Abstract: A cleaning device for a vehicle sensor includes: a housing having an open first end, an open second end, and a passageway extending between the open first end and the open second end; and at least one nozzle at least partially positioned within the passageway of the housing. The at least one nozzle includes an outlet that provides at least one liquid stream through the open first end of the housing towards a lens or cover of the vehicle sensor. The housing is positioned such that air streams passing through the passageway pass through the open first end of the housing towards the lens or cover of the vehicle sensor with the at least one liquid stream. A sensor assembly and sensor system including the cleaning device are also disclosed herein.

Abstract: A portable air compressor includes a frame, a compressor unit coupled to the frame, and an air tank for storing compressed air generated by the compressor unit. The air tank is coupled to the frame. A battery compartment coupled to the frame. The battery compartment defines an opening and a battery receptacle within the opening. The portable air compressor also includes a battery pack selectively electrically connectable to the battery receptacle, an outlet port protruding from the battery compartment, a tank gauge on the battery compartment, a pressure regulator between the air tank and the outlet port for regulating the pressure of air supplied from the outlet port, an actuator on the battery compartment for adjusting the regulated pressure of air supplied from the outlet port, and a switch on the battery compartment for turning the compressor unit on and off.

Abstract: A cleaning system and process for cleaning a medical system comprising at least one air source at least one cleaning solution source at least one rinsing solution source and at least one switch for switching between the at least one air source, the at least one cleaning solution source, and said at least one rinsing solution source. The process is configured to selectively provide the cleaning solution from the cleaning solution source, selectively provide the rinsing solution source, and selectively providing the air pressure to purge the lines of a medical/dental system.

Abstract: The present disclosure provides a spraying system and a using method thereof. The spraying system includes a lifting apparatus and a spraying apparatus. The spraying apparatus connects to the lifting apparatus and includes a stage, a multi-axis transfer mechanism, a spraying component, a driving component, a surface profile detector, and a controlling component. The multi-axis transfer mechanism is disposed on the stage. The spraying component is disposed on the multi-axis transfer mechanism and the stage. The driving component is disposed on the stage and connects to the lifting apparatus. The surface profile detector is disposed on the stage and scans an area to be sprayed to obtain scanning data. The controlling component is disposed on the stage and controls the lifting apparatus, the spraying component, and the driving component according to the scanning data and pre-stored initial data.

Abstract: A washing cabinet for cleaning a part.

Abstract: A wet bench includes an outer tank and an inner tank. The outer tank has a first base plate and a plurality of first sidewalls defining a first containing space. A first portion of the first base plate is higher than a second portion of the first base plate. The inner tank has a portion in the first containing space and extends through the first base plate of the outer tank. The inner tank has a second base plate and a plurality of second sidewalls defining a second containing space.

Abstract: A cleaning system and process for cleaning a medical system comprising at least one air source at least one cleaning solution source at least one rinsing solution source and at least one switch for switching between the at least one air source, the at least one cleaning solution source, and said at least one rinsing solution source. The process is configured to selectively provide the cleaning solution from the cleaning solution source, selectively provide the rinsing solution source, and selectively providing the air pressure to purge the lines of a medical/dental system.

Abstract: A cleaning and distillation apparatus with a clean fluid tank, a cleaning tank, a recirculating fluid tank located below the cleaning tank, a removable separator panel partitioning the clean fluid tank from the recirculating fluid tank, a distillator and an outlet for dispensing fluid is provided. Also provided is a cleaning apparatus, without the distillator, the cleaning apparatus having a cleaning tank, a recirculating fluid tank located below the cleaning tank, a removable separator panel partitioning the recirculating fluid tank from the cleaning tank, and a fluid dispenser.

Abstract: A portable air compressor includes a frame, a compressor unit coupled to the frame, and an air tank for storing compressed air generated by the compressor unit. The air tank is coupled to the frame. A battery compartment coupled to the frame. The battery compartment defines an opening and a battery receptacle within the opening. The portable air compressor also includes a battery pack selectively electrically connectable to the battery receptacle, an outlet port protruding from the battery compartment, a tank gauge on the battery compartment, a pressure regulator between the air tank and the outlet port for regulating the pressure of air supplied from the outlet port, an actuator on the battery compartment for adjusting the regulated pressure of air supplied from the outlet port, and a switch on the battery compartment for turning the compressor unit on and off.

