Rotating Work Patents (Class 118/320)
  • Patent number: 7628859
    Abstract: A mounting assembly for a stent and a method of coating a stent using the assembly are provided.
    Type: Grant
    Filed: December 27, 2002
    Date of Patent: December 8, 2009
    Assignee: Advanced Cardiovascular Systems, Inc.
    Inventors: Syed F. A. Hossainy, Charles Snyder, Anh Tran, Arthur J. Wen
  • Patent number: 7615117
    Abstract: There is provided a coating and processing apparatus including a spin chuck horizontally holding a quadrangular substrate and rotating the substrate in a horizontal plane, a coating solution nozzle for supplying a coating solution to a front surface of the substrate horizontally held by the spin chuck, and a solvent supply mechanism provided in the spin chuck for supplying a solvent to a back surface of the substrate, in which the solvent supplied to the back surface of the substrate is allowed to reach the back surface and side surface of each of corners of the substrate by centrifugal force, thereby removing the coating solution attached.
    Type: Grant
    Filed: March 9, 2004
    Date of Patent: November 10, 2009
    Assignee: Tokyo Electron Limited
    Inventors: Shinji Kobayashi, Tetsushi Miyamoto, Masahito Hamada, Masatoshi Kaneda
  • Patent number: 7611581
    Abstract: A coating apparatus is provided in which a coating liquid supplied onto a surface of a substrate such as a semiconductor wafer and a glass substrate can be easily leveled so as to have a uniform thickness without any edge bead. The coating apparatus comprises a tray, a nozzle for supplying a coating liquid, and a squeegee which serves as an applicator for spreading a coating liquid. The tray has a recessed portion into which a substrate is placed, and a spinner chuck is provided in the recessed portion. In the spinner chuck, a chuck for attracting the substrate is attached to the upper end of a spinner shaft which can be lifted and lowered, and the upper surface of the chuck and the bottom surface of the recessed portion are arranged to be in the same plane in a state where the spinner shaft is lowered to the lowest position.
    Type: Grant
    Filed: November 29, 2005
    Date of Patent: November 3, 2009
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Seiji Ohishi, Akihiko Nakamura
  • Publication number: 20090269481
    Abstract: The invention relates to systems and methods for applying coatings to devices. In an embodiment, the invention includes a coating apparatus including a mandrel having a lengthwise axis and an exterior surface, the exterior surface of the mandrel defining a plurality of channels disposed parallel to the lengthwise axis, the mandrel configured to rotate around the lengthwise axis; and a spray head configured to direct a stream of material at the mandrel. In an embodiment the invention includes a method of applying a coating to a medical device. Other embodiments are also included herein.
    Type: Application
    Filed: April 24, 2008
    Publication date: October 29, 2009
    Inventors: Ralph A. Chappa, James H. Arps
  • Patent number: 7604699
    Abstract: A nozzle for use in a coating apparatus for the application of a coating substance to a stent is provided.
    Type: Grant
    Filed: January 18, 2008
    Date of Patent: October 20, 2009
    Assignee: Advanced Cardiovascular Systems, Inc.
    Inventors: Yung-Ming Chen, Stephen James Guittard, Joe Broeckert
  • Patent number: 7604832
    Abstract: There is disclosed a film forming method comprising continuously discharging a solution adjusted so as to spread over a substrate by a given amount to the substrate through a discharge port disposed in a nozzle, moving the nozzle and substrate with respect to each other, and holding the supplied solution onto the substrate to form a liquid film, wherein a distance h between the discharge port of the nozzle and the substrate is set to be not less than 2 mm and to be in a range less than 5×10?5 q? (mm) given with respect to a surface tension ? (N/m) of the solution, discharge speed q (m/sec) of the solution continuously discharged through the discharge port, and a constant of 5×10?5 (m·sec/N).
    Type: Grant
    Filed: August 27, 2004
    Date of Patent: October 20, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Shinichi Ito, Tatsuhiko Ema, Kei Hayasaki, Rempei Nakata, Nobuhide Yamada, Katsuya Okumura
  • Publication number: 20090255464
    Abstract: A device for applying active substances to surfaces of medical implants (11) has a base station (22) and a replaceable cartridge (10) that can be mounted on the base station, the cartridge (10) having a holder for the implants (11) and also a nozzle for spraying the active substance onto the surface. The base station (22) has a drive unit (75) for moving the holder and the nozzle in relation to each other. For this purpose, the cartridge (10) has a basically cylindrical first housing part (14) which has the holder and a basically cylindrical second housing part (15) which has the nozzle. The first and second housing parts (14, 15) are formed so that they fit into each other and are arranged so that they can be moved, and preferably rotated, relative to each other (FIG. 8).
