Abstract: A method of making a magnetoresistance sensor which detects stored information from a medium and which provides an output voltage to a auxiliary circuitry is disclosed. The method comprises sputtering a bias layer in a sputtering gas mixture of nitrogen and argon. A spacer layer is also formed in a sputtering gas mixture of nitrogen and argon. Finally, an MR magnetic layer is formed. The spacer layer is positioned between the bias layer and the magnetic layer. The output voltage is provided to auxiliary circuitry when a current flows through the MR magnetic layer.

Abstract: High-saturation magnetization composite soft magnetic films can be deposited with sintered targets made of preferably at least two kinds of powders/elements with much lower saturation magnetization than that of the deposited soft magnetic films. Such a high-saturation magnetization composite soft magnetic film can be deposited by sputtering a plurality of species from a sintered target that forms a film of a material of higher saturation magnetization than that of the species.

Abstract: A method of sputtering a target, comprising steps of: (a) providing a magnetically enhanced sputtering apparatus comprising a sputtering target having a first, sputtering surface and a second, opposing surface in electrical contact with a cathode electrode of the sputtering apparatus; (b) sputtering the first surface of the target to form a first erosion track therein; (c) removing the target from the sputtering apparatus when the first erosion track reaches a predetermined depth below the first surface; (d) reinstalling the sputtering target in the sputtering apparatus such that the second surface is the sputtering surface and the first surface is the opposing surface and is in electrical contact with the cathode via an intervening backing plate comprised of at least one material selected for causing a second erosion track to be formed in the second surface of the target during sputtering therefrom which is laterally displaced from the first erosion track; and (e) sputtering the second surface of the ta

Abstract: An amorphous magnetic recording medium comprising a substrate and an amorphous magnetic layer, where a magnetic domain formation-controlling layer comprising a main phase and 1 to 3 kinds of discrete spherical isolating phases arranged horizontally in lines in the main phase or 1 to 3 kinds of discrete spherical phases vertically stacked one upon another in the main phase is formed on the top side or the bottom side directly or through at least one of other layers to bring the amorphous magnetic layer into a finer magnetic domain structure, can satisfy high density recording.

Abstract: Sputter-deposited amorphous NiNb films on glass or glass-ceramic substrates have good adhesion with the substrates, and reduce lithium migration significantly. Longitudinal magnetic recording media deposited on oxidized NiNb sealing layers have very good magnetic recording performances and are suitable for high density recording application.

Abstract: A high-saturation magnetization composite soft magnetic film can be deposited by magnetron co-sputtering of two or more kinds of materials using targets which have a lower saturation magnetization than that of a single target, which otherwise will be used to produce the resulting composite soft magnetic film. The composite film has a substantially uniform composition and thickness.

Abstract: A facing target sputtering apparatus, comprising: inner and outer spaced-apart, concentric, and coextensive tubular cathodes open at each end, with the inwardly facing surface of the outer cathode and the outwardly facing surface of the inner cathode; a first pair of ring-shaped magnet means extending around the outwardly facing surface of the outer cathode at the ends thereof, with a first polarity magnetic pole facing the outwardly facing surface; a second pair of ring-shaped magnet means extending around the inwardly facing surface of the inner cathode at the ends thereof, with a second, opposite polarity magnetic pole facing the inwardly facing surface; and a substrate positioned in spaced adjacency to an end of the inner and outer cathodes; wherein: magnetic flux lines from the first and second pairs of magnet means uni-directionally pass through portions of an annularly-shaped space between the ends of the inner and outer cathodes, and during sputtering operation, plasma is substantially confined t

Abstract: A magnetic recording medium comprising a substrate 1, an inorganic compound layer 2 which works as a shielding layer, a magnetic layer 3 and a protective layer 4 which are laminated on said substrate; wherein said inorganic compound layer 2 comprises column-like crystal particles 6 and amorphous grain boundary phases isolating said particles 6, wherein said magnetic layer 3 has magnetic particles 14 arranged regularly and epitaxially grows on said inorganic compound layer 2, and wherein the grain sizes and the standard grain size deviation of magnetic particles 14 of said magnetic layer 3 reflect those of said inorganic compound layer 2.

