With Means (e.g., A Buried Channel Stop Layer) To Prevent Leakage Current Along The Interface Of The Semiconductor Layer And The Insulating Substrate Patents (Class 257/349)
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Patent number: 12261168Abstract: An integrated circuit which includes a GaN FET and a metal-insulator-metal capacitor. The capacitor is fully integrated with a lateral GaN process flow, i.e., the same gate metal layer, field plate metal layer and dielectric layer of the GaN FET are also used to form the bottom plate, insulator and top plate of the capacitor. The top plate is contacted by a conductive via, which extends through the top plate. To increase the voltage breakdown capability of the capacitor of the integrated circuit, a portion of the gate metal layer is formed in the shape of a ring around the conductive via.Type: GrantFiled: February 15, 2022Date of Patent: March 25, 2025Assignee: Efficient Power Conversion CorporationInventors: Jianjun Cao, Gordon Stecklein, Muskan Sharma
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Patent number: 12231087Abstract: A transistor stack can include a combination of floating and body tied devices. Improved performance of the RF amplifier can be obtained by using a single body tied device as the input transistor of the stack, or as the output transistor of the stack, while other transistors of the stack are floating transistors. Transient response of the RF amplifier can be improved by using all body tied devices in the stack.Type: GrantFiled: March 10, 2023Date of Patent: February 18, 2025Assignee: pSemi CorporationInventors: Simon Edward Willard, Chris Olson, Tero Tapio Ranta
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Patent number: 12211934Abstract: A semiconductor structure includes a substrate assembly and a semiconductor device. The semiconductor device is formed on the substrate assembly, and includes a body region, two active regions, and a butted body. The active regions are disposed at two opposite sides of the body region, and both have a first type conductivity. The body region and the active regions together occupy on a surface region of the substrate assembly. The butted body has a second type conductivity different from the first type conductivity, and is located on the surface region of the substrate assembly so as to permit the body region to be tied to one of the active regions through the butted body.Type: GrantFiled: January 29, 2021Date of Patent: January 28, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Gulbagh Singh, Kun-Tsang Chuang
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Patent number: 12191353Abstract: A transistor can include a plurality of source regions and a plurality of drain regions arranged in an alternating manner, with each of the source regions and the drain regions being implemented as a first type active region, and a plurality of gate structures implemented relative to the source regions and the drain regions such that application of a voltage to each gate structure results in formation of a conductive channel between a respective pair of source and drain regions. The transistor can further include a body region configured to provide the respective conductive channel upon the application of the voltage to the corresponding gate structure, with the body region being implemented as a second type active region. The transistor can further include a recessed region defined by an end of each drain region and one or both of the gate structures adjacent to the drain region.Type: GrantFiled: July 17, 2023Date of Patent: January 7, 2025Assignee: Skyworks Solutions, Inc.Inventors: Yun Shi, Tzung-Yin Lee
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Patent number: 12193218Abstract: A semiconductor structure and a method for manufacturing the semiconductor structure are provided. The semiconductor structure includes a semiconductor base, a bit line and a word line. The semiconductor base includes a substrate and an isolation structure. The isolation structure is arranged above the substrate and configured to isolate a plurality of active regions from each other. The bit line is arranged in the substrate and connected to the plurality of active regions. The word line is arranged in the isolation structure, intersects with the plurality of active regions and surrounds the plurality of active regions. The substrate is a Silicon-On-Insulator (SOI) substrate.Type: GrantFiled: February 8, 2022Date of Patent: January 7, 2025Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.Inventors: Kui Zhang, Zhan Ying
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Patent number: 12176388Abstract: A transistor structure includes a first channel layer over a second channel layer, where the first and the second channel layers include a monocrystalline transition metal dichalcogenide (TMD). The transistor structure further includes a source material coupled to a first end of the first and second channel layers, a drain material coupled to a second end of the first and second channel layers, a gate electrode between the source material and the drain material, and between the first channel layer and the second channel layer and a gate dielectric between the gate electrode and each of the first channel layer and the second channel layer.Type: GrantFiled: June 26, 2020Date of Patent: December 24, 2024Assignee: Intel CorporationInventors: Kevin O'Brien, Chelsey Dorow, Kirby Maxey, Carl Naylor, Shriram Shivaraman, Sudarat Lee, Tanay Gosavi, Chia-Ching Lin, Uygar Avci, Ashish Verma Penumatcha
