Anti-fuse Patents (Class 257/530)
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Patent number: 12089402Abstract: A method of generating an IC layout diagram includes abutting first and second cells to define a first active region including first and second anti-fuse bits, abutting third and fourth cells to define a second active region including third and fourth anti-fuse bits, and defining a third active region including fifth and sixth anti-fuse bits adjacent to the first through fourth anti-fuse bits. The first cell includes first and second via regions overlapping first and second gate regions shared by respective structures and transistors of the first, third, and fifth anti-fuse bits, the fourth cell includes third and fourth via regions overlapping third and fourth gate regions shared by respective transistors and structures of the second, fourth, and sixth anti-fuse bits, the third cell includes fifth and sixth via regions overlapping the first gate region, and the second cell includes seventh and eighth via regions overlapping the fourth gate region.Type: GrantFiled: July 3, 2023Date of Patent: September 10, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Meng-Sheng Chang, Chien-Ying Chen, Chia-En Huang, Yih Wang
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Patent number: 11972830Abstract: Devices and methods for accessing resistive change elements in a resistive change element array to determine resistive states of the resistive change elements are disclosed. According to some aspects of the present disclosure the devices and methods access resistive change elements in a resistive change element array through a variety of operations. According to some aspects of the present disclosure the devices and methods supply an amount of current tailored for a particular operation. According to some aspects of the present disclosure the devices and methods compensate for circuit conditions of a resistive change element array by adjusting an amount of current tailored for a particular operation to compensate for circuit conditions of the resistive change element array.Type: GrantFiled: July 14, 2022Date of Patent: April 30, 2024Assignee: Nantero, Inc.Inventor: Jia Luo
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Patent number: 11916016Abstract: An anti-fuse device including a substrate, a doped region, a dielectric layer, a first contact, an anti-fuse material layer, and a second contact is provided. The doped region is located in the substrate. The dielectric layer is located on the substrate and has a first opening and a second opening. The first opening and the second opening respectively expose the doped region. The first contact is located in the first opening. The anti-fuse material layer is located between the first contact and the doped region. The second contact is located in the second opening and is electrically connected to the doped region.Type: GrantFiled: December 30, 2021Date of Patent: February 27, 2024Assignee: Winbond Electronics Corp.Inventor: Hung-Yu Wei
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Patent number: 11696437Abstract: An IC device includes first through third device pairs positioned in first through third active areas extending in a first direction, each pair including first and second transistors coupled between respective first and second anti-fuse structures and a shared bit line contact, and each of the first and third active areas being adjacent to the second active area. First through fourth conductive lines extend in a second direction, first and second conductive paths couple the first conductive line to the first anti-fuse structures, a third conductive path couples the fourth conductive line to the second anti-fuse structures, and a fourth conductive path couples the third conductive line to the second transistors. The first and third conductive paths are aligned along the first direction between the first and second active areas, and the second and fourth conductive paths are aligned along the first direction between the second and third active areas.Type: GrantFiled: May 9, 2022Date of Patent: July 4, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Meng-Sheng Chang, Chien-Ying Chen, Chia-En Huang, Yih Wang
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Patent number: 11637202Abstract: The present application discloses a method for fabricating a semiconductor device The method includes providing a substrate; forming a channel region in the substrate; forming a gate dielectric layer on the channel region; forming a gate bottom conductive layer on the gate dielectric layer; forming first impurity regions on two ends of the channel region; forming first contacts on the first impurity regions; forming programmable insulating layers on the first contacts; forming a gate via on the gate bottom conductive layer; and forming a top conductive layer on the gate via and the programmable insulating layers.Type: GrantFiled: November 9, 2021Date of Patent: April 25, 2023Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Chang-Chieh Lin
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Patent number: 11605639Abstract: A one time programmable memory device includes a field effect transistor and an antifuse structure. A first node of the antifuse structure includes, or is electrically connected to, the drain region of the field effect transistor. The antifuse structure includes an antifuse dielectric layer and a second node on, or over, the antifuse dielectric layer. One of the first node and the second node includes the drain region or a metal via structure formed within a via cavity extending through an interlayer dielectric material layer that overlies the field effect transistor.Type: GrantFiled: June 15, 2020Date of Patent: March 14, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Meng-Sheng Chang, Chia-En Huang, Yih Wang