Abstract: A magnetic recording medium which exhibits excellent magnetic characteristics and which can be easily produced is disclosed. A magnetic recording medium containing a non-metallic substrate 1, a non-magnetic undercoat film 3, a cobalt alloy hexagonal closed packed (hcp) (110) textured magnetic film 4, and a protective film 5 formed on the substrate. An orientation-determining film 2, which determines the crystal orientation of an undercoat film provided directly thereon to cause the texture of the undercoat film to be (200), is formed between the substrate 1 and the undercoat film 3. The orientation-determining film 2 has a crystal structure such that columnar fine crystal grains 2a are inclined in a radial direction of the substrate 1, and the ratio of a coercive force in a circumferential direction of the medium (Hcc) to a coercive force in a radial direction of the medium (Hcr); i.e., Hcc/Hcr, is more than 1.

Abstract: A magnetic recording medium comprising a non-magnetic base and a non-magnetic underlayer and a magnetic layer formed in that order on the base, the uniderlayer comprises a non-magnetic polycrystalline material and the magnetic layer comprises magnetic CoCr-based alloy particles, wherein the planar size of the magnetic alloy particles is defined by the planar size of the polycrystalline particles composing the underlayer, and is no greater than 20 nm. The magnetic recording medium is useful for HDDs in particular, having a very high magnetic coercive force and being capable of high recording density.

Abstract: An apparatus and method for fabricating a carbon thin film are disclosed in the present invention. The apparatus includes a vacuum chamber having a substrate mounted therein, a sputter target inside the vacuum chamber facing into the substrate, a cesium supplying unit inside the vacuum chamber in a shape of a shield to a circumference of the target and supplying cesium vapor onto a surface of the sputter target through a plurality of openings, and a heating wire surrounding the cesium supplying unit and maintaining the cesium supplying unit at a constant pressure.

Abstract: A method for fabricating a transducer with landing pads without edge fences is described. The pad shape and location are defined by voids in a photoresist formed using prior art methods. Preferably an adhesion layer and then the pad layer are deposited in the voids. A masking layer is preferably vertically deposited on the pad layer to be thinner on the pad material on the sidewall to provide anisotropic protection during the subsequent ashing step. A vertical deposition process minimizes the buildup of the masking layer material on the sidewall of the void in the resist which already contains the fence structures on the sidewall from the previous deposition. The thickness of the masking layer on the surface of the pad layer should be sufficient to protect pad layer during the subsequent ashing step, but the thickness of the masking material at the sidewalls on the pad layer fences should be thin enough so that the fences are not protected during ashing.

Abstract: A magnetic recording medium exhibiting excellent recording and reproduction characteristics is disclosed. A magnetic recording medium includes a non-magnetic substrate 1; a soft magnetic undercoat film 2; an orientation-regulating film 3; a perpendicular magnetic film 4; and a protective film 5, the films being formed on the substrate 1. The soft magnetic undercoat film 2 contains a material represented by the following composition: aFe-bCo-cM-dX1-fN where M is one or more elements selected from Ti, Zr, Nb, Hf, Ta, V, and Mo; X1 is one or more elements selected from Cr, Ga, Al, Si, and Ni; and a, b, c, d, and f represent atomic percentages and satisfy the following relations: 60≦a+b≦90, 30≦a≦90, 5≦c≦20, 0.1≦d≦7, and 3≦f≦30.

Abstract: A silicon nitride self-lubricating layer forms the upper surface of a data storage device, such as a rotating disk or a non-rotating memory device, e.g., a credit card-type memory device using a memory strip. The silicon nitride self-lubricating layer can replace the carbon protective overcoat and liquid lubricant used in conventional data storage devices. The silicon nitride self-lubrication layer provides the desired lubrication and protection between the slider and the data storage device. The silicon nitride layer also will not evaporate under high temperatures found in an optical data storage system. In addition, a data storage device may include a plastic polymer layer over which an iron oxide material is deposited. The use of a plastic polymer layer and iron oxide recording layer is particularly advantageous because a low temperature deposition process can be used with the iron oxide material.

Abstract: A method for coating the tip of a mechanical resonator for use in magnetic force microscopy and magnetic resonance force microscopy in which the tip is coated with a ferromagnetic material and the cantilever is not, and the product resulting from the method. A cantilever and incorporated tip are coated with a photoresist, except that surface tension keeps photoresist off the tip. The cantilever and tip are then coated with a magnetic material. Next, acetone is used to lift off the magnetic material from the cantilever but not from the tip.

Abstract: A magnetic recording medium has a non-magnetic ground layer, a non-magnetic recording layer, a protecting layer formed sequentially on a non-magnetic substrate, one on top of another. A double-layered non-magnetic ground layer consists of a pure chromium layer, positioned closer to a substrate, and a chromium-molybdenum-tungsten ternary alloy layer, positioned closer to a magnetic recording layer. This provides the non-magnetic recording layer formed on such a ground layer with cobalt alloy grains having uniform dimensions. The resulting magnetic recording medium has an excellent SNR.

