Including Programmable Passive Component (e.g., Fuse) Patents (Class 257/529)
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Patent number: 11916015Abstract: A fuse component, a semiconductor device, and a method of manufacturing a fuse component are provided. The fuse component includes an active region having a surface, a fuse dielectric layer extending from the surface of the active region into the active region, and a gate metal layer surrounded by the fuse dielectric layer.Type: GrantFiled: October 26, 2021Date of Patent: February 27, 2024Assignee: NANYA TECHNOLOGY CORPORATIONInventors: Kai-Po Shang, Jui-Hsiu Jao
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Patent number: 11848324Abstract: The present disclosure relates to semiconductor structures and, more particularly, to an eFuse and gate structure on a triple-well and methods of manufacture. The structure includes: a substrate comprising a bounded region; a gate structure formed within the bounded region; and an eFuse formed within the bounded region and electrically connected to the gate structure.Type: GrantFiled: September 23, 2021Date of Patent: December 19, 2023Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: Ephrem G. Gebreselasie, Steven M. Shank, Alain F. Loiseau, Robert J. Gauthier, Jr., Michel J. Abou-Khalil, Ahmed Y. Ginawi
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Patent number: 11823750Abstract: A method for writing into a one-time programmable memory of an integrated circuit includes attempting, by a memory control circuit of the integrated circuit, to write data in at least one first register of the one-time programmable memory; verifying, by the memory control circuit, whether the data has been correctly written in the at least one first register; and, in case the data has not been correctly written in the at least one first register, attempting, by the memory control circuit, to write the data in at least one second register of the one-time programmable memory.Type: GrantFiled: April 29, 2021Date of Patent: November 21, 2023Assignees: STMICROELECTRONICS (ALPS) SAS, STMICROELECTRONICS S.R.L.Inventors: Philippe Sirito-Olivier, Giovanni Luca Torrisi
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Patent number: 11749599Abstract: The present disclosure relates to semiconductor structures and, more particularly, to dual thickness fuse structures and methods of manufacture. The structure includes a continuous wiring structure on a single wiring level and composed of conductive material having a fuse portion and a thicker wiring structure.Type: GrantFiled: November 13, 2020Date of Patent: September 5, 2023Assignee: GLOBALFOUNDRIES INC.Inventors: John J. Pekarik, Anthony K. Stamper, Vibhor Jain
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Patent number: 11664273Abstract: An integrated circuit includes a semiconductor substrate and a metallization structure over the semiconductor substrate. The metallization structure includes: a dielectric layer having a surface; a conductive routing structure; and an electronic circuit. Over the surface of the dielectric layer, a material is configured to set or adjust the electronic circuit.Type: GrantFiled: July 27, 2020Date of Patent: May 30, 2023Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Paul Merle Emerson, Benjamin Stassen Cook
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Patent number: 11600566Abstract: An electronic fuse (e-fuse) module may be formed in an integrated circuit device. The e-fuse module may include a pair of metal e-fuse terminals (e.g., copper terminals) and an e-fuse element formed directly on the metal e-fuse terminals to define a conductive path between the pair of metal e-fuse terminals through the e-fuse element. The metal e-fuse terminals may be formed in a metal interconnect layer, along with various interconnect elements of the integrated circuit device. The e-fuse element may be formed by depositing and patterning a diffusion barrier layer over the metal e-fuse terminals and interconnect elements formed in the metal interconnect layer. The e-fuse element may be formed from a material that provides a barrier against metal diffusion (e.g., copper diffusion) from each of the metal e-fuse terminals and interconnect elements. For example, the e-fuse element may be formed from titanium tungsten (TiW) or titanium tungsten nitride (TiW2N).Type: GrantFiled: April 16, 2021Date of Patent: March 7, 2023Assignee: Microchip Technology IncorporatedInventor: Yaojian Leng
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Patent number: 11588029Abstract: The present disclosure provides a method for manufacturing a semiconductor structure having a vertical fin with an oxidized sidewall. The method of manufacturing the semiconductor structure includes the steps of providing a substrate having a bottom source/drain and a bottom cathode/anode; forming a channel fin on the bottom source/drain of the substrate and a vertical fin on the cathode/anode of the substrate; forming a top source/drain on the channel fin and a top cathode/anode on the vertical fin; forming a gate structure on the channel fin; and forming an oxidized sidewall on the vertical fin.Type: GrantFiled: November 23, 2021Date of Patent: February 21, 2023Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Chin-Ling Huang
