Semiconductor Is An Oxide Of A Metal (e.g., Cuo, Zno) Or Copper Sulfide Patents (Class 257/43)
  • Patent number: 10784285
    Abstract: A novel display device or the like in which a transistor connected to a scan line has small gate capacitance is provided. A novel display device or the like in which a scan line has low resistance is provided. A novel display device or the like in which pixels can be arranged with high density is provided. A novel display device or the like that can be manufactured without an increase in cost is provided. In a transistor including a first gate electrode and a second gate electrode, the first gate electrode is formed using a metal material with low resistance and the second gate electrode is formed using a metal oxide material that can reduce oxygen vacancies in an oxide semiconductor layer. The first gate electrode is connected to the scan line, and the second gate electrode is connected to a wiring to which a constant potential is supplied.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: September 22, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Kouhei Toyotaka, Kei Takahashi, Hideaki Shishido, Koji Kusunoki
  • Patent number: 10784284
    Abstract: To provide a highly reliable semiconductor device that is suitable for miniaturization and an increase in density. The semiconductor device includes a first insulator over a substrate, a transistor including an oxide semiconductor over the first insulator, a second insulator over the transistor, and a third insulator over the second insulator. The first insulator and the third insulator have a barrier property with respect to oxygen and hydrogen. The second insulator includes an excess-oxygen region. The transistor is enclosed with the first insulator and the third insulator that are in contact with each other in an edge of a region where the transistor is positioned.
    Type: Grant
    Filed: November 8, 2016
    Date of Patent: September 22, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 10777686
    Abstract: The present disclosure provides a thin film transistor and a method for manufacturing the same, an array substrate and a display panel. The thin film transistor includes a base substrate; a partially transparent layer on one side of the base substrate; a first gate electrode on one side of the partially transparent layer away from the base substrate; a second gate insulation layer on one side of the first gate electrode away from the base substrate; and an active layer on one side of the second gate insulation layer away from the base substrate. An orthographic projection of the partially transparent layer to the base substrate covers an orthographic projection of the active layer to the base substrate.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: September 15, 2020
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Guoying Wang, Zhen Song
  • Patent number: 10777587
    Abstract: Provided is an active matrix substrate (1001) that includes multiple inspection TFTs (10Q) that are arranged in a non-display area (900), and an inspection circuit (200) that includes multiple inspection TFTs (10Q). At least one or more of the multiple inspection TFTs (10Q) are arranged within a semiconductor chip mounting area (R) in which a semiconductor chip is mounted. Each of the multiple inspection TFTs (10Q) includes a semiconductor layer, a lower gate electrode (FG) that is positioned on a side of the substrate of the semiconductor layer with a gate insulation layer in between, an upper gate electrode (BG) that is positioned on a side opposite to the side of the substrate of the semiconductor layer with an insulation layer including a first insulation layer in between, and a source electrode and a drain electrode that are connected to the semiconductor layer.
    Type: Grant
    Filed: August 31, 2017
    Date of Patent: September 15, 2020
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Jun Nishimura, Yoshihito Hara, Yoshimasa Chikama, Yukinobu Nakata
  • Patent number: 10777644
    Abstract: Current conducting devices and methods for their formation are disclosed. Described are vertical current devices that include a substrate, an n-type material layer, a plurality of p-type gates, and a source. The n-type material layer disposed on the substrate and includes a current channel. A plurality of p-type gates are disposed on opposite sides of the current channel. A source is disposed on a distal side of the current channel with respect to the substrate. The n-type material layer comprises beta-gallium oxide.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: September 15, 2020
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Francis J. Kub, Travis J. Anderson, Marko J. Tadjer, Andrew D. Koehler, Karl D. Hobart
  • Patent number: 10777581
    Abstract: A method for manufacturing an IGZO thin-film transistor includes: manufacturing a buffer layer, an active layer, a gate electrode layer, and a gate insulator layer in sequence on a substrate, and performing a patterning process; depositing a transparent insulating metal oxide layer on the patterned buffer layer, the active layer, the gate electrode layer, and the gate insulator layer by sputtering, and annealing the transparent insulating metal oxide layer so as to improve electric properties of a thin-film transistor; depositing a dielectric layer on the transparent insulating metal oxide layer, and patterning the dielectric layer and the transparent insulating metal oxide layer by means of a photolithography process and a dry etch process; depositing S/D (source/drain) contact regions on the dielectric layer; and performing a patterning process.
    Type: Grant
    Filed: July 6, 2017
    Date of Patent: September 15, 2020
    Assignee: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventor: Songshan Li
  • Patent number: 10770488
    Abstract: The present disclosure provides a method for manufacturing an active switch array substrate, and the active switch array substrate, the method includes: providing a substrate; coating a first metal layer on the substrate; forming a gate electrode by treating the first metal layer; depositing an amorphous silicon layer on the substrate and the gate electrode; coating a second metal layer on the amorphous silicon layer; forming a patterned second metal layer; coating a passivation layer on the patterned second metal layer; forming a through hole in the passivation layer; coating a light permeability conductive layer on the passivation layer; and carrying out a fourth photolithography process to the light permeability conductive layer, the passivation layer, and the patterned second metal layer, to form a channel, a source electrode, and a drain electrode on the light permeability conductive layer, the passivation layer, and the patterned second metal layer.
