Abstract: The invention relates to a method and a device for producing elementary oxygen or for increasing the concentration thereof in the inhaled air of a user. According to the invention, water is split into hydrogen and elementary oxygen by means of electrical energy (electrolysis), the elementary oxygen is mixed with the inhaled air, and the hydrogen is mixed with the surrounding air in order to be converted back into water (fuel reaction). The splitting of the water into hydrogen and elementary oxygen and the conversion of the hydrogen and surrounding air into water take place simultaneously and continuously, forming a reaction circuit, and are coupled to each other, the electrical energy produced during the conversion being used to reduce the energy demand for the splitting.

Abstract: Methods and apparatus for separating alkali metal ions from alkali salts of glycerine to thereby form clean glycerine. These methods are enabled by the use of alkali ion conductive membranes in electrolytic cells that are chemically stable in low pH conditions. The alkali ion conductive membrane preferably includes a chemically stable ionic-selective polymer membrane. A layered composite of a chemically stable ionic-selective polymer and a cation-conductive ceramic membrane is disclosed.

Abstract: A high current density cathode for electrorefining in a molten electrolyte for the continuous production and collection of loose dendritic or powdery deposits. The high current density cathode eliminates the requirement for mechanical scraping and electrochemical stripping of the deposits from the cathode in an anode/cathode module. The high current density cathode comprises a perforated electrical insulated material coating such that the current density is up to 3 A/cm2.

Abstract: The present invention relates to an electroionic apparatus for treating an aqueous solution, including a flow cell through which the aqueous solution may flow, and a high frequency AC power source. A pair of electrodes within the flow cell are in contact with the aqueous solution and coupled to the AC power source. The AC power source generates a signal that is transmitted to the electrodes to generate an electromagnetic field and an ionic current within the aqueous solution in the flow cell. Each electrode includes a plurality of perforations defined through the plate electrode. Electrodes within the flow cell may be formed of materials having a catalytic effect upon the electroionic reactions within the flow cell.

Abstract: A method and apparatus are set forth capable of processing a substrate with a high uniformity within the surface area even for a thin feeding layer. The method comprises arranging a counter electrode and the substrate to confront each other; providing a membrane between the counter electrode and the substrate to define a substrate side region and a counter electrode side region. The substrate side region and the counter electrode side region are capable of accommodating respective electrolytes. The substrate side region and the counter electrode side region are supplied with respective electrolytes having different specific resistances. A processing current is also supplied between the substrate and the counter electrode.

Abstract: Systems and processes for producing hydrogen using bacteria are described. One detailed process for producing hydrogen uses a system for producing hydrogen as described herein, the system including a reactor. Anodophilic bacteria are disposed within the interior of the reactor and an organic material oxidizable by an oxidizing activity of the anodophilic bacteria is introduced and incubated under oxidizing reactions conditions such that electrons are produced and transferred to the anode. A power source is activated to increase a potential between the anode and the cathode, such that electrons and protons combine to produce hydrogen gas. One system for producing hydrogen includes a reaction chamber having a wall defining an interior of the reactor and an exterior of the reaction chamber. An anode is provided which is at least partially contained within the interior of the reaction chamber and a cathode is also provided which is at least partially contained within the interior of the reaction chamber.

Abstract: A software-driven device named the Microfluidic Central Processing Unit (?fCPU). The device is a chamber encompassing a contiguous physical volume equipped with actuators (electrodes, pressure membranes or other) capable of inducing physical forces on liquids, gases and particles contained in it, for the purpose of performing at least the 5 basic microfluidics operations: mixing, concentration, separation, transport and reaction within one integrated chamber. The device can have one volume where all of the operations are performed or can be spatially divided into several “processing areas” between which there are transport routes enabled by the software-regulated actuation. A device that contains more than one ?fCPU employed in parallel or in series or both. A device that is composed of one or more than one ?fCPU's and where fluids and particles are transported using a central pump together with integrated micropumps.

Abstract: The invention relates to a method for cleaning, sterilising and disinfecting dishes and other kitchen utensils by means of a wash liquid (5). In order to permit an economically and technically advantageous cleaning, an electrical current is directly applied to an electrode (15, 16), arranged in the wash liquid (5) and embodied as a diamond and/or lead-tin electrode, to generate OH radicals (14) in said wash liquid (5), which permit cleaning, sterilising and disinfecting of dishes and other kitchen utensils. The invention also relates to a device for carrying out said method, wherein an electrolytic cell (20) with a pair of electrodes (15, 16), comprising a diamond electrode for generating OH radicals (14), is directly integrated into a wash water circuit of a dishwasher (1).