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Patent number: 11482451Abstract: A method includes receiving an integrated circuit (IC) layout having a plurality of metal features in a metal layer. The method also includes classifying the plurality of metal features into a first type of metal features and a second type of metal features based on a dimensional criterion, where the first type of the metal features have dimensions greater than the second type of the metal features. The method further includes assigning to the first type of metal features a first metal material, and to the second type of metal features a second metal material, where the second metal material is different from the first metal material. The method additionally includes forming the plurality of metal features embedded within a dielectric layer, where each of the plurality of metal features have the respective assigned metal materials.Type: GrantFiled: November 20, 2020Date of Patent: October 25, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Guanyu Luo, Shin-Yi Yang, Ming-Han Lee, Shau-Lin Shue
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Patent number: 11476190Abstract: Embodiments herein describe techniques for fuse lines and plugs formation. A semiconductor device may include a fuse line having a nominal fuse segment abutted to a necked fuse segment. The nominal fuse segment may be wider than the necked fuse segment. A first spacer may be along a first side of the fuse line and a second spacer along a second side opposite to the first side of the fuse line. The first spacer may include a part having a width at least twice a width of a part of the second spacer. A plug within a vicinity of the necked fuse segment may have a plug width that may be at least twice a plug with of a plug of an interconnect line outside the vicinity. Other embodiments may also be described and claimed.Type: GrantFiled: December 30, 2016Date of Patent: October 18, 2022Assignee: Intel CorporationInventors: Balijeet S. Bains, Charles H. Wallace, Zhanping Chen
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Patent number: 11417737Abstract: The present disclosure provides a semiconductor structure having a vertical fin with an oxidized sidewall and a method for preparing the semiconductor structure. The semiconductor structure includes a substrate, a top source/drain, a channel fin, a gate structure, a top cathode/anode, and a vertical fin. The substrate has a bottom source/drain and a bottom cathode/anode. The top source/drain is disposed above the bottom source/drain of the substrate, and the channel fin connects the top source/drain to the bottom source/drain of the substrate. The gate structure is disposed on the channel fin. The top cathode/anode is disposed above the bottom cathode/anode of the substrate, and the vertical fin connects the top cathode/anode to the bottom cathode/anode of the substrate, wherein the vertical fin has an oxidized sidewall.Type: GrantFiled: July 21, 2020Date of Patent: August 16, 2022Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Chin-Ling Huang
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Patent number: 11410925Abstract: Various fuse structures are disclosed herein that exhibit improved performance, such as reduced electro-migration. An exemplary fuse structure includes an anode, a cathode, and a fuse link extending between the anode and the cathode. A plurality of anode contacts are coupled to the anode, and a plurality of cathode contacts are coupled to the cathode. The plurality of cathode contacts are arranged symmetrically with respect to a centerline of the fuse link.Type: GrantFiled: August 15, 2017Date of Patent: August 9, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shien-Yang Wu, Wei-Chang Kung
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Patent number: 11404372Abstract: A surface-mountable thin-film fuse component is disclosed that may include a substrate having a top surface, a first end, and a second end that is spaced apart from the first end in a longitudinal direction. The thin-film component may include a fuse layer formed over the top surface of the substrate. The fuse layer may include a thin-film fuse track. An external terminal may be disposed along the first end of the substrate and electrically connected with the thin-film fuse track. The external terminal may include a compliant layer comprising a conductive polymeric composition.Type: GrantFiled: April 16, 2020Date of Patent: August 2, 2022Assignee: KYOCERA AVX Components CorporationInventors: Dan Rozbroj, Yehuda Seidman, Elinor O'Neill
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Patent number: 11387095Abstract: Described herein is a method and a power semiconductor device produced by the method. The method includes: forming a structured metallization layer above a semiconductor substrate; forming a protective layer on the structured metallization layer; forming a first passivation over the structured metallization layer with the protective layer interposed between the first passivation and the structured metallization layer; structuring the first passivation to expose one or more regions of the protective layer; removing the one or more exposed regions of the protective layer to expose one or more parts of the structured metallization layer; and after structuring the first passivation and removing the one or more exposed regions of the protective layer, forming a second passivation on the first passivation and electroless plating the one or more exposed parts of the structured metallization layer.Type: GrantFiled: August 21, 2020Date of Patent: July 12, 2022Assignee: Infineon Technologies Austria AGInventors: Ravi Keshav Joshi, Andreas Behrendt, Richard Gaisberger, Anita Satz, Johanna Schlaminger, Johann Schmid, Mario Stanovnik, Juergen Steinbrenner
