Unitary Plural Outlet Means Patents (Class 239/548)
  • Patent number: 10219669
    Abstract: A wiper unit includes a retaining ring, which is arranged in a rotationally symmetric fashion about a longitudinal axis and which includes a contact portion for being received at a housing part, a primary wiper and a secondary wiper, which is axially spaced away from the primary wiper towards the secondary side. A primary lip is formed at the primary wiper and a secondary lip is formed at the secondary wiper. The primary lip and the secondary lip, in a mounted state, contact a sliding surface of a guided slide partner part in a sealing fashion, wherein the primary lip protrudes towards the primary side in a collar-like fashion and wherein the primary lip, at the side thereof facing away from the guided slide partner part, is at least sectionally conically tapered towards the primary side, wherein the primary lip comprises a contact surface arranged for abutting the sliding surface.
    Type: Grant
    Filed: February 2, 2016
    Date of Patent: March 5, 2019
    Assignee: Dr. Walter Hunger Beteiligungs GmbH & Co. Besitz KG
    Inventor: Ingrid Hunger
  • Patent number: 10189046
    Abstract: A method of prepping a cylindrical inner surface of a bore using a high-frequency forced pulsed waterjet apparatus entails generating a pressurized waterjet using a high-pressure water pump, generating a high-frequency signal using a high-frequency signal generator, applying the high-frequency signal to a transducer having a microtip to cause the microtip to vibrate to thereby generate the high-frequency forced pulsed waterjet, and rotating the rotatable ultrasonic nozzle inside the bore to prep the inner cylindrical surface of the bore using the high-frequency forced pulsed waterjets exiting from the angled exit orifices of the rotatable ultrasonic nozzle.
    Type: Grant
    Filed: May 22, 2014
    Date of Patent: January 29, 2019
    Assignee: VLN Advanced Technologies Inc.
    Inventors: Mohan M. Vijay, Andrew Hung Tieu, Wenzhuo Yan, Bruce R. Daniels
  • Patent number: 10072612
    Abstract: Provided herein are various improvements to rocket engine components and rocket engine operational techniques. In one example, a rocket engine propellant injection apparatus is provided that includes a manifold formed into a single body by an additive manufacturing process and comprising a fuel cavity and an oxidizer cavity. The manifold also includes one or more propellant feed stubs, the one or more propellant feed stubs protruding from the manifold and formed into the single body of the manifold by the additive manufacturing process, with at least a first stub configured to carry fuel to the fuel cavity and at least a second stub configured to carry oxidizer to the oxidizer cavity. The manifold also includes a plurality of injection features formed by apertures in a face of the manifold, ones of the plurality of injection features configured to inject the fuel and the oxidizer for combustion.
    Type: Grant
    Filed: October 4, 2016
    Date of Patent: September 11, 2018
    Assignee: Vector Launch Inc.
    Inventors: Christopher Bostwick, John Garvey, Christopher Anderson, Eric Besnard
  • Patent number: 9757756
    Abstract: A method of prepping a cylindrical inner surface of a bore using a high-frequency forced pulsed waterjet apparatus entails generating a pressurized waterjet using a high-pressure water pump, generating a high-frequency signal using a high-frequency signal generator, applying the high-frequency signal to a transducer having a microtip to cause the microtip to vibrate to thereby generate the high-frequency forced pulsed waterjet, and rotating the rotatable ultrasonic nozzle inside the bore to prep the inner cylindrical surface of the bore using the high-frequency forced pulsed waterjets exiting from the angled exit orifices of the rotatable ultrasonic nozzle.
    Type: Grant
    Filed: September 5, 2013
    Date of Patent: September 12, 2017
    Assignee: VLN ADVANCED TECHNOLOGIES INC.
    Inventors: Mohan M. Vijay, Andrew Hung Tieu, Wenzhuo Yan, Bruce R. Daniels
  • Patent number: 9707571
    Abstract: A method of providing a liquid over a substrate is provided. The method includes providing the liquid over the substrate via a first opening of a flow path formed in a spray nozzle. The method further includes sucking back the liquid away from the first opening of the flow path. The method also includes holding the chemical solution in the flow path to keep a front surface of the chemical solution located in a tapered flow path section of the flow path.
    Type: Grant
    Filed: December 30, 2014
    Date of Patent: July 18, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Shih-Jhang Tian, Pei-Yi Su, Yi-Ming Dai
  • Patent number: 9598770
    Abstract: Semiconductor processing chamber showerheads with contoured faceplates, as well as techniques for producing such faceplates, are provided. Data describing deposition rate as a function of gap distance between a reference showerhead faceplate and a reference substrate may be obtained, as well as data describing deposition rate as a function of location on the substrate when the reference showerhead and the reference substrate are in a fixed arrangement with respect to each other. The two data sets may be used to determine offsets from a reference plane associated with the faceplate that determine a contour profile to be used with the faceplate.
    Type: Grant
    Filed: March 18, 2016
    Date of Patent: March 21, 2017
    Assignee: Novellus Systems, Inc.