    Type: Application
    Filed: April 7, 2009
    Publication date: October 15, 2009
    Inventors: Gerd EISOLD, Klaus EPPLE, Lars SUNNANVAEDER, Boris BEHNISCH
  • Publication number: 20090258151
    Abstract: A coating apparatus includes support structure supporting a workpiece support member for rotation about an axis, and a drive structure for rotating the support member. A source is spaced along an imaginary line from the support structure, and emits a plume of coating material that flows away from the source toward the support structure. The axis extends at an angle with respect to an imaginary plane perpendicular to the imaginary line. According to a different aspect, a coating method includes rotating a workpiece support member about an axis, and emitting a plume of coating material from a source that is spaced along an imaginary line from the support structure, the plume flowing away from the source toward the support structure. The axis extends at an angle to an imaginary plane that is perpendicular to the imaginary line.
    Type: Application
    Filed: April 10, 2008
    Publication date: October 15, 2009
    Applicant: RAYTHEON COMPANY
    Inventors: Daniel B. Mitchell, Geoffrey G. Harris, Douglas J. Brown
  • Publication number: 20090226624
    Abstract: A substrate-processing apparatus includes a sample table which mounts thereon a to-be-processed substrate, a first line which supplies a chemical solution, a second line which supplies a cleaning liquid, a three-way valve connected to the first and second lines and configured to select one of the first and second lines, a filter provided across the first line upstream of the three-way valve, and configured to eliminate a foreign material from the chemical solution, and a nozzle provided downstream of the three-way valve and configured to discharge the chemical solution or the cleaning liquid when the first or second line is selected via the three-way valve. The three-way valve selects the first line when the substrate is coated with the chemical solution, and selects the second line in other cases.
    Type: Application
    Filed: May 15, 2009
    Publication date: September 10, 2009
    Inventors: Eishi Shiobara, Hirokazu Kato, Seiro Miyoshi, Shinichi Ito
  • Patent number: 7575634
    Abstract: The resist coating unit (COT) has a spin chuck (41) which holds the wafer to be supplied with a resist liquid, and a process cup (50) which accommodates the spin chuck (41) and exhaustes an atmosphere around the wafer W from a bottom thereof. The process cup (50) comprises a first cup (51) with an outer circumferential wall (61a), and an airflow control member (52) laid out close to the wafer W in the first cup (51) in such a manner as to surround the wafer W. The airflow control member (52) has a vertical cross section of an approximately rectangular shape defined by the upper ring portion (62a) having a cross section of an approximately triangular shape and protruding upward, and a lower ring portion (62b) having a cross section of an approximately triangular shape and protruding downward. An exhaust passage (55) for substantially exhausting the atmosphere around the wafer W is formed between the outer circumferential wall (61a) and the airflow control member (52).
    Type: Grant
    Filed: December 17, 2003
    Date of Patent: August 18, 2009
    Assignee: Tokyo Electron Limited
    Inventor: Hideo Shite
  • Publication number: 20090202727
    Abstract: A non-contact edge coating apparatus applies coating material to an edge of a non-circular solar cell substrate without physical contact. The apparatus may include a rotatable substrate support configured to hold the substrate. The apparatus may further include an applicator configured to receive a coating material and apply the coating material to an edge of the substrate while the substrate is rotated without any portion of the applicator physically touching the edge of the substrate. The substrate support may be mechanically coupled to a cam, which contacts a follower mechanically coupled to the applicator. A variety of coating materials may be employed with the apparatus including hot melt ink and UV curable plating resist.
    Type: Application
    Filed: February 7, 2008
    Publication date: August 13, 2009
    Inventors: Emmanuel Abas, Luca Pavani
  • Patent number: 7566365
    Abstract: In a liquid processing apparatus for forming a coating film on a polygonal substrate by spin coating in an ambient with a descending clean air flow, a spin chuck includes a support plate for substantially horizontally supporting the substrate thereon. Air flow control members are provided on the spin chuck such that the air flow control member being disposed adjacent to a periphery of the polygonal substrate supported on the spin chuck, wherein the air flow control member is not provided near corner portions of the substrate supported on the spin chuck. The liquid processing apparatus may includes an air flow regulation ring which is provided with an air inlet having an opening surrounding an outer periphery of the air flow control member, wherein the air inlet communicates with the exhaust unit.
    Type: Grant
    Filed: March 10, 2004
    Date of Patent: July 28, 2009
    Assignee: Tokyo Electron Limited
    Inventors: Shinji Kobayashi, Tetsushi Miyamoto, Masahito Hamada
  • Patent number: 7559991
    Abstract: A system for applying a coating to an engine valve and curing the coating using infrared radiation includes a spraying device, an infrared oven, and a movable track. A plurality of engine valves is transported through the system on the movable track. The spraying device applies a protective coating composition on a portion of the engine valves. The coating composition has a high emissivity value that allows the coating to be rapidly and efficiently cured as the coated engine valves travel through the infrared oven.