Abstract: A sputtering system is provided with a substrate and a sputtering material layer that are located in a sputtering chamber. The sputtering material layer has a sputtering surface where atoms of the material are sputtered and the substrate has a forming surface with a site where atoms of the sputtered material are to be formed. The sputtering material layer has a sputtering center which is located at a center of the atoms to be sputtered and the aforementioned site has a periphery with a forming center at a center of the periphery. The sputtering center is offset from the forming center so that shadowing at outer extremities of photoresist masks near the periphery of the substrate is minimized.

Abstract: Perpendicular magnetic recording media having no, or substantially reduced, Barkhausen noise are manufactured by a method comprising steps of: (a) providing a non-magnetic substrate having a surface; (b) providing the surface of the substrate with a unidirectional texture pattern; (c) forming an underlayer of a soft magnetic material over the unidirectional texture pattern, the layer of soft magnetic material having positive magnetostriction and uniaxial magnetic anisotropy and including a multiplicity of magnetic domains; and (d) forming a magnetic recording layer of a hard magnetic material over the underlayer; wherein the uniaxial magnetic anisotropy of the underlayer of soft magnetic material is sufficiently large to orient the magnetic domains thereof along the axis of the uniaxial magnetic anisotropy and thereby restrict domain wall formation and/or movement, whereby generation of Barkhausen noise in the soft underlayer is suppressed.

Abstract: A method of manufacturing a thin film of magnetic material, comprises sputtering magnetic material from a target to a substrate to form a thin film of the magnetic material on the substrate, wherein the ratio of sputtering power in Watt to sputtering pressure in mTorr is greater than one. Thin films of magnetic material made according to the method and magnetic storage media including a thin film of magnetic material made according to the method are also included.

Abstract: A method of texturing the surface of a CSS/landing zone of a substrate for a magnetic recording medium, comprising steps of: (a) providing a disk-shaped substrate having a surface; (b) providing a patterned mask in overlying relation to the substrate surface, (c) selectively implanting ions in portions of the surface of the CSS/landing zone exposed by the patterned mask openings, whereby the height of the selectively ion-implanted portions is increased or decreased relative to the height of non-ion-implanted portions of the CSS/landing zone to form bumps or depressions, thereby providing the surface of the CSS/landing zone with a texture for reducing stiction and friction when the medium is used with a low flying height read/write transducer. Embodiments of the invention include hard disk magnetic recording media with textured CSS/landing zones produced by the inventive ion implation methodology.

Abstract: Various apparatus and methods are provided for handling and transporting pairs of disks. A transfer tool engages a pair of disks in gap merge orientation along the outer perimeter edge of the disks and maintains the orientation while transferring the pair of disks to a second location where the disks are transferred to other equipment or subjected to processing. Various disks carriers are also provided for handling and transporting multiple pairs of disks in gap merge orientation.

Abstract: A method is described comprising forming an insulating polycrystalline seed layer in a first chamber by reactively pulsed DC magnetron sputtering, then forming an insulating amorphous-like seed layer in a second chamber by reactively pulsed DC magnetron sputtering, then forming a conducting seed layer and a ferromagnetic free layer in a third chamber by ion beam sputtering, and then forming the remainder of a spin valve sensor through the antiferromagnetic layer in a fourth chamber by DC magnetron sputtering.

Abstract: A magnetic recording medium comprises, in overlying sequence from a surface of a non-magnetic substrate: at least one Cr-containing or B2-structured underlayer; a substantially non-magnetic CoCrPt alloy intermediate layer; and at least one CoCrPtB ferromagnetic alloy recording layer; wherein the intermediate layer of substantially non-magnetic CoCrPt alloy has a composition which facilitates Co (11.0) or (10.0) crystallographic orientation of the at least one CoCrPtB ferromagnetic alloy recording layer.

Abstract: To present an information recording medium for achieving high density information recording, in particular, a high signal output and a high resolution in magnetic recording, for example, an information recording medium sequentially forming a layer made of soft magnetic material, a layer made of nonmagnetic material, and an information recording layer of ordered alloy with L10 crystal structure selected from group A is manufactured in a specified manufacturing method. Herein the group A is defined to include FePt ordered alloy, CoPt ordered alloy, FePd ordered alloy, and their alloy.

