Electron Energy Analysis Patents (Class 250/305)
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Patent number: 8269167Abstract: A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.Type: GrantFiled: February 4, 2011Date of Patent: September 18, 2012Assignee: Revera, IncorporatedInventors: Paola deCecco, Bruno Schueler, David Reed, Michael Kwan, David Stephen Ballance
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Patent number: 8263936Abstract: A transmission electron microscope is capable of correcting, with high efficiency and high accuracy, an electron energy loss spectrum extracted from each of measured portions included in an electron energy loss spectral image with two axes representing the amount of an energy loss and positional information on a measured portion. The transmission electron microscope has an electron spectroscope and a spectrum correction system. The spectrum correction system corrects a spectrum extracted from each measured portion included in an electron energy loss spectral image acquired from a sample based on a difference between a spectrum extracted from a standard portion of a standard spectral image and a spectrum extracted from a portion different from the standard portion.Type: GrantFiled: March 31, 2009Date of Patent: September 11, 2012Assignee: Hitachi High-Technologies CorporationInventors: Shohei Terada, Yoshifumi Taniguchi
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Patent number: 8263934Abstract: In a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle beam application, or detecting a compensation value for a change in a condition for the apparatus caused by the sample being electrically charged, a voltage is applied to a sample such that a charged particle beam does not reach the sample (referred to as “mirror state”) when the charged particle beam is applied toward the sample. Information is detected, relating to a potential on the sample using signals obtained by the voltage application.Type: GrantFiled: December 18, 2007Date of Patent: September 11, 2012Assignee: Hitachi High-Technologies CorporationInventors: Minoru Yamazaki, Akira Ikegami, Hideyuki Kazumi, Osamu Nasu
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Publication number: 20120217390Abstract: The present invention is directed to a device and system for verifying the electron beam kinetic energy spectrum and determining changes in kinetic electron beam energy spectrum that comprises a radiation-absorbing mass defined by a top surface, a bottom surface, and side walls, said mass having at least four separate slots containing one or more of dosimeter strips, wherein said slots are located at different depths within the mass as measured from the top surface of the mass, and said slots are positioned substantially parallel to the top surface of the mass. The present invention also relates to a method of determining and comparing changes in a kinetic electron energy spectrum.Type: ApplicationFiled: February 28, 2011Publication date: August 30, 2012Inventors: Penny Luxich, Michael C. Saylor
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Patent number: 8232518Abstract: A method of characterizing surfaces comprises the steps of: directing a beam (2) of neutral atoms or molecules on a surface (3) for characterizing; and detecting in position-sensitive manner the neutral atoms or molecules of said beam that have been diffused forwards by said surface (3) for characterizing; the properties of said beam (2) being selected in such a manner that at least some of said neutral atoms or molecules that are diffused forwards are diffractive by said surface for characterizing. A device for implementing such a method comprises means (1) for generating such a beam (2) of neutral atoms or molecules and position-sensitive detector means (4) for detecting the neutral atoms or molecules that are diffused forwards by said surface (3) for characterizing.Type: GrantFiled: July 5, 2007Date of Patent: July 31, 2012Assignees: Centre National de la Recherche Scientifique (CNRS), Universite Paris SUD 11Inventors: Hocine Khemliche, Philippe Roncin, Patrick Rousseau
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Patent number: 8222598Abstract: A method and apparatus for quantitative analysis of a material in which an electron beam is caused to impinge upon the material are described. The method comprises detecting low loss electrons (LLEs) received from a first region of the material due to interaction with the electron beam and generating corresponding LLE data. The method further comprises detecting x-rays received from a second region of the material due to interaction with the electron beam and generating corresponding x-ray data, wherein the first and second regions overlap, and analysing the LLE data together with the x-ray data so as to generate compositional data representative of the composition of the first region.Type: GrantFiled: June 20, 2008Date of Patent: July 17, 2012Assignee: Oxford Instruments Analytical LimitedInventors: Peter John Statham, Ian Richard Barkshire
