Vertically Within Channel (e.g., Profiled) Patents (Class 257/220)
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Patent number: 7960761Abstract: The semiconductor device having a recess channel transistor includes a device isolation structure formed in a semiconductor substrate to define an active region having a recess region at a lower part of sidewalls thereof and a recess channel region formed in the semiconductor substrate under the active region. A method for fabricating the semiconductor device includes forming a device isolation structure in a semiconductor substrate to form an active region having a recess region at a lower part of sidewalls thereof, a gate insulating film formed over the semiconductor substrate including the recess channel region, and a gate electrode formed over the gate insulating film to fill up the recess channel region.Type: GrantFiled: November 9, 2009Date of Patent: June 14, 2011Assignee: Hynix Semiconductor Inc.Inventors: Sung Woong Chung, Sang Don Lee
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Patent number: 7956387Abstract: A transistor, which is formed in a semiconductor substrate having a top surface, includes first and second source/drain regions, a channel connecting the first and second source/drain regions, and a gate electrode for controlling an electrical current flowing in the channel. The gate electrode is disposed in a lower portion of a gate groove defined in the top surface of the semiconductor substrate. The upper portion of the groove is filled with an insulating material. The channel includes a fin-like portion in the shape of a ridge having a top side and two lateral sides in a cross-section perpendicular to a direction defined by a line connecting the first and second source/drain regions. The gate electrode encloses the channel at the top side and the two lateral sides thereof.Type: GrantFiled: September 8, 2006Date of Patent: June 7, 2011Assignee: Qimonda AGInventor: Till Schloesser
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Patent number: 7884390Abstract: A vertically conducting semiconductor device includes a semiconductor substrate having a topside surface and a backside surface. The semiconductor substrate serves as a terminal of the vertically conducting device for biasing the vertically conducting device during operation. An epitaxial layer extends over the topside surface of the semiconductor substrate but terminates prior to reaching an edge of the semiconductor substrate so as to form a recessed region along a periphery of the semiconductor substrate. An interconnect layer extends into the recessed region but terminates prior to reaching an edge of the semiconductor substrate. The interconnect layer electrically contacts the topside surface of the semiconductor substrate in the recessed region to thereby provide a topside contact to the semiconductor substrate.Type: GrantFiled: July 7, 2008Date of Patent: February 8, 2011Assignee: Fairchild Semiconductor CorporationInventors: John T. Andrews, Hamza Yilmaz, Bruce Marchant, Ihsiu Ho
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Patent number: 7759729Abstract: A MOS device includes first and second source/drains spaced apart relative to one another. A channel is formed in the device between the first and second source/drains. A gate is formed in the device between the first and second source/drains and proximate the channel, the gate being electrically isolated from the first and second source/drains and the channel. The gate is configured to control a conduction of the channel as a function of a potential applied to the gate. The MOS device further includes an energy filter formed between the first source/drain and the channel. The energy filter includes an impurity band operative to control an injection of carriers from the first source/drain into the channel.Type: GrantFiled: February 7, 2008Date of Patent: July 20, 2010Assignee: International Business Machines CorporationInventors: Mikael T. Bjoerk, Siegfried F. Karg, Joachim Knoch, Heike E. Riel, Walter H. Riess, Heinz Schmid
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Patent number: 7682889Abstract: A method of manufacturing an insulated gate field effect transistor includes providing a substrate (2) having a low-doped region (4), forming insulated gate trenches (8) and implanting dopants of a first conductivity type at the base of the trenches (8). A body implant is implanted in the low-doped regions between the trenches; and diffused to form an insulated gate transistor structure in which the body implant diffuses to form a p-n junction between a body region (22) doped to have the second conductivity type above a drain region (20) doped to have the first conductivity type, the p-n junction being deeper below the first major surface between the trenches than at the trenches. The difference in doping concentration between the low-doped region (4) and the implanted region at the base of the trenches causes the difference in depth of the body-drain p-n junction formed in the diffusion step.Type: GrantFiled: February 23, 2005Date of Patent: March 23, 2010Assignee: NXP B.V.Inventor: Steven T. Peake
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Patent number: 7615449Abstract: The semiconductor device having a recess channel transistor includes a device isolation structure formed in a semiconductor substrate to define an active region having a recess region at a lower part of sidewalls thereof and a recess channel region formed in the semiconductor substrate under the active region. A method for fabricating the semiconductor device includes forming a device isolation structure in a semiconductor substrate to form an active region having a recess region at a lower part of sidewalls thereof, a gate insulating film formed over the semiconductor substrate including the recess channel region, and a gate electrode formed over the gate insulating film to fill up the recess channel region.Type: GrantFiled: September 29, 2006Date of Patent: November 10, 2009Assignee: Hynix Semiconductor Inc.Inventors: Sung Woong Chung, Sang Don Lee