    Type: Grant
    Filed: July 19, 2006
    Date of Patent: July 14, 2009
    Assignee: High Performance Coatings, Inc.
    Inventors: David R. Burton, Jeffrey C. Holm, James M. Yates
  • Publication number: 20090162547
    Abstract: The invention is a coating apparatus including: a substrate-holding part that holds a substrate horizontally; a chemical nozzle that supplies a chemical to a central portion of the substrate horizontally held by the substrate-holding part; a rotation mechanism that causes the substrate-holding part to rotate in order to spread out the chemical on a surface of the substrate by a centrifugal force, for coating the whole surface with the chemical; a gas-flow-forming unit that forms a down flow of an atmospheric gas on the surface of the substrate horizontally held by the substrate-holding part; a gas-discharging unit that discharges an atmosphere around the substrate; and a gas nozzle that supplies a laminar-flow-forming gas to the surface of the substrate, the laminar-flow-forming gas having a coefficient of kinematic viscosity larger than that of the atmospheric gas; wherein the atmospheric gas or the laminar-flow-forming gas are supplied to the central portion of the substrate.
    Type: Application
    Filed: December 15, 2006
    Publication date: June 25, 2009
    Inventors: Ikuo Sawada, Kazuyoshi Matsuzaki, Takashi Tanaka, Mitsuaki Iwashita, Mizue Munakata
  • Patent number: 7549811
    Abstract: A forward direction-only path (first substrate transport path) is formed for transporting substrates in a forward direction to pass the substrates on to an exposing apparatus. A separate, substrate transport path (second substrate transport path) is formed exclusively for post-exposure bake (PEB). Substrate transport along each path is carried out independently of substrate transport along the other. A fourth main transport mechanism is interposed as a predetermined substrate transport mechanism between transfer points consisting of a buffer acting as a temporary storage module for temporarily storing the substrates and a post-exposure bake (PEB) unit corresponding to a predetermined treating unit. This arrangement forms the path for transporting the substrates between the buffer and the PEB unit, to allow PEB treatment of the substrates to be performed smoothly. Similarly, the substrates are transported smoothly to the buffer.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: June 23, 2009
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Yoshihisa Yamada, Masafumi Maeda, Takashi Taguchi
  • Publication number: 20090155449
    Abstract: Apparatus and methods are configured to coat a medical device, such as a stent, with a beneficial medicinal agent using one or more liquid feeds and one or more micromist nozzles. In one implementation, an agent coating rig includes a vertical adjustment means, a rotation means, and a traverse adjustment means for moving a medical device along virtually any point on an x or y axis. In additional or alternative implementations, the agent coating rig can further include a secondary horizontal adjustment means that allows adjustment along virtually any point on a z axis. Furthermore, methods and apparatus are provided for distributing the beneficial agent on the medical device, including delivering the beneficial agent efficiently over time.
    Type: Application
    Filed: December 18, 2007
    Publication date: June 18, 2009
    Applicant: ABBOTT LABORATORIES
    Inventors: Isaac Plans, David O'Neill, Matthew Coates, Javier P. Moreno
  • Patent number: 7547466
    Abstract: One aspect of the present invention relates to a spindle motor manufacturing method for forming an oil repellent film which prevents a lubricating oil from flowing out, on a predetermined area adjacent to a hydrodynamic bearing, the predetermined area being located on at least one of a stationary member and a rotating member. The spindle motor manufacturing method mentioned above comprises a step of supplying an oil repellent solution by a supplying portion onto a part of the predetermined area for forming the oil repellent film, a step of applying an air current to the part of the predetermined area on which the oil repellent solution is supplied so as to peel off an excess part of the oil repellent solution supplied onto the part of the predetermined area, and a step of making a relative movement of the predetermined area in which the oil repellent film is formed, the relative movement being made with respect to the supplying portion by which the oil repellent solution is supplied.
    Type: Grant
    Filed: March 24, 2004
    Date of Patent: June 16, 2009
    Assignee: Nidec Corporation
    Inventors: Isao Misu, Yuya Tamura
  • Patent number: 7534298
    Abstract: An apparatus and a method of controlling an electroless deposition process by directing electromagnetic radiation towards the surface of a substrate and detecting the change in intensity of the electromagnetic radiation at one or more wavelengths reflected off features on the surface of the substrate. In one embodiment the detected end of an electroless deposition process step is measured while the substrate is moved relative to the detection mechanism. In another embodiment multiple detection points are used to monitor the state of the deposition process across the surface of the substrate. In one embodiment the detection mechanism is immersed in the electroless deposition fluid on the substrate. In one embodiment a controller is used to monitor, store, and/or control the electroless deposition process by use of stored process values, comparison of data collected at different times, and various calculated time dependent data.
