Single Crystal Semiconductor Layer On Insulating Substrate (soi) Patents (Class 257/347)
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Patent number: 11688786Abstract: In an embodiment, a device includes: a first channel region; a second channel region; and a gate structure around the first channel region and the second channel region, the gate structure including: a gate dielectric layer; a first p-type work function metal on the gate dielectric layer, the first p-type work function metal including fluorine and aluminum; a second p-type work function metal on the first p-type work function metal, the second p-type work function metal having a lower concentration of fluorine and a lower concentration of aluminum than the first p-type work function metal; and a fill layer on the second p-type work function metal.Type: GrantFiled: March 2, 2021Date of Patent: June 27, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsin-Yi Lee, Cheng-Lung Hung, Chi On Chui
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Patent number: 11676896Abstract: A semiconductor device includes a substrate, a gate structure, source/drain structures, a backside via, and a power rail. The gate structure extends along a first direction parallel with a front-side surface of the substrate. The backside via extends along a second direction parallel with the front-side surface of the substrate but perpendicular to the first direction, the backside via has a first portion aligned with one of the source/drain structures along the first direction and a second portion aligned with the gate structure along the first direction, the first portion of the backside via has a first width along the first direction, and the second portion of the backside via has a second width along the first direction, in which the first width is greater than the second width. The power rail is on a backside surface of the substrate and in contact with the backside via.Type: GrantFiled: February 4, 2021Date of Patent: June 13, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Liang Chen, Li-Chun Tien
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Patent number: 11670723Abstract: A semiconductor device according to the present disclosure includes a fin structure over a substrate, a vertical stack of silicon nanostructures disposed over the fin structure, an isolation structure disposed around the fin structure, a germanium-containing interfacial layer wrapping around each of the vertical stack of silicon nanostructures, a gate dielectric layer wrapping around the germanium-containing interfacial layer, and a gate electrode layer wrapping around the gate dielectric layer.Type: GrantFiled: November 13, 2020Date of Patent: June 6, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Mao-Lin Huang, Lung-Kun Chu, Chung-Wei Hsu, Jia-Ni Yu, Kuo-Cheng Chiang, Kuan-Lun Cheng, Chih-Hao Wang
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Patent number: 11621341Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate including a first region, and a first transistor positioned in the first region. The first transistor includes a first bottom gate structure positioned on the substrate, a first channel layer positioned on the first bottom gate structure, a first top gate structure positioned on the first channel layer, and two first source/drain regions positioned on two sides of the first channel layer.Type: GrantFiled: March 16, 2020Date of Patent: April 4, 2023Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Shing-Yih Shih
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Patent number: 11605740Abstract: A transistor includes a first gate structure, a channel layer, and source/drain contacts. The first gate structure includes nanosheets. The channel layer is over the first gate structure. A portion of the channel layer wraps around the nanosheets of the first gate structure. The source/drain contacts are aside the nanosheets. The source/drain contacts are electrically connected to the channel layer.Type: GrantFiled: November 17, 2020Date of Patent: March 14, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Marcus Johannes Henricus Van Dal
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Patent number: 11600240Abstract: A display apparatus includes: a glass substrate; a light emitting device included in a pixel structure disposed on one principal surface of the glass substrate; an input electrode, disposed on the one principal surface, for inputting a driving signal to the light emitting device; and a back connection member disposed on the other principal surface of the glass substrate so as to be electrically connected to the input electrode. A back insulating layer is disposed on the other principal surface, and a top face of the back insulating layer is located above a top face of the back connection member.Type: GrantFiled: February 26, 2019Date of Patent: March 7, 2023Assignee: KYOCERA CorporationInventors: Ryoichi Yokoyama, Takashi Shimizu
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Patent number: 11594638Abstract: The present disclosure describes a semiconductor device and methods for forming the same. The semiconductor device includes nanostructures on a substrate and a source/drain region in contact with the nanostructures. The source/drain region includes epitaxial end caps, where each epitaxial end cap is formed at an end portion of a nanostructure of the nanostructures. The source/drain region also includes an epitaxial body in contact with the epitaxial end caps and an epitaxial top cap formed on the epitaxial body. The semiconductor device further includes gate structure formed on the nanostructures.Type: GrantFiled: January 12, 2021Date of Patent: February 28, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Shahaji B. More