Abstract: There is described a disk processing and manufacturing equipment in which the processing chambers are stacked on top of each other and in which the disks move through the system on disk carriers which are adjustable to take disks of varying sizes. The disks enter the system through a load zone and are then installed into disk carriers. They move in the carriers sequentially through processing chambers at one level and then move to the other level in a lift or elevator. At this other level, the disks again move sequentially through the system on that level and then exit at an unload zone.

Abstract: An exchange coupling film includes a first antiferromagnetic layer formed on a pinned magnetic layer, and a second antiferromagnetic layer formed thereon. A composition ratio of an element X in the first antiferromagnetic layer is larger than that of the second antiferromagnetic layer. Preferably, a non-aligned state is created at an interface between the first antiferromagnetic layer and the pinned magnetic layer, whereby a large exchange coupling magnetic field is obtained upon heat-treatment.

Abstract: A magnetic dipole ring assembly positioned inside a vacuum chamber and around a wafer being sputter deposited with a ferromagnetic material such as NiFe or other magnetic materials so that the material is deposited with a predetermined magnetization direction in the plane of the wafer. The magnetic dipole ring may include 8 or more arc-shaped magnet segments arranged in a circle with the respective magnetization directions precessing by 720° around the ring. The dipole ring is preferably encapsulated in a vacuum-tight stainless steel carrier and placed inside the vacuum chamber. The carrier may be detachably mounted on a cover ring, on the shield, or on the interior of the chamber sidewall. In another embodiment, the magnet is a magnetic disk placed under the wafer. Such auxiliary magnets allow the magnetron sputter deposition of aligned magnetic layers.

Abstract: In the present invention, some layers, the last of which is the Cu film serving as the nonmagnetic layer, are formed on the substrate by means of sputtering performed at a reduced pressure in a film-forming sputtering chamber. The substrate is then exposed in a gas atmosphere in a gas-exposure chamber filled with gas that activates a surface of the Cu film. The remaining layers of the spin valve film are formed on the substrate, in the film-forming sputtering chamber.

Abstract: A magnetic recording medium comprises, on a substrate, a soft magnetic layer, a first seed layer, a second seed layer, and a recording layer having an artificial lattice structure. The first seed layer contains oxide of Fe. The second seed layer contains one of Pd and Pt, Si, and N. The magnetic exchange coupling force in the in-plane direction of the recording layer is weakened by the first seed layer and the second seed layer. Accordingly, minute recording magnetic domains can be formed in the recording layer, and the magnetization transition area is distinct as well. Even when information is recorded at a high density, the information can be reproduced with low noise. A magnetic storage apparatus, which is provided with such a magnetic recording medium, makes it possible to achieve an areal recording density of 150 gigabits/square inch.

Abstract: Uniaxial magnetic anisotropy was found in the Fe/Co/Cu/Co magnetoresistive structures deposited on Si (100) substrates. Samples magnetized along an easy anisotropy axis showed extremely sharp magnetization and magnetoresistance switching at low fields and maximum giant magnetoresistance of 9.5% at 5K (5.5% at room temperature) for the samples with 5 nm of Fe,5 nm of Co, 2.5 nm of Cu and 2 nm of Co. These results were advantageous compared to Co/Cu/Co trilayers grown on Cr/Cu buffer which did not exhibit uniaxial anisotropy. Deposition on spinning wafers allowed excluding substrate related anisotropy. An existing magnetic field in the magnetron sputtering system with the strength of 32 Oe at the sample location was found the most probable source of the induced uniaxial anisotropy.

Abstract: To optimize the yield of sputtered-off material as well as the service life of the target on a magnetron source, in which simultaneously good attainable distribution values of the layer on the substrate, stable over the entire target service life, a concave sputter face 20 in a configuration with small target-substrate distance d is combined with a magnet system to form the magnetron electron trap in which the outer pole 3 of the magnetron electron trap is disposed stationarily and an eccentrically disposed inner pole 4 with a second outer pole part 11 is developed rotatable about the central source axis 6.

Abstract: The thin film disk includes a pre-seed layer of amorphous or nanocrystalline structure which may be CrTa or AlTi or AlTa, and that is deposited upon a disk substrate. The pre-seed layer is followed by the RuAl seed layer, a Cr alloy underlayer, an onset layer composed essentially of CoCr and a magnetic layer. The onset layer has an optimal concentration of 28-33 at. % Cr and an optimal thickness of 0.5 to 2.5 nm and it increases coercivity and improves the Signal-to-Noise Ratio (SNR) of the disk.

