Abstract: A process for preimpregnating reinforcing elements with a liquid substance includes the following series of steps or stages: placing the reinforcing elements in a sealable enclosure, applying a vacuum of sufficient intensity and duration to the enclosure to eliminate at least the majority of water and gas present in the reinforcing elements contained therein and introducing sufficient liquid substance into the enclosure for the substance to cover the elements once the elements have been impregnated. The device for carrying out this process includes an enclosure for containing the elements, means for applying a vacuum to the enclosure for removing at least the majority of the water and gas present in the reinforcing elements and an orifice or conduit for introducing the liquid substance into the enclosure.

Abstract: A system for pumping down pressurized gas residing after shut-off in the piping use to provide a gas flow to facilitate backside wafer heating/cooling during the processing of a semiconductor wafer and including a valve selectable secondary piping line for equalizing on shutoff any pressure differential occurring in the primary gas flow line between the process chamber and the backside heating element. The secondary line runs from an opening in the process chamber wall to a tee-joint installed in the primary flow line immediately downstream of the final isolation valve in the primary line. A valve is installed in the secondary line and is operationally interlocked, in an inverse manner, with the isolation valve in the primary line such that when one valve is open the other valve is closed and vice versa.

Abstract: A reactant gas is fed to a dispersing chamber which is disposed under a reaction chamber, and both disposed within a vacuum chamber. The reactant gas is dispersed and then fed through a plurality of communicating holes to the reaction chamber. A second reactant gas is fed to a lower dispersing chamber. After dispersion, this second gas is fed through pipes through the first dispersing chamber and into the reaction chamber around the first reaction gas. Said first reactant gas is blown off downward from the end opening of the feeding pipe and dispersed in parallel along the collar portion and dispersed homogeneously in the first reactant gas dispersing chamber, and in the state, is introduced to the reaction chamber via communicating holes.

Abstract: Si.sub.2 H.sub.6 and PH.sub.3 are introduced into a heated reaction tube in which a plurality of substrates are contained under vacuum pressure, thereby forming phosphor-doped silicon films on the substrates. By changing the flow of Si.sub.2 H.sub.6, a first layer consisting of a silicon film containing phosphor of low density, a second layer substantially consisting of phosphor, and a third layer consisting of substantially the same composition as that of the first layer are deposited in the order mentioned. Thereafter, the first through third layers are heated, thereby diffusing phosphor contained in the second layer. Thus, an integral film of uniform impurity density is formed from the first through third layers.

Abstract: A method and apparatus for marking or erasing a marking on a semiconductor chip package having leads. The apparatus comprises a circular disk has many pockets on one surface near its circumference suitable for holding semiconductor chips. Each pocket has a pedestal rising from the bottom of the pocket and suitable for supporting the bottom portion of a semiconductor chip package. The edges of the pocket and the pedestal define between them space suitable for housing the leads of the package. The pedestal has a hole therein which can be evacuated so that the package is held to the pedestal by atmospheric pressure so that the top surface of the package may be marked or in marking thereon can be erased. Thus the package is held to the pedestal by sufficient force for the marking or erasing process. The leads of the package are therefore not bent or otherwise disturbed. Rotation of the disk allows the packages to be sequentially marked or erased.

Abstract: For conveying and for dispensing of degassed work liquid(s), an apparatus and a method for precision conveying and/or ratioing and/or mixing and/or dispensing of work liquids are presented using a pump of a positive displacement, high precision, piston/cylinder constant flush type with piston smaller than the chamber. The piston is programmably advanced along a stroke with tiny repeatable adjustable steps. Infinitely adjustable precision ratioing and/or programmable mixing of degassed materials may be provided downstream of the pump outlets when degassed liquids are presented to the inlets of two such pumps. The mixing occurs in a mixing chamber, the output of which is then used. The vacuum degassed work liquids may be dispensed in a system which features the creation and maintenance of a positive absolute pressure on the work liquids throughout, from the point of exiting a first degassing chamber to an end use at a dispensing outlet.

Abstract: A system for delivering a liquid reagent to a low pressure reactor in the vapor phase includes a source of the liquid reagent, a metering valve for measuring precise volumes of the liquid reagent and transporting those volumes to an expansion valve at a precisely controlled flow rate, and a vaporizing chamber. The expansion valve includes an adjustable orifice which is adjusted in response to pressure disturbances upstream of the expansion valve so as to decrease variations of the liquid flow rate to the expansion valve and thereby enhance uniformity of the vapor phase flow rate downstream of the expansion valve.