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Patent number: 11594615Abstract: A semiconductor device and a method of manufacturing the same are disclosed. The semiconductor device includes semiconductor wires disposed over a substrate, a source/drain epitaxial layer in contact with the semiconductor wires, a gate dielectric layer disposed on and wrapping around each channel region of the semiconductor wires, a gate electrode layer disposed on the gate dielectric layer and wrapping around the each channel region, and dielectric spacers disposed in recesses formed toward the source/drain epitaxial layer.Type: GrantFiled: March 29, 2021Date of Patent: February 28, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chao-Ching Cheng, Yu-Lin Yang, Wei-Sheng Yun, Chen-Feng Hsu, Tzu-Chiang Chen
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Patent number: 11587909Abstract: Package structure with folded die arrangements and methods of fabrication are described. In an embodiment, a package structure includes a first die and vertical interposer side-by-side. A second die is face down on an electrically connected with the vertical interposer, and a local interposer electrically connects the first die with the vertical interposer.Type: GrantFiled: August 12, 2020Date of Patent: February 21, 2023Assignee: Apple Inc.Inventors: Chonghua Zhong, Jun Zhai, Kunzhong Hu
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Patent number: 11581421Abstract: A semiconductor device and a method of manufacturing the same are disclosed. The semiconductor device includes semiconductor wires disposed over a substrate, a source/drain epitaxial layer in contact with the semiconductor wires, a gate dielectric layer disposed on and wrapping around each channel region of the semiconductor wires, a gate electrode layer disposed on the gate dielectric layer and wrapping around the each channel region, and dielectric spacers disposed in recesses formed toward the source/drain epitaxial layer.Type: GrantFiled: June 21, 2021Date of Patent: February 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chao-Ching Cheng, Yu-Lin Yang, Wei-Sheng Yun, Chen-Feng Hsu, Tzu-Chiang Chen
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Patent number: 11569268Abstract: Structures for a photonics chip that include a fully-depleted silicon-on-insulator field-effect transistor and related methods. A first device region of a substrate includes a first device layer, a first portion of a second device layer, and a buried insulator layer separating the first device layer from the first portion of the second device layer. A second device region of the substrate includes a second portion of the second device layer. The first device layer, which has a thickness in a range of about 4 to about 20 nanometers, transitions in elevation to the second portion of the second device layer with a step height equal to a sum of the thicknesses of the first device layer and the buried insulator layer. A field-effect transistor includes a gate electrode on the top surface of the first device layer. An optical component includes the second portion of the second device layer.Type: GrantFiled: August 5, 2021Date of Patent: January 31, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Ryan Sporer, George R. Mulfinger, Yusheng Bian
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Patent number: 11569365Abstract: A semiconductor device and a method for forming a semiconductor are provided. The semiconductor structure includes a gate structure. The gate structure includes a gate dielectric layer, a work function metal layer over the gate dielectric layer, and a plurality of barrier granules between the gate dielectric layer and the work function metal layer. At least two adjacent barrier granules of the plurality of barrier granules are separated from each other by a portion of the work function metal layer.Type: GrantFiled: February 24, 2021Date of Patent: January 31, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventor: Chien-Hao Chen
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Patent number: 11563118Abstract: The present disclosure provides an embodiment of a fin-like field-effect transistor (FinFET) device. The device includes a first fin structure disposed over an n-type FinFET (NFET) region of a substrate. The first fin structure includes a silicon (Si) layer, a silicon germanium oxide (SiGeO) layer disposed over the silicon layer and a germanium (Ge) feature disposed over the SiGeO layer. The device also includes a second fin structure over the substrate in a p-type FinFET (PFET) region. The second fin structure includes the silicon (Si) layer, a recessed silicon germanium oxide (SiGeO) layer disposed over the silicon layer, an epitaxial silicon germanium (SiGe) layer disposed over the recessed SiGeO layer and the germanium (Ge) feature disposed over the epitaxial SiGe layer.Type: GrantFiled: October 21, 2019Date of Patent: January 24, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo-Cheng Ching, Ka-Hing Fung, Zhiqiang Wu, Carlos H. Diaz