    Type: Grant
    Filed: September 17, 2004
    Date of Patent: May 19, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Arulkumar Shanmugasundram, Manoocher Birang, Ian A. Pancham, Sergey Lopatin
  • Patent number: 7531202
    Abstract: A nozzle for use in a coating apparatus for the application of a coating substance to a stent is provided.
    Type: Grant
    Filed: June 16, 2006
    Date of Patent: May 12, 2009
    Assignee: Advanced Cardiovascular Systems, Inc.
    Inventor: Mohammed E. Moein
  • Patent number: 7503978
    Abstract: As a substrate transportation robot transports an unprocessed substrate W to a substrate transfer position P1, inert gas ejected from a substrate floating head 71 toward the bottom surface of the substrate W floats up the unprocessed substrate W. Driven by an actuator 74, the substrate floating head 71 floating up the unprocessed substrate W then moves down. Upon arrival of the unprocessed substrate W at a substrate processing position P3, a bottom rim portion of the substrate W engages with support pins 3, and as the substrate floating head 71 further moves down, the unprocessed substrate W is transferred to and mounted on the support pins 3. The substrate W is thus positioned at the substrate processing position P3, whereby the bottom rim portion of the substrate W and an opposing surface 5b of a spin base 5 are positioned close to each other and opposed against each other.
    Type: Grant
    Filed: May 19, 2005
    Date of Patent: March 17, 2009
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Katsuhiko Miya, Eiji Fukatsu
  • Publication number: 20090061642
    Abstract: In a nozzle assembly for supplying processing solutions, the nozzle assembly includes a housing, a plurality of supply units arranged in the housing and through which different processing solutions flow onto the substrate, and a plurality of nozzles connected to the supply units, respectively, in such a configuration that a first nozzle selected from the nozzles is directed to the substrate and the remaining nozzles excluding the first nozzle are directed away from the substrate. Accordingly, the mechanical structure of the nozzle assembly may be simplified and the nozzles directed away from the substrate may be prevented from being contaminated by the processing solutions that are injected onto the substrate through the nozzle directed to the substrate.
    Type: Application
    Filed: August 28, 2008
    Publication date: March 5, 2009
    Inventor: Chong-Eui Ha
  • Patent number: 7497908
    Abstract: Film coating unit has a substrate holder for holding a wafer, a coating solution discharge nozzle, and anti-drying boards opposed to a surface of the wafer. The coating solution is applied to the surface of the wafer in a direction from a front end toward a rear end of the wafer while relatively moving the substrate holder with respect to the coating solution discharge nozzle. During that time, the anti-drying boards are disposed at height of maximum 2 mm from the surface of the wafer so as to form dense atmosphere of a solvent between the surface of the wafer and the anti-drying board. Thereby the coating solution on or over the surface of the wafer is restrained from being dried and a coating film is formed with even thickness on or over the surface of the wafer.
    Type: Grant
    Filed: June 23, 2004
    Date of Patent: March 3, 2009
    Assignees: Sanyo Electric Co., Ltd, Kabushiki Kaisha Toshiba
    Inventors: Tsuyoshi Mizuno, Yuuichi Mikata, Kimihide Saito
  • Publication number: 20090000544
    Abstract: The invention provides a rotatable and optionally heatable device for holding a flat substrate. The device comprises a supporting means for placing and holding the substrate on a supporting surface, optionally a heater, a means for rotating the supporting means and a means for applying a fluid, e.g. a solvent, onto the side of the substrate facing the supporting surface. The fluid is applied when the supporting device for supporting and holding the substrate is caused to rotate.
    Type: Application
    Filed: November 3, 2005
    Publication date: January 1, 2009
    Applicant: SÜSS MICRO TEC LITHOGRAPHY GMBH
    Inventors: Katrin Weilermann, Karl-Josef Kramer
  • Publication number: 20080311280
    Abstract: Various embodiments of methods and devices for coating stents are described herein.
    Type: Application
    Filed: June 15, 2007
    Publication date: December 18, 2008
    Inventors: David Rego, Kurt Kilchenmann, Sang joon Park, Mark Haight, Anthony S. Andreacchi, Yung-Ming Chen, Arnoldo M. Currlin, Antonio Garcia, Jason Van Sciver, Thomas David Esbeck, Bryan D. Glenn, Patrick A. Tuohy, Richard Baillargeon, Edward P. Garcia, Steven E. Lehner
  • Patent number: 7455882
    Abstract: A method of applying liquid adhesive to surfaces of components of an electrochemical cell employing a needle valve applicator. The liquid adhesive is applied by dispensing it through a tubular tip connected to a pneumatically actuated needle valve applicator. The method is effective in applying adhesive to narrow width or difficult to reach surfaces of cell components in a precise, consistent and reproducible manner. In a specific application the adhesive can be applied to the narrow recessed step surrounding the terminal portion of the cathode casing of a zinc/air button cell. In such application the cathode casing may typically be rotated at speeds of between about 50 and 1000 revolutions per minute as adhesive is applied thereto from the applicator. The adhesive provides a tight seal between the cathode casing and cathode assembly, thereby preventing leakage of electrolyte from the cell.
