Avalanche Photodetection Structure Patents (Class 257/186)
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Patent number: 8350937Abstract: A solid-state imaging device includes: an avalanche photodiode having a structure including an n+ region, a p+ region, and an avalanche region interposed between the n+ region and the p+ region, all of which are formed to extend in a thickness direction of a semiconductor base; and a pixel repeatedly having the structure of the avalanche photodiode.Type: GrantFiled: January 4, 2010Date of Patent: January 8, 2013Assignee: Sony CorporationInventor: John Rennie
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Patent number: 8338858Abstract: A time correlated single photon counting system having a programmable delay generator triggered by a laser fire event detector. The system may be used for chemical agent detection based on Rayleigh scattering using optical time domain reflectometry techniques. The system may also be used for Raman detection using frequency to time transformations.Type: GrantFiled: December 2, 2011Date of Patent: December 25, 2012Assignee: Optech Ventures, LLCInventors: Glenn Bastiaans, Steve Hankins, Jerald Alan Cole
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Patent number: 8338200Abstract: A method of fabricating a frontside-illuminated inverted quantum well infrared photodetector may include providing a quantum well wafer having a bulk substrate layer and a quantum material layer, wherein the quantum material layer includes a plurality of alternating quantum well layers and barrier layers epitaxially grown on the bulk substrate layer. The method further includes applying at least one frontside common electrical contact to a frontside of the quantum well wafer, bonding a transparent substrate to the frontside of the quantum well wafer, thinning the bulk substrate layer of the quantum well wafer, and etching the quantum material layer to form quantum well facets that define at least one pyramidal quantum well stack. A backside electrical contact may be applied to the pyramidal quantum well stack. In one embodiment, a plurality of quantum well stacks is bonded to a read-out integrated circuit of a focal plane array.Type: GrantFiled: February 2, 2011Date of Patent: December 25, 2012Assignee: L-3 Communications Cincinnati Electronics CorporationInventors: David Forrai, Darrel Endres, Robert Jones, Michael James Garter
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Patent number: 8338857Abstract: A semiconductor waveguide based optical receiver is disclosed. An apparatus according to aspects of the present invention includes an absorption region including a first type of semiconductor region proximate to a second type of semiconductor region. The first type of semiconductor is to absorb light in a first range of wavelengths and the second type of semiconductor to absorb light in a second range of wavelengths. A multiplication region is defined proximate to and separate from the absorption region. The multiplication region includes an intrinsic semiconductor region in which there is an electric field to multiply the electrons created in the absorption region.Type: GrantFiled: August 28, 2010Date of Patent: December 25, 2012Assignee: Intel CorporationInventors: Michael T. Morse, Olufemi I. Dosunmu, Ansheng Liu, Mario J. Paniccia
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Patent number: 8299484Abstract: An optoelectronic semiconductor chip including a radiation passage area, where a contact metallization is applied to the radiation passage area, and a first reflective layer sequence is applied to that surface of the contact metallization which is remote from the radiation passage area, and an optoelectronic component that includes such a chip.Type: GrantFiled: June 23, 2008Date of Patent: October 30, 2012Assignee: Osram Opto Semiconductors GmbHInventors: Stefan Grötsch, Norbert Linder
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Patent number: 8275270Abstract: Avalanche amplification structures including electrodes, an avalanche region, a quantifier, an integrator, a governor, and a substrate arranged to detect a weak signal composed of as few as several electrons are presented. Quantifier regulates the avalanche process. Integrator accumulates a signal charge. Governor drains the integrator and controls the quantifier. Avalanche amplifying structures include: normal quantifier, reverse bias designs; normal quantifier, normal bias designs; lateral quantifier, normal bias designs; changeable quantifier, normal bias, adjusting electrode designs; normal quantifier, normal bias, adjusting electrode designs; and lateral quantifier, normal bias, annular integrator designs. Avalanche amplification structures are likewise arranged to provide arrays of multi-channel devices. The described invention is expected to be used within photodetectors, electron amplifiers, chemical and biological sensors, and chemical and biological chips with lab-on-a-chip applications.Type: GrantFiled: March 1, 2011Date of Patent: September 25, 2012Assignee: Amplification Technologies Inc.Inventors: Dmitry A. Shushakov, Vitaly E. Shubin