Abstract: It is intended to realize storage and transportation of large amounts of energy and to carry out storage or supply of energy in conformity with fluctuation of natural energy. There is provided an organic hydride synthesizing apparatus capable of hydrogenation reaction between an unsaturated hydrocarbon and hydrogen in the presence of a catalyst to thereby accomplish synthesis of an organic hydride, which organic hydride synthesizing apparatus comprises a catalyst, heating means (3a) for heating the catalyst, hydrogen supply rate detection means (25) for detecting the rate of hydrogen supply to the interior of the apparatus, and control means (31),(32),(33) for in accordance with the supply rate, controlling the rate of unsaturated hydrocarbon fed, the rate of product recycled and the temperature of the catalyst.

Abstract: A mediated electrochemical oxidation process is used to treat, oxidize and destroy halogenated hydrocarbon waste materials. The waste materials are introduced into an apparatus for contacting with an electrolyte containing the oxidized form of one or more reversible redox couples, at least one of which is produced electrochemically by anodic oxidation at the anode of an electrochemical cell. The oxidized forms of any other redox couples present are produced either by similar anodic oxidation or reaction with the oxidized form of other redox couples present and capable of affecting the required redox reaction. The oxidized species of the redox couples oxidize the halogenated hydrocarbon waste molecules and are themselves converted to their reduced form, whereupon they are reoxidized by either of the aforementioned mechanisms and the redox cycle continues until all oxidizable waste species, including intermediate reaction products, have undergone the desired degree of oxidation.

Abstract: An electrocoagulation reactor, and water purification systems and methods using the reactor, are provided. The electrocoagulation reactor has a spirally wound assembly in which electrocoagulation treatment takes place. The spirally wound assembly includes electrode sheets spirally wound in spaced relation with an area for fluid flow in the space between the electrode sheets.

Abstract: A continuous hypochlorite generator is disclosed. The apparatus includes a brine tank 9, a make-up water line 15, a flow controlled electrolysis cell 19 fitted with electrodes 20, a salinity/flow sensor 31, a temperature sensor 27, a dosing line 23 and control means accepting input from each of said salinity/flow and temperature sensors and controlling said brine source and said make up water supply to maintain salinity and flow in said electrolysis cell and apply power to the electrodes within respective preselected ranges.

Abstract: An apparatus for rinsing liquid medium is described, the apparatus is an electrochemical cell comprising an anode with a precious metal and at least one cathode made of a non-metallic support material in the form of fibre positioned to form a mesh or a felted mat. The support material of the cathode is treated with a metal. When the electrochemical cell is in function, compounds and/or particles of a liquid to treat are deposited on the mat(s) functioning as the cathodes. The cathodes are easily replaced e.g. when no more compounds can be deposited on the mat. Pure samples of metals can be obtained by burning away the support material of the cathodes. The electrochemical cell is especially suitable to treat water including process water, waste water, and ground water.

Abstract: A production system and process comprising mixing electrochemically-activated liquid and feedstock granules to form a slurry a slurry cooker, and producing alcohol from the slurry.

Abstract: There is disclosed an inlet and outlet end-box design for mercury cathode chlor-alkali electrolysis cells of extended lifetime, comprising a composite mechanical structure consisting of a carbon steel bottom entirely supporting the mechanical solicitations, a plastic cover, and a hydraulic head device for washing the mercury and the amalgam. The device is partially extractable thereby allowing the withdrawal of foreign materials accumulated during operation with no need for opening the end-boxes.

Abstract: A hydrogen-oxygen gas generator comprising an electrolytic cell, an electrode group formed from an anode and a cathode mutually installed in that electrolytic cell, a power supply for applying a voltage across the anode and cathode, a gas trapping means for collecting the hydrogen-oxygen gas generated by electrolyzing the electrolyte fluid and a vibration-stirring means. The gas trapping means is comprised of a lid member installed on the electrolytic cell, a hydrogen-gas extraction tube connecting to the hydrogen-oxygen gas extraction outlet of that lid member. A vibration-stirring means for stirring and agitating the electrolytic fluid is supported by support tables. The distance between the adjacent positive electrode and negative electrode within the electrode group is set within a range of 1 to 20 millimeters.