Abstract: The present invention provides a longitudinal magnetic recording media having a substrate, a Co or Co alloy based magnetic layer arid an underlayer disposed between the substrate and the magnetic layer. The underlayer is made of a material having a Ga3Pt5 crystalline structure, most preferably Ni5Al3. Several intermediate layers, disposed between the underlayer and the magnetic layer may also be included.

Abstract: Methods and systems are provided for depositing a magnetic film using one or more long throw magnetrons, and in some embodiments, an ion assist source and/or ion beam source. The long throw magnetrons are used to deposit particles at low energy and low pressure, which can be useful when, for example, depositing interfacial layers or the like. An ion assist source can be added to increase the energy of the particles provided by the long throw magnetrons, and/or modify or clean the layers on the surface of the substrate. An ion beam source can also be added to deposit layers at a higher energies and lower pressures to, for example, provide layers with increased crystallinity. By using a long throw magnetron, an ion assist source and/or an ion beam source, magnetic films can be advantageously provided.

Abstract: A method is described comprising forming an insulating polycrystalline seed layer in a first chamber by reactively pulsed DC magnetron sputtering, then forming an insulating amorphous-like seed layer in a second chamber by reactively pulsed DC magnetron sputtering, then forming a conducting seed layer and a ferromagnetic free layer in a third chamber by ion beam sputtering, and then forming the remainder of a spin valve sensor through the antiferromagnetic layer in a fourth chamber by DC magnetron sputtering.

Abstract: A magnetically patterned hard disk is made by sputtering the magnetic layers, sputtering the carbon layer, applying a nonfunctional lubricant, buff/wiping the disk to remove sputtering debris and asperities, removing the nonfunctional lubricant using a standard degreasing process, applying and patterning a resist, and thereafter subjecting the exposed disk to inert ion irradiation.

Abstract: Corrosion resistant magnetic thin film media are fabricated using a CoCr magnetic layer having a stabilized protective chromium oxide film thereon. Stabilization of the protective chromium oxide film is achieved by incorporating a stabilizing element, such as Mo, V, Mn, Nb, Ni or Si, in the magnetic layer, thereby enabling elimination of the protective overcoat, e.g., C-containing protective overcoat, or forming the protective overcoat at a significantly low thickness of less than about 20 Å, e.g., up to about 1 Å. Embodiments include forming a magnetic layer comprising Co and Cr on an underlayer, and then forming a thin magnetic layer containing Co and Cr with the chromium oxide stabilizing element thereon. Embodiments further include introducing the chromium oxide stabilizing element by diffusion or ion implantation into a sputter deposited Co—Cr magnetic alloy layer.

Abstract: A magnetic recording medium according to the invention includes a plastic substrate, a non-magnetic under-layer on the substrate, a magnetic layer including cobalt on the under-layer, a protective film on the magnetic layer, and a liquid lubricant layer on the protective film. The under-layer is composed of a chromium alloy having a body centered cubic lattice structure, and containing at least one element selected from the group consisting of Zr, Nb, Mo, Ru and Pd in a total amount of at least 15 at %, or containing at least one element selected from the group consisting of Hf, Ta, W, Re, Pt and Au in a total amount of at least 10 at %. The amount of cobalt dissolved out of the magnetic layer is limited by performing sputtering deposition of at least the magnetic layer at low pressures of argon.

Abstract: A method of manufacturing a Heusler alloy thin film by co-sputtering is provided. The Heusler alloy thin film has a general structural formula of either X2YZ or XYZ and is deposited by co-sputtering using a deposition apparatus having a substrate placed on a substrate holder in a chamber and targets positioned on a target bracket spaced apart from the substrate. Components of the Heusler alloy thin film are placed on the target bracket as either single targets or binary alloy targets. Thus, it is easy to manufacture a Heusler alloy thin film having excellent magnetic characteristics.

Abstract: A laminate structure includes an antiferromagnetic layer, a pinned magnetic layer, and a seed layer contacting the antiferromagnetic layer on a side opposite to pinned magnetic layer. The seed layer is constituted mainly by face-centered cubic crystals with (111) planes preferentially oriented. The seed layer is preferably non-magnetic. Layers including the antiferromagnetic layer, a free magnetic layer, and layers therebetween, have (111) planes preferentially oriented.

