Abstract: A vertically standing IPMC includes a substrate, a first electrode positioned substantially vertical with respect to an upper surface of the substrate, a second electrode positioned substantially vertical with respect to the upper surface of the substrate and disposed opposite to the first electrode, and an ionic polymer film interposed between the first electrode and the second electrode and standing substantially vertical with respect to the upper surface of the substrate.

Abstract: An electrically powered apparatus for generating a solute such as chlorine to sanitise a body of water such as a pool or spa, a by-product of such generation being an explosive gas such as hydrogen, said apparatus including: a) an electrolytic cell (1) adapted to operate in a substantially vertical orientation through a range of 45 degrees either side of the vertical; b) a water inlet (13) and outlet (14) both located at the lower end of said electrolytic cell (1); and c) a defined space (16) surrounding one or more electrodes (28) of said electrolytic cell (1), wherein, in, the event that water flow through said apparatus ceases and said electrolytic cell (1) continues to produce said explosive gas, said explosive gas will displace water in said defined space (16) until there is no water around said electrodes (28).

Abstract: An apparatus, system, method and computer program product directed to controlling corrosion, particularly space weather induced corrosion, of a conductive structure in contact with a corrosive environment and coated with a semiconductive coating, where the corrosion is controlled by a controllable filter and a corresponding electronic control unit configured to process and adjust the controllable filter in response to at least one measured parameter associated with space weather effects on the conductive structure.

Abstract: An electroplating apparatus for electroplating a surface of a wafer is provided. The wafer is capable of being electrically charged as a cathode. The electroplating apparatus includes a plating head capable of being positioned either over or under the surface of a wafer and capable of being electrically charged as an anode. The plating head is capable of enabling metallic plating between the surface of the wafer and the plating head when the wafer and plating head are charged. The plating head further comprises a voltage sensor pair capable of sensing a voltage present between the plating head and the surface of the wafer, and a controller capable of receiving data from the voltage sensor pair. The data received from the voltage sensor pair is used by the controller to maintain a substantially constant voltage to be applied by the anode when the plating head is placed in positions over the surface of the wafer. A method of electroplating a wafer is also provided.

Abstract: A system for pumping a gas stream containing a combustible gas comprises a solid oxide ionic conducting membrane (20) and a vacuum pump (36) for drawing the gas stream at a sub-atmospheric pressure to one side of the membrane. The other side of the membrane is exposed to an oxidising gas, and a potential difference is applied across the membrane so that reactive oxidising species permeate across the membrane to react with the combustible gas to produce at least water vapour. The gas stream is subsequently received by the vacuum pump (36). The vacuum pump may have a pumping mechanism that exposes the gas stream to water and wherein the water vapour is condensed from the gas stream. Alternatively, a condenser (14) may be provided between the pump and the membrane for condensing the water vapour from the gas stream.

Abstract: An electroplating apparatus for electroplating a surface of a wafer is provided. The wafer is capable of being electrically charged as a cathode. The electroplating apparatus includes a plating head capable of being positioned either over or under the surface of a wafer and capable of being electrically charged as an anode. The plating head is capable of enabling metallic plating between the surface of the wafer and the plating head when the wafer and plating head are charged. The plating head further comprises a voltage sensor pair capable of sensing a voltage present between the plating head and the surface of the wafer, and a controller capable of receiving data from the voltage sensor pair. The data received from the voltage sensor pair is used by the controller to maintain a substantially constant voltage to be applied by the anode when the plating head is placed in positions over the surface of the wafer. A method of electroplating a wafer is also provided.

Abstract: A hand-held spray bottle is provided, which includes a liquid reservoir, a liquid outlet, an electrolysis cell, a power source and a DC-to-DC converter. The electrolysis cell is carried by the spray bottle and is fluidically coupled between the reservoir and the liquid outlet. The power source is carried by the spray bottle and has a voltage output. The DC-to-DC converter is coupled between the voltage output and the electrolysis cell and provides a stepped-up voltage, which is greater than the voltage output of the power source, to energize the electrolysis cell.

Abstract: The present invention provides an apparatus, comprising a first mechanical structure having a first rigid surface, an area of the first rigid surface having a nanostructured surface. The apparatus also includes a second mechanical structure having a second rigid surface and opposing the first mechanical structure. The second rigid surface is cooperable with the nanostructured surface such that a microscopic particle is locatable between the nanostructured surface and the second rigid surface.

