the sidewalls of the direct contact. The field passivation layer can include nonstoichiometric silicon oxide SiOx, where 0.04?x?0.4, and may have a thickness of less than about 25 ?.Type: ApplicationFiled: September 29, 2021Publication date: April 14, 2022Inventor: Joonyoung Choi
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Publication number: 20220115505Abstract: Methods of fabricating a first contact to a semiconductor device, which fundamentally comprises providing a semiconductor device formed on a substrate. The substrate further includes a conductive surface. A dielectric layer is formed over the substrate and has an opening exposing the conductive surface. The opening extends an entire length of the semiconductor device, partway down the entire length of the device, extending from the device onto adjacent field of the device, or and a combination thereof. A barrier layer is formed within the opening. A copper containing material fills the opening to form a first contact to the semiconductor device.Type: ApplicationFiled: December 21, 2021Publication date: April 14, 2022Inventors: Kelin J. KUHN, Kaizad MISTRY, Mark BOHR, Chris AUTH
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Publication number: 20220115506Abstract: A semiconductor device includes first and second isolation regions, a first active region extending in a first direction between the first and second isolation regions, a first fin pattern on the first active region, nanowires on the first fin pattern, a gate electrode in a second direction on the first fin pattern, the gate electrode surrounding the nanowires, a first source/drain region on a side of the gate electrode, the first source/drain region being on the first active region and in contact with the nanowires, and a first source/drain contact on the first source/drain region, the first source/drain contact including a first portion on a top surface of the first source/drain region, and a second portion extending toward the first active region along a sidewall of the first source/drain region, an end of the first source/drain contact being on one of the first and second isolation regions.Type: ApplicationFiled: June 1, 2021Publication date: April 14, 2022Inventors: Sang Hoon LEE, Chang Woo SOHN, Keun Hwi CHO, Sang Won BAEK
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Publication number: 20220115507Abstract: A semiconductor device and a manufacturing method thereof includes a source contact structure, a gate stack structure including a side region adjacent to the source contact structure, and a center region extending from the side region. The semiconductor device further includes a source gate pattern disposed under the side region of the first gate stack structure. The source gate pattern has an inclined surface facing the source contact structure. The semiconductor device also includes a channel pattern penetrating the center region of the gate stack structure, the channel pattern extending toward and contacting the source contact structure.Type: ApplicationFiled: December 20, 2021Publication date: April 14, 2022Applicant: SK hynix Inc.Inventor: Kang Sik CHOI
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Publication number: 20220115508Abstract: Methods for forming contacts to source/drain regions and gate electrodes in low- and high-voltage devices and devices formed by the same are disclosed. In an embodiment a device includes a first channel region in a substrate adjacent a first source/drain region; a first gate over the first channel region; a second channel region in the substrate adjacent a second source/drain region, a top surface of the second channel region being below a top surface of the first channel region; a second gate over the second channel region; an ILD over the first gate and the second gate; a first contact extending through the ILD and coupled to the first source/drain region; and a second contact extending through the ILD, coupled to the second source/drain region, and having a width greater a width of the first contact and a second height greater than a height of the first contact.Type: ApplicationFiled: January 11, 2021Publication date: April 14, 2022Inventors: Meng-Han Lin, Sai-Hooi Yeong, Chi On Chui
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Publication number: 20220115509Abstract: A semiconductor device and a forming method thereof are provided. The semiconductor device includes a substrate, a gate structure and a self-aligned contact structure. The substrate includes a source region and a drain region; the gate structure is formed on the substrate and are located between the source region and the drain region; and the self-aligned contact structure is formed on the substrate and includes a first contact structure, a second contact structure and a third contact structure sequentially connected in a direction perpendicular to the substrate, the first contact structure is in contact with the source region or the drain region, and a cross-sectional area of the second contact structure in a direction parallel to the substrate is greater than that of the first contact structure and that of the third contact structure in the direction parallel to the substrate.Type: ApplicationFiled: November 1, 2021Publication date: April 14, 2022Inventor: ChihCheng LIU