    Type: Grant
    Filed: September 13, 2004
    Date of Patent: November 25, 2008
    Assignee: The Gillette Company
    Inventors: Daniel W. Gibbons, Michael Brovarski, Leo White
  • Patent number: 7452568
    Abstract: The present disclosure relates generally to semiconductor, integrated circuits, and particularly, but not by way of limitation, to centrifugal methods of filling high-aspect ratio vias and trenches with powders, pastes, suspensions of materials to act as any of a conducting, structural support, or protective member of an electronic component.
    Type: Grant
    Filed: February 4, 2005
    Date of Patent: November 18, 2008
    Assignee: International Business Machines Corporation
    Inventors: Gareth Hougham, Leena Paivikki Buchwalter, Stephen L. Buchwalter, Jon Casey, Claudius Feger, Matteo Flotta, Jeffrey D. Gelorme, Kathleen C. Hinge, Anurag Jain, Sung K. Kang, John U. Knickerbocker
  • Publication number: 20080280054
    Abstract: A coating film forming apparatus that holds a substrate upon a spin chuck and forms a coating film by supplying a chemical liquid upon a top surface of said substrate comprises: an outer cup provided detachably to surround the spin chuck; an inner cup provided detachably to surround a region underneath the substrate held upon the chuck; a cleaning nozzle configured to supply a cleaning liquid for cleaning a peripheral edge part of the substrate, such that the cleaning liquid is supplied to a peripheral part of a bottom surface of the substrate; a cutout part for nozzle mounting, the cutout part being provided to the inner cup to engage with the cleaning nozzle; and a cleaning liquid supply tube connected to the cleaning nozzle, the cleaning nozzle being detachable to the cutout part in a state in which the cleaning liquid supply tube is connected.
    Type: Application
    Filed: April 21, 2008
    Publication date: November 13, 2008
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Nobuhiro OGATA, Hiroichi Inada, Taro Yamamoto, Akihiro Fujimoto
  • Publication number: 20080248207
    Abstract: A liquid resin-coating method in which a wafer (substrate) is concentrically held on a chuck table with a to-be-coated surface facing the upside. A slot die is arranged above and opposite to the wafer so that the slot of the slot die is allowed to correspond to the radius of the wafer. While the chuck table is rotated to bring the wafer into autorotation, resin is discharged from the slot to be coated on a to-be-coated surface of the wafer. The slot does not extend from the to-be-coated surface of the wafer, or if not so, the extension is extremely small. Thus, the amount of resin causing a loss is minimized.
    Type: Application
    Filed: March 19, 2008
    Publication date: October 9, 2008
    Applicant: DISCO CORPORATION
    Inventor: Kazuma Sekiya
  • Patent number: 7416609
    Abstract: A support assembly for a stent and a method of using the same to coat a stent are provided. The support assembly provides for minimum contact between the stent and the support assembly so as to reduce or eliminate coating defects.
    Type: Grant
    Filed: November 25, 2002
    Date of Patent: August 26, 2008
    Assignee: Advanced Cardiovascular Systems, Inc.
    Inventors: Domingo S Madriaga, Anh Tran, Arthur J Wen
  • Publication number: 20080175980
    Abstract: Methods for coating medical devices for implantation within a body vessel are provided comprising providing a cylindrical container, placing a medical device inside the cylindrical container, and applying a polymer in liquid form inside the container.
    Type: Application
    Filed: October 23, 2007
    Publication date: July 24, 2008
    Inventor: Jichao Sun
  • Patent number: 7399362
    Abstract: An installation for powder coating articles, in particular vehicle bodies, comprises a coating booth, in which a plurality of application devices for the powder coating may be arranged. The articles to be coated are located during the coating process on a rotating rotary stand. Application devices located in various angular positions relative to the axis of the rotary stand may be charged with powder coatings of different colours. A collecting hopper is located at the bottom of the coating booth, the outlet opening of which collecting hopper may be brought as desired into connection with various recovery devices for powder overspray. To coat articles of different colours, the application devices charged with powder coating of the appropriate colour are activated in each case and the recovery device which collects the powder of the corresponding colour is brought into connection with the outlet opening of the collecting hopper.
