Field Relief Electrode Patents (Class 257/488)
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Publication number: 20090152667Abstract: A semiconductor with active component and method for manufacture. One embodiment provides a semiconductor component arrangement having an active semiconductor component and a semiconductor body having a first semiconductor zone, a third semiconductor zone, and also a drift zone arranged between the first semiconductor zone and the third semiconductor zone. A patterned fourth semiconductor zone doped complementarily to the drift zone is arranged in the drift zone. A potential control structure is provided, which is connected to the patterned fourth semiconductor zone. The potential control structure is designed to connect the patterned fourth semiconductor zone, in the off state of the semiconductor component, to an electrical potential lying between the electrical potential of the first semiconductor zone and the electrical potential of the third semiconductor zone.Type: ApplicationFiled: December 12, 2007Publication date: June 18, 2009Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Walter Rieger, Franz Hirler
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Patent number: 7501669Abstract: A transistor structure comprising an active semiconductor layer with metal source and drain contacts formed in electrical contact with the active layer. A gate contact is formed between the source and drain contacts for modulating electric fields within the active layer. A spacer layer is formed above the active layer and a conductive field plate formed above the spacer layer, extending a distance Lf from the edge of the gate contact toward the drain contact. The field plate is electrically connected to the gate contact.Type: GrantFiled: August 31, 2004Date of Patent: March 10, 2009Assignee: Cree, Inc.Inventors: Primit Parikh, Yifeng Wu
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Patent number: 7485916Abstract: A field effect device includes at least one segmented field plate, each of the at least one segmented field plates having a plurality of segments that each form a plate of a capacitor, wherein the field effect device is connected to an electronic element that dynamically connects selected segments to selectively set a gate-to-drain and a drain-to-source capacitance. An ultrasonic device includes a transducer coupled to a switching device that switches the transducer between a transmit mode and a receive mode switching device, wherein the switching device includes the field effect device.Type: GrantFiled: September 21, 2004Date of Patent: February 3, 2009Assignee: NXP, B.V.Inventors: John Petruzzello, Theodore Letavic, Benoit Dufort
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Publication number: 20080315343Abstract: A semiconductor device includes: a first insulating layer; a semiconductor layer provided on the first insulating layer; a first semiconductor region selectively provided in the semiconductor layer; a second semiconductor region selectively provided in the semiconductor layer and spaced from the first semiconductor region; a first main electrode provided in contact with the first semiconductor region; a second main electrode provided in contact with the second semiconductor region; a second insulating layer provided on the semiconductor layer; a first conductive material provided in the second insulating layer above a portion of the semiconductor layer located between the first semiconductor region and the second semiconductor region; and a second conductive material provided in a trench provided in a portion of the semiconductor layer opposed to the first conductive material, being in contact with the first conductive material, and reaching the first insulating layer.Type: ApplicationFiled: February 13, 2008Publication date: December 25, 2008Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Mitsuhiko Kitagawa
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Publication number: 20080296636Abstract: According to the present invention, semiconductor device breakdown voltage can be increased by embedding field shaping regions within a drift region of the semiconductor device. A controllable current path extends between two device terminals on the top surface of a planar substrate, and the controllable current path includes the drift region. Each field shaping region includes two or more electrically conductive regions that are electrically insulated from each other, and which are capacitively coupled to each other to form a voltage divider dividing a potential between the first and second terminals. One or more of the electrically conductive regions are isolated from any external electrical contact. Such field shaping regions can provide enhanced electric field uniformity in current-carrying parts of the drift region, thereby increasing device breakdown voltage.Type: ApplicationFiled: June 2, 2008Publication date: December 4, 2008Inventors: Mohamed N. Darwish, Richard A. Harris, Muhammed Ayman Shibib, Andrew J. Morrish, Robert Kuo-Chang Yang
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Publication number: 20080265277Abstract: A semiconductor device with a field ring in an edge pattern of a semiconductor body with a central cell area and with field plate discharge pattern. The edge pattern exhibits at least one horizontal field plate which is arranged with one end over the field ring and with its other end on insulating layers towards the edge of the semiconductor body. A first ring-shaped area of a type of conduction doped complementary to a drift section material exhibits a field ring effect. A second highly doped ring-shaped area which contacts the one end of the horizontal field plate and forms a pn junction with the first ring-shaped area and which is arranged within the first area exhibits a locally limited punch-through effect or a resistive contact to the drift section material.Type: ApplicationFiled: April 30, 2008Publication date: October 30, 2008Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Franz Hirler, Elmar Falck, Hans-Joachim Schulze