    Type: Grant
    Filed: December 4, 2017
    Date of Patent: September 8, 2020
    Assignees: HKC Corporation Limited, Chongqing HKC Optoelectronics Technology Co., Ltd.
    Inventor: En-tsung Cho
  • Patent number: 10770010
    Abstract: An information terminal capable of switching display and non-display of images by strain. The information terminal includes a display portion and a strain sensor. The display portion includes a liquid crystal element, a light-emitting element, and a first and a second transistors. The strain sensor includes a strain sensor element and a resistor. The first transistor has a function of controlling current flowing into the light-emitting element. The strain sensor element has a function as a variable resistor. A first terminal of the strain sensor element is electrically connected to a first terminal of the resistor. A gate of the first transistor is electrically connected to a first terminal of the strain sensor element via the second transistor.
    Type: Grant
    Filed: July 18, 2019
    Date of Patent: September 8, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Yuki Okamoto
  • Patent number: 10763371
    Abstract: A thin film transistor is provided. The thin film transistor includes an oxide semiconductor layer including a source region, a drain region, and a channel region wherein a portion of the source and drain regions has an oxygen concentration less than the channel region. Further provided is a thin film transistor that includes an oxide semiconductor layer including a source region, a drain region, and a channel region, wherein a portion of the source and drain regions includes a dopant selected from the group consisting of aluminum, boron, gallium, indium, titanium, silicon, germanium, tin, lead, and combinations thereof.
    Type: Grant
    Filed: November 15, 2017
    Date of Patent: September 1, 2020
    Assignee: Joled Inc.
    Inventors: Narihiro Morosawa, Yoshihiro Oshima
  • Patent number: 10763280
    Abstract: A semiconductor device includes a first fin field effect transistor (FinFET) device, the first FinFET device including a plurality of fins formed in a substrate, an epitaxial layer of semiconductor material formed on the fins forming non-planar source/drain regions, and a first gate structure traversing across the plurality of fins. The semiconductor device includes a second FinFET device, the second FinFET device including a substantially planar fin formed in the substrate, an epitaxial layer of the semiconductor material formed on the substantially planar fin and forming substantially planar source/drain regions, and a second gate structure traversing across the substantially planar fin.
    Type: Grant
    Filed: May 25, 2018
    Date of Patent: September 1, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chien-Chen Liu, Guan-Jie Shen, Chia-Der Chang
  • Patent number: 10756156
    Abstract: A display device includes a substrate, a pixel circuit unit which is disposed on the substrate and having a first hole, a light blocking layer which is disposed on the pixel circuit unit and having a second hole corresponding to the first hole, a light emitting layer disposed on the pixel circuit unit, and a sealing unit on the light blocking layer. The substrate includes a first layer having a depression corresponding to the first hole, and a second layer which is disposed between the first layer and the pixel circuit unit and having a third hole between the depression and the second hole. The sealing unit includes a cover portion on the light blocking layer, and an extension portion extending from the cover portion. The depression has a width larger than a width of the third hole.
    Type: Grant
    Filed: October 29, 2018
    Date of Patent: August 25, 2020
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Wooyong Sung, Junghan Seo, Kwanhyuck Yoon, Sooyoun Kim, Jongki Kim, Seungho Yoon, Heeyeon Lee, Moonwon Chang
  • Patent number: 10756118
    Abstract: A display device includes a liquid crystal element, a transistor, a scan line, and a signal line. The liquid crystal element includes a pixel electrode, a liquid crystal layer, and a common electrode. The scan line and the signal line are each electrically connected to the transistor. The scan line and the signal line each include a metal layer. The transistor is electrically connected to the pixel electrode. A semiconductor layer of the transistor includes a stack of a first metal oxide layer and a second metal oxide layer. The first metal oxide layer includes a region with lower crystallinity than the second metal oxide layer. The transistor includes a first region connected to the pixel electrode. The pixel electrode, the common electrode, and the first region are each configured to transmit visible light. Visible light passes through the first region and the liquid crystal element and exits from the display device.
    Type: Grant
    Filed: November 22, 2017
    Date of Patent: August 25, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Kenichi Okazaki, Daisuke Kurosaki, Yasutaka Nakazawa, Kazunori Watanabe, Koji Kusunoki
  • Patent number: 10748936
    Abstract: A thin film transistor array panel includes a substrate and a thin film transistor disposed on a surface of the substrate. The thin film transistor includes a semiconductor, a source electrode, and a drain electrode that are disposed on a same layer as one another. The semiconductor is between the source electrode and the drain electrode. The thin film transistor array panel further includes a buffer layer disposed between the semiconductor and the substrate and including an inorganic insulating material. The first edge of the buffer layer is substantially parallel to an adjacent edge of the semiconductor, a second edge of the buffer layer is substantially parallel to an adjacent edge of the source electrode, and a third edge of the buffer layer is substantially parallel to an adjacent edge of the drain electrode.