Abstract: A feed-through ultrasonic cleaning system for winding of a superconducting coil, including a sealed chamber system, a main ultrasonic cleaning system, a deionized water spraying system, a compressed air blow-drying system, and an automatic control system. During the winding of an armored superconducting coil, a superconducting conductor which is fed at a constant speed successively passes through a sealed chamber, an ultrasonic cleaning chamber, a first compressed air blow-drying chamber, a deionized water spray chamber, and a second compressed air blow-drying chamber in the ultrasonic cleaning system.

Abstract: The present invention relates to a dishwasher. The dishwasher according to the present invention includes a tub for providing a washing space, a rack for accommodating dishes in the tub, a spray nozzle for spraying wash water toward the dishes accommodated in the rack, a sump for supplying the wash water to the spray nozzle, a pump for pumping the wash water stored in the sump to the spray nozzle, a supply pipe connecting the sump and the spray nozzle, and an air jet generator disposed in a supply flow path formed by the supply pipe to suck outside air to the wash water flowing along the supply pipe and crush the air to thereby form air bubbles.

Abstract: An apparatus for washing a set of objects. The apparatus includes a washing chamber and a ROX generator fluidically connected to the washing chamber via a fluid conduit having a distal end that terminates at the washing chamber. The ROX generator is configured to provide reactive oxidizers to a carrier liquid to form a cleaning liquid with ROX cleaning bubbles, wherein the cleaning liquid is transported through the fluid conduit and into the washing chamber.

Abstract: A dishwasher includes: a spray module which sprays washing water toward dishes; a sump which supplies washing water to the spray module; a pump which pumps washing water stored in the sump to the spray module; and an air jet generator which receives a part of washing water pumped from the pump to form an air bubble in washing water and discharges the air bubble to the sump, wherein the air jet generator comprises: a decompression portion which decreases a pressure of washing water; an air suction portion which is opened to allow air to flow into the decompression portion; a pressing portion which increases pressure so as to crush the air introduced from the air suction portion; and an air tap which has a plurality of holes configured to crush the air contained in washing water that passed through the pressing portion.

Abstract: An apparatus for treating a substrate includes a developing chamber that performs a developing process on the substrate by supplying a developing solution, a supercritical chamber that treats the substrate by supplying a supercritical fluid, and a transfer chamber having a transfer unit that transfers the substrate W between the developing chamber and the supercritical chamber.

Abstract: Plating bath and well structures and methods are described to stop the organic compounds present in plating reservoir wells or bath solution from rising, i.e., climbing up the reservoir wall. An electroplating apparatus includes a vessel holding a liquid solution including metal plating material and an organic species, and a method of operating an electroplating apparatus. The apparatus is designed with plating bath and structures and methods to stop the organic compounds present in plating reservoir wells or bath solution from rising, i.e., climbing or wicking up the inner surfaces of reservoir walls, and to wash them back down on a continuous or cyclical basis in order to maintain a concentration of organic compounds in the plating solution within upper and lower specification limits.

Abstract: An apparatus for treating a substrate includes a developing chamber that performs a developing process on the substrate by supplying a developing solution, a supercritical chamber that treats the substrate by supplying a supercritical fluid, and a transfer chamber having a transfer unit that transfers the substrate W between the developing chamber and the supercritical chamber.

Abstract: The problem to be addressed by the present invention is to provide a cleaning apparatus capable of obtaining a cleaning liquid having a high degree of cleanliness. A cleaning apparatus 10 includes a dissolution tank 20 for dissolving a gas in a liquid, a transfer pump 30 for sending the liquid together with the gas into the dissolution tank 20, and a feed nozzle 40 for feeding the liquid stored in the dissolution tank 20 to a workpiece W. The transfer pump 30 is a positive displacement pump. Portions of the dissolution tank 20, the transfer pump 30, and the feed nozzle 40 that come into contact with the liquid are made of a fluororesin.

Abstract: A substrate liquid processing apparatus includes a transfer section, a processing section, a reservoir and a liquid sending mechanism. The transfer section includes a transfer device configured to transfer a substrate. The processing section is provided adjacent to the transfer section in a horizontal direction, and includes a liquid processing unit configured to process the substrate by using a processing liquid. The reservoir is configured to store the processing liquid therein. The liquid sending mechanism is configured to send out the processing liquid stored in the reservoir into the liquid processing unit. The reservoir is disposed directly under the transfer section. Further, the liquid sending mechanism is disposed directly under the processing section. Space saving of the substrate liquid processing apparatus can be achieved.