    Type: Grant
    Filed: April 25, 2005
    Date of Patent: July 15, 2008
    Assignee: Eisenmann Anlagenbau GmbH & Co. KG
    Inventors: Werner Pohl, Wolfgang Bezner, Jürgen Hanf, Peter Abel
  • Patent number: 7396562
    Abstract: A method of manufacturing an optical information recording medium that has a substrate having a signal recording layer formed on one principal surface thereof; and an optically transparent layer formed on the signal recording layer and made from a radiation cure type resin. According to the method, when the optically transparent layer is formed, the radiation cure type resin is supplied onto the substrate, and the radiation cure type resin is applied over the substrate by spinning the substrate at a predetermined number of application revolutions in a spin coating method. The number of revolutions of the substrate is increased after the application of the resin, and radiation is irradiated to cure the radiation cure type resin while the number of revolutions of the substrate is increased.
    Type: Grant
    Filed: June 6, 2002
    Date of Patent: July 8, 2008
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Kazuya Hisada, Eiji Ohno, Kazuhiro Higashimaru, Kazuhiro Hayashi
  • Patent number: 7396412
    Abstract: An apparatus for dispensing fluid during semiconductor substrate processing operations. The apparatus includes a central fluid dispense bank comprising a plurality of dispense nozzles coupled to a plurality of fluid sources and a first processing chamber positioned to a first side of the central fluid dispense bank. The apparatus also includes a second processing chamber positioned to a second side of the central fluid dispense bank and a dispense arm adapted to translate between the central fluid dispense bank, the first processing chamber, and the second processing chamber.
    Type: Grant
    Filed: April 20, 2005
    Date of Patent: July 8, 2008
    Assignee: Sokudo Co., Ltd.
    Inventors: Tetsuya Ishikawa, Rick Roberts
  • Patent number: 7396556
    Abstract: A method of coating a medical appliance is provided that includes vibrating the medical appliance and contacting a material with the medical appliance to form the coating. A medical appliance is provided having a coating applied by a method. The method includes vibrating the medical appliance and contacting a material with the medical appliance to form the coating. A system is provided for coating a medical appliance. The system includes an arrangement for holding the medical appliance and an arrangement for at least one of moving and rotating the arrangement for holding the medical appliance. The system also includes an arrangement for vibrating the medical appliance.
    Type: Grant
    Filed: March 25, 2005
    Date of Patent: July 8, 2008
    Assignee: Boston Scientific Scimed, Inc.
    Inventor: Micheál Hayes
  • Patent number: 7395777
    Abstract: A machine (100) for the treatment of pharmaceutical products (P) comprises a pan (2) that revolves about an axis of rotation (X) and a dispensing unit (3) designed to disperse a coating material inside the pan (2) over a mass (M) of the products (P) located in the pan (2). The pan (2) has an opening (7) for feeding the products to be treated (P) into the pan (2), and an opening (8) for feeding the products (PT) already treated with the coating material out of the pan (2), the infeed opening (7) and the outfeed opening (8) being separate and independent of each other.
    Type: Grant
    Filed: February 3, 2004
    Date of Patent: July 8, 2008
    Assignee: I.M.A. Industria Macchine Automatiche S.p.A.
    Inventor: Roberto Trebbi
  • Publication number: 20080141932
    Abstract: A nozzle for use in a coating apparatus for the application of a coating substance to a stent is provided.
    Type: Application
    Filed: January 18, 2008
    Publication date: June 19, 2008
    Inventors: Yung-Ming Chen, Stephen James Guittard, Joe Broeckert
  • Patent number: 7371284
    Abstract: A powder coating apparatus 100 and a method of manufacturing a stator 200 are disclosed wherein the stator is set in masking caps 110, 120 such that axial end faces of the stator are masked by the masking caps, respectively, so as to define a first clearance in an area closer to a powder spray nozzle 160 and a second clearance in the other area remote from the powder spray nozzle. The first clearance closer to the powder spray nozzle 160 is set to have airflow resistance less than that of the second clearance remote from the powder spray nozzle for thereby permitting compressed air, delivered from a compressed air supply unit 150, to be discharged through the first clearance at an increased flow rate.
    Type: Grant
    Filed: November 2, 2004
    Date of Patent: May 13, 2008
    Assignee: Denso Corporation
    Inventor: Yukihisa Nagami
  • Patent number: 7364771
    Abstract: A method for producing a fluorine-containing polyimide film excelling in heat resistance, resistance to chemicals, water repellency, dielectric properties, electrical properties, and optical properties and a spin coater suitable for the method are to be provided. A method for the production of a fluorine-containing polyimide film which comprises forming a coating film of a fluorine-containing polyimide precursor in an atmosphere having a relative humidity thereof adjusted to a level of not more than 50 RH % and then subjecting the fluorine-containing polyimide precursor to heat treatment thereby forming a fluorine-containing polyimide film is provided. By adjusting the relative humidity in accordance with this method, the fluorine-containing polyimide precursor can be prevented from being decomposed by the absorption of moisture and consequently prevent effectively the fluorine-containing polyimide film from forming piriform spots and scratches.