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Publication number: 20220115510Abstract: The present disclosure describes a method to form a backside power rail (BPR) semiconductor device with an air gap. The method includes forming a fin structure on a first side of a substrate, forming a source/drain (S/D) region adjacent to the fin structure, forming a first S/D contact structure on the first side of the substrate and in contact with the S/D region, and forming a capping structure on the first S/D contact structure. The method further includes removing a portion of the first S/D contact structure through the capping structure to form an air gap and forming a second S/D contact structure on a second side of the substrate and in contact with the S/D region. The second side is opposite to the first side.Type: ApplicationFiled: October 13, 2020Publication date: April 14, 2022Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Li-Zhen YU, Cheng-Chi Chuang, Chih-Hao Wang, Huan-Chieh Su, Lin-Yu Huang
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Publication number: 20220115511Abstract: A semiconductor device includes a substrate including a first region and a second region, a first silicon-germanium film which is conformally formed inside a surface of the substrate of the first region and defines a first gate trench, a first gate insulating film which extends on the first silicon-germanium film along a profile of the first gate trench and is in physical contact with the first silicon-germanium film, a first metallic gate electrode on the first gate insulating film, a source/drain region formed inside the substrate on both sides of the first metallic gate electrode, a second gate insulating film in the second region and a second metallic gate electrode on the second gate insulating film.Type: ApplicationFiled: June 1, 2021Publication date: April 14, 2022Inventors: Ho Kyun An, Su Min Cho
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Publication number: 20220115512Abstract: Abnormal generation of heat of a power MOSFET is detected to improve the reliability of a semiconductor device. As its means, in a power MOSFET having a drain electrode on the side of a back surface of a semiconductor substrate and a source pad on the side of a main surface of the semiconductor substrate, two gate pads electrically connected to a gate pad connected to a gate electrode of the power MOSFET are formed on the side of the main surface of the semiconductor substrate. Further, there is provided a voltmeter connected in parallel with each of two current paths which connect the two gate pads and a gate driver.Type: ApplicationFiled: October 17, 2019Publication date: April 14, 2022Inventors: Naoki Tega, Digh Hisamoto, Takeru Suto
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Publication number: 20220115513Abstract: A method for manufacturing a stacked gate-all-around nano-sheet CMOS device, including: providing a substrate with a fin structure, where a channel layer for an NMOS is a sacrificial layer for a PMOS, a channel layer for the PMOS is a sacrificial layer for the NMOS; and mobility of holes in the second material is greater than mobility of holes in the first material; forming a dummy gate stack extending across the fin structure; forming source-or-drain regions in the fin structure at two sides of the dummy gate stack; removing the dummy gate stack and the sacrificial layers covered by the dummy gate stack, to expose a surface of a part of the channel layer that is located between the source-or-drain regions, where a nano-sheet array is formed by the channel layer with the exposed surface; and forming a gate stack structure surrounding each nano sheet in the nano-sheet array.Type: ApplicationFiled: October 30, 2019Publication date: April 14, 2022Inventors: Huaxiang YIN, Tianchun YE, Qingzhu ZHANG, Jiaxin YAO
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Publication number: 20220115514Abstract: A semiconductor device including: an active pattern on a substrate, the active pattern including a recess, the recess having a “V” shape; a growth prevention pattern on the recess; gate structures on portions of the active pattern at opposite sides of the recess; channels spaced apart from each other in a vertical direction perpendicular to an upper surface of the substrate, each of the channels extending through one of the gate structures; and a source/drain layer on the growth prevention pattern, the source/drain layer contacting the channels.Type: ApplicationFiled: December 22, 2021Publication date: April 14, 2022Inventors: Sujin JUNG, Kihwan KIM, Sunguk JANG, Youngdae CHO
