Single Crystal Semiconductor Layer On Insulating Substrate (soi) Patents (Class 257/347)
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Patent number: 12094872Abstract: A semiconductor device includes a substrate. A first nanosheet structure and a second nanosheet structure are disposed on the substrate. Each of the first and second nanosheet structures have at least one nanosheet forming source/drain regions and a gate structure including a conductive gate contact. A first oxide structure is disposed on the substrate between the first and second nanosheet structures. A conductive terminal is disposed in or on the first oxide structure. The conductive terminal, the first oxide structure and the gate structure of the first nanosheet structure define a capacitor.Type: GrantFiled: December 10, 2021Date of Patent: September 17, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chung-Hui Chen, Wan-Te Chen, Shu-Wei Chung, Tung-Heng Hsieh, Tzu-Ching Chang, Tsung-Hsin Yu, Yung Feng Chang
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Patent number: 12089444Abstract: In a TFT layer forming step, first, a semiconductor layer on a resin substrate is formed by performing a semiconductor layer forming step, and subsequently a gate insulating film is formed to cover the semiconductor layer by performing a gate insulating film forming step, and then a first metal layer is formed by performing a first metal film deposition step, a first photo step, and a first etching step, and a second metal layer is formed by performing a second metal film deposition step, a second photo step, and a second etching step, thereby forming a gate layer in which the first metal layer and the second metal layer are layered.Type: GrantFiled: February 27, 2019Date of Patent: September 10, 2024Assignee: SHARP KABUSHIKI KAISHAInventors: Tohru Okabe, Takeshi Yaneda
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Patent number: 12082475Abstract: A display panel and a method for fabricating the same are provided. In the display panel, an undercut structure is formed below a second auxiliary electrode, so that a cathode electrode and a first auxiliary electrode have an overlapping region, and the cathode electrode and the first auxiliary electrode are connected.Type: GrantFiled: September 23, 2020Date of Patent: September 3, 2024Assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.Inventor: Gaobo Lin
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Patent number: 12080766Abstract: A semiconductor device structure according to the present disclosure includes a source feature and a drain feature, at least one channel structure extending between the source feature and the drain feature, a gate structure wrapped around each of the at least one channel structure, a semiconductor layer over the gate structure, a dielectric layer over the semiconductor layer, a doped semiconductor feature extending through the semiconductor layer and the dielectric layer to be in contact with the source feature, a metal contact plug over the doped semiconductor feature, and a buried power rail disposed over the metal contact plug.Type: GrantFiled: April 10, 2023Date of Patent: September 3, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTDInventors: Chia-Hung Chu, Tsungyu Hung, Hsu-Kai Chang, Ding-Kang Shih, Keng-Chu Lin, Pang-Yen Tsai, Sung-Li Wang, Shuen-Shin Liang
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Patent number: 12068386Abstract: In an embodiment, a device includes: a first channel region; a second channel region; and a gate structure around the first channel region and the second channel region, the gate structure including: a gate dielectric layer; a first p-type work function metal on the gate dielectric layer, the first p-type work function metal including fluorine and aluminum; a second p-type work function metal on the first p-type work function metal, the second p-type work function metal having a lower concentration of fluorine and a lower concentration of aluminum than the first p-type work function metal; and a fill layer on the second p-type work function metal.Type: GrantFiled: May 12, 2023Date of Patent: August 20, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsin-Yi Lee, Cheng-Lung Hung, Chi On Chui
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Patent number: 12062578Abstract: A method for semiconductor fabrication includes providing a device structure having an isolation structure, a fin adjacent the isolation structure, gate structures over the fin and the isolation structure, one or more dielectric layers over the isolation structure and the fin and between the gate structures, a first contact hole over the fin, and a second contact hole over the isolation structure. The method further includes depositing a protection layer and treating it with a plasma so that the protection layer in the first contact hole and the protection layer in the second contact hole have different etch selectivity in an etching process; and etching the protection layer to etch through the protection layer on the bottom surface of the first contact hole without etching through the protection layer on the bottom surface of the second contact hole.Type: GrantFiled: June 13, 2022Date of Patent: August 13, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTDInventors: Yun Lee, Chung-Ting Ko, Chen-Ming Lee, Mei-Yun Wang, Fu-Kai Yang
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Patent number: 12051736Abstract: A device includes a substrate, a first nanostructure channel above the substrate and a second nanostructure channel between the first nanostructure channel and the substrate. An inner spacer is between the first nanostructure channel and the second nanostructure channel. A gate structure abuts the first nanostructure channel, the second nanostructure channel and the inner spacer. A liner layer is between the inner spacer and the gate structure.Type: GrantFiled: August 31, 2021Date of Patent: July 30, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tsung-Han Chuang, Zhi-Chang Lin, Shih-Cheng Chen, Jung-Hung Chang, Chien Ning Yao, Kuo-Cheng Chiang, Chih-Hao Wang