Abstract: A solar electrolysis power co-generation system includes a solar electrolysis source and a control unit. The solar electrolysis source includes a solar panel, an electrolysis unit, a hermetically sealed compressor, a hydrogen tank, and a hydrogen-powered fuel cell and produces, compresses, and stores hydrogen gas that is used to fuel the fuel cell. The control unit includes an inverter, a microprocessor, and a modem. The control unit connects the solar electrolysis power source with a power grid and with an individual consumer having an electrical load. The power co-generation system utilizes the electrolysis of water and solar energy to power a fuel cell. The energy produced with the fuel cell may be provided to an existing power gird as well as to an individual consumer. Further a method for decentralized power co-generation includes the step of providing a plurality of solar electrolysis power co-generation systems.

Abstract: A multi-layered wafer support apparatus is provided for performing an electroplating process on a semiconductor wafer (“wafer”). The multi-layered wafer support apparatus includes a bottom film layer and a top film layer. The bottom film layer includes a wafer placement area and a sacrificial anode surrounding the wafer placement area. The top film layer is defined to be placed over the bottom film layer. The top film layer includes an open region to be positioned over a surface of the wafer to be processed, i.e., electroplated. The top film layer provides a liquid seal between the top film layer and the wafer, about a periphery of the open region. The top film layer further includes first and second electrical circuits that are each defined to electrically contact a peripheral top surface of the wafer at diametrically opposed locations about the wafer.

Abstract: Methods and apparatuses for detecting characteristics of a microelectronic substrate. A method in accordance with an embodiment of the invention includes positioning the microelectronic substrate proximate to and spaced apart from the first and second spaced apart electrodes, contacting the microelectronic substrate with a polishing surface of a polishing medium, removing conductive material from the microelectronic substrate by moving the substrate and/or the electrodes relative to each other while passing a variable electrical signal through the electrodes and the substrate, and detecting a change in the variable electrical signal or a supplemental electrical signal passing through the microelectronic substrate. The rate at which material is removed from the microelectronic substrate can be changed based at least in part on the change in the electrical signal.

Abstract: A system, device, and method include a cell-powered first electronic device powered using electrical potential imposed across an electrolytic cell. The potential is voltage-boosted to accomplish this task. If the electrical potential imposed the cell is insufficient, the device can also be battery-powered. In any event, this device is in communication with one or more sensors in the electrolytic cell, as well as a second electronic device, and the first and second electronic devices wirelessly communicate. More specifically, the first electronic device wireless transmits data signals to the second electronic device, which receives the same. The first and second electronic devices are physically remote from one another, and they communicating over a private or public network, preferably using spread spectrum technology.

Abstract: A water treatment system includes a circulation pump and an electrolytic chamber in fluid communication with a main body of water. Electrolytic plates within the electrolytic chamber generate chlorine. When mineral deposits foul the electrolytic plates, water is isolated within the electrolytic chamber and a minimal amount of a pH-reducing agent is added to the electrolytic chamber to remove the mineral deposits. In a first embodiment, the pH-reducing agent is admitted on a periodic timed basis. In a second embodiment, the pH-reducing agent is added when the pH of the main body of water falls below a predetermined threshold. In both embodiments, cleaning is accomplished by adding the pH-reducing agent when the circulation pump is not operating so that the acid dwells within the electrolytic chamber for a sufficient amount of time. Activation of the circulation pump causes the pH-reducing agent to enter the main body of water.

Abstract: This invention relates to a method for controlling additions of powder materials into an electrolytic cell designed for the production of aluminium by fused bath electrolysis. The method according to the invention, which can easily be automated, can be used to maintain monitoring of operation of the feed even during anode effects.

Abstract: A capacitive deionization system comprising: a CDI device; a power supply device electrically connected with the CDI device, capable of providing a programmable voltage and/or a programmable current to the CDI device in response to an input signal; at least one of: (i) an electric current meter for measuring the electric current I flowing through the CDI device; and (ii) a voltage meter for measuring the voltage V supplied to the CDI device; an optional output stream sensor for monitoring the output stream and providing an optional output stream data DE; an optional input stream sensor for monitoring the input stream and providing an optional input stream data DI; a control device capable of sending an output signal to the power supply device to maintain or alter the voltage V and/or current I according to at least one of the results of I-ICREF, I-IDREF, V-VCREF, V-VDREF and optionally DE-DECREF and DE-DEDREF, wherein ICREF and IDREF are preset reference current data in the charge cycle and the discharge cycl

Abstract: The invention relates to methods and devices for the decontamination of fluid, particularly the removal of heavy metals and/or arsenic and/or their compounds from water, by means of electrolysis, wherein the water to be purified subjected to electrodes of different polarities. The invention can include means for control of the pH of the fluid. The invention can also include control systems that allow self-cleaning of electrodes, self-cleaning of filters, and automatic monitoring of maintenance conditions.

