Abstract: Described is a device which enables toolsetting on a machine tool. The device includes a light emitting unit (10) and a light detecting unit (14). A light source (30) causes a light beam (12) to propagate from the emitting unit (10) to the detecting unit (14). A light detector (40) detects the presence or absence of the beam. A trigger signal is produced when occlusion occurs and so the position of an object can be determined by reference to the machine's coordinate readings. The beam (12) may be uncollimated and thus provide a device with an easier set-up and a greater resistance to vibration in use. The light detector (40) and/or light source may be protected from contamination by windows (34,44) or a protector having an aperture therein. The light emitting and detecting units each have an aperture for the light beam.

Abstract: A dimension measuring apparatus comprises a moving member adapted to move for dimension measurement, a grid device for moving with the moving member, an optical device for irradiating the grid device, a light receiving device for receiving the light radiated from the optical device and transmitted through the grid device and for generating a non-sinusoidal wave signal in accordance with the movement of the moving member, and a processing device for measuring the moving distance of the moving member based on the non-sinusoidal wave signal.

Abstract: The opto-electronic sensor (1) for the measurement of the distance (d) to an object (9), resp., for the identification of an object (9) within a monitoring zone (90) is based on triangulation measurement. A light source (21) emits light onto the object (9) or into the monitoring zone (90). The light (35) scattered by the object (9) impinges on a receiving element (31) at an angle (&agr;), which is dependent on distance (d) to the object (9). The latter has tappings (34.1-34.5) distributed over its length, in order to by means of a corresponding selection of these bring the measuring range of the sensor (1) to the value required by a control circuit (4) and as a result of this to increase the measuring resolution correspondingly. In variable amplifiers (6.1, 6.2), two or more detector signals (I1′, I2′) are multiplied with a variable factor respectively determined by the control circuit (4) and subsequently added, resp., subtracted in an adding—or subtracting stage (7).

Abstract: Disclosed is a position system and method for correcting the position of a workpiece during a manufacturing process. The system includes a light generating means for projecting a light beam onto the top surface of the workpiece at a predetermined angle and a video capturing means for detecting the light received by the workpiece. The light projected on the workpiece is scanned to determine the deviation direction and the deviation amount from a predetermined reference point, then the position of the work piece is adjusted based on a positional relationship between a digital image of the projected light on the surface of said workpiece and the predetermined reference image.

Abstract: A wafer oriented includes a mechanism for rotating a wafer and a wafer orientation sensor. The wafer orientation sensor includes a light source for emitting light, a light sensor for sensing the light emitted by the light source as an edge of the wafer is rotated between the light source and the sensor and for producing a sensor signal representative of the sensed light, and an optical filter positioned between the light source and the light sensor. The optical filter has a light-transmission characteristic wherein light in the pass band of the wafer is blocked. When the wafer orientation sensor is used for sensing gallium arsenide wafers, the optical filter is selected to block light at wavelengths greater than about 860 nanometers.

Abstract: The present invention allows a rapid and easy transformation of coordinates for position designation between first and second observation apparatus having means for designating positions in a sample. The present invention includes the steps of setting at least three observation points in random positions in the sample, setting the sample marked for determining the relative positions of the sample and a sample base on the first and second observation apparatus so as to read the coordinates of the above-mentioned observation points, and determining coordinate transformation formulas by calculating a, b, c, and d of below-described formulas (1) by letting one of the above-mentioned three observation points serve as temporary origins, correcting the coordinates of the other two based on the above-mentioned temporary origins, and substituting the corrected coordinates into the formulas (1).

Abstract: The present invention is directed to a system and method which utilize a feedback loop arrangement to control the accurate positioning of components. The system and method may utilize the feedback loop to control a component engaging member operable to retrieve a component. The feedback loop may control the component engaging member by activating a drive subsystem operable to translate the component engaging member. Additionally, the feedback control loop may implemented by utilizing a signal source operable to emit a signal and a signal receiver operable to receive the signal emitted by the signal source. The signal source and signal receiver are fixedly attached to the device. Also, the feedback loop may involve a processor operable to control retrieval of a desired component utilizing at least in part the signal emitted by the signal source and received by the signal receiver.