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Patent number: 12046680Abstract: A semiconductor structure comprises a plurality of gate structures alternately stacked with a plurality of channel layers, and a plurality of spacers disposed on lateral sides of the plurality of gate structures. The respective ones of the plurality of spacers comprise a profile having a first portion comprising a first shape and a second portion comprising a second shape, wherein the first shape is different from the second shape.Type: GrantFiled: September 27, 2021Date of Patent: July 23, 2024Assignee: International Business Machines CorporationInventors: Yi Song, Chi-Chun Liu, Robin Hsin Kuo Chao, Muthumanickam Sankarapandian
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Patent number: 12040407Abstract: Semiconductor devices including backside vias with enlarged backside portions and methods of forming the same are disclosed. In an embodiment, a device includes a first transistor structure in a first device layer; a front-side interconnect structure on a front-side of the first device layer; a first dielectric layer on a backside of the first device layer; a first contact extending through the first dielectric layer to a source/drain region of the first transistor structure; and a backside interconnect structure on a backside of the first dielectric layer and the first contact, the first contact including a first portion having first tapered sidewalls and a second portion having second tapered sidewalls, widths of the first tapered sidewalls narrowing in a direction towards the backside interconnect structure, and widths of the second tapered sidewalls widening in a direction towards the backside interconnect structure.Type: GrantFiled: July 21, 2022Date of Patent: July 16, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Che-Lun Chang, Wei-Yang Lee, Chia-Pin Lin, Yuan-Ching Peng
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Patent number: 12034062Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a first stacked nanostructure and a second stacked nanostructure formed over a substrate, and a dummy fin structure between the first stacked nanostructure and the second stacked nanostructure. The semiconductor device structure includes a gate structure formed over the first stacked nanostructure and the second stacked nanostructure, and a conductive layer formed over the gate structure. The semiconductor device structure includes a capping layer formed over the dummy fin structure, and each of the gate structure and the conductive layer is divided into two portions by the capping layer.Type: GrantFiled: November 4, 2022Date of Patent: July 9, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo-Cheng Ching, Zhi-Chang Lin, Kuan-Ting Pan, Chih-Hao Wang, Shi-Ning Ju
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Patent number: 12027526Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes a semiconductor substrate having a device substrate overlying a handle substrate and an insulator layer disposed between the device substrate and the handle substrate. A gate electrode overlies the device substrate between a drain region and a source region. A conductive via extends through the device substrate and the insulator layer to contact the handle substrate. A first isolation structure is disposed within the device substrate and comprises a first isolation segment disposed laterally between the gate electrode and the conductive via. A contact region is disposed within the device substrate between the first isolation segment and the conductive via. A conductive gate electrode directly overlies the first isolation segment and is electrically coupled to the contact region.Type: GrantFiled: September 21, 2022Date of Patent: July 2, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsin-Chih Chiang, Tung-Yang Lin, Ruey-Hsin Liu, Ming-Ta Lei
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Patent number: 12028053Abstract: A structure includes a field effect transistor (FET) stack including a plurality of transistors over a buried insulator layer. A polysilicon isolation region is in a substrate below the FET stack and the buried insulator layer. A resistor network is in the polysilicon isolation region, the resistor network having a different resistivity than the polysilicon isolation region. The resistor network may include a resistive wire having a first width and a resistive pad within the resistive wire under each FET in the FET stack. Each resistive pad has a second width larger than the first width of the resistive wire. A length of the resistive wire is different aside each resistive pad to adjust a threshold voltage of an adjacent FET in the FET stack to a predetermined value to compensate for non-linear voltage distribution between an input and an output of the FET stack.Type: GrantFiled: December 9, 2021Date of Patent: July 2, 2024Assignee: GlobalFoundries U.S. Inc.Inventors: Steven M. Shank, Yves T. Ngu, Michael J. Zierak, Siva P. Adusumilli
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Patent number: 12009394Abstract: A device includes a device layer comprising a first transistor and a second transistor; a first interconnect structure on a front-side of the device layer; and a second interconnect structure on a backside of the device layer. The second interconnect structure comprising a first dielectric layer on the backside of the device layer, wherein a semiconductor material is disposed between the first dielectric layer and a first source/drain region of the first transistor; a contact extending through the first dielectric layer to a second source/drain region of the second transistor; and a first conductive line electrically connected to the second source/drain region of the second transistor through the contact.Type: GrantFiled: December 19, 2022Date of Patent: June 11, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Li-Zhen Yu, Huan-Chieh Su, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