Abstract: An apparatus for impregnating the surface of a web with a liquid in the form of a pattern, comprising a vacuum chamber having a suction wall with one or more openings therein; means for pulling and controlling a vacuum on said vacuum chamber; an impregnating chamber adapted to hold the liquid impregnant, said chamber having an exit wall with one or more openings therein, the exit wall being a substantially copolanar extension of the suction wall of the vacuum chamber; a pattern belt having an inner surface and an outer surface and perforations in the configuration of the desired pattern, said belt being mounted over the outside of said vacuum and impregnating chambers and being substantially unperforated except in the area of said pattern; means for moving the pattern belt past first the suction wall of the vacuum chamber and then the exit wall of the impregnating chamber, with the inner surface of the belt being in sealing engagement with the outside surfaces of both said walls; means for pressing the fibrou

Abstract: A process for chemical vapor deposition, in which a reactant gas is introduced into a reaction furnace containing a substrate on which a deposited layer is formed by a chemical reaction of the introduced reactant gas, and a used gas resulting from the chemical reaction is exhausted from the furnace through a plurality of exhaust ports disposed radially around an axis of flow of the exhaust gas introduced into the furnace, which comprises the steps of: exhausting the used gas during the forming of the deposited layer on the substrate through an exhaust system comprising; exhaust ports disposed symmetrically with respect to a plane which contains the axis and at a substantially uniform distance from the axis; and exhaust pipes extending from the exhaust ports, each of the pipes being provided with a conductance valve inserted therein and a sensor for measuring a temperature of the pipe surface, the temperature sensor being fixed to the outer surface of the pipe at a position between the exhaust port and the con

Abstract: Disclosed herein is a method of forming strip-shaped electrodes over an end surface of a plate-shaped electronic component and two major surfaces which are in series with the end surface. A slit plate, which is provided with through slits having width corresponding to the width of electrodes to be formed, is located above an electrode paste bath while an electronic component is arranged above the slit plate so that its end surface extends across the through slits. Before or after this step, the electrodes paste is made to swell to a constant level beyond the upper surface of the slit plate, thereby applying the electrode paste to the end surface of the electronic component and the two major surfaces which are in series with the end surface in the form of strips.

Abstract: An apparatus and method for processing cylindrical and belt-like substrates includes a carousel rotatable to any one of a plurality of planetary stations surrounding the carousel, the carousel having a support structure defining a central horizontal axis and at least one support arm mounted on the support structure for supporting a substrate thereon along a horizonal axis parallel to and radially offset from the central horizontal axis. The support structure reciprocates relative to any one of the plurality of stations to insert the substrate into and withdraw the substrate from any one of the plurality of stations, and the at least one support arm is rotatable about its offset horizontal axis to rotate the substrate thereon.

Abstract: A vacuum processing apparatus comprises a carrying body for holding a glass plate thereon, a pair of elongated stationary members extended in a vacuum chamber in which processing stages for forming films on the glass plate by a vapor deposition method are provided, a linear motor transportation device provided at one of the stationary members, and a pair of movable members provided at both sides of the carrying body so that the movable members are moved along the stationary members in a non-contacting state by the action of the linear motor device.

Abstract: In a device for vacuum coating of a sheet such as a glass plate, especially by reactive cathode sputtering, with a film made from a semiconductor, a metal oxide or another metal compound, the parts within the coating chamber adjacent to the sheet (2) which are exposed to a particle stream coming from cathode (4) for example, screen or shielding plates (10), electrodes (8) and/or shielding plates (12), are provided with end areas (10') and/or protrusions that are shaped like a knife edge. Such an edge has been found to promote cracking along the edge which relieves stresses and reduces chipping and resultant damage to the coating being deposited on that sheet.

Abstract: A vacuum-coating apparatus has the vacuum-coating chamber mounted on an upright housing part of the upper end of which the suction generator is provided and whose lower end communicates with a horizontal housing part containing the coating-liquid supply. The liquid circulator includes a cartridge filter for removing solids from the liquid which is fed to the coating chamber and which has a conical easily-replaceable filter unit. The air from the changer is directed downwardly along an adjustable air-control plate on the underside of an air-guide plate and then upwardly around an edge of the air-control plate.