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Patent number: 12136562Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where each of the first transistors includes a single crystal channel; first metal layers interconnecting at least the first transistors; a second metal layer overlaying the first metal layers; a first oxide layer disposed over the second metal layer; a second oxide layer disposed over the first oxide layer; and a second level including at least one array of memory cells and second transistors, where each of the memory cells includes at least one of the second transistors, where the second level overlays the first level, where at least one of the second transistors includes at least two independent gates, where the second level is directly bonded to the first level, and where the bonded includes direct oxide-to-oxide bonds.Type: GrantFiled: December 2, 2023Date of Patent: November 5, 2024Assignee: Monolithic 3D Inc.Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
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Patent number: 12125895Abstract: A transistor includes a channel including a first layer including a first monocrystalline transition metal dichalcogenide (TMD) material, where the first layer is stoichiometric and includes a first transition metal. The channel further includes a second layer above the first layer, the second layer including a second monocrystalline TMD material, where the second monocrystalline TMD material includes a second transition metal and oxygen, and where the second layer is sub-stoichiometric. The transistor further includes a gate electrode above a first portion of the channel layer, a gate dielectric layer between the channel layer and the gate electrode, a source contact on a second portion of the channel layer and a drain contact on a third portion of the channel layer, where the gate electrode is between drain contact and the source contact.Type: GrantFiled: June 29, 2020Date of Patent: October 22, 2024Assignee: Intel CorporationInventors: Chelsey Dorow, Kevin O'Brien, Carl Naylor, Uygar Avci, Sudarat Lee, Ashish Verma Penumatcha, Chia-Ching Lin, Tanay Gosavi, Shriram Shivaraman, Kirby Maxey
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Patent number: 12126339Abstract: A new class of logic gates are presented that use non-linear polar material. The logic gates include multi-input majority gates and threshold gates. Input signals in the form of analog, digital, or combination of them are driven to first terminals of non-ferroelectric capacitors. The second terminals of the non-ferroelectric capacitors are coupled to form a majority node. Majority function of the input signals occurs on this node. The majority node is then coupled to a first terminal of a capacitor comprising non-linear polar material. The second terminal of the capacitor provides the output of the logic gate, which can be driven by any suitable logic gate such as a buffer, inverter, NAND gate, NOR gate, etc. Any suitable logic or analog circuit can drive the output and inputs of the majority logic gate. As such, the majority gate of various embodiments can be combined with existing transistor technologies.Type: GrantFiled: November 16, 2022Date of Patent: October 22, 2024Assignee: Kepler Computing Inc.Inventors: Sasikanth Manipatruni, Rafael Rios, Ikenna Odinaka, Robert Menezes, Rajeev Kumar Dokania, Ramamoorthy Ramesh, Amrita Mathuriya
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Patent number: 12114540Abstract: A display device (1) includes: a substrate (2); and a first transistor (1a) formed on the substrate (2). The first transistor (1a) includes: an oxide semiconductor layer (4) formed on the substrate (2); a gate insulating layer (5) formed on the oxide semiconductor layer (4); and a gate electrode (6) formed on the gate insulating layer (5). The oxide semiconductor layer (4) includes: a conductive region (4a) provided with conductivity; a first resistance region (4b) positioned below the gate electrode (6); and a second resistance region (4c) provided between the conductive region (4a) and the first resistance region (4b), and positioned outside the gate electrode (6). The first resistance (4b) is larger in resistance than the second resistance region (4c).Type: GrantFiled: August 24, 2018Date of Patent: October 8, 2024Assignee: SHARP KABUSHIKI KAISHAInventors: Yohsuke Kanzaki, Seiji Kaneko, Takao Saitoh, Masahiko Miwa, Masaki Yamanaka, Yi Sun
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Patent number: 12002860Abstract: A semiconductor device is provided. The semiconductor device includes a gate layer, a semiconductor layer and a ferroelectric layer disposed between the gate layer and the semiconductor layer. The semiconductor layer includes a first material containing a Group III element, a rare-earth element and a Group VI element, the ferroelectric layer includes a second material containing a Group III element, a rare-earth element and a Group V element and the gate layer includes a third material containing a Group III element and a rare-earth element. A method of fabricating a semiconductor device is also provided.Type: GrantFiled: August 13, 2021Date of Patent: June 4, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Oreste Madia, Georgios Vellianitis, Gerben Doornbos, Marcus Johannes Henricus Van Dal
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Patent number: 12003236Abstract: A semiconductor device includes: an electronic circuit to receive a first signal and transmit a second signal; a power supply circuit to supply a power supply voltage to the electronic circuit; and a correction circuit to change a value of the power supply voltage to switch between a normal and a refresh operation mode. The electronic circuit includes: a first Pch transistor in which a potential of a first gate changes according to the first signal, and a potential of one of the first source and drain changes in response to the power supply voltage; and a first Nch transistor in which the second gate is electrically connected to the first gate, a potential of one of the second source and drain is equal to or lower than a ground potential, and another of the second source and drain is electrically connected to another of the first source and drain.Type: GrantFiled: March 7, 2022Date of Patent: June 4, 2024Assignee: Kioxia CorporationInventors: Ryuji Takahashi, Kazuya Matsuzawa