Abstract: An illumination device emits detection light toward the surface of a substrate from an oblique direction with respect to the substrate. The detection light is shaped into a slit beam by an optical shaper. An alteration device changes the width of the slit beam by controlling the optical shaper. The slit beam strikes the surface of the substrate through an optical element. The slit beam reflected from the surface of the substrate is oscillated along the width direction of the slit by a controlled oscillation mirror. A detector detects the surface height of the substrate based on the oscillating slit beam.

Abstract: A scale and scale reader are disclosed for measuring displacement in two directions. One embodiment of the scale shows a chequered pattern forming a matrix of marks for providing a light pattern to a diffraction grating. The diffraction grating has a similar chequered pattern and provides an interference light pattern to a photodetector array. The interference pattern enables the detector to determine movement in each of the two directions.

Abstract: The present invention provides an apparatus and a method for accurately positioning tools for use in manufacturing or inspection operations whilst reducing the need for costly tooling such as jigs. The method for accurately positioning tools comprises at least the steps of projecting an image onto a surface, detecting the projected image, processing the projected image, calculating at least two dimensional co-ordinates of the projected image relative to a tool, and moving the tool so that it is positioned in a pre-defined spacial relationship with respect to the projected image.

Abstract: An optical sensor for measuring the volume of an object, the object having a top and a side. The optical sensor comprises a source of light and a light sensor adapted to measure the amount of light reflected off the side and off the top of the object, wherein the measured amount of the light reflected off the side and the top of the object correlates to a height and a diameter of the object. At least one optical device is adapted to direct light reflected off the side of the object to the light sensor, and at least one optical device is adapted to direct light reflected off the top of the object to the light sensor.

Abstract: Method and apparatus for maintaining the focal point of a laser beam used for laser machining relative to a workpiece, including an optical distance measuring sensor having a measurement beam, a mirror for combining the measurement and laser beams into a predetermined optical path having a common axis for both beams, and a focusing element which may be in the form of a refractive lens or a reflective parabolic mirror located in the optical path, and a control means for controlling the location of the focal point of the laser beam based on the distance sensed by measurement beam. In drilling, once the hole breaks through the workpiece, the application of the laser beam can be stopped by observing a departure from the incremental distance measurement change.

Abstract: A probe is used to detect axial movement of a rotating part such as a shaft. The probe includes a probe tube portion that protrudes into an annular groove on the rotating part. When the rotating part moves axially, one or the other side surfaces of the groove contacts the probe tube. This contact leads to a changed state of the probe, that is sensed by a sensor.

Abstract: A tilt detector and tilt detection method which are capable of detecting a tilt in a radial direction of an optical disc at a high degree of precision and being cost-effective and simple in head part construction.

Abstract: A sensor array system for detecting the position of an object or energy source. The system includes a plurality of sensors, each sensor having a limited field of view and being capable of detecting an object or energy source that is positioned within its field of view. The fields of view of at least some of the sensors overlap the fields of view of other sensors, and the overlapping fields of view define unique spatial regions. A data acquisition system is operatively connected to the plurality of sensors and is used to determine which sensors simultaneously detect an object or energy source, thereby determining the unique spatial region in which the object or energy source is located.

Abstract: A device for measuring the displacement of a movable object includes a stationary light source (10) that produces an incident light beam. A target feature (17), attached to, or integral with, the object, reflects the incident light beam and forms a first image of the light source in close proximity of the target feature. An imaging lens (26) receives the reflected light beam and reforms the first image of the light source as a second image on the photodetector (20). The photodetector, spaced from the object, receives the reflected light beam and produces an electric signal having a characteristic which is proportional to a received location on the photodetector of the second image and which represents a position of the object. The target feature includes a curved surface that reflects the light beam such that a small, point-like or line-like first image of the light source is formed and reformed as a second image on the photodetector.

Abstract: Apparatus and method for measuring coated test panels, the test panels (2) being taken from a feed magazine (1) by a gripping and moving device, e.g. a laboratory robot, placed on a measuring station (9) and, finally, transferred to a delivery station (5). In the measuring station (9) measurement of the various properties of the coating is carried out by the laboratory robot (3) using various measuring devices (4). This process can in particular involve spatial resolution and electronic recording. The test panels can furthermore be distinguished by a bar code system which is recorded and evaluated electronically.