Abstract: Apparatus for impregnating a liquid such as a resinous liquid into wood, in which timbers to be subjected to the impregnation are placed in a pressure tank which is capable of reducing or increasing the interior pressure thereof; the inside of the pressure tank is evacuated through a monitoring timber identical in properties with the timbers to be subjected to the impregnation, to expel the air present in the tank and the timbers; the liquid is injected into the pressure tank under pressurized conditions, while continuing the evacuation, to impregnate the liquid into the timbers; and the impregnation is completed when the liquid begins to flow out of the tank through the monitoring timber.

Abstract: Disclosed is a coating apparatus, comprising a gas exhaust rate controller disposed within an exhaust pipe connected to a cup which houses a substance to be treated, and a branch pipe connected to the exhaust pipe. The flow speed of the fluid within the branch pipe is measured, and the driving of the exhaust rate controller is controlled based on the measured value of the flow speed in accordance with the state of treatment of the object to be treated.

Abstract: A painting structure for use as, by way of example, a paint spray booth or paint baking or drying oven, utilizes a trapezoidal cross-section, instead of the conventional rectangular/square or rectangular-gabled cross-section. The painting structure of the present invention provides inherent rigidity without the need for special framing, and provides more uniform air flow than a gabled roof structure, as air swirls in air pockets beneath the gables are eliminated. Due to the simplified construction, the trapezoidal cross-sectional booth of the present invention is less expensive to make and install and more easily erected.

Abstract: An applicator for a crease setting composition includes two or more applicator heads mounted over a surface having vacuum means for gripping a fabric. The applicator heads can be raised and lowered in unison and moved back and forth over the surface. When the rear edge of the fabric is sensed, the applicator heads drop onto the fabric and then are moved backwards while applying the crease setting composition to the fabric. When the front edge of the fabric is sensed, application of the setting composition is discontinued and the applicator heads are raised from the fabric. Channels or grooves in the surface, which supports the fabric during application of composition, receive the creases so that accurate alignment is maintained between the applicator heads and the creases. Air pressure is used for dispensing the composition.

Abstract: Apparatus and method for applying a coating of lubricant on at least a portion of the outer peripheral surface of a can body wherein a turret having a plurality of pockets formed in its outer peripheral surface is mounted for rotation about a relatively fixed axis and during the rotation thereof a can body is fed into each pocket. The can body in each pocket is held against the outer peripheral surfaces of a pair of rotating rolls having a space therebetween by a vacuum acting through the space so that the can body is rotated thereby and while rotating is moved against an arcuate wick having a supply of lubricant so as to form a coating of lubricant on the at least a portion of the outer peripheral surface.

Abstract: An impregnating carbonizing process and apparatus which permit reduction in cost of consumable goods and can operate at a reduced cost and a heating and vacuum impregnating operation which requires a very long period of time can be performed on the outside of an expensive high pressure vessel to accomplish rapid carbonization and baking.

Abstract: An inlet opening in an evacuatable vacuum system is substantially enlarged and closed off by a porous plate so that the ingress of dust is avoided and a very uniform inflow of gas is realized. A similar plate can be used for closing off a gas outlet opening of the vacuum chamber.

Abstract: The present invention relates to an electron beam coevaporation method of preparing an oxide superconducting film on a silicon or an aluminum oxide substrate at a temperature below 600.degree. C. without the need for post-annealing, which comprises evaporating metallic superconductor precursor components onto a heated substrate from individual evaporation sources while directing oxygen plasma over the substrate surface wherein the evaporation sources and the substrate are located in two different vacuum chambers, a differential pressure is maintained between the two vacuum chambers during deposition so that the lowest pressure is at the evaporation sources, an intermediate pressure in the vacuum chamber surrounding the substrate and the highest pressure at the substrate surface.

Abstract: A combination gate valve and throttle valve is presented for use between a process chamber and at least one pump includes a base plate a lower plate and a gate plate. The base plate is attached to the process chamber and includes a base plate gas port for each pump in the system. Each pump is attached to the lower plate. Where each pump is attached to the lower plate there is a lower plate gas port. Each of the lower plate gas ports lines up with one of the base plate gas ports. The gate plate is attached between the lower plate and the base plate. The gate plate has gate plate gas ports so that when the gate plate is moved into an open position with respect to the base plate and the lower plate, the gate plate gas ports line up with the lower plate gas ports and the base plate gas ports allowing gas to flow from the process chamber through the gas ports to the pumps. When the gate plate is moved into a closed position the process chamber is selaed from the pumps.