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Patent number: 8227882Abstract: A light-sensitive component which has a semiconductor junction between a thin relatively highly doped epitaxial layer and a relatively lightly doped semiconductor substrate. Outside a light incidence window, an insulating layer is arranged between epitaxial layer and semiconductor substrate. In this case, the thickness of the epitaxial layer is less than 50 nm, with the result that a large proportion of the light quanta incident in the light incidence window can be absorbed in the lightly doped semiconductor substrate.Type: GrantFiled: January 31, 2006Date of Patent: July 24, 2012Assignee: austriamicrosystems AGInventors: Hubert Enichlmair, Jochen Kraft, Bernhard Löffler, Gerald Meinhardt, Georg Röhrer, Ewald Wachmann
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High fill-factor laser-treated semiconductor device on bulk material with single side contact scheme
Patent number: 8212327Abstract: The present disclosure provides systems and methods for configuring and constructing a single photo detector or array of photo detectors with all fabrications circuitry on a single side of the device. Both the anode and the cathode contacts of the diode are placed on a single side, while a layer of laser treated semiconductor is placed on the opposite side for enhanced cost-effectiveness, photon detection, and fill factor.Type: GrantFiled: August 9, 2010Date of Patent: July 3, 2012Assignee: SiOnyx, Inc.Inventors: Neal T. Kurfiss, James E. Carey, Xia Li -
Patent number: 8212286Abstract: The semiconductor light receiving element 1 includes a semiconductor substrate 101, and a semiconductor layer having a photo-absorption layer 105 disposed on the top of the semiconductor substrate 101. The semiconductor layer of the semiconductor light receiving element 1 containing at least the photo-absorption layer 105 has a mesa structure, and a side wall of the mesa is provided with a protective film 113 covering the side wall. The protective film 113 is a silicon nitride film containing hydrogen, and a hydrogen concentration in one surface of the protective film 113 located at the side of the mesa side wall is lower than a hydrogen concentration in the other surface of the protective film 113 located at the side that is opposite to the side of the mesa side wall.Type: GrantFiled: December 25, 2008Date of Patent: July 3, 2012Assignee: NEC CorporationInventor: Emiko Fujii
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Publication number: 20120126286Abstract: Photodetectors operable to achieve multiplication of photogenerated carriers at ultralow voltages. Embodiments include a first p-i-n semiconductor junction combined with a second p-i-n semiconductor junction to form a monolithic photodetector having at least three terminals. The two p-i-n structures may share either the p-type region or the n-type region as a first terminal. Regions of the two p-i-n structures doped complementary to that of the shared terminal form second and third terminals so that the first and second p-i-n structures are operable in parallel. A multiplication region of the first p-i-n structure is to multiply charge carriers photogenerated within an absorption region of the second p-i-n structure with voltage drops between the shared first terminal and each of the second and third terminals being noncumulative.Type: ApplicationFiled: November 22, 2010Publication date: May 24, 2012Applicant: Intel CorporationInventors: Yun-chung N. Na, Yimin Kang
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Patent number: 8154280Abstract: Relating to a thin film lamination and a thin film magnetic sensor using the thin film lamination and a method for manufacturing the thin film lamination that realizes a thin film conducting layer having high electron mobility and sheet resistance as an InAsSb operating layer. A thin film lamination is provided which is characterized by having an AlxIn1?xSb mixed crystal layer formed on a substrate, and an InAsxSb1?x (0<x?1) thin film conducting layer directly formed on the AlxIn1?xSb layer, in which the AlxIn1?xSb mixed crystal layer is a layer that exhibits higher resistance than the InAsxSb1?x thin film conducting layer or exhibits insulation or p-type conductivity, and its band gap is greater than the InAsxSb1?x thin film conducting layer, and the a lattice mismatch is +1.3% to ?0.8%.Type: GrantFiled: November 29, 2007Date of Patent: April 10, 2012Assignee: Asahi Kasei Kabushiki KaishaInventors: Ichiro Shibasaki, Hirotaka Geka, Atsushi Okamoto
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Patent number: 8120079Abstract: A method of fabricating multi-spectral photo-sensors including photo-diodes incorporating stacked epitaxial superlattices monolithically integrated with CMOS devices on a common semiconductor substrate.Type: GrantFiled: March 13, 2009Date of Patent: February 21, 2012Assignee: Quantum Semiconductor LLCInventor: Carlos J. R. P. Augusto
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Publication number: 20120025212Abstract: Photodiode devices with GeSn active layers can be integrated directly on p+ Si platforms under CMOS-compatible conditions. It has been found that even minor amounts of Sn incorporation (2%) dramatically expand the range of IR detection up to at least 1750 nm and substantially increases the absorption. The corresponding photoresponse can cover of all telecommunication bands using entirely group IV materials.Type: ApplicationFiled: September 16, 2009Publication date: February 2, 2012Applicant: Arizona Board of Regents, a body corporate acting for and on behalf of Arizona State UniversityInventors: John Kouvetakis, Jose Menendez, Radek Roucka, Jay Mathews