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Patent number: 11563124Abstract: As a display device has a higher definition, the number of pixels, gate lines, and signal lines are increased. When the number of the gate lines and the signal lines are increased, a problem of high manufacturing cost, because it is difficult to mount an IC chip including a driver circuit for driving of the gate and signal lines by bonding or the like. A pixel portion and a driver circuit for driving the pixel portion are provided over the same substrate, and at least part of the driver circuit includes a thin film transistor using an oxide semiconductor interposed between gate electrodes provided above and below the oxide semiconductor. Therefore, when the pixel portion and the driver portion are provided over the same substrate, manufacturing cost can be reduced.Type: GrantFiled: August 26, 2020Date of Patent: January 24, 2023Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hidekazu Miyairi, Takeshi Osada, Shunpei Yamazaki
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Patent number: 11557589Abstract: A method of forming a semiconductor device that includes forming a trench adjacent to a gate structure to expose a contact surface of one of a source region and a drain region. A sacrificial spacer may be formed on a sidewall of the trench and on a sidewall of the gate structure. A metal contact may then be formed in the trench to at least one of the source region and the drain region. The metal contact has a base width that is less than an upper surface width of the metal contact. The sacrificial spacer may be removed, and a substantially conformal dielectric material layer can be formed on sidewalls of the metal contact and the gate structure. Portions of the conformally dielectric material layer contact one another at a pinch off region to form an air gap between the metal contact and the gate structure.Type: GrantFiled: March 30, 2020Date of Patent: January 17, 2023Assignee: Tessera, LLCInventors: Marc A. Bergendahl, Kangguo Cheng, Fee Li Lie, Eric R. Miller, John R. Sporre, Sean Teehan
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Patent number: 11532571Abstract: Vertically-aligned and conductive dummies in integrated circuit (IC) layers reduce capacitance and bias independence. Dummies are islands of material in areas of metal and semiconductor IC layers without circuit features to avoid non-uniform polishing (“dishing”). Conductive diffusion layer dummies in a diffusion layer and conductive polysilicon dummies in a polysilicon layer above the diffusion layer reduce bias dependence and nonlinear circuit operation in the presence of an applied varying voltage. ICs with metal dummies vertically aligned in at least one metal layer above the polysilicon dummies and diffusion dummies reduce lateral coupling capacitance compared to ICs in which dummies are dispersed in a non-overlapping layout by a foundry layout tool. Avoiding lateral resistance-capacitance (RC) ladder networks created by dispersed dummies improves signal delays and power consumption in radio-frequency (RF) ICs.Type: GrantFiled: July 7, 2021Date of Patent: December 20, 2022Assignee: QUALCOMM IncorporatedInventors: Plamen Vassilev Kolev, Anil Kumar Vemulapalli, Matthew Deig
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Patent number: 11532713Abstract: A device includes a device layer comprising a first transistor and a second transistor; a first interconnect structure on a front-side of the device layer; and a second interconnect structure on a backside of the device layer. The second interconnect structure comprising a first dielectric layer on the backside of the device layer, wherein a semiconductor material is disposed between the first dielectric layer and a first source/drain region of the first transistor; a contact extending through the first dielectric layer to a second source/drain region of the second transistor; and a first conductive line electrically connected to the second source/drain region of the second transistor through the contact.Type: GrantFiled: November 6, 2020Date of Patent: December 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Li-Zhen Yu, Huan-Chieh Su, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
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Patent number: 11532625Abstract: Aspects of the disclosure provide a semiconductor device and a method for forming the semiconductor device. The semiconductor device includes a plurality of nanostructures stacked over a substrate in a vertical direction, a source/drain terminal adjoining the plurality of nanostructures, and a gate structure around the plurality of nanostructures. The gate structure includes a metal cap connecting adjacent two of the plurality of nanostructures and a metal layer partially surrounding the plurality of nanostructures.Type: GrantFiled: February 4, 2020Date of Patent: December 20, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Kuo-Cheng Ching, Shi Ning Ju, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang
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Patent number: 11532617Abstract: A semiconductor structure includes the first semiconductor stack and the second semiconductor stack formed over the first region and the second region of a substrate, respectively. The first and second semiconductor stacks extend in the first direction and are spaced apart from each other in the second direction. Each of the first semiconductor stack and the second semiconductor stack includes channel layers and a gate structure. The channel layers are formed above the substrate and are spaced apart from each other in the third direction. The gate structure includes the gate dielectric layers formed around the respective channel layers, and the gate electrode layer formed on the gate dielectric layers to surround the channel layers. The number of channel layers in the first semiconductor stack is different from the number of channel layers in the second semiconductor stack.Type: GrantFiled: December 28, 2020Date of Patent: December 20, 2022Assignee: MEDIATEK INC.Inventor: Po-Chao Tsao