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Patent number: 11978810Abstract: Various embodiments of the present disclosure are directed towards a method for forming a varactor comprising a reduced surface field (RESURF) region. The method includes forming a drift region having a first doping type within a substrate. A RESURF region having a second doping type is formed within the substrate such that the RESURF region is below the drift region. A gate structure is formed on the substrate. A pair of contact regions is formed within the substrate on opposing sides of the gate structure. The contact regions respectively abut the drift region and have the first doping type, and wherein the first doping type is opposite the second doping type.Type: GrantFiled: May 19, 2021Date of Patent: May 7, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Liang-Yu Su, Chih-Wen Yao, Hsiao-Chin Tuan, Ming-Ta Lei
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Patent number: 11955475Abstract: A resistor including a device isolation layer is described that includes a first active region and a second active region, a buried insulating layer, and an N well region. The N well region surrounds the first active region, the second active region, the device isolation layer and the buried insulating layer. A first doped region and a second doped region are disposed on the first active region and the second active region. The first doped region and the second doped region are in contact with the N well region and include n type impurities.Type: GrantFiled: December 30, 2022Date of Patent: April 9, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Woocheol Shin, Myunggil Kang, Minyi Kim, Sanghoon Lee
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Patent number: 11948998Abstract: A method includes forming a semiconductor substrate having an oxide layer embedded therein, forming a multi-layer (ML) stack including alternating channel layers and non-channel layers over the semiconductor substrate, forming a dummy gate stack over the ML, forming an S/D recess in the ML to expose the oxide layer, forming an epitaxial S/D feature in the S/D recess, removing the non-channel layers from the ML to form openings between the channel layers, where the openings are formed adjacent to the epitaxial S/D feature, and forming a high-k metal gate stack (HKMG) in the openings between the channel layers and in place of the dummy gate stack.Type: GrantFiled: July 28, 2022Date of Patent: April 2, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Xusheng Wu, Chang-Miao Liu, Huiling Shang
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Patent number: 11908935Abstract: The present invention provides a single-gate field effect transistor device and a method for modulating the drive current thereof. The field effect transistor comprises an active layer, a source region and a drain region formed at two sides of the active layer, and a channel region located between the source region and the drain region. The field effect transistor device is configured as follows: when the transistor is turned off, a second channel of depletion-mode spontaneously forms in the channel region, and the second channel does not connect the source region and the drain region; when the transistor is turned on, the second channel and a first channel of the same polarity as the second channel are formed in the channel region; at least one of the first channel and the second channel injects carriers into the other channel so that current conduction occurs between the source and the drain and the carriers of the second channel contribute to the on-state current of the transistor.Type: GrantFiled: May 26, 2020Date of Patent: February 20, 2024Assignee: Soochow UniversityInventors: Mingxiang Wang, Jinfeng Zhao, Dongli Zhang, Huaisheng Wang
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Patent number: 11876011Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where each of the first transistors includes a single crystal channel; first metal layers interconnecting at least the first transistors; a second metal layer overlaying the first metal layers; and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where at least one of the second transistors includes a raised source or raised drain transistor structure, where the second level is directly bonded to the first level, and where the bonded includes direct oxide-to-oxide bonds.Type: GrantFiled: June 27, 2023Date of Patent: January 16, 2024Assignee: Monolithic 3D Inc.Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
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Patent number: 11860489Abstract: The shorting bar includes a test signal wiring layer, an insulating layer, a signal lead layer, a protective layer and a bonding lead layer that are sequentially stacked. The test signal wiring layer is arranged with test signal lines, and the signal lead layer is arranged with signal leads. The test signal lines are made of a transparent conductive material, and a coverage region of the insulating layer and a coverage region of the protective layer are staggered from coverage regions of the test signal lines; or, the signal leads are made of the transparent conductive material, the coverage region of the protective layer is staggered from coverage regions of the signal leads; or, the protective layer is arranged with a plurality of first through holes, and the first through holes correspond to the signal leads in a one-to-one correspondence.Type: GrantFiled: July 8, 2021Date of Patent: January 2, 2024Assignee: HKC Corporation LimitedInventors: Shishuai Huang, Wei Li