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Patent number: 7510926Abstract: A strained semiconductor material may be positioned in close proximity to the channel region of a transistor, such as an SOI transistor, while reducing or avoiding undue relaxation effects of metal silicides and extension implantations, thereby providing enhanced efficiency for the strain generation.Type: GrantFiled: November 13, 2006Date of Patent: March 31, 2009Assignee: Advanced Micro Devices, Inc.Inventors: Andy Wei, Thorsten Kammler, Jan Hoentschel, Manfred Horstmann
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Patent number: 7420246Abstract: A vertical type semiconductor device includes: a silicon substrate having a first surface and a second surface; a first electrode disposed on the first surface of the silicon substrate; and a second electrode disposed on the second surface of the silicon substrate. Current is capable of flowing between the first electrode and the second electrode in a vertical direction of the silicon substrate. The second surface of the silicon substrate includes a re-crystallized silicon layer. The second electrode includes an aluminum film so that the aluminum film contacts the re-crystallized silicon layer with ohmic contact.Type: GrantFiled: May 30, 2006Date of Patent: September 2, 2008Assignee: DENSO CORPORATIONInventors: Shoji Ozoe, Tomofusa Shiga, Yoshifumi Okabe, Takaaki Aoki, Takeshi Fukazawa, Kimiharu Kayukawa
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Patent number: 7420230Abstract: A MOSFET-type semiconductor device includes a monocrystalline semiconductor layer formed in a shape of a thin wall on a insulating film, a gate electrode straddling over the semiconductor layer around the middle portion of the wall-shaped semiconductor layer via a gate insulating film, source and drain regions formed at the both ends of the semiconductor layer, a first metal-semiconductor compound layer formed on one of the side walls of each of source and drain regions of the semiconductor layer, and a second metal-semiconductor compound layer having a different composition and Shottky barrier height from that of the first metal-semiconductor compound layer on the other side wall of each of source and drain regions of the semiconductor layer.Type: GrantFiled: August 17, 2005Date of Patent: September 2, 2008Assignee: Kabushiki Kaisha ToshibaInventor: Masakatsu Tsuchiaki
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Publication number: 20080149967Abstract: A back illuminated imaging device 1 comprises a plurality charge blocking regions 19 which are arranged on a front surface 12 side, embedded in CCD charge transferring paths 21, and in which a first thickness T1 measured from the front surface 12 of first portions 19a extending along the CCD charge transferring paths 21 is larger than a first thickness T2 of second portions 19b extending along channel stops 20.Type: ApplicationFiled: September 21, 2005Publication date: June 26, 2008Applicant: SHIMADZU CORPORATIONInventor: Takeharu Etoh
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Patent number: 7244977Abstract: A semiconductor memory device includes a vertical MISFET having a source region, a channel forming region, a drain region, and a gate electrode formed on a sidewall of the channel forming region via a gate insulating film. In manufacturing the semiconductor memory device, the vertical MISFET in which leakage current (off current) is less can be realized by: counter-doping boron of a conductivity type opposite to that of phosphorus diffused into a poly-crystalline silicon film (10) constituting the channel forming region from an n type poly-crystalline silicon film (7) constituting the source region of the vertical MISFET, and the above-mentioned poly-crystalline silicon film (10); and reducing an effective impurity concentration in the poly-crystalline silicon film (10).Type: GrantFiled: October 10, 2002Date of Patent: July 17, 2007Assignee: Elpida Memory, Inc.Inventors: Tsuyoshi Tabata, Kazuo Nakazato, Hiroshi Kujirai, Masahiro Moniwa, Hideyuki Matsuoka, Teruo Kisu, legal representative, Haruko Kisu, legal representative, Satoru Haga, Teruaki Kisu, deceased
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Patent number: 7211844Abstract: Vertical field effect transistors having a channel region defined by at least one semiconducting nanotube and methods for fabricating such vertical field effect transistors by chemical vapor deposition using a spacer-defined channel. Each nanotube is grown by chemical vapor deposition catalyzed by a catalyst pad positioned at the base of a high-aspect-ratio passage defined between a spacer and a gate electrode. Each nanotube grows in the passage with a vertical orientation constrained by the confining presence of the spacer. A gap may be provided in the base of the spacer remote from the mouth of the passage. Reactants flowing through the gap to the catalyst pad participate in nanotube growth.Type: GrantFiled: January 29, 2004Date of Patent: May 1, 2007Assignee: International Business Machines CorporationInventors: Toshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Peter H. Mitchell, Larry Alan Nesbit
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Patent number: 7129533Abstract: A method and apparatus to form a high-concentration, indium-fluorine retrograde well within a substrate. The indium-fluorine retrograde well includes an indium concentration greater than about 3E18/cm3.Type: GrantFiled: December 31, 2003Date of Patent: October 31, 2006Assignee: Intel CorporationInventors: Cory E. Weber, Mark A. Armstrong, Stephen M. Cea, Giuseppe Curello, Sing-Chung Hu, Aaron D. Lilak, Max Wei