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Patent number: 11527652Abstract: A semiconductor structure includes at least one stacked fin structure, a gate and a source/drain. At least one stacked fin structure is located on a substrate, wherein the stacked fin structure includes a first fin layer and a second fin layer, and a fin dielectric layer is sandwiched by the first fin layer and the second fin layer. The gate is disposed over the stacked fin structure. The source/drain is disposed directly on the substrate and directly on sidewalls of the whole stacked fin structure. The present invention provides a semiconductor process formed said semiconductor structure.Type: GrantFiled: November 3, 2020Date of Patent: December 13, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Zhi-Cheng Lee, Wei-Jen Chen, Kai-Lin Lee
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Patent number: 11527636Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a first fin structure over a substrate. The method includes forming a dielectric layer over the substrate and the first fin structure. The dielectric layer has a first trench exposing a first portion of the first fin structure. The method includes forming a first work function layer in the first trench. The method includes forming a first mask layer over the first work function layer in the first trench, wherein an upper portion of the first work function layer in the first trench is exposed by the first mask layer. The method includes removing the first work function layer exposed by the first mask layer. The method includes removing the first mask layer. The method includes forming a first gate electrode in the first trench.Type: GrantFiled: August 31, 2020Date of Patent: December 13, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wen-Han Fang, Chang-Yin Chen, Ming-Chia Tai, Po-Chi Wu
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Patent number: 11515428Abstract: One example provides an integrated circuit comprising a transistor including a semiconductor channel. The semiconductor channel includes three or more sub-channels, one or more nodes, each node being a junction of at least three sub-channels, and channel ends. A Schottky contact at each channel end forms a source or drain contact, and a gate contact disposed at each Schottky contact controls a barrier conductivity of the corresponding Schottky contact.Type: GrantFiled: December 23, 2020Date of Patent: November 29, 2022Assignee: NaMLab gGmbHInventors: Maik Simon, Jens Trommer, Walter Weber, Stefan Slesazeck
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Patent number: 11508735Abstract: A semiconductor device includes a first Static Random Access Memory (SRAM) array including a first SRAM cell and a second SRAM array including a second SRAM cell. The first SRAM cell includes a first pull-down (PD) device including a single fin N-type FinFET. The single fin N-type FinFET includes a first gate dielectric having a first thickness. The second SRAM cell includes a second PD device including a multiple fin N-type FinFET. The multiple fin N-type FinFET includes a second gate dielectric having a second thickness. The first thickness is greater than the second thickness.Type: GrantFiled: March 2, 2020Date of Patent: November 22, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventor: Jhon Jhy Liaw
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Patent number: 11508833Abstract: A semiconductor device and a method for forming the semiconductor device are provided. The method includes providing a substrate and forming a plurality of core layers discretely arranged on the substrate. The method also includes forming a first sidewall spacer on a sidewall of a core layer of the plurality of core layers. In addition, the method includes removing the first sidewall spacer on a sidewall of at least one core layer; and forming a second sidewall spacer on the sidewall of the at least one core layer where the first sidewall spacer is removed. The first sidewall spacer is made of a material different from the second sidewall spacer.Type: GrantFiled: September 24, 2020Date of Patent: November 22, 2022Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventor: Fei Zhou
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Patent number: 11502183Abstract: A semiconductor structure includes a stack of semiconductor layers disposed over a substrate, a metal gate stack having a top portion disposed over the stack of semiconductor layers and a bottom portion interleaved with the stack of semiconductor layers, an inner spacer disposed on sidewalls of the bottom portion of the metal gate stack, an air gap enclosed in the inner spacer, and an epitaxial source/drain (S/D) feature disposed over the inner spacer and adjacent to the metal gate stack.Type: GrantFiled: November 30, 2020Date of Patent: November 15, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chien Ning Yao, Bo-Feng Young, Sai-Hooi Yeong, Kuan-Lun Cheng, Chih-Hao Wang