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Publication number: 20120168623Abstract: An observation and analysis unit that magnifies an image of a sample and further accomplishes the evaluation and analysis thereof. The observation and analysis unit includes a light-microscopic device designed for the magnified imaging and optical evaluation of the sample and a sample analyzer that analyses selected regions of the sample. The sample analyzer includes an electron source from which an electron beam can be directed to a region of the sample selected by use of the light-microscopic device. The sample analyzer further includes an X-ray detector designed to detect X-ray radiation generated by the interaction of the electron beam with the sample material. The unit further includes an actuation and evaluation unit that generates control commands for the light-microscopic device and the electron source and spectrally analyzes the X-ray radiation.Type: ApplicationFiled: August 20, 2010Publication date: July 5, 2012Applicant: CARL ZEISS MICROIMAGING GMBHInventors: Martin Edelmann, Christian Thomas
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Publication number: 20120155509Abstract: Disclosed is an electrode member which has spherical sections, each of which configures a part of a sphere, and a plurality of spherical electrode sections wherein the radiuses of the spherical sections are different from each other. The spherical electrode sections are disposed in a state wherein the center points of the respective spheres match each other and the spherical electrode sections are insulated from each other such that voltages can be independently applied thereto. Electron-passing openings for straightly taking out electrons, which are moving from the center point, to the outside of the electrode are formed at positions where the spherical electrode sections and a plurality of straight lines radially extending from the center point intersect each other.Type: ApplicationFiled: August 18, 2010Publication date: June 21, 2012Inventors: Juntaro Ishii, Ikuo Kinoshita
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Patent number: 8203119Abstract: The invention provides a charged particle beam device to inspect or structure a specimen with a primary charged particle beam propagating along an optical axis; a beam tube element having a tube voltage; and a retarding field analyzer in the vicinity of the beam tube element to detect secondary charged particles generated by the primary charged particle beam on the specimen. According to the invention, the retarding field analyzer thereby comprises an entrance grid electrode at a second voltage; at least one filter grid electrode at a first voltage; a charged particle detector to detect the secondary charged particles; and at least one further electrode element arranged between the entrance grid electrode and the at least one filter grid electrode. The at least one further electrode element reduces the size of the stray fields regions in the retarding electric field region to improve the energy resolution of the retarding field analyzer.Type: GrantFiled: June 10, 2005Date of Patent: June 19, 2012Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbHInventors: Ralf Degenhardt, Hans-Peter Feuerbaum, Dirk Hambach, Walter Kögler, Harry Munack, Carlo Salvesen
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Patent number: 8183526Abstract: One embodiment relates to an apparatus for generating a charged particle beam with reduced energy width. A charged particle source is configured to generate a charged particle beam with a range of energies. An energy-dispersive device bends the high-energy component of the charged particle beam at less of an angle in comparison to the bending angle of the low-energy component of the charged particle beam, such that the higher and lower energy charged particle beam components exit the energy-dispersive device at different angles of trajectory. A charged particle mirror reflects the charged particle beam such that charged particles entering at an angle with respect to the normal to the mirror reflection plane exit the mirror symmetrically with respect to the normal and at the same angle. Charged particle lenses converge all energy components exiting the energy-dispersive device at different angles of trajectory at the charged particle mirror reflection plane.Type: GrantFiled: February 11, 2011Date of Patent: May 22, 2012Assignee: Electron OpticaInventor: Marian Mankos
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Patent number: 8178836Abstract: A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the electrostatic charge amount of the sample or a focus adjustment amount by scanning the electron beam. An electrostatic charge measurement method, a focus adjustment method, or a scanning electron microscope for measuring an electrostatic charge amount or controlling an application voltage to the sample changes the application voltage to the energy filter while moving the scanning location of the electron beam on the sample.Type: GrantFiled: June 3, 2010Date of Patent: May 15, 2012Assignee: Hitachi High-Technologies CorporationInventors: Tatsuaki Ishijima, Katsuhiro Sasada, Ritsuo Fukaya
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Patent number: 8158939Abstract: An ion beam apparatus and a method for providing an energy-filtered primary ion beam are described. Therein, a primary ion beam having an asymmetric first energy distribution is generated by means of an ion source. The primary ion beam is energy filtered using, for example, a retarding lens.Type: GrantFiled: January 22, 2010Date of Patent: April 17, 2012Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventors: Juergen Frosien, Dieter Winkler
