Abstract: Provided are a substrate treatment method and a substrate treatment equipment enabling greater suppression of corrosion or oxidation of metal wiring exposed on a substrate surface. The present invention relates to a substrate treatment equipment having a treatment chamber wherein a substrate is disposed, and whereto a substrate treatment solution for treating the substrate is supplied. This equipment is provided with an inert gas filling mechanism for filling with an inert gas the interior of the treatment chamber wherein the substrate is disposed, and, near or inside the treatment chamber, a catalytic unit filled with a platinum-group metal catalyst wherethrough a hydrogen-dissolved water including hydrogen added to ultra-pure water is passed. Obtained by passing the hydrogen-dissolved water through the platinum-group metal catalyst, a hydrogen-dissolved treatment solution is supplied as the substrate treatment solution into the treatment chamber by the equipment.

Abstract: The present invention relates to an apparatus (20) for clearing a plugged control line (12), in particular for clearing a plugged surface controlled sub-surface safety valve (11) control line (12), the apparatus (20) comprising a connecting means (27) configured to connect the apparatus (20) to an upstream end of the plugged control line (12); and a pumping means (21, 22) configured to pump a dissolvent (30) through the connecting means (27) into the control line (12) to build up dissolvent pressure in the control line (12). The invention further comprises a bore system and a method for clearing a plugged control line (12).

Abstract: A machine is cleaned by directing a foam detergent into the machine to remove contaminants from inside the machine. An effluent portion of the foam detergent exits from the machine with some of the contaminants. One or more of a turbidity, a salinity, an amount of total dissolved solids, or a concentration the contaminants in the effluent is measured. A cleaning time period during which the foam detergent is to be directed into the machine is determined based on the turbidity, the salinity, the amount of total dissolved solids, and/or the contaminant concentration that is measured from the effluent. The foam detergent continues to be directed into the machine during the cleaning time period, and the flow of the foam detergent into the machine is terminated on expiration of the time period.

Abstract: A fluid mixing device includes a plurality of nozzles, each having a converging chamber, at least one chemical injection port, a diverging chamber, a nozzle throat, and an adjustable self-opening valve. The fluid mixing device provides for improvements in mixing fluids.

Abstract: There is provided a sink including: a washing case that is divided into a plurality of spaces including a dishwashing space; a table on which the washing case is mounted; a dish rack that is detachably provided the dishwashing space and having a washing nozzle rotatably installed on a bottom; a sump assembly that is mounted on a bottom surface of the dishwashing space and stores washing water to be supplied to the washing nozzle in a state where the dish rack is mounted on the dishwashing space; and a washing cover that slides horizontally above the dishwashing space to be inserted into the table or to cover an opened upper surface of the dishwashing space, in which the washing cover includes an operation unit for inputting operating command for dishwashing and a display unit for displaying various information.

Abstract: A control box for a sprayer system is provided. The control box may include a wash flow path, a wash flow solenoid disposed in the wash flow path, a detergent supply assembly disposed in wash flow path, a rinse flow path, a rinse flow solenoid disposed in the rinse flow path, a common flow path, a flow switch disposed in the common flow path, an alternating relay, and a connection valve leading to a discharge flow path. The flow switch may be configured to provide a signal to the alternating relay. The alternating relay may be configured to control both the wash flow solenoid and the rinse flow solenoid. The connection valve may receive both the wash flow path and the rinse flow path. In another embodiment, a sprayer system including a control box and a sprayer unit is provided.

Abstract: A substrate processing apparatus includes a processing liquid supply mechanism 70 configured to supply a SPM liquid to a substrate; a temperature adjusting unit (heater) 303 configured to adjust a temperature of the SPM liquid at a time when the SPM liquid is supplied to the substrate from the processing liquid supply mechanism 70; an acquisition unit (temperature sensor) 80 configured to acquire temperature information of the SPM liquid on a surface of the substrate; and a control unit 18 configured to set an adjustment amount of the temperature adjusting unit (heater) 303 based on the temperature information of the SPM liquid acquired by the acquisition unit (temperature sensor) 80. The temperature adjusting unit (heater) 303 adjusts, based on the adjustment amount set by the control unit 18, the temperature of the SPM liquid at the time when the SPM liquid is supplied to the substrate.