Abstract: There is described a method for forming an emulsion (1) containing at least one dispersed phase (3) and a continuous phase (2) in a fluidic microsystem (100), said method comprising the steps: forming flows (4, 5) of different liquids which flow towards a dispersion region (10), and forming the emulsion (1) from the liquids in the dispersion region (10), wherein the flows (4, 5) run through a common channel (20) to the dispersion region (10) and the flows (4, 5) are arranged next to one another relative to a first reference direction, and wherein the emulsion (1) is produced as the liquids flow through a cross-sectional widening (11) provided in the dispersion region (10), at which the cross section of the channel (20) widens in a second reference direction different from the first reference direction. A fluidic microsystem for forming an emulsion (1) containing a continuous phase (2) and at least one dispersed phase (3) is also described. A fusion of droplets in electric fields is also described.

Abstract: A method and apparatus for cleaning a wafer with a metal exposed through an insulator, through the use of a wet cleaning tank in concert with a feedback system on the potential difference between two leads of the wet cleaning tank. The cleaning tank has a bath in which the wafer and the two leads are immersed. The potential difference between the two leads is regulated when the feedback system detects a change in the potential across the two leads.

Abstract: A solar electrolysis power source includes a solar panel, an electrolysis unit, a hermetically sealed compressor, a hydrogen tank, and a fuel cell. By utilizing the electrolysis of water powered by solar energy, the solar electrolysis power source enables a safe, environmentally benign, and cost-effective method of power generation. Furthermore, by combining the production, the compression, the storage of hydrogen, as well as the delivery of the hydrogen to the fuel cell in one hermetically sealed unit currently existing problems with the production, storage delivery, and refueling of hydrogen can be eliminated. The solar electrolysis power source uses hydrogen gas that is hermetically sealed from production to use.

Abstract: A method of operating an integrated hydrogen production and processing system is provided. The method includes operating an electrolyzer to produce hydrogen from water and utilizing heat generated from the electrolyzer to increase a temperature of an electrolyte in a first mode of operation. The method also includes heating the electrolyte in a second mode of operation by extracting heat from a hydrogen compressor to increase or maintain the temperature of the electrolyte during periods when electrolysis is not performed in the electrolyzer or during startup of the electrolyzer.

Abstract: An electro-chemical plating system includes an upper rotor assembly for receiving and holding a wafer; an electroplating reactor vessel for containing plating solution in which the wafer is immersed; an anode array including a plurality of concentric anode segments provided inside the electroplating reactor vessel; a power supply system including power supply subunits for controlling electrical potentials of the anode segments, respectively; and a plurality of sensor devices mounted inside the upper rotor assembly, wherein the sensor devices are substantially arranged in corresponding to the anode segments, and during operation, the plurality of sensor devices are utilized for in-situ feeding back a deposition profile to a control unit in real time.

Abstract: The present invention provides methods and systems for controlling a catalytic process. The control system includes: an electroconductive support having a layer of a catalyst thereon; a first electrode in contact with said electroconductive support; a second electrode in contact with said catalyst layer; a current control unit for applying a current to said first and second electrodes and for controlling and varying the amount of current applied; an impedance measurement unit for continuously, monitoring and measuring the polarization impedance across an interface between the catalyst layer and the electroconductive support; a processing-unit for comparing the measured polarization impedance with a reference value. The amount of current applied to the catalyst layer and the electroconductive support via the first and second electrodes is varied to change the polarization impedance when the measured polarization impedance differs from the reference value.

Abstract: Disclosed are packaging systems and methods useful in extending the storage-life of foodstuff such as fresh fish. The packaging systems and methods can be used to transport or store the foodstuff for an extended period of time. The packaging systems preferably use a fuel cell to maintain a reduced oxygen level in the environment surrounding the foodstuff.

Abstract: The invention provides a method and apparatus for current control in gas generators capable of generating a fluorine or fluoride gas by and in which the electrolysis can be maintained in an optimum condition, stable operation is possible and no manpower is demanded. According to the method of current control in gas generators for generating a fluorine or fluoride gas by electrolysis of an electrolytic bath 5 comprising a hydrogen fluoride-containing mixed molten salt using a carbon electrode as the anode 4a, the range of voltage fluctuation between the cathode 4b and anode 4a as occurring when a certain current is applied to the gas generator is measured, and current application is continued while varying the current amount to be applied according to the voltage fluctuation range.

