Composite Or Layered Gate Insulator (e.g., Mixture Such As Silicon Oxynitride) Patents (Class 257/411)
  • Patent number: 11959870
    Abstract: An embodiment provides a method for measuring an analyte of a sample, including: introducing a sample to a sample region of a measurement device; the measurement device comprising: a measurement electrode and a ground electrode contacting the sample; a low-slope reference electrode in a reference electrode assembly having an electrolyte solution, wherein the electrolyte solution is in contact with the low-slope reference electrode; wherein the electrolyte solution is electrically coupled to the sample via at least one junction; and measuring a first potential between the measurement electrode and the ground electrode; measuring a second potential between the low-slope reference electrode and the ground electrode; determining an analyte in the sample by comparing the first potential and the second potential. Other aspects are described and claimed.
    Type: Grant
    Filed: January 5, 2022
    Date of Patent: April 16, 2024
    Assignee: HACH COMPANY
    Inventors: Corey Alan Salzer, Russell Young
  • Patent number: 11856779
    Abstract: A memory array includes a plurality of memory cells stacked up along a first direction. Each of the memory cells include a memory stack, connecting lines, and insulating layers. The memory stack includes a first dielectric layer, a channel layer disposed on the first dielectric layer, a charge trapping layer disposed on the channel layer, a second dielectric layer disposed on the charge trapping layer, and a gate layer disposed in between the channel layer and the second dielectric layer. The connecting lines are extending along the first direction and covering side surfaces of the memory stack. The insulating layers are extending along the first direction, wherein the insulating layers are located aside the connecting lines and covering the side surfaces of the memory stack.
    Type: Grant
    Filed: June 30, 2022
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Chih Lai, Chung-Te Lin
  • Patent number: 11855181
    Abstract: A semiconductor structure includes an interfacial layer disposed over a semiconductor layer, a high-k gate dielectric layer disposed over the interfacial layer, where the high-k gate dielectric layer includes a first metal, a metal oxide layer disposed between the high-k gate dielectric layer and the interfacial layer, where the metal oxide layer is configured to form a dipole moment with the interfacial layer, and a metal gate stack disposed over the high-k gate dielectric layer. The metal oxide layer includes a second metal different from the first metal, and a concentration of the second metal decreases from a top surface of the high-k gate dielectric layer to the interface between the high-k gate dielectric layer and the interfacial layer.
    Type: Grant
    Filed: February 21, 2022
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsueh Wen Tsau, Ziwei Fang, Huang-Lin Chao, Kuo-Liang Sung
  • Patent number: 11844989
    Abstract: A motion tracking device for tracking athletic movement for accurate competitive scoring, the device having a nine-axis inertial measurement unit comprising a three-axis magnetometer, a three-axis accelerometer and a three-axis gyroscope and at least one other type of sensor.
    Type: Grant
    Filed: November 2, 2020
    Date of Patent: December 19, 2023
    Inventor: Jin Song
  • Patent number: 11830927
    Abstract: A method includes: forming a dummy gate dielectric layer over a channel region of a fin structure; forming a dummy gate over the dummy gate dielectric layer; removing the dummy gate and a first portion of the dummy gate dielectric layer to expose the channel region of the fin structure; removing a first nanowire of the fin structure above a second nanowire of the fin structure to remain the second nanowire of the fin structure; forming an interfacial layer surrounding the second nanowire; forming a material layer comprising dopants over the interfacial layer; and performing an annealing process to drive the dopants of the material layer into the interfacial layer, thereby forming a doped interfacial layer surrounding the second nanowire.
    Type: Grant
    Filed: January 13, 2022
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Cheng-Hsien Wu
  • Patent number: 11823959
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a gate dielectric structure over a substrate. A metal layer overlies the gate dielectric structure. A conductive layer overlies the metal layer. A polysilicon layer contacts opposing sides of the conductive layer. A bottom surface of the polysilicon layer is aligned with a bottom surface of the conductive layer. A dielectric layer overlies the polysilicon layer. The dielectric layer continuously extends from sidewalls of the polysilicon layer to an upper surface of the conductive layer.
    Type: Grant
    Filed: August 19, 2021
    Date of Patent: November 21, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Huan Chen, Chien-Chih Chou, Ta-Wei Lin, Hsiao-Chin Tuan, Alexander Kalnitsky, Kong-Beng Thei, Chia-Hong Wu
  • Patent number: 11764282
    Abstract: A transistor, including an antiferroelectric (AFE) gate dielectric layer is described. The AFE gate dielectric layer may be crystalline and include oxygen and a dopant. The transistor further includes a gate electrode on the AFE gate dielectric layer, a source structure and a drain structure on the substrate, where the gate electrode is between the source structure and the drain structure. The transistor further includes a source contact coupled with the source structure and a drain contact coupled with the drain structure.