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Patent number: 12009408Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes channel members vertically stacked over a substrate, a gate structure engaging the channel members, a gate spacer layer disposed on sidewalls of the gate structure, an epitaxial feature abutting the channel members, an inner spacer layer interposing the gate structure and the epitaxial feature, and a semiconductor layer interposing the inner spacer layer and the epitaxial feature.Type: GrantFiled: July 21, 2022Date of Patent: June 11, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei Ju Lee, Chun-Fu Cheng, Chung-Wei Wu, Zhiqiang Wu
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Patent number: 12009304Abstract: A semiconductor device includes a substrate, a gate structure, source/drain structures, a backside via, and a power rail. The gate structure extends along a first direction parallel with a front-side surface of the substrate. The backside via extends along a second direction parallel with the front-side surface of the substrate but perpendicular to the first direction, the backside via has a first portion aligned with one of the source/drain structures along the first direction and a second portion aligned with the gate structure along the first direction, the first portion of the backside via has a first width along the first direction, and the second portion of the backside via has a second width along the first direction, in which the first width is greater than the second width. The power rail is on a backside surface of the substrate and in contact with the backside via.Type: GrantFiled: June 13, 2023Date of Patent: June 11, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Liang Chen, Li-Chun Tien
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Patent number: 11996483Abstract: The present disclosure provides a semiconductor device that includes a semiconductor fin disposed over a substrate, an isolation structure at least partially surrounding the fin, an epitaxial source/drain (S/D) feature disposed over the semiconductor fin, where an extended portion of the epitaxial S/D feature extends over the isolation structure, and a silicide layer disposed on the epitaxial S/D feature, where the silicide layer covers top, bottom, sidewall, front, and back surfaces of the extended portion of the S/D feature.Type: GrantFiled: December 14, 2022Date of Patent: May 28, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Pei-Hsun Wang, Chih-Chao Chou, Shih-Cheng Chen, Jung-Hung Chang, Jui-Chien Huang, Chun-Hsiung Lin, Chih-Hao Wang
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Patent number: 11996460Abstract: A semiconductor structure and a forming method thereof are provided, where one form of a forming method includes: providing a substrate, where the substrate includes a first region and a second region that are adjacent, stack structures are formed on the first region and the second region, and the stack structures of the first region and the second region and the substrate form a first opening; forming first dielectric layers on a bottom surface and side walls of the first opening, where a second opening is provided between the first dielectric layers; forming a second dielectric layer in the second opening; forming a source/drain doped layer; removing the first dielectric layer between the source/drain doped layer and the second dielectric layer, and forming a groove exposing a side wall, which is close to the second dielectric layer, of the source/drain doped layer; and forming a contact plug in the groove.Type: GrantFiled: September 9, 2021Date of Patent: May 28, 2024Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventors: Ji Shiliang, Xiao Xingyu, Zhang Haiyang
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Patent number: 11990529Abstract: A semiconductor structure includes a stack of semiconductor layers disposed over a substrate, a metal gate stack having a top portion disposed over the stack of semiconductor layers and a bottom portion interleaved with the stack of semiconductor layers, an inner spacer disposed on sidewalls of the bottom portion of the metal gate stack, an air gap enclosed in the inner spacer, and an epitaxial source/drain (S/D) feature disposed over the inner spacer and adjacent to the metal gate stack.Type: GrantFiled: November 14, 2022Date of Patent: May 21, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien Ning Yao, Bo-Feng Young, Sai-Hooi Yeong, Kuan-Lun Cheng, Chih-Hao Wang
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Patent number: 11990510Abstract: A semiconductor device, includes a channel region, and a source/drain region adjacent to the channel region. The source/drain region includes a first epitaxial layer, a second epitaxial layer epitaxially formed on the first epitaxial layer and a third epitaxial layer epitaxially formed on the second epitaxial layer, and the first epitaxial layer is made of SiAs.Type: GrantFiled: July 26, 2021Date of Patent: May 21, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Cheng-Yi Peng, Ting Tsai, Chung-Wei Hung, Jung-Ting Chen, Ying-Hua Lai, Song-Bor Lee, Bor-Zen Tien
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Patent number: 11984402Abstract: In an embodiment, a device includes: a first fin; a gate structure over the first fin; a first source/drain region adjacent the gate structure; an etch stop layer over the first source/drain region; a conductive line over the etch stop layer, the conductive line isolated from the first source/drain region by the etch stop layer, a top surface of the conductive line being coplanar with a top surface of the gate structure; and a power rail contact extending through the first fin, the power rail contact connected to the first source/drain region.Type: GrantFiled: July 21, 2022Date of Patent: May 14, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Pei-Yu Wang, Yu-Xuan Huang