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Patent number: 11379643Abstract: A method executed at least partially by a processor includes creating a plurality of groups of paths from a plurality of paths in an integrated circuit (IC) layout diagram. Each group among the plurality of groups has a dominant feature among a plurality of features of the plurality of paths. The dominant features of the plurality of groups are different from each other. The method further includes testing at least one path in a group among the plurality of groups. The method also includes, in response to the testing indicating that the at least one path fails, modifying at least one of the IC layout diagram, at least a portion of at least one library having cells included in the IC layout diagram, or a manufacturing process for manufacturing an IC corresponding to the IC layout diagram.Type: GrantFiled: December 15, 2020Date of Patent: July 5, 2022Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY, LIMITEDInventors: Ankita Patidar, Sandeep Kumar Goel, Yun-Han Lee
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Patent number: 11355433Abstract: A semiconductor device having a fuse structure includes a region of semiconductor material having a major surface. A dielectric region is over the major surface. A first fuse terminal is over a first part of the dielectric region, a second fuse terminal is over a second part of the dielectric region and spaced apart from the first fuse terminal to provide a gap region, and a fuse body over a third part of the dielectric region interposed between and connected to the first fuse terminal and the second fuse terminal. A dummy structure is over the dielectric region in the gap region on a first side of the fuse body, the dummy structure spaced apart and electrically isolated from the fuse body, the first fuse terminal, and the second fuse terminal. The dummy structure is configured to reduce the presence of or reduce the effects of defects, such as cracks or voids that can emanate from the fuse structure.Type: GrantFiled: November 5, 2019Date of Patent: June 7, 2022Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Derryl Allman, Jefferson W. Hall
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Patent number: 11348870Abstract: Interconnect structures and methods of fabricating an interconnect structure. A first interconnect and a second interconnect extend in a first direction in a interlayer dielectric layer and are spaced apart from each other. A third interconnect is arranged in the interlayer dielectric layer to connect the first interconnect with the second interconnect. The first interconnect and the second interconnect have a first width, and the third interconnect has a second width that is less than the first width.Type: GrantFiled: July 1, 2020Date of Patent: May 31, 2022Assignee: GlobalFoundries U.S. Inc.Inventors: Jiehui Shu, Xiaoqiang Zhang, Haizhou Yin, Moosung M. Chae, Jinping Liu, Hui Zang
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Patent number: 11322497Abstract: The present disclosure relates to semiconductor structures and, more particularly, to electronic fuse (e-fuse) cells integrated with a bipolar device and methods of manufacture. The structure includes: a bipolar device comprising a collector region, a base region and an emitter region; and an e-fuse integrated with and extending from the emitter region of the bipolar device.Type: GrantFiled: February 10, 2021Date of Patent: May 3, 2022Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: Yves T. Ngu, Ephrem G. Gebreselasie, Vibhor Jain, Johnatan A. Kantarovsky
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Patent number: 11270931Abstract: Methods, systems, and apparatus for reducing power consumption or signal distortions in a semiconductor device package. The semiconductor device package includes a semiconductor device, a first electric path, a second electric path, and an isolation element in the first electric path. The second electric path is electrically connected to the first electric path and a functional unit of the device. The isolation element separates an isolated portion in the first electric path from the second electric path, where the isolation element is configured to reduce current in the isolated portion when a signal is passing through the second electric path.Type: GrantFiled: February 9, 2018Date of Patent: March 8, 2022Assignee: Rambus Inc.Inventors: Adrian E. Ong, Dong Sik Jeong
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Patent number: 11264374Abstract: A method of making an electrostatic discharge (ESD) testing structure includes forming, in a first die, a first measurement device. The method further includes forming, in a second die, a fuse, a first trim pad, and a second trim pad. The method further includes forming, between the first die and the second die, a plurality of electrical bonds, wherein a first bond of the plurality of bonds is electrically connected to the first trim pad and a first side of the fuse, and a second bond of the plurality of bonds is electrically connected to the second trim pad and a second side of the fuse.Type: GrantFiled: August 18, 2020Date of Patent: March 1, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tzu-Heng Chang, Jen-Chou Tseng, Ming-Hsiang Song