    Inventors: Karl F. Leeser, James S. Sims
  • Patent number: 9556969
    Abstract: Each of the valve device and the shower device includes: a valve/shower device main body; a link lever pivotally held in the valve/shower device main body; a weight provided on the link lever; and a ball valve provided between the weight and a pivot axis of the link lever. When the valve/shower device main body is manually caused to move by shaking, swinging, turning, tilting, tapping, or like operation, a kinetic energy imposed on the weight causes the link lever to make a rotational movement relative to the valve/shower device main body, and then the rotational movement of the link lever displaces the ball valve to open or close a valve hole. The valve device and the shower device can significantly facilitate the valve-opening/closing operations, and do not require a special external member for hand- or finger-operation such as a button, a handle or a switch.
    Type: Grant
    Filed: March 4, 2014
    Date of Patent: January 31, 2017
    Inventor: Hirohiko Sato
  • Patent number: 9491913
    Abstract: The present invention provides an irrigation system with cheap humidity sensors and cheap automatic faucets preferably by using at the end nodes of the system low water pressure, so that much less force is needed to open and close the local waterway, and then either using simple electrical valves that do not require engines, or using for example mechanical sensors based on a bi-material of two or more materials which expand differently when they become wet, thus converting the difference of the expansion into convenient movement. Another possible variation, instead of mechanical sensors and valves, is to use for example a preferably synthetic material that tends to behave like a normal root preferably at the edge of each side channel, so that the “root” counter-balances the water supply and reaches equilibrium with it when the soil becomes wet enough, based preferably on asymmetric capillary materials.
    Type: Grant
    Filed: October 28, 2008
    Date of Patent: November 15, 2016
    Inventors: Yaron Mayer, Al J. C. Baur, Haim Gadassi
  • Patent number: 9309893
    Abstract: A supersonic compressor including a rotor to deliver a gas at supersonic conditions to a diffuser. The diffuser includes a plurality of aerodynamic ducts that have converging and diverging portions, for deceleration of gas to subsonic conditions and then for expansion of subsonic gas, to change kinetic energy of the gas to static pressure. The aerodynamic ducts include vortex generating structures for controlling boundary layer, and structures for changing the effective contraction ratio to enable starting even when the aerodynamic ducts are designed for high pressure ratios, and structures for boundary layer control. In an embodiment, aerodynamic ducts are provided having an aspect ratio of in excess of two to one, when viewed in cross-section orthogonal to flow direction at an entrance to the aerodynamic duct.
    Type: Grant
    Filed: July 6, 2012
    Date of Patent: April 12, 2016
    Assignee: Dresser-Rand Company
    Inventors: William Byron Roberts, II, Shawn P. Lawlor, Robert E. Breidenthal
  • Patent number: 9162237
    Abstract: A showerhead including a fluid connector configured to be threadedly coupled to a shower arm, and an outer shell receiving the fluid connector. A rotational stop or drive member is operably coupled between the fluid connector and the outer shell and is configured to limit relative rotation between the fluid connector and the outer shell.
    Type: Grant
    Filed: November 22, 2013
    Date of Patent: October 20, 2015
    Assignee: Delta Faucet Company
    Inventors: Todd Andrew Huffington, Anthony G. Spangler
  • Patent number: 9155358
    Abstract: A container for a substance to be sprayed includes a reservoir for the substance and operable spraying means connected to the reservoir for spraying the substance. The spraying means are provided with at least two spaced apart outflow openings that are in fluid communication with the reservoir for spraying the substance in at least two spray beams to surroundings.
    Type: Grant
    Filed: November 20, 2013
    Date of Patent: October 13, 2015
    Assignee: S.C. Johnson & Son, Inc.
    Inventor: Johannes Antonius G. W. Zigmans
  • Patent number: 9126214
    Abstract: A showerhead is disclosed in this invention. The showerhead includes a bottom portion, at least one plate, and a top portion. The bottom portion includes a plurality of gas tubes which are integratedly formed on the bottom portion. The gas tubes include at least one first gas tube. The at least one plate includes a first plate. The first plate includes a plurality of first openings, wherein the gas tubes pass through the first openings. The top portion is coupled to the bottom portion for forming at least one inner space.
    Type: Grant
    Filed: June 18, 2013
    Date of Patent: September 8, 2015
    Assignee: Hermes-Epitek Corporation
    Inventors: Chien-Ping Huang, Tsan-Hua Huang
  • Patent number: 9061297
    Abstract: The present invention is generally directed to a system for controlling placement of nanoparticles, and methods of using same. In one illustrative embodiment, the device includes a substrate and a plurality of funnels in the substrate, wherein each of the funnels comprises an inlet opening and an elongated, rectangular shaped outlet opening. In one illustrative embodiment, the method includes creating a dusty plasma comprising a plurality of carbon nanotubes, positioning a mask between the dusty plasma and a desired target for the carbon nanotubes, the mask having a plurality of openings extending therethrough, and extinguishing the dusty plasma to thereby allow at least some of the carbon nanotubes in the dusty plasma to pass through at least some of the plurality of openings in the mask and land on the target.