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Publication number: 20220115515Abstract: A semiconductor device includes a semiconductor layer over a substrate; a gate insulating film covering the semiconductor layer; a gate wiring including a gate electrode, which is provided over the gate insulating film and is formed by stacking a first conductive layer and a second conductive layer; an insulating film covering the semiconductor layer and the gate wiring including the gate electrode; and a source wiring including a source electrode, which is provided over the insulating film, is electrically connected to the semiconductor layer, and is formed by stacking a third conductive layer and a fourth conductive layer. The gate electrode is formed using the first conductive layer. The gate wiring is formed using the first conductive layer and the second conductive layer. The source electrode is formed using the third conductive layer. The source wiring is formed using the third conductive layer and the fourth conductive layer.Type: ApplicationFiled: December 23, 2021Publication date: April 14, 2022Inventor: Hajime KIMURA
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Publication number: 20220115516Abstract: Methods of forming and processing semiconductor devices are described. Certain embodiments related to electronic devices which comprise a dipole region having an interlayer dielectric, a high-? dielectric material, and a dipole layer. The dipole layer comprises one or more of titanium lanthanum nitride (TiLaN), titanium yttrium nitride (TiYN), titanium strontium nitride (TiSrN), titanium magnesium nitride (TiMgN, titanium aluminum nitride (TiAlN), titanium tantalum nitride (TiTaN), hafnium carbide (HfC), hafnium nitride (HfN), hafnium oxynitride (HfON), hafnium oxycarbide (HfOC), hafnium carbide aluminum (HfCAl), hafnium aluminum nitride (HfAlN), or hafnium carbonitride (HfCN).Type: ApplicationFiled: December 21, 2021Publication date: April 14, 2022Applicant: Applied Materials, Inc.Inventors: Yongjing Lin, Karla M. Bernal Ramos, Luping Li, Shih Chung Chen, Jacqueline S. Wrench, Yixiong Yang, Steven C.H. Hung, Srinivas Gandikota, Naomi Yoshida, Lin Dong
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Publication number: 20220115517Abstract: A method for fabricating a semiconductor device includes the steps of: forming a fin-shaped structure on a substrate, forming a gate material layer on the fin-shaped structure, performing an etching process to pattern the gate material layer for forming a gate structure and a silicon residue, performing an ashing process on the silicon residue, and then performing a cleaning process to transform the silicon residue into a polymer stop layer on a top surface and sidewalls of the fin-shaped structure.Type: ApplicationFiled: November 3, 2020Publication date: April 14, 2022Inventor: Chun-Hsien Lin
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Publication number: 20220115518Abstract: A memory device and a method for forming the same are provided. The method includes forming a plurality of gate structures on a substrate, forming a first spacer on opposite sides of the gate structures, filling a dielectric layer between adjacent first spacers, forming a metal silicide layer on the gate structures, conformally forming a spacer material layer over the metal silicide layer, the first spacer layer and the dielectric layer, and performing an etch back process on the spacer material layer to form a second spacer on opposite sides of the metal silicide layer.Type: ApplicationFiled: December 20, 2021Publication date: April 14, 2022Inventors: Yi-Tsung TSAI, Chia-Wei WU, Chih-Hao LIN, Chien-Chih LI
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Publication number: 20220115519Abstract: A method for manufacturing a semiconductor device includes forming a gate trench over a semiconductor fin, the gate trench including an upper portion and a lower portion. The method includes sequentially forming one or more work function layers, a capping layer, and a glue layer over the gate trench. The glue layer includes a first sub-layer and a second sub-layer that have respective different etching rates with respect to an etching solution. The method includes removing the second sub-layer while leaving a first portion of the first sub-layer filled in the lower portion of the gate trench.Type: ApplicationFiled: October 14, 2020Publication date: April 14, 2022Inventors: Jian-Jou Lian, Tzu Ang Chiang, Ming-Hsi Yeh, Chun-Neng Lin, Po-Yuan Wang, Chieh-Wei Chen
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Publication number: 20220115520Abstract: A high electron mobility transistor (HEMT) is disclosed. The HEMT includes a substrate, a first epitaxial layer disposed on the substrate, a second epitaxial layer disposed on the first epitaxial layer, a third epitaxial layer disposed on the second epitaxial layer, and a gate disposed on the third epitaxial layer. An upper portion of the first epitaxial layer has a plurality of first recesses. The second epitaxial layer partially fills the first recesses and surrounding a plurality of first air slits in the first recesses.Type: ApplicationFiled: November 9, 2020Publication date: April 14, 2022Inventors: Jian-Feng Li, Chia-Hua Chang, Hsiang-Chieh Yen