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Patent number: 11493708Abstract: A plurality of lid structures include at least one lid structure configured to overlie one or more heat sources within a multi-chip-module and at least one lid structure configured to overlie one or more temperature sensitive components within the multi-chip-module. The plurality of lid structures are configured and positioned such that each lid structure is separated from each adjacent lid structure by a corresponding thermal break. A heat spreader assembly is positioned in thermally conductive interface with the plurality of lid structures. The heat spreader assembly is configured to cover an aggregation of the plurality of lid structures. The heat spreader assembly includes a plurality of separately defined heat transfer members respectively configured and positioned to overlie the plurality of lid structures. The heat spreader assembly is configured to limit heat transfer between different heat transfer members within the heat spreader assembly.Type: GrantFiled: September 15, 2020Date of Patent: November 8, 2022Assignee: Ayar Labs, Inc.Inventors: Roy Edward Meade, Vladimir Stojanovic
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Patent number: 11488743Abstract: The present application discloses a flexible flat cable and a display panel. The flexible flat cable includes a substrate, a first terminal and a second terminal. The substrate is insulating, and the first terminal and the second terminal are disposed at the first end and the second end of the substrate respectively, and are coupled with each other by a capacitor assembly.Type: GrantFiled: March 2, 2018Date of Patent: November 1, 2022Assignee: HKC CORPORATION LIMITEDInventor: Huai Liang He
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Patent number: 11482617Abstract: A vertical transport field-effect transistor array includes continuous spacers at cell edges that are formed following a replacement metal gate process. Techniques for fabricating the transistor array include forming trenches extending along the fin edges of the array to provide access to sacrificial gates, replacing the sacrificial gates with gate stacks, and forming the continuous spacers to encapsulate the gate stacks once formed. Removal of interlevel dielectric material from the array is not required for gate replacement. Bottom source/drain contacts may be formed in the trenches and in adjoining relation to the continuous spacers.Type: GrantFiled: March 17, 2020Date of Patent: October 25, 2022Assignee: International Business Machines CorporationInventors: Ruilong Xie, Chen Zhang, Kangguo Cheng, Julien Frougier
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Patent number: 11476350Abstract: [Problem to be Solved] To provide a transistor and an electronic device whose characteristics are easier to control. [Solution] A transistor including: a semiconductor substrate; an insulating layer provided on the semiconductor substrate; a semiconductor layer provided on the insulating layer in a protruding manner; and a gate electrode provided over a portion of the insulating layer on the semiconductor layer and the insulating layer. A middle portion of a channel region of the semiconductor layer covered by the gate electrode is provided in a shape different from a shape of at least one of ends of the channel region of the semiconductor layer.Type: GrantFiled: May 31, 2018Date of Patent: October 18, 2022Assignee: Sony Semiconductor Solutions CorporationInventors: Katsuhiko Fukasaku, Shinichi Miyake
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Patent number: 11469376Abstract: Provided are a display apparatus and a method of manufacturing the same. The display apparatus includes a substrate, a first conductive layer disposed on the substrate, and a first insulating pattern disposed on the first conductive layer. The first insulating pattern includes a fluorine compound and a nitrogen compound. The nitrogen compound is represented by Formula 1: NR1R2R3OH??<Formula 1> wherein in Formula 1, R1 to R3 are each independently selected from hydrogen, a substituted or unsubstituted C1-C20 alkyl group, a substituted or unsubstituted C6-C30 aryl group, and a substituted or unsubstituted C7-C30 aralkyl group.Type: GrantFiled: June 8, 2020Date of Patent: October 11, 2022Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Koichi Sugitani, Hyein Kim, Gwuihyun Park, Chulwon Park, Hyungbin Cho, Pilsoon Hong
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Patent number: 11456219Abstract: A technique relates to a semiconductor device. An N-type field effect transistor (NFET) and a P-type field effect transistor (PFET) each include an inner work function metal, an outer work function metal, a first nanosheet including an inner channel surface having a first threshold voltage, and a second nanosheet including an outer channel surface having a second threshold voltage. The outer work function metal is modified so as to cause the outer channel surface for the second nanosheet to have the second threshold voltage within a predefined amount of the first threshold voltage for the inner channel surface of the first nanosheet, the predefined amount being within about 20 millivolts (mV).Type: GrantFiled: April 15, 2020Date of Patent: September 27, 2022Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Ruqiang Bao, Dechao Guo, Junli Wang, Heng Wu
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Patent number: 11456373Abstract: In an embodiment, a device includes: a fin on a substrate, fin having a Si portion proximate the substrate and a SiGe portion distal the substrate; a gate stack over a channel region of the fin; a source/drain region adjacent the gate stack; a first doped region in the SiGe portion of the fin, the first doped region disposed between the channel region and the source/drain region, the first doped region having a uniform concentration of a dopant; and a second doped region in the SiGe portion of the fin, the second doped region disposed under the source/drain region, the second doped region having a graded concentration of the dopant decreasing in a direction extending from a top of the fin to a bottom of the fin.Type: GrantFiled: April 29, 2020Date of Patent: September 27, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chia-Ling Chan, Liang-Yin Chen, Wei-Ting Chien