    Type: Grant
    Filed: May 23, 2014
    Date of Patent: June 23, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Krupakar M. Subramanian, Neal R. Rueger, Gurtej S. Sandhu
  • Patent number: 9052113
    Abstract: A combustor nozzle includes a downstream surface having an axial centerline. A plurality of passages through the downstream surface provide fluid communication through the downstream surface, and a downstream section of each passage has at least one of a frusto-conical or frusto-spherical shape. A method for modifying a combustor nozzle includes machining a downstream side of a body to remove a recast surface in a plurality of passages that provide fluid communication through the body. The method may further include machining a downstream section in each passage to form at least one of a frusto-conical or frusto-spherical surface in each passage proximate to the downstream side of the body.
    Type: Grant
    Filed: June 6, 2011
    Date of Patent: June 9, 2015
    Assignee: General Electric Company
    Inventors: Scott Robert Simmons, Patrick Benedict Melton, Russell DeForest, Donald Mark Bailey
  • Publication number: 20150115067
    Abstract: A water-ejection-angle adjustable shower head, and it is characterized in that, it includes a main body, and a swing rod, a water dispenser disk, an upper plate, and a lower plate built in said main body from top to bottom. An upper end of said lower plate passes through said upper plate and is hinged onto said water dispenser disk. A center of said swing rod is hinged onto a center of said water dispenser disk. The water-ejection-angle adjustable shower head can be operate to make the water outage holes on a lower surface of said lower plate to swing to various different directions, to form the dispersion water ejections or converging and merging water ejections. As such, the form and intensity of water ejections can be varied, to meet the demands of various customers.
    Type: Application
    Filed: September 24, 2014
    Publication date: April 30, 2015
    Inventor: Chun-Hui Lin
  • Publication number: 20150114543
    Abstract: The substance of the invention is a method of fluid feeding by means of at least one nozzle (4, 4A, 4B, 4C, 4D, 4E) onto a carrier (2) in a machine of the tobacco industry wherein the fluid is fed to the nozzle (4, 4A, 4B, 4C, 4D, 4E) from a fluid container (10) by means of a feeding device (11), whereas the nozzle (4, 4A, 4B, 4C, 4D, 4E) comprises a body (12, 12A) and at least one movable member (13, 13A, 13C, 13E, 13F, 13G, 30), and the fluid is fed onto the carrier (2) through at least two outlet orifices (15, 15A, 15B, 15C, 15D) of the nozzle (4, 4A, 4B, 4C, 4D, 4E). The reciprocal position of the outlet orifices (15, 15A, 15B, 15C, 15D) of the nozzle (4, 4A, 4B, 4C, 4D, 4E) is varied by means of an adjusting mechanism (19, 19A, 19B, 19C, 19D).
    Type: Application
    Filed: October 22, 2014
    Publication date: April 30, 2015
    Inventor: Michael Riedel
  • Patent number: 9017763
    Abstract: An injector for forming films respectively on a stack of wafers is provided. The injector includes a plurality of hole structures. Every adjacent two of the wafers have therebetween a wafer spacing, and each of the wafers has a working surface. The hole structures respectively correspond to the respective wafer spacings. The working surface and a respective hole structure have therebetween a parallel distance. The parallel distance is larger than a half of the wafer spacing. A wafer processing apparatus and a method for forming films respectively on a stack of wafers are also provided.
    Type: Grant
    Filed: December 14, 2012
    Date of Patent: April 28, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Che Hsieh, Brian Wang, Tze-Liang Lee, Yi-Hung Lin, Hao-Ming Lien, Shiang-Rung Tsai, Tai-Chun Huang
  • Publication number: 20150097486
    Abstract: A showerhead assembly includes a front plate having a front surface, a back surface and a plurality of first through holes connecting the front surface and the back surface, a back plate having a front surface, a back surface and a plurality of second through holes connecting the front surface and the back surface, and an adhesive layer joining the back surface of the front plate and the front surface of the back plate. The plurality of first through holes are aligned with the plurality of second through holes, and the front plate and the back plate are formed from dissimilar materials.
    Type: Application
    Filed: October 2, 2014
    Publication date: April 9, 2015
    Inventors: Andrew NGUYEN, Kartik RAMASWAMY, Yogananda SARODE VISHWANATH, Alexander Charles MARCACCI
  • Publication number: 20150090303
    Abstract: A system includes a plurality of nozzles, a pump configured to pump a fluid through the nozzles, and a manifold configured to arrange the plurality of nozzles to substantially match a shape of a workpiece. Each nozzle of the plurality of nozzles is configured to impinge upon a section of the workpiece with the fluid.