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Patent number: 7427800Abstract: A semiconductor device includes a field shield region that is doped opposite to the conductivity of the substrate and is bounded laterally by dielectric sidewall spacers and from below by a PN junction. For example, in a trench-gated MOSFET the field shield region may be located beneath the trench and may be electrically connected to the source region. When the MOSFET is reverse-biased, depletion regions extend from the dielectric sidewall spacers into the “drift” region, shielding the gate oxide from high electric fields and increasing the avalanche breakdown voltage of the device. This permits the drift region to be more heavily doped and reduces the on-resistance of the device. It also allows the use of a thin, 20 ? gate oxide for a power MOSFET that is to be switched with a 1V signal applied to its gate while being able to block over 30V applied across its drain and source electrodes, for example.Type: GrantFiled: November 12, 2004Date of Patent: September 23, 2008Inventor: Hamza Yilmaz
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Publication number: 20080179672Abstract: A semiconductor component is described. In one embodiment, the semiconductor component includes a semiconductor body with a first side and a second side. A drift zone is provided, which is arranged in the semiconductor body below the first side and extends in a first lateral direction of the semiconductor body between a first and a second doped terminal zone. At least one field electrode is provided, which is arranged in the drift zone, extends into the drift zone proceeding from the first side and is configured in a manner electrically insulated from the semiconductor body.Type: ApplicationFiled: January 25, 2008Publication date: July 31, 2008Applicant: INFINEON TECHNOLOGIES AGInventors: Franz Hirler, Armin Willmeroth, Markus Schmitt, Carolin Tolksdorf, Gerald Deboy, Ralf Henninger
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Configuration of high-voltage semiconductor power device to achieve three dimensionalcharge coupling
Publication number: 20080173969Abstract: This invention discloses semiconductor device that includes a top region and a bottom region with an intermediate region disposed between said top region and said bottom region with a controllable current path traversing through the intermediate region. The semiconductor device further includes a trench with padded with insulation layer on sidewalls extended from the top region through the intermediate region toward the bottom region wherein the trench includes randomly and substantially uniformly distributed nano-nodules as charge-islands in contact with a drain region below the trench for electrically coupling with the intermediate region for continuously and uniformly distributing a voltage drop through the current path.Type: ApplicationFiled: January 22, 2007Publication date: July 24, 2008Inventors: Francois Hebert, Tao Feng -
Patent number: 7397083Abstract: A trench type power MOSgated device has a plurality of spaced trenches lined with oxide and filled with conductive polysilicon. The tops of the polysilicon fillers are below the top silicon surface and are capped with a deposited oxide the top of which is flush with the top of the silicon. Source regions of short lateral extent extend into the trench walls to a depth below the top of the polysilicon. A trench termination is formed having an insulation oxide liner covered by a polysilicon layer, covered in turn by a deposited oxide.Type: GrantFiled: November 5, 2007Date of Patent: July 8, 2008Assignee: International Rectifier CorporationInventors: Adam I Amali, Naresh Thapar
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Patent number: 7388236Abstract: Field effect transistors having a power density of greater than 40 W/mm when operated at a frequency of at least 4 GHz are provided. The power density of at least 40 W/mm may be provided at a drain voltage of 135 V. Transistors with greater than 60% PAE and a power density of at least 5 W/mm when operated at 10 GHz at drain biases from 28 V to 48 V are also provided.Type: GrantFiled: March 29, 2006Date of Patent: June 17, 2008Assignee: Cree, Inc.Inventors: Yifeng Wu, Primit Parikh, Umesh Mishra, Marcia Moore
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Patent number: 7385273Abstract: A power semiconductor device that includes a plurality of gate structure each having a gate insulation of a first thickness, and a termination region, the termination including a field insulation body surrounding the active region and having a recess that includes a bottom insulation thicker than the first thickness.Type: GrantFiled: June 9, 2006Date of Patent: June 10, 2008Assignee: International Rectifier CorporationInventors: Hugo R Burke, Simon Green
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Patent number: 7361964Abstract: Sacrificial electrodes with fractal-shaped are formed on a SAW (surface acoustic wave) device. The sacrificial electrodes discharge electro-static charge in the SAW device for protecting the IDT (inter-digital transducer) from electrostatic break. Moreover, the sacrificial electrodes can control the path and the discharging degree of the electro-static discharge to avoid losing the electrostatic discharge protection due to the sacrificial electrodes are broken.Type: GrantFiled: March 13, 2007Date of Patent: April 22, 2008Assignee: Tai-Saw Technology Co., Ltd.Inventors: Yu-Tung Huang, Chi-Yun Chen, Shih-Cheng Chiu, Ken-Huang Lin, Kuan-Yu Lin