Abstract: The present invention provides a liquid supplying device that can determine whether a CLC can be used appropriately. A liquid supplying device for supplying a liquid from a liquid source to a cleaning device is provided. The liquid supplying device includes a flow rate control device that measures a flow rate of a liquid from the liquid source and controls the flow rate based on the measured value, an IN-side pressure gauge provided between the liquid source and the flow rate control device and an OUT-side pressure gauge provided between the flow rate control device and the cleaning device.

Abstract: The present invention relates to an apparatus designed to control the application of the previously uncontrollable reaction of a peroxide composition and an alkaline composition, and accurately maintain the desired composition ratios for removal of and destruction of microbiological and organic contamination on a surface safely and without waste of the materials. The apparatus may also be used to maintain the highest demulsifying and antimicrobial activity of an organic acid composition blended with a peroxide composition by limiting contact time and the level of degradation of the components of the organic acid composition. A method of using the apparatus is provided for removing biofilm, bacteria, fungal cells, spores, fragments, and hyphae, microbiological slime, and organic contaminants from porous and non-porous surfaces, maintaining the integrity and life expectancy of the substrates, and increasing their resistance to new biofilm formation and microbiological deposition.

Abstract: A substrate treatment device according to an embodiment includes a placement portion on which a substrate is placed and rotated, a liquid supply portion which supplies a liquid to a surface on an opposite side to the placement portion of the substrate, a cooling portion which supplies a cooling gas to a surface on a side of the placement portion of the substrate, and a control portion which controls at least one of a rotation speed of the substrate, a supply amount of the liquid, and a flow rate of the cooling gas. The control portion brings the liquid present on a surface of the substrate into a supercooled state and causes at least a part of the liquid brought into the supercooled state to freeze.

Abstract: A substrate processing apparatus includes a spray nozzle that allows a plurality of liquid droplets to collide with a substrate held by a spin chuck, a liquid piping that supplies a mixed liquid of water and a chemical liquid to the spray nozzle, a first flow control valve and a second flow control valve each of which changes the concentration of the chemical liquid in the mixed liquid, and a controller that causes the liquid piping to supply the mixed liquid having a concentration of the chemical liquid determined in accordance with a substrate to be processed.

Abstract: A glass rinser apparatus is provided. The glass rinser apparatus may include a spray nozzle configured to output a liquid, a shank configured to be coupled at a first end to the spray nozzle, and to transmit the liquid to the spray nozzle, and a nut configured to be coupled to the second end of the shank. The shank may be shaped so that the shank does not rotate when the nut is coupled to the second end of the shank. The cross section of the shank may be substantially circular, and may include at least one flat portion.

Abstract: A system for cooling motor vehicles, having a covering subsystem having a shelter and a plurality of side walls being configured to accommodate a motor vehicle is provided. The system also has a nebulization subsystem fastened to an internal side wall of the shelter and has a plurality of nozzles configured to spray inside the covering subsystem microscopic droplets of water, the microscopic droplets of water being suitable to evaporate and realize an adiabatic transformation arranged to lower the temperature inside the covering subsystem. The invention also relates a method to realize the system for cooling motor vehicles.

Abstract: A remote activation dispenser for dispensing fluids. An actuating device positioned on a dispensing tube is operably connected to a flexible link that is operably connected to a valve in a dispenser by a rigid link. Upon manipulation of the actuating device, the valve is actuated for passing or cutting off fluids from the dispenser to the dispensing tube.