    Type: Application
    Filed: September 28, 2013
    Publication date: April 2, 2015
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Jonathan Matthew Lomas, Michelle Fullerton Simpson
  • Publication number: 20150083330
    Abstract: An electronic device manufacturing system may include a chamber port assembly that provides an interface between a transfer chamber and a process chamber. In some embodiments, the chamber port assembly may be configured to direct a flow of purge gas into a substrate transfer area of the chamber port assembly. In other embodiments, a process chamber and/or the transfer chamber may be configured to direct a flow of purge gas into the substrate transfer area. The flow of purge gas into a substrate transfer area may prevent and/or reduce migration of particulate matter from chamber hardware onto a substrate being transferred between the transfer chamber and a process chamber. Methods of assembling a chamber port assembly are also provided, as are other aspects.
    Type: Application
    Filed: September 25, 2013
    Publication date: March 26, 2015
    Inventors: Nagendra V. Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Paul B. Reuter, Angela R. Sico, Michael Kuchar, Travis Morey, Mitchell Disanto
  • Patent number: 8980206
    Abstract: A method is illustrated and described for reducing unwanted substances by injecting a reactant into a flue gas of a steam generator. In order that the reactant can also be used in larger steam generators and/or combustion chambers, a method is proposed, in which the reactant is injected into the combustion chamber of the steam generator via a reactant opening of a multi-component nozzle, in which an enveloping medium is injected into the combustion chamber through at least one enveloping medium opening arranged outside the reactant opening, and in which the enveloping medium at least partly envelops the reactant in the combustion chamber and in this way at least partly shields the reactant from the flue gas.
    Type: Grant
    Filed: November 13, 2013
    Date of Patent: March 17, 2015
    Assignee: Babcock Borsig Steinmueller GmbH
    Inventors: Stefan Hamel, Christian Storm
  • Publication number: 20150069150
    Abstract: An applicator head for a vacuum coating system includes two applicator manifolds. Each applicator manifold includes two coupled manifold plates, with one including a manifold aperture, and each is affixed to the respective shell plate so that each manifold aperture aligns with the respective shell aperture. An applicator channel is formed between the manifold plates of each applicator manifold, and the applicator channel is fluidically coupled to the manifold aperture of each respective applicator manifold. Each applicator channel forms an applicator port at a leading edge of each respective applicator manifold, and each leading edge is configured to be complementary in shape to an edge of a workpiece to be coated. One of the applicator manifolds includes one manifold plate that is wider than the other at the leading edge. First and second face plates are disposed over the leading edges of the applicator manifolds.
    Type: Application
    Filed: September 10, 2013
    Publication date: March 12, 2015
    Applicant: Armstrong World Industries, Inc.
    Inventor: Scott L. HUNTZINGER
  • Publication number: 20150072077
    Abstract: An applicator head for a vacuum coating system includes two applicator manifolds. Each applicator manifold includes two coupled manifold plates, with one including a manifold aperture, and each is affixed to the respective shell plate so that each manifold aperture aligns with the respective shell aperture. An applicator channel is formed between the manifold plates of each applicator manifold, and the applicator channel is fluidically coupled to the manifold aperture of each respective applicator manifold. Each applicator channel forms an applicator port at a leading edge of each respective applicator manifold, and each leading edge is configured to be complementary in shape to an edge of a workpiece to be coated. One of the leading edges is configured to have different application gaps with respect to different portions of the edge of a workpiece. First and second face plates are disposed over the leading edges of the applicator manifolds.
    Type: Application
    Filed: September 10, 2013
    Publication date: March 12, 2015
    Applicant: Armstrong World Industries, Inc.
    Inventor: John J. Hartman, JR.
  • Publication number: 20150069149
    Abstract: An applicator head for a vacuum coating system includes a manifold shell having opposing shell plates, each including a conduit attachment coupled to a shell aperture. An applicator manifold is affixed to each shell plate. Each applicator manifold includes two coupled manifold plates, with one including a manifold aperture, and each is affixed to the respective shell plate so that each manifold aperture aligns with the respective shell aperture. An applicator channel is formed between the manifold plates of each applicator manifold, and the applicator channel is fluidically coupled to the manifold aperture of each respective applicator manifold. Each applicator channel forms an applicator port at a leading edge of each respective applicator manifold, and each leading edge is configured to be complementary in shape to an edge of a workpiece to be coated. First and second face plates are disposed over the leading edges of the applicator manifolds.
    Type: Application
    Filed: September 10, 2013
    Publication date: March 12, 2015
    Applicant: Armstrong World Industries, Inc.
    Inventors: Sebastien NALIN, Scott L. HUNTZINGER
  • Publication number: 20150053794
    Abstract: The present disclosure generally comprises a heated showerhead assembly that may be used to supply processing gases into a processing chamber. The processing chamber may be an etching chamber. When processing gas is evacuated from the processing chamber, the uniform processing of the substrate may be difficult. As the processing gas is pulled away from the substrate and towards the vacuum pump, the plasma, in the case of etching, may not be uniform across the substrate. Uneven plasma may lead to uneven etching. To prevent uneven etching, the showerhead assembly may be separated into two zones each having independently controllable gas introduction and temperature control. The first zone corresponds to the perimeter of the substrate while the second zone corresponds to the center of the substrate. By independently controlling the temperature and the gas flow through the showerhead zones, etching uniformity of the substrate may be increased.
