Combined With Resistor To Form Rc Filter Structure Patents (Class 257/533)
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Patent number: 12211838Abstract: A method of making a semiconductor device, includes: providing a first dielectric layer; sequentially forming a first metal layer, a dummy capacitor dielectric layer, and a second metal layer over the first dielectric layer; and using a single mask layer with two patterns to simultaneously recess two portions of the second metal layer so as to define a metal thin film of a resistor and a top metal plate of a capacitor.Type: GrantFiled: August 10, 2023Date of Patent: January 28, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chen-Hsiang Hung, Li-Hsin Chu, Chia-Ping Lai, Chung-Chuan Tseng
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Patent number: 11756955Abstract: A method of making a semiconductor device, includes: providing a first dielectric layer; sequentially forming a first metal layer, a dummy capacitor dielectric layer, and a second metal layer over the first dielectric layer; and using a single mask layer with two patterns to simultaneously recess two portions of the second metal layer so as to define a metal thin film of a resistor and a top metal plate of a capacitor.Type: GrantFiled: October 22, 2021Date of Patent: September 12, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chen-Hsiang Hung, Li-Hsin Chu, Chia-Ping Lai, Chung-Chuan Tseng
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Patent number: 11592326Abstract: A filling level indicator for determining a filling level in a tank, having a resistor network, a contact element, and a magnetic element. The contact element is spaced apart from the resistor network and the magnetic element is movable relative to the resistor network and the contact element. The contact element has a contact region deflectable by the magnetic element. An electrically conductive connection between the contact region and the resistor network is produced by deflection of the contact region. The contact region is formed by a planar tape-shaped element and the contact region has contact portions that are spaced apart from one another in the circumferential direction. The contact portions are separated from one another by separation regions.Type: GrantFiled: July 12, 2017Date of Patent: February 28, 2023Assignee: VITESCO TECHNOLOGIES GMBHInventors: Alexander Cezanne, Hans-Guenter Benner, Matthias Kadler
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Patent number: 10865759Abstract: A battery system for a vehicle is provided. The battery system includes a supercapacitor device that is configured to supply power to one or more components of the vehicle in response to various conditions.Type: GrantFiled: August 24, 2018Date of Patent: December 15, 2020Assignee: A Tech Aerospace, Inc.Inventor: Sumit Isaranggulnaayudhya
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Patent number: 10515911Abstract: Semiconductor devices include an interlayer insulating layer on a substrate, a first capacitor structure in the interlayer insulating layer, and a conductive layer including a terminal pad on the interlayer insulating layer. The first capacitor structure includes at least one first laminate, the at least one first laminate including a first lower electrode, a first capacitor insulating layer, and a first upper electrode sequentially on the substrate. The terminal pad does not overlap with the first capacitor structure.Type: GrantFiled: August 21, 2015Date of Patent: December 24, 2019Assignee: Samsung Electronics Co., Ltd.Inventors: HyunSuk Chun, Jong-Woo Park, Chul-Yong Park, Jeong-Won Yoon
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Patent number: 10388461Abstract: The present invention generally relates to arrangements for capacitors, for example, for energy storage and other applications. Certain aspects are generally directed to a plurality of capacitors, packed into various 2- and 3-dimensional arrays. The capacitors may have any suitable shape, including spherical and/or cylindrical. The capacitors may be packed into a variety of efficient arrangements, for example, face-centered cubic arrangements, hexagonal close packed arrangements, Barlow packing arrangements, or the like. In some cases, such capacitors may be packed with packing fractions of at least 55%, 60%, or more. Other embodiments of the present invention are generally directed to methods of making or using such capacitor arrangements, kits involving such capacitor arrangements, or the like.Type: GrantFiled: August 2, 2017Date of Patent: August 20, 2019Assignee: PerriQuest Defense Research Enterprises, LLCInventor: Nicholas V. Perricone
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Patent number: 10361018Abstract: A method for producing a multilayer component (21) is specified, which involves providing a body having dielectric layers (3) arranged one above another and first and second electrically conductive layers (4, 84, 5, 85) arranged therebetween. The first conductive layers (4, 84) are connected to a first auxiliary electrode (6) and the second conductive layers (5, 85) are connected to a second auxiliary electrode (7). The body (1, 81) is introduced into a medium and a voltage is applied between the first and second auxiliary electrodes (6, 7) for producing a material removal. Furthermore, a multilayer component is specified, which has depressions (20) formed by an electrochemically controlled material removal.Type: GrantFiled: June 6, 2013Date of Patent: July 23, 2019Assignee: EPCOS AGInventors: Franz Rinner, Dieter Somitsch, Christoph Auer, Gerhard Fuchs