    Type: Grant
    Filed: September 2, 2021
    Date of Patent: September 19, 2023
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Brian S. Doyle, Abhishek A. Sharma, Prashant Majhi, Willy Rachmady, Jack T. Kavalieros, Gilbert Dewey
  • Patent number: 11742246
    Abstract: A vertical field effect transistor structure and method for fabricating the same. The structure includes a source/drain layer in contact with at least one semiconductor fin. An edge portion of the source/drain layer includes a notched region filled with a dielectric material. A spacer layer includes a first portion in contact with the source/drain layer and a second portion in contact with the dielectric material. A gate structure contacts the spacer layer and the dielectric material. The method includes forming a source/drain layer in contact with at least one semiconductor fin. A spacer layer is formed in contact with the source/drain layer. A portion of the spacer layer is removed to expose an end portion of the source/drain layer. The exposed end portion of the source/drain layer is recessed to form a notched region within the source/drain layer. A dielectric layer is formed within the notched region.
    Type: Grant
    Filed: October 15, 2021
    Date of Patent: August 29, 2023
    Assignee: International Business Machines Corporation
    Inventors: Ruilong Xie, Hemanth Jagannathan, Christopher J. Waskiewicz, Alexander Reznicek
  • Patent number: 11744086
    Abstract: A method of forming an electronic device comprises forming a stack structure comprising vertically alternating insulative structures and additional insulative structures, and forming pillars comprising a channel material and at least one dielectric material vertically extending through the stack structure. The method comprises removing the additional insulative structures to form cell openings, forming a first conductive material within a portion of the cell openings, and forming a fill material adjacent to the first conductive material and within the cell openings. The fill material comprises sacrificial portions. The method comprises removing the sacrificial portions of the fill material, and forming a second conductive material within the cell openings in locations previously occupied by the sacrificial portions of the fill material. Related electronic devices, memory devices, and systems are also described.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: August 29, 2023
    Assignee: Micron Technology, Inc.
    Inventors: David A. Daycock, Jonghun Kim
  • Patent number: 11710795
    Abstract: An embodiment is a semiconductor device which includes a first oxide semiconductor layer over a substrate having an insulating surface and including a crystalline region formed by growth from a surface of the first oxide semiconductor layer toward an inside; a second oxide semiconductor layer over the first oxide semiconductor layer; a source electrode layer and a drain electrode layer which are in contact with the second oxide semiconductor layer; a gate insulating layer covering the second oxide semiconductor layer, the source electrode layer, and the drain electrode layer; and a gate electrode layer over the gate insulating layer and in a region overlapping with the second oxide semiconductor layer. The second oxide semiconductor layer is a layer including a crystal formed by growth from the crystalline region.
    Type: Grant
    Filed: February 24, 2021
    Date of Patent: July 25, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 11699739
    Abstract: A semiconductor device includes source and a drain above a substrate and spaced apart along a first direction, and a semiconductor channel extending between the source and the drain. The semiconductor device further includes gate spacers, an interfacial layer, and a metal gate structure. The gate spacers are disposed on the semiconductor channel and spaced apart by a spacer-to-spacer distance along the first direction. The interfacial layer is on the semiconductor channel. The interfacial layer extends a length along the first direction, and the length is less than a minimum of the spacer-to-spacer distance along the first direction. The metal gate structure is over the interfacial layer.
    Type: Grant
    Filed: January 27, 2022
    Date of Patent: July 11, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY, NATIONAL TAIWAN NORMAL UNIVERSITY
    Inventors: Tung-Ying Lee, Tse-An Chen, Tzu-Chung Wang, Miin-Jang Chen, Yu-Tung Yin, Meng-Chien Yang
  • Patent number: 11688812
    Abstract: A method includes following steps. A silicon germanium layer is formed on a substrate. A surface layer of the silicon germanium layer is oxidized to form an interfacial layer comprising silicon oxide and germanium oxide. The interfacial layer is nitridated. A metal gate structure is formed over the nitridated interfacial layer.
    Type: Grant
    Filed: June 3, 2021
    Date of Patent: June 27, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Yu Chang, Hsiang-Pi Chang, Zi-Wei Fang
  • Patent number: 11664417
    Abstract: Integrated circuits with III-N metal-insulator-semiconductor field effect transistor (MISFET) structures that employ one or more gate dielectric materials that differ across the MISFETs. Gate dielectric materials may be selected to modulate dielectric breakdown strength and/or threshold voltage between transistors. Threshold voltage may be modulated between two MISFET structures that may be substantially the same but for the gate dielectric. Control of the gate dielectric material may render some MISFETs to be operable in depletion mode while other MISFETs are operable in enhancement mode. Gate dielectric materials may be varied by incorporating multiple dielectric materials in some MISFETs of an IC while other MISFETs of the IC may include only a single dielectric material. Combinations of gate dielectric material layers may be selected to provide a menu of low voltage, high voltage, enhancement and depletion mode MISFETs within an IC.