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Patent number: 11521978Abstract: The present application discloses a semiconductor device with a programmable unit and a method for fabricating the semiconductor device. The semiconductor device includes a substrate comprising a first region and a second region; a first semiconductor element positioned in the first region of the substrate; a second semiconductor element positioned in the first region of the substrate and electrically coupled to the first semiconductor element; and a programmable unit positioned in the second region and electrically connected to the first semiconductor element.Type: GrantFiled: June 28, 2021Date of Patent: December 6, 2022Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Cheng-Ling Yang
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Patent number: 11515312Abstract: A memory cell includes a semiconductor substrate, a transistor, and a first anti-fuse structure. The transistor is above the semiconductor substrate. The first anti-fuse structure is above the semiconductor substrate and adjacent the transistor, and includes a first terminal and a second terminal. The first terminal of the first anti-fuse structure is in the semiconductor substrate and laterally surrounds the transistor. The second terminal of the first anti-fuse structure is above and spaced apart from the first terminal of the first anti-fuse structure.Type: GrantFiled: October 18, 2021Date of Patent: November 29, 2022Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Hsih-Yang Chiu
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Patent number: 11450674Abstract: In a ROM cell using a vertical nanowire (VNW) FET, the gate of the VNW FET is connected with a word line (WL), the bottom thereof is connected with a bit line (BL), and the top thereof is selectively connected with a ground potential line. The bottom of the VNW FET of the ROM cell is connected to the bit line (BL) irrespective of the data stored in the ROM cell.Type: GrantFiled: November 17, 2020Date of Patent: September 20, 2022Assignee: SOCIONEXT INC.Inventor: Shinichi Moriwaki
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Patent number: 11342341Abstract: A method of generating an IC layout diagram includes positioning a first active region between second and third active regions, intersecting the first active region with first through fourth gate regions to define gate locations of first and second anti-fuse bits, aligning first and second conductive regions between the first and second active regions, thereby intersecting the first conductive region with the first gate region and the second conductive region with the fourth gate region, and aligning third and fourth conductive regions between the first and third active regions, thereby either intersecting the third and fourth conductive regions with the first and third gate regions, or intersecting the third and fourth conductive regions with the second and fourth gate regions. At least one of positioning or intersecting the first active region, or aligning the first and second or third and fourth conductive regions is executed by a processor.Type: GrantFiled: September 18, 2020Date of Patent: May 24, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Meng-Sheng Chang, Chien-Ying Chen, Chia-En Huang, Yih Wang
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Patent number: 11336088Abstract: Provided is a transient voltage suppression device including a power supply terminal, a ground terminal, a Zener diode, a diode string, and an isolation device. The Zener diode is coupled between the power supply terminal and the ground terminal, and a node is between the Zener diode and the power supply terminal. The diode string has a first terminal, a second terminal, and an input/output (I/O) terminal. The second terminal is coupled to the ground terminal. The isolation device is coupled between the node and the first terminal. When an abnormal current flows through the isolation device and an energy of the abnormal current per unit time exceeds a preset value of the isolation device, the isolation device blocks a path of the abnormal current.Type: GrantFiled: October 24, 2019Date of Patent: May 17, 2022Assignee: IPU SEMICONDUCTOR CO., LTD.Inventor: Chih-Hao Chen
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Patent number: 11309332Abstract: A three-dimensional ferroelectric memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, where each of the electrically conductive layers contains a transition metal element-containing conductive liner and a conductive fill material portion, a vertical semiconductor channel extending vertically through the alternating stack, a vertical stack of tubular transition metal element-containing conductive spacers laterally surrounding the vertical semiconductor channel and located at levels of the electrically conductive layers, and a ferroelectric material layer located between the vertical stack of tubular transition metal element-containing conductive spacers and the transition metal element-containing conductive liner.Type: GrantFiled: September 12, 2019Date of Patent: April 19, 2022Assignee: SANDISK TECHNOLOGIES LLCInventors: Adarsh Rajashekhar, Raghuveer S. Makala, Rahul Sharangpani, Seung-Yeul Yang, Fei Zhou