    Type: Application
    Filed: November 3, 2014
    Publication date: February 26, 2015
    Inventors: James D. CARDUCCI, Olga REGELMAN, Kallol BERA, Douglas A. BUCHBERGER, JR., Paul BRILLHART
  • Publication number: 20150034738
    Abstract: A showerhead assembly attached to a plumbing feature has a main body with a hollow body portion to receive incoming fluid. An outlet is formed on the bottom of the main body to release outgoing fluid, and a fluid distributing element is configured to distribute the outgoing fluid from the hollow body portion. A main sprinkler unit is mounted below the main body to connect to the outlet to receive the incoming fluid, and a plurality of fluid release points formed on the bottom for emitting fluid. Several fluid distributing plates have connectors extended from each of them to connect to the fluid distributing element for receiving fluid from the hollow body portion, and several fluid release points are formed on the bottom of the fluid distributing plate for emitting fluid. The watering area can be adjusted by extending the fluid distributing plates as required, which enables a wide variation in spray patterns flowing from the showerhead assembly.
    Type: Application
    Filed: June 27, 2014
    Publication date: February 5, 2015
    Inventors: Jianhua Xu, Daniel Zheng, Changzheng Ni
  • Patent number: 8944350
    Abstract: An aerated shower head structure has a body, a stationary disc, a water distributor and a pressing disc sequentially assembled. The stationary disc has an air inlet hole and a water inlet hole both formed through the stationary disc and communicating with a water inlet of the body. The water distributor and the pressing disc are combined and rotatably mounted under the stationary disc. The water distributor has an air compartment and a water compartment separately formed in a bottom of the water distributor, and has an air channel selectively communicating with the air compartment and multiple water orifices selectively communicating with the water compartment. The pressing disc has an air outlet hole communicating with the air compartment, a water outlet hole communicating with the water compartment, and an elongated water passage communicating with the air outlet hole and the water outlet hole and constitute a water outflow path.
    Type: Grant
    Filed: November 5, 2013
    Date of Patent: February 3, 2015
    Assignee: Xiamen Runner Industrial Corporation
    Inventor: Chun-Hui Lin
  • Publication number: 20150028130
    Abstract: A sanitary shower has a shower body, a water inlet on the shower body connectable to a wall supply line, at least one jet outlet opening and a water conduit providing fluid communication to the water inlet. The sanitary shower includes a connector body with a water inlet connectable to a wall supply line and a basket-type shower body which extends from the connector body up to an outlet-sided basket terminal axially spaced from the connector body. The basket-type shower body defines a hollow basket interior space adjacent to the connector body, and the outlet-sided basket terminal delimits an axial basket opening and/or a light transparent terminal disk element. On the basket-type shower body and/or on the connector body at least one jet outlet opening is provided. A water conduit provides a fluid communication of the at least one jet outlet opening to the water inlet.
    Type: Application
    Filed: June 23, 2014
    Publication date: January 29, 2015
    Inventors: Oki Sato, Joachim Blattner, Hubert Moosmann
  • Publication number: 20150027599
    Abstract: A rail cooling method for forcibly cooling a rail by jetting a coolant includes jetting the coolant to a foot back part of the rail from a porous plate nozzle in which a nozzle hole at an end in a width direction is smaller than a nozzle hole at a central part in the width direction and causes a cooling capacity for the end in the width direction of the underside of the base of the rail to be lower than a cooling capacity for the central part in the width direction of the underside of the base of the rail.
    Type: Application
    Filed: February 1, 2013
    Publication date: January 29, 2015
    Inventors: Ryo Matsuoka, Makoto Nakaseko, Rinya Kojo, Tomoo Horita, Hideki Takahashi, Yoshikazu Yoshida, Tatsumi Kimura, Mineyasu Takemasa, Yuzuru Kataoka
  • Patent number: 8939385
    Abstract: A mounting system for a spray manifold having a plurality of spray modules arranged in a lateral array with support assemblies between adjacent modules. The mounting arrangement includes one or more mounting assemblies which each have a hub that is securable about one of the manifold support assemblies and a clamp comprising a pair of clamping arms that is securable about the hub by means of an appropriate fastener. The hub and clamping arms define complementary circular surfaces which permit the selected pivotal positioning of the hub and the spray manifold to which it is secured relative to the clamp and a machine mounting structure.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: January 27, 2015
    Assignee: Spraying Systems Co.
    Inventors: David Clark Huffman, Rick H. Knapp, Maurice Ovide Brisson
  • Publication number: 20150014443
    Abstract: Dispensing head (1) intended to be fitted on a container that contains at least one product to be dispensed, this dispensing head comprising: a body (3) that is open at its two opposite axial ends, an engaging part (10) that is open at its two opposite axial ends, at least partially defining a dispensing orifice.