    Type: Grant
    Filed: September 13, 2018
    Date of Patent: May 30, 2023
    Assignee: Intel Corporation
    Inventors: Walid Hafez, Han Wui Then, Sansaptak Dasgupta, Marko Radosavljevic, Paul Fischer
  • Patent number: 11664222
    Abstract: Methods of forming indium gallium zinc oxide (IGZO) films by vapor deposition are provided. The IGZO films may, for example, serve as a channel layer in a transistor device. In some embodiments atomic layer deposition processes for depositing IGZO films comprise an IGZO deposition cycle comprising alternately and sequentially contacting a substrate in a reaction space with a vapor phase indium precursor, a vapor phase gallium precursor, a vapor phase zinc precursor and an oxygen reactant. In some embodiments the ALD deposition cycle additionally comprises contacting the substrate with an additional reactant comprising one or more of NH3, N2O, NO2 and H2O2.
    Type: Grant
    Filed: October 16, 2020
    Date of Patent: May 30, 2023
    Assignee: ASM IP Holding, B.V.
    Inventors: Oreste Madia, Andrea Illiberi, Michael Eugene Givens, Tatiana Ivanova, Charles Dezelah, Varun Sharma
  • Patent number: 11621333
    Abstract: One illustrative transistor device disclosed herein includes, among other things, a gate positioned above a semiconductor substrate, the gate comprising a gate structure, a conductive source/drain metallization structure positioned adjacent the gate, the conductive source/drain metallization structure having a front face, and an insulating spacer that is positioned on and in contact with at least a portion of the front face of the conductive source/drain metallization structure. In this example, the device also includes a gate contact opening that exposes at least a portion of the insulating spacer and a portion of an upper surface of the gate structure and a conductive gate contact structure positioned in the gate contact opening, wherein the conductive gate contact structure contacts at least a portion of the insulating spacer and wherein the conductive gate contact structure is conductively coupled to the gate structure.
    Type: Grant
    Filed: August 29, 2019
    Date of Patent: April 4, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Ruilong Xie, Hao Tang, Cheng Chi, Daniel Chanemougame, Lars W. Liebmann, Mark V. Raymond
  • Patent number: 11610974
    Abstract: Techniques for reducing the specific contact resistance of metal-semiconductor (group IV) junctions by interposing a monolayer of group V or group III atoms at the interface between the metal and the semiconductor, or interposing a bi-layer made of one monolayer of each, or interposing multiple such bi-layers. The resulting low specific resistance metal-group IV semiconductor junctions find application as a low resistance electrode in semiconductor devices including electronic devices (e.g., transistors, diodes, etc.) and optoelectronic devices (e.g., lasers, solar cells, photodetectors, etc.) and/or as a metal source and/or drain region (or a portion thereof) in a field effect transistor (FET). The monolayers of group III and group V atoms are predominantly ordered layers of atoms formed on the surface of the group IV semiconductor and chemically bonded to the surface atoms of the group IV semiconductor.
    Type: Grant
    Filed: December 23, 2020
    Date of Patent: March 21, 2023
    Assignee: Acorn Semi, LLC
    Inventors: Walter A. Harrison, Paul A. Clifton, Andreas Goebel, R. Stockton Gaines
  • Patent number: 11605556
    Abstract: Techniques are disclosed for forming integrated circuit structures having a plurality of non-planar transistors. An insulation structure is provided between channel, source, and drain regions of neighboring fins. The insulation structure is formed during back side processing, wherein at least a first portion of the isolation material between adjacent fins is recessed to expose a sub-channel portion of the semiconductor fins. A spacer material is then deposited at least on the exposed opposing sidewalls of the exposed sub-channel portion of each fin. The isolation material is then further recessed to form an air gap between gate, source, and drain regions of neighboring fins. The air gap electrically isolates the source/drain regions of one fin from the source/drain regions of an adjacent fin, and likewise isolates the gate region of the one fin from the gate region of the adjacent fin. The air gap can be filled with a dielectric material.