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Patent number: 7105875Abstract: A lateral power diodes with an optimal drift doping formed in widebandgap semiconductors like Silicon Carbide, Aluminum Nitride and Gallium Nitride and Diamond are provided with a voltage rating greater 200V. Contrary to conventional vertical design of power diodes, a higher, optimum doping for a given thickness is critical in supporting higher anode/cathode blocking voltage, and lower on-resistance than vertical drift region designs. The backside contact and the anode junction must be able to support the rated blocking voltage of the device.Type: GrantFiled: June 3, 2004Date of Patent: September 12, 2006Assignee: Wide bandgap, LLCInventor: Ranbir Singh
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Patent number: 7102914Abstract: A novel transistor structure for a DRAM cell includes two deep trenches, one trench including a vertical storage cell for storing the data and the second trench including a vertical control cell for controlling the p-well voltage, which, in effect, places part of the p-well in a floating condition thus decreasing the threshold voltage as compared to when the vertical pass transistor is in an off-state. This enables the transistor to exhibit increased gate overdrive and drive current during an active wordline voltage commonly applied to both gates of the storage and control cells.Type: GrantFiled: February 27, 2004Date of Patent: September 5, 2006Assignee: International Business Machines CorporationInventors: Xiangdong Chen, Dureseti Chidambarrao, Geng Wang
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Patent number: 7075128Abstract: A charge transfer element comprising a reverse conductive type well formed on the surface of one conductive type semiconductor substrate, the one conductive type channel region extending in one direction relative to the well, a transfer electrode formed intersecting the channel region, a floating diffusion region formed continuous from the channel region, and an output transistor having a gate connected to the floating diffusion region. In a region where the output transistor is formed, the dopant density profile in the depth direction of the semiconductor substrate exhibits the maximum value relative to a middle region.Type: GrantFiled: February 5, 2004Date of Patent: July 11, 2006Assignee: Sanyo Electric Co., Ltd.Inventor: Yoshihiro Okada
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Patent number: 7057302Abstract: A static random access memory has first and second complementary field-effect transistors. The first complementary field-effect transistor includes a semiconductor substrate, a first field-effect transistor of electron conduction type which has a first drain region constituting a Schottky junction and a gate electrode, and a first field-effect transistor of positive hole conduction type which shares the first drain region and has a shared gate electrode. The second complementary field-effect transistor includes a second field-effect transistor of electron conduction type which has a second drain region and a gate electrode, a second field-effect transistor of positive hole conduction type which shares the second drain region and has a shared gate electrode.Type: GrantFiled: August 3, 2004Date of Patent: June 6, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Kazuya Matsuzawa, Ken Uchida, Takahiro Nakauchi
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Patent number: 6940144Abstract: Semiconductor equipment includes a semiconductor substrate with a semiconductor layer embedded therein and a vertical type transistor. The substrate has a principal side, a rear side opposite to the principal side, and a trench disposed in the rear side of the substrate. The vertical type transistor has a first electrode disposed in the principal side of the substrate, a second electrode disposed in the rear side, and a diffusion region disposed in the principal side. The first electrode connects to the diffusion region through an interlayer insulation film. The second electrode is disposed in the trench and connects to the semiconductor layer exposed in the trench. This vertical transistor has a low ON-state resistance.Type: GrantFiled: September 16, 2003Date of Patent: September 6, 2005Assignee: Denso CorporationInventor: Yoshiaki Nakayama
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Patent number: 6781202Abstract: A higher-performance short channel MOS transistor with enhanced resistance to soft errors caused by exposure to high-energy rays is realized. At the time of forming a deep source/drain diffusion layer region at high density, an intermediate region of a density higher than that of impurity of a semiconductor substrate is formed between the source/drain diffusion layer and the semiconductor substrate of a conduction type opposite to that of the source/drain diffusion layer. The intermediate region is formed with a diffusion window for forming the source/drain, an intermediate layer of uniform concentration and uniform width can be realized at low cost.Type: GrantFiled: November 26, 2002Date of Patent: August 24, 2004Assignee: Hitachi, Ltd.Inventors: Ken Yamaguchi, Yoshiaki Takemura, Kenichi Osada, Masatada Horiuchi, Takashi Uchino
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Patent number: 6744083Abstract: A MOSFET semiconductor device having an asymmetric channel region between the source region and the drain region. In one embodiment, the device comprises a mesa structure on a silicon substrate with the source region being in the substrate and the mesa structure extending from the source region and substrate. The asymmetric channel region can include silicon abutting the source region and a heterostructure material such as Si1-xGex extending to and abutting the drain region. The mole fraction of Ge can increase towards the drain region either uniformly or in steps. In one embodiment, the doping profile of the channel region is non-uniform with higher doping near the source region and lower doping near the drain region.Type: GrantFiled: October 1, 2002Date of Patent: June 1, 2004Assignee: The Board of Regents, The University of Texas SystemInventors: Xiangdong Chen, Sanjay Kumar Banerjee