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Patent number: 11978740Abstract: A layer stack including a first bonding dielectric material layer, a dielectric metal oxide layer, and a second bonding dielectric material layer is formed over a top surface of a substrate including a substrate semiconductor layer. A conductive material layer is formed by depositing a conductive material over the second bonding dielectric material layer. The substrate semiconductor layer is thinned by removing portions of the substrate semiconductor layer that are distal from the layer stack, whereby a remaining portion of the substrate semiconductor layer includes a top semiconductor layer. A semiconductor device may be formed on the top semiconductor layer.Type: GrantFiled: February 17, 2022Date of Patent: May 7, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Harry-Hak-Lay Chuang, Kuo-Ching Huang, Wei-Cheng Wu, Hsin Fu Lin, Henry Wang, Chien Hung Liu, Tsung-Hao Yeh, Hsien Jung Chen
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Patent number: 11978734Abstract: A semiconductor structure includes the first semiconductor stack and the second semiconductor stack formed over the first region and the second region of a substrate, respectively. The first and second semiconductor stacks extend in the first direction and are spaced apart from each other in the second direction. Each of the first semiconductor stack and the second semiconductor stack includes channel layers and a gate structure. The channel layers are formed above the substrate and are spaced apart from each other in the third direction. The gate structure includes the gate dielectric layers formed around the respective channel layers, and the gate electrode layer formed on the gate dielectric layers to surround the channel layers. The number of channel layers in the first semiconductor stack is different from the number of channel layers in the second semiconductor stack.Type: GrantFiled: November 9, 2022Date of Patent: May 7, 2024Assignee: MEDIATEK INC.Inventor: Po-Chao Tsao
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Patent number: 11955556Abstract: A semiconductor device includes channels, a gate structure, and a source/drain layer. The channels are stacked in a vertical direction. Each channel extends in a first direction. The gate structure extends in a second direction. The gate structure covers the channels. The source/drain layer is connected to each of opposite sidewalls in the first direction of the channels on the substrate, and includes a doped semiconductor material. The source/drain layer includes first and second epitaxial layers having first and second impurity concentrations, respectively. The first epitaxial layer covers a lower surface and opposite sidewalls in the first direction of the second epitaxial layer. A portion of each of opposite sidewalls in the first direction of the gate structure protrudes in the first direction from opposite sidewalls in the first direction of the channels to partially penetrate through the first epitaxial layer but not to contact the second epitaxial layer.Type: GrantFiled: June 9, 2022Date of Patent: April 9, 2024Assignee: Samsung Electronics Co., Ltd.Inventors: Woocheol Shin, Sunggi Hur, Sangwon Baek, Junghan Lee
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Patent number: 11955375Abstract: A composite structure, intended for a planar co-integration of electronic components of different functions, the composite structure including from its base towards its surface: a support substrate made of a first material, the support substrate including cavities each opening into an upper face of the support substrate, the cavities being filled with at least one composite material consisting of a matrix of a crosslinked preceramic polymer, the matrix being charged with inorganic particles; and a thin film made of a second material, the thin film being bonded to the upper face of the support substrate and to the composite material.Type: GrantFiled: April 18, 2022Date of Patent: April 9, 2024Assignee: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Marilyne Roumanie, Christelle Navone, Lamine Benaissa
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Patent number: 11935937Abstract: A semiconductor device includes a fin protruding above a substrate; source/drain regions over the fin; nanosheets between the source/drain regions; and a gate structure over the fin and between the source/drain regions. The gate structure includes: a gate dielectric material around each of the nanosheets; a first liner material around the gate dielectric material; a work function material around the first liner material; a second liner material around the work function material; and a gate electrode material around at least portions of the second liner material.Type: GrantFiled: January 17, 2022Date of Patent: March 19, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsin-Yi Lee, Weng Chang, Chi On Chui
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Patent number: 11923456Abstract: A semiconductor device includes channels, a gate structure, and a source/drain layer. The channels are disposed at a plurality of levels, respectively, and spaced apart from each other in a vertical direction on an upper surface of a substrate. The gate structure is disposed on the substrate, at least partially surrounds a surface of each of the channels, and extends in a first direction substantially parallel to the upper surface of the substrate. The source/drain layer is disposed at each of opposite sides of the gate structure in a second direction substantially parallel to the upper surface of the substrate and substantially perpendicular to the first direction and is connected to sidewalls of the channels. A length of the gate structure in the second direction changes along the first direction at a first height from the upper surface of the substrate in the vertical direction.Type: GrantFiled: April 18, 2022Date of Patent: March 5, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jung-Gil Yang, Beom-Jin Park, Seung-Min Song, Geum-Jong Bae, Dong-Il Bae