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Patent number: 10326028Abstract: A resistor may include a semiconductor layer having a source region, a drain region, and a channel region. The channel region may be between the source region and the drain region. The channel region may have a same polarity as the source region and the drain region. The resistor may further include a first inter-metal dielectric (IMD) layer on the channel region. The resistor may further include a front-side gate shield on the first IMD layer. The front-side gate shield may overlap the channel region.Type: GrantFiled: January 8, 2018Date of Patent: June 18, 2019Assignee: QUALCOMM IncorporatedInventors: Plamen Vassilev Kolev, Sinan Goktepeli, Peter Graeme Clarke
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Patent number: 10083649Abstract: An analogue semiconductor device and a semiconductor IC device including the same include a substrate having a transistor, a MIM capacitor electrically separated from the transistor on the substrate and having a lower electrode, a dielectric layer and an upper electrode, interlayer insulation covering the transistor and the MIM capacitor and a BEOL resistor connected to the upper electrode and equipotential with the lower electrode. The BEOL resistor has a relatively large and easy-variable resistance with minimized parasitic capacitance between the resistor and the lower electrode of the MIM capacitor.Type: GrantFiled: November 15, 2016Date of Patent: September 25, 2018Assignee: Samsung Electronics Co., Ltd.Inventor: Myoung-Soo Kim
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Patent number: 9966182Abstract: This disclosure relates generally to semiconductors, and more particularly, to structures and methods for implementing high performance multi-frequency inductors with airgaps or other low-k dielectric material. The structure includes: a plurality of concentric conductive bands; a low-k dielectric area selectively placed between inner windings of the plurality of concentric conductive bands; and insulator material with a higher-k dielectric material than the low-k dielectric area selectively placed between remaining windings of the plurality of concentric conductive bands.Type: GrantFiled: November 16, 2015Date of Patent: May 8, 2018Assignee: GLOBALFOUNDRIES INC.Inventors: Anthony K. Stamper, Venkata Narayana Rao Vanukuru
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Patent number: 9947459Abstract: A surface mounted electronic component includes a first frame terminal including a first end surface frame extending in a first direction and first upper and lower surface frames extending from upper and lower ends of the first end surface frame in a second direction; a second frame terminal including a second end surface frame opposing the first end surface frame and extending in the first direction and second upper and lower surface frames extending from upper and lower ends of the second end surface frame in a third direction opposite to the second direction; a first electronic component disposed between the first and second end surface frames below the first and second upper surface frames; and a second electronic component disposed on the first and second upper surface frames.Type: GrantFiled: December 1, 2015Date of Patent: April 17, 2018Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.Inventors: Heung Kil Park, Sang Soo Park
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Patent number: 9875848Abstract: An exemplary MIM capacitor may include a first metal plate, a dielectric layer on the first metal plate, a second metal plate on the dielectric layer, a via layer on the second metal plate, and a third metal plate on the via layer where the second metal plate has a tapered outline with a first side and a second side longer than the first side such that the second side provides a lower resistance path for a current flow.Type: GrantFiled: December 21, 2015Date of Patent: January 23, 2018Assignee: QUALCOMM IncorporatedInventors: David Francis Berdy, Daeik Daniel Kim, Niranjan Sunil Mudakatte, Je-Hsiung Jeffrey Lan, Chengjie Zuo, Changhan Hobie Yun, Mario Francisco Velez, Jonghae Kim