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Patent number: 8106422Abstract: An avalanche photodiode semiconductor device (20) for converting an impinging photon (22) includes a base n+ doped material layer (52) formed having a window section (72) for passing the photon (22). An n? doped material layer (30) is formed on the n+ doped material layer (52) having a portion of a lower surface (74) suitably exposed. An n+ doped material layer (32) is formed on the n? doped material (30). A p+ layer (24) formed on top of the n+ doped layer (32). At least one guard ring (26) is formed in the n? doped layer (30).Type: GrantFiled: October 16, 2010Date of Patent: January 31, 2012Assignee: Northrop Grumman Systems CorporationInventor: John V. Veliadis
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Patent number: 8093624Abstract: A photodiode is provided by the invention, including an n-type active region and a p-type active region. A first one of the n-type and p-type active regions is disposed in a semiconductor substrate at a first substrate surface. A second one of the n-type and p-type active regions includes a high-field zone disposed beneath the first one of the active regions at a first depth in the substrate, a mid-field zone disposed laterally outward of the first active region at a second depth in the substrate greater than the first depth, and a step zone connecting the high-field zone and the mid-field zone in the substrate.Type: GrantFiled: February 15, 2006Date of Patent: January 10, 2012Assignee: Massachusetts Institute of TechnologyInventors: Matthew J. Renzi, Brian F. Aull, Robert K. Reich, Bernard B. Kosicki
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Publication number: 20110284927Abstract: A single carrier avalanche photodiode (200) comprising a p-doped absorption layer (213), an unintentionally doped avalanche multiplication layer (203) and an n-doped collector layer (211) and a method of manufacturing said avalanche photodiode. The absorption layer is doped at a level that allows the photodiode to operate as a single carrier device. Therefore total delay time of the device is mainly dependent on electrons. The collector layer is in charge of reducing capacitance in the device. A built-in field layer (212) of n+? doped material may be provided between the two layers in order to improve the injection of electrons in the collector layer.Type: ApplicationFiled: December 18, 2009Publication date: November 24, 2011Applicant: ALCATEL LUCENTInventor: Mohand Achouche
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Publication number: 20110284926Abstract: An avalanche photodiode structure, to a method of fabricating an avalanche photodiode structure, and to devices incorporating an avalanche photodiode structure. The avalanche photodiode structure comprises a Ge doped region having a first polarity; a GaAs doped region having a second polarity opposite to the first polarity; and an undoped region between the Ge doped region and the GaAs doped region forming a heterojunction; wherein the undoped region comprises Ge and AlxGa1-xAs.Type: ApplicationFiled: May 18, 2011Publication date: November 24, 2011Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCHInventor: Ching Kean Chia
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Patent number: 8053815Abstract: Disclosed herein is a solid-state image pickup device including, a plurality of light receiving units, a transfer channel, a first transfer electrode, a second transfer electrode, first wiring, and second wiring.Type: GrantFiled: August 25, 2008Date of Patent: November 8, 2011Assignee: Sony CorporationInventor: Takeshi Takeda
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Publication number: 20110241070Abstract: An avalanche photodiode including a first electrode; and a substrate including a first semiconductor layer of a first conduction type electrically connected to the first electrode, in which at least an avalanche multiplication layer, a light absorption layer, and a second semiconductor layer of a second conduction type with a larger band gap than the light absorption layer are deposited on the substrate. The second semiconductor layer is separated into inner and outer regions by a groove formed therein, the inner region electrically connected to a second. With the configuration, the avalanche photodiode has a low dark current and high long-term reliability. In addition, the outer region includes an outer trench, and at least the light absorption layer is removed by the outer trench to form a side face of the light absorption layer. With the configuration, the dark current can be further reduced.Type: ApplicationFiled: June 14, 2011Publication date: October 6, 2011Applicant: MITSUBISHI ELECTRIC CORPORATIONInventors: Eiji YAGYU, Eitaro Ishimura, Masaharu Nakaji
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Patent number: 8030684Abstract: The present invention relates to a stable mesa-type photodetector with lateral diffusion junctions. The invention has found that without resorting to the complicated regrowth approach, a simple Zn diffusion process can be used to create high-quality semiconductor junction interfaces at the exposed critical surface or to terminate the narrow-bandgap photon absorption layers. The invention converts the epi material layers near or at the vicinity of the etched mesa trench or etched mesa steps into a different dopant type through impurity diffusion process. Preferably the diffused surfaces are treated with a subsequent surface passivation. This invention can be applied to both top-illuminating and bottom-illuminating configurations.Type: GrantFiled: July 16, 2008Date of Patent: October 4, 2011Assignee: JDS Uniphase CorporationInventors: Syn-Yem Hu, Zhong Pan