Abstract: A flatwork ironer for the ironing of sheets, including a housing, having a series of troughs, and a roll associated with each, spray device in proximity with each roll, for the timed spraying of lubricating wax thereon, the spray includes a spray conduit, for conveyance of wax under pressure from a reservoir for dispensing through spray nozzles onto each roll for the time needed, and then providing a return line for draining any excess wax back to the reservoir; the controls for automatic spraying of lubricating wax onto the roll(s) includes a pump, a motor, a computer program including a timer, various solenoids, cams, for furnishing the controlled de-energization of the flatwork feed table and vacuum motors, and the initiation of a lubricating cycle, to achieve its functioning, with a reinitiation of the ironer mechanisms for further operation, with the automatic resetting through circuitry of the timer in preparation for the next lubricating cycle.

Abstract: An apparatus for glazing an article of earthenware or porcelain such as e.g. a plate or the like includes a capstan with a plurality of arms each supporting a workpiece holder for at least one glaze vessel which is rotatable about its axis and tiltable relative to the supporting arm. Before being fed to a glazing station, the article is accurately aligned and imprinted with a mark. A suction unit transfers the article from the centering station to the glaze vessel which is rotated and tilted so as to dip the article in a glaze mass. After surface drying the glaze on the article by initially holding it vertically and then horizontally, the article is transported to a transfer station for placement on a spongy belt which removes excess amount of glaze from the bottom area of the article. The glaze vessel, after being cleared by removing the plate, is refilled with fresh glaze mass in a charging station which is arranged prior to the glazing station.

Abstract: An apparatus for coating flat glass by directing a reactant gas over the glass surface incorporates a gas flow restrictor which comprises a chamber which is adapted to receive a supply of reactant gas and is adapted to output a flow of the reactant gas over the flat glass being coated. A series of at least two restrictions is provided in the gas flow restrictor, each restriction comprising a plate member extending across the chamber and having a plurality of apertures therethrough.

Abstract: A vacuum coating device having a workpiece carrier rotatably positioned within the process chamber including a device for positioning and releasably securing the workpiece on the carrier comprising a crank-lever mechanism positioned at a transfer station and a clamping mechanism positioned on the carrier. The crank lever mechanism operatively engages the clamping mechanism to release or secure a workpiece on the carrier.

Abstract: A sheet material for use as a vacuum bag in the vacuum laminating of printed circuit boards, to heat sinks. The material of the sheet is flexible and electrically conductive to both conform around electrical components and to prevent damage to the components due to electrostatic discharge. In addition, the material has one surface which is textured. The sheet material is formed into an enclosure to hold the circuit board and heat sink and it is the textured surface which is placed in contact with the "populated" surface of the board to permit air to be easily removed from the bag enclosure during the initial evacuation stage of the lamination process.

Abstract: A method and apparatus for impregnating a porous web with a chemical. The impregnating method includes applying a vacuum to one side of the web sufficient to evacuate air from the web, applying impregnating chemical into the web in a selected pattern on the same side of the web, followed by drying the web. The apparatus includes a vacuum chamber for evacuating air from the web, a manifold for applying the impregnating chemical into the web located on the same side of the web as the vacuum chamber and a stencil for restricting the application of the chemical to selected areas of the web.

Abstract: An apparatus for vacuum coating continuous web materials has a housing with a removable cover disposed on at least one side for the hermetic closure of the housing, and a winding means having pulley cylinders, tension measuring cylinders, stretching cylinders and tightening cylinders journaled between two plates, plus at least one coating cylinder and at least one take-up roll and at least one feed roll, as well as a coating source held stationary in the housing. The two plates together with the cylinders and rolls are able to travel as a unit on a running gear for the purpose of loading and unloading, to such an extent that all cylinders are freely accessible from without. A transport means which can move transversely to the tracks of the running gear is provided with pairs of arms journaled on the running gear. The common pivot axis of the pairs of arms is disposed parallel to the tracks. The free ends of the pairs of arms are equipped with supporting eyes for holding one fresh roll and one take-up roll.

