With Doping Profile To Adjust Barrier Height Patents (Class 257/450)
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Patent number: 8749675Abstract: A solid state image pickup device which can prevent color mixture by using a layout of a capacitor region provided separately from a floating diffusion region and a camera using such a device are provided. A photodiode region is a rectangular region including a photodiode. A capacitor region includes a carrier holding unit and is arranged on one side of the rectangle of the photodiode region as a region having a side longer than the one side. In a MOS unit region, an output unit region including an output unit having a side longer than the other side which crosses the one side of the rectangle of the photodiode region is arranged on the other side. A gate region and the FD region are arranged between the photodiode region and the capacitor region.Type: GrantFiled: January 29, 2013Date of Patent: June 10, 2014Assignee: Canon Kabushiki KaishaInventors: Toru Koizumi, Akira Okita, Masanori Ogura, Shin Kikuchi, Tetsuya Itano
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Patent number: 8416329Abstract: Unit cells each having a plurality of photodiodes 101a and 101b, a plurality of transfer MOSFETs 102a and 102b provided in correspondence to the plurality of photodiodes, respectively and a common amplifying MOSFET 104 for amplifying and outputting signals read out from the plurality of diodes are arranged two-dimensionally, and, plural photodiodes are disposed around the photodiode 101b and trapping regions 130, 134, 135 and 132 are for trapping excessive carriers from the photodiode 101b are provided between the photodiode 101b and the plural photodiodes, respectively.Type: GrantFiled: September 13, 2010Date of Patent: April 9, 2013Assignee: Canon Kabushiki KaishaInventors: Hiroki Hiyama, Masanori Ogura, Seiichiro Sakai
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Patent number: 8390708Abstract: A solid state image pickup device which can prevent color mixture by using a layout of a capacitor region provided separately from a floating diffusion region and a camera using such a device are provided. A photodiode region is a rectangular region including a photodiode. A capacitor region includes a carrier holding unit and is arranged on one side of the rectangle of the photodiode region as a region having a side longer than the one side. In a MOS unit region, an output unit region including an output unit having a side longer than the other side which crosses the one side of the rectangle of the photodiode region is arranged on the other side. A gate region and the FD region are arranged between the photodiode region and the capacitor region.Type: GrantFiled: June 6, 2011Date of Patent: March 5, 2013Assignee: Canon Kabushiki KaishaInventors: Toru Koizumi, Akira Okita, Masanori Ogura, Shin Kikuchi, Tetsuya Itano
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Patent number: 8344398Abstract: A method of making a diode begins by depositing an AlxGa1-xN nucleation layer on a SiC substrate, then depositing an n+ GaN buffer layer, an n? GaN layer, an AlxGa1-xN barrier layer, and an SiO2 dielectric layer. A portion of the dielectric layer is removed and a Schottky metal deposited in the void. The dielectric layer is affixed to the support layer with a metal bonding layer using an Au—Sn utectic wafer bonding process, the substrate is removed using reactive ion etching to expose the n+ layer, selected portions of the n+, n?, and barrier layers are removed to form a mesa diode structure on the dielectric layer over the Schottky metal, and an ohmic contact is deposited on the n+ layer.Type: GrantFiled: October 15, 2010Date of Patent: January 1, 2013Assignee: Cree, Inc.Inventors: Primit Parikh, Sten Heikman
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Patent number: 7978241Abstract: A solid state image pickup device which can prevent color mixture by using a layout of a capacitor region provided separately from a floating diffusion region and a camera using such a device are provided. A photodiode region is a rectangular region including a photodiode. A capacitor region includes a carrier holding unit and is arranged on one side of the rectangle of the photodiode region as a region having a side longer than the one side. In a MOS unit region, an output unit region including an output unit having a side longer than the other side which crosses the one side of the rectangle of the photodiode region is arranged on the other side. A gate region and the FD region are arranged between the photodiode region and the capacitor region.Type: GrantFiled: October 28, 2008Date of Patent: July 12, 2011Assignee: Canon Kabushiki KaishaInventors: Toru Koizumi, Akira Okita, Masanori Ogura, Shin Kikuchi, Tetsuya Itano