    Type: Grant
    Filed: March 30, 2017
    Date of Patent: March 14, 2023
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Rishabh Mehandru, Patrick Morrow
  • Patent number: 11581325
    Abstract: A memory structure including a substrate, a first dielectric layer, a second dielectric layer, a charge storage layer, an oxide layer, and a conductive layer is provided. The first dielectric layer is disposed on the substrate. The second dielectric layer is disposed on the first dielectric layer. The charge storage layer is disposed between the first dielectric layer and the second dielectric layer. The oxide layer is located at two ends of the charge storage layer and is disposed between the first dielectric layer and the second dielectric layer. The conductive layer is disposed on the second dielectric layer.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: February 14, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Hung Chen, Yu-Huang Yeh, Chuan-Fu Wang
  • Patent number: 11574867
    Abstract: An electrical fuse (e-fuse) includes a fuse link including a silicided semiconductor layer over a dielectric layer covering a gate conductor. The silicided semiconductor layer is non-planar and extends orthogonally over the gate conductor. A first terminal is electrically coupled to a first end of the fuse link, and a second terminal is electrically coupled to a second end of the fuse link. The fuse link may be formed in the same layer as an intrinsic and/or extrinsic base of a bipolar transistor. The gate conductor may control a current source for programming the e-fuse. The e-fuse reduces the footprint and the required programming energy compared to conventional e-fuses.
    Type: Grant
    Filed: November 25, 2020
    Date of Patent: February 7, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Ephrem G. Gebreselasie, Vibhor Jain, Yves T. Ngu, Johnatan A. Kantarovsky, Alain F. Loiseau
  • Patent number: 11508726
    Abstract: A semiconductor structure and a method for forming the same are provided.
    Type: Grant
    Filed: March 2, 2021
    Date of Patent: November 22, 2022
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
    Inventor: Jin Jisong
  • Patent number: 11488859
    Abstract: In an embodiment, a device includes: a semiconductor substrate; a first inter-layer dielectric (ILD) over the semiconductor substrate; a first conductive feature extending through the first ILD; a first etch stop layer over the first conductive feature and the first ILD, the first etch stop layer being a first dielectric material; a second ILD over the first etch stop layer; a contact having a first portion extending through the second ILD and a second portion extending through the first etch stop layer, the contact being physically and electrically coupled to the first conductive feature; and a first protective layer surrounding the second portion of the contact, the first portion of the contact being free from the first protective layer, the first protective layer being a second dielectric material, the second dielectric material being different from the first dielectric material.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: November 1, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Nan Yeh, Yu Shih Wang, Ming-Hsi Yeh
  • Patent number: 11469323
    Abstract: Techniques are disclosed for an integrated circuit including a ferroelectric gate stack including a ferroelectric layer, an interfacial oxide layer, and a gate electrode. The ferroelectric layer can be voltage activated to switch between two ferroelectric states. Employing such a ferroelectric layer provides a reduction in leakage current in an off-state and provides an increase in charge in an on-state. The interfacial oxide layer can be formed between the ferroelectric layer and the gate electrode. Alternatively, the ferroelectric layer can be formed between the interfacial oxide layer and the gate electrode.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: October 11, 2022
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Willy Rachmady, Jack T. Kavalieros, Cheng-Ying Huang, Matthew V. Metz, Sean T. Ma, Harold Kennel, Tahir Ghani
  • Patent number: 11462523
    Abstract: A display module and a manufacturing method thereof is provided. The display module may include a substrate; a thin film transistor (TFT) layer disposed on a surface of the substrate; a plurality of LED packages including a connection substrate and a plurality of LEDs disposed on a first surface of the connection substrate; and a wiring configured to electrically connect the TFT layer and the plurality of LEDs. The wiring includes a first wiring for electrically coupling with the plurality of LEDs on the first surface, and a second wiring for electrically coupling with the TFT layer on a second surface of the connection substrate.
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: October 4, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jinhee Kang, Taesoon Park, Youngki Jung, Chulgyu Jung
  • Patent number: 11411112
    Abstract: Provided are a gate structure and a method of forming the same. The gate structure includes a gate dielectric layer, a metal layer, and a cluster layer. The metal layer is disposed over the gate dielectric layer. The cluster layer is sandwiched between the metal layer and the gate dielectric layer, wherein the cluster layer at least includes an amorphous silicon layer, an amorphous carbon layer, or an amorphous germanium layer. In addition, a semiconductor device including the gate structure is provided.
    Type: Grant
    Filed: May 31, 2020
    Date of Patent: August 9, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Chieh Wang, Sheng-Wei Yeh, Yueh-Ching Pai, Chi-Jen Yang
  • Patent number: 11410846
    Abstract: The present disclosure provides a method for forming an integrated circuit (IC) structure. The method includes providing a metal gate (MG), an etch stop layer (ESL) formed on the MG, and a dielectric layer formed on the ESL. The method further includes etching the ESL and the dielectric layer to form a trench. A surface of the MG exposed in the trench is oxidized to form a first oxide layer on the MG. The method further includes removing the first oxide layer using a H3PO4 solution.