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Patent number: 11282960Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a channel region positioned in the substrate, first impurity regions positioned in the substrate and respectively positioned on two ends of the channel region, a gate dielectric layer positioned on the channel region, a gate bottom conductive layer positioned on the gate dielectric layer, first contacts respectively positioned on the first impurity regions, programmable insulating layers respectively positioned on the first contacts, a top conductive layer positioned on the programmable insulating layers and electrically coupled to the gate bottom conductive layer.Type: GrantFiled: August 4, 2020Date of Patent: March 22, 2022Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Chang-Chieh Lin
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Patent number: 11264317Abstract: Embodiments herein may describe techniques for an integrated circuit including a metal interconnect above a substrate, an interlayer dielectric (ILD) layer above the metal interconnect with an opening to expose the metal interconnect at a bottom of the opening. A dielectric layer may conformally cover sidewalls and the bottom of the opening and in contact with the metal interconnect. An electrode may be formed within the opening, above the metal interconnect, and separated from the metal interconnect by the dielectric layer. After a programming voltage may be applied between the metal interconnect and the electrode to generate a current between the metal interconnect and the electrode, a conductive path may be formed through the dielectric layer to couple the metal interconnect and the electrode, changing the resistance between the metal interconnect and the electrode. Other embodiments may be described and/or claimed.Type: GrantFiled: April 2, 2018Date of Patent: March 1, 2022Assignee: Intel CorporationInventors: Vincent Dorgan, Jeffrey Hicks, Miriam Reshotko, Abhishek Sharma, Ilan Tsameret
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Patent number: 11257757Abstract: A semiconductor device includes a component having a functionality. The semiconductor device further includes an interconnect structure electrically connected to the component. The interconnect structure is configured to electrically connect the component to a signal. The interconnect structure includes a first column of conductive elements and a second column of conductive elements. The interconnect structure further includes a first fuse on a first conductive level a first distance from the component, wherein the first fuse electrically connects the first column of conductive elements to the second column of conductive elements. The interconnect structure further includes a second fuse on a second conductive level a second distance from the component, wherein the second fuse electrically connects the first column of conductive elements to the second column of conductive elements, and the second distance is different from the first distance.Type: GrantFiled: September 17, 2019Date of Patent: February 22, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Meng-Sheng Chang, Shao-Yu Chou, Po-Hsiang Huang, An-Jiao Fu, Chih-Hao Chen
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Patent number: 11189357Abstract: The present application provides a programmable memory device. The programmable memory device includes an active region, a gate structure and an anti-fuse storage unit. The active region is formed in a substrate and having a linear top view shape. The gate structure is disposed on the substrate and having a linear portion intersected with a section of the active region away from end portions of the active region. The anti-fuse storage unit uses a portion of the active region as a terminal, and further comprises an electrode and a dielectric layer. The electrode is disposed on the portion of the active region and spaced apart from the gate structure, and the dielectric layer is sandwiched between the portion of the active region and the electrode.Type: GrantFiled: August 10, 2020Date of Patent: November 30, 2021Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Chin-Ling Huang
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Patent number: 11189565Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a peak portion positioned on the substrate, a gate insulating layer positioned on the peak portion and the substrate, a gate bottom conductive layer positioned on the gate insulating layer, and a first doped region positioned in the substrate and adjacent to one end of the gate insulating layer.Type: GrantFiled: February 19, 2020Date of Patent: November 30, 2021Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Chin-Ling Huang
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Patent number: 11183502Abstract: A memory cell includes a semiconductor substrate, a transistor, and a first anti-fuse structure. The transistor is above the semiconductor substrate. The first anti-fuse structure is above the semiconductor substrate and adjacent the transistor, and includes a first terminal and a second terminal. The first terminal of the first anti-fuse structure is in the semiconductor substrate and laterally surrounds the transistor. The second terminal of the first anti-fuse structure is above and spaced apart from the first terminal of the first anti-fuse structure.Type: GrantFiled: August 20, 2020Date of Patent: November 23, 2021Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Hsih-Yang Chiu