Abstract: An apparatus configured to perform a static and a dynamic cleaning of an engine at the same time or separately, as well as to back-flush the oil pump screen of the engine, air purging the engine and prime the engine with oil before filling the engine with the required oil amount. The apparatus has a holding tank for storing a cleaning solution, a pump, an oil drain adapter configured to connect the apparatus to the oil drain of the engine, a transfer tank and an oil filter adapter connected to a first and a second conduit. The pump is selectively in fluid communication with the holding tank, to pump the cleaning solution from the holding tank into the engine, and with the oil drain to draw the cleaning solution out of the engine.

Abstract: The substrate liquid processing apparatus includes a processing bath that accommodates substrates, and a plurality of gas supply pipes provided in a processing bath. Ejection holes of one gas supply pipe and ejection holes of another adjacent gas supply pipe do not overlap each other in a direction parallel to the circuit-formed surfaces of the substrates.

Abstract: A remote controlled portable resonance induction cleaning system for cleaning a process tubular or heat exchanger can include a portable high pressure plunger pump, which can provide a liquid to a portable resonance induction cleaning apparatus, The remote controlled portable resonance induction cleaning apparatus can regulate flow of the liquid to provide pressurized pulses of the liquid with a resonance for removing fouling. A hose assembly or hydraulic ram connecting mechanism can provide the pressurized pulses of the liquid to the process tubular or heat exchanger. Air can be used to control flow of the pressurized pulses of the liquid. A hydraulic intensifier can be in fluid communication with the remote controlled portable resonance induction cleaning apparatus for receiving the air, and a hydraulic control valve can be bi-directionally engaged with the hydraulic intensifier and the hydraulic ram. The hydraulic ram can seal with the heat exchanger to provide the pressurized pulses of the liquid thereto.

Abstract: A tank apparatus and method for neutralizing or decontaminating valves which have been exposed to hydrofluoric acid or other contaminants wherein the valves are temporarily secured by valve holding structures provided on the interior walls of the tank so that the valves can be opened and at least partially disassembled while the valve holding structures retain the valves in the interior of the container below the fill level of a treatment fluid.

Abstract: The present invention relates to low pH antimicrobial solutions comprising hypochlorous acid, water, and, optionally, a buffer. The inventive low pH antimicrobial solutions have a pH from about 4 to about 6 and are useful for treating impaired or damaged tissue and for disinfecting surfaces. Chemical processes for the production of the low pH antimicrobial solutions are also provided wherein chlorine gas is added to a buffer solution containing a buffering agent and water. The present invention also provides an electrochemical process for the production of the low pH antimicrobial solutions.

Abstract: An aquaculture environment control system comprising a plurality of discharge conduits positioned in a vessel, the discharge conduits including one or more orifices; a fluid source in fluid communication with the plurality of discharge conduits; a gas supply source in fluid communication with at least one of the plurality of discharge conduits; wherein discharging fluid from the plurality of discharge conduits into the vessel creates or maintains a current throughout fluid present within the vessel. A method of controlling an aquaculture environment comprising supplying one or more of a fluid and a gas to a plurality of discharge conduits positioned in a vessel; and discharging the one or more of the fluid and the gas from at least one of the plurality of discharge conduits to the vessel, the discharging creating or maintaining a current within the vessel.

Abstract: A device for cleaning a sensor can include a first valve, a second valve, a set of fluid nozzles, and a housing structure. The housing structure includes a first channel to enable fluid to move from the first valve to the set of fluid nozzles, a cavity, a second channel to enable air to move from the second valve to the cavity, and a slit opening to enable air to move from the cavity to outside the housing structure.

Abstract: Embodiments of systems and methods of etching material from the surface of a wafer are provided. In one representative embodiment, an apparatus comprises a fluid reservoir configured to receive a fluid including an etchant and one or more wafers in a cassette. The apparatus can further comprise a roller member in the fluid reservoir to frictionally engage the one or more wafers and to displace the one or more wafers with respect to a bottom portion of the cassette when the cassette is in the fluid reservoir. The apparatus can further comprise a motor outside the fluid reservoir and magnetically coupled to the roller member such that activation of the motor causes corresponding rotation of the roller member, and thereby rotation of the one or more wafers when the roller member is in frictional engagement with the one or more wafers.