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Patent number: 11804550Abstract: A method for fabricating a field-effect transistor includes the following steps. A gate structure layer in a line shape including a first region and a second region abutting to the first region is formed on a silicon layer. A first implanting process is performed to implant first-type dopants at least into a second portion of the second region of the gate structure layer. A second implanting region is performed to implant second-type dopants into the silicon layer to form a source region and a second region corresponding to the first region of the gate structure layer. The gate structure layer has a conductive-type junction at an interface between the first and second portions of the second region. A width of the silicon layer under the second region of the gate structure layer is smaller than a width of the gate structure layer.Type: GrantFiled: March 27, 2022Date of Patent: October 31, 2023Assignee: United Microelectronics Corp.Inventors: Su Xing, Chung Yi Chiu, Hai Biao Yao
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Patent number: 11789168Abstract: A diode and a transistor are connected in parallel. The transistor is located on a first doped region forming a PN junction of the diode with a second doped region located under the first region. The circuit functions as an ionizing radiation detection cell by generating a current through the PN junction which changes by a voltage generated across the transistor. This change in voltage is compared to a threshold to detect the ionizing radiation.Type: GrantFiled: August 23, 2021Date of Patent: October 17, 2023Assignee: STMicroelectronics (Crolles 2) SASInventors: Gilles Gasiot, Fady Abouzeid
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Patent number: 11756959Abstract: The present disclosure provides an integrated circuit that includes a circuit formed on a semiconductor substrate; and a de-cap device formed on the semiconductor substrate and integrated with the circuit. The de-cap device includes a filed-effect transistor (FET) that further includes a source and a drain connected through contact features landing on the source and drain, respectively; a gate stack overlying a channel and interposed between the source and the drain; and a doped feature disposed underlying the channel and connecting to the source and the drain, wherein the doped feature is doped with a dopant of a same type of the source and the drain.Type: GrantFiled: June 14, 2021Date of Patent: September 12, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ching-Wei Tsai, Yu-Xuan Huang, Kuan-Lun Cheng, Wei Ju Lee, Chun-Fu Cheng, Chung-Wei Wu
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Patent number: 11728335Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, buried channel structures integrated with non-planar structures. In an example, an integrated circuit structure includes a first fin structure and a second fin structure above a substrate. A gate structure is on a portion of the substrate directly between the first fin structure and the second fin structure. A source region is in the first fin structure. A drain region is in the second fin structure.Type: GrantFiled: January 25, 2019Date of Patent: August 15, 2023Assignee: Intel CorporationInventors: Guannan Liu, Akm A. Ahsan, Mark Armstrong, Bernhard Sell
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Patent number: 11705503Abstract: A semiconductor device includes a substrate, a gate electrode on the substrate, a gate spacer on a sidewall of the gate electrode, an active pattern penetrating the gate electrode and the gate spacer, and an epitaxial pattern contacting the active pattern and the gate spacer. The gate electrode extends in a first direction. The gate spacer includes a semiconductor material layer. The active pattern extends in a second direction crossing the first direction.Type: GrantFiled: September 30, 2020Date of Patent: July 18, 2023Inventors: Jin Bum Kim, MunHyeon Kim, Hyoung Sub Kim, Tae Jin Park, Kwan Heum Lee, Chang Woo Noh, Maria Toledano Lu Que, Hong Bae Park, Si Hyung Lee, Sung Man Whang
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Patent number: 11705514Abstract: A MOS transistor structure is provided. The MOS transistor structure includes a semiconductor substrate having an active area including a first edge and a second edge opposite thereto. A gate layer is disposed on the active area of the semiconductor substrate and has a first edge extending across the first and second edges of the active area. A source region having a first conductivity type is in the active area at a side of the first edge of the gate layer and between the first and second edges of the active area. First and second heavily doped regions of a second conductivity type are in the active area adjacent to the first and second edges thereof, respectively, and spaced apart from each other by the source region.Type: GrantFiled: April 26, 2016Date of Patent: July 18, 2023Assignee: MediaTek Inc.Inventors: Cheng Hua Lin, Yan-Liang Ji