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Patent number: 11114448Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate having a first region and a second region, a first semiconductor element positioned in the first region of the substrate, a second semiconductor element positioned in the first region of the substrate, a bridge conductive unit electrically connected the first semiconductor element and the second semiconductor element, and a programmable unit positioned in the second region and electrically connected to the bridge conductive unit.Type: GrantFiled: July 9, 2019Date of Patent: September 7, 2021Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Cheng-Ling Yang
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Patent number: 11094778Abstract: A method for fabricating a capacitor includes: forming a bottom electrode; forming a dielectric layer on the bottom electrode; forming a metal oxide layer including a metal having a high electronegativity on the dielectric layer; forming a sacrificial layer on the metal oxide layer to reduce the metal oxide layer to a metal layer; and forming a top electrode on the sacrificial layer to convert the reduced metal layer into a high work function interface layer.Type: GrantFiled: May 19, 2020Date of Patent: August 17, 2021Assignee: SK hynix Inc.Inventors: Beom-Yong Kim, Deok-Sin Kil, Hee-Young Jeon
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Patent number: 11043450Abstract: An anti-fuse structure, a method for fabricating the anti-fuse structure, and a semiconductor device are disclosed. The anti-fuse structure includes a semiconductor substrate, a fuse oxide layer, a gate material layer, a first electrode and a second electrode. An active area is defined on the semiconductor substrate by an isolation structure. The active area includes a wide portion and a narrow portion connected to each other. The fuse oxide layer is located on the semiconductor substrate, covers the narrow portion and extends to cover a first part of the wide portion. The gate material layer is formed on the fuse oxide layer. The first electrode is formed on and electrically connected to the gate material layer, while the second electrode is formed on and electrically connected to a second part of the wide portion not covered by the fuse oxide layer.Type: GrantFiled: May 22, 2020Date of Patent: June 22, 2021Assignee: Changxin Memory Technologies, Inc.Inventor: Chih Cheng Liu
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Patent number: 11018144Abstract: An anti-fuse cell includes a control device and an anti-fuse element is introduced. The control device includes a source node, a drain node and a gate node, wherein the gate node is electrically coupled to a word line and the drain node is electrically coupled to a bit line. The anti-fuse element includes a first conductive layer, a second conductive layer and a dielectric layer, wherein the dielectric layer is disposed between the first conductive layer and the second conductive layer. The second conductive layer of the anti-fuse element physically stacks upon and directly contacts a metal layer that is electrically connected to the source node of the control device, and first conductive layer is electrically coupled to a program line through a via. An anti-fuse cell having multiple anti-fuse elements and a chip having a plurality of anti-fuse cells are also introduced.Type: GrantFiled: August 30, 2020Date of Patent: May 25, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Jhon-Jhy Liaw
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Patent number: 11018143Abstract: An antifuse One-Time-Programmable memory cell includes a substrate, and a hybrid select transistor and a hybrid antifuse capacitor formed on the substrate. The hybrid select transistor includes a first gate dielectric layer formed on the substrate, wherein the first gate dielectric layer is thinner than 40 nm, a first high-voltage junction formed in the substrate, and a low-voltage junction formed in the substrate. The hybrid antifuse capacitor includes a second gate dielectric layer, wherein the second gate dielectric layer is thinner than 40 nm, which enables a low-voltage antifuse capacitor device, a second gate formed on the gate dielectric layer, a second high-voltage junction formed in the substrate, and a third high-voltage junction formed in the substrate.Type: GrantFiled: March 12, 2020Date of Patent: May 25, 2021Assignee: Zhuhai Chuangfeixin Technology Co., Ltd.Inventors: Li Li, Zhigang Wang
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Patent number: 10985244Abstract: The present disclosure relates to semiconductor structures and, more particularly, to n-well resistors and methods of manufacture. The structure includes: a substrate composed of a N-well implant region and a deep N-well implant region; and a plurality of shallow trench isolation regions extending into both the N-well implant region and a deep N-well implant region.Type: GrantFiled: June 25, 2019Date of Patent: April 20, 2021Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: Shesh Mani Pandey, Chung Foong Tan, Baofu Zhu
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Patent number: 10916317Abstract: Programmable resistive memory can be fabricated with a non-single-crystalline silicon formed on a flexible substrate. The non-single-crystalline silicon can be amorphous silicon, low-temperature polysilicon (LTPS), organic semiconductor, or metal oxide semiconductor. The flexible substrate can be glass, plastics, paper, metal, paper, or any kinds of flexible film. The programmable resistive memory can be PCRAM, RRAM, MRAM, or OTP. The OTP element can be a silicon, polysilicon, organic or metal oxide electrode. The selector in a programmable resistive memory can be a MOS or diode with top gate, bottom gate, inverted, staggered, or coplanar structures.Type: GrantFiled: February 27, 2020Date of Patent: February 9, 2021Assignee: Attopsemi Technology Co., LTDInventor: Shine C. Chung