Abstract: This invention uses the pattern-based signal to accelerate the evaluation process as a means to replace complicated computing procedures. This invention is constructed through implementing absolute coordinates to produce pattern-based signals by position and two optical sensor signals, and through conducting the feature extraction process. This process produces feature signals of sidelong and overlapped issues. Furthermore, through transforming signals, feature signals can be handled by the digital data processor. Thus, this invention can achieve the three main objectives of wafer mapping.

Abstract: An image forming apparatus has a function for correcting a condition for an image formation in accordance with a detection result given by a detecting unit which detects a toner pattern formed on a transfer medium by an image holding component. A deviation obtaining unit obtains a deviation in the main scanning direction between a detecting position on the transfer medium and a predetermined point of the toner pattern to be formed on the transfer medium, the detecting position being a position where the detecting unit detects the toner pattern. An adjusting unit adjusts, in accordance with the deviation obtained by the deviation obtaining unit, a positional relation in the main scanning direction between the detecting position and the predetermined point to reduce the deviation.

Abstract: Dummy wafers of SiC having low light transmission properties to light from the light source of a photo-sensor are used, and when wafers undergoes a heat treatment, the dummy wafers are transferred from a wafer cassette to a wafer boat in which the number of dummy wafers and a state of arrangement of the wafers are detected or monitored.

Abstract: A device for measuring structures of an object by means of a stylus (10) assigned to a coordinate measuring device (22) and including a stylus element (12) and a stylus prolongation (14) in the form of an optical waveguide. The coordinate measuring device (22) includes a sensor for the optical determination of the stylus element (12) and/or at least a target marker assigned directly to the stylus element, and an evaluation unit, with which the structure of the object can be- calculated from the position of the optical sensor in relation to the coordinate system of the coordinate measuring device and the position of the stylus element or the target marker, measured directly by means of the optical sensor.

Abstract: A measuring instrument and a method for measuring patterns on substrates of various thicknesses are described. The measuring instrument comprises an X-Y carriage in which an opening is defined by a peripheral rim. An illumination optical system and multiple optical compensation elements serve to illuminate the measurement region. Multiple storage compartments for the optical compensation elements are shaped on the peripheral rim of the opening of the X-Y carriage. The optical compensation element needed in each case can be removed by the illumination optical system from the associated storage compartment.

Abstract: Apparatus and method for mounting electronic components enhanced in mounting efficiency by eliminating loss time are disclosed. In the apparatus and method, electronic components are picked up from a supplying unit of the electronic components by a transfer head, and are mounted on a board. The height of components already mounted on the board being conveyed is measured by a height measuring unit comprising a CCD light sensor including a light emitting unit and a light receiving unit. In mounting operation, the transfer height of the transfer head when moving on the board is set to a height enough to keep an allowance to the already mounted components on the basis of the height measurement of components. As a result, without useless elevating motions of the transfer head, the loss time is eliminated and the mounting efficiency is enhanced.

Abstract: A criterion for recognizing the presence of paper money is determined from the output of the photosensor (12) in its standby state when paper money is inserted. The criterion is stored in memory (15) for use to detect the existence of paper money.

Abstract: An optical detection and measurement system for selectively detecting the plane of the reflective surfaces of a workpiece. A laser source provides a low power, single wavelength collimated beam of light which is directed onto a workpiece. The beam is passed through a converging lens to a reflected focus on a quad detector. The light beams reflected from the workpiece pass through a diverging lens to the quad detector. The non-diverging optical axis center of the diverging lens is aligned with the center of the quad detector so that a reflected beam passing through the non-diverging optical axis center of the diverging lens creates equal photocurrent outputs from each of the four photosensitive elements of the quad detector to produce a null condition. Where the workpiece is made up of translucent or transparent layers which produce multiple reflected beams, reflected beams from surfaces other than the surface of interest are deflected away from the active surface of the quad detector by the diverging lens.

Abstract: This invention discloses a multi-range fiber-optic reflective micrometer, which comprises a light source for emitting a beam to an object surface, a receiving fiber-optic array, a photo-detector array, and a processor. The processor output a measured value in accordance with a differential signal and a summation signal both derived from the two electric signals corresponding to two adjacent receiving optical fibers which output two sampled lights of stronger intensities as well as a scale voltage. Since the ratio of the differential and the summation signals is proportional to a section of a whole displacement of the object, the whole measuring range could be extended by increasing the number of the receiving optical fibers while its resolution is kept at a degree of deep-sub-micrometer.