    Type: Application
    Filed: January 3, 2013
    Publication date: January 15, 2015
    Applicant: L'OREAL
    Inventor: Nicolas Albisetti
  • Publication number: 20150011096
    Abstract: A deposition apparatus for processing semiconductor substrates having an isothermal processing zone comprises a chemical isolation chamber in which semiconductor substrates are processed. A process gas source is in fluid communication with a showerhead module which delivers process gases from the process gas source to the isothermal processing zone wherein the showerhead module includes a faceplate wherein a lower surface of the faceplate forms an upper wall of a cavity defining the isothermal processing zone, a backing plate, and an isolation ring which surrounds the faceplate and the backing plate. At least one compression seal is compressed between the faceplate and the backing plate which forms a central gas plenum between the faceplate and the backing plate. A substrate pedestal module is configured to heat and support a semiconductor substrate wherein an upper surface of the pedestal module forms a lower wall of the cavity defining the isothermal processing zone within the chemical isolation chamber.
    Type: Application
    Filed: July 3, 2013
    Publication date: January 8, 2015
    Inventors: Ramesh Chandrasekharan, Jeremy Tucker, Karl Leeser, Alan Schoepp
  • Publication number: 20150007770
    Abstract: A dual-temperature, multi-plenum showerhead for use in semiconductor processing equipment is described. The showerhead may supply multiple separate gases to a wafer reaction area while keeping the gases largely segregated within the showerhead. Additionally, the showerhead may be configured to allow a faceplate of the showerhead to be maintained at a significantly higher temperature than the rest of the showerhead.
    Type: Application
    Filed: July 3, 2013
    Publication date: January 8, 2015
    Inventors: Ramesh Chandrasekharan, Jennifer L. Petraglia
  • Publication number: 20150002017
    Abstract: A gas diffuser unit for a process chamber includes at least one controllable diffuser, a power source, and a controller. The at least one controllable diffuser is configured to generate controllable forces acting in various directions on a gaseous material in a flow of the gaseous material introduced into the process chamber, to spread the gaseous material inside the process chamber. The power source is coupled to the at least one controllable diffuser, and configured to supply power to the at least one controllable diffuser to generate the controllable forces. The controller is coupled to the power source and configured to control the power supplied by the power source to the at least one controllable diffuser.
    Type: Application
    Filed: June 26, 2013
    Publication date: January 1, 2015
    Inventors: Chien Kuo HUANG, Shih-Wen HUANG, Joung-Wei LIOU, Chia-I SHEN, Fei-Fan CHEN
  • Publication number: 20150004318
    Abstract: A nozzle and nozzle head arranged to subject a surface of a substrate to gaseous precursors. The nozzle includes an output face via which the precursor is supplied, a longitudinal precursor supply element for supplying precursor and a longitudinal discharge channel open to and along the output face for discharging at least a fraction of the precursor supplied from the precursor channel. The precursor supply element is arranged to extend inside the discharge channel such that the precursor supply element divides the discharge channel in the longitudinal direction to a first discharge sub-channel and a second discharge sub-channel on opposite sides of the precursor supply element for supplying precursor through the discharge channel.
    Type: Application
    Filed: February 12, 2013
    Publication date: January 1, 2015
    Inventors: Tapani Alasaarela, Pekka Soininen, Mika Jauhiainen
  • Publication number: 20150000597
    Abstract: Embodiments described herein generally relate to an aluminum alloy showerhead with a reduced zinc content for use in semiconductor processing chambers. The showerhead may be utilized in processing chambers adapted for making low temperature polysilicon (LTPS) liquid crystal displays (LCD) or LTPS organic light emitting diode (OLED) displays which may be controlled by thin film transistors (TFT). More specifically, embodiments described herein relate to a reduced zinc showerhead.
    Type: Application
    Filed: September 26, 2013
    Publication date: January 1, 2015
    Applicant: Applied Materials, Inc.
    Inventors: Nishil NAMBIAR, Kinya AMADA
  • Publication number: 20140373883
    Abstract: A docking system includes basket and wall conduit systems. The basket conduit system includes a conduit and first and second nozzles mounted to opposite ends of the conduit. The second nozzle has a first funnel shape with a first circumference that decreases from an open end of the second nozzle towards the conduit. The wall conduit system includes front and back housings, a sliding plate, and a third nozzle. A sliding aperture is formed through a front plate of the front housing. A nozzle aperture is formed through a back plate of the back housing. The sliding plate slides within a space formed by the front housing and the back housing. The third nozzle is sized and shaped to slide within the sliding aperture and includes a generally cylindrical shape and a second funnel shape with a second circumference that decreases from the sliding plate towards the generally cylindrical shape.
    Type: Application
    Filed: June 24, 2013
    Publication date: December 25, 2014
    Inventors: Thomas Haft, Janusz Sendor, Colin R. Clerkin, Gerry Lippincott, Brian Wylie, Randall Koplin, Stephen Latham, Kent Kallsen
  • Publication number: 20140353860
    Abstract: Systems and methods in which the flow of fluid is electrically driven, including electrospinning and electrospraying systems and methods, are generally described.