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Patent number: 6686604Abstract: An architecture for creating multiple operating voltage MOSFETs. Generally, an integrated circuit structure includes a semiconductor area with a major surface formed along a plane and first and second spaced-apart doped regions formed in the surface. A third doped region forming a channel of different conductivity type than the first region is positioned over the first region. A fourth doped region of a different conductivity and forming a channel is positioned over the second region. The process of creating the gate structure for each of the two transistors allows for the formation of oxide layers of different thickness between the two transistors. The transistors are therefore capable of operating at different operating voltages (including different threshold voltages). Each transistor further includes fifth and sixth layers positioned respectively over the third and fourth regions and having an opposite conductivity type with respect to the third and fourth regions.Type: GrantFiled: September 21, 2001Date of Patent: February 3, 2004Assignee: Agere Systems Inc.Inventors: Paul Arthur Layman, John Russell McMacken, J. Ross Thomson, Samir Chaudhry, Jack Qingsheng Zhao
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Patent number: 6664576Abstract: A method and structure of forming a vertical polymer transistor structure is disclosed having a first conductive layer, filler structures co-planar with the first conductive layer, a semiconductor body layer above the first conductive layer, a second conductive layer above the semiconductor body layer, and an etch stop strip positioned between a portion of the first conductive layer and the semiconductor body layer.Type: GrantFiled: September 25, 2002Date of Patent: December 16, 2003Assignee: International Business Machines CorporationInventors: Tricia L. Breen, Lawrence A. Clevenger, Louis L. Hsu, Li-Kong Wang, Kwong Hon Wong
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Patent number: 6653740Abstract: A flip-chip MOSFET structure has a vertical conduction semiconductor die in which the lower layer of the die is connected to a drain electrode on the top of the die by a diffusion sinker or conductive electrode. The source and gate electrodes are also formed on the upper surface of the die and have coplanar solder balls for connection to a circuit board. The structure has a chip scale package size. The back surface of the die, which is inverted when the die is mounted may be roughened or may be metallized to improve removal of heat from the die. Several separate MOSFETs can be integrated side-by-side into the die to form a series connection of MOSFETs with respective source and gate electrodes at the top surface having solder ball connectors. Plural solder ball connectors may be provided for the top electrodes and are laid out in respective parallel rows. The die may have the shape of an elongated rectangle with the solder balls laid out symmetrically to a diagonal to the rectangle.Type: GrantFiled: February 9, 2001Date of Patent: November 25, 2003Assignee: International Rectifier CorporationInventors: Daniel M. Kinzer, Aram Arzumanyan, Tim Sammon
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Patent number: 6586784Abstract: A method for reducing dark current within a charge coupled device includes the steps of providing three or more phases of gates separated by an insulating layer from a buried channel of the first conductivity type in a well or substrate of the second conductivity type, and a clock driver for causing the transfer of charge through the charge coupled device; providing a barrier for separating charge packets when in accumulation state; applying, at a first time period, voltages to all phases of gates sufficient to cause the surface of the first conductivity type to be accumulated by dark current reducing charge carriers; after the first time period, applying, at each gate phase n having a capacitance Cn to the layer of the second conductivity type, a voltage change on the gate phase n given by &Dgr;Vn such that the sum of products of the capacitances and voltage changes is substantially zero ∑ n ⁢ ⁢Type: GrantFiled: October 2, 2002Date of Patent: July 1, 2003Assignee: Eastman Kodak CompanyInventor: Christopher Parks
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Publication number: 20030116792Abstract: A MOSFET semiconductor device having an asymmetric channel region between the source region and the drain region. In one embodiment, the device comprises a mesa structure on a silicon substrate with the source region being in the substrate and the mesa structure extending from the source region and substrate. The asymmetric channel region can include silicon abutting the source region and a heterostructure material such as Si1-xGex extending to and abutting the drain region. The mole fraction of Ge can increase towards the drain region either uniformly or in steps. In one embodiment, the doping profile of the channel region is non-uniform with higher doping near the source region and lower doping near the drain region.Type: ApplicationFiled: October 1, 2002Publication date: June 26, 2003Applicant: Board of Regents, The University of Texas SystemInventors: Xiangdong Chen, Sanjay Kumar Banerjee
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Publication number: 20030047768Abstract: A high-voltage transistor with a low specific on-state resistance and that supports high voltage in the off-state includes one or more source regions disposed adjacent to a multi-layered extended drain structure which comprises extended drift regions separated from field plate members by one or more dielectric layers. With the field plate members at the lowest circuit potential, the transistor supports high voltages applied to the drain in the off-state. The layered structure may be fabricated in a variety of orientations. A MOSFET structure may be incorporated into the device adjacent to the source region, or, alternatively, the MOSFET structure may be omitted to produce a high-voltage transistor structure having a stand-alone drift region.Type: ApplicationFiled: September 7, 2001Publication date: March 13, 2003Applicant: Power Integrations, Inc.Inventor: Donald Ray Disney