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Patent number: 7928442Abstract: Provided is an optical device having a strained buried channel area. The optical device includes: a semiconductor substrate of a first conductive type; a gate insulating layer formed on the semiconductor substrate; a gate of a second conductive type opposite to the first conductive type, formed on the gate insulating layer; a high density dopant diffusion area formed in the semiconductor substrate under the gate and doped with a first conductive type dopant having a higher density than the semiconductor substrate; a strained buried channel area formed of a semiconductor material having a different lattice parameter from a material of which the semiconductor substrate is formed and extending between the gate insulating layer and the semiconductor substrate to contact the high density dopant diffusion area; and a semiconductor cap layer formed between the gate insulating layer and the strained buried channel area.Type: GrantFiled: August 17, 2007Date of Patent: April 19, 2011Assignee: Electronics and Telecommunications Research InstituteInventors: Bongki Mheen, Jeong-Woo Park, Hyun-Soo Kim, Gyungock Kim
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Publication number: 20100301445Abstract: A Schottky photodiode may include a monocrystalline semiconductor substrate having a front surface, a rear surface, and a first dopant concentration and configured to define a cathode of the Schottky photodiode, a doped epitaxial layer over the front surface of the monocrystalline semiconductor substrate having a second dopant concentration less than the first dopant concentration, and parallel spaced apart trenches in the doped epitaxial layer and having of a depth less than a depth of the doped epitaxial layer.Type: ApplicationFiled: May 28, 2010Publication date: December 2, 2010Applicant: STMicroelectronics S.r.l.Inventor: Massimo Cataldo Mazzillo
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Patent number: 7834367Abstract: A method of making a diode begins by depositing an AlxGa1?xN nucleation layer on a SiC substrate, then depositing an n+ GaN buffer layer, an n? GaN layer, an AlxGa1?xN barrier layer, and an SiO2 dielectric layer. A portion of the dielectric layer is removed and a Schottky metal deposited in the void. The dielectric layer is affixed to the support layer with a metal bonding layer using an Au-Sn utectic wafer bonding process, the substrate is removed using reactive ion etching to expose the n+ layer, selected portions of the n+, n?, and barrier layers are removed to form a mesa diode structure on the dielectric layer over the Schottky metal,; and an ohmic contact is deposited on the n+ layer.Type: GrantFiled: January 19, 2007Date of Patent: November 16, 2010Assignee: Cree, Inc.Inventors: Primit Parikh, Sten Heikman
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Patent number: 7812873Abstract: Unit cells each having a plurality of photodiodes 101a and 101b, a plurality of transfer MOSFETs 102a and 102b provided in correspondence to the plurality of photodiodes, respectively and a common amplifying MOSFET 104 for amplifying and outputting signals read out from the plurality of diodes are arranged two-dimensionally, and, plural photodiodes are disposed around the photodiode 101b and trapping regions 130, 134, 135 and 132 are for trapping excessive carriers from the photodiode 101b are provided between the photodiode 101b and the plural photodiodes, respectively.Type: GrantFiled: August 29, 2005Date of Patent: October 12, 2010Assignee: Canon Kabushiki KaishaInventors: Hiroki Hiyama, Masanori Ogura, Seiichiro Sakai
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Patent number: 7679662Abstract: Disclosed herein is a solid-state imaging element which includes a plurality of drive signal inputs, a plurality of bus lines, and a plurality of vertical transfer register electrodes. In the solid-state imaging element, a charge accumulated in light-receiving elements in a pixel region is vertically transferred by the drive signals input to the electrodes. Each of the electrodes has a contact part connected to the second contact and having a width smaller than a width of the electrodes in the pixel region, and a blank region is formed between predetermined adjacent two of the contact parts so that a width of the blank region is larger than a distance between respective two of the contact parts other than the predetermined adjacent two of the contact parts. The first contact is disposed on the blank region.Type: GrantFiled: November 9, 2006Date of Patent: March 16, 2010Assignee: Sony CorporationInventors: Sadamu Suizu, Masaaki Takayama
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Patent number: 7586172Abstract: The photodiode comprises an upper pn junction (D1) formed between an upper layer and an intermediate layer supported by one portion of a semiconductor substrate. A lower junction is formed between the intermediate layer and the substrate portion. The forward bias voltage of the upper junction (D1) is lower than the forward bias voltage of the lower junction (D2). The charges are permitted to be stored in the photodiode until the said upper junction is forward-biased so as to favor (A1) the recombination of the carriers coming from the intermediate layer with the carriers of the upper layer.Type: GrantFiled: December 12, 2002Date of Patent: September 8, 2009Assignee: STMicroelectronics SAInventor: Francois Roy