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Patent number: 11923438Abstract: A semiconductor structure includes a substrate comprising a semiconductor material, and a fin on the substrate. The fin includes a first portion formed from the semiconductor material and a second portion including a channel region. The first portion has a first thickness and the second portion has a second thickness greater than the first thickness. A spacer is disposed on sides of the first portion of the fin.Type: GrantFiled: September 21, 2021Date of Patent: March 5, 2024Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Shogo Mochizuki, Juntao Li, Choonghyun Lee
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Patent number: 11915972Abstract: Semiconductor devices including air spacers formed in a backside interconnect structure and methods of forming the same are disclosed. In an embodiment, a device includes a first transistor structure; a front-side interconnect structure on a front-side of the first transistor structure; and a backside interconnect structure on a backside of the first transistor structure, the backside interconnect structure including a first dielectric layer on the backside of the first transistor structure; a first via extending through the first dielectric layer, the first via being electrically coupled to a first source/drain region of the first transistor structure; a first conductive line electrically coupled to the first via; and an air spacer adjacent the first conductive line, the first conductive line defining a first side boundary of the air spacer.Type: GrantFiled: July 15, 2022Date of Patent: February 27, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Li-Zhen Yu, Huan-Chieh Su, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
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Patent number: 11916105Abstract: Semiconductor device and the manufacturing method thereof are disclosed. An exemplary semiconductor device comprises a semiconductor stack including semiconductor layers over a substrate, wherein the semiconductor layers are separated from each other and are stacked up along a direction substantially perpendicular to a top surface of the substrate; an isolation structure around a bottom portion of the semiconductor stack and separating active regions; a metal gate structure over a channel region of the semiconductor stack and wrapping each of the semiconductor layers; a gate spacer over a source/drain (S/D) region of the semiconductor stack and along sidewalls of a top portion of the metal gate structure; and an inner spacer over the S/D region of the semiconductor stack and along sidewalls of lower portions of the metal gate structure and wrapping edge portions of each of the semiconductor layers.Type: GrantFiled: March 26, 2021Date of Patent: February 27, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Bwo-Ning Chen, Xusheng Wu, Pin-Ju Liang, Chang-Miao Liu, Shih-Hao Lin
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Patent number: 11916132Abstract: Semiconductor devices and methods of manufacturing are presented in which inner spacers for nanostructures are manufactured. In embodiments a dielectric material is deposited for the inner spacer and then treated. The treatment may add material and cause an expansion in volume in order to close any seams that can interfere with subsequent processes.Type: GrantFiled: June 30, 2022Date of Patent: February 27, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wan-Yi Kao, Hung Cheng Lin, Che-Hao Chang, Yung-Cheng Lu, Chi On Chui
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Patent number: 11908685Abstract: A method includes forming a gate spacer on sidewalls of a dummy gate structure disposed over a semiconductor substrate; performing a first implantation process to the gate spacer, wherein the first implantation process includes bombarding an upper portion of the gate spacer with silicon atoms; after performing the first implantation process, performing a second implantation process to the upper portion of the gate spacer, where the second implantation process includes bombarding the upper portion of the gate spacer with carbon atoms; and after performing the second implantation process, replacing the dummy gate structure with a high-k metal gate structure, wherein the replacing includes forming an interlayer dielectric (ILD) layer.Type: GrantFiled: March 15, 2021Date of Patent: February 20, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Ruei Jhan, Han-Yu Lin, Li-Te Lin, Pinyen Lin
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Patent number: 11908920Abstract: A method of forming a semiconductor device includes: forming a fin protruding above a substrate; forming isolation regions on opposing sides of the fin; forming a dummy gate electrode over the fin; removing lower portions of the dummy gate electrode proximate to the isolation regions, where after removing the lower portions, there is a gap between the isolation regions and a lower surface of the dummy gate electrode facing the isolation regions; filling the gap with a gate fill material; after filling the gap, forming gate spacers along sidewalls of the dummy gate electrode and along sidewalls of the gate fill material; and replacing the dummy gate electrode and the gate fill material with a metal gate.Type: GrantFiled: April 18, 2022Date of Patent: February 20, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shih-Yao Lin, Kuei-Yu Kao, Chih-Han Lin, Ming-Ching Chang, Chao-Cheng Chen