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Patent number: 6515317Abstract: Increased pixel density and increased sensitivity to blue light are provided in a charge couple device employing sidewall and surface gates.Type: GrantFiled: September 29, 2000Date of Patent: February 4, 2003Assignee: International Business Machines Corp.Inventors: Gregory Bazan, William A. Klaasen, Randy W. Mann
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Patent number: 6376312Abstract: For fabrication of a vertical field effect transistor structure for each of an array of flash memory cells for a non-volatile memory device, an opening is etched though top and bottom layers of doped insulating material and a layer of dummy material formed between the bottom and top layers of doped insulating material. The opening is filled with a semiconductor material to form a semiconductor fill. The layer of dummy material is etched away such that a channel region of the semiconductor fill is exposed. A tunnel gate dielectric is formed on the channel region of the vertical field effect transistor. A floating gate electrode material is deposited to abut the tunnel gate dielectric. The tunnel gate dielectric and the floating gate electrode material are disposed on a plurality of planes of the channel region of the vertical field effect transistor. Dopant diffuses from the top and bottom layers of doped insulating material into the semiconductor fill to form drain and source extension junctions.Type: GrantFiled: March 26, 2001Date of Patent: April 23, 2002Assignee: Advanced Micro Devices, Inc.Inventor: Allen S. Yu
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Patent number: 6373082Abstract: A compound semiconductor field effect transistor having, between a gate electrode and a drain electrode, a non-gate region which is the channel region not covered by the gate electrode, wherein a plurality of isolation regions are formed in the non-gate region in such a way that they extend in the direction of channel current and contact with the gate electrode. This compound semiconductor field effect transistor is improved in breakdown voltage between drain and gate and yet retains the high-speed operability of transistor.Type: GrantFiled: December 4, 1998Date of Patent: April 16, 2002Assignee: NEC CorporationInventors: Yasuo Ohno, Yuji Takahashi, Kazuaki Kunihiro
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Patent number: 6373080Abstract: A thin film transistor and a fabrication method thereof in which a desired device characteristic is achieved by adjusting the lengths of a channel region and an offset region. The transistor includes a substrate in which a trench is formed, a gate electrode formed in one side in the interior of the trench, a gate insulation film formed in the substrate including the gate electrode, an active layer formed on the gate insulation film, and impurity regions formed on the active layer corresponding to the substrate. The length of the channel and offset regions are adjusted by adjusting the length and width of the trench within the substrate.Type: GrantFiled: November 22, 2000Date of Patent: April 16, 2002Assignee: Hynix Semiconductor, Inc.Inventor: Gyoung-Seon Gil
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Patent number: 6146953Abstract: A fabrication method for a MOSFET device including the steps of forming a first insulating film on a semiconductor substrate wherein an active region and an isolated region are defined, forming a channel ion region by implanting impurity ions into the active region of the semiconductor substrate, forming a first conductive film pattern on a portion of the semiconductor substrate which corresponds to the channel ion region, forming a channel region having lower concentration than the channel ion region by implanting impurity ions in a different type from the ions in the channel ion region into a center portion of the channel ion region through the first conductive film pattern, forming a second conductive film pattern on the first conductive film pattern, forming an impurity region of low concentration in the semiconductor substrate with the first and second conductive film patterns as a mask, forming a sidewall spacer at both sides of the first and second conductive film patterns, and forming an impurity regiType: GrantFiled: September 4, 1998Date of Patent: November 14, 2000Assignee: Hyundai Electronics Industries Co., Ltd.Inventors: Kye-Nam Lee, Jeong-Hwan Son
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Patent number: 6081007Abstract: A gate insulating film and gate electrodes are formed on a substrate containing N-type impurities such as P or As. Under the gate insulating film is a gate region on both sides of which are a first and a second source drain region. The gate region is furnished in its central part with a high-concentration channel injection region containing N-type impurities at a concentration higher than that of the substrate. Between the high-concentration channel injection region on the one hand and the first and the second source drain region and on the other hand, there are formed a first and a second low-concentration channel injection region and having substantially the same impurity concentration as that of the substrate.Type: GrantFiled: January 7, 1999Date of Patent: June 27, 2000Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Takeru Matsuoka