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Patent number: 7335944Abstract: A high-voltage transistor includes first and second trenches that define a mesa in a semiconductor substrate. First and second field plate members are respectively disposed in the first and second trenches, with each of the first and second field plate members being separated from the mesa by a dielectric layer. The mesa includes a plurality of sections, each section having a substantially constant doping concentration gradient, the gradient of one section being at least 10% greater than the gradient of another section. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: GrantFiled: January 30, 2007Date of Patent: February 26, 2008Assignee: Power Integrations, Inc.Inventors: Sujit Banerjee, Donald Ray Disney
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Patent number: 7327007Abstract: A technique is provided which allows easy achievement of a semiconductor device with desired breakdown voltage. In a high-potential island region defined by a p impurity region, an n+ impurity region is formed in an n? semiconductor layer, and first field plates and second field plates are formed in multiple layers above the n? semiconductor layer between the n+ impurity region and the p impurity region. The second field plates in the upper layer are located above spaces between the first field plates in the lower layer, over which an interconnect line passes. One of the second field plates which is closest to the p impurity region has a cut portion under the interconnect line, and an electrode is spaced between the first field plates located under the cut portion.Type: GrantFiled: December 3, 2004Date of Patent: February 5, 2008Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Kazuhiro Shimizu
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Patent number: 7304356Abstract: A multiple-cell insulated-gate-bipolar-transistor chip is disclosed which includes a semiconductor substrate having formed therein a p+-type collector region and an n?-type base region, with a pn junction therebetween. An annular trench is etched in the substrate so as to surround the array of IGBT cells. Received in the trench are a dielectric layer which is held against the base region, and an electroconductive layer which is held against the base region via the dielectric layer and which is electrically coupled to the collector region. When the pn junction between the collector and base regions is reverse biased, the electroconductive layer creates at the annular periphery of the base region a depletion layer which is joined to a depletion layer created in the base region by the pn junction, thereby preventing current leakage from the side surfaces of the IGBT chip.Type: GrantFiled: May 12, 2006Date of Patent: December 4, 2007Assignee: Sanken Electric Co., Ltd.Inventor: Tetsuya Takahashi
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Patent number: 7253486Abstract: In one example embodiment, a transistor (100) is provided. The transistor (100) comprises a source (10), a gate (30), a drain (20), and a field plate (40) located between the gate (30) and the drain (20). The field plate (40) comprises a plurality of connection locations (47) and a plurality of electrical connectors (45) connecting said plurality of connection locations (47) to a potential.Type: GrantFiled: July 31, 2002Date of Patent: August 7, 2007Assignee: Freescale Semiconductor, Inc.Inventors: Bruce M. Green, Ellen Lan, Phillip Li
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Patent number: 7221011Abstract: A high-voltage transistor includes first and second trenches that define a mesa in a semiconductor substrate. First and second field plate members are respectively disposed in the first and second trenches, with each of the first and second field plate members being separated from the mesa by a dielectric layer. The mesa includes a plurality of sections, each section having a substantially constant doping concentration gradient, the gradient of one section being at least 10% greater than the gradient of another section. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. 37 CFR 1.72(b).Type: GrantFiled: January 25, 2005Date of Patent: May 22, 2007Assignee: Power Integrations, Inc.Inventors: Sujit Banerjee, Donald Ray Disney
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Patent number: 7187056Abstract: A method of forming bipolar junction devices, including forming a mask to expose the total surface of the emitter region and adjoining portions of the surface of the base region. A first dielectric layer is formed over the exposed surfaces. A field plate layer is formed on the first dielectric layer juxtaposed on at least the total surface of the emitter region and adjoining portions of the surface of the base region. A portion of the field plate layer is removed to expose a first portion of the emitter surface. A second dielectric layer is formed over the field plate layer and the exposed portion of the emitter. A portion of the second dielectric layer is removed to expose the first portion of the emitter surface and adjoining portions of the field plate layer. A common contact is made to the exposed first portion of the emitter surface and the adjoining portions of the field plate layer. In another embodiment, the field plate and emitter contact are formed simultaneously.Type: GrantFiled: February 3, 2006Date of Patent: March 6, 2007Assignee: Intersil Americas, Inc.Inventors: Nicolaas W. van Vonno, Dustin Woodbury