    Type: Grant
    Filed: March 5, 2004
    Date of Patent: April 29, 2008
    Assignee: Nippon Shokubai Co., Ltd.
    Inventors: Kozo Tajiri, Shinichi Goto, Yoshinobu Asako, Kumiko Kawada
  • Patent number: 7354480
    Abstract: A stent mandrel fixture for supporting a stent during the application of a coating substance is provided.
    Type: Grant
    Filed: February 26, 2003
    Date of Patent: April 8, 2008
    Assignee: Advanced Cardiovascular Systems, Inc.
    Inventors: Arkady Kokish, Charles Snyder
  • Publication number: 20080066786
    Abstract: A method of cleaning a spin coater apparatus is provided. In one embodiment, the method comprises providing a spin coater apparatus having a coater cup comprising a basin with sidewalls, a rotatable platform situated inside the cup adapted for holding and rotating a wafer to be coated, and a solvent dispensing means mounted under the rotatable platform; placing the substrate on the rotatable platform; rotating the rotatable platform; continuously dispensing a cleaning solvent from the solvent dispensing means to rinse the backside of the wafer with the cleaning solvent and to pre-wet an interior surface of the sidewalls; and dispensing a coating material upon the wafer, the substrate mounted on the rotatable platform.
    Type: Application
    Filed: September 19, 2006
    Publication date: March 20, 2008
    Inventors: Chun-Jen Hsieh, Chi-Kang Peng, Wen-Hao Yang, Hung-Tai Tsao
  • Patent number: 7341630
    Abstract: A nozzle for use in a coating apparatus for the application of a solvent and polymer to a stent is provided.
    Type: Grant
    Filed: June 26, 2003
    Date of Patent: March 11, 2008
    Assignee: Advanced Cardiovascular Systems, Inc.
    Inventor: Stephen Dirk Pacetti
  • Patent number: 7326437
    Abstract: A method and apparatus of coating a polymer solution on a substrate such as a semiconductor wafer. The apparatus includes a coating chamber having a rotatable chuck to support a substrate to be coated with a polymer solution. A dispenser to dispense the polymer solution over the substrate extends into the coating chamber. A vapor distributor having a solvent vapor generator communicable with the coating chamber is included to cause a solvent to be transformed into a solvent vapor. A carrier gas is mixed with the solvent vapor to form a carrier-solvent vapor mixture. The carrier-solvent vapor mixture is flown into the coating chamber to saturate the coating chamber. A solvent remover communicable with the coating chamber is included to remove excess solvent that does not get transformed into the solvent vapor to prevent the excess solvent from dropping on the substrate.
    Type: Grant
    Filed: December 29, 2003
    Date of Patent: February 5, 2008
    Assignee: ASML Holding N.V.
    Inventor: Andrew Nguyen
  • Patent number: 7323060
    Abstract: A forward direction-only path (first substrate transport path) is formed for transporting substrates in a forward direction to pass the substrates on to an exposing apparatus. A separate, substrate transport path (second substrate transport path) is formed exclusively for post-exposure bake (PEB). Substrate transport along each path is carried out independently of substrate transport along the other. A fourth main transport mechanism is interposed as a predetermined substrate transport mechanism between transfer points consisting of a buffer acting as a temporary storage module for temporarily storing the substrates and a post-exposure bake (PEB) unit corresponding to a predetermined treating unit. This arrangement forms the path for transporting the substrates between the buffer and the PEB unit, to allow PEB treatment of the substrates to be performed smoothly. Similarly, the substrates are transported smoothly to the buffer.
    Type: Grant
    Filed: December 10, 2004
    Date of Patent: January 29, 2008
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Yoshihisa Yamada, Masafumi Maeda, Takashi Taguchi
  • Publication number: 20080011713
    Abstract: A substrate processing apparatus of the invention has a self-propelled carrying mechanism 15 configured to enable a processing target substrate W to be carried to/from each of liquid processing apparatuses HB, COT and DEV where at least two liquid processing apparatuses W are linearly disposed and to be movable in parallel with an arrangement direction of the liquid processing apparatuses HB, COT and DEV, substrate delivering/receiving mechanism 20 and 21 configured to enable the processing target substrate W to be delivered and received to/from the self-propelled carrying mechanism 15, and a non-self-propelled carrying mechanism 10 configured to enable the processing target substrate to be delivered and received to/from the substrate delivering/receiving mechanisms 20 and 21.
    Type: Application
    Filed: December 27, 2006
    Publication date: January 17, 2008
    Applicant: Yoshitake ITO
    Inventor: Yoshitake Ito
  • Publication number: 20070298158
    Abstract: An apparatus for introducing a testing material into an optical disc production includes a vessel for holding a test material and a regulator for pressurizing the vessel, wherein the vessel and regulator are connectable to a disc production for using the test material in lieu of bonding material in the disc production.