Abstract: A circuit for providing a potential difference across a gap between two electrodes of a fuel reformer, oxides of nitrogen trap or soot filter regenerator for an internal combustion engine or the like. The circuit includes a power source, a transformer including a primary winding and a secondary winding for coupling across the electrodes. The power source is coupled to the primary winding. A switch or switches is/are coupled to the primary winding.

Abstract: The invention relates to a method for purifying water by forming in an electrolytic cell molecular halogen, hypohalic acid, hypohalite ions or combinations thereof, from halide ions dissolved in the water; and dissolving one or more soluble metal salts in the water to provide corresponding metal ions. The invention also relates to a system for purifying water, having an electrolytic cell comprising a plurality of electrodes sufficient to electrolytically convert halide ion in the water into molecular halogen, hypohalic acid, or hypohalite ions, or combinations thereof; and a metal generator, which provides concentrations of one or more metals to the water.

Abstract: There is provided a water treating method which can not only improve an effect of eliminating microorganisms in water intended for cooking and drinking or waste water but also prevent a reduction in trace amounts of nutritional elements. In the method, at least a pair of carbon fibers capable of collecting at least microorganisms are immersed in for-treatment water, potentials of opposite polarities are applied to the carbon fibers, and the polarities of the potentials are switched at a predetermined time interval so as to adsorb the microorganisms on the carbon fibers. After the microorganisms are adsorbed, a positive potential is applied to one of the carbon fibers, and a negative potential is applied to the other so as to cause electrolysis. Then, an alternating voltage is applied to the carbon fibers so as to heat the for-treatment water and the carbon fibers.

Abstract: Controlled-potential electroplating provides an effective method of electroplating metals onto the surfaces of high aspect ratio recessed features of integrated circuit devices. Methods are provided to mitigate corrosion of a metal seed layer on recessed features due to contact of the seed layer with an electrolyte solution. The potential can also be controlled to provide conformal plating over the seed layer and bottom-up filling of the recessed features. For each of these processes, a constant cathodic voltage, pulsed cathodic voltage, or ramped cathodic voltage can be used. An apparatus for controlled-potential electroplating includes a reference electrode placed near the surface to be plated and at least one cathode sense lead to measure the potential at points on the circumference of the integrated circuit structure.

Abstract: An electrolytic ion-water production apparatus in which purified water without residual chlorine is electrolyzed to produce alkaline-ion water without any chloride smell of lime in use of the apparatus, and in which a mixture of purified water treated by a water purifier and tap water containing residual chlorine is electrolyzed to produce alkaline-ion water containing sodium hypochlorous acid (NaOCl) of low concentration and to retain the produced alkaline-ion water in an introduction passage for reliably preventing propagation of microbes.

Abstract: Various systems and methods for protecting electrowinning anodes having electrocatalytically active coatings in a bank of electrolytic cells from being damaged by reverse currents. In the first embodiment, one or more auxiliary power sources are provided that, when triggered by one or more predetermined conditions being met, keep the bank of electrolytic cells in an electrical state that is relatively harmless to the anodes having electrocatalytically active coatings. In a second embodiment, the invention is directed to a method of maintaining the polarization of anodes in an electrowinning cell positive of the cathodes (i.e. in a potential region where the anode coating is not susceptible to significant damage). In a final embodiment, the invention is directed to various methods for the installation of replacement anodes and maintenance of electrowinning cells.

Abstract: The invention relates to the analysis of the performance and properties of electrochemical processes, and specifically, to electrolytic solutions and electrode processes. The invention discloses a device and a method for obtaining qualitative and quantitative information for the kinetics of the electrode reactions, the transport processes, the thermodynamic properties of the electrochemical processes taking place in the cell. When a deposition reaction takes place, the device provides also valuable information about the relationship between the current density and deposit properties including but not limited to the deposit color, luster, and other aspects of its appearance. The device disclosed herein typically is comprised of a multiplicity of cathodic or anodic regions where one or more electrochemical reactions take place simultaneously, but at a different rate.