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Patent number: 7161208Abstract: A trench MOS-gated semiconductor device that includes field relief regions formed below its base region to improve its breakdown voltage, and method for its manufacturing.Type: GrantFiled: May 13, 2003Date of Patent: January 9, 2007Assignee: International Rectifier CorporationInventors: Kyle Spring, Jianjun Cao, Timothy D Henson
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Patent number: 7161194Abstract: Field effect transistors having a power density of greater than 25 W/mm when operated at a frequency of at least 4 GHz are provided. The power density may be at least 30 W/mm when operated at 4 GHz. The power density of at least 30 W/mm may be provided at a drain voltage of 120 V. Transistors with a power density of at least 30 W/mm when operated at 8 GHz are also provided. The power density of at least 30 W/mm may be provided at a drain voltage of 120 V. Field effect transistors having a power density of greater than 20 W/mm when operated at a frequency of at least 10 GHz are also provided. Field effect transistors having a power density of at least 2.5 W/mm and a two tone linearity of at least ?30 dBc of third order intermodulation distortion at a center frequency of at least 4 GHz and a power added efficiency (PAE) of at least 40% are also provided.Type: GrantFiled: December 6, 2004Date of Patent: January 9, 2007Assignee: Cree, Inc.Inventors: Primit Parikh, Yifeng Wu, Adam William Saxler
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Patent number: 7148540Abstract: An MOS device comprises a semiconductor layer of a first conductivity type and source and drain regions of a second conductivity type formed in the semiconductor layer, the source and drain regions being spaced apart from one another. A drift region is formed in the semiconductor layer proximate an upper surface of the semiconductor layer and between the source and drain regions, and a insulating layer is formed on the semiconductor layer above at least a portion of the drift region. A gate is formed on the insulating layer and at least partially between the source and drift regions. The MOS device further includes a conductive structure comprising a first end formed on the insulating layer and spaced apart from the gate, and a second end formed on the insulating layer and extending laterally toward the drain region above at least a portion of the drift region.Type: GrantFiled: June 28, 2004Date of Patent: December 12, 2006Assignee: Agere Systems Inc.Inventors: Muhammed Ayman Shibib, Shuming Xu
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Patent number: 7135742Abstract: An insulated gate type semiconductor device comprised of a semiconductor layer serving as an active region isolated from a semiconductor substrate by a substrate isolation insulating film and a T-shaped gate electrode comprised of a trunk-shaped main gate electrode and a crosspiece-shaped conductor pattern provided on the semiconductor layer, wherein the thickness of the gate insulating film directly under the crosspiece-shaped conductor pattern is made greater than the thickness of the gate insulating film directly under the main gate electrode, whereby it is possible to prevent short-circuits between electrodes, prevent short-circuits between separators, and prevent an increase of the parasitic capacitance.Type: GrantFiled: November 22, 2000Date of Patent: November 14, 2006Assignee: Fujitsu LimitedInventors: Akihiko Harada, Sadanori Akiya, Kazuhiro Furuya, Hisashi Watanabe
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Patent number: 7122875Abstract: A p well serving as a channel region of a MOSFET is formed on one side of an n? layer and an n+ drain region is formed on the other side. Above the n? layer, a plurality of first floating field plates are formed with a first insulating film interposed therebetween. A plurality of second floating field plates are formed thereon with a second insulating film interposed therebetween. Assuming that the thickness of the first insulating film is “a” and the distance between the first floating field plates and the second floating field plates in a direction of thickness of the second insulating film is “b”, a relation a>b is held.Type: GrantFiled: November 30, 2004Date of Patent: October 17, 2006Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Kazunari Hatade
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Patent number: 7109562Abstract: A high voltage laterally double-diffused metal oxide semiconductor (LDMOS) stricture is characterized as follows: the second source electrode metal layer connected to the first source electrode metal layer protrudes out of a certain length relative to the first source electrode metal layer of the source electrode region connected thereto. The second drain electrode metal layer connected to the first drain electrode metal layer protrudes out of a certain length relative to the first drain electrode metal layer of the drain electrode region. The protruded length overlaps more portions of the drift layer than the first source electrode metal layer and the first drain electrode metal layer disposed below, to reduce the electric field concentration of the gate electrode interface or the interface between the N+ type drain electrode layer and the N-type extended drift layer.Type: GrantFiled: February 7, 2005Date of Patent: September 19, 2006Assignee: Leadtrend Technology Corp.Inventor: Chi-Hsiang Lee