Abstract: A washing apparatus has a vacuum unit and a pressure washer unit. The vacuum unit has a mud tank, a first centrifuge, and a second centrifuge, and the pressure washer unit has a first water tank having a bottom, a top and a side, and a second water tank having a bottom, a top and a side. A frame having a top, a base and four corners supports the vacuum unit and pressure washer unit. The first centrifuge and the second centrifuge are fixed in respective first and second corners of the frame, and the first water tank and second water tank are fixed in respective third and fourth corners of the frame.

Abstract: A cleaning device for cleaning a lens of a motor vehicle camera is disclosed. The lens is designed to capture images along a longitudinal optical axis, and includes a cleaning head arranged in a fixed position with respect to the camera so that part of the head, that bears cleaning means, is arranged along the optical axis behind the lens. The cleaning device is applicable to the cleaning of reversing cameras positioned at the rear of the vehicle and oriented in such a way as to capture images of a road scene extending to the rear of the vehicle.

Abstract: Disclosed is an automatic camera lens cleaning system. In one embodiment, the present invention includes a blower assembly having a housing with a camera secured thereto. The camera lens of the camera is encircled in an annular member having a plurality of apertures thereon, wherein the apertures are in air communication the interior volume of the housing and a tube connected thereto. The tube is in air communication with an air compressor pump, which is driven by engine or an electronic solenoid and actuated by a central processing unit (CPU) or the like. The air compressor pump can force air through the apertures so as to clean the camera lens. The CPU is adapted to actuate the air compressor pump when the vehicle transmission is set in reverse, when there is debris on the camera lens, and/or when the camera is initiated through a user interface.

Abstract: Provided is an apparatus for cleaning and sterilizing an interior of a shoe which generates ultrasonic wind of a whirlwind type in the interior of the shoe to remove foreign substances from the interior of the shoe and which injects ultra fine particles of germicide solution into the interior of the shoe at a high pressure to sterilize the interior of the shoe, so that the interior of shoe may be hygienically and cleanly maintained.

Abstract: An apparatus for cleaning a substrate includes a substrate transferring unit configured to support a substrate at a polar angle from a first direction, and transfer the substrate along a second direction orthogonal to the first direction. A cleaning unit is disposed on the substrate transferring unit. The cleaning unit includes a plurality of two-fluid nozzles. The cleaning unit has an azimuth angle from the first direction. The two-fluid nozzles mix a cleaning solution and compressed gas together and spray the mixture.

Abstract: A medium strength, liquid solvent, spray brush station system gently cleans surfaces of components during nano- and microtronics processing in cleanroom facilities. This system includes intermediate strength, yet effective surface cleaning with minimal damage to subject nano and microtronics components. Moreover, the instrument is compatible with a cleanroom environment, and provides self contained, easily manageable disposition of the peripheral mess and waste resulting from the cleaning process.

Abstract: A device (1) for removing a coating, particularly a photoresist, from a substrate (10) in at least one area of the substrate (10), comprises a nozzle (11) suitable for applying a jet of a solution medium to the substrate.

Abstract: A drain line access device is provided for flushing HVACR drain lines. The device includes a main body having input and outlet connection ports on opposite ends for inline installation to a drain line, a flapper assembly sized and configured for seated placement in an interior cavity of the main body, and a removable top cover. The flapper assembly includes a flapper holder, a flapper, a flapper seat, and a spring hinge for rotatably urging the flapper into the normally raised position. An injection port is provided on the top cover for delivering a flow of pressurized gas or liquid for flushing out a clog in the drain line. In operation, delivery of pressurized gas or fluid into the drain line forces the flapper against the flapper seat, thereby sealing off one of the respective ends of the main body and directing the pressurized gas into the drain line.

Abstract: In accordance with an embodiment of the present invention, a method of polishing a device includes providing a layer having a non-uniform top surface. The non-uniform top surface includes a plurality of protrusions. The method further includes removing the plurality of protrusions by exposing the layer to a fluid that has gas bubbles and a liquid.