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Patent number: 9673173Abstract: An integrated circuit package with embedded passive structures may include first and second integrated circuit dies that are surrounded by capacitor structures. A molding compound is deposited to encapsulate the integrated circuit dies and the capacitor structures. The molding compound is then attached to a redistribution wafer, in which the integrated circuit dies and the capacitor structures are electrically connected to metal routing layers of the redistribution wafer. A conductive layer is subsequently formed over the first integrated circuit die in the molding compound. The conductive layer is made up of additional metal routing layers and inductor structures. The integrated circuit package may further include a group of conductive vias that is formed in the molding compound. Each conductive via has a first end contacting the metal routing layers of the distribution wafer, and a second end contacting the conductive layer.Type: GrantFiled: July 24, 2015Date of Patent: June 6, 2017Assignee: Altera CorporationInventors: Zhe Li, Yuanlin Xie
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Patent number: 9396993Abstract: The present disclosure relates to a method for forming a semiconductor device. The method includes forming a first aluminum pad layer on a metal layer, forming an adhesion layer on the first aluminum pad layer, etching the adhesion layer so as to form a patterned adhesion layer, and forming a second aluminum pad layer on the first aluminum pad layer and the patterned adhesion layer.Type: GrantFiled: April 18, 2014Date of Patent: July 19, 2016Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventors: Xinpeng Wang, Chenglong Zhang, Ruixuan Huang
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Patent number: 9136319Abstract: Generally, the subject matter disclosed herein relates to various methods of making a capacitor with a sealing liner and a semiconductor device including such a capacitor. In one example, the method includes forming a layer of insulating material, forming a capacitor opening in the layer of insulating material, forming a sealing liner on the sidewalls of the capacitor opening and forming a first metal layer in the capacitor opening and on the sealing liner by performing a process using a precursor having a minimum particle size, wherein the sealing liner is made of a material having an opening size that is less than the minimum particle size of the precursor.Type: GrantFiled: December 21, 2011Date of Patent: September 15, 2015Assignee: GLOBALFOUNDRIES Inc.Inventor: Ralf Richter
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Patent number: 9029983Abstract: In one embodiment, a chip comprises a capacitor and a resistor. The capacitor comprises a first capacitor terminal, a second capacitor terminal, and a dielectric layer between the first and second capacitor terminals. The second capacitor terminal and the resistor are both fabricated from a resistor metal layer.Type: GrantFiled: October 3, 2013Date of Patent: May 12, 2015Assignee: QUALCOMM IncorporatedInventors: Xiangdong Chen, Haining Yang
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Publication number: 20150108607Abstract: An integrated circuit includes a stacked MIM capacitor and a thin film resistor and methods of fabricating the same are disclosed. A capacitor bottom metal in one capacitor of the stacked MIM capacitor and the thin film resistor are substantially at the same layer of the integrated circuit, and the capacitor bottom metal and the thin film resistor are also made of substantially the same materials. The integrated circuit with both of a stacked MIM capacitor and a thin film resistor can be made in a cost benefit way accordingly, so as to overcome disadvantages mentioned above.Type: ApplicationFiled: October 17, 2013Publication date: April 23, 2015Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shao-Yu CHEN, Chih-Ping Chao, Chun-Hung Chen, Chung-Long Chang, Kuan-Chi Tsai, Wei-Kung Tsai, Hsiang-Chi Chen, Ching-Chung Hsu, Cheng-Chang Hsu, Yi-Sin Wang
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Publication number: 20150084161Abstract: A system interconnect includes a first resistor-capacitor (RC) clamp having a first RC time constant. The system interconnect also includes second RC clamps having a second RC time constant. The first and second RC clamps are arranged along the system interconnect. In addition, the first RC time constant is different from the second RC time constant.Type: ApplicationFiled: September 26, 2013Publication date: March 26, 2015Applicant: QUALCOMM IncorporatedInventors: Eugene Robert WORLEY, Reza JALILIZEINALI, Sreeker DUNDIGAL
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Patent number: 8980703Abstract: A method of forming a semiconductor structure is provided. A substrate having a cell area and a periphery area is provided. A stacked structure including a gate oxide layer, a floating gate and a first spacer is formed on the substrate in the cell area and a resistor is formed on the substrate in the periphery area. At least two doped regions are formed in the substrate beside the stacked structure. A dielectric material layer and a conductive material layer are sequentially formed on the substrate. A patterned photoresist layer is formed on the substrate to cover the stacked structure and a portion of the resistor. The dielectric material layer and the conductive material layer not covered by the patterned photoresist layer are removed, so as to form an inter-gate dielectric layer and a control gate on the stacked structure, and simultaneously form a salicide block layer on the resistor.Type: GrantFiled: October 3, 2014Date of Patent: March 17, 2015Assignee: Maxchip Electronics Corp.Inventors: Chen-Chiu Hsu, Tung-Ming Lai, Kai-An Hsueh, Ming-De Huang