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Patent number: 7075125Abstract: A power semiconductor device includes a first semiconductor layer of non-doped AlXGa1?XN (0?X?1), and a second semiconductor layer of non-doped or n-type AlYGa1?YN (0?Y?1, X<Y) disposed on the first semiconductor layer. Source and drain electrodes are disposed separately from each other, and electrically connected to the second semiconductor layer. A gate electrode is disposed on the second semiconductor layer between the source and drain electrodes. An insulating film covers the second semiconductor layer between the gate and drain electrodes. A first field plate electrode is disposed on the insulating film and electrically connected to the gate electrode. A second field plate electrode is disposed on the insulating film and electrically connected to the source electrode.Type: GrantFiled: March 23, 2004Date of Patent: July 11, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Wataru Saito, Ichiro Omura
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Patent number: 7067877Abstract: A MIS-type semiconductor device has reduced ON-resistance by securing an overlapping area between the gate electrode and the drift region, and has low switching losses by reducing the feedback capacitance. The MIS-type semiconductor device includes a p-type base region, an n-type drift region, a p+-type stopper region in the base region, a gate insulation film on the base region, a gate electrode on the gate insulation film, an oxide film on the drift region, a field plate on the oxide film, and a source electrode. The position (P) of the impurity concentration peak in base region is located more closely to the drift region. The oxide film is thinner on the side of the gate electrode. The field plate is connected electrically to the source electrode, the spacing (dg) between the gate insulation film and the stopper region is 2.5 ?m or narrower, and the minimum spacing (x) between the drain region and the stopper region is 5.6 ?m or narrower.Type: GrantFiled: February 18, 2004Date of Patent: June 27, 2006Assignee: Fuji Electric Device Technology Co., Ltd.Inventor: Tatsuji Nagaoka
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Patent number: 7019392Abstract: A storage apparatus 10 is disclosed, that comprises a wiring substrate 11 having a first surface and a second surface, a flat type external connection terminal 12a disposed on the first surface of the wiring substrate 11, a semiconductor device 14 disposed on the second surface of the wiring substrate 11 and having a connection terminal 14a connected to the flat type external connection terminal 12a, a molding resin 15 for coating the semiconductor device 14 on the second surface of the wiring substrate 11, a card type supporting frame 10a having a concave portion or a hole portion fitting the wiring substrate 11, the semiconductor device 14, and the molding resin 15 in such a manner that the flat type external connection terminal 12a is exposed to the first surface of the wiring substrate 11, and adhesive resin a adhering integrally the flat type external connection terminal 12a, the wiring substrate 11, the semiconductor device 14, the molding resin 15, and the card type supporting frame 10a.Type: GrantFiled: August 14, 2003Date of Patent: March 28, 2006Assignee: Kabushiki Kaisha ToshibaInventor: Hiroshi Iwasaki
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Patent number: 7015557Abstract: A Hall element is provided with a segmented field plate. Dynamic bias control is applied to the segments of the field plate. In one embodiment, a feedback signal is derived from an amplified output of the Hall element. The feedback signal is applied to the segments of the field plate in order to control sheet conductivity in specific localized areas. In one embodiment, a metal field plate is split into four segments along lines between bias and sense contacts of the Hall element. Opposing diagonal segments are electrically connected.Type: GrantFiled: April 16, 2004Date of Patent: March 21, 2006Assignee: Honeywell International Inc.Inventors: Wayne T. Kilian, James R. Biard
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Patent number: 6987299Abstract: A high-voltage transistor with a low specific on-state resistance and that supports high voltage in the off-state includes one or more source regions disposed adjacent to a multi-layered extended drain structure which comprises extended drift regions separated from field plate members by one or more dielectric layers. The layered structure may be fabricated in a variety of orientations. A MOSFET structure may be incorporated into the device adjacent to the source region, or, alternatively, the MOSFET structure may be omitted to produce a high-voltage transistor structure having a stand-alone drift region. It is emphaized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims 37 CFR 1.72(b).Type: GrantFiled: June 16, 2004Date of Patent: January 17, 2006Assignee: Power Integrations, Inc.Inventors: Donald Ray Disney, Amit Paul
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Patent number: 6972460Abstract: A semiconductor device including a drift layer of a first conductivity type formed on a surface of a semiconductor substrate. A surface of the drift layer has a second area positioned on an outer periphery of a first area. A cell portion formed in the first area includes a first base layer of a second conductivity type, a source layer and a control electrode formed in the first base layer and the source layer. The device also includes a terminating portion formed in the drift layer including a second base layer of a second conductivity type, an impurity diffused layer of a second conductivity type, and a metallic compound whose end surface on the terminating portion side is positioned on the cell portion side away from the end surface of the impurity diffused layer on the terminal portion side.Type: GrantFiled: October 8, 2003Date of Patent: December 6, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Satoshi Aida, Shigeo Kouzuki, Masaru Izumisawa, Hironori Yoshioka