    Type: Grant
    Filed: December 26, 2018
    Date of Patent: August 18, 2020
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Sung Ho Kim, Dong Won Kim, Jong Moo Huh
  • Patent number: 10749039
    Abstract: A high-performance TFT substrate (100) for a flat panel display includes a substrate (110), a first conductive layer (130) on the substrate (110), a semiconductor layer (103) positioned on the first conductive layer (130), and a second conductive layer (150) positioned on the semiconductor layer (103). The first conductive layer (130) defines a gate electrode (101). The second conductive layer (150) defines a source electrode (105) and a drain electrode (106) spaced apart from the source electrode (105). The second conductive layer (150) includes a first layer (151) on the semiconductor layer (103) and a second layer (152) positioned on the first layer (151). The first layer (151) can be made of metal oxide. The second layer (152) can be made of aluminum or aluminum alloy.
    Type: Grant
    Filed: December 6, 2016
    Date of Patent: August 18, 2020
    Assignees: HONG FU JIN PRECISION INDUSTRY (ShenZhen) CO., LTD., HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Yi-Chun Kao, Po-Li Shih, Wei-Chih Chang, I-Wei Wu
  • Patent number: 10741690
    Abstract: It is an object of the present invention to provide a technique capable of reducing a contact resistance between source and drain electrodes and a channel region. A thin film transistor includes: a first semiconductor layer provided on a first insulation film lying on a gate electrode and adjacent to a partial region that is part of the first insulation film lying on the gate electrode as seen in plan view; a source electrode and a drain electrode sandwiching the partial region therebetween as seen in plan view; a second insulation film having an opening portion provided over the partial region; and a second semiconductor layer provided on the second insulation film. The second semiconductor layer is in contact with the source electrode and the drain electrode, and is in contact with the partial region and the first semiconductor layer through the opening portion of the second insulation film.
    Type: Grant
    Filed: September 26, 2017
    Date of Patent: August 11, 2020
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Kazunori Inoue, Rii Hirano
  • Patent number: 10741679
    Abstract: Provided is a semiconductor device having favorable reliability.
    Type: Grant
    Filed: April 9, 2018
    Date of Patent: August 11, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Kazutaka Kuriki, Yuji Egi, Hiromi Sawai, Yusuke Nonaka, Noritaka Ishihara, Daisuke Matsubayashi
  • Patent number: 10741696
    Abstract: A semiconductor device includes a thin film transistor including a semiconductor layer, a gate electrode, a gate insulating layer, a source electrode, a drain electrode, the semiconductor layer includes a layered structure including a first oxide semiconductor layer including In and Zn, in which an atomic ratio of In with respect to all metallic elements included in the first oxide semiconductor layer is higher than an atomic ratio of Zn, a second oxide semiconductor layer including In and Zn, in which an atomic ratio of Zn with respect to all metallic elements included in the second oxide semiconductor layer is higher than an atomic ratio of In, and an intermediate oxide semiconductor layer arranged between the first oxide semiconductor layer and the second oxide semiconductor layer, and the first and second oxide semiconductor layers are crystalline oxide semiconductor layers, and the intermediate oxide semiconductor layer is an amorphous oxide semiconductor layer, and the first oxide semiconductor layer is
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: August 11, 2020
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Masahiko Suzuki, Hajime Imai, Hideki Kitagawa, Tetsuo Kikuchi, Setsuji Nishimiya, Teruyuki Ueda, Kengo Hara, Tohru Daitoh, Toshikatsu Itoh
  • Patent number: 10734487
    Abstract: A semiconductor device with a high on-state current is provided. The semiconductor device includes a first insulator over a substrate, an oxide over the first insulator, a second insulator over the oxide, a conductor overlapping with the oxide with the second insulator therebetween, a third insulator in contact with a top surface of the oxide, a fourth insulator in contact with a top surface of the third insulator, a side surface of the second insulator, and a side surface of the conductor, and a fifth insulator in contact with a side surface of the fourth insulator, a side surface of the third insulator, and the top surface of the oxide. The third insulator has a lower oxygen permeability than the fourth insulator.
    Type: Grant
    Filed: January 15, 2019
    Date of Patent: August 4, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hiroki Komagata, Naoki Okuno, Yutaka Okazaki, Hiroshi Fujiki
  • Patent number: 10734413
    Abstract: A novel metal oxide is provided. The metal oxide has a plurality of energy gaps, and includes a first region having a high energy level of a conduction band minimum and a second region having an energy level of a conduction band minimum lower than that of the first region. The second region comprises more carriers than the first region. A difference between the energy level of the conduction band minimum of the first region and the energy level of the conduction band minimum of the second region is 0.2 eV or more. The energy gap of the first region is greater than or equal to 3.3 eV and less than or equal to 4.0 eV and the energy gap of the second region is greater than or equal to 2.2 eV and less than or equal to 2.9 eV.