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Patent number: 11894382Abstract: An integrated circuit includes at least a first standard cell framed by two second standard cells. The three cells are disposed adjacent to each other, and each standard cell includes at least one NMOS transistor and at least one least one PMOS transistor located in and on a silicon-on-insulator substrate. The at least one PMOS transistor of the first standard cell has a channel including silicon and germanium. The at least one PMOS transistor of each second standard cell has a silicon channel and a threshold voltage different in absolute value from the threshold voltage of said at least one PMOS transistor of the first cell.Type: GrantFiled: December 7, 2021Date of Patent: February 6, 2024Assignees: STMicroelectronics France, STMicroelectronics (Crolles 2) SASInventors: Olivier Weber, Christophe Lecocq
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Patent number: 11855224Abstract: A semiconductor device according to the present disclosure includes an anti-punch-through (APT) region over a substrate, a plurality of channel members over the APT region, a gate structure wrapping around each of the plurality of channel members, a source/drain feature adjacent to the gate structure, and a diffusion retardation layer. The source/drain feature is spaced apart from the APT region by the diffusion retardation layer. The source/drain feature is spaced apart from each of the plurality of channel members by the diffusion retardation layer. The diffusion retardation layer is a semiconductor material.Type: GrantFiled: February 28, 2022Date of Patent: December 26, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ching-Wei Tsai, Yi-Bo Liao, Sai-Hooi Yeong, Hou-Yu Chen, Yu-Xuan Huang, Kuan-Lun Cheng
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Patent number: 11856710Abstract: A method of manufacturing an electronic device including the following steps is provided herein. A plurality of first electronic components is provided. The plurality of first electronic components is transferred onto a plurality of pickup sites. An empty pickup site from the plurality of pickup sites may be figured out, wherein the plurality of first electronic components is absent at the empty pickup site. A second electronic component is transferred onto the empty pickup site. A target substrate is provided. The plurality of first electronic components and the second electronic component are transferred onto the target substrate.Type: GrantFiled: May 25, 2022Date of Patent: December 26, 2023Assignee: Innolux CorporationInventors: Kai Cheng, Fang-Ying Lin, Tsau-Hua Hsieh
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Patent number: 11848383Abstract: Various embodiments of the present invention are to provide a semiconductor device and a method for fabricating the same and, more particularly, to a semiconductor device including isolation layers including an air gap, thereby minimizing stress to a substrate caused by oxide and improving performance of a device, and a method for fabricating the same. The semiconductor device according to the embodiment of the present invention comprises: a plurality of isolation layers each including a trench formed in a substrate and an air gap in a lower portion of the trench; an active region including a fin body disposed between the isolation layers, which are consecutively disposed, and a fin formed on the fin body, the fin having a narrower width than the fin body and extending in a first direction; a gate structure partially covering the active region and the isolation layers, and extending in a second direction; and a source/drain region covering the fin on both sides of the gate structure.Type: GrantFiled: August 31, 2021Date of Patent: December 19, 2023Assignee: SK hynix Inc.Inventor: Young Gwang Yoon
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Patent number: 11843053Abstract: A semiconductor device is provided. The semiconductor comprises an active pattern including a lower pattern and a plurality of sheet patterns that are spaced apart from the lower pattern in a first direction, a source/drain pattern on the lower pattern and in contact with the plurality of sheet patterns, and a gate structure on opposing sides of the source/drain pattern in a second direction different from the first direction, the gate structure including a gate electrode on the plurality of sheet patterns, wherein the source/drain pattern includes an epitaxial region that comprises a semiconductor material and a cavity region that is inside the epitaxial region and that is surrounded by the semiconductor material.Type: GrantFiled: August 10, 2021Date of Patent: December 12, 2023Inventors: Su Jin Jung, Ki Hwan Kim, Sung Uk Jang, Young Dae Cho
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Patent number: 11837638Abstract: A semiconductor device includes first and second isolation regions, a first active region extending in a first direction between the first and second isolation regions, a first fin pattern on the first active region, nanowires on the first fin pattern, a gate electrode in a second direction on the first fin pattern, the gate electrode surrounding the nanowires, a first source/drain region on a side of the gate electrode, the first source/drain region being on the first active region and in contact with the nanowires, and a first source/drain contact on the first source/drain region, the first source/drain contact including a first portion on a top surface of the first source/drain region, and a second portion extending toward the first active region along a sidewall of the first source/drain region, an end of the first source/drain contact being on one of the first and second isolation regions.Type: GrantFiled: June 1, 2021Date of Patent: December 5, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sang Hoon Lee, Chang Woo Sohn, Keun Hwi Cho, Sang Won Baek