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Patent number: 6060731Abstract: A MOSFET wherein the formation of a channel in a channel formation region is controlled by a voltage applied to an insulated gate, comprising: a semiconductor substrate; a first semiconductor layer (drain region) of a first conductivity type formed on a surface of the semiconductor substrate; a second semiconductor layer (body region) of a second conductivity type provided within the first semiconductor layer, where a part thereof forms the channel formation region; a third semiconductor layer (source region) of the first conductivity type provided selectively in the second semiconductor layer; and a body contact region in electrical contact with the second semiconductor layer. The body contact region is formed in an area that is separated from an active region by a non-active region. With this structure, parasitic bipolar transistors operate simultaneously throughout the entire device so that a uniform breakdown current is generated, thus preventing element destruction due to current concentrations.Type: GrantFiled: July 27, 1998Date of Patent: May 9, 2000Assignee: Kabushiki Kaisha Toyota Chuo KenkyushoInventors: Toshio Murata, Sachiko Kawaji, Takashi Suzuki, Tsutomu Uesugi
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Patent number: 6031259Abstract: A method for manufacturing a light receiving portion for a solid state image pickup device includes the steps of forming a well of a second impurity type on a substrate of a first impurity type, forming a channel stop within an upper surface of the well, forming a vertical CCD portion within the upper surface of the well, forming a gate insulating layer on the upper surface of the well, channel stop and the vertical CCD portion, forming a charge carrying gate electrode above the vertical CCD portion, forming a light receiving photo diode by ion-implanting impurities of the first impurity type, forming a first impurity layer on the light receiving photo diode by ion-implanting impurities of the second impurity type into a surface of the light receiving photo diode, removing a portion of the gate insulating layer above the light receiving photo diode, depositing an insulating layer containing impurities of the first impurity type on the gate insulating layer, the charge carrying gate electrode and the first impType: GrantFiled: November 19, 1997Date of Patent: February 29, 2000Assignee: LG Semicon Co., Ltd.Inventors: Yong Park, Shang-Ho Moon
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Patent number: 5910672Abstract: This invention provides a semiconductor device with a SOI structure and a method of manufacturing the same, preventing deterioration in and making improvement in device characteristics. Nitrogen ion implantation into NMOS and PMOS regions (NR, PR) with resists (22b) and (22c) as masks, respectively, introduces nitrogen ions into channel doped layers (31). The subsequent thermal treatment provides a structure with the channel doped layers (31) containing nitrogen having a prescribed concentration distribution in the depth direction.Type: GrantFiled: July 7, 1997Date of Patent: June 8, 1999Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Toshiaki Iwamatsu, Takashi Ipposhi
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Patent number: 5877520Abstract: The lateral overflow drain for charge coupled devices includes: a semiconductor region 70 of a first conductivity type having a trench 92; a drain region 24 of a second conductivity type below the trench 92; a gate 20 in the trench 92 overlying and separated from a portion of the semiconductor region 70; and a virtual gate 30 of the first conductivity type in the semiconductor region 70 adjacent the trench 92.Type: GrantFiled: August 21, 1997Date of Patent: March 2, 1999Assignee: Texas Instruments IncorporatedInventor: Jaroslav Hynecek
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Patent number: 5867215Abstract: An image sensing device having an array of photodetectors capable of generating electron/hole pairs from incident photons, with multiple charge coupled devices organized in a tandem well design that employs multiple storage wells per pixel. The wells use thresholds to control the overflow of charge from one well to the next and are arranged such that a first charge coupled device having a plurality of cells is operatively coupled to the photodetectors by first transfer means for placing charge accumulated within the photodetectors from generated electron/hole pairs within the first charge coupled device, and a second charge coupled device having a plurality of cells being operatively coupled to the first charge coupled device by second transfer means for removing charge exceeding a predetermined threshold within the first charge coupled device and placing charge exceeding the predetermined threshold within the second charge coupled device.Type: GrantFiled: March 27, 1997Date of Patent: February 2, 1999Assignee: Eastman Kodak CompanyInventor: Martin C. Kaplan
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Patent number: 5801408Abstract: A parasitic transistor of an insulated gate semiconductor device does not easily turn on, so that an SOA of the insulated gate semiconductor device is improved. P.sup.+ semiconductor layers (45) having a higher impurity concentration than that N.sup.+ emitter layers (44) are disposed so that the P.sup.+ semiconductor layers (45) overlap adjacent edges of the N.sup.+ emitter layers (44) of a U-type IGBT and so that bottom portions of the P.sup.+ semiconductor layers (45) contact P base layers (43). An emitter electrode (51) contacts the P base layers (43) through the P.sup.+ semiconductor layers (45). A trench pitch is small, and therefore, a parasitic transistor which is formed by an N.sup.+ emitter region (4), a P base layer (3) and an N.sup.- layer (2) does not easily turn on.Type: GrantFiled: February 13, 1996Date of Patent: September 1, 1998Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Hideki Takahashi