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Patent number: 11264516Abstract: A thin film transistor includes a gate electrode, a insulating medium layer and at least one Schottky diode unit. The at least one Schottky diode unit is located on a surface of the insulating medium layer. The at least one Schottky diode unit includes a first electrode, a semiconductor structure and a second electrode. The semiconductor structure comprising a first end and a second end. The first end is laid on the first electrode, the second end is located on the surface of the insulating medium layer. The semiconducting structure includes a nano-scale semiconductor structure. The second electrode is located on the second end.Type: GrantFiled: December 19, 2017Date of Patent: March 1, 2022Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.Inventors: Yu-Dan Zhao, Xiao-Yang Xiao, Ying-Cheng Wang, Yuan-Hao Jin, Tian-Fu Zhang, Qun-Qing Li
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Patent number: 11239160Abstract: E-fuses and techniques for fabrication thereof using dielectric zipping are provided. An e-fuse device includes: a first dielectric layer disposed on a substrate; at least one first electrode of the e-fuse device present in the first dielectric layer; a second dielectric layer disposed on the first dielectric layer; vias present in the second dielectric layer, wherein at least one of the vias is present over the at least one first electrode and has a critical dimension CDA?, wherein the vias adjacent to the at least one via having the critical dimension CDA? each have a critical dimension of CDB?, and wherein CDB?>CDA?; a liner disposed in each of the vias; and a metal that serves as a second electrode of the e-fuse device disposed in each of the vias over the liner. A method of operating an e-fuse device is also provided.Type: GrantFiled: June 16, 2020Date of Patent: February 1, 2022Assignee: International Business Machines CorporationInventors: Tianji Zhou, Saumya Sharma, Ashim Dutta, Chih-Chao Yang
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Patent number: 11227792Abstract: Back end of line metallization structures and methods for fabricating self-aligned vias. The structures generally include a first interconnect structure disposed above a substrate. The first interconnect structure includes a metal line formed in a first interlayer dielectric. A second interconnect structure overlies the first interconnect structure. The second interconnect structure includes a second cap layer on the first interlayer dielectric, a second interlayer dielectric thereon, and at least one self-aligned via in the second interlayer dielectric conductively coupled to at least a portion of the metal line of the first interconnect structure, wherein any misalignment of the at least one self-aligned via results in the at least one self-aligned via landing on both the metal line of the first interconnect structure and the second cap layer. The second cap layer is an insulating material.Type: GrantFiled: September 19, 2019Date of Patent: January 18, 2022Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Chih-Chao Yang, Terry A. Spooner, Koichi Motoyama, Shyng-Tsong Chen
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Patent number: 11171087Abstract: The present disclosure provides a semiconductor structure employing an antifuse structure and a controlling method of the semiconductor structure. The semiconductor structure includes a semiconductor substrate, a transistor and an antifuse structure. The transistor is disposed on the semiconductor substrate. The antifuse structure is disposed on the semiconductor substrate and adjacent to the transistor. The antifuse structure includes a first conductive portion, a fusible portion and a second conductive portion. The first conductive portion is disposed in the semiconductor substrate. The fusible portion is disposed on the first conductive portion. The second conductive portion is disposed on the fusible portion. The antifuse structure encloses the transistor in a top view.Type: GrantFiled: May 6, 2020Date of Patent: November 9, 2021Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Hsih-Yang Chiu
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Patent number: 11152568Abstract: Various embodiments of the present application are directed towards a resistive random-access memory (RRAM) cell including a top-electrode barrier layer configured to block the movement of nitrogen or some other suitable non-metal element from a top electrode of the RRAM cell to an active metal layer of the RRAM cell. Blocking the movement of non-metal element may be prevent formation of an undesired switching layer between the active metal layer and the top electrode. The undesired switching layer would increase parasitic resistance of the RRAM cell, such that top-electrode barrier layer may reduce parasitic resistance by preventing formation of the undesired switching layer.Type: GrantFiled: December 23, 2019Date of Patent: October 19, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsing-Lien Lin, Chii-Ming Wu, Fa-Shen Jiang
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Patent number: 11147197Abstract: Embodiments may relate to a material to provide electrostatic discharge (ESD) protection in an electrical device. The material may include first and second electrically-conductive carbon allotropes. The material may further include an electrically-conductive polymer that is chemically bonded to the first and second electrically-conductive carbon allotropes such that an electrical signal may pass between the first and second electrically-conductive carbon allotropes. Other embodiments may be described or claimed.Type: GrantFiled: October 21, 2019Date of Patent: October 12, 2021Assignee: Intel CorporationInventors: Veronica Aleman Strong, Johanna M. Swan, Aleksandar Aleksov, Adel A. Elsherbini, Feras Eid