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Patent number: 8022351Abstract: A photoelectronic device and an avalanche self-quenching process for a photoelectronic device are described. The photoelectronic device comprises a nanoscale semiconductor multiplication region and a nanoscale doped semiconductor quenching structure including a depletion region and an undepletion region. The photoelectronic device can act as a single photon detector or a single carrier multiplier. The avalanche self-quenching process allows electrical field reduction in the multiplication region by movement of the multiplication carriers, thus quenching the avalanche.Type: GrantFiled: February 12, 2009Date of Patent: September 20, 2011Assignee: California Institute of TechnologyInventors: Xinyu Zheng, Thomas J. Cunningham, Bedabrata Pain
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Patent number: 8008688Abstract: The present invention provides a highly reliable photodiode, as well as a simple method of fabricating such a photodiode. During fabrication of the photodiode, a grading layer is epitaxially grown on a top surface of an absorption layer, and a blocking layer, for inhibiting current flow, is epitaxially grown on a top surface of the grading layer. The blocking layer is then etched to expose a window region of the top surface of the grading layer. Thus, the etched blocking layer defines an active region of the absorption layer. A window layer is epitaxially regrown on a top surface of the blocking layer and on the window region of the top surface of the grading layer, and is then etched to form a window mesa.Type: GrantFiled: April 1, 2008Date of Patent: August 30, 2011Assignee: JDS Uniphase CorporationInventor: Syn-Yem Hu
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Patent number: 7972934Abstract: A photodetector array includes a semiconductor substrate having opposing first and second main surfaces, a first layer of a first doping concentration proximate the first main surface, and a second layer of a second doping concentration proximate the second main surface. The photodetector includes at least one conductive via formed in the first main surface and an anode/cathode region proximate the first main surface and the at least one conductive via. The via extends to the second main surface. The conductive via is isolated from the semiconductor substrate by a first dielectric material. The anode/cathode region is a second conductivity opposite to the first conductivity. The photodetector includes a doped isolation region of a third doping concentration formed in the first main surface and extending through the first layer of the semiconductor substrate to at least the second layer of the semiconductor substrate.Type: GrantFiled: June 19, 2008Date of Patent: July 5, 2011Assignee: Icemos Technology Ltd.Inventors: Robin Wilson, Conor Brogan, Hugh J. Griffin, Cormac MacNamara
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Publication number: 20110140168Abstract: Provided is an avalanche photodetector with an integrated micro lens. The avalanche photodetector includes a light absorbing layer on a semiconductor substrate, an amplification layer on the light absorbing layer, a diffusion layer within the amplification layer, and the micro lens disposed corresponding to the diffusion layer. The micro lens includes a first refractive layer and a second refractive layer having a refractive index less than that of the first refractive layer.Type: ApplicationFiled: April 28, 2010Publication date: June 16, 2011Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTEInventors: Jae-Sik SIM, Bongki Mheen, Myungsook Oh, Yong-Hwan Kwon, Eun Soo Nam
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Patent number: 7928472Abstract: An optical semiconductor device comprises a distributed Bragg reflector layer of a first conductivity type, an optical absorption layer, and a semiconductor layer of a second conductivity type, sequentially formed on a semiconductor substrate; wherein said Bragg reflection layer of the first conductivity type has first semiconductor layers having a band gap wavelength larger than the wavelength of incident light, and second semiconductor layers having a band gap wavelength smaller than the wavelength of incident light; and an optical layer thickness of each of said first semiconductor layers is larger than the optical layer thickness of each of said second semiconductor layers.Type: GrantFiled: October 16, 2008Date of Patent: April 19, 2011Assignee: Mitsubishi Electric CorporationInventors: Eitaro Ishimura, Masaharu Nakaji, Eiji Yagyu
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Patent number: 7928473Abstract: The invention relates to a photo-detector with a reduced G-R noise, which comprises a sequence of a p-type contact layer, a middle barrier layer and an n-type photon absorbing layer, wherein the middle barrier layer has an energy bandgap significantly greater than that of the photon absorbing layer, and there is no layer with a narrower energy bandgap than that in the photon-absorbing layer.Type: GrantFiled: August 4, 2010Date of Patent: April 19, 2011Assignee: An Elbit Systems-Rafael PartnershipInventor: Philip Klipstein