Abstract: Preferably, the spatial coordinates of a surface are determined by an optical method comprising scanning the surface with an incident beam of light from a scanner head, determining the range to the surface at a plurality of points on the surface relative to the scanner head by a means of a return beam reflected from the surface, determining the relative spatial location and orientation of the scanner head at the time of scanning each of said plurality of surface points by a remote optical sensing system that includes a plurality of positioning sensors each located at a different known location relative to the other positioning sensors and a plurality of markers attached to the scanner head, with each marker at a at different location relative to the other markers.

Abstract: A disk-shaped object detecting system detecting the presence or absence and position of a disk-shaped object such as semiconductor wafers or magnetic disks includes a light emitting element emitting light toward a circumferential edge of the object while being moved across the object, a light receiving element receiving the light reflected on the circumferential edge of the object while being moved across the object together with the light emitting element, delivering first and second light signals each according to the received light, the first and second light signals having a ratio depending upon at what position between opposite ends the light receiving element receives the light reflected on the circumferential edge of the object, the first and second signals having a magnitude relation which is reversed when the light reflected on the circumferential edge of the object has been moved from one end side to the other end side of the light receiving element, an AND processing section supplied with the first

Abstract: To provide the ultrasonic-welding apparatus, which can attain the above-mentioned requirement, and which can automatically achieve both measurement of the face-deflection the work piece after welding and the welding of work pieces, such as a reel for a magnetic tape.

Abstract: A position sensing device having a single photosensing element is disclosed herein. The position sensing device determines the location of an object to which the position sensing device is attached relative to a surface. The position sensing device has a plurality of light paths that direct light from different area portions of the surface to the single photosensing element. Each area portion of the surface is associated with a light source wherein each light source may be activated individually. A processor illuminates these area portions individually. As the area portions are illuminated, the photosensing element creates image data representative of the image of the area portion being illuminated. The processor analyzes the image data and identifies distinct features in the area portions. As the object is moved relative to the surface, the locations of these distinct features relative to the photosensing element move.

Abstract: An optical position detector which has adjacent detector cells connected to each other in a zig-zag pattern offers a wider dynamic range than a detector with a vertical separation line during transition between a read laser power and a write laser power. This allows use of a fast response bi-cell in place of a slower position sensing device (PSD). The optical position detector has detector cells coupled to each other in a zig-zag pattern. Each detector cell produces a signal when a light beam is focused onto the cell to indicate a location of the light beam relative to the cell.

Abstract: A method is used for dynamic manipulation and/or for adjustment of a module or a component in an optical system, in particular in a microlithographic projection exposure objective for manufacture of semiconductors. The module or component is displaced by at least two actuators, which have detectors for determining at least their relative path displacements. A position of the module or component is determined by at least two sensors, the sensors and the actuators, with their detectors communicating with one another in the manner of a control loop. At least one impulse is exerted on the module or component by the actuators. The timing of the impulse can be deliberately varied, to which end the displacement of the actuators is carried out with a time-variant velocity profile dictated as a function of a determined position snactual of the module or component. A position snactual of the module or component is re-determined after the velocity profile, has been executed.

Abstract: The multi-sensor route detector system preferably consists of at least four sensors (three rail detectors and a truck angle detector), sensor power supplies, signal conditioning for the output of the sensors, and a computer performing pattern matching and logic functions to positively identify track features of interest. The system is not a stand-alone navigation system, but will interface with the rest of the vehicle navigation system and provide data over an interface. This data will include notification of passage of turnouts, whether or not the route changed through the turnout and possibly the type of turnout (i.e., number 6 left). From external sensors, the multi-sensor route detector will obtain a signal such as block distance pulse indicating distance traveled along the track. The best estimate of the vehicle position will also be sent to the multi-sensor route detector. Based on the present position, the multi-sensor route detector will access the appropriate turnout data from its internal database.

Abstract: A print media sensor mounting assembly includes a housing having a sensor mounting element. The sensor mounting element has a sensor position movably mounted therein for movement of the sensor position to a plurality of predetermined positions corresponding to a width of a print media web.