Abstract: There is provided a sink including: a washing case that is divided into a plurality of spaces including a dishwashing space; a table on which the washing case is mounted; a dish rack that is detachably provided in the dishwashing space and having a washing nozzle rotatably installed on a bottom; a sump assembly that is mounted on a bottom surface of the dishwashing space and stores washing water to be supplied to the washing nozzle in a state where the dish rack is mounted on the dishwashing space; and a washing cover that slides horizontally above the dishwashing space to be inserted into the table or to cover an opened upper surface of the dishwashing space, in which the washing cover includes an operation unit for inputting operating command for dishwashing and a display unit for displaying various information.

Abstract: A bus arrangement includes: a coordinator; a first subscriber; a second subscriber; and a bus. The bus includes: a first signal line coupling the first subscriber and the coordinator; a second signal line connecting the second subscriber to the first subscriber; and at least one bus line connecting the coordinator to the first subscriber and the second subscriber. The coordinator is configured to send a message via the at least one bus line to the second subscriber with a command to activate the first subscriber via the second signal line. The first subscriber includes a first current sensor and the second subscriber includes a switchable current source. The second signal line couples the first current sensor with the switchable current source.

Abstract: The present invention relates to an apparatus designed to control the application of the previously uncontrollable reaction of a peroxide composition and an alkaline composition, and accurately maintain the desired composition ratios for removal of and destruction of microbiological and organic contamination on a surface safely and without waste of the materials. The apparatus may also be used to maintain the highest demulsifying and antimicrobial activity of an organic acid composition blended with a peroxide composition by limiting contact time and the level of degradation of the components of the organic acid composition. A method of using the apparatus is provided for removing biofilm, bacteria, fungal cells, spores, fragments, and hyphae, microbiological slime, and organic contaminants from porous and non-porous surfaces, maintaining the integrity and life expectancy of the substrates, and increasing their resistance to new biofilm formation and microbiological deposition.

Abstract: A method for collecting and filtering biological material from blood and other fluids during a surgical procedure includes: attaching a first cover including a suction port and an intake port to a collection trap; attaching a suction source to the suction port; attaching an instrument to the intake port, through which blood and tissue are suctioned and received into the collection trap; filing the collection trap with blood and tissue; removing the collection trap from the first cover; attaching a second cover to the collection trap in place of the first cover, the second cover including a suction port and a plunger, the plunger including a press head having a screen portion permitting blood and other fluids to pass; attaching a suction source to the suction port of the second cover; separating the blood from the tissue by deploying the plunger; and drawing off the blood through the suction port.

Abstract: A substrate cleaning apparatus includes: a pure water supply line provided with a pure water flow regulator and a pure water supply valve; chemical supply lines each provided with a chemical flow regulator and a chemical supply valve; a merging line where pure water and a plurality of liquid chemicals meet to form a cleaning liquid; a cleaning liquid supply line configured to supply the cleaning liquid to a substrate; and a controller configured to control the pure water flow regulator, the pure water supply valve, the chemical flow regulators, and the chemical supply valves such that the pure water and the plurality of liquid chemicals are present at a predetermined ratio at a meeting point.

Abstract: The present invention provides a liquid supplying device that can determine whether a CLC can be used appropriately. A liquid supplying device for supplying a liquid from a liquid source to a cleaning device is provided. The liquid supplying device includes a flow rate control device that measures a flow rate of a liquid from the liquid source and controls the flow rate based on the measured value, an IN-side pressure gauge provided between the liquid source and the flow rate control device and an OUT-side pressure gauge provided between the flow rate control device and the cleaning device.

Abstract: Embodiments of the present invention include a hose handling system having a hose guide plumbed via a wash line to a fluid delivery device. The hose guide includes a pulley installed on a frame member, and a spray nozzle adapted to dispense a wash mixture. The hose guide is adapted to guide a hose as the hose is inserted into or withdrawn from a manhole, with the hose traversing the pulley. The wash mixture can be delivered through a wash line to the hose guide, which sprays the wash mixture on the hose in order to reduce or eliminate gross contamination or microbial contamination on the hose. The wash mixture typically, but not necessarily, has a freezing point below 32° F. and includes: a quaternary ammonium compound, an alcohol or glycol, an alcohol ethoxylate, and a fragrance.