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Patent number: 7928533Abstract: An avalanche photodiode with a nano-scale reach-through structure comprising n-doped and p-doped regions, formed on a silicon island on an insulator, so that the avalanche photodiode may be electrically isolated from other circuitry on other silicon islands on the same silicon chip as the avalanche photodiode. For some embodiments, multiplied holes generated by an avalanche reduces the electric field in the depletion region of the n-doped and p-doped regions to bring about self-quenching of the avalanche photodiode. Other embodiments are described and claimed.Type: GrantFiled: August 14, 2008Date of Patent: April 19, 2011Assignee: California Institute of TechnologyInventors: Xinyu Zheng, Bedabrata Pain, Thomas J. Cunningham
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Patent number: 7910953Abstract: An optical semiconductor device includes a distributed Bragg reflection layer of a first conductivity type, a distortion elaxation layer of the first conductivity type, a light absorbing layer, and a semiconductor layer of a second conductivity type, sequentially arranged on a semiconductor substrate. The distortion relaxation layer the same material as the semiconductor substrate. The total optical length of layers between the distributed Bragg reflection layer and the light absorbing layer is an integer multiple of one-half the wavelength of incident light that is detected.Type: GrantFiled: November 12, 2008Date of Patent: March 22, 2011Assignee: Mitsubishi Electric CorporationInventors: Masaharu Nakaji, Eitaro Ishimura, Eiji Yagyu
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Patent number: 7902570Abstract: A single-photon detector is disclosed that provides reduced afterpulsing without some of the disadvantages for doing so in the prior art. An embodiment of the present invention provides a stimulus pulse to the active area of an avalanche photodetector to stimulate charges that are trapped in energy trap states to detrap. In some embodiments of the present invention, the stimulus pulse is a thermal pulse.Type: GrantFiled: October 9, 2009Date of Patent: March 8, 2011Assignee: Princeton Lightwave, Inc.Inventors: Mark Allen Itzler, Rafael Ben-Michael, Sabbir Sajjad Rangwala
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Patent number: 7898001Abstract: A semiconductor device includes a semiconductor substrate, a photon avalanche detector in the semiconductor substrate. The photon avalanche detector includes an anode of a first conductivity type and a cathode of a second conductivity type. A guard ring is in the semiconductor substrate and at least partially surrounds the photon avalanche detector. A passivation layer of the first conductivity type is in contact with the guard ring to reduce an electric field at an edge of the photon avalanche detector.Type: GrantFiled: December 3, 2008Date of Patent: March 1, 2011Assignees: STMicroelectronics (Research & Development) Limited, The University Court of the University of Edinburgh, Ecole Polytechnique Federale De LausanneInventors: Justin Richardson, Lindsay Grant, Marek Gersbach, Edoardo Charbon, Cristiano Niclass, Robert Henderson
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Patent number: 7899339Abstract: Avalanche amplification structures including electrodes, an avalanche region, a quantifier, an integrator, a governor, and a substrate arranged to detect a weak signal composed of as few as several electrons are presented. Quantifier regulates the avalanche process. Integrator accumulates a signal charge. Governor drains the integrator and controls the quantifier. Avalanche amplifying structures include: normal quantifier, reverse bias designs; normal quantifier, normal bias designs; lateral quantifier, normal bias designs; changeable quantifier, normal bias, adjusting electrode designs; normal quantifier, normal bias, adjusting electrode designs; and lateral quantifier, normal bias, annular integrator designs. Avalanche amplification structures are likewise arranged to provide arrays of multi-channel devices. The described invention is expected to be used within photodetectors, electron amplifiers, chemical and biological sensors, and chemical and biological chips with lab-on-a-chip applications.Type: GrantFiled: June 9, 2006Date of Patent: March 1, 2011Assignee: Amplification Technologies Inc.Inventors: Dimitry A. Shushakov, Vitaly E. Shubin
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Patent number: 7898051Abstract: An imaging device is provided and includes: a photoelectric conversion layer that has a silicon crystal structure and generates signal charges upon incidence of light; a multiplication and accumulation layer that multiplies the signal charges by a phenomenon of avalanche electron multiplication; and a wiring substrate that reads the signal charges from the multiplication and accumulation layer and transmits the read signal charges.Type: GrantFiled: May 2, 2008Date of Patent: March 1, 2011Assignee: FUJIFILM CorporationInventor: Shinji Uya
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Patent number: 7893464Abstract: A method of manufacture of an avalanche photodiode involving a step of making a recess in a top window layer of an avalanche photodiode layer stack, such that a wall surrounding the recess runs smoothly and gradually from the level of the recess to the level of the window layer. Further, diffusing a dopant over the entire window layer area so as to form a p-n junction at the bottom of the recess, and providing a first electrical isolation region around the recess by buried ion implantation or wet oxidation in order to limit the flow of electrical current to the p-n junction. Forming an isolation trench around the photodiode and a second electrical isolation region by ion implantation into the trench such that the second electrical isolation region runs through the absorption layer of the photodiode.Type: GrantFiled: March 28, 2008Date of Patent: February 22, 2011Assignee: JDS Uniphase CorporationInventors: Syn-Yem Hu, Zhong Pan