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Patent number: 6946685Abstract: Silver electrode metallization in light emitting devices is subject to electrochemical migration in the presence of moisture and an electric field. Electrochemical migration of the silver metallization to the pn junction of the device results in an alternate shunt path across the junction, which degrades efficiency of the device. In accordance with a form of this invention, a migration barrier is provided for preventing migration of metal from at least one of the electrodes onto the surface of the semiconductor layer with which the electrode is in contact.Type: GrantFiled: August 31, 2000Date of Patent: September 20, 2005Assignee: Lumileds Lighting U.S., LLCInventors: Daniel A. Steigerwald, Michael J. Ludowise, Steven A. Maranowski, Serge L. Rudaz, Jerome C. Bhat
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Patent number: 6917076Abstract: A semiconductor device and a method for manufacturing the same and method for deleting information in use of the semiconductor device, in which field shield isolation or a trench type isolation between elements is used with suppression of penetration of field oxide into element active region of the device, that is, a defect involved in conventional LOCOS type process, are disclosed. A non-LOCOS insulating device isolation block is formed in a semiconductor substrate. The non-LOCOS insulating device isolation block uses a field shield element isolation structure or trench type element isolation structure.Type: GrantFiled: July 31, 2003Date of Patent: July 12, 2005Assignee: United Microelectronics CorporationInventors: Kohei Eguchi, Yuichi Egawa, Shoichi Iwasa, Hideki Fujikake, Wataru Yokozeki, Tatsuya Kawamata
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Patent number: 6911687Abstract: Active areas of a Dynamic Random Access Memory (DRAM) formed on a semiconductor substrate are defined by buried bit lines on two sides and by conductors separated from the semiconductor substrate by electrically insulating layers on two other sides. The conductors are electrically biased during operation of the DRAM to cause portions of the semiconductor substrate therebelow to increase in majority carrier concentration and thus to inhibit inversion thereof. Each buried bit line is formed in a trench in the semiconductor substrate. Each trench houses a separate bit line and is lined with an electrical insulator and has a conductor in a bottom portion thereof.Type: GrantFiled: June 21, 2000Date of Patent: June 28, 2005Assignees: Infineon Technologies AG, International Business Machines CorporationInventors: Jack A. Mandelman, Gerhard Kunkel
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Patent number: 6878992Abstract: A power MOSFET comprises, between source and drain electrodes, a low resistive semiconductor substrate of a first conductivity type, a drift layer of the first conductivity type formed on the semiconductor substrate, a high resistive epitaxial layer of the first conductivity type formed on the drift layer, trenches formed to extend from a surface of the epitaxial layer into the drift layer, gate electrodes buried in the trenches with gate insulating films interposed between the gate electrodes and walls of the trenches, low resistive source layers of the first conductivity type formed in a surface region of the epitaxial layer adjacent to the gate insulating films, and a base layer of a second conductivity type formed in the surface region of the epitaxial layer, wherein the epitaxial layer intervening between the trenches is depleted in a case where 0 volt is applied between the source electrode and the gate electrodes.Type: GrantFiled: March 7, 2002Date of Patent: April 12, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Yusuke Kawaguchi, Norio Yasuhara, Kazutoshi Nakamura, Akio Nakagawa, Syotaro Ono
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Patent number: 6879005Abstract: A high withstand voltage semiconductor device, comprises: a substrate, a semiconductor layer formed on an upper surface of the substrate, a lateral semiconductor device formed in a surface region of the semiconductor layer and having a first principal electrode in its inner location and a second principal electrode in its outer location so as to let primary current flow between the first and second principal electrodes, a field insulation film formed inside from the second principal electrode in an upper surface of the semiconductor layer to surround the first principal electrode, a resistive field plate formed on an upper surface of the field insulation film to surround the first principal electrode and sectioned in a plurality of circular field plates in an approximate circular arrangement orbiting gradually from the vicinity of the first principal electrode toward the second principal electrode, the innermost one of the circular field plates being electrically connected to the first principal electrode whiType: GrantFiled: March 2, 2004Date of Patent: April 12, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Yoshihiro Yamaguchi, Akio Nakagawa