Abstract: A water sanitization apparatus is provided. The apparatus includes a power unit, a housing with inlet and outlet openings for permitting the passage of water containing a bromide salt into the housing and water containing a free bromine and a sanitizing metal ion out of the housing, respectively, and first and second electrodes electrically connected to the power unit. The first electrode has a graphite or carbon substrate doped with copper, silver, and/or zinc. When operated as an anode, the first electrode converts bromide salt to free bromine and oxidize doped metal to sanitizing metal ion. Also provided are related water treatment systems and methods.

Abstract: A new system is disclosed for extracting ammonia from a wastewater stream, and for transferring the ammonia into the secondary water circuit, where the dissolved ammonium is electrolysed and transformed into gaseous nitrogen. The new system makes use of a membrane of gas-permeable hydrophobic material. The wastewater is raised to pH of 11, and 50° C., to make the transfer of ammonia through the membrane more efficient. Also disclosed is a process-control system for the ammonium disposal system, in which pH sensors are used to control operation. Instruments for measuring ammonia-concentration directly are expensive, whereas pH-sensors are simple, reliable, and responsive. Disclosed are procedures for establishing the relationships between pH and the progress of the ammonium disposal treatment.

Abstract: An electrolytic sterilizing apparatus comprises an electrolytic module (10) including an inlet port (11-1) disposed at one end thereof for allowing ballast water (40) to be introduced therethrough, an outlet port (11-2) disposed at the other end thereof for allowing the ballast water (40) to be discharged therethrough, a baffle unit (20) mounted at the inlet port (11-1) side for generating eddy flow, a sensor (30) mounted at the outlet port (11-2) side for measuring residual chlorine concentration, and a chamber (11) disposed between the baffle unit (20) and the sensor (30), the chamber (11) having electrode sets (12-1) mounted therein, each of the electrode sets (12-1) including a pair of electrodes (12), a power supply unit (50) for supplying power to the electrolytic module (10), and a connecting unit (60) including a pump (61) for introducing and discharging the ballast water (40), a pipe (62) connected to the pump (61), and a valve (63).

Abstract: A device and process is presented for producing hydrogen peroxide on an as needed basis is disclosed. The process and device produces hydrogen peroxide on a small scale without the addition of chemicals and disposal of waste streams.

Abstract: The present invention provides a system for generating hydrogen gas in an aqueous solution based electrolytic or galvanic cell wherein the cathode is made from aluminum or an aluminum alloy. In a preferred arrangement the cell is a galvanic cell and cathode is made from aluminum or aluminum alloy and the anode is made from magnesium or magnesium alloy.

Abstract: An electrowinning cell, having a tank with an opened upper end defined by a tank edge, electrolyte within the tank and a plurality of flat, metallic electrode plates disposed within the tank in side-by-side, spaced-apart, parallel relationship. Adjacent electrode plates define an electrode gap therebetween. An injector manifold is disposed at the bottom of the tank for feeding electrolyte into the tank at locations below the electrode plates. A collector grid, comprised of a plurality of collectors having ports, define an upper level of electrolyte by collecting the electrolyte from the tank. The ports are disposed in spaced-apart relationship within the open upper end defined by the tank edge. The collector grid and the injector creating a flow of electrolyte upward between the plates as the electrolyte flows from the manifold locations below the plates to the ports.

Abstract: Method and apparatus for a low maintenance, high reliability on-site electrolytic generator incorporating automatic cell monitoring for contaminant film buildup, as well as automatically removing or cleaning the contaminant film. This method and apparatus preferably does not require human intervention to clean.

Abstract: An electrolysis treatment apparatus for performing electrolytically treating a metal strip that is running in a certain direction is provided. A number of electrolysis cells continuously perform the electrolysis treatment with alternating currents in acidic electrolyte solutions. The electrolysis cells are arranged in series along the running direction of the metal strip. In each of the electrolysis cells, one electrode or two or more electrodes is/are provided. Each electrode is disposed so as to face a running path of the metal strip and applies alternating current. A soft start portion is provided at an entry region of the electrode at which the metal strip is fed in. Current density of the alternating current in the plural electrolysis cells is set so as to be the lowest in the electrolysis cell disposed furthest downstream with respect to the running direction of the metal strip. In at least one electrolysis cell except the electrolysis cell that is disposed furthest downstream.

Abstract: A photosensitive film, which has a transparent support and a silver salt emulsion layer containing a silver salt formed thereon, is exposed and developed to form a metallic silver portion. The base material to be plated is electrified in an electrolytic solution free of plating substances, using the metallic silver portion as a cathode. Then, the electrified base material is subjected to an electroless plating treatment to form a first plated layer only on the metallic silver portion. The base material is subjected to an electroplating treatment to form a second plated layer on the first plated layer, further form a third plated layer on the second plated layer.