Abstract: A method of determining the accuracy error in scanning signals of a semiconductor line width metrology device comprises the steps of creating a frequency signature template of a patterned feature formed on a semiconductor layer with a line width metrology measurement device that is in nominal operating condition. Another patterned feature similar to the first patterned feature is scanned and the waveform signal is generated of the line width patterned feature. The waveform signal is processed and converted into a frequency signature which is compared with the frequency signature template.

Abstract: A scanning or positioning system with at least two degrees of freedom is provided comprising a supporting base equipped with magnets, a movable platform equipped with at least two electrical coils, and suspension elements providing an elastic connection between the movable platform and the supporting base. The electrical coils are positioned flat on the movable platform, thereby forming an essentially flat arrangement with the movable platform. Combining the flat arrangement with the flat supporting base yields a scanning or positioning system which is potentially compact, lightweight and flat and which features fast response, low power consumption and a relatively large range of motion, e.g. up to 10 mm. The scanning or positioning system with at least two degrees of freedom can be used in the field of scanning probe microscopy or in the field of data storage or imaging.

Abstract: Disclosed is a method for compensating the position of a robot using a laser measuring instrument by establishing an origin coordinate system; irradiating laser beams onto reflectors and calculating distances to the reflectors; converting the origin coordinate system to an established coordinate system; generating coordinates of an end of a lower tip of a welding gun; calculating a position and posture of the robot; teaching the robot four or more postures; uploading position coordinates of the robot and robot teaching program data to a main computer; determining if an error between CAD data and data modeled through simulation is less than a predetermined value, revising the data if it is not or completing compensation of positions of the welding gun, the robot and the jigs if it is; and downloading the robot teaching program to a robot controller.

Abstract: The invention is directed to an apparatus for detecting and ejecting fallen containers on a conveyor line. The detecting apparatus includes at least three sensors arranged beside the conveyor system. Two of the sensors are positioned to detect the top of a container and a third sensor is positioned to detect the bottom of the container. When a container is judged to be fallen on the conveyor line, a control system sends a signal to an ejector apparatus to remove the fallen container from the conveyor line.

Abstract: The position detection device disclosed has a light source unit provided at a tip portion of a position pointing device, and an optical unit for detecting an incident direction of light from a position pointing device. The optical unit has an optical lens, a group of light detection elements, a group of first signal holding elements, a group of second signal holding elements, a group of connection switching elements, a differential output element, and a signal selecting element. The light source unit has a light source element, and a synchronizing element. The position detection device according to the present invention can eliminate extraneous light by high speed modulation, and provide a low cost optical digitizer which is resistant to disturbance noise.

Abstract: A suction nozzle for applying a suction to an object and thereby holding the object, the suction nozzle including a nozzle portion having an end surface, and a suction passage formed in the nozzle portion and opening in the end surface thereof, the end surface providing a suction surface that applies the suction to the object and thereby holds the object. At least a free end portion of the nozzle portion has a shape whose diameter gradually increases in a direction from the end surface thereof toward a base end thereof opposite to the end surface.

Abstract: A sensor system for determining a relative position of a vehicle seat is disclosed. The sensor system has a sensing element and receiver element affixed to the vehicle seat. An enabler is disposed adjacent the vehicle floor. The enabler has at least one activation zone for causing the sensing element to communicate with the at least one receiver element and at least one deactivation zone is provided for preventing the sensing element from communicating with the at least one receiver element. The at least one activation zone defines at least one position of the vehicle seat and the at least one deactivation zone defines at least one other position of the vehicle seat.

Abstract: A position detection apparatus which can control an apparatus to be controlled, such as a motor or the like, more precisely, is disclosed. When a predetermined time has passed since reception of a request signal for requesting output of the position data was detected, the position detector measures the output of a sensor for detecting the position of an object to be measured, and calculates the position data representing the position of the object at a point of time when the measurement was performed, based on the measured output.

Abstract: An apparatus and method for imaging and scanning masks for semiconductor production includes placing a scanning instrument having a probe at a position to scan a layer side of a mask with the probe, placing an optical microscope on a side of the mask opposite the layer side at a position to image a detail of the mask from the side of the mask opposite the layer side, positioning the scanning instrument and the optical microscope relative to each other such that the optical microscope images the probe and the mask simultaneously, and laterally displacing the mask between and relative to the scanning instrument and the optical microscope to permit selection of an imaged detail of the mask while a relative position between the scanning instrument and the optical microscope is maintained. A selected detail of the mask is imaged and/or scanned.