Abstract: The use of impedance measurements to detect the presence of pathogens attached to antibody-coated beads. In a fluidic device antibodies are immobilized on a surface of a patterned interdigitated electrode. Pathogens in a sample fluid streaming past the electrode attach to the immobilized antibodies, which produces a change in impedance between two adjacent electrodes, which impedance change is measured and used to detect the presence of a pathogen. To amplify the signal, beads coated with antibodies are introduced and the beads would stick to the pathogen causing a greater change in impedance between the two adjacent electrodes.

Abstract: A cathode current control system employing a current thief for use in electroplating a wafer is set forth. The current thief comprises a plurality of conductive segments disposed to substantially surround a peripheral region of the wafer. A first plurality of resistance devices are used, each associated with a respective one of the plurality of conductive segments. The resistance devices are used to regulate current through the respective conductive finger during electroplating of the wafer. Various constructions are used for the current thief and further conductive elements, such as fingers, may also be employed in the system. As with the conductive segments, current through the fingers may also be individually controlled. In accordance with one embodiment of the overall system, selection of the resistance of each respective resistance devices is automatically controlled in accordance with predetermined programming.

Abstract: The use of impedance measurements to detect the presence of pathogens attached to antibody-coated beads. In a fluidic device antibodies are immobilized on a surface of a patterned interdigitated electrode. Pathogens in a sample fluid streaming past the electrode attach to the immobilized antibodies, which produces a change in impedance between two adjacent electrodes, which impedance change is measured and used to detect the presence of a pathogen. To amplify the signal, beads coated with antibodies are introduced and the beads would stick to the pathogen causing a greater change in impedance between the two adjacent electrodes.

Abstract: A method for removing carbon monoxide from a gas stream, in which the gas stream loaded with CO is guided through a device, and the CO is removed from the gas stream through adsorption on the working electrode. As a function of an electrical voltage between the working electrode and the counter electrode, or between the working electrode and the reference electrode, an electrode cleaning mode is enabled by triggering a current flow between the working electrode and the counter electrode, and the CO adsorbed on the working electrode is oxidized to CO2.01.

Abstract: A higher applied potential may be provided to a consumable anode to reduce sludge formation during electroplating. For example, a higher applied potential may be provided to a consumable anode by decreasing the exposed surface area of the anode to the electrolyte solution in the electroplating cell. The consumable anode may comprise a single anode or an array of anodes coupled to the positive pole of the power source in which the exposed surface area of the anode is less than an exposed surface area of the cathode to the electrolyte solution. In another example, a higher applied potential may be provided to a consumable anode by increasing the potential of the electroplating cell.

Abstract: The invention provides a method and apparatus for current control in gas generators capable of generating a fluorine or fluoride gas by and in which the electrolysis can be maintained in an optimum condition, stable operation is possible and no manpower is demanded. According to the method of current control in gas generators for generating a fluorine or fluoride gas by electrolysis of an electrolytic bath 5 comprising a hydrogen fluoride-containing mixed molten salt using a carbon electrode as the anode 4a, the range of voltage fluctuation between the cathode 4b and anode 4a as occurring when a certain current is applied to the gas generator is measured, and current application is continued while varying the current amount to be applied according to the voltage fluctuation range.

Abstract: Methods for electroplating metal can include passing an electrical current through a conductive surface and an electroplating solution adjacent the conductive surface. An electroplating voltage for the conductive surface and the electroplating solution can be determined based on the electrical current through the conductive surface and the electroplating solution adjacent the conductive surface. The determined electroplating voltage can then be maintained while electroplating the metal from the electroplating solution on the conductive surface. Related systems are also discussed.

Abstract: A diagnostic method and device for use in detecting or quantitating an analyte present in a liquid sample. The method includes reacting an analyte-containing sample with reagents capable of generating a first coil-forming peptide in solution form. This peptide is then contacted with a biosensor whose detection surface has surface-bound molecules of a second, oppositely charged coil-forming peptide, under conditions effective to form a stable &agr;-helical coiled-coil heterodimer on the detection surface. The formation of the coiled-coil heterodimer produces a measurable change in biosensor signal, which is measured to detect the presence of or quantitate the amount of analyte in a sample. Also disclosed is a biosensor device for carrying out the reaction.

Abstract: The present invention provides a solder plating system with automatic monitoring of wash fluid pressure. The system automatically activates an alarm and/or initiates shutdown of a solder plating machine when the pressure reading indicates a failure of the wash fluid supply. The system thereby reduces the number of parts that are affected by failures in the wash fluid supply system. In some cases, problems with the wash fluid supply are detected before any parts are affected.