Abstract: The present invention provides: a nanofluid generating apparatus that has relatively simple construction, is capable of stably generating nanobubbles, is easy to handle and makes it possible to reduce manufacturing cost; and a cleaning apparatus that uses nanofluid. An apparatus for generating nanofluid containing nanobubbles, wherein the nanobubbles are gas bubbles with diameter less than 1 ?m, comprising: a gas-liquid mixing chamber 7 for mixing gas and liquid; and a pressurization pump 4 and an air intake valve 21 for supplying the pressurized gas and liquid to the gas-liquid mixing chamber, wherein the gas-liquid mixing chamber comprises therein: a turbulence generating means Z having projecting lines 9 and grooves 10, 12, and a conical section 11, for forcibly mixing the supplied gas and liquid by generating turbulence therein; and a nano-outlet 20 for turning the forcibly mixed gas and liquid mixture into nanofluid having nano bubbles and discharging the nanofluid.

Abstract: The present invention relates to a dishwasher. The dishwasher of the present invention may include a sump for holding cleaning water, a cleaning pump for pumping the cleaning water from the sump, a spray arm for spraying the cleaning water through two or more nozzles, a supply flow passage for forming a flow passage to supply the cleaning water pumped by the cleaning pump to the spray arm, and an air mixing unit for drawing external air to spray the cleaning water through the nozzles together with the air. The air mixing unit may be mounted between the nozzle which sprays the cleaning water and an inlet of the supply flow passage connected to the spray arm, or the end of the supply flow passage connected to the spray arm. Accordingly, the washability of the dishwasher can be improved without increasing the amount of water used.

Abstract: The cleaning apparatus includes a reservoir tank for reserving a cleaning fluid, a pressure-feed unit for feeding the cleaning fluid while pressurizing the cleaning fluid above the atmospheric pressure, a heating unit for heating the cleaning fluid pressure-fed from the pressure-feed unit above an atmospheric pressure boiling point of the cleaning fluid, a gas supply unit for supplying a gas and an injection unit connected to the heating unit and the gas supply unit for injecting the cleaning fluid pressurized by the pressure-feeding unit and heated by the heating unit as a pressurized superheated cleaning fluid and the gas supplied from the gas supply unit to the member at the same time.

Abstract: An cleaning solution producing apparatus according to an embodiment includes: a mixing unit configured to produce a liquid mixture by mixing a hydrogen peroxide solution into an acidic or alkaline liquid, and to raise the pressure of the produced liquid mixture by use of an oxygen gas produced through the decomposition of the hydrogen peroxide solution, or by use of vapor produced by heat of the reaction; and a bubble producing unit configured to produce multiple fine bubbles in the liquid mixture by releasing the pressure of the liquid mixture which is raised by the mixing unit.

Abstract: A microbubble cleaning system includes a tank in which a solution into which a product is immersed to clean the product is stored; supplying means for putting microbubbles into the solution and supplying the solution that includes the microbubbles into the tank; oil separating apparatus that collects bubbles that have risen to a surface of the solution stored in the tank as a result of cleaning the product, as well as a portion of the solution that is near the surface of the solution, in order to separate oil from the solution; generating means for generating a surface flow of the solution near the surface of the solution in order to remove the bubbles that have risen to the surface of the solution in the tank; and removing means for removing carbon dioxide from air that is used to generate the microbubbles by the supplying means.

Abstract: A substrate processing method and apparatus for preventing evaporation of an anti-drying fluorine-containing organic solvent from a substrate during transportation of the substrate into a processing container and can prevent decomposition of a fluorine-containing organic solvent in the processing container. A substrate, the surface of which is covered with a first fluorine-containing organic solvent, is carried into a processing container. The first fluorine-containing organic solvent is removed from the substrate surface by forming a high-pressure fluid atmosphere of a mixture of the first fluorine-containing organic solvent and a second fluorine-containing organic solvent, having a lower boiling point than the first fluorine-containing organic solvent, in the processing container e.g. by supplying a high-pressure fluid of the second fluorine-containing organic solvent into the processing container.

Abstract: A dishwasher comprises a treating chamber for receiving dishes therein for treatment according to a cycle of operation, at least one sprayer providing a spray of liquid into the treating chamber, and an ozone generator for selectively providing ozone gas to the treating chamber for sanitizing the dishes in the treating chamber during a cycle of operation.

Abstract: The present invention provides a delivery system for providing an atomized treatment agent like a cleaner or lubricant to a specific internal location of a closed mechanical system like an internal combustion engine. The atomized treatment agent is delivered via a flexible, non-rigid conduit to the desired internal location of the engine between, e.g., the ID/OD coupling joint between the air inlet hose and the throttle body. A special conduit support guide, the end of which is inserted through the ID/OD coupling joint, provides the proper geometry for gently configuring the conduit to enter the ID/OD coupling joint without crimping and controlling the directional approach and distance of the conduit free end inside the engine.