    Type: Grant
    Filed: November 10, 2020
    Date of Patent: August 9, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shich-Chang Suen, Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen
  • Patent number: 11404578
    Abstract: Gate all around semiconductor devices, such as nanowire or nanoribbon devices, are described that include a low dielectric constant (“low-?”) material disposed between a first nanowire closest to the substrate and the substrate. This configuration enables gate control over all surfaces of the nanowires in a channel region of a semiconductor device via the high-k dielectric material, while also preventing leakage current from the first nanowire into the substrate.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: August 2, 2022
    Assignee: Intel Corporation
    Inventors: Bruce E. Beattie, Leonard Guler, Biswajeet Guha, Jun Sung Kang, William Hsu
  • Patent number: 11404442
    Abstract: Embodiments of a semiconductor memory device include a substrate having a first region with peripheral devices, a second region with one or more memory arrays, and a third region between the first and the second regions. The semiconductor memory device also includes a protective structure for peripheral devices. The protective structure for peripheral devices of the semiconductor memory device includes a first dielectric layer and a barrier layer disposed on the first dielectric layer. The protective structure for peripheral devices of the semiconductor memory device further includes a dielectric spacer formed on a sidewall of the barrier layer and a sidewall of the first dielectric layer, wherein the protective structure is disposed over the first region and at least a portion of the third region.
    Type: Grant
    Filed: July 2, 2020
    Date of Patent: August 2, 2022
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zongliang Huo, Wenbin Zhou, Zhiguo Zhao, Zhaoyun Tang, Hai Lin Xiong
  • Patent number: 11393912
    Abstract: Semiconductor structures and method for forming the same are provided. The semiconductor structure includes a fin protruding from a substrate and a gate stack formed across the fin. The semiconductor structure further includes a first cap layer formed over the gate stack and a source/drain structure formed adjacent to the gate stack in the fin. The semiconductor structure further includes a contact structure formed over the source/drain structure and a second cap layer formed over the contact structure. In addition, the first cap layer and the second cap layer include different halogens.
    Type: Grant
    Filed: October 26, 2020
    Date of Patent: July 19, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chung-Liang Cheng, Ziwei Fang
  • Patent number: 11380549
    Abstract: A semiconductor device and method of manufacture are provided. In an embodiment a metal layer is formed over a substrate using a fluorine-free deposition process, a nucleation layer is formed over the metal layer using a fluorine included deposition process, and a fill material is formed to fill an opening and form a gate stack.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: July 5, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jung-Shiung Tsai, Chung-Chiang Wu, Wei-Fan Liao, Han-Ti Hsiaw
  • Patent number: 11374111
    Abstract: A semiconductor device that a fin structure, and a gate structure present on a channel region of the fin structure. A composite spacer is present on a sidewall of the gate structure including an upper portion having a first dielectric constant, a lower portion having a second dielectric constant that is less than the first dielectric constant, and an etch barrier layer between sidewalls of the first and second portion of the composite spacer and the gate structure. The etch barrier layer may include an alloy including at least one of silicon, boron and carbon.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: June 28, 2022
    Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, GLOBALFOUNDRIES INC., STMICROELECTRONICS, INC.
    Inventors: Xiuyu Cai, Chun-Chen Yeh, Qing Liu, Ruilong Xie
  • Patent number: 11351437
    Abstract: A conductive material of a plurality of separate conductive materials are coupled to a first participant, the conductive material configured to move when the first participant delivers an impact to a second participant. An impedance-based impact sensing mechanism including an impedance changing mechanism that changes impedance as the conductive material is moved towards and away from the impedance changing mechanism as the first participant delivers the impact. An impedance-based impact measuring scoring system determines that the impact occurred based on a change in impedance in the impedance changing mechanism.
    Type: Grant
    Filed: December 9, 2019
    Date of Patent: June 7, 2022
    Inventor: Jin Song
  • Patent number: 11302581
    Abstract: A method includes depositing a dummy gate dielectric layer over a semiconductor region, depositing a dummy gate electrode layer, and performing a first etching process. An upper portion of the dummy gate electrode layer is etched to form an upper portion of a dummy gate electrode. The method further includes forming a protection layer on sidewalls of the upper portion of the dummy gate electrode, and performing a second etching process. A lower portion of the dummy gate electrode layer is etched to form a lower portion of the dummy gate electrode. A third etching process is then performed to etch the lower portion of the dummy gate electrode using the protection layer as an etching mask. The dummy gate electrode is tapered by the third etching process. The protection layer is removed, and the dummy gate electrode is replaced with a replacement gate electrode.