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Patent number: 11450761Abstract: A semiconductor device including a well region in a substrate, an impurity region in the well region, a first active fin on the impurity region, a second active fin on the well region, and a connection pattern penetrating the second active fin and connected to the well region may be provided. The substrate and the impurity region include impurities having a first conductivity type. The well region includes impurities having a second conductivity type different from the first conductivity type. The first active fin includes a plurality of first semiconductor patterns that are spaced apart from each other in a direction perpendicular to a top surface of the substrate. The first semiconductor patterns and the impurity region include impurities having the first conductivity type.Type: GrantFiled: April 24, 2020Date of Patent: September 20, 2022Assignee: Samsung Electronics Co., Ltd.Inventors: Myung Gil Kang, Dongwon Kim, Minyi Kim, Keun Hwi Cho
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Patent number: 11450689Abstract: A silicon-on-insulator semiconductor substrate supports rows extending in a direction. Each row includes complementary MOS transistors and associated contact regions allowing back gate of the complementary MOS transistors to be biased. All transistors and associated contact regions of a given row are mutually isolated by a first trench isolation. Each row is bordered on opposed edges extending parallel to said direction by corresponding second trench isolations that are shallower than the first trench isolation.Type: GrantFiled: July 13, 2020Date of Patent: September 20, 2022Assignee: STMicroelectronics SAInventors: Thomas Bedecarrats, Philippe Galy
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Patent number: 11437492Abstract: Semiconductor devices and methods of manufacturing are presented in which inner spacers for nanostructures are manufactured. In embodiments a dielectric material is deposited for the inner spacer and then treated. The treatment may add material and cause an expansion in volume in order to close any seams that can interfere with subsequent processes.Type: GrantFiled: October 16, 2020Date of Patent: September 6, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wan-Yi Kao, Hung Cheng Lin, Che-Hao Chang, Yung-Cheng Lu, Chi On Chui
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Patent number: 11437364Abstract: An electrostatic discharge (ESD) protection device includes a semiconductor substrate including a first region of a first conductivity type and a second region of a second conductivity type opposite the first conductivity type, the first region and the second region being adjacent to each other and forming a pn junction in the semiconductor substrate, a semiconductor fin on the semiconductor substrate, and an electrode on the semiconductor fin. The pn junction in the semiconductor substrate has a relatively large area to prevent local hot spots from occurring when a current flows through the ESD protection device, thereby reducing performance degradation of a semiconductor device.Type: GrantFiled: October 1, 2020Date of Patent: September 6, 2022Assignees: Semiconductor Manufacturing International (Beijing) Corporation, Semiconductor Manufacturing International (Shanghai) CorporationInventor: Fei Zhou
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Patent number: 11430832Abstract: A method includes depositing a first dielectric layer over a semiconductor substrate, depositing a first electrode layer over the first dielectric layer, etching the first electrode layer to form a first electrode and a second electrode laterally separated from the first electrode, depositing a Spin Orbit Torque (SOT) material on the first electrode and the second electrode, depositing Magnetic Tunnel Junction (MTJ) layers on the SOT material, depositing a second electrode layer on the MTJ layers, etching the SOT material to form a SOT layer extending from the first electrode to the second electrode, etching the MTJ layers to form an MTJ stack on the SOT layer, and etching the second electrode layer to form a top electrode on the MTJ stack.Type: GrantFiled: October 30, 2019Date of Patent: August 30, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shy-Jay Lin, MingYuan Song, Hiroki Noguchi
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Patent number: 11424262Abstract: A microelectronic device comprises a stack structure, a stadium structure within the stack structure, a source tier underlying the stack structure, and a masking structure. The stack structure has tiers each comprising a conductive structure and an insulating structure. The stadium structure comprises a forward staircase structure, a reverse staircase structure, and a central region horizontally interposed between the forward staircase structure and the reverse staircase structure. The source tier comprises discrete conductive structures within horizontal boundaries of the central region of the stadium structure and horizontally separated from one another by dielectric material. The masking structure is confined within the horizontal boundaries of the central region of the stadium structure and is vertically interposed between the source tier and the stack structure.Type: GrantFiled: March 17, 2020Date of Patent: August 23, 2022Assignee: Micron Technology, Inc.Inventors: Shuangqiang Luo, Nancy M. Lomeli