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Patent number: 7531885Abstract: A primary object of the present invention is to provide a photoelectric conversion apparatus with less leak current in a floating diffusion region. In order to obtain the above object, a photoelectric conversion apparatus according to the present invention includes a photodiode for converting light into a signal charge, a first semiconductor region having a first conductivity type, a floating diffusion region formed from a second semiconductor region having a second conductivity type for converting the signal charge generated by the photodiode into a signal voltage, the second semiconductor region being formed in the first semiconductor region, and an electrode formed above the first semiconductor region through an insulating film and having an effect of increasing a concentration of majority carriers in the first semiconductor region, in which the electrode is not formed above a depletion region formed from the second semiconductor region.Type: GrantFiled: December 7, 2006Date of Patent: May 12, 2009Assignee: Canon Kabushiki KaishaInventors: Akira Okita, Katsuhito Sakurai, Hiroki Hiyama, Hideaki Takada
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Patent number: 7460162Abstract: A solid state image pickup device which can prevent color mixture by using a layout of a capacitor region provided separately from a floating diffusion region and a camera using such a device are provided. A photodiode region is a rectangular region including a photodiode. A capacitor region includes a carrier holding unit and is arranged on one side of the rectangle of the photodiode region as a region having a side longer than the one side. In a MOS unit region, an output unit region including an output unit having a side longer than the other side which crosses the one side of the rectangle of the photodiode region is arranged on the other side. A gate region and the FD region are arranged between the photodiode region and the capacitor region.Type: GrantFiled: March 13, 2006Date of Patent: December 2, 2008Assignee: Canon Kabushiki KaishaInventors: Toru Koizumi, Akira Okita, Masanori Ogura, Shin Kikuchi, Tetsuya Itano
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Patent number: 7420215Abstract: A transparent conductive film substantially made from In2O3, SnO2 and ZnO, having a molar ratio In/(In+Sn+Zn) of 0.65 to 0.8 and also a molar ratio Sn/Zn of 1 or less: The transparent conductive film has a favorable electric contact property with an electrode or line made from Al or Al alloy film. Further, a semiconductor device having an electrode or line made from the transparent conductive film has high reliability and productivity.Type: GrantFiled: June 22, 2007Date of Patent: September 2, 2008Assignee: Mitsubishi Electric CorporationInventors: Kazunori Inoue, Nobuaki Ishiga, Kensuke Nagayama, Toru Takeguchi, Kazumasa Kawase
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Patent number: 7332782Abstract: A dye-sensitized solar cell with high conversion efficiency is provided. The dye-sensitized solar cell according to the present invention has, between an electrode (2) formed on a surface of a transparent substrate (1) and a counter electrode (6), a light-absorbing layer (3) containing light-absorbing particles carrying dye and an electrolyte layer (5), characterized in that the light-absorbing layer (3) containing light-scattering particles (4) different in size from the light-absorbing particles. In such a dye-sensitized solar cell according to the present invention, the energy of light, which passes through a light-absorbing layer in a conventional cell structure, can be strongly absorbed by the dye in the light-absorbing layer of the present invention. This will increase the conversion efficiency and output current of the dye-sensitized solar cell.Type: GrantFiled: May 20, 2005Date of Patent: February 19, 2008Assignee: Sony CorporationInventor: Takashi Tomita
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Patent number: 7332785Abstract: A dye-sensitized solar cell with high conversion efficiency is provided. The dye-sensitized solar cell according to the present invention has, between an electrode (2) formed on a surface of a transparent substrate (1) and a counter electrode (6), a light-absorbing layer (3) containing light-absorbing particles carrying dye and an electrolyte layer (5), characterized in that the light-absorbing layer (3) containing light-scattering particles (4) different in size from the light-absorbing particles. In such a dye-sensitized solar cell according to the present invention, the energy of light, which passes through a light-absorbing layer in a conventional cell structure, can be strongly absorbed by the dye in the light-absorbing layer of the present invention. This will increase the conversion efficiency and output current of the dye-sensitized solar cell.Type: GrantFiled: April 25, 2006Date of Patent: February 19, 2008Assignee: Sony CorporationInventor: Takashi Tomita
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Patent number: 7312507Abstract: A dye-sensitized solar cell with high conversion efficiency is provided. The dye-sensitized solar cell according to the present invention has, between an electrode (2) formed on a surface of a transparent substrate (1) and a counter electrode (6), a light-absorbing layer (3) containing light-absorbing particles carrying dye and an electrolyte layer (5), characterized in that the light-absorbing layer (3) containing light-scattering particles (4) different in size from the light-absorbing particles. In such a dye-sensitized solar cell according to the present invention, the energy of light, which passes through a light-absorbing layer in a conventional cell structure, can be strongly absorbed by the dye in the light-absorbing layer of the present invention. This will increase the conversion efficiency and output current of the dye-sensitized solar cell.Type: GrantFiled: April 9, 2003Date of Patent: December 25, 2007Assignee: Sony CorporationInventor: Takashi Tomita