Abstract: A system for precisely locating an absolute position of a target structure disposed at a known relative position on a substrate, where the substrate has devices in a pattern. Input means receive information, including a substrate size, a pattern offset, a device size, the known relative position of the target structure, and a target structure shape. Staging means receive the substrate in a known orientation. Processing means are used to locate several positions. A center position of the substrate is located from the substrate size and the known orientation of the substrate. A first intermediate position is located by combining the center position of the substrate with the pattern offset. A second intermediate position is located by combining the first intermediate position with at least a first component of the device size. A third intermediate position is located by combining the second intermediate position with the known relative position of the target structure.

Abstract: An optical position indicator includes a stationary base; a member having a longitudinal axis, the member being displaceable with respect to the stationary base along the longitudinal axis between a first position and a second position, the member including a reflective notch having two sides, the two sides defining respective planes that intersect the longitudinal axis at 45 degree angles; a light source; a first optical fiber mounted on the stationary base, the first optical fiber having a receiving end for receiving light from the light source and an illuminating end for illuminating the notch with a conical beam of light, the conical beam of light having a central axis and being completely intersected by one of the two sides of the notch, the central axis of the conical beam of light being perpendicular to the longitudinal axis of the member; a second optical fiber mounted on the stationary base, the second optical fiber having a receiving end for receiving light reflected from the notch when the member i

Abstract: This invention discloses a multi-range fiber-optic reflective micrometer, which comprises a light source for emitting a beam to an object surface, a receiving fiber-optic array, a photo-detector array, and a processor. The processor output a measured value in accordance with a differential signal and a summation signal both derived from the two electric signals corresponding to two adjacent receiving optical fibers which output two sampled lights of stronger intensities as well as a scale voltage. Since the ratio of the differential and the summation signals is proportional to a section of a whole displacement of the object, the whole measuring range could be extended by increasing the number of the receiving optical fibers while its resolution is kept at a degree of deep-sub-micrometer.

Abstract: Apparatus for the measurement of position of an object in a given direction, comprising: a one-dimensional array of light detectors, comprising a plurality of detectors including at least three detectors, each of which produces a signal at a given position in response to light reaching the detector; at least one edge between a dark and a light area viewed by at least one of the plurality of the detectors, which the at least one edge moves, in relation to the plurality of detectors, as the object moves in the given directions; and computing circuitry which receives signals from the at least one detector viewing the at least one edge and determines the position responsive to the signals produced by the at least one detector at the given position.

Abstract: An electron beam apparatus and method for at least obtaining an image of a specimen. The apparatus includes an electron optical system having an electron beam source, an element for deflecting electron beams emitted from the electron beam source, an objective lens for converting and irradiating electron beams deflected by the deflection element onto the specimen and a detector for detecting a secondary electron emanated from the specimen by irradiation of the electron beams.

Abstract: A system to guide a media handler used by an automated media exchanger is disclosed. The automated media exchanger is of the type that uses an imaging apparatus to identify media located in the automated media exchanger. The imaging apparatus images a guidance target that is affixed to a predetermined location relative to media within the automated media exchanger. The guidance target comprises a first edge and a second edge, wherein the first edge and the second edge define boundaries of reflective difference. A first axis intersects the first edge at a first point and the second edge at a second point. The distance between the first point and the second point corresponds to a location on a second axis. The system measures the distance between the two points to correlate the location, relative to the second axis, where the target was imaged. The location of the imaging apparatus and, thus, the media handler, may, be readily determined relative to the media.

Abstract: A measuring device for measuring structures on a transparent substrate includes an incident-light illuminating device, an imaging device, and a detector device for the imaged structures and a measuring stage for receiving the substrate. The stage is displaceable in an interferometrically measurable fashion perpendicularly to and relative to an optical axis of the imaging device. The measuring stage is designed as an open frame with a receiving edge for the substrate. A transmitted-light illuminating device is provided beneath the measuring stage. The optical axis of the transmitted light illuminating device is aligned with that of the incident-light illuminating device.