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Patent number: 5635738Abstract: An infrared solid-state image sensing apparatus is provided with a plurality of photoelectric converting sections arranged vertically and horizontally in a matrix pattern on a semiconductor substrate of a first conducting type; a plurality of vertical CCDs which have first buried channels of a second conducting type and electrodes disposed thereon with an insulating film between and which are disposed adjacently to the photoelectric converting sections; and a horizontal CCD having a second buried channel of the second conducting type and electrodes disposed thereon with an insulating film between and which is disposed adjacently to one side of the vertical CCDs. The first and second buried channels are provided with a low-concentration region having a uniform diffusion depth. Further, the surface of each first buried channel is provided with a high-concentration region of the second conducting type having a higher concentration than that of the surface of the second buried channel.Type: GrantFiled: December 20, 1994Date of Patent: June 3, 1997Assignee: Nikon CorporationInventors: Masahiro Shoda, Keiichi Akagawa, Tetsuya Tomofuji
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Patent number: 5614740Abstract: An improved CCD imaging array is disclosed which is capable of operating at 10,000 frames-per-second. The imager consists of an array of 512.times.512 pixels having 16 serial output channels which provides a composite output data rate up to 250 Megasamples/second. The serial output registers are constructed from peristaltic CCDs, each having a GaAs FET output circuit bump-mounted to the silicon substrate. A four-layer pinned photodiode is utilized as the photodetector, and each photodiode has its own antiblooming drain. The antiblooming gates double as an optical shuttering device. Sample-and-hold output circuitry is also provided.Type: GrantFiled: November 30, 1994Date of Patent: March 25, 1997Assignee: Q-Dot, Inc.Inventors: David W. Gardner, Thomas E. Linnenbrink, Stephen D. Gaalema
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Patent number: 5578841Abstract: A multiple output, vertical MOSFET device (11) with improved electrical performance and thermal dissipation is integrated with an additional semiconductor device or semiconductor circuit (18) on a single semiconductor substrate (34). The method of making the vertical MOSFET device (11) involves thinning the semiconductor substrate (34) after fabricating the vertical MOSFET device (11) and the semiconductor circuit (18) to reduce the vertical component of electrical and thermal resistance and to increase the thermal dissipation efficiency. Electrical performance is improved by thinning the semiconductor substrate (34) and by providing a low resistivity, patterned metal buried layer. Thermal management is enhanced by using flip chip bumps (24) to dissipate heat from a top surface (31) of the semiconductor substrate (34) and by using the patterned buried metal layer (26) to dissipate heat from a bottom surface (32) of the semiconductor substrate (34).Type: GrantFiled: December 18, 1995Date of Patent: November 26, 1996Assignee: Motorola, Inc.Inventors: Barbara Vasquez, Irenee M. Pages, E. James Prendergast
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Patent number: 5576561Abstract: A barrier at a uniform depth for an entire wafer is used to produce imaging devices less susceptible to noise pulses produced by the passage of ionizing radiation. The barrier prevents charge created in the bulk silicon of a CCD detector or a semiconductor logic or memory device from entering the collection volume of each pixel in the imaging device. The charge barrier is a physical barrier, a potential barrier, or a combination of both. The physical barrier is formed by an SiO.sub.2 insulator. The potential barrier is formed by increasing the concentration of majority carriers (holes) to combine with the electron's generated by the ionizing radiation. A manufacturer of CCD imaging devices can produce radiation-tolerant devices by merely changing the wafer type fed into his process stream from a standard wafer to one possessing a barrier beneath its surface, thus introducing a very small added cost to his production cost. An effective barrier type is an SiO.sub.2 layer.Type: GrantFiled: August 18, 1994Date of Patent: November 19, 1996Assignee: United States Department of EnergyInventors: Nicholas J. Colella, Joseph R. Kimbrough
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Patent number: 5449931Abstract: In charge coupled imaging devices, a major portion of the photosensitive surface area is covered by electrodes with which the charge storage and the charge transport in the semiconductor body are controlled. These electrodes are preferably made of polycrystalline silicon. This material, however, like other conductive materials known per se, has a comparatively high absorption coefficient, in particular in the short-wave portion of the visible spectrum (blue), which adversely affects the sensitivity. According to the invention, the electrodes are manufactured partly from a very thin poly layer, preferably not thicker than 50 nm, and partly from a less transparent but higher conductivity layer, for example, poly of much greater thickness.Type: GrantFiled: May 20, 1994Date of Patent: September 12, 1995Assignee: U.S. Philips CorporationInventors: Hermanus L. Peek, Eleonore J. M. Daemen, Jan T. J. Bosters
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Patent number: 5445976Abstract: The invention described herein includes, in one of its forms, a method for fabricating a bipolar transistor having a reduced base-collector capacitance. A specific embodiment includes forming a selectively etchable material 44 over a highly doped subcollector layer 42, removing portions of the selectively etchable material 44 and then growing collector 46, base 48, and emitter 50 layers over the structure. The selectively etchable material 44 may then be removed to form an undercut region between the highly doped subcollector layer 42 and the highly doped base 48. The structure provides the advantage of improved high-frequency and high-power operation.Type: GrantFiled: August 9, 1994Date of Patent: August 29, 1995Assignee: Texas Instruments IncorporatedInventors: Timothy S. Henderson, Darrell G. Hill