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Patent number: 11424156Abstract: A detachable structure comprises a carrier substrate and a silicon oxide layer positioned on the substrate at a first interface. The detachable structure is notable in that: the oxide layer has a thickness of less than 200 nm; light hydrogen and/or helium species are distributed deeply and over the entire area of the structure according to an implantation profile, a maximum concentration of which is located in the thickness of the oxide layer; the total dose of implanted light species, relative to the thickness of the oxide layer, exceeds, at least by a factor of five, the solubility limit of these light species in the oxide layer.Type: GrantFiled: January 14, 2019Date of Patent: August 23, 2022Assignee: SoitecInventors: Didier Landru, Oleg Kononchuk, Nadia Ben Mohamed, Rénald Guerin, Norbert Colombet
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Patent number: 11417777Abstract: A method of forming a semiconductor device includes forming a fin of alternating layers of semiconductor nanostructures and sacrificial layers, laterally etching sidewall portions of the sacrificial layers, and depositing additional semiconductor material over the sidewalls of the semiconductor nanostructures and sacrificial layers. Following deposition of a dielectric material over the additional semiconductor material and additional etching, the remaining portions of the semiconductor structures and additional semiconductor material collectively form a hammer shape at each opposing side of the fin. Epitaxial source/drain regions formed on the opposing sides of the fin will contact the heads of the hammer shapes.Type: GrantFiled: June 11, 2020Date of Patent: August 16, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Lo-Heng Chang, Jung-Hung Chang, Zhi-Chang Lin, Kuo-Cheng Chiang, Chih-Hao Wang
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Patent number: 11410930Abstract: In an embodiment, a device includes: a first fin; a gate structure over the first fin; a first source/drain region adjacent the gate structure; an etch stop layer over the first source/drain region; a conductive line over the etch stop layer, the conductive line isolated from the first source/drain region by the etch stop layer, a top surface of the conductive line being coplanar with a top surface of the gate structure; and a power rail contact extending through the first fin, the power rail contact connected to the first source/drain region.Type: GrantFiled: September 9, 2020Date of Patent: August 9, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Pei-Yu Wang, Yu-Xuan Huang
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Patent number: 11411082Abstract: The current disclosure describes techniques for individually selecting the number of channel strips for a device. The channel strips are selected by defining a three-dimensional active region that include a surface active area and a depth/height. Semiconductor strips in the active region are selected as channel strips. Semiconductor strips contained in the active region will be configured to be channel strips. Semiconductor strips not included in the active region are not selected as channel strips and are separated from source/drain structures by an auxiliary buffer layer.Type: GrantFiled: October 1, 2019Date of Patent: August 9, 2022Assignees: Taiwan Semiconductor Manufacturing Co., Ltd., National Taiwan UniversityInventors: Ya-Jui Tsou, Zong-You Luo, Wen Hung Huang, Jhih-Yang Yan, Chee-Wee Liu
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Patent number: 11410929Abstract: Semiconductor devices and methods of manufacture are provided wherein a metallization layer is located over a substrate, and a power grid line is located within the metallization layer. A signal pad is located within the metallization layer and the signal pad is surrounded by the power grid line. A signal external connection is electrically connected to the signal pad.Type: GrantFiled: September 17, 2019Date of Patent: August 9, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Fong-yuan Chang, Noor Mohamed Ettuveettil, Po-Hsiang Huang, Sen-Bor Jan, Ming-Fa Chen, Chin-Chou Liu, Yi-Kan Cheng
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Patent number: 11411100Abstract: A semiconductor structure and a method of forming the same are provided. In an embodiment, a semiconductor structure includes a source feature and a drain feature, a channel structure disposed between the source feature and the drain feature, a semiconductor layer disposed over the channel structure and the drain feature, a dielectric layer disposed over the semiconductor layer, a backside source contact over the source feature and extending through the semiconductor layer and the dielectric layer, and a backside power rail disposed over the dielectric layer and in contact with the backside source contact.Type: GrantFiled: September 29, 2020Date of Patent: August 9, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ping-Wei Wang, Chih-Chuan Yang, Yu-Kuan Lin, Choh Fei Yeap