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Publication number: 20120085898Abstract: The present invent provides a particle detector for counting and measuring the flight time of secondary electrons and scattered ions and neutrals and to correlate coincidences between these and backscattered ions/and neutrals while maintaining a continuous unpulsed microfocused primary ion beam for impinging a surface. Intensities of the primary particle scattering and secondary particle emissions are correlated with the position of impact of the focused beam onto a materials surface so that a spatially resolved surface elemental and electronic structural mapping is obtained by scanning the focused beam across the surface.Type: ApplicationFiled: December 16, 2011Publication date: April 12, 2012Inventors: Thomas F. Egan, J. Albert Schultz, Steven R. Ulrich, Kelley L. Waters
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Patent number: 8153965Abstract: An apparatus for merging a low energy electron flow into a high energy electron flow may include: a high energy electron path for accommodating the high energy electron flow; and a plurality of magnetic elements arranged to guide the low energy electron flow through a chicane presenting a path having a first end and a second end. The path intersects the high energy electron path at the second end. The path has a plurality of turns and path segments intermediate the first and second ends. Respective adjacent path segments intersect at each respective turn. The path establishes a respective bend radius and subtends a respective path angle between respective adjacent path segments at each respective turn. Each respective path angle is maximized within predetermined path angle limits. Each respective bend radius is minimized within predetermined bend radius limits.Type: GrantFiled: December 9, 2009Date of Patent: April 10, 2012Assignee: The Boeing CompanyInventors: John L. Adamski, Benjamin Emerson Carl Koltenbah
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Patent number: 8143573Abstract: A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallactic angle alternately to the beam on each scanning line. In this way, images are acquired. A three-dimensional image in which deterioration of the resolution is suppressed is displayed in real time by combining aberration cancellation means with the control of the beam according to the parallactic angle. The aberration cancellation means uses an optical system having plural stages of lenses to provide overall cancellation of aberrations by making use of the action of a lens to deflect the beam back to the optical axis.Type: GrantFiled: June 24, 2009Date of Patent: March 27, 2012Assignee: Hitachi High-Technologies CorporationInventors: Sukehiro Ito, Junichi Katane, Shigeru Kawamata, Shinichi Tomita
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Patent number: 8129679Abstract: Methods are disclosed for operating a device having a high energy particle detector wherein the particles create first incoming traversal events, outgoing backscatter events, higher-order in and out events and incoming events caused by particles which backscatter out of the device, hit nearby mechanical structures and are scattered back into the device. Exemplary method steps include discriminating incoming traversal events from outgoing backscatter events, higher-order in and out events and incoming events by limiting dose rate to a level at ensures that separate events do not overlap and discriminating events from background and from other events based on total energy in each event; discriminating backscatter events from incoming traversal events based on electron path shape; or determining that a first event and a second event are coincident with each other and separating incoming form backscatter events based on electron path shape and energy level.Type: GrantFiled: June 25, 2010Date of Patent: March 6, 2012Assignee: Gatan, Inc.Inventor: Paul Mooney
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Publication number: 20120049060Abstract: A detector system for a transmission electron microscope includes a first detector for recording a pattern and a second detector for recording a position of a feature of the pattern. The second detector is preferably a position sensitive detector that provides accurate, rapid position information that can be used as feedback to stabilize the position of the pattern on the first detector. In one embodiment, the first detector detects an electron energy loss electron spectrum, and the second detector, positioned behind the first detector and detecting electrons that pass through the first detector, detects the position of the zero-loss peak and adjusts the electron path to stabilize the position of the spectrum on the first detector.Type: ApplicationFiled: August 24, 2011Publication date: March 1, 2012Applicant: FEI COMPANYInventors: Uwe Luecken, Cornelis Sander Kooijman, Frank Jeroen Pieter Schuurmans