    Type: Application
    Filed: June 23, 2006
    Publication date: December 27, 2007
    Inventors: Marion Keith Martin, Bang Thai Dinh, Justin John Cunningham
  • Patent number: 7311781
    Abstract: An apparatus causes a substrate to rotate and supplies a treatment liquid to a substrate surface to make a treatment, without concern that a mixed substance is eluted from a cup in the use for a long time, or a thin film comes off from an inside wall surface to be contamination-causing substances even if the cup made of a water-repellent material for collecting a treatment liquid becomes hydrophilic. A cup 16 disposed to surround the sides and underside of a substrate W rotating while being held by a spin chuck 10, and serving to collect a treatment liquid diffused from the substrate to the surroundings, is made of a plastic material. Further, an inside wall surface of an upper-side cup part 24 of the cup 16, being a portion on which the treatment liquid having been diffused from the substrate impinges, is roughened to be a hydrophilic surface.
    Type: Grant
    Filed: October 25, 2005
    Date of Patent: December 25, 2007
    Assignee: Dainippon Screen MGF, Co., Ltd
    Inventors: Kentaro Tokuri, Kenya Morinishi, Masaki Iwami
  • Patent number: 7303633
    Abstract: A method for producing an optical information recording medium includes the steps of: coating a solution for forming a dye recording layer onto a surface of a rotating disc-shaped resin substrate; and discharging a cleaning solution from a nozzle onto a peripheral edge to remove the dye recording layer from the peripheral edge, wherein discharge of the cleaning solution is initiated 1.0 to 300 seconds after completion of the coating, and the nozzle is disposed on a plane that extends in a normal line direction of the substrate and includes a straight line representing a discharge direction of the cleaning solution, so that an angle defined by the discharge direction and the normal line is 0 to 60°.
    Type: Grant
    Filed: May 3, 2005
    Date of Patent: December 4, 2007
    Assignee: Fujifilm Corporation
    Inventors: Yoshihisa Usami, Koichi Kawai
  • Patent number: 7288154
    Abstract: There is provided an apparatus for optical disc spin-coating, comprising a cap having a tapered protruding portion or a recess in its central lower portion; a turntable for rotation that has a tapered recess or protruding portion formed in an end of its central axis that is inserted into a center hole of an optical disc, wherein the tapered recess or protruding portion of the turntable is coupled with the tapered protruding portion or recess of the cap in a convexo-concave structure; and a vacuum hole formed in an optical disc support of the turntable. When the cap is eccentrically placed on the optical disc, the cap can be easily attached. In addition, the cap can be easily detached from the optical disc by using vacuum pressure. As a result, the operability and manufacturing efficiency can be increased.
    Type: Grant
    Filed: June 17, 2005
    Date of Patent: October 30, 2007
    Assignee: LG Chem. Ltd.
    Inventors: Tae-Sik Kang, Mi Young Han, Seongkeun Lee, Sung Hoon Jang, Hun Seo, Kwang Lyul Lee, Youngjun Hong
  • Publication number: 20070231483
    Abstract: A liquid processing apparatus is arranged to planarize a film on a substrate by supplying onto the film a process liquid for dissolving the film while rotating the substrate. The apparatus includes a substrate holding member configured to rotatably hold the substrate in a horizontal state, a rotation mechanism configured to rotate the substrate holding member, and a liquid supply mechanism configured to supply the process liquid onto a surface of the substrate. The liquid supply mechanism includes first and second liquid delivery nozzles configured to deliver the same process liquid. The first liquid delivery nozzle has a smaller diameter and provides a smaller delivery flow rate, as compared to the second liquid delivery nozzle. The first liquid delivery nozzle is inclined to deliver the process liquid in a rotational direction of the substrate, and is movable between a center of the substrate and a peripheral edge thereof.
    Type: Application
    Filed: March 27, 2007
    Publication date: October 4, 2007
    Inventors: Hiromitsu Nanba, Masahiro Yoshida, Yuji Murakami, Hiroshi Nagayasu
  • Patent number: RE40722
    Abstract: The invention relates to methods and apparatuses that reduce problems encountered during coating of a device, such as a medical device having a cylindrical shape. In an embodiment, the invention includes an apparatus including a bi-directional rotation member. In an embodiment, the invention includes a method with a bi-directional indexing movement. In an embodiment, the invention includes a coating solution supply member having a major axis oriented parallel to a gap between rollers on a coating apparatus. In an embodiment, the invention includes a device retaining member. In an embodiment, the invention includes an air nozzle or an air knife. In an embodiment, the invention includes a method including removing a static charge from a small diameter medical device.
    Type: Grant
    Filed: June 26, 2007
    Date of Patent: June 9, 2009
    Assignee: SurModics, Inc.
    Inventor: Ralph A. Chappa