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Patent number: 11404410Abstract: A semiconductor device includes a substrate having a first region and a second region, a first gate structure disposed on the substrate within the first region, a first S/D region, a first S/D contact, a second gate structure on the substrate within the second region, a second S/D region and a second S/D contact. The first S/D region is disposed in the substrate within the first region and beside the first gate structure. The first S/D contact is connected to the first S/D region. The second S/D region is disposed in the substrate within the second region and beside the second gate structure. The second S/D contact is connected to the second S/D region. The contact area between the second S/D region and the second S/D contact is larger than a contact area between the first S/D region and the first S/D contact.Type: GrantFiled: April 29, 2020Date of Patent: August 2, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Meng-Han Lin, Te-An Chen
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Patent number: 11404515Abstract: A display substrate and a manufacturing method thereof, and a display device, are disclosed. The display substrate includes a base substrate and a thin film transistor (TFT) array, including a plurality of TFTs. A first electrode in each TFT includes a first portion and a second portion, a height of the second portion being greater than a height of the first portion in a direction perpendicular to the base substrate, wherein the first portion forms a groove with respect to the second portion and a wall of the groove comprises the second portion of the first electrode of a thin film transistor adjacent to the TFT. A bottom of the groove is the first pixel electrode of a light emitting element, wherein an organic light emitting functional layer is deposited in the groove on the first pixel electrode, and the second pixel electrode on the organic light emitting functional layer.Type: GrantFiled: February 26, 2020Date of Patent: August 2, 2022Assignees: HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD..Inventors: Wei Song, Ce Zhao, Yuankui Ding, Heekyu Kim, Ming Wang, Ning Liu, Yingbin Hu
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Patent number: 11398476Abstract: A structure and a formation method of a semiconductor device are provided. The semiconductor device structure includes a semiconductor substrate and an isolation structure over the semiconductor substrate. The semiconductor device structure also includes a first fin structure over the semiconductor substrate and surrounded by the isolation structure and a stack of nanostructures over the first fin structure. The nanostructures are separated from each other. The semiconductor device structure further includes a second fin structure over the semiconductor substrate. The second fin structure has an embedded portion surrounded by the isolation structure and a protruding portion over the isolation structure. The embedded portion is separated from the protruding portion by a distance.Type: GrantFiled: December 27, 2019Date of Patent: July 26, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jin-Aun Ng, Kuo-Cheng Chiang, Hung-Li Chiang, Tzu-Chiang Chen, I-Sheng Chen
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Patent number: 11398569Abstract: A 3D semiconductor device, the device including: a first level, where the first level includes a first layer, the first layer including first transistors, and where the first level includes a second layer, the second layer including first interconnections; a second level overlaying the first level, where the second level includes a third layer, the third layer including second transistors, and where the second level includes a fourth layer, the fourth layer including second interconnections; a plurality of connection paths, where the plurality of connection paths provide first connections from a plurality of the first transistors to a plurality of the second transistors, where the second level is bonded to the first level, where the bonded includes oxide to oxide bond regions, where the bonded includes metal to metal bond regions, where the third layer includes crystalline silicon, and where the second level includes a plurality of capacitors.Type: GrantFiled: January 27, 2022Date of Patent: July 26, 2022Assignee: MONOLITHIC 3D INC.Inventors: Zvi Or-Bach, Brian Cronquist
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Patent number: 11398475Abstract: Provided is an integrated circuit device including: a plurality of fin-type active regions protruding from a top surface of a substrate and extending in a first horizontal direction; at least one semiconductor layer, each including a lower semiconductor layer and an upper semiconductor layer sequentially stacked on at least one of the plurality of fin-type active regions; and a plurality of gate electrodes extending in a second horizontal direction crossing the first horizontal direction on the plurality of fin-type active regions, wherein the lower semiconductor layer includes a same material as a material of the upper semiconductor layer, and wherein a semiconductor interface is provided between the lower semiconductor layer and the upper semiconductor layer.Type: GrantFiled: December 5, 2019Date of Patent: July 26, 2022Assignee: SAMSUNG ELECTRONICC CO. LTDInventors: Dongchan Suh, Dahye Kim
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Patent number: 11393717Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a gate electrode layer formed over a substrate, and a gate spacer adjacent to the gate electrode layer. The semiconductor device structure includes a source/drain contact structure formed over the substrate and adjacent to the gate electrode layer. An air gap is formed between the gate spacer and the source/drain contact structure, and the air gap is in direct contact with the gate spacer.Type: GrantFiled: October 23, 2020Date of Patent: July 19, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Chiang Tsai, Fu-Hsiang Su, Ke-Jing Yu, Jyh-Huei Chen