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Publication number: 20120037800Abstract: An aspect of the present invention relates to a method of evaluating performance of a film-forming material for forming a functional film on an eyeglass lens substrate or a functional film formed by the use of the film-forming material. The performance to be evaluated is selected from the group consisting of a sliding sensation of a surface of the functional film and an adhesion of the functional film, and the evaluation is conducted based on a change over time in a quantity of photoelectrons generated by irradiating with an X-ray the film-forming material or the functional film.Type: ApplicationFiled: April 28, 2011Publication date: February 16, 2012Applicants: HOYA LENS THAILAND LTD., HOYA CORPORATIONInventors: Nobuyuki TADOKORO, Sureerat KUNCHOO, Supaporn PANNAKARN, Veraphat PARNICH
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Publication number: 20120012746Abstract: An ion source may include first, second, and third electrodes. The first electrode may be a repeller having a V-shaped groove. The second electrode may be an electron emitter filament disposed adjacent the base of the V-shaped groove. The third electrode may be an anode that defines an enclosed volume with an aperture formed therein adjacent the electron emitter filament. A potential of the first electrode may be less than a potential of the second electrode, and the potential of the second electrode may be less than a potential of the third electrode. A fourth electrode that is disposed between the electron emitter filament and the anode may be used to produce a more collimated electron beam.Type: ApplicationFiled: July 19, 2010Publication date: January 19, 2012Inventors: FEDERICO A. HERRERO, Patrick A. Roman
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Patent number: 8089044Abstract: A method for correcting astigmatism of an electronic optical column of an electron emission spectromicroscope, comprising the steps of: forming a reference structure on a surface of a sample comprising a structure of interest to be imaged, imaging the reference structure by the spectromicroscope with secondary electrons and with core level photoelectrons, eliminating astigmatism defects appearing during the imaging of the reference structure with secondary electrons and with core level photoelectrons, a material of the reference structure being chosen such that, during core level photoelectron imaging, the contrast C between the average intensity Ia of the material of the reference structure and the average intensity Ib of the material of the sample is such that: C = I a - I b I a + I b ? 0.2 .Type: GrantFiled: December 15, 2009Date of Patent: January 3, 2012Assignee: Commissariat a l'Energie AtomiqueInventors: Olivier Renault, Maylis Lavayssiere, Denis Mariolle
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Patent number: 8071942Abstract: A sample holder apparatus and method for reducing the energy of charged particles entering an annular-acceptance analyzer includes use of an electrically isolated sample support member having a sample receiving surface configured to receive a sample and electrically connect the sample to the sample support member (e.g., wherein the sample support member is configured for application of a retarding bias potential). A grounded sample aperture member defining an aperture relative to the sample support member but electrically isolated therefrom is provided such that the aperture is proximate the sample receiving surface to expose at least a portion of a surface of a sample received thereon to be analyzed (e.g., wherein applying a retarding bias potential to the sample support member produces an electrical retarding field about the aperture that reduces the energy of emitted particles from a sample before they enter an annular-acceptance analyzer).Type: GrantFiled: February 12, 2010Date of Patent: December 6, 2011Assignee: Physical Electronics USA, Inc.Inventors: David G. Watson, Paul E. Larson, Dennis F. Paul, Ronald E. Negri
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Publication number: 20110291006Abstract: A proposed approach to determining both the Energy of an electron in an atom, and time of its existence is presented. The approach utilizes information about the physical system involved to overcome the limitation of the uncertainty principle.Type: ApplicationFiled: August 4, 2011Publication date: December 1, 2011Inventor: James D. Welch
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Patent number: 8053725Abstract: Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an ion beam column a filter that removes the low energy ions from the beam.Type: GrantFiled: June 29, 2009Date of Patent: November 8, 2011Assignee: FEI CompanyInventors: Gregory A. Schwind, Jonathan H. Orloff
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Patent number: 8022364Abstract: An electron spin detector includes plural magnetoresistive sensors and a deceleration lens of an electron beam, and each magnetoresistive sensor is inclined so that the electron beam spread by the deceleration lens can be input perpendicularly to the magnetoresistive sensor.Type: GrantFiled: December 15, 2009Date of Patent: September 20, 2011Assignee: Hitachi, Ltd.Inventor: Teruo Kohashi