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Patent number: 10896894Abstract: Methods of fabricating semiconductor device packages may involve forming trenches in a first wafer. A dielectric material may be placed over a first active surface. Electrically conductive elements may be operatively connected to bond pads of a second wafer with the dielectric material interposed between the first wafer and the second wafer. Force may be applied to the first wafer and the second wafer while exposing the first wafer and the second wafer to an elevated temperature. Portions of the dielectric material may flow into the trenches. The elevated temperature may be reduced to at least partially solidify the dielectric material. A thickness of the first wafer may be reduced to reveal the portions of the dielectric material in the trenches. The first wager may be singulated and the second wafer may be singulated to form semiconductor dice.Type: GrantFiled: October 2, 2018Date of Patent: January 19, 2021Assignee: Micron Technology, Inc.Inventor: Wei Zhou
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Patent number: 10886417Abstract: Techniques and mechanisms for changing a consistency with which a cell circuit (“cell”) settles into a given state. In one embodiment, a cell settles into a preferred state based on a relative polarity between respective voltages of a first rail and a second rail. Based on the preferred state, a hot carrier injection (HCl) stress is applied to change a likelihood of the cell settling into the preferred state. Applying the HCl stress includes driving off-currents of two PMOS transistors of the cell while the relative polarity is reversed. In another embodiment, a cell array comprises multiple cells which are each classified as being a respective one of a physically unclonable function (PUF) type or a random number generator (RNG) type. A cell is selected for biasing, and a stress is applied, based on each of: that cell's preferred state, that cell's classification, and another cell's classification.Type: GrantFiled: March 29, 2019Date of Patent: January 5, 2021Assignee: Intel CorporationInventors: Kuan-Yueh Shen, Rachael Parker, Stephen Ramey
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Patent number: 10797053Abstract: Examples relate generally to the field of semiconductor memory devices. In an example, a memory cell may include an access device coupled to an access line and a gated diode coupled to the access device. The gated diode may include a gate stack structure that includes a direct tunneling material, a trapping material, and a blocking material.Type: GrantFiled: April 18, 2019Date of Patent: October 6, 2020Assignee: Micron Technology, Inc.Inventor: Arup Bhattacharyya
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Patent number: 10763210Abstract: An antifuse structure having enhanced programming efficiency is provided in which there is limited contact between the antifuse material and top and bottom electrodes. The antifuse material has a circular ring shape (i.e., donate shape having a hole in the middle (center) thereof) in which a dielectric material structure composed of a dielectric material having a dielectric constant of great than 4.0 is contained in the hole of the circular ring shaped antifuse material. The antifuse material is composed of a dielectric material having a lower dielectric breakdown strength as compared to the dielectric material structure.Type: GrantFiled: January 3, 2019Date of Patent: September 1, 2020Assignee: International Business Machines CorporationInventors: Chih-Chao Yang, Baozhen Li
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Patent number: 10720389Abstract: An anti-fuse structure includes an active area, a gate electrode over the active area, and a dielectric layer between the active area and the gate electrode. The active area and the gate electrode partially overlap in a vertical projection direction, forming a plurality of channels. One of the gate electrode and the active area includes a plurality of extending portions to form the plurality of channels.Type: GrantFiled: November 2, 2017Date of Patent: July 21, 2020Assignee: NANYA TECHNOLOGY CORPORATIONInventors: Chih-Ying Chang, Jui-Hsiu Jao
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Patent number: 10720457Abstract: An imaging device includes a pixel comprising a photoelectric conversion layer having a first surface and a second surface opposite to the first surface; a pixel electrode on the first surface; an auxiliary electrode on the first surface, the auxiliary electrode being spaced from the pixel electrode; an upper electrode on the second surface, the upper electrode facing the pixel electrode and the auxiliary electrode; and an amplification transistor having a gate coupled to the pixel electrode. The imaging device also includes voltage application circuitry that generates a first voltage and a second voltage different from the first voltage, the voltage application circuitry being coupled to the auxiliary electrode. The voltage application circuitry selectively supplies either the first voltage or the second voltage to the auxiliary electrode.Type: GrantFiled: October 18, 2018Date of Patent: July 21, 2020Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Masayuki Takase, Takayoshi Yamada, Tokuhiko Tamaki