Abstract: A polishing method for electropolishing a metal film formed on a wafer surface so as to fill concave portions formed on the wafer surface comprises a step of determining an electropolishing end point of the metal film on the basis of a change of a current waveform resulting from electropolishing the metal film. An electropolishing apparatus comprising a current detector for detecting a current waveform resulting from electropolishing a metal film and an end point determination part for determining an electropolishing end point of the metal film on the basis of the change of a current detected with the current detector is used to realize the polishing method.

Abstract: A fan flow sensor for a gas generating proton exchange member electrolysis cell includes a switching device and a sail disposed in communication with the switching device. The sail is pivotally mounted and movable in response to an airflow from a fan. The sail is further configured to actuate the switching device in response to the airflow from the fan.

Abstract: For an electromechanical machining of a work piece there is an optimal pulse duration for the machining pulses corresponding to the maximum copying accuracy. Such an optimal pulse duration corresponds to a certain value of the gap. By alternating the machining pulses with measurement pulses it is possible to obtain an accurate information about the gap dimensions on-line during the electrochemical machining process. The process control means (20) are used to automate the electromechanical machining, while keeping it in the optimal mode. For this purpose the process control means (20) comprise the pulse control unit (26) to establish the pulse duration of the voltage pulses to be applied across the gap (4).

Abstract: A power supply (S) for a gas generating system (G) of the type including a barrier system (10) permeable to selected charged particles (12) flowing from a first side (14) to a second side (16) includes a direct current (DC) power source (18) in an electrical power circuit (20) connected across the first and second sides of the permeable barrier system (10). A plurality of resistive elements (22) are parallel connectable in the electrical circuit (20). Switches (24) selectively connect a desired resistive element (22) between the power source (18) and barrier system (10). A controller (26) activates certain switches (24) to connect a corresponding resistor (22) in the circuit (10) to controllably vary the flow of charged particles across the permeable barrier (10).

Abstract: The present invention relates to a control loop to be used in a system for stripping a coating from a part. The control loop comprises an electrometer for measuring a potential between the part and a reference electrode and generating a voltage output signal, an operational amplifier for comparing the voltage output signal to a set point voltage and for producing an output signal to be used to reduce the difference between the voltage output signal and the set point voltage, and a high current power transistors for supplying a current to the part.

Abstract: There is a control system for a catalytic process. The control system has the following: a) an electroconductive support having a layer of a catalyst thereon; b) a means for applying DC current of one polarity to the catalyst layer and the opposite polarity to the electroconductive support; c) a means for controlling and varying the application of DC current; d) a means for measuring the polarization impedance across the catalyst layer and the electroconductive support; e) a means for comparing the measured polarization impedance with a reference value; and f) a means for varying the application of DC current to the catalyst layer and the electroconductive support when the measured polarization impedance differs from the reference value.

Abstract: A downhole electrical power system provides long term electrical power in a downhole environment. In a described embodiment, a downhole electrical power system includes a power source which supplies electrical power to a well tool interconnected in a tubular string. The power source includes a voltaic cell.

Abstract: According to this invention, an active portion in nano-size substance is destroyed selectively by applying an electric potential to the nano-size substance having a network structure of carbon at an outer shell thereof in electrolytic solution. For example, an electric potential of 1.20 to 1.60 V (RHE) is applied to carbon nanotube in electrolytic solution so as to oxidize the active portion in the carbon nanotubes selectively and remove the ends of them. Consequently, an open end is created in the carbon nanotube.

Abstract: A method and apparatus for providing a uniform current density across an immersed surface of a substrate during an immersion process. The method includes the steps of determining a time varying area of an immersed portion of the substrate during the immersion process, and supplying a time varying current to the substrate during the immersion process, wherein the time varying current is proportional to the time varying area and is configured to provide a constant current density to the immersed portion of the substrate.

Abstract: A cathode current control system employing a current thief for use in electroplating a wafer is set forth. The current thief comprises a plurality of conductive segments disposed to substantially surround a peripheral region of the wafer. A first plurality of resistance devices are used, each associated with a respective one of the plurality of conductive segments. The resistance devices are used to regulate current through the respective conductive finger during electroplating of the wafer. Various constructions are used for the current thief and further conductive elements, such as fingers, may also be employed in the system. As with the conductive segments, current through the fingers may also be individually controlled. In accordance with one embodiment of the overall system, selection of the resistance of each respective resistance devices is automatically controlled in accordance with predetermined programming.