    Type: Grant
    Filed: June 29, 2017
    Date of Patent: August 4, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Motoki Nakashima, Haruyuki Baba
  • Patent number: 10734461
    Abstract: An exemplary embodiment of the present invention provides a thin film transistor array panel and an organic light emitting diode display including the same including a substrate, a semiconductor disposed on the substrate, a first gate insulation layer disposed on the semiconductor, and a first diffusion barrier layer disposed on the first gate insulation layer. A second diffusion barrier layer is disposed on a lateral surface of the first diffusion barrier layer. A first gate electrode is disposed on the first diffusion barrier layer. A source electrode and a drain electrode are connected to the semiconductor. The first diffusion barrier layer comprises a metal, and the second diffusion barrier layer comprises a metal oxide including the metal.
    Type: Grant
    Filed: January 17, 2019
    Date of Patent: August 4, 2020
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Dong Hee Lee, Hyun Ju Kang, Sang Won Shin
  • Patent number: 10727273
    Abstract: A MRAM-TFT unit cell and a method for fabricating the same. The MRAM-TFT unit cell includes a MRAM device and a TFT device electrically coupled to the MRAM device. The MRAM device and the TFT device are situated within a common plane of the MRAM-TFT cell. The method includes forming a TFT device comprising a source/drain region, and a semiconducting layer on a substrate. A magnetic tunnel junction stack (MTJ) is formed in contact with the source region. A first contact is formed on the MTJ, and a second contact is formed on the drain region. A first interconnect metal layer is formed in contact with the first contact, and a second first interconnect metal layer is formed in contact with the second contact. A third contact is formed on a gate region of the TFT device. A third interconnect metal layer is formed in contact with the third contact.
    Type: Grant
    Filed: October 15, 2018
    Date of Patent: July 28, 2020
    Assignee: International Business Machines Corporation
    Inventors: Praveen Joseph, Xuefeng Liu, Gauri Karve, Eric Raymond Evarts
  • Patent number: 10727322
    Abstract: The invention provides a BCE TFT substrate and manufacturing method thereof. The method uses low deposition power and low oxygen content to deposit first silicon oxide thin film; then increases deposition power with low oxygen content to deposit second silicon oxide thin film. The first and second silicon oxide thin films form a passivation layer; the second silicon oxide film is implanted with oxygen to form a superficial layer so that the Si:O atomic ratio in the superficial layer is close to or same as Si:O atomic ratio of SiO2, to ensure the passivation layer in contact with the air side is strongly hydrophobic to prevent outside water vapor into the back-channel, while ensuring the side of passivation layer contacting IGZO active layer has a lower oxygen content to reduce the probability of forming unbalanced O-ions at the interface between passivation layer and IGZO active layer.
    Type: Grant
    Filed: May 14, 2019
    Date of Patent: July 28, 2020
    Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
    Inventor: Chunsheng Jiang
  • Patent number: 10727138
    Abstract: A monocrystalline semiconductor layer is formed on a conductive layer on an insulating layer on a substrate. The conductive layer is a part of an interconnect layer. The monocrystalline semiconductor layer extends laterally on the insulating layer. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: June 28, 2016
    Date of Patent: July 28, 2020
    Assignee: Intel Corporation
    Inventors: Van H. Le, Marko Radosavljevic, Benjamin Chu-Kung, Rafael Rios, Gilbert Dewey
  • Patent number: 10727244
    Abstract: A semiconductor memory device includes a first semiconductor chip and a second semiconductor chip. Each semiconductor chip of the first and second semiconductor chips may include a cell array region and a peripheral circuit region. The cell array region may include an electrode structure including electrodes sequentially stacked on a body conductive layer and vertical structures extending through the electrode structure and connected to the body conductive layer. The peripheral circuit region may include a residual substrate on the body conductive layer and on which a peripheral transistor is located. A bottom surface of the body conductive layer of the second semiconductor chip may face a bottom surface of the body conductive layer of the first semiconductor chip.
    Type: Grant
    Filed: May 17, 2018
    Date of Patent: July 28, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sung-Min Hwang, Joon-Sung Lim, Eunsuk Cho
  • Patent number: 10727309
    Abstract: A thin film transistor array panel includes a first conductive layer (102) including a gate electrode; a channel layer (104) disposed over the gate; and a second conductive layer (105) disposed over the channel layer (104). The second conductive layer (105) includes a multi-layered portion defining a source electrode (105a) and a drain electrode (105b), which includes a first sub-layer (105-1), a second sub-layer (105-2), and a third sub-layer (105-3) sequentially disposed one over another. Both the third and the first sub-layers (105-3, 105-1) include indium and zinc oxide materials. An indium to zinc content ratio in the first sub-layer (105-1) is greater than that in the third sub-layer (105-3).
    Type: Grant
    Filed: December 7, 2016
    Date of Patent: July 28, 2020
    Assignees: HONG FU JIN PRECISION INDUSTRY (ShenZhen) CO., LTD., HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Yi-Chun Kao, Hsin-Hua Lin, Po-Li Shih, Wei-Chih Chang, I-Min Lu, I-Wei Wu
  • Patent number: 10720334
    Abstract: In some embodiments, a selective cyclic (optionally dry) etching of a first surface of a substrate relative to a second surface of the substrate in a reaction chamber by chemical atomic layer etching comprises forming a modification layer using a first plasma and etching the modification layer. The first surface comprises carbon and/or nitride and the second surface does not comprise carbon and/or nitride.