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Patent number: 10680006Abstract: Various embodiments, disclosed herein, include methods and apparatus having charge trap structures, where each charge trap structure includes a dielectric barrier between a gate and a blocking dielectric on a charge trap region of the charge trap structure. In various embodiments, material of the dielectric barrier of each of the charge trap structures may have a dielectric constant greater than that of aluminum oxide. Additional apparatus, systems, and methods are disclosed.Type: GrantFiled: August 11, 2017Date of Patent: June 9, 2020Assignee: Micron Technology, Inc.Inventor: Chris M Carlson
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Patent number: 10664239Abstract: A method of programming a nonvolatile memory cell is provided according to an embodiment of the invention. The nonvolatile memory cell includes a substrate; and a select transistor, a following gate transistor, and an anti-fuse transistor comprising a first gate oxide layer, disposed on the substrate and coupled in series with each other. The programming method includes applying to said nonvolatile memory cell a variable DC voltage source comprising at least one high voltage part for forming a trapping path within the first gate oxide layer and at least one low voltage part for crystallizing the trapping path into a silicon filament.Type: GrantFiled: September 10, 2018Date of Patent: May 26, 2020Assignee: eMemory Technology Inc.Inventors: Kuan-Hsun Chen, Chun-Hung Lu, Ming-Shan Lo
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Patent number: 10644021Abstract: There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.Type: GrantFiled: May 4, 2018Date of Patent: May 5, 2020Assignee: SANDISK TECHNOLOGIES LLCInventors: Thomas H. Lee, Igor G. Kouznetsov
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Patent number: 10629540Abstract: In accordance with some embodiments a via is formed over a semiconductor device, wherein the semiconductor device is encapsulated within an encapsulant 129. A metallization layer and a second via are formed over and in electrical connection with the first via, and the metallization layer and the second via are formed using the same seed layer. Embodiments include fully landed vias, partially landed vias in contact with the seed layer, and partially landed vias not in contact with the seed layer.Type: GrantFiled: July 6, 2018Date of Patent: April 21, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, Hui-Jung Tsai, Hung-Jui Kuo, Chung-Shi Liu, Han-Ping Pu, Ting-Chu Ko
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Patent number: 10593875Abstract: A plurality of memory cells in a cross-point array in which the memory cell stacks in the cross-points include a switch element, a conductive barrier layer, and a memory cell in series, and having sides aligned within the cross-point area of the corresponding cross-point. The memory cells in the stacks include confinement spacers within the cross-point area having outside surfaces on a pair of opposing sides of the stack, and a body of programmable resistance memory material confined between inside surfaces of the spacers.Type: GrantFiled: June 15, 2018Date of Patent: March 17, 2020Assignee: MACRONIX INTERNATIONAL CO., LTD.Inventors: Erh-Kun Lai, Hsiang-Lan Lung
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Patent number: 10566253Abstract: An electronic device includes a substrate, an electronic component disposed over the substrate and an electrical testing component disposed over the substrate. The electronic component includes a bottom plate over the substrate, and a top plate over the bottom plate. The electrical testing component includes a first anti-fuse structure and a second anti-fuse structure, wherein the first anti-fuse structure and the second anti-fuse structure are electrically connected to the bottom plate.Type: GrantFiled: March 12, 2018Date of Patent: February 18, 2020Assignee: NANYA TECHNOLOGY CORPORATIONInventors: Chih-Ying Chang, Jui-Hsiu Jao
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Patent number: 10559530Abstract: Techniques are provided to fabricate metallic interconnect structures in a single metallization level, wherein different width metallic interconnect structures are formed of different metallic materials to eliminate or minimize void formation in the metallic interconnect structures. For example, a semiconductor device includes an insulating layer disposed on a substrate, and a first metallic line and a second metallic line formed in the insulating layer. The first metallic line has a first width, and the second metallic line has a second width which is greater than the first width. The first metallic line is formed of a first metallic material, and the second metallic line is formed of a second metallic material, which is different from the first metallic material. For example, the first metallic material is cobalt or ruthenium, and the second metallic material is copper.Type: GrantFiled: December 27, 2017Date of Patent: February 11, 2020Assignee: International Business Machines CorporationInventors: Hari P. Amanapu, Charan V. Surisetty, Raghuveer R. Patlolla