    Type: Grant
    Filed: May 5, 2020
    Date of Patent: April 12, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Yao Lin, Kuei-Yu Kao, Chih-Han Lin, Ming-Ching Chang, Chao-Cheng Chen
  • Patent number: 11302685
    Abstract: Printable and stretchable thin-film devices and fabrication techniques are provided for forming fully-printed, intrinsically stretchable thin-film transistors and integrated logic circuits using stretchable elastomer substrates such as polydimethylsiloxane (PDMS), semiconducting carbon nanotube network as channel, unsorted carbon nanotube network as source/drain/gate electrodes, and BaTiO3/PDMS composite as gate dielectric. Printable stretchable dielectric layer ink may be formed by mixing barium titanate nanoparticle (BaTiO3) with PDMS using 4-methyl-2-pentanone as solvent.
    Type: Grant
    Filed: November 19, 2018
    Date of Patent: April 12, 2022
    Assignee: BOARD OF TRUSTEES OF MICHIGAN STATE UNIVERSITY
    Inventors: Chuan Wang, Le Cai
  • Patent number: 11289589
    Abstract: In a method for manufacturing a semiconductor device by using a gate replacement technology, a gate space constituted by dielectric material portions, in which a semiconductor fin channel layer is exposed, is formed. The surfaces of the dielectric material portions are made hydrophobic. A first dielectric layer is formed on the semiconductor fin channel layer, while maintaining the surfaces of the dielectric material portions hydrophobic. A surface of the formed first dielectric layer is hydrophilic. A first conductive layer is formed over the first dielectric layer, while maintaining the surfaces of the dielectric material portions hydrophobic. A second conductive layer is formed over the first conductive layer and on the hydrophobic surfaces of the dielectric material portions, thereby filling the gate space.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: March 29, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tetsu Ohtou, Yusuke Oniki
  • Patent number: 11264399
    Abstract: A semiconductor device and a method of manufacturing a semiconductor device may be provided. The semiconductor device may include first and second vertical conductive patterns isolated from each other by a first slit. The semiconductor device may include at least one first half conductive pattern extending toward a first region disposed at one side of the first slit from the first vertical conductive pattern. The semiconductor device may include at least one second half conductive pattern extending toward a second region disposed at the other side of the first slit from the second vertical conductive pattern.
    Type: Grant
    Filed: April 17, 2020
    Date of Patent: March 1, 2022
    Assignee: SK hynix Inc.
    Inventor: Nam Jae Lee
  • Patent number: 11251187
    Abstract: A method for fabricating buried word line of a dynamic random access memory (DRAM) includes the steps of: forming a trench in a substrate; forming a first conductive layer in the trench; forming a second conductive layer on the first conductive layer, in which the second conductive layer above the substrate and the second conductive layer below the substrate comprise different thickness; and forming a third conductive layer on the second conductive layer to fill the trench.
    Type: Grant
    Filed: September 22, 2017
    Date of Patent: February 15, 2022
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Pin-Hong Chen, Yi-Wei Chen, Tzu-Chieh Chen, Chih-Chieh Tsai, Chia-Chen Wu, Kai-Jiun Chang, Yi-An Huang, Tsun-Min Cheng
  • Patent number: 11239243
    Abstract: A method of manufacturing a semiconductor device for preventing row hammering issue in DRAM cell, including the steps of providing a substrate, forming a trench in the substrate, forming a gate dielectric conformally on the trench, forming an n-type work function metal layer conformally on the substrate and the gate dielectric, forming a titanium nitride layer conformally on the n-type work function metal layer, and filling a buried word line in the trench.
    Type: Grant
    Filed: May 5, 2020
    Date of Patent: February 1, 2022
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Chih-Chieh Tsai, Pin-Hong Chen, Tzu-Chieh Chen, Tsun-Min Cheng, Yi-Wei Chen, Hsin-Fu Huang, Chi-Mao Hsu, Shih-Fang Tzou
  • Patent number: 11227943
    Abstract: A high electron mobility transistor (HEMT) and method of producing the same are provided. The HEMT includes a barrier layer formed on a GaN layer. The HEMT also includes a ZrO2 gate dielectric layer formed by either a ZTB precursor, a TDMA-Zr precursor, or both. The HEMT may also include a recess in the barrier layer in the gate region of the HEMT. The HEMTs may operate in an enhancement mode.