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: July 21, 2020
    Assignee: ASM IP HOLDING B.V.
    Inventors: Rene Henricus Jozef Vervuurt, Nobuyoshi Kobayashi, Takayoshi Tsutsumi, Masaru Hori
  • Patent number: 10720532
    Abstract: A semiconductor device having a structure which can prevent a decrease in electrical characteristics due to miniaturization is provided. The semiconductor device includes, over an insulating surface, a stack in which a first oxide semiconductor layer and a second oxide semiconductor layer are sequentially formed, and a third oxide semiconductor layer covering part of a surface of the stack. The third oxide semiconductor layer includes a first layer in contact with the stack and a second layer over the first layer. The first layer includes a microcrystalline layer, and the second layer includes a crystalline layer in which c-axes are aligned in a direction perpendicular to a surface of the first layer.
    Type: Grant
    Filed: September 3, 2019
    Date of Patent: July 21, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Masayuki Sakakura, Hideomi Suzawa
  • Patent number: 10714053
    Abstract: The present disclosure provides a driving circuit, a method for controlling light emission, and a display device. The driving circuit includes one or more light emission shift registers, each of which includes a first processing module configured to control a signal at a first node based on signals at the input signal terminal, the first clock signal terminal and the second clock signal terminal; a second processing module including first and second transistors, wherein the first transistor is a dual-gate transistor, and the second transistor has a first terminal electrically connected to the pulse signal terminal and a second terminal electrically connected to the second node; and an output module configured to control a signal at an output signal terminal based on the signals at the first level signal terminal, the second level signal terminal, the first node and the second node.
    Type: Grant
    Filed: November 15, 2018
    Date of Patent: July 14, 2020
    Assignee: SHANGHAI TIANMA AM-OLED CO., LTD.
    Inventors: Renyuan Zhu, Yue Li, Dongxu Xiang, Yana Gao, Xingyao Zhou, Gaojun Huang, Yilin Xu, Zhonglan Cai, Juan Zhu
  • Patent number: 10714503
    Abstract: An object is to provide a display device which operates stably with use of a transistor having stable electric characteristics. In manufacture of a display device using transistors in which an oxide semiconductor layer is used for a channel formation region, a gate electrode is further provided over at least a transistor which is applied to a driver circuit. In manufacture of a transistor in which an oxide semiconductor layer is used for a channel formation region, the oxide semiconductor layer is subjected to heat treatment so as to be dehydrated or dehydrogenated; thus, impurities such as moisture existing in an interface between the oxide semiconductor layer and the gate insulating layer provided below and in contact with the oxide semiconductor layer and an interface between the oxide semiconductor layer and a protective insulating layer provided on and in contact with the oxide semiconductor layer can be reduced.
    Type: Grant
    Filed: February 7, 2019
    Date of Patent: July 14, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junichiro Sakata, Toshinari Sasaki, Miyuki Hosoba
  • Patent number: 10714512
    Abstract: The disclosure discloses a thin film transistor, a method for fabricating the same, and a display device so as to avoid a source and a drain from being oxidized while the thin film transistor is being fabricated, to thereby improve the performance of the thin film transistor. The method for fabricating a thin film transistor includes: forming an active layer pattern on a base substrate, and a source-drain metal layer located above the active layer pattern and with a same pattern as the active layer pattern, using one patterning process; forming a first insulation layer above the source-drain metal layer; and patterning the source-drain metal layer and the first insulation layer using one patterning process so that portion of the active layer pattern corresponding to a channel area is exposed to form a source pattern and a drain pattern.
    Type: Grant
    Filed: October 13, 2017
    Date of Patent: July 14, 2020
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Shuang Sun, Fangzhen Zhang
  • Patent number: 10714631
    Abstract: The present invention provides two methods for crystallizing a metal oxide semiconductor layer and a semiconductor structure. The first crystallization method is treating an amorphous metal oxide semiconductor layer including indium with oxygen at a pressure of about 550 mtorr to about 5000 mtorr and at a temperature of about 200° C. to about 750° C. The second crystallization method is, firstly, sequentially forming a first amorphous metal oxide semiconductor layer, an aluminum layer, and a second amorphous metal oxide semiconductor layer on a substrate, and, secondly, treating the first amorphous metal oxide semiconductor layer, the aluminum layer, and the second amorphous metal oxide semiconductor layer with an inert gas at a temperature of about 350° C. to about 650° C.