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Patent number: 6872999Abstract: Memory cells, word lines and bit lines are formed on the substrate. Each word line is connected to some memory cells. The bit line is disposed in a wiring layer above the word lines, the bit line being connected to some memory cells and applied with a signal read from the memory cell selected by the word lines. Signal wiring lines are disposed in a wiring layer above the bit lines and partially superposed upon the bit lines. A shield layer is disposed in a wiring layer between the bit lines and signal wiring lines. As viewed along a direction vertical to the surface of the semiconductor substrate, the shield layer includes the bit lines in an area including an area where the bit lines and signal wiring lines are superposed upon each other, openings being formed through the shield layer in areas where the bit lines are not disposed.Type: GrantFiled: July 7, 2003Date of Patent: March 29, 2005Assignee: Fujitsu LimitedInventor: Toshiyuki Uetake
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Patent number: 6853033Abstract: A MOSFET includes a dielectric, preferably in the form of a metal thick oxide that extends alongside the MOSFET's drift region. A voltage across this dielectric between its opposing sides exerts an electric field into the drift region to modulate the drift region electric field distribution so as to increase the breakdown voltage of a reverse biased semiconductor junction between the drift region and body region. This allows for higher doping of the drift region, for a given breakdown voltage when compared to conventional MOSFETs.Type: GrantFiled: June 4, 2002Date of Patent: February 8, 2005Assignee: National University of SingaporeInventors: Yung Chii Liang, Ganesh Shankar Samudra, Kian Paau Gan, Xin Yang
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Patent number: 6833583Abstract: To avoid premature breakdown at the edge of the active area of RESURF trench-gate MOS device, an edge field plate (24) can be placed with a connection to the gate and a second spaced field plate (24) in the same trench (12). The gate trench network (12) could be either formed by hexagon unit cells or by square unit cells. Since the RESURF condition requires a small cell pitch, self-aligned processing could be used.Type: GrantFiled: September 10, 2002Date of Patent: December 21, 2004Assignee: Koninklijke Philips Electronics N.V.Inventors: Michael A. A. In't Zandt, Erwin A. Hijzen, Raymond J. E. Hueting
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Patent number: 6831345Abstract: A high withstand voltage semicnductor device does not show any significant fall of its withstand voltage if the impurity concentration of the RESURF layer of a low impurity concentration semiconductor region thereof varies from the optimal level and/or influenced by the fixed electric charge.Type: GrantFiled: July 17, 2002Date of Patent: December 14, 2004Assignee: Kabushiki Kaisha ToshibaInventors: Kozo Kinoshita, Tetsuo Hatakeyama, Takashi Shinohe
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Patent number: 6831332Abstract: A microwave transistor structure comprising: (1) a substrate having a top surface; (2) a silicon semiconductor material of a first conductivity type; (3) a conductive gate; (4) a channel region of a second conductivity type; (5) a drain region of the second conductivity type; (6) a body of the first conductivity type; (7) a source region of the second conductivity type; (8) a shield plate region formed on the top surface of the silicon semiconductor material over a portion of the channel region, wherein the shield plate is adjacent and parallel to the drain region, and to the conductive gate region; and (9) a conductive plug region formed in the body region of the silicon semiconductor material, wherein the conductive plug region connects a lateral surface of the body region to the top surface of the substrate.Type: GrantFiled: May 25, 2002Date of Patent: December 14, 2004Assignee: Sirenza Microdevices, Inc.Inventors: Pablo D'Anna, Joseph H. Johnson
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Patent number: 6828645Abstract: A semiconductor device comprising: a semiconductor substrate, a dielectric film formed on the semiconductor substrate, a first electrode and a second electrode separated from each other on the dielectric film; a spiral thin film layer having both ends connected to the first electrode and the second electrode, respectively, the spiral thin film layer surrounding the first electrode, the thin film layer being formed on the dielectric layer, and a plurality of p-n diodes formed in series in the spiral thin film layer along a longitudinal direction of the spiral thin film layer.Type: GrantFiled: June 12, 2003Date of Patent: December 7, 2004Assignee: Fuji Electric Co., Ltd.Inventors: Shinichi Jimbo, Jun Saito, Tomoyuki Yamazaki
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Patent number: 6828629Abstract: A P-type pocket layer is formed in the surficial portion of a semiconductor substrate, a sidewall insulating film having a thickness of as thin as 10 nm or around is formed, and P is implanted therethrough to thereby form an N-type extension layer in the surficial portion of the p-type pocket layer. Then, a sidewall insulating film is formed, and P is implanted to thereby form an N-type source and a drain diffusion layer. P, having a larger coefficient of diffusion than that of conventionally-used As, used in the formation of the pocket layer can successfully moderate a strong electric field in the vicinity of the channel, and can consequently reduce leakage current between the drain and the semiconductor substrate and thereby reduce the off-leakage current, even if the gate length is reduced to 100 nm or shorter.Type: GrantFiled: February 2, 2004Date of Patent: December 7, 2004Assignee: Fujitsu LimitedInventor: Naoto Horiguchi