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Patent number: 7217982Abstract: A photodetector (10) includes a substrate (12) having a surface; a first layer (14) of semiconductor material that is disposed above the surface, the first layer containing a first dopant at a first concentration for having a first type of electrical conductivity; and a second layer (16) of semiconductor material overlying the first layer. The second layer contains a second dopant at a second concentration for having a second type of electrical conductivity and forms a first p-n junction (15) with the first layer. The second layer is compositionally graded through at least a portion of a thickness thereof from wider bandgap semiconductor material to narrower bandgap in a direction away from the p-n junction. The compositional grading can be done in a substantially linear fashion, or in a substantially non-linear fashion, e.g., in a stepped manner.Type: GrantFiled: October 8, 2004Date of Patent: May 15, 2007Assignee: Raytheon CompanyInventors: Scott M. Taylor, Kenneth Kosai, James A. Finch
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Patent number: 7187052Abstract: A primary object of the present invention is to provide a photoelectric conversion apparatus with less leak current in a floating diffusion region. In order to obtain the above object, a photoelectric conversion apparatus according to the present invention includes a photodiode for converting light into a signal charge, a first semiconductor region having a first conductivity type, a floating diffusion region formed from a second semiconductor region having a second conductivity type for converting the signal charge generated by the photodiode into a signal voltage, the second semiconductor region being formed in the first semiconductor region, and an electrode formed above the first semiconductor region through an insulating film and having an effect of increasing a concentration of majority carriers in the first semiconductor region, in which the electrode is not formed above a depletion region formed from the second semiconductor region.Type: GrantFiled: October 25, 2004Date of Patent: March 6, 2007Assignee: Canon Kabushiki KaishaInventors: Akira Okita, Katsuhito Sakurai, Hiroki Hiyama, Hideaki Takada
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Patent number: 7053293Abstract: GaAs substrates with compositionally graded buffer layers for matching lattice constants with high-Indium semiconductor materials such as quantum well infrared photoconductor devices and thermo photo voltaic devices are disclosed.Type: GrantFiled: September 29, 2004Date of Patent: May 30, 2006Assignee: Bae Systems information and Electronic Systems Intergration Inc.Inventor: Parvez N Uppal
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Patent number: 7012314Abstract: A method of making a semiconductor device having a predetermined epitaxial region, such as an active region, with reduced defect density includes the steps of: (a) forming a dielectric cladding region on a major surface of a single crystal body of a first material; (b) forming a first opening that extends to a first depth into the cladding region; (c) forming a smaller second opening, within the first opening, that extends to a second depth greater than the first depth and that exposes an underlying portion of the major surface of the single crystal body; (d) epitaxially growing regions of a second semiconductor material in each of the openings and on the top of the cladding region; (e) controlling the dimensions of the second opening so that defects are confined to the epitaxial regions grown within the second opening and on top of the cladding region, a first predetermined region being located within the first opening and being essentially free of defects; (D planarizing the top of the device to remove allType: GrantFiled: June 3, 2003Date of Patent: March 14, 2006Assignee: Agere Systems Inc.Inventors: Jeffrey Devin Bude, Malcolm Carroll, Clifford Alan King
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Publication number: 20040251508Abstract: A dye-sensitized solar cell with high conversion efficiency is provided. The dye-sensitized solar cell according to the present invention has, between an electrode (2) formed on a surface of a transparent substrate (1) and a counter electrode (6), a light-absorbing layer (3) containing light-absorbing particles carrying dye and an electrolyte layer (5), characterized in that the light-absorbing layer (3) containing light-scattering particles (4) different in size from the light-absorbing particles. In such a dye-sensitized solar cell according to the present invention, the energy of light, which passes through a light-absorbing layer in a conventional cell structure, can be strongly absorbed by the dye in the light-absorbing layer of the present invention. This will increase the conversion efficiency and output current of the dye-sensitized solar cell.Type: ApplicationFiled: July 22, 2004Publication date: December 16, 2004Inventor: Takashi Tomita