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Publication number: 20220115521Abstract: The present disclosure describes method to form a semiconductor device having a gate dielectric layer with controlled doping and to form multiple devices with different Vt. The method includes forming a gate dielectric layer on a fin structure, forming a buffer layer on the gate dielectric layer, and forming a dopant source layer including a dopant on the buffer layer. The gate dielectric layer includes an interfacial layer on the fin structure and a high-k dielectric layer on the interfacial layer. The method further includes doping a portion of the high-k dielectric layer adjacent to the interfacial layer with the dopant, removing the dopant source layer and the buffer layer, forming a dopant pulling layer on the gate dielectric layer, and tuning the dopant in the gate dielectric layer by the dopant pulling layer.Type: ApplicationFiled: October 14, 2020Publication date: April 14, 2022Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chandrashekhar Prakash SAVANT, Chia-Ming TSAI, Tien-Wei Yu
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Publication number: 20220115522Abstract: A semiconductor device includes: a drift layer of a first conduction type provided in a semiconductor substrate having a first principal plane and a second principal plane opposed to the first principal plane; a first semiconductor layer of a second conduction type provided between the first principal plane of the semiconductor substrate and the drift layer and having impurity concentration higher than impurity concentration of the drift layer; a first buffer layer of a first conduction type provided between the second principal plane of the semiconductor substrate and the drift layer and having hydrogen-induced donors with impurity concentration higher than impurity concentration of the drift layer; and a second semiconductor layer of a first conduction type or a second conduction type provided between the second principal plane of the semiconductor substrate and the first buffer layer and having impurity concentration higher than impurity concentration of the drift layer, wherein the first buffer layer inclType: ApplicationFiled: April 28, 2021Publication date: April 14, 2022Applicant: Mitsubishi Electric CorporationInventors: Kakeru OTSUKA, Hayato OKAMOTO, Katsumi NAKAMURA, Koji TANAKA, Koichi NISHI
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Publication number: 20220115523Abstract: According to an aspect of the present inventive concept there is provided a field-effect transistor and a method for controlling such. The transistor comprises: a semiconductor layer; a source terminal, a drain terminal and a single gate. The source and drain terminals are arranged on a first side of the semiconductor layer and the gate is arranged on a second side of the semiconductor layer opposite the first side. The gate and the source terminal are arranged to overlap with a first common region of the semiconductor layer and the gate and the drain terminal are arranged to overlap with a second common region of the semiconductor layer. The semiconductor layer further comprises a first gap region and a second gap region which the gate does not overlap. The gate is configured to induce an electrostatic doping of the first and second common regions and induce a channel in a channel region of the semiconductor layer, extending between the first and second common regions.Type: ApplicationFiled: October 7, 2021Publication date: April 14, 2022Inventor: Aryan AFZALIAN
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Publication number: 20220115524Abstract: Techniques, a system, and architecture are disclosed for top side transistor heat dissipation. The heat dissipation is done through single crystal epitaxially grown layer such as AlN. The architecture may include a back side heat sink to increase thermal dissipation as well. The architecture may further include a pseudomorphic channel layer that is lattice matched to the substrate.Type: ApplicationFiled: October 12, 2020Publication date: April 14, 2022Applicant: BAE Systems Information and Electronic Integration Inc.Inventor: Gregg H. Jessen
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Publication number: 20220115525Abstract: A semiconductor structure, comprising: a semiconductor substrate, a heterojunction, an in-situ insulating layer and a transition layer, which are arranged in sequence from bottom to top; a groove, passing through the in-situ insulating layer and the transition layer; and a P-type semiconductor layer, disposed in the groove and in a gate region on the transition layer, wherein the P-type semiconductor layer does not fully fill the groove. A method of manufacturing semiconductor structure is further disclosed.Type: ApplicationFiled: November 26, 2019Publication date: April 14, 2022Inventor: Kai CHENG