Abstract: A thin-film coating apparatus rotates a member on which a coating solution is dropped to spread the coating solution over the member. The thin-film coating apparatus comprises a spinner for securely supporting the member, a casing firmly attached to the spinner in surrounding relation to the spinner and the member, and a lid for closing an opening in the casing through which the member can be brought into and out of the casing, thereby defining a closed processing chamber in the casing.

Abstract: A tool employing a solder foot to deposit solder on a series of conductive surfaces as the tool moves. In one embodiment, non-wettable blade attached to the tool breaks the film. A pair of sensors coupled to a control circuit monitor the position of the solder foot and the position may be changed as a function of the operation to be performed, i.e. deposit, reflow, standby while tool is moved. In a second embodiment a discrete solder mass is extruded and deposited on a preheated pad. In a third embodiment, solder wire is delivered to an ominidirectional tool for deposition.

Abstract: A technique for presenting and fixturing small items that are coated by vapor deposition techniques. The objects are caused to be moved within the plasma stream to effect full coverage. The coating, if titanium nitride, is gold colored and is, for example, useful for coinage applications.

Abstract: A device for aspirating coating material, such as paints, from the applicator gap between two applicator rollers provides two suction tubes, which are disposed horizontally displaceably and whose outlet ends communicate with an apparatus for generating a suction pressure as well as with in apparatus for collecting the aspirated coating material. Particularly when a photoresist is applied to a board-like substrate in the manufacture of printed circuit boards, accumulations of the coating material in the region of the edge of the substrate passing through the apparatus can be avoided without mechanically straining the applicator rollers. By means of the suction pressure apparatus, the quantity of coating material accumulating as the boards to be coated pass through the apparatus can be aspirated continuously and returned via a collection tank to the supply of coating material to be used.

Abstract: A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.

Abstract: In apparatus for charging and discharging substrates, substrates are disposed in a magazine or substance store and into the pre-chamber of a high-vacuum-processing-chamber which is made as a vacuum chamber, the magazine being pushed into a housing, which at its lower side provides an opening. The housing can be deposited with the magazine onto the upper part of the wall of the lower box, an air lock plate held below an opening in the upper part of the wall taking the magazine and lowering it into a lower position by means of a pair of lifting cylinders. After this the air lock plate with the magazine and the pair of lifting cylinders are movable laterally on a conveying-slide-carriage, until the air lock plate is positioned below the passage of opening in the bottom part of the vacuum chamber. Eventually the air lock plate can be moved so far up in a vertical direction, until the magazine is disposed in the pre-chamber and until the air lock plate, which is a little bigger, closes the opening of passage.

Abstract: This invention relates to a coating equipment to be used for coating a coating solution (coating diffusion agent, photo-resist agent, etc.) on a film which forms patterns of photo mask substrates (hereinafter merely called "substrates") used for production of reticle and photo masks or of glass substrates used for liquid crystal display.

Abstract: A coating device includes a ring-shaped outer circumferential groove formed along and adjacent to the outer circumferential rim of a cup means and communicated with a processing vessel, and a processing liquid supply source connected to the outer circumferential groove through nozzles. A partition wall is erected, as an inner wall of the cup means, inside the outer circumferential groove with the nozzles and a groove interposed between them. The supply of the processing liquid can be thus made stable and processing failure because of air bubbles mixed in the liquid and irregular coating of the liquid on substrates can be prevented.

Abstract: A decontamination system for processes for deposition, etching and/or growth of high purity films, particularly applicable to semiconductor technology.After introducing the products concerned with a process into a chamber and after creating a vacuum in the chamber, the chamber is decontaminated by a series of intermittent inflows of non-contaminating gas and subsequent pressure varying operations.

Abstract: This invention relates to a coating equipment to be used for coating a coating solution (coating diffusion agent, photo-resist agent, etc.) on a film which forms patterns of photo mask substrates (hereinafter merely called "substrates") used for production of reticle and photo masks or of glass substrates used for liquid crystal display.

Abstract: A system and process, including a combination of a solder well and a vacuum system wherein micro through holes are filled with solder. A PC board or the like is supported for contact with solder on one side and with a vacuum apparatus for the application of a vacuum to the other side so that solder is drawn into the through holes for establishing electrically conductive connections therethrough.