    Type: Grant
    Filed: September 19, 2019
    Date of Patent: July 14, 2020
    Assignee: AU OPTRONICS CORPORATION
    Inventor: Jia-Hong Ye
  • Patent number: 10714903
    Abstract: In some implementations, a VCSEL array may include a plurality of VCSELs that each operates concurrently and emits light at a same wavelength. A first distance between a first pair of adjacent VCSELs, of the plurality of VCSELs, may be different from a second distance between a second pair of adjacent VCSELs of the plurality of VCSELs. The first pair of adjacent VCSELs may be located closer to a center of the VCSEL array than the second pair of adjacent VCSELs. At least one of temperature non-uniformity or optical power non-uniformity among the plurality of VCSELs may be reduced as compared to another VCSEL array, with a same physical footprint as the VCSEL array, comprising uniformly spaced VCSELs.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: July 14, 2020
    Assignee: Lumentum Operations LLC
    Inventors: Albert Yuen, Ajit Vijay Barve
  • Patent number: 10707194
    Abstract: A display device includes a substrate having flexibility, a first surface and a second surface opposing the first surface, a display part arranged with a plurality of pixels above the first surface of the substrate, a frame part having a drive element for driving the plurality of pixels arranged around the display part, a mounting part mounted above the first surface of the substrate and including an individual circuit element and a connection element, a first adhesive layer above the second surface of the substrate and opposing the display part and the frame part, a first support film above the first adhesive layer, a second adhesive layer above the second surface of the substrate and opposing the mounting part, and a second support film above the second adhesive layer, wherein the first adhesive layer and the first support film separated from the second adhesive layer and the second support film.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: July 7, 2020
    Assignee: Japan Display Inc.
    Inventor: Kazuhiro Odaka
  • Patent number: 10707238
    Abstract: To improve field-effect mobility and reliability in a transistor including an oxide semiconductor film. A semiconductor device includes a transistor including an oxide semiconductor film. The transistor includes a region where the maximum value of field-effect mobility of the transistor at a gate voltage of higher than 0 V and lower than or equal to 10 V is larger than or equal to 40 and smaller than 150; a region where the threshold voltage is higher than or equal to minus 1 V and lower than or equal to 1 V; and a region where the S value is smaller than 0.3 V/decade.
    Type: Grant
    Filed: March 18, 2019
    Date of Patent: July 7, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Junichi Koezuka, Kenichi Okazaki, Yukinori Shima, Shinpei Matsuda, Haruyuki Baba, Ryunosuke Honda
  • Patent number: 10707350
    Abstract: A source terminal section of a TFT substrate includes a source terminal lower connection section included in a gate metal layer, and a source terminal upper connection section included in a conductive layer. A source gate connection section includes a source lower connection wiring line included in the gate metal layer and connected to the source terminal lower connection section, a source bus connection section included in a source metal layer and connected to a source bus line, and a source upper connection section included in a conductive layer, and the source upper connection section is in contact with the source lower connection wiring line within a third opening formed in a gate insulating layer and in contact with the source bus connection section within a fifth opening formed in an interlayer insulating layer.
    Type: Grant
    Filed: October 31, 2017
    Date of Patent: July 7, 2020
    Assignee: SHARP KABUSHIKI KAISHA
    Inventor: Katsunori Misaki
  • Patent number: 10707235
    Abstract: Provided is a thin film transistor, including: a base that includes, on an upper surface, a first region and a second region; a gate electrode that is provided on the first region of the base; a gate insulating film that is provided on a surface of the gate electrode and the second region of the base; and a semiconductor layer that is provided on a surface of the gate insulating film, wherein the semiconductor layer includes a third region and a fourth region, in the third region, the semiconductor layer and the gate electrode face with a minimum interval, in the fourth region, a distance from the semiconductor layer to the gate electrode is larger than the minimum interval, and at a boundary position between the third region and the fourth region, the semiconductor layer forms a linear shape or a substantially linear shape.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: July 7, 2020
    Assignee: Sony Corporation
    Inventor: Akiko Honjo
  • Patent number: 10700215
    Abstract: A display device including a pixel having a memory. The pixel includes at least a display element, a capacitor, an inverter, and a switch. The switch is controlled with a signal held in the capacitor and a signal output from the inverter so that voltage is supplied to the display element. The inverter and the switch can be constituted by transistors with the same polarity. A semiconductor layer included in the pixel may be formed using a light-transmitting material. Moreover, a gate electrode, a drain electrode, and a capacitor electrode may be formed using a light-transmitting conductive layer. The pixel is formed using a light-transmitting material in such a manner, whereby the display device can be a transmissive display device while including a pixel having a memory.
    Type: Grant
    Filed: November 15, 2018
    Date of Patent: June 30, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hajime Kimura, Kengo Akimoto, Masashi Tsubuku, Toshinari Sasaki
  • Patent number: 10700214
    Abstract: Processes and overturned thin film device structures generally include a gate having a concave shape defined by three faces. The processes generally include forming the overturned thin film device structures such that the channel self-aligns to the gate and the source/drain contacts include a self-aligned step height.
    Type: Grant
    Filed: April 5, 2018
    Date of Patent: June 30, 2020
    Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, STMICROELECTRONICS, INC.