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Patent number: 10529436Abstract: A one-time programmable memory device includes a first doped region in a semiconductor substrate, a second doped region implanted within the first doped region, and a gate positioned over the second doped region. The first doped region and second doped regions form a diode. A first contact is coupled to the first doped region for applying a voltage to the first doped region. The gate includes a dielectric portion that is capacitively coupled to the second doped region. The gate also includes a conductive portion that is coupled to a second contact for applying a voltage to the conductive portion. The voltage applied to the conductive portion is independent from the voltage applied to the first doped region. The memory device is programmed by forming a rupture in the dielectric portion of the gate.Type: GrantFiled: January 16, 2018Date of Patent: January 7, 2020Assignee: Synopsys, Inc.Inventors: Hrant Sargsyan, Andrew E. Horch
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Patent number: 10504907Abstract: A method for forming an antifuse on a substrate is provided, which comprises: forming a first conductive material on the substrate; placing the first conductive material in an electrolytic solution; performing anodic oxidation on the first conductive material to form a nanowire made of the first conductive material and surrounded by a first dielectric material formed during the anodic oxidation and to form the antifuse on the nanowire; and forming a second conductive material on the antifuse to sandwich the antifuse between the first conductive material and the second conductive material.Type: GrantFiled: March 29, 2018Date of Patent: December 10, 2019Assignees: Taiwan Semiconductor Manufacturing Company Limited, National Taiwan UniversityInventors: Jenn-Gwo Hwu, Wei-Cheng Tian, Samuel C. Pan, Chao-Hsiung Wang, Chi-Wen Liu
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Patent number: 10490374Abstract: One embodiment of the invention includes a phase-change material switch. The switch includes a first terminal that receives an input signal and a second terminal. The switch includes an actuation portion that receives a control signal in one of a first state to emit a first heat profile and a second state to emit a second heat profile. The switch further includes a switch portion comprising a phase-change material arranged as a plurality of longitudinal strips that each interconnect the first terminal and the second terminal and that are each in proximity with the actuation portion. The phase-change material can be selectable between a conducting state in response to the first heat profile to conduct an input signal from the first terminal to the second terminal and a blocking state in response to the second heat profile to block the input signal from the first terminal to the second terminal.Type: GrantFiled: September 12, 2014Date of Patent: November 26, 2019Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: Pavel Borodulin, Nabil Abdel-Meguid El-Hinnawy, Robert Miles Young, Matthew Russell King, Michael J. Lee
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Patent number: 10491787Abstract: Various techniques are provided to facilitate electrostatic discharge mitigation for imaging devices. In one example, an imaging device includes an imager assembly. The imaging device further includes a lens holder. The lens holder includes a receiving interface configured to receive a lens assembly therein. The lens holder further includes an alignment pin including electrically conductive material and coupled to the imager assembly to provide an electrostatic discharge path via the imager assembly, where a first portion of the alignment pin has the electrically conductive material exposed and a second portion of the alignment pin has an insulating layer disposed thereon. Related methods and systems are also provided.Type: GrantFiled: October 9, 2018Date of Patent: November 26, 2019Assignee: FLIR Systems, Inc.Inventors: Mark V. Mullenary, Thad Lieb, Bruce A. Covington
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Patent number: 10347619Abstract: Disclosed is a semiconductor device having an electrostatic discharge protection structure. The electrostatic discharge protection structure is a diode connected between a gate electrode and a source electrode of the semiconductor device. The diode comprises a diode body and two connection portions connected to two ends of the diode body and respectively used for electrically connecting to the gate electrode and the source electrode. Lower parts of the two connection portions are respectively provided with a trench. An insulation layer is provided on an inner surface of the trench and the surface of a substrate between trenches. The diode body is provided on the insulation layer on the surface of the substrate. The connection portions respectively extend downwards into respective trenches from one end of the diode body. A dielectric layer is provided on the diode, and a metal conductor layer is provided on the dielectric layer.Type: GrantFiled: August 19, 2016Date of Patent: July 9, 2019Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.Inventor: Kui Xiao
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Patent number: 10319908Abstract: Providing for a memory device having a resistive switching memory integrated within backend layers of the memory device is described herein. By way of example, the resistive switching memory can be embedded memory such as cache, random access memory, or the like, in various embodiments. The resistive memory can be fabricated between various backend metallization schemes, including backend copper metal layers and in part utilizing one or more damascene processes. In some embodiments, the resistive memory can be fabricated in part with damascene processes and in part with subtractive etch processing, utilizing four or fewer photo-resist masks. Accordingly, the disclosure provides a relatively low cost, high performance embedded memory compatible with a variety of fabrication processes of integrated circuit foundries.Type: GrantFiled: March 3, 2015Date of Patent: June 11, 2019Assignee: Crossbar, Inc.Inventors: Sundar Narayanan, Steve Maxwell, Natividad Vasquez, Jr., Harry Yue Gee