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Publication number: 20220115526Abstract: A semiconductor device and a method for manufacturing the same are provided in this disclosure. The semiconductor device includes a semiconductor heterostructure layer. The semiconductor heterostructure layer includes alternating first semiconductor material layers and second semiconductor material layers. Two-dimensional electron gas (2DEG) may be generated between each first semiconductor material layer and adjacent second semiconductor material layer. A conductive structure, including a plurality of conductive fingers extends from a surface of the semiconductor heterostructure layer into the semiconductor heterostructure layer. The plurality of conductive fingers are arranged in a direction substantially parallel to the surface. The lengths of the plurality of conductive fingers progressively increase in that direction so that an end portion of each conductive finger is respectively positioned in a different second semiconductor material layer and is not in contact with the 2DEG.Type: ApplicationFiled: April 22, 2020Publication date: April 14, 2022Inventors: Anbang ZHANG, King Yuen WONG, Hao LI, Haoning ZHENG, Jian WANG
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Publication number: 20220115527Abstract: A semiconductor device and a method for manufacturing the same are provided in this disclosure. The semiconductor device includes a semiconductor heterostructure layer. The semiconductor heterostructure layer includes alternating first semiconductor material layers and second semiconductor material layers. Two-dimensional hole gas (2DHG) may be generated between each first semiconductor material layer and adjacent second semiconductor material layer. A conductive structure, including a plurality of conductive fingers extends from a surface of the semiconductor heterostructure layer into the semiconductor heterostructure layer. The plurality of conductive fingers are arranged in a direction substantially parallel to the surface. The lengths of the plurality of conductive fingers progressively increase in that direction so that an end portion of each conductive finger is respectively positioned in a different first semiconductor material layer and is in contact with the 2DHG.Type: ApplicationFiled: April 22, 2020Publication date: April 14, 2022Inventors: Anbang ZHANG, King Yuen WONG, Hao LI, Haoning ZHENG, Jian WANG
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Publication number: 20220115528Abstract: A transistor device including a layer of AlGaN extending between a source and drain of the device; a GaN channel layer extending under the AlGaN layer; a gate stack including a layer of p-doped gallium nitride; and a layer of p-doped InGaN of at least 5 nm in thickness positioned between the AlGaN layer and the p-doped gallium nitride layer, the InGaN layer having a length greater than a length of the gate stack.Type: ApplicationFiled: October 7, 2021Publication date: April 14, 2022Applicant: Commissariat à l'Énergie Atomique et aux Énergies AlternativesInventor: Gökhan Atmaca
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Publication number: 20220115529Abstract: According to one embodiment, a semiconductor device includes first to third electrodes, first and second semiconductor layers, a nitride layer, and an oxide layer. A direction from the second electrode toward the first electrode is aligned with a first direction. A position in the first direction of the third electrode is between the first electrode and the second electrode in the first direction. The first semiconductor layer includes first to fifth partial regions. The first partial region is between the fourth and third partial regions in the first direction. The second partial region is between the third and fifth partial regions in the first direction. The nitride layer includes first and second nitride regions. The second semiconductor layer includes first and second semiconductor regions. The oxide layer includes silicon and oxygen. The oxide layer includes first to third oxide regions.Type: ApplicationFiled: December 22, 2021Publication date: April 14, 2022Applicants: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATIONInventors: Yosuke Kajiwara, Daimotsu Kato, Masahiko Kuraguchi
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Publication number: 20220115530Abstract: A semiconductor device according to the present disclosure includes a dielectric fin having a helmet layer, a gate structure disposed over a first portion of the helmet layer and extending along a direction, and a dielectric layer adjacent the gate structure and disposed over a second portion of the helmet layer. A width of the first portion along the direction is greater than a width of the second portion along the direction.Type: ApplicationFiled: October 13, 2020Publication date: April 14, 2022Inventors: Yu-Shan Lu, Chung-I Yang, Kuo-Yi Chao, Wen-Hsing Hsieh, Jiun-Ming Kuo, Chih-Ching Wang, Yuan-Ching Peng