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Patent number: 6815793Abstract: A body (1) consisting of a doped semiconductor material with a pn junction (10) and an area (2) of reduced mean free path length (&lgr;r) for free charge carriers is disclosed. Said area (2) has sections (21, 22) which succeed each other in at least one specified direction (x, y, z) and between which there is at least one region (23), containing a mean free path length (&lgr;0) for the free charge carriers that is larger in relation to the reduced mean free path length (&lgr;r).Type: GrantFiled: February 28, 2003Date of Patent: November 9, 2004Assignee: Eupec Europdische Gesellschaft fur Leitungshalbleiter GmbH & Co. KGInventors: Veli Kartal, Hans-Joachim Schulze
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Patent number: 6815293Abstract: A high-voltage transistor with a low specific on-state resistance and that supports high voltage in the off-state includes one or more source regions disposed adjacent to a multi-layered extended drain structure which comprises extended drift regions separated from field plate members by one or more dielectric layers. The layered structure may be fabricated in a variety of orientations. A MOSFET structure may be incorporated into the device adjacent to the source region, or, alternatively, the MOSFET structure may be omitted to produce a high-voltage transistor structure having a stand-alone drift region. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: GrantFiled: April 30, 2002Date of Patent: November 9, 2004Assignee: Power Intergrations, Inc.Inventors: Donald Ray Disney, Amit Paul
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Patent number: 6798020Abstract: A high-voltage transistor with a low specific on-state resistance and that supports high voltage in the off-state includes one or more source regions disposed adjacent to a multi-layered extended drain structure which comprises extended drift regions separated from field plate members by one or more dielectric layers. With the field plate members at the lowest circuit potential, the transistor supports high voltages applied to the drain in the off-state. The layered structure may be fabricated in a variety of orientations. A MOSFET structure may be incorporated into the device adjacent to the source region, or, alternatively, the MOSFET structure may be omitted to produce a high-voltage transistor structure having a stand-alone drift region.Type: GrantFiled: February 10, 2003Date of Patent: September 28, 2004Assignee: Power Integrations, Inc.Inventors: Donald Ray Disney, Mohamed Darwish
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Patent number: 6750506Abstract: A high-voltage semiconductor device includes: a drain region; a metal electrode electrically connected to the drain region; and electrically floating plate electrodes formed on a field insulating film over a semiconductor regionm. Parts of the metal electrodes are extended onto the interlevel dielectric film and located over the respective plate electrodes. Each part of the metal electrode is capacitively coupled to associated one of the plate electrodes.Type: GrantFiled: December 15, 2000Date of Patent: June 15, 2004Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Masaaki Noda, Teruhisa Ikuta
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Patent number: 6724021Abstract: A semiconductor device, such as a power MOSFET, Schottky rectifier or p-n rectifier, has a voltage-sustaining zone (20) between a first (21, 23, 31a) and second (22) device regions adjacent to respective first and second opposite surfaces (11, 12) of a semiconductor body 10. Trenched field-shaping regions (40) including a resistive path (42) extend through the voltage-sustaining zone (20) to the underlying second region (22), so as to enhance the breakdown voltage of the device. The voltage-sustaining zone (20) and the trenched field-shaping regions (40) are present in both the active device area (A) and in the peripheral area (P) of the device. A further resistive path (53) extends across the first surface (11), outwardly over the peripheral area (P). This further resistive path (53) provides a potential divider that is connected to the respective resistive paths (42) of successive underlying trenched field-shaping regions (40) in the peripheral area (P).Type: GrantFiled: February 5, 2002Date of Patent: April 20, 2004Assignee: Koninklijke Philips Electronics N.V.Inventors: Rob Van Dalen, Christelle Rochefort, Godefridus A. M. Hurkx
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Patent number: 6717192Abstract: A Schottky gate FET including a gate electrode having a gate extension, a drain electrode and a drain contact layer overlying a semi-insulating substrate, wherein the gate extension overlies at least part of the drain electrode and the drain contact layer. The vertical overlapping between the gate extension and the drain contact region prevents the current reduction to make the circuit module mounting the Schottky gate FET non-usable.Type: GrantFiled: January 6, 2003Date of Patent: April 6, 2004Assignee: NEC Compound Semiconductor Devices, Ltd.Inventor: Yosuke Miyoshi
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Publication number: 20040031987Abstract: A method for fabricating a transistor configuration including at least one trench transistor cell has a gate electrode and a field electrode disposed in a trench below the gate electrode. The trenches are formed in a semiconductor substrate. A drift zone, a channel zone, and a source zone are in each case provided in the semiconductor substrate. According to the invention, the source zone and/or the channel zone are formed at the earliest after the introduction of the trenches into the semiconductor substrate by implantation and diffusion.Type: ApplicationFiled: March 19, 2003Publication date: February 19, 2004Inventors: Ralf Henninger, Franz Hirler, Joachim Krumrey, Walter Rieger, Martin Polzl, Heimo Hofer