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Publication number: 20040155311Abstract: The invention relates to an opto-electronic component for converting electromagnetic radiation into an intensity-dependent photocurrent, comprising a substrate (1) with a microelectronic circuit whose surface is provided with a first layer (7) which is electrically contacted thereto and made of amorphous silicon a-i:H or alloys thereof, and at least one other optically active layer (8) is disposed upstream from said first layer in the direction of incident light thereof (7). The invention also relates to the production thereof. The aim of the invention is to improve upon an opto-electronic component of tho above-mentioned variety in order to obtain high spectral sensitivity within the visible light range and, correspondingly, significantly reduce sensitivity to radiation in the infrared range without incurring any additional construction costs.Type: ApplicationFiled: April 12, 2004Publication date: August 12, 2004Inventors: Peter Rieve, Jens Prima, Konstantin Seibel, Marcus Walder
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Patent number: 6683326Abstract: The present invention relates to a high-sensitivity top-electrode and bottom-illuminated type photodiode. The device consists of a highly doped buffer layer, a photo-detecting layer on a semi-insulating substrate. An electrode is formed on the conductive domain that is formed in the photo-detecting layer, and another electrode is formed on the partly exposed peripheral area of the highly-doped buffer layer by removing a part of the photo-detecting layer. As the semi-insulating substrate absorbs less light in the substrate, a decrease of sensitivity by the substrate absorption can be prevented.Type: GrantFiled: November 8, 2001Date of Patent: January 27, 2004Assignee: Sumitomo Electric Industries, Ltd.Inventors: Yasuhiro Iguchi, Yoshiki Kuhara
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Patent number: 6545331Abstract: Disclosed is a solid state imaging device, comprising: a photodetection diode; and an insulated gate field effect transistor provided adjacent to the photodetection diode for optical signal detection. In this case, a carrier pocket is provided in a second well region, and an element isolation insulating film is formed to isolate adjacent unit pixels from each other. In addition, an element isolation region of an opposite conductivity type is formed to isolate a second semiconductor layer of one conductivity type in such a way as to include the lower surface of the element isolation insulating film and reach a first semiconductor layer.Type: GrantFiled: November 27, 2000Date of Patent: April 8, 2003Assignee: Innotech CorporationInventor: Takashi Miida
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Publication number: 20030047791Abstract: The present invention provides an improved optoelectronic device and a method of manufacture therefor. The optoelectronic device includes a doped buffer layer located over a substrate having an optical window formed therein and an absorber layer located over the doped buffer layer. The optoelectronic device further includes a doped region located over the absorber layer and having a dopant tail that extends substantially through the absorber layer, and the doped buffer layer and the dopant tail are doped to augment an optical power threshold for bandwidth collapse of the optoelectronic device.Type: ApplicationFiled: September 13, 2001Publication date: March 13, 2003Applicant: Agere Systems Optoelectronics Guardian Corp.Inventors: Edward J. Flynn, Leonard A. Gruezke, David V. Lang, Bora M. Onat, P. Douglas Yoder
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Patent number: 6225670Abstract: The present invention discloses a semiconductor based detector for radiation with a small but effective barrier between the radiation sensitive volume in the semiconductor and the regions and junctions with readout circuitry, and with no or a lower barrier between the semiconductor substrate and the regions and junctions adapted and meant for collecting the charge carriers generated by the radiation in the semiconductor substrate.Type: GrantFiled: February 9, 1998Date of Patent: May 1, 2001Assignee: IMECInventor: Bart Dierickx
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Patent number: 6146957Abstract: Since the PN junction of a photodiode is formed of a silicon substrate having a low impurity concentration and an epitaxial layer, the width of the depletion layer in the PN junction is formed wider, the parasitic capacitance by the junction capacitance is lowered, and the diffusion length of the silicon substrate is formed longer. Besides, a buried layer containing a high impurity concentration is formed by a high energy ion implantation method in such a depth that the buried layer cannot be depleted by a reverse voltage applied to the PN junction, which is served as a region to lead out the anode, which accordingly results in a low parasitic resistance at the anode. Thereby, the invention provides a semiconductor device including a photodetector and a method of manufacturing the same that achieves a high photoelectric conversion sensitivity and an excellent frequency characteristic at the same time.Type: GrantFiled: March 31, 1998Date of Patent: November 14, 2000Assignee: Sony CorporationInventor: Youichi Yamasaki