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Patent number: 8970003Abstract: System and method for embedded passive integration relating to a multi-chip packaged device. The packaged device includes a capacitance layer that is configured for electrical coupling to a power supply and to a reference power supply. Further, the capacitance layer is configured for filtering the power supply and providing a filtered power supply. A semiconductor layer including a logic device is configured for electrical coupling to the filtered power supply.Type: GrantFiled: July 29, 2011Date of Patent: March 3, 2015Assignee: Tessera, Inc.Inventor: Michael Curtis Parris
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Patent number: 8963277Abstract: A semiconductor structure with a high voltage area and a low voltage area includes a substrate of a first conductivity type accommodating the high voltage area and the low voltage area. A resistor is on the substrate, connecting the high voltage area and the low voltage area, and the resistor resides substantially in the high voltage area. The structure further includes a first doped region of the first conductivity type in the substrate between the high voltage area and the low voltage area, and a second doped region of a second conductivity type between the substrate and the first doped region. Moreover, an insulating layer is formed between the resistor and the first doped region.Type: GrantFiled: May 30, 2013Date of Patent: February 24, 2015Assignee: MACRONIX International Co., Ltd.Inventors: Chen-Yuan Lin, Ching-Lin Chan, Cheng-Chi Lin, Shih-Chin Lien
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Patent number: 8946832Abstract: A representative filter comprises a silicon-on-insulator substrate having a top surface, a metal shielding positioned above the top surface of the silicon-on-insulator substrate, and a band-pass filter device positioned above the metal shielding. The band-pass filter device includes a first port, a second port, and a coupling metal positioned between the first and second ports.Type: GrantFiled: February 5, 2010Date of Patent: February 3, 2015Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chia-Chung Chen, Chewn-Pu Jou, Chin-Wei Kuo
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Patent number: 8890290Abstract: When two loudspeakers play the same signal, a “phantom center” image is produced between the speakers. However, this image differs from one produced by a real center speaker. In particular, acoustical crosstalk produces a comb-filtering effect, with cancellations that may be in the frequency range needed for the intelligibility of speech. Methods for using phase decorrelation to fill in these gaps and produce a flatter magnitude response are described, reducing coloration and potentially enhancing dialogue clarity. These methods also improve headphone compatibility and reduce the tendency of the phantom image to move toward the nearest speaker.Type: GrantFiled: August 8, 2013Date of Patent: November 18, 2014Assignee: STMicroelectronics, Inc.Inventor: Earl C. Vickers
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Patent number: 8853560Abstract: An electromagnetic bandgap structure and a printed circuit board that solve a mixed signal problem are disclosed. In accordance with embodiments of the present invention, the electromagnetic bandgap structure includes a first metal layer; a first dielectric layer, stacked in the first metal layer; a second metal layer, stacked in the first dielectric layer, and having a holed formed at a position of the second dielectric layer; a second dielectric layer, stacked in the second metal layer; a metal plate, stacked in the second dielectric layer; a first via, penetrating the hole formed in the second metal layer and connecting the first metal layer and the metal plate; a third dielectric layer, stacked in the metal plate and the second dielectric layer; a third metal layer, stacked in the third dielectric layer; and a second via, connecting the second metal layer to the third metal layer.Type: GrantFiled: March 2, 2012Date of Patent: October 7, 2014Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Dae-Hyun Park, Han Kim, Mi-Ja Han, Ja-Bu Koo
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Patent number: 8847320Abstract: A device comprises a semiconductor substrate having first and second implant regions of a first dopant type. A gate insulating layer and a gate electrode are provided above a resistor region between the first and second implant regions. A first dielectric layer is on the first implant region. A contact structure is provided, including a first contact portion conductively contacting the gate electrode, at least part of the first contact portion directly on the gate electrode. A second contact portion directly contacts the first contact portion and is formed directly on the first dielectric layer. A third contact portion is formed on the second implant region.Type: GrantFiled: January 31, 2012Date of Patent: September 30, 2014Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Chung-Hui Chen