    Inventors: Lawrence A. Clevenger, Carl J. Radens, Yiheng Xu, John H. Zhang
  • Patent number: 10700213
    Abstract: It is an object to provide a highly reliable semiconductor device including a thin film transistor with stable electric characteristics. In a semiconductor device including an inverted staggered thin film transistor whose semiconductor layer is an oxide semiconductor layer, a buffer layer is provided over the oxide semiconductor layer. The buffer layer is in contact with a channel formation region of the semiconductor layer and source and drain electrode layers. A film of the buffer layer has resistance distribution. A region provided over the channel formation region of the semiconductor layer has lower electrical conductivity than the channel formation region of the semiconductor layer, and a region in contact with the source and drain electrode layers has higher electrical conductivity than the channel formation region of the semiconductor layer.
    Type: Grant
    Filed: March 14, 2019
    Date of Patent: June 30, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junichiro Sakata, Takuya Hirohashi, Hideyuki Kishida
  • Patent number: 10699632
    Abstract: A field-effect transistor including: a gate electrode, which is configured to apply gate voltage; a source electrode and a drain electrode, which are configured to take electric current out; a semiconductor layer, which is disposed to be adjacent to the source electrode and the drain electrode; and a gate insulating layer, which is disposed between the gate electrode and the semiconductor layer, wherein the gate insulating layer includes a first gate insulating layer containing a first oxide containing Si and an alkaline earth metal and a second gate insulating layer disposed to be in contact with the first gate insulating layer and containing a paraelectric amorphous oxide containing a Group A element which is an alkaline earth metal and a Group B element which is at least one selected from the group consisting of Ga, Sc, Y, and lanthanoid.
    Type: Grant
    Filed: January 25, 2019
    Date of Patent: June 30, 2020
    Assignee: RICOH COMPANY, LTD.
    Inventors: Ryoichi Saotome, Naoyuki Ueda, Yuki Nakamura, Yukiko Abe, Shinji Matsumoto, Yuji Sone, Sadanori Arae, Minehide Kusayanagi
  • Patent number: 10690968
    Abstract: A display device including a pixel section provided between a pair of substrates and including plural pixels; one or plural active components disposed in a frame region around the pixel section on one substrate of the pair of substrates; an insulating film provided in the frame region on the one substrate to cover the one or plural active components; and a sealing layer provided to seal the pixel section and cover an end edge portion of the insulating film in the frame region.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: June 23, 2020
    Assignee: JAPAN DISPLAY INC.
    Inventors: Jun Yamaguchi, Morikazu Nomura, Takashi Fujimura
  • Patent number: 10692953
    Abstract: A display apparatus includes: a substrate having a bending area between a first area and a second area; an inorganic insulating layer arranged on the substrate, the inorganic insulating layer having an opening or a groove corresponding to the bending area; a wiring unit extending to the second area through the bending area, the wiring unit arranged on the inorganic insulating layer and at least a portion thereof overlapping the opening or the groove; and an organic material layer between the inorganic insulating layer and the wiring unit, the organic material layer configured to fill the opening or the groove, wherein the wiring unit comprises a first wire and a second wire that are adjacent to each other, and a width in which the opening or the groove overlaps the first wire is different from the width in which the opening or the groove overlaps the second wire.
    Type: Grant
    Filed: May 8, 2017
    Date of Patent: June 23, 2020
    Assignee: Samsung Display Co., Ltd.
    Inventors: Mijin Yoon, Cheolsu Kim
  • Patent number: 10685989
    Abstract: A method for manufacturing a display panel, a display panel, and a display device are provided. The method includes: forming a plurality of gate lines and a common electrode line pattern on a base substrate; forming an insulating layer on the base substrate on which the plurality of gate lines and the common electrode line pattern are formed; forming a via hole on the insulating layer; and forming a metal conductive pattern on the base substrate on which the insulating layer is formed. The common electrode line and the common electrode connection block located on two sides of a gate line are electrically connected through a bridging structure in a conductive layer made of metal, which reduces the resistance of the bridging structure, so that the voltage uniformity throughout the common electrode line pattern which is bridged through the bridging pattern is high.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: June 16, 2020
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Xingfeng Ren, Guoquan Liu, Zhengwei Chen
  • Patent number: 10679957
    Abstract: A semiconductor device includes a semiconductor substrate having a chip region and an edge region, a plurality of connection structures provided in a lower insulating layer of the edge region and arranged at first intervals in a first direction, an upper insulating layer covering the connection structures, and a plurality of redistribution pads disposed on the upper insulating layer and connected to the connection structures, respectively. Each of the redistribution pads includes a pad portion provided on the chip region. The pad portions of the redistribution pads are spaced apart from the connection structures by a first distance in a second direction intersecting the first direction when viewed in a plan view.
    Type: Grant
    Filed: September 24, 2018
    Date of Patent: June 9, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seok-Ho Shin, Bonhwi Gu, Hyekyeong Kweon, Sungjin Kim, Joodong Kim, Jaepil Lee, Dongwon Lim
  • Patent number: 10680053
    Abstract: A fabrication method for fabricating a thin-film transistor includes: forming a light shielding layer on a substrate; forming a buffer layer covering the light shielding layer, and forming a semiconductor material layer stacked on a surface of the buffer layer away from the substrate; forming a through hole penetrating through the buffer layer and the semiconductor material layer; patterning the semiconductor material layer to form an active layer covering a partial region of the buffer layer; forming a gate insulator layer on a surface of the active layer away from the substrate and a gate stacked on a surface of the gate insulator layer away from the substrate; forming a source and a drain on the surface of the buffer layer away from the substrate; and forming a dielectric layer covering the gate, the source, the drain, and the buffer layer, and being recessed into the through hole to form a groove.