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Patent number: 11145380Abstract: Memory cells and methods of forming and operating the same include forming a doped crystalline semiconductor memory layer on a first electrode. The doped crystalline semiconductor memory layer has a programmable dopant activation level that determines a resistance of the doped crystalline semiconductor memory layer. A second electrode is formed on the doped crystalline semiconductor memory layer.Type: GrantFiled: April 29, 2020Date of Patent: October 12, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Heng Wu, Tenko Yamashita, Oleg Gluschenkov, Alexander Reznicek
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Patent number: 11107764Abstract: Group III-V semiconductor fuses and their methods of fabrication are described. In an example, a fuse includes a gallium nitride layer on a substrate. An oxide layer is disposed in a trench in the gallium nitride layer. A first contact is on the gallium nitride layer on a first side of the trench, the first contact comprising indium, gallium and nitrogen. A second contact is on the gallium nitride layer on a second side of the trench, the second side opposite the first side, the second contact comprising indium, gallium and nitrogen. A filament is over the oxide layer in the trench, the filament coupled to the first contact and to the second contact wherein the filament comprises indium, gallium and nitrogen.Type: GrantFiled: September 28, 2017Date of Patent: August 31, 2021Assignee: Intel CorporationInventors: Han Wui Then, Marko Radosavljevic, Sansaptak Dasgupta, Tristan A. Tronic, Rajat K. Paul
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Patent number: 11101213Abstract: An eFuse structure including a semiconductor substrate; back end of the line (BEOL) metallization levels on the semiconductor substrate; vias extending through the metallization levels; at least one of the metallization levels including one or more metallic plates in electrical contact with one of the vias, the one or more metallic plates having at least one fusible link in electrical contact with one or more additional vias. The eFuse structure may form a multi-fuse structure such that each fusible link may be fused separately or together at the same time.Type: GrantFiled: January 28, 2020Date of Patent: August 24, 2021Assignee: International Business Machines CorporationInventors: Baozhen Li, Chih-Chao Yang, Jim Shih-Chun Liang, Tian Shen
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Patent number: 11089689Abstract: Fine feature formation techniques for printed circuit boards are described. In one embodiment, for example, a method may comprise fabricating a conductive structure 306 on a low density interconnect (LDI) printed circuit board (PCB) 150 according to an LDI fabrication process and forming one or more fine conductive features on the LDI PCB by performing a fine feature formation (FFF) process, the FFF process to comprise removing conductive material of the conductive structure along an excision path to form a fine gap region 308 within the conductive structure. Other embodiments are described and claimed.Type: GrantFiled: April 2, 2016Date of Patent: August 10, 2021Assignee: INTEL CORPORATIONInventors: Eric Li, Kemal Aygun, Kai Xiao, Gong Ouyang, Zhichao Zhang
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Patent number: 11075183Abstract: A semiconductor device includes a semiconductor substrate and a connection terminal, including a base pillar, on the semiconductor substrate. An insulation layer is formed on the semiconductor substrate, the insulation layer including an opening in the insulation layer through which the base pillar extends, wherein a side wall of the insulation layer defining the opening includes a horizontal step at a level that is lower than an uppermost portion of the base pillar.Type: GrantFiled: June 28, 2019Date of Patent: July 27, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ju-Ik Lee, Dong-Wan Kim, Seokho Shin, Jung-Hoon Han, Sang-Oh Park
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Patent number: 11031689Abstract: A rapid testing read out integrated circuit (ROIC) includes phase-change material (PCM) radio frequency (RF) switches residing on an application specific integrated circuit (ASIC). Each PCM RF switch includes a PCM and a heating element transverse to the PCM. The ASIC is configured to provide amorphizing and crystallizing electrical pulses to a selected PCM RF switch. The ASIC is also configured to determine if the selected PCM RF switch is in an OFF state or in an ON state. In one implementation, a testing method using the ASIC is disclosed.Type: GrantFiled: May 27, 2020Date of Patent: June 8, 2021Assignee: Newport Fab, LLCInventors: David J. Howard, Gregory P. Slovin, Nabil Ei-Hinnawy