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Publication number: 20140264750Abstract: A passive circuit device incorporating a resistor and a capacitor and a method of forming the circuit device are disclosed. In an exemplary embodiment, the circuit device comprises a substrate and a passive device disposed on the substrate. The passive device includes a bottom plate disposed over the substrate, a top plate disposed over the bottom plate, a spacing dielectric disposed between the bottom plate and the top plate, a first contact and a second contact electrically coupled to the top plate, and a third contact electrically coupled to the bottom plate. The passive device is configured to provide a target capacitance and a first target resistance. The passive device may also include a second top plate disposed over the bottom plate and configured to provide a second target resistance, such that the second target resistance is different from the first target resistance.Type: ApplicationFiled: March 12, 2013Publication date: September 18, 2014Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Taiwan Semiconductor Manufacturing Company Ltd.
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Publication number: 20140264751Abstract: In one embodiment, a chip comprises a capacitor and a resistor. The capacitor comprises a first capacitor terminal, a second capacitor terminal, and a dielectric layer between the first and second capacitor terminals. The second capacitor terminal and the resistor are both fabricated from a resistor metal layer.Type: ApplicationFiled: October 3, 2013Publication date: September 18, 2014Applicant: QUALCOMM INCORPORATEDInventors: Xiangdong Chen, Haining Yang
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Publication number: 20140239447Abstract: In one general aspect, an apparatus includes a first capacitor defined by a dielectric disposed between a bump metal and a region of a first conductivity type, and a second capacitor in series with the first capacitor and defined by a PN junction including the region of the first conductivity type and a region of a second conductivity type. The region of the first conductivity type can be configured to be coupled to a first node having a first voltage, and the region of the second conductivity type can be configured to be coupled to a second node having a second voltage different than the first voltage.Type: ApplicationFiled: February 22, 2013Publication date: August 28, 2014Applicant: FAIRCHILD SEMICONDUCTOR CORPORATIONInventor: Kenneth P. Snowdon
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Publication number: 20140239445Abstract: A semiconductor device has a resistor area and wiring area selectively disposed on a semiconductor substrate. In this semiconductor device, a second interlayer insulating film is formed above the semiconductor substrate, and a thin-film resistor is disposed on the second interlayer insulating film in the resistor area. Vias that contact the thin-film resistor from below are formed in the second interlayer insulating film. A wiring line is disposed on the second interlayer insulating film in the wiring area. A dummy wiring line that covers the thin-film resistor from above is disposed in a third wiring layer that is in the same layer as the wiring line, and an insulating film is interposed between the thin-film resistor and the dummy wiring line.Type: ApplicationFiled: February 14, 2014Publication date: August 28, 2014Applicant: ROHM CO., LTD.Inventors: lsamu Nishimura, Michihiko Mifuji, Kazumasa Nishio
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Patent number: 8780584Abstract: An electronic product includes a case; a first board placed inside the case; and a second board having an Electromagnetic Band Gap (EBG) structure inserted therein. The second board is coupled to an inside of the case facing the first board so as to shield a noise radiated from the first board.Type: GrantFiled: April 3, 2013Date of Patent: July 15, 2014Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Han Kim, Chang-Sup Ryu
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Patent number: 8754462Abstract: A semiconductor device includes a first electrode electrically connected to an upper surface of a semiconductor element, a first internal electrode electrically connected to a lower surface of the semiconductor element and having a plurality of first comb finger portions and a first connection portion connecting the plurality of first comb finger portions together, a second electrode electrically connected to the first internal electrode, a second internal electrode electrically connected to a lower surface of the first electrode and having a plurality of second comb finger portions and a second connection portion connecting the plurality of second comb finger portions together, the plurality of second comb finger portions being interdigitated with but not in contact with the plurality of first comb finger portions, and a lower dielectric filling the space between the plurality of first comb finger portions and the plurality of second comb finger portions.Type: GrantFiled: January 3, 2013Date of Patent: June 17, 2014Assignee: Mitsubishi Electric CorporationInventors: Noboru Miyamoto, Yoshikazu Tsunoda