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Patent number: 8018234Abstract: A vacuum pressure measuring device with an electron source has a reaction zone for forming ions by impact ionization, wherein the electron source communicates with the reaction zone via a passage for the electrons. The electron source is surrounded by an insulating housing with a vacuum chamber, and a partition part is designed as a membrane carrier, carrying a nanomembrane at least in one section, the membrane separating the vacuum chamber from the outer region in a gastight manner and being at least partially designed to be electron-permeable. The vacuum chamber has a cathode for the emission of electrons. In the region of and/or on the nanomembrane, an anode arrangement is provided such that electrons are conducted against the nanomembrane and at least partially through it. The nanomembrane abuts the vacuum chamber of the vacuum pressure measuring device.Type: GrantFiled: November 23, 2007Date of Patent: September 13, 2011Assignee: Inficon GmbHInventors: Wolfram Knapp, Martin Wüest
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Patent number: 8017920Abstract: A spin polarized ion beam generation apparatus (30) can efficiently generate a spin polarized ion by using a pumping light generator (33) to an ion in a high frequency discharge tube (15) to irradiate optical pumping (33,34) by circularly polarized light and linearly polarized light orthogonal to each other to a metastable atom. For example, a polarized helium ion beam having a spin polarization rate that exceeds 18% and that is as high as 25% can be generated. The spin polarized ion beam generation apparatus (30) also can be applied to a processing apparatus and an analysis apparatus that can irradiate a polarized ion beam to a specimen. According to the spin polarized ion scattering spectroscopy apparatus, the spin status in a region at a depth of about 2 to 3 atomic layers from the surface of the specimen can be measured while discriminating the elements from the atomic layer with a reduced measurement time and with a high accuracy impossible in the conventional technique.Type: GrantFiled: November 29, 2007Date of Patent: September 13, 2011Assignee: Japan Science and Technology AgencyInventors: Taku Suzuki, Yasushi Yamauchi
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Publication number: 20110215240Abstract: The present invention provides a polymer electrolyte membrane with excellent proton conductivity in its thickness direction. Preferably, the polymer electrolyte membrane contains a polymer compound comprising an ionic segment having an ionic functional group and a nonionic segment having substantially no ionic functional group, and the phase containing ionic segments as a main component and the phase containing nonionic segments as a main component are phase-separated, and in the surface region thereof, the change in the amount of the ionic segment from the surface toward the interior substantially decreases monotonically.Type: ApplicationFiled: May 17, 2011Publication date: September 8, 2011Applicant: SUMITOMO CHEMICAL COMPANY, LIMITEDInventors: Junichi IKEUCHI, Mitsunori NODONO, Yasuhiro YAMASHITA
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Patent number: 8013298Abstract: An apparatus for spectrometry that includes a spectrometer configured for second order focusing and capable of 2? azimuthal collection.Type: GrantFiled: July 14, 2009Date of Patent: September 6, 2011Assignee: National University of SingaporeInventor: Anjam Khursheed
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Publication number: 20110210246Abstract: The present invention relates to a novel system and method for the determination of depth profiling with improved accuracy and reliability. The method comprises obtaining spectroscopic data from the sample while under at least two different electrical conditions of the sample, the spectroscopic data comprising a signal of charged particles emitted from the sample, and being indicative of a change in amplitude, spectral position and spectral shape of the signal from the sample while under different electrical conditions of the sample, the change being indicative of the compositional profile and spatial distribution for at least one chemical element in the sample along a direction through the sample.Type: ApplicationFiled: October 22, 2009Publication date: September 1, 2011Applicant: YEDA RESEARCH AND DEVELOPMENT COMPANY LTD.Inventor: Hagai COHEN
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Patent number: 7999225Abstract: The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles 103 eccentrically through a lens 107. As a result of this, energy dispersion will occur in an image formed by the lens. By projecting this image onto a slit 109 in an energy selecting diaphragm 108, it is possible to allow only particles in a limited portion of the energy spectrum to pass. Consequently, the passed beam 113 will have a reduced energy spread. Deflection unit 112 deflects the beam to the optical axis 101. One can also elect to deflect a beam 105 going through the middle of the lens toward the optical axis and having, for example, greater current. The energy dispersed spot is imaged on the slit by a deflector 111. When positioning the energy dispersed spot on the slit, central beam 105 is deflected from the axis to such an extent that it is stopped by the energy selecting diaphragm.Type: GrantFiled: May 26, 2009Date of Patent: August 16, 2011Assignee: FEI CompanyInventor: Alexander Henstra