Abstract: A system for electrochemical mechanical polishing of a conductive surface of a wafer is provided. The system includes a wafer holder to hold the wafer and a belt pad disposed proximate to the wafer to polish the conductive surface. Application of a potential difference between conductive surface and an electrode and establishing relative motion between the belt pad and the conductive surface result in material removal from the conductive surface. Electrical contact to the surface is provided through either contacts embedded in the belt pad or contacts placed adjacent the belt pad.

Abstract: An apparatus for treating the surface of an object to be treated comprising introducing a surface treatment fluid into a reaction vessel (4) capable of receiving an object, introducing the surface treatment fluid into a separation vessel (14) after the object is subjected to surface treatment, and circulating the surface treatment fluid, from which a contaminant has already been removed, to the reaction vessel (4). At the time of treatment on the surface of the object, a circulation passage for the surface treatment fluid including the reaction vessel (4) is communicated and the surface treatment fluid is constantly circulated through the circulation passage.

Abstract: A plating processing device comprises: a plating bath, on which an object to be plated is mounted; and a sparger provided with plating nozzle and washing nozzle for jetting plating solution and washing solution, respectively, toward the object in such a manner that the used plating solution and washing solution are accumulated and collected in the plating bath. Plating solution is supplied to the plating nozzle from a plating solution tank. Washing solution is supplied to the washing nozzle from a washing solution tank. The used plating solution and washing solution are accumulated in the plating bath, are recovered to the plating solution tank and used again as a plating solution.

Abstract: An automatic dishwashing appliance comprising an unattached electrolytic device which comprises an unattached electrochemical cell capable of generating electrolyzed water in the wash and/or rinse cycle, and more particularly to the unattached electrolytic device itself, methods of use, and articles of manufacture.

Abstract: The present invention, aiming at providing an exhaust gas treating system capable of increasing the exhaust gas treating volume, through increase of the diameter of the reaction tube, stabilizing the state of generation of plasma without requiring any water membrane, and improving the harmful matters removing performance by extending the plasma length, comprises a reaction tube 1 for introducing exhaust gas G, an upper electrode 2 disposed in the air on the top side of the reaction tube 1, a lower electrode 3 disposed on the bottom side of the reaction tube 1, and a spray nozzle 4 for spraying an electrolytic solution D between the upper electrode 2 and the lower electrode 3, so as to form a path of electric current between the electrodes 2, 3 and generate plasma P in the reaction tube 1, by spraying an electrolytic solution D between the upper electrode 2 and the lower electrode 3.

Abstract: A method is provided that includes discharging a solute from a solute-bearing electrode into a discharge liquid stream. The discharge liquid stream has a relatively higher concentration of solute than a feed stream from which the solute-bearing electrode gained the solute. A system is provided, also.

Abstract: An apparatus forms a plated film in fine trenches and plugs for interconnects and in the openings of a resist formed in the surface of a substrate such as a semiconductor wafer, and forms bumps (protruding electrodes) on the surface of a semiconductor wafer. The apparatus includes a substrate holder capable of opening and closing for holding a substrate such that the front surface of the substrate is exposed while the backside and the edge thereof are hermetically sealed. A plating tank accommodates a plating liquid in which an anode is immersed. A diaphragm is provided in the plating tank and disposed between the anode and the substrate held by the substrate holder. Plating liquid circulating systems circulate the plating liquid to respective regions of the plating tank, separated by the diaphragm. A deaerating unit is disposed in at least one of the plating liquid circulating systems.

Abstract: The invention is a device for electrical load-leveling and/or electrolysis. A housing contains pairs of electrodes made from or containing a porous material. The electrodes are filled respectively with an anolyte and a catholyte, which is an ionic couple such as Vanadium +2/+3. A non-permi-selective barrier membrane with openings may be included to substantially separate the electrode pair. The device results in reduced resistive, over-potentials and polarization losses, and may be scaled-up for integration into an electric utility.

Abstract: An oxygen emitter which is an electrolytic cell is disclosed. When the anode and cathode are separated by a critical distance, very small microbubbles and nanobubbles of oxygen are generated. The very small oxygen bubbles remain in suspension, forming a solution supersaturated in oxygen. A flow-through model for oxygenating flowing water is disclosed. The use of supersaturated water for enhancing the growth of plants is disclosed. Methods for applying supersaturated water to plants manually, by drip irrigation or in hydroponic culture are described. The treatment of waste water by raising the dissolved oxygen with the use of an oxygen emitter is disclosed.