    Type: Grant
    Filed: June 25, 2018
    Date of Patent: January 18, 2022
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Travis J. Anderson, Virginia D. Wheeler, Karl D. Hobart, Francis J. Kub
  • Patent number: 11211324
    Abstract: An example via contact patterning method includes providing a pattern of alternating trench contacts and gates over a support structure. For each pair of adjacent trench contacts and gates, a trench contact is electrically insulated from an adjacent gate by a dielectric material and/or multiple layers of different dielectric materials, and the gates are recessed with respect to the trench contacts. The method further includes wrapping a protective layer of one or more dielectric materials, and a sacrificial helmet material on top of the trench contacts to protect them during the via contact patterning and etch processes for forming via contacts over one or more gates. Such a method may advantageously allow increasing the edge placement error margin for forming via contacts of metallization stacks.
    Type: Grant
    Filed: September 18, 2019
    Date of Patent: December 28, 2021
    Assignee: Intel Corporation
    Inventors: Mohit K. Haran, Daniel James Bahr, Deepak S. Rao, Marvin Young Paik, Seungdo An, Debashish Basu, Kilhyun Bang, Jason W. Klaus, Reken Patel, Charles Henry Wallace, James Jeong, Ruth Amy Brain
  • Patent number: 11205703
    Abstract: A semiconductor device and fabrication method thereof are provided. The method includes: providing a gate structure, a first dielectric layer, and source/drain doped layers on a base substrate and in the base substrate on sides of the gate structure; forming a mask layer on the gate structure between the source/drain doped layers; forming a second dielectric layer on the first dielectric layer and exposing the mask layer; etching the second dielectric layer and the first dielectric layer using the mask layer as an etch mask, to form first grooves on the sides of the gate structure and exposing the source/drain doped layers; forming a first conductive structure in each first groove; patterning the mask layer to form a second groove in the mask layer to expose the gate structure at the bottom of the second groove; and forming a spacer on sidewalls of the second groove.
    Type: Grant
    Filed: July 7, 2020
    Date of Patent: December 21, 2021
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Nan Wang
  • Patent number: 11164954
    Abstract: A semiconductor device is provided, which includes providing an active region, a source region, a drain region, a dielectric layer, a gate structure and a nitrogen-infused dielectric layer. The source region and the drain region are formed in the active region. The dielectric layer is disposed over the source region and the drain region. The gate structure formed in the dielectric layer is positioned between the source region and the drain region. The nitrogen-infused dielectric layer is disposed over the dielectric layer and over the gate structure.
    Type: Grant
    Filed: June 10, 2019
    Date of Patent: November 2, 2021
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Sipeng Gu, Zhiguo Sun, Guoliang Zhu, Xinyuan Dou
  • Patent number: 11164821
    Abstract: A semiconductor package including a semiconductor chip having a chip pad thereon; a first insulating layer; a redistribution line pattern on the first insulating layer; a redistribution via pattern through the first insulating layer to connect the chip pad to the redistribution line pattern; a second insulating layer covering the redistribution line pattern and including a first part having a first thickness and a second part having a second thickness. the second part being inward relative to the first part; a first conductive pillar through the first part and connected to the redistribution line pattern; a second conductive pillar through the second part and connected to the redistribution line pattern; a first connection pad on the first conductive pillar; a second connection pad on the second conductive pillar; a first connection terminal contacting the first connection pad; and a second connection terminal contacting the second connection pad.
    Type: Grant
    Filed: April 21, 2020
    Date of Patent: November 2, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Boin Noh
  • Patent number: 11152299
    Abstract: A technique relates to an integrated circuit. A first dielectric material is formed on a layer, and a second dielectric material is formed on the first dielectric material, the second dielectric material having a different characteristic than the first dielectric material. Conductive material is formed in the first dielectric material, the second dielectric material, and the layer, the conductive material forming interconnects in the layer separated by a stack of the first dielectric material and the second dielectric material. The conductive material forms a self-aligned conductive via on one of the interconnects according to a topography of the stack, the stack of the first dielectric material and the second dielectric material electrically insulating the one of the interconnects from another one of the interconnects.
    Type: Grant
    Filed: March 3, 2020
    Date of Patent: October 19, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Nicholas Anthony Lanzillo, Christopher J. Penny, Hosadurga Shobha, Lawrence A. Clevenger, Robert Robison
  • Patent number: 11152265
    Abstract: A vertical field effect transistor structure and method for fabricating the same. The structure includes a source/drain layer in contact with at least one semiconductor fin. An edge portion of the source/drain layer includes a notched region filled with a dielectric material. A spacer layer includes a first portion in contact with the source/drain layer and a second portion in contact with the dielectric material. A gate structure contacts the spacer layer and the dielectric material. The method includes forming a source/drain layer in contact with at least one semiconductor fin. A spacer layer is formed in contact with the source/drain layer. A portion of the spacer layer is removed to expose an end portion of the source/drain layer. The exposed end portion of the source/drain layer is recessed to form a notched region within the source/drain layer. A dielectric layer is formed within the notched region.