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Patent number: 11695014Abstract: To provide a semiconductor device having a thin-film BOX-SOI structure and capable of realizing a high-speed operation of a logic circuit and a stable operation of a memory circuit. A semiconductor device according to the present invention includes a semiconductor support substrate, an insulation layer having a thickness of at most 10 nm, and a semiconductor layer. In an upper surface of the semiconductor layer, a first field-effect transistor including a first gate electrode and constituting a logic circuit is formed. Further, in the upper surface of the semiconductor layer, a second field-effect transistor including a second gate electrode and constituting a memory circuit is formed. At least three well regions having different conductivity types are formed in the semiconductor support substrate.Type: GrantFiled: November 17, 2021Date of Patent: July 4, 2023Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Ryuta Tsuchiya, Toshiaki Iwamatsu
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Patent number: 11668988Abstract: When a pixel portion and a driver circuit are formed over one substrate and a counter electrode is formed over an entire surface of a counter substrate, the driver circuit may be adversely affected by an optimized voltage of the counter electrode. A semiconductor device according to the present invention has a structure in which: a liquid crystal layer is provided between a pair of substrates; one of the substrates is provided with a pixel electrode and a driver circuit; the other of the substrates is a counter substrate which is provided with two counter electrode layers in different potentials; and one of the counter electrode layers overlaps with the pixel electrode with the liquid crystal layer therebetween and the other of the counter electrode layers overlaps with the driver circuit with the liquid crystal layer therebetween. An oxide semiconductor layer is used for the driver circuit.Type: GrantFiled: November 3, 2016Date of Patent: June 6, 2023Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Jun Koyama, Shunpei Yamazaki
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Patent number: 11658211Abstract: Occurrence of short-channel characteristics and parasitic capacitance of a MOSFET on a SOI substrate is prevented. A sidewall having a stacked structure obtained by sequentially stacking a silicon oxide film and a nitride film is formed on a side wall of a gate electrode on the SOI substrate. Subsequently, after an epitaxial layer is formed beside the gate electrode, and then, the nitride film is removed. Then, an impurity is implanted into an upper surface of the semiconductor substrate with using the gate electrode and the epitaxial layer as a mask, so that a halo region is formed in only a region of the upper surface of the semiconductor substrate which is right below a vicinity of both ends of the gate electrode.Type: GrantFiled: April 7, 2021Date of Patent: May 23, 2023Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Yoshiki Yamamoto, Hideki Makiyama, Toshiaki Iwamatsu, Takaaki Tsunomura
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Patent number: 11658230Abstract: A method for forming a semiconductor structure is provided. The method includes the following operations. A substrate is received. A fin structure is formed on the substrate, and a dielectric layer is formed over the fin structure. A sacrificial gate is formed over the substrate. A portion of the dielectric layer is exposed through the sacrificial gate. Recesses are formed in the fin structure at two sides of the sacrificial gate. A cleaning operation is performed with an HF-containing plasma. The HF-containing plasma includes HF and NH3.Type: GrantFiled: November 23, 2020Date of Patent: May 23, 2023Assignee: Taiwan Semiconductor Manufacturing Company Ltd.Inventors: Chun Hsiung Tsai, Ru-Shang Hsiao, Clement Hsingjen Wann
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Patent number: 11631609Abstract: A method for manufacturing a microelectronic device from a semiconductor-on-insulator substrate, the device having active components formed in active areas of the substrate separated by isolation trenches and which are delimited by first sidewalls, the isolation trenches being filled, at least partially, with a first dielectric material, includes a step of chemically attacking a passive section of the first bottom of the isolation trenches configured to generate, at said section, a roughness quadratic mean comprised between 2 nm and 6 nm. The method also includes a step of forming a passive component covering the first dielectric material and directly above the passive section.Type: GrantFiled: July 21, 2021Date of Patent: April 18, 2023Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Heimanu Niebojewski, François Andrieu, Claire Fenouillet-Beranger
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Patent number: 11574905Abstract: A resistor including a device isolation layer is described that includes a first active region and a second active region, a buried insulating layer, and an N well region. The N well region surrounds the first active region, the second active region, the device isolation layer and the buried insulating layer. A first doped region and a second doped region are disposed on the first active region and the second active region. The first doped region and the second doped region are in contact with the N well region and include n type impurities.Type: GrantFiled: July 9, 2021Date of Patent: February 7, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Woocheol Shin, Myunggil Kang, Minyi Kim, Sanghoon Lee
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Patent number: 11538919Abstract: A transistor comprises a channel region having a frontside and a backside. A gate is adjacent the frontside of the channel region with a gate insulator being between the gate and the channel region. Insulating material having net negative charge is adjacent the backside of the channel region. The insulating material comprises at least one of AlxFy, HfAlxFy, AlOxNy, and HfAlxOyNz, where “x”, “y”, and “z” are each greater than zero. Other embodiments and aspects are disclosed.Type: GrantFiled: February 23, 2021Date of Patent: December 27, 2022Assignee: Micron Technology, Inc.Inventors: Ramanathan Gandhi, Augusto Benvenuti, Giovanni Maria Paolucci