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Publication number: 20220115531Abstract: A semiconductor device may include first and second channel patterns on a substrate, first and second source/drain patterns in contact respectively with the first and second channel patterns, and first and second gate electrodes respectively overlapping the first and second channel patterns. The first gate electrode may include a first segment between first and second semiconductor patterns of the first channel pattern. The first segment may include a first convex portion protruding toward the first source/drain pattern. The second gate electrode may include a second segment between third and fourth semiconductor patterns of the second channel pattern. The second segment may include a concave portion recessed toward a center of the second segment.Type: ApplicationFiled: December 20, 2021Publication date: April 14, 2022Inventors: SOOJIN JEONG, Dong IL BAE, Geumjong Bae, Seungmin Song, Junggil Yang
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Publication number: 20220115532Abstract: A power semiconductor device includes a substrate; drain metal; a drift region; a base region; a gate structure; a first conductive type doped region contacting the base region on the side of the base region distant from the gate structure; a source region provided in the base region and between the first conductive type doped region and the gate structure; contact metal that is provided on the first conductive type doped region and forms a contact barrier having rectifying characteristics together with the first conductive type doped region below; and source metal wrapping the contact metal and contacting the source region.Type: ApplicationFiled: December 23, 2019Publication date: April 14, 2022Inventors: Weifeng SUN, Rongcheng LOU, Kui XIAO, Feng LIN, Jiaxing WEI, Sheng LI, Siyang LIU, Shengli LU, Longxing SHI
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Publication number: 20220115533Abstract: According to one embodiment, a semiconductor device includes first to third electrodes, a conductive member, a semiconductor member, and an insulating member. The second electrode includes a conductive portion. The conductive portion is between the third electrode and the conductive member. The conductive member is electrically connected with the second electrode. The semiconductor member includes first to third semiconductor regions. The second semiconductor region is between the third semiconductor region and a portion of the first semiconductor region. The second semiconductor region is between the third electrode and the conductive member. The conductive portion is electrically connected with the second and third semiconductor regions. The first electrode is electrically connected with the first semiconductor region. At least a portion of the first insulating member is between the semiconductor member and the third electrode and between the semiconductor member and the first conductive member.Type: ApplicationFiled: August 5, 2021Publication date: April 14, 2022Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Hiro GANGI, Tomoaki INOKUCHI, Yusuke KOBAYASHI, Hiroki NEMOTO
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Publication number: 20220115534Abstract: A semiconductor device includes a first semiconductor region having a first conductivity type and a second semiconductor region having a second conductivity type, a source region and a body contact region in the second semiconductor region. The semiconductor device also includes a channel region, in the second semiconductor region, located laterally between the source region and the first semiconductor region, a gate dielectric layer overlying both the channel region and a portion of the first semiconductor region, and a gate electrode overlying the gate dielectric layer. The semiconductor device further includes a conformal conductive layer covering an upper surface of the body contact region and a side surface of the source region.Type: ApplicationFiled: February 2, 2021Publication date: April 14, 2022Inventor: Zheng Long CHEN
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Publication number: 20220115535Abstract: Provided is a monolithic metal-insulator transition device. The monolithic metal-insulator transition device includes a substrate including a driving region and a switching region, first and second source/drain regions on the driving region, a gate electrode between the first and second source/drain regions, an inlet well region formed adjacent to an upper surface of the substrate on the switching region, a control well region having a different conductivity type from the inlet well region between the inlet well region and a lower surface of the substrate, a first wiring electrically connecting the first source/drain region and the control well region, and a second wiring electrically connecting the second source/drain region and the inlet well region.Type: ApplicationFiled: October 12, 2021Publication date: April 14, 2022Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUITEInventors: Tae Moon ROH, Hyun-Tak KIM, Sun Ae KIM