Abstract: An analyzer for use with in vitro diagnostics includes an automation system to move a plurality of sample carriers within the system. At least some carriers include a plurality of slots. Each slot is configured to hold one of a plurality of fluid containers. The system also includes a place and pick device configured to place the plurality of fluid containers into the plurality of slots and remove the plurality of fluid containers from the plurality of slots. The system further includes a controller configured to place mother sample tubes along with empty sample tubes into the same carrier and move the carrier to an existing pipettor within the analyzer to aliquot a sample portion of the mother sample into the empty daughter tubes to create aliquots for certain samples without requiring a standalone aliquoting station or substantially disrupting the normal flow of sample tubes within the automation system.

Abstract: A warewasher includes a liquid recirculation system for spraying wares with wash liquid from a collecting tank. The warewasher includes a filter arrangement for capturing food debris in a wash spray before the wash spray reaches the wares being cleaned.

Abstract: A composite friction unit of a three dimensional composite body is formed in a system for continuous process manufacturing of composite friction units. The system uses a plurality of rolls of reinforcing fiber fabrics, a resin dispensing system that receives a panel of reinforcing fiber fabric from each one of the rolls and separately dispenses resin through a plurality of dispensing tubes, each associated with a different panel, onto a surface of each panel. A forming die is positioned to receive the plurality of panels of reinforcing fiber fabric after resin is dispensed onto the panels and is configured to form a composite panel from the plurality of panels of reinforcing fiber fabrics. A cutting mechanism cuts a desired shape part from the composite panel.

Abstract: A system for continuous process manufacturing of composite friction units uses one or more array gates with a plurality of cutouts each sized to receive one of a plurality of reinforcing fiber fabric therethrough. The system also uses a resin plenum with plenum chamber and a plurality of dispensing tube assemblies. Each of the plurality of dispensing tube assemblies corresponds to a different cutout and includes dispensing bores positioned to dispense resin onto one of the reinforcing fiber fabrics. The system also uses a forming die that receives the reinforcing fiber fabrics with the resin to form a composite panel as they pass through the forming die.

Abstract: Provided are a supply apparatus and a supply method for supplying fluid carbon dioxide that are energy-saving and efficient. The supply apparatus for supplying fluid carbon dioxide includes: a circulation system including a purifying unit that removes impurities and contaminants from the carbon dioxide, a storage unit that includes a condenser for changing gaseous carbon dioxide passed through the purifying unit into liquid carbon dioxide, a supply unit that includes a first pump for supplying the liquid carbon dioxide in the storage unit to a use point, and a return line through which excess carbon dioxide supplied from the supply unit but not used at the use point is returned to the storage unit; and a carbon dioxide introduction unit that introduces carbon dioxide, as a starting material or recovered gas, to the circulation system.

Abstract: A washing device comprises a fluid dispenser that operably directs a cleaning fluid to contact one or more objects to be cleaned, the one or more objects to be cleaned being contained by the washing device, a dispensing line directing the cleaning fluid to the fluid dispenser, a compressed air source, an air valve selectively controlling flow of air from the compressed air source into the dispensing line, a cleaning fluid source, a pump selectively pumping the cleaning fluid from the cleaning fluid source into the dispensing line, and a controller. The controller alternatingly activates (a) the pump to pump the cleaning fluid from the cleaning fluid source into the dispensing line and (b) the air valve to force the cleaning fluid from the dispensing line via the fluid dispenser.

Abstract: An apparatus for freeze drying a substrate is provided. A chamber for receiving a substrate is provided. An electrostatic chuck (ESC) for supporting and electrostatically clamping the substrate is within the chamber. A temperature controller controls the temperature of the electrostatic chuck. A condenser is connected to the chamber. A vacuum pump is in fluid connection with the chamber.