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Patent number: 7982187Abstract: Described are a method and apparatus for evaluating a least one characteristic of a plasma. The described method uses photons to raise the excitation state to or past the point of ionization of atoms which will traverse the plasma to be evaluated. The ionization of the atoms, followed by the measurement of the energy of any resulting secondary ions, facilitates the determining of one or more characteristics of the plasma. In one example, the photons are provided by a laser which directs a beam to intersect, and in some examples to be collinear with, a beam of atoms directed through the plasma.Type: GrantFiled: October 14, 2008Date of Patent: July 19, 2011Inventor: Alvaro Garcia de Gorordo
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Publication number: 20110168886Abstract: One embodiment relates to a charged-particle energy analyzer apparatus. A first mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a first electrode is arranged such that a first cavity is formed between the second side of the first mesh and the first electrode. A second mesh is arranged to receive the charged particles on a second side and pass the charged particles to a first side, and a second electrode is arranged such that a second cavity is formed between the first side of the second mesh and the second electrode. Finally, a third mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a position-sensitive charged-particle detector is arranged to receive the charged particles after the charged particles pass through the third mesh.Type: ApplicationFiled: July 16, 2010Publication date: July 14, 2011Inventors: Khashayar Shadman, Robert Haynes, Gabor D. Toth, Christopher Sears, Mehran Nasser Ghodsi
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Publication number: 20110168885Abstract: Systems and methods for determining doping type and level in semiconducting nanostructures include generating light from a laser source, directing the light on the device via an extended microscope, collecting electrons emitted from the device in an electron analyzer and calculating the doping type and level of the device.Type: ApplicationFiled: January 11, 2010Publication date: July 14, 2011Applicant: International Business Machines CorporationInventor: Richard A. Haight
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Patent number: 7977630Abstract: There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens located immediately behind the objective lens demagnifies a specimen image magnified by the objective lens. Consequently, a sharply focused electron beam enters the first intermediate lens. This greatly reduces the effects of off-axis aberrations in the intermediate lenses. The first, second, and third intermediate lenses create a crossover image and a microscope image in the entrance window plane and entrance image plane, respectively, of an energy filter. The energy filter focuses the microscope image and crossover image onto the exit image plane and exit window plane, respectively. The output image from the filter is projected onto the final image plane by first and second projector lenses.Type: GrantFiled: April 8, 2005Date of Patent: July 12, 2011Assignee: JEOL Ltd.Inventor: Toshikatsu Kaneyama
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Patent number: 7964844Abstract: The invention avoids charge up when creating a focus map for an electron beam apparatus for inspecting a sample. An auto-focus (AF) control apparatus controls to drive an actuator for moving a focus lens of an optical microscope while acquiring a contrast signal from the optical microscope for each of focus measurement points on a surface of a sample under control of a PC device, to automatically focus on the surface of the sample. The control apparatus detects a focus value of the optical microscope corresponding to a position (height) of the sample surface in an optical axis direction. The PC device receives the detected focus value, and converts the focus value into a voltage to be applied to an electrostatic lens of the electron beam device during actual sample inspection, and stores the converted value.Type: GrantFiled: April 27, 2006Date of Patent: June 21, 2011Assignee: Ebara CorporationInventor: Toshifumi Kimba
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Patent number: 7947951Abstract: This invention is a multi-beam charged particle instrument that can simultaneously focus electrons and a variety of positive and negative ions, such as Gallium, Oxygen and Cesium ions, onto the same material target. In addition, the instrument has provision to simultaneously capture the spectrum of both secondary electrons and ions. The highly dispersive, high resolution mass spectrometer portion of the instrument is expected to detect and identify secondary ion species across the entire range of the periodic table, and also record a portion of their emitted energy spectrum. The electron energy spectrometer part of the instrument is designed to acquire the entire range of scattered electrons, from the low energy secondary electrons through to the elastic backscattered electrons.Type: GrantFiled: July 20, 2007Date of Patent: May 24, 2011Assignee: National University of SingaporeInventor: Anjam Khursheed