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Patent number: 7893460Abstract: A semiconductor light detecting element comprises: a semiconductor substrate having a first major surface and a second major surface opposite each other; a first reflective layer, an absorptive layer, a phase adjusting layer, and a second reflective layer sequentially disposed, from the semiconductor substrate, on the first major surface of the semiconductor substrate; and an anti-reflection film on the second major surface of the semiconductor substrate. The first reflective layer is a multilayer reflective layer including laminated semiconductor layers having different refractive indices; the absorptive layer has a band gap energy smaller than band gap energy of the semiconductor substrate; the phase adjusting layer has a band gap energy larger than the band gap energy of the absorptive layer; and the first reflective layer contacts the absorptive layer, without intervention of other layers.Type: GrantFiled: May 21, 2008Date of Patent: February 22, 2011Assignee: Mitsubishi Electric CorporationInventors: Eitaro Ishimura, Masaharu Nakaji
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Patent number: 7888765Abstract: An optical semiconductor device includes a phototransistor for receiving incident light. The phototransistor includes a collector layer of a first conductivity type formed on a semiconductor substrate, a base layer of a second conductivity type formed on the collector layer, and an emitter layer of a first conductivity type formed on the base layer. A thickness of the emitter layer is equal to or less than an absorption length of the incident light in the semiconductor substrate.Type: GrantFiled: July 15, 2008Date of Patent: February 15, 2011Assignee: Panasonic CorporationInventors: Masaki Taniguchi, Hisatada Yasukawa, Takaki Iwai
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Patent number: 7888199Abstract: A semiconductor light-emitting transistor device, including: a bipolar pnp transistor structure having a p-type collector, an n-type base, and a p-type emitter; a first tunnel junction coupled with the collector, and a second tunnel junction coupled with the emitter; and a collector contact coupled with the first tunnel junction, an emitter contact coupled with the second tunnel junction, and a base contact coupled with the base; whereby, signals applied with respect to the collector, base, and emitter contacts causes light emission from the base by radiative recombination in the base.Type: GrantFiled: September 25, 2008Date of Patent: February 15, 2011Assignee: The Board of Trustees of the University of IllinoisInventors: Gabriel Walter, Nick Holonyak, Jr., Milton Feng, Richard Chan
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Patent number: 7880197Abstract: In an electron-injection type APD, it is necessary to prevent a dark current increase and to secure the life time of the device. It is demanded to improve reliability of the APD with a lower production cost. With the InP buffer layer having an n-type doping region on the inside of a region defined by an optical absorption layer, a predetermined doping profile is achieved by ion implantation. Thus, electric field concentration in the avalanche multiplication layer is relaxed. Furthermore, a low-concentration second optical absorption layer is provided between the optical absorption layer and the avalanche multiplication layer. Responsivity of the optical absorption layer is maximized, and depletion of the lateral surface of the optical absorption layer is prevented; thus, electric field concentration is prevented. Preventing edge breakdown, the device improves its reliability.Type: GrantFiled: June 27, 2006Date of Patent: February 1, 2011Assignees: NTT Electronics Corporation, Nippon Telegraph and Telephone CorporationInventors: Tadao Ishibashi, Seigo Ando, Yukihiro Hirota, Yoshifumi Muramoto
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Patent number: 7875906Abstract: The invention offers a photodetector that has an N-containing InGaAs-based absorption layer having a sensitivity in the near-infrared region and that suppresses the dark current and a production method thereof. The photodetector is provided with an InP substrate 1, an N-containing InGaAs-based absorption layer 3 positioned above the InP substrate 1, a window layer 5 positioned above the N-containing InGaAs-based absorption layer 3, and an InGaAs buffer layer 4 positioned between the N-containing InGaAs-based absorption layer 3 and the window layer 5.Type: GrantFiled: June 27, 2008Date of Patent: January 25, 2011Assignee: Sumitomo Electric Industries, Ltd.Inventors: Youichi Nagai, Yasuhiro Iguchi, Kouhei Miura