Abstract: A water-conducting domestic appliance, in particular a domestic dishwasher, the water-conducting domestic appliance including a washing compartment for receiving items therein that are to be subjected to a washing cycle by the water-conducting domestic appliance; a detergent dosing system, the detergent dosing system having a detergent dispenser with a receiving compartment, the receiving area for receiving at least one cartridge that is configured to hold at least one detergent; and a cartridge having separate chambers for storing at least two detergents, each chamber having a storage capacity for storing detergent that is greater than a quantity of detergent required for one washing cycle.

Abstract: A floor scrubbing apparatus includes a reservoir for an aqueous salt solution disposed in the floor scrubbing apparatus. An immersion device comprising a submersible housing with at least two iridium-coated electrodes spaced apart from each other within the submersible housing is adapted to be immersed into the reservoir. The floor scrubbing apparatus also includes a control module electrically coupled to the electrodes, wherein the control module controls application of electricity to cause a first electrode to be positively charged and a second electrode to be negatively charged. At least one of a distance and an angle or angles between the at least two iridium-coated electrodes is adjustable for the control module to control the application of electricity to the electrodes in a manner to perform electrochemical activation (ECA) of the aqueous salt solution in the reservoir to create an ECA product solution.

Abstract: A water-conducting domestic appliance, in particular a domestic dishwasher, the water-conducting domestic appliance including a washing compartment for receiving items therein that are to be subjected to a washing cycle by the water-conducting domestic appliance; and a detergent dosing system, the detergent dosing system having a detergent dispenser with a receiving compartment, the receiving area for receiving at least one cartridge that is configured to hold at least one detergent, the detergent dosing system having the capability to store a quantity of detergent greater than a quantity needed for a single washing cycle and the detergent dosing system having an apparatus for detecting a fill level in at least one of the detergent dispenser and the at least one cartridge.

Abstract: The invention is directed to a novel dishwasher-dining table combination appliance having a rotatable, invertible top dining insert panel that allows for cleaning dining utensils and the like without having to remove them from a table. The invention provides for a compact, self-contained, system useful in a variety of locations and applications where reductions in the length of time required for cleaning, storing and replacing dining utensils on a table are advantageous.

Abstract: A automatic car washing apparatus is provided with a preparation station including a spray bar joined with an armature. The spray bar is manually moveable to selectively spray certain portions of a vehicle determined by the attendant. The armature provides forces to assist the user in manually manipulating the spray bar to prepare the vehicle to undergo subsequent and/or additional washing or cleaning procedures. A related method is also provided.

Abstract: Provided are a substrate processing apparatus and method. The substrate processing apparatus includes a substrate support member on which a substrate is placed and a movable spray member supplying a fluid onto the substrate placed on the substrate support member. The movable spray member includes a first nozzle arm rotating to spray at least one fluid and a second nozzle arm disposed on the first nozzle arm to spray at least one fluid.

Abstract: A water-conducting domestic appliance, in particular a domestic dishwasher, the water-conducting domestic appliance including a washing compartment for receiving items therein that are to be subjected to a washing cycle by the water-conducting domestic appliance; a door movable between an open position for permitting access to the washing compartment and a closed position for preventing access to the washing compartment; and a detergent dosing system, the detergent dosing system having a detergent dispenser with a receiving compartment, the receiving compartment for receiving at least one cartridge that is configured to hold at least one detergent, the detergent dosing system having the capability to store a quantity of detergent greater than a quantity needed for a single washing cycle and the one receiving compartment being configured such that, in the event that the door is partially opened, at least one cartridge can be inserted into the receiving compartment.

Abstract: A water-carrying household appliance is provided that has a housing; a treatment chamber; and an automatic dosing system within the housing. The automatic dosing system has a reservoir for a liquid treatment agent and a delivery pump within the reservoir. The household appliance further includes a controller to control the automatic dosing system.