Abstract: A target of an alloy of metals having different specific weights is used in a method for producing substrates that are coated with a layer comprising the same two metals by magnetron sputtering of the target. When sputtering such a target material, the metals of the alloy will sputter off with different sputtering characteristics with regard to a static angle &agr; at which the sputtered off material leaves the target. For this reason, at the substrate to be sputter-coated, there occurs a demixing effect of these metals which will be deposited with a varying local ratio of the metals, that differs form the ratio of the metals in the alloy of the target. To counter-act this demixing phenomenon, the location of an electron trap formed by the magnetron field of the sputter source at the target with respect to the location of the substrate, is selected.

Abstract: A method for making a magnetic disk comprises forming first and second protective carbon layers on a magnetic layer. The first protective carbon layer is predominantly SP3 carbon. The second protective carbon layer comprises about 50% or less SP3 carbon. The second protective carbon layer is very thin, e.g. between 0.1 and 1.0 nm thick. A lubricant layer (e.g. a perfluoropolyether lubricant) is applied to the second protective carbon layer. The second protective carbon layer facilitates improved cooperation between lubricant and the disk.

Abstract: Sequential sputtered film deposition of distinct materials on a workpiece is obtained with discrete targets composed of such distinct materials disposed on separate area portions of a common cathode/heatsink. Sputtering without cross contamination of the deposited films is enabled during an interval of relative motionbetween the target and workpiece or in an indexed static relative disposition, wherein the workpiece projection is entirely proximate one such portion to deposit the respective layer.

Abstract: In a method of frame plating, an electrode film for plating is formed on a base layer of a plating layer to be formed. Next, a resist layer is formed on the electrode layer. The resist layer is exposed to beams for exposure through the use of a mask. Next, the resist layer exposed is developed and the portion exposed is removed to form a resist frame, such that the angle &thgr; between an inner wall of the resist frame and the bottom surface thereof exceeds 90 degrees. Next, heat treatment is performed on the resist frame, such that the angle &thgr; becomes 90 degrees or smaller. Next, plating is performed with the electrode film as the seed layer through the use of the resist frame having gone through the heat treatment. The plating layer is thereby formed.

Abstract: A magnetic recording medium in which a seedlayer includes an aluminum-containing intermetallic nitride for improved performance.

Abstract: A method for forming an ultra microparticle-structure composed of ultra microparticles including the steps of: forming on a substrate higher wettability parts and lower wettability parts to a material to be deposited, depositing on the substrate the material to be deposited to form particles made of the material on the substrate, and accumulating the particles in the higher wettability parts to form the ultra microparticle-structure composed of the ultra microparticles.

Abstract: A recording film is formed on a surface of a substrate, including the slopes, which are positioned on both sides of each information track and have surfaces not parallel to the surfaces of the information tracks. The surface of the substrate is sputter-etched by accelerated ions impinging against the substrate surface in a substantially vertical direction. The recording film on each slope is etched away based on the dependence of a sputtering rate upon an incident angle of the ions, while the recording film remains on the surface of each information track.

Abstract: Disclosed are a method for manufacturing a half-metallic magnetic oxide and a plasma sputtering apparatus used in the method. A conductor provided with at least one hole is disposed between a metal target and a substrate holder in the plasma sputtering apparatus, thereby improving the bonding of metal ions discharged from the metal target to oxygen ions, and a magnetic field with a coercive force larger than that of a thin film to be formed on the substrate, thereby obtaining a magnetic oxide film with excellent properties. In a preferred embodiment of the present invention, a conductor-side power supply unit is connected to the conductor, thereby additionally supplying power to the conductor and generating second plasma. The plasma sputtering apparatus supplies high power so as to decompose oxygen, and discharges metal ions with different electrovalences at a precise ratio by the additional power supply, thereby being effectively used in manufacturing a half-metallic oxide at low temperatures.

Abstract: This application discloses a system for depositing a magnetic film for a magnetic recording layer or depositing an underlying film prior to depositing a magnetic film as a recording layer. The system comprises; a chamber in which the film is deposited onto a substrate by sputtering, a target that is provided in the chamber and made of material of the film to be deposited, a sputter power source for applying voltage to the target for the sputtering, and a direction control member for controlling sputter-particles released from the target during the sputtering. The direction control member is provided between the substrate and the target. The direction control member provides a passage for the sputter-particles. The direction control member lets the sputter-particles selectively pass through, thereby allowing magnetic anisotropy to the magnetic film. The passage is not close but open in its cross section.

Abstract: A perpendicular magnetic recording medium having a substrate and an annealed magnetic layer comprising boron on the substrate, the magnetic layer being a single film and having an L10 structure, and a process for manufacturing the perpendicular magnetic recording medium are disclosed.