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Patent number: 11837605Abstract: A structure including a semiconductor-on-insulator (SOI) substrate. The SOI substrate includes an SOI layer over a buried insulator layer over a base semiconductor layer. The structure includes a high-voltage first field effect transistor (FET) adjacent to a high performance, low voltage second FET. The high voltage FET has a gate electrode on the buried insulator layer, and a source and a drain in the base semiconductor layer under the buried insulator layer. Hence, the buried insulator layer operates as a gate dielectric for the high voltage FET. The low voltage FET has a source and a drain over the buried insulator layer, i.e., in the SOI layer. A trench isolation is in each of the source and the drain of the first, high voltage FET. The source of the high voltage FET surrounds the trench isolation therein.Type: GrantFiled: December 17, 2021Date of Patent: December 5, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Tom Herrmann, Zhixing Zhao, Alban Zaka, Yiching Chen
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Patent number: 11827978Abstract: Methods for depositing a molybdenum nitride film on a surface of a substrate are disclosed. The methods may include: providing a substrate into a reaction chamber; and depositing a molybdenum nitride film directly on the surface of the substrate by performing one or more unit deposition cycles of cyclical deposition process, wherein a unit deposition cycle may include, contacting the substrate with a first vapor phase reactant comprising a molybdenum halide precursor, and contacting the substrate with a second vapor phase reactant comprising a nitrogen precursor. Semiconductor device structures including a molybdenum nitride film are also disclosed.Type: GrantFiled: March 7, 2022Date of Patent: November 28, 2023Assignee: ASM IP Holding B.V.Inventors: Eric Christopher Stevens, Bhushan Zope, Shankar Swaminathan, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni
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Patent number: 11810789Abstract: A method for producing a semiconductor substrate is provided, including: producing a superficial layer arranged on a buried dielectric layer and including a strained semiconductor region; producing an etching mask on the superficial layer, covering a part of the region; etching the superficial layer to a pattern of the mask, exposing a first lateral edge of a first strained semiconductor portion belonging to the part and contacting the dielectric layer; forming a mechanical barrier from a second portion of material belonging to the first portion, the second portion having a bottom surface contacting the dielectric layer and an upper surface contacting the mask, the barrier arranged against the part and bearing mechanically against the second portion, and removing the mask.Type: GrantFiled: December 11, 2019Date of Patent: November 7, 2023Assignee: Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Shay Reboh, Victor Boureau, Sylvain Maitrejean, Francois Andrieu
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Patent number: 11784258Abstract: A thin film transistor, a manufacturing method thereof, an array substrate, and a display device are provided. The thin film transistor comprises a base substrate, a gate on the base substrate, a gate insulating layer covering the gate, an active layer on the gate insulating layer, a first electrode and a second electrode over and electrically connected to the active layer, and a first insulating portion between the gate insulating layer and the first electrode. An orthographic projection of the first insulating portion on the base substrate, an orthographic projection of the first electrode on the base substrate, and an orthographic projection of a boundary between a side surface of the gate and an upper surface of the gate on the base substrate at least partially overlap.Type: GrantFiled: April 4, 2018Date of Patent: October 10, 2023Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventor: Kuhyun Park
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Patent number: 11764262Abstract: A semiconductor device includes first and second dielectric fins disposed above a substrate, a semiconductor channel layer sandwiched between the first and second dielectric fins, a gate structure engaging the semiconductor channel layer, a source/drain (S/D) feature abutting the semiconductor channel layer and sandwiched between the first and second dielectric fins, and an air gap sandwiched between the first and second dielectric fins. The air gap exposes a first sidewall of the S/D feature facing the first dielectric fin and a second sidewall of the S/D feature facing the second dielectric fin.Type: GrantFiled: November 1, 2021Date of Patent: September 19, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Pei-Yu Wang, Wei Ju Lee
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Patent number: 11757042Abstract: In an embodiment, a device includes: a first interconnect structure including metallization patterns; a second interconnect structure including a power rail; a device layer between the first interconnect structure and the second interconnect structure, the device layer including a first transistor, the first transistor including an epitaxial source/drain region; and a conductive via extending through the device layer, the conductive via connecting the power rail to the metallization patterns, the conductive via contacting the epitaxial source/drain region.Type: GrantFiled: February 14, 2022Date of Patent: September 12, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Bo Liao, Yu-Xuan Huang, Pei-Yu Wang, Cheng-Ting Chung, Ching-Wei Tsai, Hou-Yu Chen