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Publication number: 20110095182Abstract: A lens adjustment method and a lens adjustment system which adjust a plurality of multi-pole lenses of an electron spectrometer attached to a transmission electron microscope, optimum conditions of the multi-pole lenses are determined through simulation based on a parameter design method using exciting currents of the multi-pole lenses as parameters.Type: ApplicationFiled: January 6, 2011Publication date: April 28, 2011Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Shohei Terada, Yoshihumi Taniguchi, Kazutoshi Kaji
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Patent number: 7928381Abstract: A non-dispersive electrostatic energy analyzer for electrons and other charged particles having a generally coaxial structure of a sequentially arranged sections of an electrostatic lens to focus the beam through an iris and preferably including an ellipsoidally shaped input grid for collimating a wide acceptance beam from a charged-particle source, an electrostatic high-pass filter including a planar exit grid, and an electrostatic low-pass filter. The low-pass filter is configured to reflect low-energy particles back towards a charged particle detector located within the low-pass filter. Each section comprises multiple tubular or conical electrodes arranged about the central axis. The voltages on the lens are scanned to place a selected energy band of the accepted beam at a selected energy at the iris. Voltages on the high-pass and low-pass filters remain substantially fixed during the scan.Type: GrantFiled: May 19, 2006Date of Patent: April 19, 2011Assignee: Apparati, Inc.Inventors: Michael A. Kelly, Charles E. Bryson, III, Warren Wu
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Patent number: 7928376Abstract: There is provided an element mapping unit, scanning transmission electron microscope, and element mapping method that enable to acquire an element mapping image very easily. On the scanning transmission electron microscope, the electron beam transmitted through an object to be analyzed enters into the element mapping unit. The electron beam is analyzed of its energy into spectrum by an electron spectrometer and an electron energy loss spectrum is acquired. Because the acceleration voltage data for each element and window data for 2-window method, 3-window method or contrast tuning method are already stored in a database and accordingly the spectrum measurement is carried out immediately even when an element to be analyzed is changed to another, the operator can confirm a two-dimensional element distribution map immediately.Type: GrantFiled: September 23, 2005Date of Patent: April 19, 2011Assignee: Hitachi, Ltd.Inventors: Kazutoshi Kaji, Kazuhiro Ueda, Koji Kimoto, Takashi Aoyama, Shunroku Taya, Shigeto Isakozawa
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Patent number: 7919749Abstract: An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is high-pass energy filtered using a retarding lens.Type: GrantFiled: September 19, 2008Date of Patent: April 5, 2011Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventors: Fang Zhou, Juergen Frosien, Pavel Adamec
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Patent number: 7902502Abstract: The present invention provides charged particle energy deflectors, analyzers, devices, device components and methods for terminating charged particle systems and electrically isolating device components. One embodiment of the present invention provides a transparent field termination system for a cylindrical charged particle deflector that is capable of providing an electric field that closely approximates the substantially logarithmically varying electric field of the deflector. The present invention also provides multichannel charged particle analyzers and multichannel EEL spectrometers capable of measuring charged particle energy distributions, including electron energy distributions, with enhanced resolution and sensitivity compared to conventional analyzers.Type: GrantFiled: October 31, 2006Date of Patent: March 8, 2011Assignee: The Regents of the University of Colorado, a body corporateInventor: Donald E. David
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Patent number: 7902503Abstract: A diagnostic system for characterization of an electron beam or an ion beam includes an electrical conducting disk of refractory material having a circumference, a center, and a Faraday cup assembly positioned to receive the electron beam or ion beam. At least one slit in the disk provides diagnostic characterization of the electron beam or ion beam. The at least one slit is located between the circumference and the center of the disk and includes a radial portion that is in radial alignment with the center and a portion that deviates from radial alignment with the center. The electron beam or ion beam is directed onto the disk and translated to the at least one slit wherein the electron beam or ion beam enters the at least one slit for providing diagnostic characterization of the electron beam or ion beam.Type: GrantFiled: August 8, 2008Date of Patent: March 8, 2011Assignee: Lawrence Livermore National Security, LLCInventors: Alan T. Teruya, John W. Elmer, Todd A. Palmer