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Patent number: 11011462Abstract: The present disclosure relates to a semiconductor device. A fuse layer is arranged within a first dielectric layer. A bond pad is arranged on the first dielectric layer. A second dielectric layer is arranged along sidewall and upper surfaces of the bond pad. A passivation layer is arranged over the first and second dielectric layers, and the passivation layer having a bond pad opening overlying the bond pad and a fuse opening overlying the fuse layer. The bond pad has a bottom surface that is co-planar with a bottom surface of the passivation layer.Type: GrantFiled: November 14, 2016Date of Patent: May 18, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tai-I Yang, Chun-Yi Yang, Chih-Hao Lin, Hong-Seng Shue, Ruei-Hung Jang
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Patent number: 10962341Abstract: Techniques and architecture are disclosed for a system that includes a fuze at a leading end of a projectile body and a fuze setter configured to engage the fuze and to program the same prior to launch. The system, in one example, includes a plurality of electrical contact pads on an exterior surface of a fuze radome housing and a plurality of electrical contact pins on the fuze setter. The electrical contact pads are arranged in a rotationally symmetric pattern that enables an electrical interface to be formed with the electrical contact pins, regardless of the rotational orientation of the fuze. Commutation is performed to rotate signals to the electrical contact pins instead of requiring that the fuze be physically rotated to bring the electrical contact pads into alignment with the electrical contact pins.Type: GrantFiled: January 23, 2019Date of Patent: March 30, 2021Assignee: BAE Systems Information and Electronic Systems Integration Inc.Inventors: Francis M. Feda, John R. Franzini, Gregory S. Notaro
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Patent number: 10957642Abstract: A semiconductor structure includes a resistance tunable fuse stack structure. A fabrication method for forming the same includes forming on a substrate layer a first fuse conductive layer, directly on, and contacting a top surface of, the substrate layer, followed by forming a first inter-layer dielectric (ILD) layer, directly on, and contacting a top surface of, the first fuse conductive layer. The method forms a second fuse conductive layer, directly on, and contacting a top surface of, the first ILD layer, followed by forming a second ILD layer, directly on, and contacting a top surface of, the second fuse conductive layer, the layers are interleaved in a stack forming a fuse stack structure. First and second fuse electrical contacts are formed in the fuse stack structure vertically extending through the layers and contacting the first and second fuse conductive layers.Type: GrantFiled: September 20, 2019Date of Patent: March 23, 2021Assignee: International Business Machines CorporationInventors: Alexander Reznicek, Chih-Chao Yang, Miaomiao Wang, Donald Francis Canaperi
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Patent number: 10935590Abstract: A semiconductor wafer includes a semiconductor substrate having a plurality of die areas separated from one another by dicing areas. Each die area includes one or more metal layers above the semiconductor substrate and a plurality of fuse structures formed in at least one of the one or more metal layers. Each fuse structure includes a fuse area between first and second fuse heads. Each die area also includes a first pair of contacts connected to different areas of the first fuse head of at least some of the fuse structures. The wafer can be singulated along the dicing areas into individual dies. A corresponding method of fuse verification is also provided.Type: GrantFiled: October 17, 2017Date of Patent: March 2, 2021Assignee: Infineon Technologies AGInventors: Dietrich Bonart, Thomas Gross, Franziska Haering
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Patent number: 10937759Abstract: This disclosure relates to a radio frequency (RF) transmission line for high performance RF applications. The RF transmission line includes a bonding layer having a bonding surface and configured to receive an RF signal, a barrier layer proximate the bonding layer, a diffusion barrier layer proximate the bonding layer and configured to prevent contaminant from entering the bonding layer, and a conductive layer proximate the diffusion barrier layer. The diffusion barrier layer has a thickness that allows the received RF signal to penetrate the diffusion barrier layer to the conductive layer. The diffusion barrier layer can be a nickel layer.Type: GrantFiled: May 11, 2017Date of Patent: March 2, 2021Assignee: Skyworks Solutions, Inc.Inventors: Sandra Louise Petty-Weeks, Guohao Zhang, Hardik Bhupendra Modi
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Patent number: 10916500Abstract: Reliability of a semiconductor device is improved. The semiconductor device includes a silicon pattern for a fuse element, a metal silicide layer formed on an upper surface and a side surface of the silicon pattern, a gate electrode for MISFET, and a metal silicide layer formed on an upper surface of the gate electrode. The height from the lower surface of the silicon pattern to the lower end of the metal silicide layer is lower than the height from the lower surface of the gate electrode to the lower end of the metal silicide layer.Type: GrantFiled: July 26, 2019Date of Patent: February 9, 2021Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Tomohiko Aika, Takayuki Igarashi, Takehiro Ochi