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Patent number: 11500157Abstract: A method of Silicon Selective Epitaxial Growth (SEG) applied to a Silicon on Insulator (SOI) wafer to provide a first region of customized thickness includes with the SOI wafer having a standard thickness, applying a hard mask to a plurality of regions of the SOI wafer including the first region; applying photo-lithography protection to cover the hard mask in all of the plurality of regions except the first region; removing the hard mask in the first region; and performing Silicon SEG in the first region to provide the customized thickness in the first region, wherein the customized thickness is greater than the standard thickness.Type: GrantFiled: March 19, 2020Date of Patent: November 15, 2022Assignee: Ciena CorporationInventors: Charles Baudot, Alexandre Delisle-Simard, Michel Poulin
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Patent number: 11482473Abstract: A semiconductor device, including a first metal strip extending in a first direction on a first plane; a second metal strip extending in the first direction on a second plane over the first metal strip; a third metal strip immediate adjacent to the second metal strip and extending in the first direction on the second plane; and a fourth metal strip immediate adjacent to the third metal strip and extending in the first direction on the second plane; wherein the first metal strip and the second metal strip are directed to a first voltage source; wherein a distance between the second metal strip and the third metal strip is greater than a distance between the third metal strip and the fourth metal strip.Type: GrantFiled: November 8, 2019Date of Patent: October 25, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Shih-Wei Peng, Chia-Tien Wu, Jiann-Tyng Tzeng
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Patent number: 11444179Abstract: A semiconductor structure includes a semiconductor substrate, an oxide layer disposed over the semiconductor substrate, a high-k metal gate structure (HKMG) interleaved with the stack of semiconductor layers, and an epitaxial source/drain (S/D) feature disposed adjacent to the HKMG, wherein a bottom portion of the epitaxial S/D feature is defined by the oxide layer.Type: GrantFiled: November 20, 2020Date of Patent: September 13, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Xusheng Wu, Chang-Miao Liu, Huiling Shang
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Patent number: 11442097Abstract: The present application discloses a method and apparatus for calculating the kink current of SOI device, which is used to solve the problem that the kink current calculation in the prior art is not accurate and is not suitable for circuit simulation. The method includes: obtaining the impact ionization factor, the parasitic transistor effect factor, and the drain saturation current of the SOI device respectively; and calculating the kink current of the SOI device according to the impact ionization factor, the parasitic transistor effect factor, and the drain saturation current.Type: GrantFiled: June 10, 2019Date of Patent: September 13, 2022Assignee: Soochow UniversityInventors: Mingxiang Wang, Yanyan Chen, Dongli Zhang, Huaisheng Wang
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Patent number: 11380764Abstract: The purpose of the present invention is to provide a semiconductor device comprising an epitaxial layer formed on a SiC substrate, and a CMOS formed in the top part of the epitaxial layer, wherein growth of any defects present at the interface between the SiC substrate and the epitaxial layer is suppressed, and the reliability of the semiconductor device is improved. As a means to achieve the foregoing, a semiconductor device is formed such that the distance from a p-type diffusion layer to the interface between an n-type epitaxial layer and an n-type semiconductor substrate is larger than the thickness of a depletion layer that extends from the p-type diffusion layer to the back side of the n-type semiconductor substrate in response to the potential difference between a substrate electrode and another substrate electrode.Type: GrantFiled: October 24, 2017Date of Patent: July 5, 2022Assignee: HITACHI, LTD.Inventors: Masahiro Masunaga, Shintaroh Sato, Akio Shima, Digh Hisamoto
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Patent number: 11374022Abstract: Electronic circuits and methods encompassing an RF switch comprising a plurality of series-coupled (stacked) integrated circuit (IC) SOI MOSFETs having a distributed back-bias network structure comprising groups of substrate contacts coupled to a bias voltage source through a resistive ladder. The distributed back-bias network structure sets the common IC substrate voltage at a fixed DC bias but resistively decouples groups of MOSFETs with respect to RF voltages so that the voltage division characteristics of the MOSFET stack are maintained. The distributed back-bias network structure increases the voltage handling capability of each MOSFET and improves the maximum RF voltage at which a particular MOSFET is effective as a switch device, while mitigating loss, leakage, crosstalk, and distortion. RF switches in accordance with the present invention are particularly useful as antenna switches.Type: GrantFiled: June 14, 2019Date of Patent: June 28, 2022Assignee: pSemi CorporationInventor: Simon Edward Willard