Abstract: An apparatus and method for cleaning a surface comprising a gas dispensing conduit having a first end connectable to a source of pressurized gas and an open second end such that a stream of pressurized gas may be dispensed from the open second end of the gas dispensing conduit. A liquid dispensing conduit is connectable to a source of liquid and associated with the gas dispensing conduit in such a way that liquid is introduced into the stream of pressurized gas wherein the liquid dispensing conduit allows liquid to be introduced into the stream of pressurized gas at a rate that causes the liquid to contact the surface to be cleaned while substantially preventing the liquid from running off the surface.

Abstract: A washing/drying machine according to the present invention is capable of efficiently performing a drying operation to reduce a drying period. The washing/drying machine includes a tank (11) for storing used water, and the water is circulated from the tank (11) for dehumidification of air circulated through a drying air duct (20). Since the water is circulated from the tank (11), a great amount of water can be supplied as dehumidification water for higher dehumidification efficiency. The amount of the circulated water (the amount of cooling water (dehumidification water)) is reduced in a first half of a drying process, and increased in a second half of the drying process. As a result, the drying efficiency is improved during the drying operation, thereby reducing the drying period.

Abstract: Electrical household appliance comprising a base (1) for the generation of steam, having a liquid tank (6) mounted removably on a receiving socket (10) and having a steam generator located outside of said tank (6), the steam generator being supplied by gravity by a supply line from the tank (6) and having a steam outlet through which the steam can escape towards a work tool, such as a crease-removing brush, said supply line comprising an inlet orifice located on the receiving socket (10), and said tank (6) comprising a closed enclosure (61) having only one outlet orifice (52) which connects the said inlet orifice when the tank is placed on the receiving socket (10), which appliance is characterized in that said tank (6) connects leaktightly onto said receiving socket (10) and in that said appliance has a vent line admitting air to the outlet orifice (52) of the tank, said vent line having one end connected to the exterior which is higher than the outlet orifice (52) of the tank.

Abstract: A cleaning apparatus in which a cleaning process is simplified, a time required for the cleaning process is reduced and which has an excellent cleaning effect, and a high pressure cleaner for use therein are provided.

Abstract: Disclosed are methods and apparatus for cleaning heat exchangers and similar vessels by introducing chemical cleaning solutions and/or solvents while maintaining a target temperature range by direct steam injection into the cleaning solution. The steam may be injected directly into the heat exchanger or into a temporary side stream loop for recirculating the cleaning solution or admixed with fluids being injected to the heat exchanger. The disclosed methods are suitable for removing metallic oxides from a heat exchanger under chemically reducing conditions or metallic species such as copper under chemically oxidizing conditions. In order to further enhance the heat transfer efficiency of heating cleaning solvents by direct steam injection, mixing on the secondary side of the heat exchanger can be enhanced by gas sparging or by transferring liquid between heat exchangers when more than one heat exchanger is being cleaned at the same time.

Abstract: A washing unit for turboprops of aircraft is disclosed, which comprises a hydropneumatic accumulator suitable for supplying, at a controlled pressure, a washing fluid contained therein, and a filling member, motorized and manual, for feeding the washing fluid into the accumulator. The accumulator may be connected alternatively to the motorized filling member or to the manual filling member. A manually actuated device is also provided for pressurization of the accumulator, so that the washing unit can be used both in areas equipped for this operation and in areas not so equipped.

Abstract: The invention is directed to a method for at least partially removing a contamination layer (15) from an optical surface (14a) of an EUV-reflective optical element (14) by bringing a cleaning gas into contact with the contamination layer. In the method, a jet (20) of cleaning gas is directed to the contamination layer (15) for removing material from the contamination layer (15). The contamination layer (15) is monitored for generating a signal indicative of the thickness of the contamination layer (15) and the jet (20) of cleaning gas is controlled by moving the jet (20) of cleaning gas relative to the optical surface (14a) using this signal as a feedback signal. A cleaning arrangement (19 to 24) for carrying out the method is also disclosed. The invention also relates to a method for generating a jet (20) of cleaning gas and to a corresponding cleaning gas generation arrangement.