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Patent number: 5442207Abstract: A charge coupled device including a first electrode consisting of a first region and a second region having lower resistance than the first region, and a second electrode consisting of a first region and a second region having lower resistance than this first region. The first region of the first electrode is adjacent to the first region of the second region at an interval of an insulating film. Capable of utilizing the force of electrical field, the device is superior in charge transfer efficiency as well as charge transfer velocity. It also has the capability to improve the performances of high picture quality solid state image sensing devices and time delay devices, which both necessitate a charge coupled device and operate at high frequencies. Additionally, a solid state image sensing device employing this device is not degraded in a dark state by generating a few pulse charges.Type: GrantFiled: May 26, 1994Date of Patent: August 15, 1995Assignee: Goldstar Electron Co., Ltd.Inventor: Jae H. Jeong
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Patent number: 5442208Abstract: It is known to reduce the leakage current or dark current in charge-coupled devices with buried channels such as, for example, charge-coupled imaging devices by bringing the surface to the inverted state. In such a device, however, it is not possible to empty the channel completely locally in usual manner in that the charge is drained off through the substrate by means of a voltage pulse applied to the gates (charge reset). To be able to carry out charge reset nevertheless, the voltage pulse is applied between the substrate and the intermediate zone interposed between the substrate and the CCD channel. Since this voltage pulse is active over the entire range of the device, the device also prevents charge from being removed in locations where this is not desired when the pulse is applied.Type: GrantFiled: December 16, 1994Date of Patent: August 15, 1995Assignee: U.S. Philips CorporationInventors: Jan T. J. Bosiers, Edwin Roks, Agnes C. M. Kleimann
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Patent number: 5323034Abstract: In a charge transfer image pick-up device including vertical registers and a horizontal register, impurity density of a well layer of the vertical registers is higher than that of a well layer of the horizontal register and a buried layer formed in the well layer of the vertical registers is composed of a first buried layer which is connected to a buried layer of the well layer of the horizontal register and a second buried layer formed on the first buried layer and having impurity density higher than that of the first buried layer, so that degradation of transfer efficiency of signal charge can be avoided and the manufacturing process can be simplified.Type: GrantFiled: April 15, 1993Date of Patent: June 21, 1994Assignee: NEC CorporationInventor: Masayuki Furumiya
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Patent number: 5304842Abstract: A semiconductor assembly comprises a semiconductor die which is attached by a carrier material to a lead frame. The carrier material is coated on the die side with one type of adhesive and on the lead frame side with a different adhesive. The lead frame has a small surface area to connect to the carrier material, while the semiconductor die has a large surface area to connect to the carrier material. As used with one inventive embodiment, the adhesive between the die and the carrier softens at a low temperature preventing the die from cracking at elevated temperatures. The adhesive on the lead frame side of the carrier material softens at a higher temperature than the adhesive of the die side of the adhesive, thereby firmly connecting the lead frame having a small surface area to the carrier.Type: GrantFiled: June 26, 1992Date of Patent: April 19, 1994Assignee: Micron Technology, Inc.Inventors: Warren M. Farnworth, Rockwell D. Smith, Walter L. Moden
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Patent number: 5289022Abstract: A CCD shift register which is improved in the transfer efficiency with a minimal decrease in the amount of electric charge that can be handled. The CCD shift register has an array of transfer electrodes, each comprising a pair of storage and transfer gate electrodes, which are formed on a semiconductor substrate through a gate insulator. A semiconductor region under each storage gate electrode is divided into a plurality of subregions by using impurities.Type: GrantFiled: May 13, 1992Date of Patent: February 22, 1994Assignee: Sony CorporationInventors: Tetsuya Iizuka, Naoki Nishi, Tetsuro Kumesawa
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Patent number: 5286987Abstract: In a charge transfer device having pairs of a first transfer electrode and a second transfer electrode on a semiconductor substrate, the ends of the second transfer electrode overlap the ends of the adjacent first transfer electrodes through an insulating film. A first region implanted with a first conductivity type is formed in the substrate, and a second region implanted with a second and different conductivity type is formed in the first region. The first region is disposed so that its upper stream end is positioned under a substantially medium portion of the first transfer electrode, and that the lower stream end of the first region is positioned under the upper stream end of the first transfer electrode of the succeeding electrode pair.Type: GrantFiled: November 26, 1991Date of Patent: February 15, 1994Assignee: Sharp Kabushiki KaishaInventor: Takashi Watanabe