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Patent number: 6107652Abstract: A metal-semiconductor-metal photodetector including an absorbent layer, a barrier layer of greater forbidden band energy on which there are deposited Schottky electrodes and a transition layer of graded composition, the photodetector including a doping plane situated in the vicinity of the join between the absorbent layer and the transition layer of graded composition.Type: GrantFiled: January 16, 1998Date of Patent: August 22, 2000Assignee: France TelecomInventors: Andre Scavennec, Abdelkader Temmar
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Patent number: 6107643Abstract: A photoconductive switch, having at least a part of a first layer doped with dopants providing substantially no free charge carriers for charge transport between the electrodes at the normal operation temperature of the switch, has the nature of the doping, i.e., concentration, type (n or p). The dopants, varied from the first side to an opposite, second side of the first layer for co-operating with the intensity distribution of the light emitted by an illumination source, strikes the first side versus energy so as to obtain a substantially even creation of free charge carriers throughout the depth of the first layer from the first to the second side when illuminated by the illumination source.Type: GrantFiled: March 24, 1999Date of Patent: August 22, 2000Assignee: ABB ABInventors: Per Skytt, Erik Johansson, Mark Irwin
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Patent number: 5814873Abstract: A solid-state infrared sensor using a Schottky barrier diode. The sensor has a first layer of a semiconductor of a first conductivity type and a second layer of a metal or a metal silicide and the first and second layer are joined to each other to form the Schottky barrier diode. Further, the sensor includes a third layer disposed in the depletion layer formed in the first layer out of contact with the Schottky junction interface. The third layer contains an impurity which is introduced for positioning an effective barrier formed in the depletion layer under an image force, closely to the junction interface. Intensity of an infrared radiation is detected using a multiple reflection effect of hot carriers.Type: GrantFiled: September 2, 1997Date of Patent: September 29, 1998Assignee: NEC CorporationInventor: Kazuo Konuma
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Patent number: 5796155Abstract: An improvement of the design of Schottky barrier infrared detector (SBIR) arrays, as taught by Roosild, et al. We describe modifications of the detector unit cell design which maximize the fraction of detector electrode area exhibiting full spectral emission response. In particular we recommend changes in the impurity density profile, or "doping", under the Schottky electrode. The new detector cell design can result in a two-fold increase in the photoemission of SBIR arrays, which have small detector cell dimensions.Type: GrantFiled: June 25, 1997Date of Patent: August 18, 1998Assignee: The United States of America as represented by the Secretary of the Air ForceInventors: Freeman D. Shepherd, Jonathan M. Mooney
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Patent number: 5747840Abstract: The quantum efficiency of a photodiode is substantially increased by forming the photodiode on a heavily-doped layer of semiconductor material which, in turn, is formed on a semiconductor substrate. The heavily-doped layer of semiconductor material tends to repel information carriers in the photodiode from being lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photodiode. In addition, the red and blue photoresponses are balanced by adjusting the depth of the photodiode.Type: GrantFiled: October 21, 1996Date of Patent: May 5, 1998Assignee: Foveonics, Inc.Inventor: Richard Billings Merrill
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Patent number: 5539221Abstract: An avalanche photodiode is provided which consists of a staircase APD with a periodic multilayer structure graded in composition from InAlAs to InGa.sub.x Al.sub.(1-x) As (x>0.1) as the multiplication layer to improve the dark current characteristic. Another photodiode with separate photoabsorption and multiplication regions is provided with an electric-field relaxation layer whose bandgap is wider than that of the photoabsorption and has a triple structure with a highly-doped layer sandwiched between lightly-doped layers. This photodiode incorporates in detail on an n-type InP substrate, an avalanche multiplication layer 13 of a periodic multilayer structure graded in composition from n.sup.- -InAlAs to InGa.sub.x Al.sub.(1-x) As, a p.sup.- -InGaAs photoabsorption layer 17, and an InP electric-field relaxation triple layer 16 consisting of n.sup.-, p.sup.+, and p.sup.- layers between the avalanche multiplication layer 13 and the photoabsorption layer 17.Type: GrantFiled: April 7, 1994Date of Patent: July 23, 1996Assignee: NEC CorporationInventors: Masayoshi Tsuji, Kikuo Makita