    Type: Grant
    Filed: June 14, 2019
    Date of Patent: June 9, 2020
    Assignees: Hefei Xinsheng Optoelectronics Technology Co., Ltd., BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Yingbin Hu, Liangchen Yan, Ce Zhao, Yuankui Ding, Yang Zhang, Yongchao Huang, Luke Ding, Jun Liu
  • Patent number: 10680117
    Abstract: A thin film transistor is disclosed, which includes an oxide semiconductor layer on a substrate; a gate insulating film on the oxide semiconductor layer; a gate electrode on the gate insulating film; a hydrogen supply layer on the gate insulating film; a source electrode connected with the oxide semiconductor layer; and a drain electrode spaced apart from the source electrode and connected with the oxide semiconductor layer, wherein the oxide semiconductor layer includes a channel portion overlapped with the gate electrode and a connecting portion not overlapped with the gate electrode, a hydrogen concentration of the connecting portion is higher than that of the channel portion, and the gate insulating film includes a first area overlapped with the gate electrode and a second area not overlapped with the gate electrode, and a hydrogen concentration of the second area is higher that of the first area.
    Type: Grant
    Filed: November 26, 2018
    Date of Patent: June 9, 2020
    Assignee: LG DISPLAY CO., LTD.
    Inventor: Kwanghwan Ji
  • Patent number: 10672913
    Abstract: A semiconductor device having a reduced amount of oxygen vacancy in a channel formation region of an oxide semiconductor is provided. Further, a semiconductor device which includes an oxide semiconductor and has improved electric characteristics is provided. Furthermore, a methods for manufacturing the semiconductor device is provided. An oxide semiconductor film is formed; a conductive film is formed over the oxide semiconductor film at the same time as forming a low-resistance region between the oxide semiconductor film and the conductive film; the conductive film is processed to form a source electrode and a drain electrode; and oxygen is added to the low-resistance region between the source electrode and the drain electrode, so that a channel formation region having a higher resistance than the low-resistance region is formed and a first low-resistance region and a second low-resistance region between which the channel formation region is positioned are formed.
    Type: Grant
    Filed: July 2, 2018
    Date of Patent: June 2, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Hideomi Suzawa, Tetsuhiro Tanaka, Hirokazu Watanabe, Yuhei Sato, Yasumasa Yamane, Daisuke Matsubayashi
  • Patent number: 10672623
    Abstract: A method of manufacturing a transistor, includes: (i) forming a metal-oxide semiconductor layer over a substrate; (ii) forming a source electrode and a drain electrode on different sides of the metal-oxide semiconductor layer; (iii) forming a dielectric layer over the source electrode, the drain electrode, and the metal-oxide semiconductor layer; (iv) forming a hydrogen-containing insulating layer over the dielectric layer, in which the hydrogen-containing insulating layer has an aperture exposing a surface of the dielectric layer, and the aperture is overlapped with the metal-oxide semiconductor layer when viewed in a direction perpendicular to the surface; (v) increasing a hydrogen concentration of a portion of the metal-oxide semiconductor layer by treating the hydrogen-containing insulating layer so to form a source region and a drain region; and (vi) forming a gate electrode in the aperture.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: June 2, 2020
    Assignee: E Ink Holdings Inc.
    Inventors: Wei-Tsung Chen, Po-Hsin Lin, Xue-Hung Tsai
  • Patent number: 10670933
    Abstract: Provided are an active-matrix substrate having a reliable line connection structure, a method for producing the same, and a display device including the same. A first metal line 122 and a second metal line 125 are electrically connected via an IGZO layer 124 rendered conductive. In this case, the second metal line 125 is isolated from an ITO layer 109 without contacting the ITO layer 109 because there are a passivation layer 107 and an organic insulating film 108 formed between the second metal line 125 and the ITO layer 109. Thus, no contact fault due to electric corrosion occurs between an aluminum layer 125a of the second metal line 125 and the ITO layer 109, whereby a reliable line connection structure is achieved.
    Type: Grant
    Filed: May 2, 2017
    Date of Patent: June 2, 2020
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Tohru Okabe, Hirohiko Nishiki, Takeshi Yaneda
  • Patent number: 10672797
    Abstract: The array substrate includes: a substrate; a gate electrode; a gate insulating layer; an active layer; a source-drain electrode; a passivation layer; a pixel electrode; the active layer includes a first silicon layer, and the first silicon layer disposed below the channel is composed of polycrystalline silicon, and the remaining part of the first silicon layer is composed of amorphous silicon.
    Type: Grant
    Filed: November 1, 2018
    Date of Patent: June 2, 2020
    Assignees: CHONGQING HKC OPTOELECTRONICS TECHNOLOGY CO., LTD., HKC CORPORATION LIMITED
    Inventor: Chuan Wu