Abstract: Semiconductor wafers are cleaned, dried, and hydrophilized the following steps in the order stated: a) treating the semiconductor wafer with a liquid aqueous solution containing hydrogen fluoride, the semiconductor wafer rotating about its center axis at least occasionally, and b) drying the semiconductor wafer by rotation of the semiconductor wafer about its center axis at a rotational speed of 1000 to 5000 revolutions per minute in an ozone-containing atmosphere, the liquid aqueous solution containing hydrogen fluoride flowing away from the semiconductor wafer on account of the centrifugal force generated by the rotation, and the surface of the semiconductor wafer being hydrophilized by ozone.

Abstract: Disclosed are a liquid processing apparatus and a liquid processing method that can prevent a substrate in a processing chamber from being contaminated due to contamination attached to a nozzle supporting arm that supports a nozzle. The liquid processing apparatus of the present disclosure includes: a processing chamber having a substrate holding unit configured to hold a substrate and a cup disposed around the substrate holding unit; a nozzle configured to supply a fluid to the substrate held by the substrate holding unit; and a nozzle supporting arm configured to support the nozzle. An arm cleaning unit configured to clean the nozzle supporting arm is installed in the liquid processing apparatus.

Abstract: A washing machine according to an exemplary embodiment of the present invention includes a washing tub that washes laundry; a storage drawer provided under the washing tub; a detergent bottle seat provided inside of the storage drawer, a detachable detergent bottle containing a liquid detergent being seated on the detergent bottle seat; a detergent bottle connecting part connected to the detergent bottle, the liquid detergent flowing into through the detergent bottle connecting part; and a detergent pump that supplies the liquid detergent to the washing tub.

Abstract: A substrate cleaning apparatus capable of removing particles that exist in minute recesses formed on a substrate surface is disclosed. The substrate cleaning apparatus includes a substrate holder configured to hold a substrate; and a two-fluid nozzle configured to deliver a two-fluid jet onto a surface of the substrate. The two-fluid nozzle includes a first jet nozzle configured to emit a first two-fluid jet and a second jet nozzle configured to emit a second two-fluid jet at a velocity higher than a velocity of the first two-fluid jet, and the second jet nozzle surrounds the first jet nozzle.

Abstract: A substrate processing method that is a method for removing a resist, the surface layer of which has been cured, from a substrate having a pattern disposed inside the resist and includes an SPM supplying step of supplying an SPM, formed by mixing sulfuric acid and a hydrogen peroxide solution, to the substrate and a liquid temperature increasing step of changing, in parallel to the SPM supplying step, a mixing ratio of the sulfuric acid and the hydrogen peroxide solution used to form the SPM to increase the liquid temperature of the SPM supplied to the substrate in the SPM supplying step.

Abstract: A treatment agent metering information evaluator of a washing machine includes a reader that reads portion-wise metering information from an information carrier of a storage container that is in close proximity to the reader, a controller that receives the portion-wise metering information from the reader, a meter that meters portions of treatment agent from the storage container into a treatment process of a washing treatment program, and storage that stores empirical information about experiences of the use of the treatment agent during the treatment process for subsequent application of the treatment agent. The reader includes a transmitter for transmitting the empirical information.

Abstract: A substrate treating apparatus including a support member configured to support a substrate container configured to surround an upper portion of the support member, a nozzle member including at least one nozzle, which is configured to spray a treating solution onto the substrate disposed on the support member, and a treating solution supply unit connected to the nozzle and configured to supply the treating solution to the nozzle through a main tube may be provided.

Abstract: Embodiments provided herein describe systems and methods for processing substrates. A substrate having a plurality of site-isolated regions defined thereon is provided. A plurality of wet processes is simultaneously performed. Each of the plurality of wet processes is performed on one of the plurality of site-isolated regions defined on the substrate. The simultaneously performing includes exposing each of the plurality of site-isolated regions to one of a plurality of wet processing formulations. Each of the plurality of wet processing formulations includes a component. The respective component is added to at least some of the plurality of wet processing formulations during the exposing. A processing condition is varied between at least two of the plurality of wet processes in a combinatorial manner.