    Type: Application
    Filed: June 14, 2013
    Publication date: December 4, 2014
    Applicant: Massachusetts Institute of Technology
    Inventors: Luis Fernando Velásquez-García, Philip James Ponce De Leon, Frances Ann Hill
  • Publication number: 20140356543
    Abstract: The present invention provides a spray nozzle, configured with left and right halves, at least one of the left and right halves being defined with a mating surface in which a recess defining width of a linear opening of the nozzle is defined, each end of the nozzle being mounted with fenders jointly define the linear opening of the nozzle along with the recess, wherein the mating surface in which the recess is defined further includes with a N number of partitions dividing the recess into a N+1 number of individual ejectors, wherein N is a positive integer. The present invention is to divide a single mouth of a spray nozzle of larger dimension into a plurality of individual ejectors with smaller dimension. During the acceleration or reduction of the spray nozzle, each individual ejector will deliver a homogeneous and even quantity of working liquid at central and end portions.
    Type: Application
    Filed: June 27, 2013
    Publication date: December 4, 2014
    Inventors: Hui Chen, Chih-hao Chang, Wen-hua Wang, Chi-che Lin
  • Publication number: 20140353496
    Abstract: In some embodiments, a gas diffuser for use in a mass spectrometer is disclosed that can provide a controlled expansion of an ion-containing gas so as to reduce gas velocity for entry into subsequent stages of the mass spectrometer, e.g., a mass analyzer. In some embodiments, the controlled expansion of the gas is provided by flowing the gas through a channel whose cross-sectional area change, e.g. progressively increases, in the direction of the gas flow so as to provide controlled expansion of the gas.
    Type: Application
    Filed: November 28, 2012
    Publication date: December 4, 2014
    Applicant: DH TEchnologies Development Ple.Ltd.
    Inventor: Bruce Thomson
  • Publication number: 20140339335
    Abstract: There is provided systems and methods for effective cleaning and drying of vehicles of different shapes and sizes. In an example, a conveyor system may move a vehicle along a path, and a bridge assembly supported above a vehicle is moveable along the length thereof. At least one trolley assembly is moveable in a direction transverse to the movement of the bridge assembly. At least one cleaning arm assembly delivers cleaning fluid to or for brushing the surface of a vehicle. The cleaning arm assembly is moveable in association with movement of the vehicle to position the cleaning arm assembly adjacent at least a portion of the front, sides and rear of the vehicle as it moves along the path. A variable impact or patterning spray arm or drying system is also provided.
    Type: Application
    Filed: August 1, 2014
    Publication date: November 20, 2014
    Inventor: Thomas J. Petit
  • Patent number: 8882005
    Abstract: A nozzle bar (10) comprising a carrier element (12) provided with several slit-shaped fluid channels (20), each associated with a foil (13) having a plurality of nozzle openings (15). In the position of use, the foil (13) is arranged over an input orifice (23) of the associate fluid channel (20) so that its nozzle openings (15) are located inside the contour of its associated fluid entry opening (19). In this position of use, each foil (13) is fastened to a plane attachment surface of the carrier element (12). The attachment surface may be the bottom (26) of a groove-like recess (25) in the carrier element (12). A separate recess (25) is provided for each foil (13). The carrier element (12) can be used for numerous different types of foils. The distance of the nozzle openings (15) of the foil (13), or the size or the form of the nozzle openings (15) may vary among various foil types, without requiring modifications on the carrier element (12).
    Type: Grant
    Filed: September 16, 2010
    Date of Patent: November 11, 2014
    Assignee: Groz-Beckert KG
    Inventors: Reinhold Eydner, Thomas Schmid, Jürgen Spill, Achim Locher
  • Patent number: 8876025
    Abstract: A showerhead operable to reduce water consumption configured to detect the presence of an individual within the spray pattern of water exiting the showerhead. The showerhead further includes a housing having an internal volume that is configured to receive and discharge water. A sensor is integrally mounted to the discharge surface of the housing and is operable to detect either the presence or absence of an individual within the spray pattern of water. A valve is disposed within the housing and is operable to control the water volume exiting the housing. The showerhead being operable to discharge substantially all of the water volume available thereto upon the detection of an individual within the spray pattern and further being operable to discharge a water volume that is less than the water volume available thereto to upon detection of an absence of an individual within the spray pattern.
    Type: Grant
    Filed: October 12, 2009
    Date of Patent: November 4, 2014
    Assignee: MJ Enterprises LLC
    Inventor: Mary Wheeler
  • Publication number: 20140322093
    Abstract: A device is provided for performing chemical transformation in a fluid, with a flow distributor having at least one fluid medium inlet, at least one fluid medium outlet, and at least one confinement wherein the chemical transformation is performed; and a means for rotating, rocking, wagging, or oscillating the device. At least one confinement may be equipped with a provision for providing heat, cooling, sound, light or other types of radiation, such provision being contacted to an external source through an actuator shaft. The flow distributor may be provided with sectors connected with the centrally located fluid medium inlet and a designated peripheral fluid medium outlet. The means for rotating, rocking, wagging, or oscillating the device may be an element producing magnetic fields or a shaft mechanically connected to an external actuating device.