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Patent number: 10304841Abstract: Semiconductor structures containing FinFET anti-fuses with reduced breakdown voltage are provided which can be readily integrated with high performance FinFETs. The anti-fuse includes at least one metal structure having a faceted sidewall. The sharp corner of the faceted sidewall of the at least one metal structure causes an electric field concentration, thus reducing the breakdown voltage of the anti-fuse.Type: GrantFiled: May 1, 2018Date of Patent: May 28, 2019Assignee: International Business Machines CorporationInventors: Praneet Adusumilli, Alexander Reznicek, Oscar van der Straten, Miaomiao Wang, Chih-Chao Yang
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Patent number: 10224278Abstract: A semiconductor device includes a semiconductor substrate comprising an upper layer portion, a first insulating member located in the upper layer portion of the semiconductor substrate and having one or more corner portions, an electrode located on the semiconductor substrate, wherein the electrode overlies at least one of the corner portions of the first insulating member, and an insulating film located between the semiconductor substrate and the electrode.Type: GrantFiled: February 28, 2017Date of Patent: March 5, 2019Assignee: Kabushiki Kaisha ToshibaInventors: Takeshi Yamamoto, Osamu Takata, Mariko Habu, Shinji Kawahara
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Patent number: 10212827Abstract: Techniques and mechanisms for controlling configurable circuitry including an antifuse. In an embodiment, the antifuse is disposed in or on a substrate, the antifuse configured to form a solder joint to facilitate interconnection of circuit components. Control circuitry to operate with the antifuse is disposed in, or at a side of, the same substrate. The antifuse is activated based on a voltage provided at an input node, where the control circuitry automatically transitions through a pre-determined sequence of states in response to the voltage. The pre-determined sequence of states coordinates activation of one or more fuses and switched coupling one or more circuit components to the antifuse. In another embodiment, multiple antifuses, variously disposed in or on the substrate, are configured each to be activated based on the voltage provided at an input node.Type: GrantFiled: July 1, 2016Date of Patent: February 19, 2019Assignee: Intel CorporationInventors: John J. Browne, Andrew Maclean, Shawna M. Liff
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Patent number: 10163526Abstract: The present disclosure relates to a structure which includes a twin-cell memory which is configured to program a plurality of write operations, a current sense amplifier which is connected to the twin-cell memory and is configured to sense a current differential and latch a differential voltage based on the current differential, and at least one current source which is connected to the current sense amplifier and is configured to add an offset current to the current sense amplifier to create the differential voltage.Type: GrantFiled: March 14, 2018Date of Patent: December 25, 2018Assignee: GLOBALFOUNDRIES INC.Inventors: John A. Fifield, Eric D. Hunt-Schroeder, Darren L. Anand
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Patent number: 10160639Abstract: The present disclosure relates to a semiconductor structure for a MEMS device. In some embodiments, the structure includes an interlayer dielectric (ILD) region positioned over a substrate. Further the structure includes an inter-metal dielectric region. The IMD region includes a passivation layer overlying a stacked structure. The stacked structure includes dielectric layers and etch stop layers that are stacked in an alternating fashion. Metal wire layers are disposed within the stacked structure of the IMD region. The structure also includes a sensing electrode electrically connected to the IMD region with an electrode extension via. The structure includes a MEMS substrate comprising a MEMS device having a soft mechanical structure positioned adjacent to the sensing electrode.Type: GrantFiled: June 27, 2016Date of Patent: December 25, 2018Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yu-Chia Liu, Chia-Hua Chu, Chun-Wen Cheng, Jung-Huei Peng
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Patent number: 10163520Abstract: An integrated circuit OTP memory cell has a programming element with enhanced programmability. The programming element has a doped region at the surface of a semiconductor substrate and a conducting layer partially extending over a surface of the semiconductor surface and along a boundary of the doped region. The conducting layer is displaced from the surface of the doped region and the semiconductor substrate by a thin oxide layer. The partially extending conducting layer provides locations to concentrate electric fields and rupture the gate oxide layer during programming.Type: GrantFiled: October 16, 2017Date of Patent: December 25, 2018Assignee: Synopsys, Inc.Inventors: Chun Jian, Larry Wang