Abstract: A system having a coating station comprised of a dispensing assembly and a fluid collection head is useful in a method to precisely coat reagents on porous supports for use in diagnostic devices. In the method, a cover having an aperture therethrough and the porous support secured to its underside covering the aperture is positioned in the coating station between the dispensing assembly and the fluid collection head. The reagent is dispensed from a cannula in the dispensing assembly onto the portion of the porous support exposed through the aperture of the cover. A reduced pressure in the fluid collection head pulls fluid through the porous support. The system is automated by providing a guide channel for holding a plurality of covers in correct orientation and a magazine for holding a stack of covers. An indexing arm delivers the bottom-most cover in the stack to the guide channel and urges covers in the channel along its length.

Abstract: A method of coating embossed panels having embossed panel portions which are offset in generally parallel planes. A liquid accent coating is applied to the panels as they are moved along a predetermined path. A roll is reverse rotated to wipe liquid coating from the high points of the embossed panel surfaces, creating a high level of contrast with the relief portions where a greater amount of coating remains. The rolls do not wipe the steps between panel portions so that the steps are more heavily coated, to create a dark shadow line. Doctor blades strip coating from the roll, except in those portions that do not contact the panel steps. Vacuum removes excess coating from the stepped areas of the panels and also from those portions of the rolls not contacted by the doctor blades. Apparatus for carrying out the method is also disclosed.

Abstract: A machine for removing bubbles from coated flat substrates, namely PC boards. The machine includes one or more conveyors for transporting the boards into an enclosure and a vacuum platen positioned above the conveyor which, when lowered into contact with the conveyor encloses the board in a plenum. A pump withdraws air from the plenum to create a vacuum and remove any entrained or surface bubbles from the boards.

Abstract: The invention pertains to a method for metallic coating according to which the fiber is made to pass through a bath of molten metal. To prevent unevennesses in coating, caused by turbulence, a depression is made above the bath.The invention also pertains to a device by which the method is applied. The fiber goes vertically through a pot containing the molten metal above which the depression is made.The invention can be used to make optic fibers of greater mechanical strength.

Abstract: A cell for placing solid matter on a piece of slide glass in such a manner that it is rotated in a centrifugal separator, which is formed integrally by mold forming of synthetic resin thereby to be disposable, and a base plate of a cell portion has an elasticity so as to be easily engaged with a hook provided on a holder in which the base plate is held.

Abstract: A method and apparatus is disclosed for permitting a plurality of substrates to be positioned within a magnetic field unique to each substrate so that the plurality of substrates may be placed in a vacuum chamber and concurrently coated with a thin film. A magnetic field unique to and associated with each substrate may be oriented so that all substrates have a uniform magnetic field and magnetic orientation. Alternatively, the magnetic field and orientation of each substrate may be individually tailored to produce a different magnetic characteristic for each substrates.

Abstract: In a mandrel system for receiving a cup-like product having a side wall with a ribbed interior surface, the exterior portion of the mandrel wall is adapted to firmly engage the interior surface of the product side wall in the regions between the ribs and to enhance interior backing of the product side wall in the regions between the ribs. In one embodiment, the exterior portion of the mandrel wall includes a compressible material. In another embodiment, the exterior surface of the mandrel wall includes channels for receiving the ribs on the interior surface of the product side wall. The mandrel wall is apertured to enable air to flow through the mandrel wall to draw the product into firm engagement with the mandrel when a vacuum is created inside the mandrel.

Abstract: A hand held device for coating a fastener with a coating and which includes a first body with a free end and which defines a first chamber that is placeable over the fastener, apparatus for supplying the coating under a pressure to the first chamber for coating the fastener with the coating, a second body with a free end and which is disposed external to the first body so as to form a second chamber therebetween, the second body is rigidly attached to the first body and the free end of the second body is displaced a distance below the free end of the first body so as to form a passageway therebetween, and apparatus for reducing pressure in the second chamber, the reducing apparatus draws the coating from the first chamber where the fastener is initially coated with the coating from the supply apparatus through the passageway and into the second chamber which causes the second chamber to fill with the coating so that when the pressure of the supply apparatus is eliminated the coating is drawn back from the sec

Abstract: A vacuum vapor transport control system and method for controlling the rate of vapor flow from a reagent reservoir into a vacuum system through an orifice calibrated as to size or flow rate using a high purity fixed gas and vapor provided from multiple reservoirs or mixed vapor provided from a single reservoir.