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Patent number: 7888641Abstract: A lens adjustment method and a lens adjustment system which adjust a plurality of multi-pole lenses of an electron spectrometer attached to a transmission electron microscope, optimum conditions of the multi-pole lenses are determined through simulation based on a parameter design method using exciting currents of the multi-pole lenses as parameters.Type: GrantFiled: July 31, 2008Date of Patent: February 15, 2011Assignee: Hitachi High-Technologies CorporationInventors: Shohei Terada, Yoshihumi Taniguchi, Kazutoshi Kaji
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Patent number: 7888654Abstract: A stable cold field electron emitter is produced by forming a coating on an emitter base material. The coating protects the emitter from the adsorption of residual gases and from the impact of ions, so that the cold field emitter exhibits short term and long term stability at relatively high pressures and reasonable angular electron emission.Type: GrantFiled: September 14, 2007Date of Patent: February 15, 2011Assignee: FEI CompanyInventors: Theodore Carl Tessner, II, Gregory A. Schwind, Lynwood W. Swanson
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Patent number: 7884321Abstract: A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.Type: GrantFiled: July 25, 2008Date of Patent: February 8, 2011Assignee: Revera, IncorporatedInventors: Paola deCecco, Bruno Schueler, David Reed, Michael Kwan, David Stephen Ballance
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Publication number: 20110012018Abstract: The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece disposed about the central pole piece, wherein the lens comprises a magnetic moveable element for movement relative to at least one of the pole pieces, whereby a focal length of the lens is variable by said movement of the magnetic moveable element, thereby enabling a zoom facility for changing the magnification of an image. The movement of the moveable element preferably changes the magnetic circuit between the pole pieces. Also provided is a method of focusing charged particles emitted from a sample and a charged particle energy analyzer, such as an imaging photoelectron spectroscopy system.Type: ApplicationFiled: July 16, 2010Publication date: January 20, 2011Inventors: Bryan BARNARD, Christopher Glenister
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Patent number: 7872232Abstract: To enable measurement of an elastically scattered electron image, a characteristic-X-ray-based element image and an electron-beam-energy-spectroscopy-based element image with a high S/N and high spatial resolution in an electronic microscope having a function to produce an element image. Measurement of a characteristic X-ray signal and electron beam energy loss spectra or measurement of a plurality of energy filter signals including a core loss of an observed element is performed simultaneously and continuously with detection of elastically scattered electrons transmitted through a specimen to be analyzed, and element images based on characteristic X-rays and electron beam energy spectroscopy are added up while correcting a positional misalignment with respect to elastically scattered electron images continuously observed (see FIG. 1).Type: GrantFiled: January 15, 2009Date of Patent: January 18, 2011Assignee: Hitachi High-Technologies CorporationInventor: Kazutoshi Kaji
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Patent number: 7872240Abstract: In a charged-particle beam apparatus having a high-accuracy and high-resolution focusing optical system for charged-particle beam, a group of coils are arranged along a beam emission axis to extend through the contour of radial planes each radiating from the beam emission axis representing a rotary axis and each having a circular arc which subtends a divisional angle resulting from division of a circumferential plane by a natural number larger than 2 so that a superposed magnetic field may be generated on the incident axis of the charged-particle beam and the trajectory of the charged-particle beam may be controlled by the superposed magnetic field.Type: GrantFiled: July 31, 2008Date of Patent: January 18, 2011Assignee: Hitachi High-Technologies CorporationInventors: Hiroyuki Ito, Yuko Sasaki, Yoshiya Higuchi, Takeshi Kawasaki
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Publication number: 20110006205Abstract: An ambient pressure photoelectron microscope which enables in situ chemical processes on a sample surface to be followed at the limit of the spatial resolution of the microscopy technique.Type: ApplicationFiled: July 12, 2009Publication date: January 13, 2011Inventor: Raymond Browning
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Publication number: 20110006206Abstract: In exemplary embodiments, an apparatus, includes a first electrode, a second electrode, a first polygonal channel extending between the electrodes, the first channel having a first side having a center, and a second polygonal channel extending between the electrodes, the second channel having a second side contacting the first side, the second side having a center, wherein the center of the first side and the center of the second side are non-collinear in a direction perpendicular to a surface of the first side, and wherein the first and second channels do not have square cross sections perpendicular to longitudinal axes of the channels.Type: ApplicationFiled: February 11, 2009Publication date: January 13, 2011Inventors: R. Gregory Downing, Bruce Feller