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Patent number: 11121073Abstract: An interconnect structure is disclosed. The interconnect structure includes a first metal interconnect in a bottom dielectric layer, a via that extends through a top dielectric layer, a metal plate, an intermediate dielectric layer, and an etch stop layer, and a metal in the via to extend through the top dielectric layer, the metal plate, the intermediate dielectric layer and the etch stop layer to the top surface of the first metal interconnect. The metal plate is coupled to an MIM capacitor that is parallel to the via. The second metal interconnect is on top of the metal in the via.Type: GrantFiled: April 2, 2018Date of Patent: September 14, 2021Assignee: Intel CorporationInventors: Travis Lajoie, Abhishek Sharma, Juan Alzate-Vinasco, Chieh-Jen Ku, Shem Ogadhoh, Allen Gardiner, Blake Lin, Yih Wang, Pei-Hua Wang, Jack T. Kavalieros, Bernhard Sell, Tahir Ghani
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Patent number: 11094801Abstract: According to an embodiment of the present invention, a semiconductor structure includes a semiconductor substrate and a plurality of fins located on the semiconductor substrate. The plurality of fins each independently includes a bottom fin portion, a top fin portion layer, and an isolated oxide layer located in between the bottom fin portion and the top fin portion layer in the y-direction parallel to the height of the plurality of fins. The isolated oxide layer includes a mixed oxide region located in between oxidized regions in an x-direction perpendicular to the height of the plurality of fins.Type: GrantFiled: April 9, 2020Date of Patent: August 17, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Ruqiang Bao, Hemanth Jagannathan, Paul C. Jamison, Choonghyun Lee
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Patent number: 11075197Abstract: A resistor including a device isolation layer is described that includes a first active region and a second active region, a buried insulating layer, and an N well region. The N well region surrounds the first active region, the second active region, the device isolation layer and the buried insulating layer. A first doped region and a second doped region are disposed on the first active region and the second active region. The first doped region and the second doped region are in contact with the N well region and include n type impurities.Type: GrantFiled: February 7, 2020Date of Patent: July 27, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Woocheol Shin, Myunggil Kang, Minyi Kim, Sanghoon Lee
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Patent number: 11049773Abstract: A transistor device comprising a channel disposed on a substrate between a source and a drain, a gate electrode disposed on the channel, wherein the channel comprises a channel material that is separated from a body of the same material on a substrate. A method comprising forming a trench in a dielectric layer on an integrated circuit substrate, the trench comprising dimensions for a transistor body including a width; depositing a spacer layer in a portion of the trench, the spacer layer narrowing the width of the trench; forming a channel material in the trench through the spacer layer; recessing the dielectric layer to define a first portion of the channel material exposed and a second portion of the channel material in the trench; and separating the first portion of the channel material from the second portion of the channel material.Type: GrantFiled: September 30, 2016Date of Patent: June 29, 2021Assignee: Intel CorporationInventors: Gilbert Dewey, Matthew V. Metz, Sean T. Ma, Cheng-Ying Huang, Tahir Ghani, Anand S. Murthy, Harold W. Kennel, Nicholas G. Minutillo, Jack T. Kavalieros, Willy Rachmady
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Patent number: 11043501Abstract: A chip includes a semiconductor substrate, and a first N-type Metal Oxide Semiconductor Field Effect Transistor (NMOSFET) at a surface of the semiconductor substrate. The first NMOSFET includes a gate stack over the semiconductor substrate, a source/drain region adjacent to the gate stack, and a dislocation plane having a portion in the source/drain region. The chip further includes a second NMOSFET at the surface of the semiconductor substrate, wherein the second NMOSFET is free from dislocation planes.Type: GrantFiled: November 4, 2019Date of Patent: June 22, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Jhon Jhy Liaw
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Patent number: 10861847Abstract: Provided is a semiconductor device and a protection element capable of suppressing electrical damage to a MOSFET or the like in a semiconductor substrate. A semiconductor device according to a first aspect of the present technology includes a MOSFET as a protected element formed on a semiconductor substrate and a protection element that suppresses electrical damage to the protected element formed on the semiconductor substrate, in which the protection element includes the semiconductor substrate, one or more layers of well regions formed on the semiconductor substrate, and a diffusion layer formed on the well region. The present technology can be applied to a CMOS image sensor, for example.Type: GrantFiled: November 30, 2017Date of Patent: December 8, 2020Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATIONInventor: Masaaki Bairo