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Patent number: 7875905Abstract: A semiconductor optical receiver device is provided, which a mesa comprising a plurality of semiconductor crystal layers formed on a semiconductor substrate including a pn junction having a first conductive semiconductor crystal layer and a second conductive semiconductor crystal layer and including a first contact layer on the semiconductor substrate, a plurality of electrodes to apply electric field to the pn junction are coupled on the semiconductor substrate, a second contact layer is formed on a buried layer in which the mesa is buried, and the electric field is applied to the pn junction through the first and second contact layers.Type: GrantFiled: April 15, 2008Date of Patent: January 25, 2011Assignee: Opnext Japan, Inc.Inventors: Takashi Toyonaka, Hiroyuki Kamiyama, Kazuhiro Komatsu
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Patent number: 7875946Abstract: In order to improve reliability by preventing edge breakdown in a semiconductor photodetector having a mesa structure such as a mesa APD, the semiconductor photodetector includes a mesa structure formed on a first semiconductor layer of the first conduction type formed on a semiconductor substrate, the mesa structure including a light absorbing layer for absorbing light, an electric field buffer layer for dropping an electric field intensity, an avalanche multiplication layer for causing avalanche multiplication to occur, and a second semiconductor layer of the second conduction type, wherein the thickness of the avalanche multiplication layer at the portion in the vicinity of the side face of the mesa structure is made thinner than the thickness at the central portion of the mesa structure.Type: GrantFiled: October 27, 2005Date of Patent: January 25, 2011Assignees: Fujitsu Limited, Eudyna Devices Inc.Inventors: Nami Yasuoka, Haruhiko Kuwatsuka, Toru Uchida, Yoshihiro Yoneda
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Patent number: 7863647Abstract: An avalanche photodiode semiconductor device (20) for converting an impinging photon (22) includes a base n+ doped material layer (52) formed having a window section (72) for passing the photon (22). An n? doped material layer (30) is formed on the n+ doped material layer (52) having a portion of a lower surface (74) suitably exposed. An n+ doped material layer (32) is formed on the n? doped material (30). A p+ layer (24) formed on top of the n+ doped layer (32). At least one guard ring (26) is formed in the n? doped layer (30).Type: GrantFiled: March 19, 2007Date of Patent: January 4, 2011Assignee: Northrop Grumman Systems CorporationInventor: John V. Veliadis
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Publication number: 20100320502Abstract: A semiconductor waveguide based optical receiver is disclosed. An apparatus according to aspects of the present invention includes an absorption region including a first type of semiconductor region proximate to a second type of semiconductor region. The first type of semiconductor is to absorb light in a first range of wavelengths and the second type of semiconductor to absorb light in a second range of wavelengths. A multiplication region is defined proximate to and separate from the absorption region. The multiplication region includes an intrinsic semiconductor region in which there is an electric field to multiply the electrons created in the absorption region.Type: ApplicationFiled: August 28, 2010Publication date: December 23, 2010Inventors: Michael T. Morse, Olufemi I. Dosunmu, Ansheng Liu, Mario J. Paniccia
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Patent number: 7851823Abstract: A transmitted light absorption/recombination layer, a barrier layer, a wavelength selection/absorption layer, and an InP window layer having a p-type region are supported by an n-type substrate and arranged in that order. Light with a wavelength of 1.3 ?m reaches the wavelength selection/absorption layer through the InP window layer. Then, the light is absorbed by the wavelength selection/absorption layer and drawn from the device as an electric current signal. Light with a wavelength of 1.55 ?m reaches the transmitted light absorption/recombination layer through the barrier layer. Then, the light is absorbed by the transmitted light absorption/recombination layer, generating electrons and holes. These electrons and holes recombine with each other and, hence, disappear.Type: GrantFiled: April 7, 2008Date of Patent: December 14, 2010Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Eitaro Ishimura
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Patent number: 7834379Abstract: The invention relates to an avalanche photodiode having enhanced gain uniformity enabled by a tailored diffused p-n junction profile. The tailoring is achieved by a two stage doping process incorporating a solid source diffusion in combination with conventional gas source diffusion. The solid source diffusion material is selected for its solubility to the dopant compared to the solubility of the multiplication layer to dopant. The solid source has a diameter between the first and second diffusion windows. Thus, there are three distinct diffusion regions during the second diffusion. The dopant in the multiplication layer at the edge region, the dopant from the solid source material with a relatively higher dopant concentration (limited by the solubility of the dopant in the solid source material) at the intermediate region, and the central region exposed to an infinite diffusion source from the solid source material as it is continually charged with new dopant from the external gas source.Type: GrantFiled: July 15, 2008Date of Patent: November 16, 2010Assignee: JDS Uniphase CorporationInventors: Zhong Pan, David Venables, Craig Ciesla