Abstract: Tools having mounting modules with registration systems are disclosed. The mounting module includes positioning elements for precisely locating a processing chamber and a transport system that moves workpieces to and from the processing chamber. The relative positions between positioning elements of the module are fixed so that the transport system does not need to be recalibrated when the processing chamber is removed and replaced with another processing chamber. The processing chamber includes a paddle device for agitating processing liquid at a process surface of the workpiece. The paddle device, the processing chamber, and electrodes within the processing chamber are configured to reduce the likelihood for electrical shadowing created by the paddles at the surface of the workpiece, and to account for three-dimensional effects on the electrical field as the paddles reciprocate relative to the workpiece.

Abstract: The present invention provides a system for generating hydrogen gas in an aqueous solution based electrolytic or galvanic cell wherein the cathode is made from aluminum or an aluminum alloy. In a preferred arrangement the cell is a galvanic cell and cathode is made from aluminum or aluminum alloy and the anode is made from magnesium or magnesium alloy.

Abstract: This invention relates to an apparatus for producing a metal powder product using either conventional electrowinning or alternative anode reaction chemistries in a flow-through electrowinning cell. A new design for a flow-through electrowinning cell that employs both flow-through anodes and flow-through cathodes is described. The present invention enables the production of high quality metal powders, including copper powder, from metal-containing solutions using conventional electrowinning processes, direct electrowinning, or alternative anode reaction chemistry.

Abstract: Systems and methods for plating and/or etching of hard-to-plate metals are provided. The systems and methods are designed to overcome the deleterious effect of superficial coating or oxide layers that interfere with the plating or etching of certain metal substrates. The systems and methods involve in situ removal of coating materials from the surfaces of the metal substrates while the substrates are either submerged in plating or etching solutions, or are positioned in a proximate enclosure just prior to submersion in the plating or etching solutions. Further, the substrates can be in contact with a suitable patterning mask to obtain patterned oxide-free regions for plating or etching. This in situ removal of coating layers may be achieved by pulse heating or photoablation of the substrate and the inhibiting coating layers. Electrical energy or laser light energy may be used for this purpose. Additionally or alternatively, the coating materials may be removed by mechanical means.

Abstract: An object is to provide an air bacteria removal device in which leakage of electrolytic water to the outside is eliminated as much as possible and in which maintenance can easily be performed, the air bacteria removal device comprises a main body including a water storage section having a sealed or semi-sealed structure in which the electrolytic water is stored, and a water absorption member for supplying the electrolytic water from the water storage section to an air-liquid contact member by use of a capillary phenomenon, the air-liquid contact member and the water absorption member are integrated and detachably attached to the main body, the water absorption member attached to this main body enters the water storage section, and is submerged into the electrolytic water, and the water storage section is brought into a sealed or semi-sealed state.

Abstract: The present invention provides an electrolytic processing apparatus which is capable of increasing an in-plane uniformity of a film thickness of a plated film by making more uniform an electric field distribution over an entire surface to be processed of a substrate even if the substrate has a large area, and controlling more uniformly a speed, over the entire surface to be processed of the substrate.

Abstract: A combined electrochemical system for scale treatment and eradicating bacteria in water supply systems having: (a) a first electro-chemical cell including: (i) a first metallic tank for receiving a water supply and forming a cathode of the first electro-chemical cell, and (ii) a first anode, disposed within the first tank; (b) a second electro-chemical cell including: (i) a second metallic tank for receiving an effluent from the first tank and forming a cathode of the second electro-chemical cell, and (ii) a second anode, disposed within the second tank; and (c) a DC electrical supply source operatively connected to the first and the second cells, wherein the first electro-chemical cell is operative for trapping bacteria in a colloid-like structure, and the second electro-chemical cell is operative for producing a pH above 12 near the walls of the second tank, so as to form a bacteria-containing precipitate on the walls of the second tank, thereby removing the bacteria from the water supply.

Abstract: An object of the present invention is to provide a face-down type jet plating device in which deterioration in plating quality due to minute solid foreign matters derived from a black film etc. is prevented without impairing operativity. The plating device is designed such that a partition (7) is provided between a semiconductor wafer (1) and an anode (5) so that the anode (5) and the semiconductor wafer (7) are separated from each other and a plating tank (100) is divided into a substrate-to-be-plated chamber and an anode chamber.