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Patent number: 10916501Abstract: Techniques facilitating back end of line electrical fuse structure and method of fabrication are provided. A device can comprise a first metal interconnect formed in a dielectric layer of a semiconductor chip. The device can also comprise a second metal interconnect formed in the dielectric layer and adjacent to the first metal interconnect. Further, the device can comprise a vertical electrical fuse element comprising a first portion of a conductive material deposited on a first surface of the first metal interconnect and a second portion of the conductive material deposited on a second surface of the second metal interconnect. The vertical electrical fuse element can comprise a first region comprising a first thickness and a second region comprising a second thickness different than the first thickness.Type: GrantFiled: January 24, 2020Date of Patent: February 9, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Benjamin D. Briggs, Lawrence A. Clevenger, Michael Rizzolo, Chih-Chao Yang
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Patent number: 10910308Abstract: The present disclosure relates to semiconductor structures and, more particularly, to dual thickness fuse structures and methods of manufacture. The structure includes a continuous wiring structure on a single wiring level and composed of conductive material having a fuse portion and a thicker wiring structure.Type: GrantFiled: May 9, 2018Date of Patent: February 2, 2021Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: John J. Pekarik, Anthony K. Stamper, Vibhor Jain
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Patent number: 10903162Abstract: A method for fabricating an electronic fuse includes forming a recess within a film material to define opposed contact segments and a central fuse segment interconnecting the contact segments and altering the material of the central fuse segment of the film material to increase electrical resistance characteristics of the central fuse segment. The central fuse segment may include defects such as voids created by directing a laser at the central fuse segment as a component of a laser annealing process. Alternatively, and or additionally, the central fuse segment may include dopants implementing via an ion implantation process to increase resistance characteristics of the central fuse segment.Type: GrantFiled: March 5, 2019Date of Patent: January 26, 2021Assignee: International Business Machines CorporationInventors: Liying Jiang, Juntao Li, Chih-Chao Yang, Michael Rizzolo, Yi Song
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Patent number: 10886216Abstract: The present disclosure provides an electric fuse structure and a manufacturing method therefor, the manufacturing method including providing a substrate, forming a polysilicon corresponding to the electric fuse structure on the substrate, performing a source-drain ion implantation of a first doping type on the polysilicon, performing a source-drain ion implantation of a second doping type on the polysilicon, the first doping type being different from the second doping type, and forming a metal salicide on the surface of the doped polysilicon. The electric fuse structure manufactured according to the manufacturing method provided in the present disclosure has a high post-value resistance, so that a programming current window is effectively optimized, and the manufactured electric fuse structure has a uniform internal interface and good electrical characteristics.Type: GrantFiled: November 16, 2018Date of Patent: January 5, 2021Assignee: SHANGHAI HUALI INTEGRATED CIRCUIT MFG. CO., LTD.Inventors: Yanwei Zhang, Runling Li, Tianpeng Guan
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Patent number: 10868239Abstract: A method includes forming Magnetic Tunnel Junction (MTJ) stack layers, which includes depositing a bottom electrode layer; depositing a bottom magnetic electrode layer over the bottom electrode layer; depositing a tunnel barrier layer over the bottom magnetic electrode layer; depositing a top magnetic electrode layer over the tunnel barrier layer; and depositing a top electrode layer over the top magnetic electrode layer. The method further includes patterning the MTJ stack layers to form a MTJ; and performing a passivation process on a sidewall of the MTJ to form a protection layer. The passivation process includes reacting sidewall surface portions of the MTJ with a process gas comprising elements selected from the group consisting of oxygen, nitrogen, carbon, and combinations thereof.Type: GrantFiled: October 25, 2018Date of Patent: December 15, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tai-Yen Peng, Yu-Shu Chen, Sin-Yi Yang, Chen-Jung Wang, Chien Chung Huang, Han-Ting Lin, Jyu-Horng Shieh, Qiang Fu
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Patent number: 10867945Abstract: A chip part according to the present invention includes a substrate having a penetrating hole, a pair of electrodes formed on a front surface of the substrate and including one electrode overlapping the penetrating hole in a plan view and another electrode facing the one electrode, and an element formed on the front surface side of the substrate and electrically connected to the pair of electrodes.Type: GrantFiled: September 19, 2019Date of Patent: December 15, 2020Assignee: ROHM CO., LTD.Inventor: Hiroki Yamamoto