Abstract: A substrate cleaning apparatus includes: a pure water supply line provided with a pure water flow regulator and a pure water supply valve; chemical supply lines each provided with a chemical flow regulator and a chemical supply valve; a merging line where pure water and a plurality of liquid chemicals meet to form a cleaning liquid; a cleaning liquid supply line configured to supply the cleaning liquid to a substrate; and a controller configured to control the pure water flow regulator, the pure water supply valve, the chemical flow regulators, and the chemical supply valves such that the pure water and the plurality of liquid chemicals are present at a predetermined ratio at a meeting point.

Abstract: A device for feeding milk from a storage container (8) to a dispensing device (3), containing a feeding line (9), whose intake end (9a) is detachably connected to the storage container (8), and with a cleaning possibility for at least a portion of the exterior of the feeding line (9). In order to enhance a device of this type such that the cleaning is simplified, a cleaning mechanism (11) be provided for the exterior of the feeding line (9), which comprises a rinsing area (12) for holding the portion of the feeding line (9) that is to be cleaned. The rinsing area (12) contains a hot water intake opening, a steam intake opening, a cleaning agent intake opening, or cold water intake opening (17), and also a connection opening (14) for the detachable introduction of the portion to be cleaned.

Abstract: Methods and systems are provided for preparing a ruthenium containing liner/barrier for metal deposition, and are useful in the manufacture of integrated circuits. In accordance with one embodiment, a borohydride solution having a pH greater than 12 is mixed with DI water at the place of application to form a pretreatment solution. The pretreatment solution is applied to reduce a ruthenium-containing surface of a substrate. Following reduction of the ruthenium containing surface, copper deposition may be initiated.

Abstract: A chamber with a fluid distribution network for uniform fluid flow within the chamber is provided. The chamber includes a first chamber wall that has a first surface and an opposing interior surface. The first surface is formed with a first set of channels, and the interior surface is exposed to the interior of the chamber and includes a plurality of interior ports that are connected to a plurality of the first set of channels. The chamber also includes a second chamber wall that has a second surface and an opposing exterior surface. The second surface has a second set of channels that partially intersect the first set of channels when the first surface is mated with the second surface. The exterior surface also includes at least one exterior port that provides access to the second set of channels.

Abstract: A substrate processing method and apparatus for preventing evaporation of an anti-drying fluorine-containing organic solvent from a substrate during transportation of the substrate into a processing container and can prevent decomposition of a fluorine-containing organic solvent in the processing container. A substrate, the surface of which is covered with a first fluorine-containing organic solvent, is carried into a processing container. The first fluorine-containing organic solvent is removed from the substrate surface by forming a high-pressure fluid atmosphere of a mixture of the first fluorine-containing organic solvent and a second fluorine-containing organic solvent, having a lower boiling point than the first fluorine-containing organic solvent, in the processing container e.g. by supplying a high-pressure fluid of the second fluorine-containing organic solvent into the processing container.

Abstract: A dispenser (10) is disclosed for dispensing a single object (22, 24) at a time, such as a tablet or the like. The dispenser includes a reservoir (26) to contain tablets and an opening in the reservoir sized to pass the tablets. A chute (30) is defined by a wall adjacent to the opening in the reservoir, and defines a dispensing path (39). The movable dispensing guide (32) has a retracted position that does not prevent the advance of tablets along the dispensing path, and an advanced position that intersects the dispensing path between the first and second tablets (22, 24) in the dispensing path. When advanced, the movable dispensing guide allows the first tablet in line to be dispensed from the path, and prevents the second tablet in line from advancing. An actuator is operable to move the movable dispensing guide from its retracted position to its advanced position.