    Type: Application
    Filed: July 9, 2014
    Publication date: October 30, 2014
    Applicant: NORDIC CHEMQUEST AB
    Inventors: Jonas PERSSON, Kjell OBERG, Fredrik ALMQVIST, Knut IRGUM
  • Patent number: 8870100
    Abstract: A nozzle plate and an atomizing module using the nozzle plate are disclosed. The atomizing module is installed at a cavity and includes a piezoelectric circular plate, a braking circular plate and a nozzle plate. The braking circular plate is installed on a side of the piezoelectric circular plate. The nozzle plate is a circular disc clamped between the piezoelectric circular plate and the braking circular plate, and the nozzle plate includes firing holes and first protrusions. Each first protrusion is non-circular and protruded in a direction towards the piezoelectric circular plate or the braking circular plate to form a multi-curved surface structure radially or circularly arranged into a specific geometric pattern. The nozzle plate can increase the atomizing area, atomizing quantity and liquid-gas exchange rate to prevent excessive stresses from concentrating at the center of the nozzle plate or vibrations from cracking or breaking the nozzle plate.
    Type: Grant
    Filed: July 7, 2011
    Date of Patent: October 28, 2014
    Assignee: Microbase Technology Corporation
    Inventors: Shu-Pin Hsieh, Yu-Ju Su, Chia-Chen Huang, Chien-Hua Lin, Yu-Chung Hsu, Tai-Shuan Lin, Mei-Hui Huang, Chieh-Ming Hsiung
  • Publication number: 20140312145
    Abstract: A water delivery device that may be used in a water display is described. The device includes an orifice or outlet through which water is shot out. The shape and configuration of the water device may be varied to dynamically adjust the configuration of the water shot out from the device. For example, the water delivery device may shoot out water in the shape of a fan, and the width of the fan may be varied.
    Type: Application
    Filed: March 14, 2014
    Publication date: October 23, 2014
    Inventors: Mark Fuller, Jim Doyle, Keith Kalis, Amnon Talmor
  • Publication number: 20140299680
    Abstract: The invention relates to a dispensing module (1) for an applicator head for dispensing a fluid, in particular hot-melt adhesive, comprising a module housing (5), a valve body accommodated in the module housing (5), an adapter (7) through which the valve body extends, comprising a proximal end (49) and a distal end (41), the distal end (41) being connected by means of a screw connection (51) to the module housing (5), a nozzle holder (9) which is adapted to be inserted into a matching recess in a base member of the applicator head, and one or a plurality of sealing elements (57, 59, 61) for sealing the nozzle holder (9) and the base member against each other in a fluid-tight manner.
    Type: Application
    Filed: October 17, 2012
    Publication date: October 9, 2014
    Applicant: NORDSON CORPORATION
    Inventors: Manfred Müller, Wolfgang Marx
  • Publication number: 20140291412
    Abstract: A spray device and system for delivering a cosmetic composition to a user. The system includes an enclosure booth with an open front, a spray bar with a plurality of spray nozzles configured to deliver a constant volume of cosmetic composition to a user, and a set of heaters designed to deliver warm air to a user during the spray cycle.
    Type: Application
    Filed: April 2, 2013
    Publication date: October 2, 2014
    Inventor: Greg Henson
  • Publication number: 20140291286
    Abstract: A shower head includes a gas injection plate and a gas supply unit. The gas supply unit has a first gas supply path provided in a region along the axis and a second gas supply path provided in a region surrounding the region where the first gas supply path is provided. The first gas supply path has a first gas diffusion space connected to a first gas line of the gas supply unit, second gas lines, a second gas diffusion space, third gas lines and a third gas diffusion space which are connected in that order. The second gas supply path has a fourth gas diffusion space connected to a fourth gas line of the gas supply unit, fifth gas lines, a fifth gas diffusion space, sixth gas lines, and a sixth gas diffusion space which are connected in that order.
    Type: Application
    Filed: March 25, 2014
    Publication date: October 2, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Nobuyuki OKAYAMA, Koichi KAZAMA, Shuichiro UDA, Satoshi YAMADA, Shinji FUCHIGAMI
  • Publication number: 20140283995
    Abstract: [Object] To provide a gas nozzle which meets a requirement to suppress the fall of particles. [Solution] A gas nozzle 4 according to an aspect of the present invention includes a columnar main body 13 formed of a ceramic sintered body provided with a through-hole 12 formed therein through which a gas flows, an exhaust port 15 of the through-hole 12 for the gas is formed in one end surface S1 of the main body 13, and the mean width of the profile elements (Rsm) of the one end surface S1 is 5 times or more the average crystalline grain diameter of the ceramic sintered body.
    Type: Application
    Filed: October 30, 2012
    Publication date: September 25, 2014
    Applicant: KYOCERA CORPORATION
    Inventor: Atsushi TANAKA