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Patent number: 7829915Abstract: The present invention changes layer polarities of an epitaxy structure of an avalanche photodiode into n-i-n-i-p. A transport layer is deposed above an absorption layer to prevent absorbing photon and producing electrons and holes. A major part of electric field is concentrated on a multiplication layer for producing avalanche and a minor part of the electric field is left on the absorption layer for transferring carrier without avalanche. Thus, bandwidth limit from a conflict between RC bandwidth and carrier transferring time is relieved. Meanwhile, active area is enlarged and alignment error is improved without sacrificing component velocity too much.Type: GrantFiled: August 7, 2008Date of Patent: November 9, 2010Assignee: National Central UniversityInventors: Jin-Wei Shi, Yen-Hsiang Wu
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Publication number: 20100264459Abstract: An infrared sensor IC and an infrared sensor, which are extremely small and are not easily affected by electromagnetic noise and thermal fluctuation, and a manufacturing method thereof are provided. A compound semiconductor that has a small device resistance and a large electron mobility is used for a sensor (2), and then, the compound semiconductor sensor (2) and an integrated circuit (3), which processes an electrical signal output by the compound semiconductor sensor (2) and performs an operation, are arranged in a single package using hybrid formation. In this manner, an infrared sensor IC that can be operated at room temperature can be provided by a microminiature and simple package that is not conventionally produced.Type: ApplicationFiled: June 22, 2010Publication date: October 21, 2010Inventors: Koichiro Ueno, Naohiro Kuze, Yoshitaka Moriyasu, Kazuhiro Nagase
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Patent number: 7808065Abstract: A semiconductor photosensitive element comprises: a semiconductor substrate of a first conductivity type; a first light absorption layer, a first semiconductor layer of a second conductivity type, a first semiconductor layer of the first conductivity type, a second light absorption layer, and a second semiconductor layer of a second conductivity type, arranged in this order on the semiconductor substrate; a first electrode connected the second semiconductor layer of the second conductivity type; a second electrode connected to the semiconductor substrate; and a third electrode electrically connecting the first semiconductor layer of the first conductivity type to the first semiconductor layer of the second conductivity type. The third electrode is located outside a light detection region for detecting optical signals.Type: GrantFiled: May 30, 2008Date of Patent: October 5, 2010Assignee: Mitsubishi Electric CorporationInventors: Eitaro Ishimura, Masaharu Nakaji
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Patent number: 7808015Abstract: Avalanche photodiodes are provided, wherein the APDs provide both high optical coupling efficiency and low dark count rate. The APDs are formed such that their cap layer has an active region of sufficient width to enable high optical coupling efficiency but the APD still exhibits a low dark count rate. These cap layers have a device area with an active region and an edge region, wherein the size of the active region is substantially matched to the mode-field diameter of an optical beam, and wherein the size of the edge region is made small so as to reduce the number of defects included. These APD designs maintain a substantially uniform gain and breakdown voltage, as necessary for practical use.Type: GrantFiled: March 19, 2008Date of Patent: October 5, 2010Assignee: Princeton Lightwave, Inc.Inventors: Mark Allen Itzler, Rafael Ben-Michael
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Patent number: 7795639Abstract: A photodiode designed to capture incident photons includes a stack of at least three superposed layers of semiconductor materials having a first conductivity type. The stack includes: an interaction layer designed to interact with incident photons so as to generate photocarriers; a collection layer to collect the photocarriers; a confinement layer designed to confine the photocarriers in the collection layer. The collection layer has a band gap less than the band gaps of the interaction layer and confinement layer. The photodiode also includes a region which extends transversely relative to the planes of the layers. The region is in contact with the collection layer and confinement layer and has a conductivity type opposite to the first conductivity type so as to form a p-n junction with the stack.Type: GrantFiled: September 12, 2007Date of Patent: September 14, 2010Assignee: Commissariat A l'Energie AtomiqueInventor: Johan Rothman
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Patent number: 7795640Abstract: The invention relates to a photo-detector with a reduced G-R noise, which comprises a sequence of a p-type contact layer, a middle barrier layer and an n-type photon absorbing layer, wherein the middle barrier layer has an energy bandgap significantly greater than that of the photon absorbing layer, and there is no layer with a narrower energy bandgap than that in the photon-absorbing layer.Type: GrantFiled: June 28, 2004Date of Patent: September 14, 2010Assignee: Semi-Conductor Devices-An Elbit Systems-Rafael PartnershipInventor: Philip Klipstein