    Type: Grant
    Filed: August 1, 2019
    Date of Patent: October 19, 2021
    Assignee: International Business Machines Corporation
    Inventors: Ruilong Xie, Hemanth Jagannathan, Christopher J. Waskiewicz, Alexander Reznicek
  • Patent number: 11133179
    Abstract: A thin-film structure includes a support layer and a dielectric layer on the support layer. The support layer includes a material having a lattice constant. The dielectric layer includes a compound having a Ruddlesden-Popper phase (An+1BnX3n+1). where A and B each independently include a cation, X is an anion, and n is a natural number. The lattice constant of the material of the support layer may be less than a lattice constant of the compound.
    Type: Grant
    Filed: November 27, 2019
    Date of Patent: September 28, 2021
    Assignees: Samsung Electronics Co., Ltd., Cornell University
    Inventors: Kiyoung Lee, Woojin Lee, Myoungho Jeong, Yongsung Kim, Eunsun Kim, Hyosik Mun, Jooho Lee, Changseung Lee, Kyuho Cho, Darrell G. Schlom, Craig J. Fennie, Natalie M. Dawley, Gerhard H. Olsen, Zhe Wang
  • Patent number: 11101364
    Abstract: Structures for a field-effect transistor and methods of forming a field-effect transistor. A gate structure of the field-effect transistor is arranged over an active region comprised of a semiconductor material. A first sidewall spacer is arranged adjacent to the gate structure. A second sidewall spacer includes a section arranged between the first sidewall spacer and the active region. The first sidewall spacer is composed of a low-k dielectric material.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: August 24, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: George R. Mulfinger, Hong Yu, Man Gu, Jianwei Peng, Michael Aquilino
  • Patent number: 11081577
    Abstract: An electronic device including a two-dimensional electron gas is provided. The electronic device includes a substrate, a first material layer disposed on the substrate and formed of a binary oxide, a second material layer disposed on the first material layer and formed of a binary oxide, and a two-dimensional electron gas generated between the first material layer and the second material layer.
    Type: Grant
    Filed: September 24, 2015
    Date of Patent: August 3, 2021
    Assignee: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS
    Inventors: Daehyun Kim, Taejoo Park, Yuhang Liu
  • Patent number: 10991693
    Abstract: The present disclosure relates to an integrated circuit (IC) that includes a boundary region defined between a low voltage region, and a method of formation. In some embodiments, the integrated circuit comprises a first gate boundary dielectric layer disposed over a substrate in the low voltage region. A second gate boundary dielectric layer is disposed over the substrate in the high voltage region having a thickness greater than that of the first boundary dielectric layer. The first boundary dielectric layer meets the second boundary dielectric layer at the boundary region. A first polysilicon component is disposed within the boundary region over the first boundary dielectric layer and the second gate boundary layer. A second polysilicon component is disposed within the boundary region over the first polysilicon component. A hard mask component is disposed over the first polysilicon component and laterally neighbored to the second polysilicon component.
    Type: Grant
    Filed: January 2, 2020
    Date of Patent: April 27, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Huan Chen, Chien-Chih Chou, Kong-Beng Thei
  • Patent number: 10985022
    Abstract: Examples of a method of forming an integrated circuit device with an interfacial layer disposed between a channel region and a gate dielectric are provided herein. In some examples, the method includes receiving a workpiece having a substrate and a fin having a channel region disposed on the substrate. An interfacial layer is formed on the channel region of the fin, and a gate dielectric layer is formed on the interfacial layer. A first capping layer is formed on the gate dielectric layer, and a second capping layer is formed on the first capping layer. An annealing process is performed on the workpiece configured to cause a first material to diffuse from the first capping layer into the gate dielectric layer. The forming of the first and second capping layers and the annealing process may be performed in the same chamber of a fabrication tool.
    Type: Grant
    Filed: November 29, 2018
    Date of Patent: April 20, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chung-Liang Cheng, Chun-I Wu, Ziwei Fang, Huang-Lin Chao
  • Patent number: 10961158
    Abstract: A new composition of matter, and more specifically a new compound, includes two or more highly resistive materials integrated into the chemistry of the grain boundary of an internal barrier layer capacitor material. This new compound includes a high permittivity and high resistivity dielectric compound. This new compound has high permittivity, high resistivity, and low leakage current. In certain examples the new compound can be used to create a dielectric energy storage device that is a battery with very high energy density, high operating voltage per cell, and an extended battery life cycle.
    Type: Grant
    Filed: March 19, 2020
    Date of Patent: March 30, 2021
    Assignee: Blue Horizons Innovations, LLC
    Inventor: David L. Frank