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Patent number: 10840049Abstract: Fuse programming circuits, devices and methods. In some embodiments, a fuse circuit can include a fuse pad configured to receive a voltage, a fuse having a first end coupled to the fuse pad and a second end coupled to a switching element configured to enable a current to pass from the fuse pad to a ground potential.Type: GrantFiled: July 15, 2018Date of Patent: November 17, 2020Assignee: Skyworks Solutions, Inc.Inventor: Bo Zhou
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Patent number: 10811354Abstract: Embodiments of the present disclosure describe apparatuses, methods, and systems associated with a fuse array of an integrated circuit. An integrated circuit may include a first metallization layer including a plurality of trenches separated by an interlayer dielectric (ILD), wherein the ILD forms a protrusion that extends above a top surface of the trenches. An etch stop layer may be disposed on the first metallization layer. The integrated circuit may further include a fuse disposed on the etch stop layer, wherein the fuse includes a fuse channel coupled between an anode and a cathode, wherein the fuse channel is disposed directly above the protrusion and is in contact with the etch stop layer. The integrated circuit may additionally or alternatively include one or more dummy regions adjacent to the fuse channel and separated from the fuse channel by a dielectric material. Other embodiments may be described and/or claimed.Type: GrantFiled: June 30, 2016Date of Patent: October 20, 2020Assignee: Intel CorporationInventors: Gwang-Soo Kim, Doug B. Ingerly
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Patent number: 10784195Abstract: Interconnect structures and methods of fabricating an interconnect structure. A first interconnect and a second interconnect extend in a first direction in a interlayer dielectric layer and are spaced apart from each other. A third interconnect is arranged in the interlayer dielectric layer to connect the first interconnect with the second interconnect. The first interconnect and the second interconnect have a first width, and the third interconnect has a second width that is less than the first width.Type: GrantFiled: April 23, 2018Date of Patent: September 22, 2020Assignee: GLOBALFOUNDRIES INC.Inventors: Jiehui Shu, Xiaoqiang Zhang, Haizhou Yin, Moosung M. Chae, Jinping Liu, Hui Zang
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Patent number: 10775631Abstract: According to various embodiments, an electronic device includes: a housing including: a first plate; a second plate facing a direction opposite a direction of the first plate; and a sidewall surrounding a first space between the first plate and the second plate, the first space being a sealed space; and at least one electronic component arranged in the first space of the housing, wherein at least a part of the sidewall of the housing includes a moisture induction portion configured to induce moisture in the first space to be generated in a moisture induction region of the moisture induction portion that may be due, for example, to a difference in temperature between the first space and an external environment.Type: GrantFiled: February 19, 2019Date of Patent: September 15, 2020Assignee: Samsung Electronics Co., Ltd.Inventors: Sukjin Yun, Seunghoon Kang, Kyeongsoo Kim, Jaecheon Kim, Hongki Moon, Yoonsun Park, Hyunjin Bai, Jaewook Jeong, Seungbo Hong, Jiseong Hwang
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Patent number: 10770393Abstract: Back end of the line precision resistors that allow for high currents and for configuration as an eFuse by embedding a single thin film high resistive metal material within a dielectric layer, wherein the resisters are coupled to sidewalls of adjacent metal interconnects are described. The resistors can be formed in the metal one (M1) dielectric layer and can be coupled to sidewalls of the M1 interconnects. Also described are processes for fabricating integrated circuits including the resistors and/or e-Fuses.Type: GrantFiled: March 20, 2018Date of Patent: September 8, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Andrew Tae Kim, Baozhen Li, Ernest Y. Wu, Chih-Chao Yang
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Patent number: 10756082Abstract: A method of making an electrostatic discharge (ESD) testing structure includes forming, in a first die, a first measurement device. The method further includes forming, in a second die, a fuse, a first trim pad, and a second trim pad. The method further includes forming, between the first die and the second die, a plurality of electrical bonds, wherein a first bond of the plurality of bonds is electrically connected to the first trim pad and a first side of the fuse, and a second bond of the plurality of bonds is electrically connected to the second trim pad and a second side of the fuse.Type: GrantFiled: June 17, 2019Date of Patent: August 25, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tzu-Heng Chang, Jen-Chou Tseng, Ming-Hsiang Song
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Patent number: 10727181Abstract: A fuse structure includes a fusing line including a first portion, a second portion, and a central portion between the first portion and the second portion; and a dummy fuse neighboring the fusing line, the dummy fuse may include: a first air dummy fuse including a plurality of first air gaps extending in a first direction parallel to the fusing line; and a second air dummy fuse including a second air gap extending in a second direction crossing the fusing line.Type: GrantFiled: November 20, 2018Date of Patent: July 28, 2020Assignee: SK hynix Inc.Inventors: Jae-Hong Kim, Seo-Woo Nam