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Patent number: 10818555Abstract: A device includes first and second transistors and first and second isolation structures. The first transistor includes an active region including a first channel region, a first source and a first drain in the active region and respectively on opposite sides of the first channel region, and a first gate structure over the first channel region. The first isolation structure surrounds the active region of the first transistor. The second transistor includes a second source and a second drain, a fin structure includes a second channel region between the second source and the second drain, and a second gate structure over the second channel region. The second isolation structure surrounds a bottom portion of the fin structure of the second transistor. The top of the first isolation structure is higher than a top of the second isolation structure.Type: GrantFiled: November 18, 2019Date of Patent: October 27, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Barn Chen, Ting-Huang Kuo, Shiu-Ko Jangjian, Chi-Cherng Jeng, Kuang-Yao Lo
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Patent number: 10797164Abstract: A FinFET and methods for forming a FinFET are disclosed. A method includes forming a semiconductor fin on a substrate, implanting the semiconductor fin with dopants, and forming a capping layer on a top surface and sidewalls of the semiconductor fin. The method further includes forming a dielectric on the capping layer, and forming a gate electrode on the dielectric.Type: GrantFiled: December 2, 2016Date of Patent: October 6, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Hua Yu, Chih-Pin Tsao, Hou-Yu Chen
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Patent number: 10657913Abstract: A display panel includes a gate line, first and second data lines, first and second gate control lines, and first and second pixels. The first pixel includes a double-gate switching element including a gate electrode connected to the gate line, a source electrode connected to the first data line, and another gate electrode connected to the first gate control line. The second pixel includes a double-gate switching element including a gate electrode connected to the gate line, a source electrode connected to the second data line, and a gate electrode connected to the second gate control line. A data voltage having a first polarity is applied to the first data line, another data voltage having a second polarity is applied to the second data line, and first and second gate control voltages are respectively applied to the first and second gate control lines.Type: GrantFiled: May 11, 2016Date of Patent: May 19, 2020Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Jun Hyun Park, Kyoung-Ju Shin
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Patent number: 10553706Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a substrate and a fin structure formed over the substrate. The semiconductor structure further includes an isolation structure formed around the fin structure and a gate structure formed across the fin structure. In addition, the gate structure includes a first portion formed over the fin structure and a second portion formed over the isolation structure, and the second portion of the gate structure includes an extending portion extending into the isolation structure.Type: GrantFiled: November 6, 2017Date of Patent: February 4, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Che-Cheng Chang, Chih-Han Lin
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Patent number: 10269810Abstract: A chip includes a semiconductor substrate, and a first N-type Metal Oxide Semiconductor Field Effect Transistor (NMOSFET) at a surface of the semiconductor substrate. The first NMOSFET includes a gate stack over the semiconductor substrate, a source/drain region adjacent to the gate stack, and a dislocation plane having a portion in the source/drain region. The chip further includes a second NMOSFET at the surface of the semiconductor substrate, wherein the second NMOSFET is free from dislocation planes.Type: GrantFiled: October 23, 2017Date of Patent: April 23, 2019Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Jhon Jhy Liaw
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Patent number: 10204981Abstract: A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes a substrate, a first dielectric layer, a first doping layer of a first conductivity type, and a second doping layer of a second conductivity type. The substrate has a fin portion. The first dielectric layer is disposed on the substrate and surrounds the fin portion. The first doping layer of the first conductivity type is disposed on the first dielectric layer and is located on two opposite sidewalls of the fin portion. The second doping layer of the second conductivity type is disposed on the two opposite sidewalls of the fin portion and is located between the fin portion and the first doping layer. The first doping layer covers a sidewall and a bottom surface of the second doping layer.Type: GrantFiled: July 21, 2017Date of Patent: February 12, 2019Assignee: United Microelectronics Corp.Inventors: En-Chiuan Liou, Yu-Cheng Tung, Ching-Ling Lin
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Patent number: 10170068Abstract: The embodiments of the present disclosure provide a gate driving circuit, an array substrate, a display panel and a driving method. The gate driving circuit comprises: at least a Gate driver on Array (GOA) unit GOAn and a GOA unit GOAn+m, an output terminal of GOAn being connected to an input terminal of GOAn+m, an output terminal of GOAn+m is connected to a reset terminal of GOAn; and an electrical leakage compensation module having two input terminals connected to output terminals of GOAn and GOAn+m, respectively, a control terminal connected to a signal line, and an output terminal connected to a Pull-Up (PU) node of GOAn+m, and configured to compensate for a voltage at the PU node of GOAn+m in response to receipt of the electrical leakage compensation signal VLHB.Type: GrantFiled: August 30, 2016Date of Patent: January 1, 2019Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.Inventors: Qiujie Su, Feng Li