Abstract: The present invention relates, generally, to a method and apparatus for electrowinning metals, and more particularly to a method and apparatus for copper electrowinning using the ferrous/ferric anode reaction and a flow-through anode, such as, for example, a dimensionally stable carbon, carbon composite, metal-graphite, or stainless steel anode. In general, the use of a flow-through anode—coupled with an effective electrolyte circulation system—enables the efficient and cost-effective operation of a copper electrowinning system employing the ferrous/ferric anode reaction at a total cell voltage of less than about 1.5 V and at current densities of greater than about 26 Amps per square foot (about 280 A/m2), and reduces acid mist generation. Furthermore, the use of such a system permits the use of low ferrous iron concentrations and optimized electrolyte flow rates as compared to prior art systems while producing high quality, commercially saleable product (i.e.

Abstract: An electroplating apparatus includes a reactor vessel having a segmented anode array positioned therein for effecting electroplating of an associated workpiece such as a semiconductor wafer. The anode array includes a plurality of ring-like anode segments which are preferably positioned in concentric, coplanar relationship with each other. The anode segments can be independently operated to create varying electrical potentials with the associated workpiece to promote uniform deposition of electroplated metal on the surface of the workpiece.

Abstract: Chambers, systems, and methods for electrochemically processing microfeature workpieces are disclosed herein. In one embodiment, an electrochemical deposition chamber includes a processing unit having a first flow system configured to convey a flow of a first processing fluid to a microfeature workpiece. The chamber further includes an electrode unit having an electrode and a second flow system configured to convey a flow of a second processing fluid at least proximate to the electrode. The chamber further includes a nonporous barrier between the processing unit and the electrode unit to separate the first and second processing fluids. The nonporous barrier is configured to allow cations or anions to flow through the barrier between the first and second processing fluids.

Abstract: Chambers, systems, and methods for electrochemically processing microfeature workpieces are disclosed herein. In one embodiment, an electrochemical deposition chamber includes a processing unit having a first flow system configured to convey a flow of a first processing fluid to a microfeature workpiece. The chamber further includes an electrode unit having a plurality of electrodes and a second flow system configured to convey a flow of a second processing fluid at least proximate to the electrodes. The chamber further includes a barrier between the processing unit and the electrode unit to separate the first and second processing fluids. The barrier can be a porous, permeable barrier or a nonporous, semipermeable barrier.

Abstract: A system and method are described for radially positioning a workpiece for electrochemical machining. In one embodiment, a pressurized air chamber is configured to contain pressurized air. In addition, an expandable diaphragm is configured to position the workpiece radially relative to an electrode assembly in response to the pressurized air being released into the pressurized air chamber.

Abstract: A method of manufacturing a conductivity cell comprises providing two cell block halves, each cell block half having a trough with an electrode arranged in the trough, an inlet flow path leading to the trough, and an outlet flow path leading from the trough; covering the electrode with a curable adhesive and curing the adhesive; removing a portion of the cured adhesive to expose a portion of the electrode along the trough, wherein the exposed portion of the electrode is substantially continuous with the adjacent surfaces of the inlet flow path and the outlet flow path; and joining the two halves together with their respective troughs aligned to form a conductivity cell.

Abstract: A hydrolytic cell consists of upper and lower chambers sealed from each other by a divider, with one or more openings in the divider for the passage of gas into the upper chamber. Liquid is prevented from entering the upper chamber by gas-permeable filters such as Hastelloy™ metal filters. Also disclosed is an electrode consisting either of a generally vertical stack of spaced apart perforated disks or porous metal filters such as Hastelloy filters, mounted to a conductive rod. A level sensing system us disclosed, consisting of a light source and detector which directs light into the lower chamber which is reflected off of a reflector within the chamber, such that the liquid level is detected at the level of the detector by a reduced light intensity.

Abstract: The invention provides an apparatus and a method for achieving reliable, consistent metal electroplating or electrochemical deposition onto semiconductor substrates. More particularly, the invention provides uniform and void-free deposition of metal onto metal seeded semiconductor substrates having sub-micron, high aspect ratio features. The invention provides an electrochemical deposition cell comprising a substrate holder, a cathode electrically contacting a substrate plating surface, an electrolyte container having an electrolyte inlet, an electrolyte outlet and an opening adapted to receive a substrate plating surface and an anode electrically connect to an electrolyte. Preferably, a vibrator is attached to the substrate holder to vibrate the substrate in at least one direction, and an auxiliary electrode is disposed adjacent the electrolyte outlet to provide uniform deposition across the substrate surface.