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Patent number: 11742860Abstract: A new class of logic gates are presented that use non-linear polar material. The logic gates include multi-input majority gates. Input signals in the form of digital signals are driven to non-linear input capacitors on their respective first terminals. The second terminals of the non-linear input capacitors are coupled a summing node which provides a majority function of the inputs. The majority node is then coupled driver circuitry which can be any suitable logic gate such as a buffer, inverter, NAND gate, NOR gate, etc. In the multi-input majority or minority gates, the non-linear charge response from the non-linear input capacitors results in output voltages close to or at rail-to-rail voltage levels. Bringing the majority output close to rail-to-rail voltage eliminates the high leakage problem faced from majority gates formed using linear input capacitors.Type: GrantFiled: June 22, 2022Date of Patent: August 29, 2023Assignee: Kepler Computing Inc.Inventors: Sasikanth Manipatruni, Rafael Rios, Neal Reynolds, Ikenna Odinaka, Robert Menezes, Rajeev Kumar Dokania, Ramamoorthy Ramesh, Amrita Mathuriya
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Patent number: 11721621Abstract: Structures including stacked field-effect transistors and methods of forming a structure including stacked field-effect transistors. The structure includes a field-effect transistor having a first active gate, a second active gate, and a drain region that is positioned in a horizontal direction between the first and second active gates. The structure further includes a back-end-of-line stack having a first metal level and a second metal level over the field-effect transistor. The first metal level includes a first interconnect, a second interconnect, and a third interconnect, and the second metal level includes a fourth interconnect. The third interconnect is connected to the drain region. The third interconnect is positioned in a vertical direction between the fourth interconnect and the drain region, and the third interconnect is positioned in the horizontal direction between the first and second interconnects.Type: GrantFiled: November 16, 2021Date of Patent: August 8, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Shweta Vasant Khokale, Kaustubh Shanbhag, Tamilmani Ethirajan
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Patent number: 11705457Abstract: A monolithic multi-FET transistor comprises an epitaxial layer disposed on a dielectric layer. The epitaxial layer comprises a crystalline semiconductor material and a multi-FET area. An isolation structure surrounds the multi-FET area and divides the multi-FET area into separate FET portions. A gate disposed on a gate dielectric extends over each FET portion. A source and a drain are each disposed on opposite sides of the gate on the epitaxial layer within each FET portion. Each gate, source, and drain comprise a separate electrical conductor and the gate, source, drain, and epitaxial layer within each FET portion form a field-effect transistor. Gate, source, and drain contacts electrically connect the gates, sources, and drains of the separate FET portions, respectively. At least the sources or drains of two neighboring FET portions are disposed in common over at least a portion of the isolation structure dividing the two neighboring FET portions.Type: GrantFiled: September 17, 2021Date of Patent: July 18, 2023Assignee: X-Celeprint LimitedInventors: Joseph Carr, Ronald S. Cok
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Patent number: 11688786Abstract: In an embodiment, a device includes: a first channel region; a second channel region; and a gate structure around the first channel region and the second channel region, the gate structure including: a gate dielectric layer; a first p-type work function metal on the gate dielectric layer, the first p-type work function metal including fluorine and aluminum; a second p-type work function metal on the first p-type work function metal, the second p-type work function metal having a lower concentration of fluorine and a lower concentration of aluminum than the first p-type work function metal; and a fill layer on the second p-type work function metal.Type: GrantFiled: March 2, 2021Date of Patent: June 27, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsin-Yi Lee, Cheng-Lung Hung, Chi On Chui
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Patent number: 11676896Abstract: A semiconductor device includes a substrate, a gate structure, source/drain structures, a backside via, and a power rail. The gate structure extends along a first direction parallel with a front-side surface of the substrate. The backside via extends along a second direction parallel with the front-side surface of the substrate but perpendicular to the first direction, the backside via has a first portion aligned with one of the source/drain structures along the first direction and a second portion aligned with the gate structure along the first direction, the first portion of the backside via has a first width along the first direction, and the second portion of the backside via has a second width along the first direction, in which the first width is greater than the second width. The power rail is on a backside surface of the substrate and in contact with the backside via.Type: GrantFiled: February 4, 2021Date of Patent: June 13, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Liang Chen, Li-Chun Tien
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Patent number: RE50012Abstract: An organic light-emitting diode display is disclosed. In one aspect, the display includes a plurality of pixels formed in a plurality of intersection areas of a plurality of data lines and a plurality of scan lines. Each of the pixels includes a storage capacitor configured to store a data voltage, at least one target transistor having one end electrically connected to a current path of the storage capacitor, an organic light emitting layer, and a first electrode of an OLED formed over the organic light emitting layer. The first electrode includes a first electrode extension configured to block at least a portion of the target transistor from light.Type: GrantFiled: April 5, 2022Date of Patent: June 11, 2024Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Hee Rim Song, Mu Kyung Jeon, Chong Chul Chai