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Patent number: 8754501Abstract: An integrated circuit with a high precision MIM capacitor and a high precision resistor with via etch stop landing pads on the resistor heads that are formed with the capacitor bottom plate material. A process of forming an integrated circuit with a high precision MIM capacitor and a high precision resistor where via etch stop landing pads over the resistor heads are formed using the same layer that is used to form the capacitor bottom plate.Type: GrantFiled: June 14, 2013Date of Patent: June 17, 2014Assignee: Texas Instruments IncorporatedInventors: Imran Mahmood Khan, John Paul Campbell, Neal Thomas Murphy
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Patent number: 8735858Abstract: An ionic device includes a layer of an ionic conductor containing first and second species of impurities. The first species of impurity in the layer is mobile in the ionic conductor, and a concentration profile of the first species determines a functional characteristic of the device. The second species of impurity in the layer interacts with the first species within the layer to create a structure that limits mobility of the first species in the layer.Type: GrantFiled: April 30, 2010Date of Patent: May 27, 2014Assignee: Hewlett-Packard Development Company, L.P.Inventors: Dmitri B. Strukov, Alexandre M. Bratkovski, R. Stanley Williams, Zhiyong Li
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Publication number: 20140124893Abstract: An electrical device includes a semiconductor material. The semiconductor material includes a first region of the semiconductor material having a first conductivity type, a second region of the semiconductor material having a second conductivity type complementary to the first conductivity type and an intermediate region of the semiconductor material between the first region and the second region. The first and second regions lie next to each other the intermediate region so as to form a diode structure. A shape of the intermediate region tapers from the first region to the second region.Type: ApplicationFiled: November 2, 2012Publication date: May 8, 2014Applicant: INFINEON TECHNOLOGIES AGInventors: Josef Dietl, Raimund Peichl, Gabriele Bettineschi
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Patent number: 8686446Abstract: A capacitor device prevents capacitor failure and pixel failure by preventing the capacitor from experiencing a short circuit caused by disconnection of a bridge formed between electrodes of the capacitor and a display apparatus having the capacitor device. A display device comprises a thin film transistor, a light emitting device, and the capacitor device described above.Type: GrantFiled: August 30, 2011Date of Patent: April 1, 2014Assignee: Samsung Display Co., Ltd.Inventor: Sang-Min Hong
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Patent number: 8664741Abstract: Provided is a high voltage semiconductor device that includes a PIN diode structure formed in a substrate. The PIN diode includes an intrinsic region located between a first doped well and a second doped well. The first and second doped wells have opposite doping polarities and greater doping concentration levels than the intrinsic region. The semiconductor device includes an insulating structure formed over a portion of the first doped well. The semiconductor device includes an elongate resistor device formed over the insulating structure. The resistor device has first and second portions disposed at opposite ends of the resistor device, respectively. The semiconductor device includes an interconnect structure formed over the resistor device. The interconnect structure includes: a first contact that is electrically coupled to the first doped well and a second contact that is electrically coupled to a third portion of the resistor located between the first and second portions.Type: GrantFiled: June 14, 2011Date of Patent: March 4, 2014Assignee: Taiwan Semiconductor Manufacturing Company Ltd.Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
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Patent number: 8659122Abstract: To provide a semiconductor device having a structure free from variations in resistance even when a stress is applied thereto; and a manufacturing method of the device. The semiconductor device has a metal resistor layer in a region between a passivation film and an uppermost level aluminum interconnect. This makes it possible to realize a high-precision resistor having few variations in resistance due to a mold stress that occurs in a packaging step or thereafter and therefore, makes it possible to form a high-precision analog circuit.Type: GrantFiled: January 28, 2011Date of Patent: February 25, 2014Assignee: Renesas Electronics CorporationInventor: Akira Matsumura
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Patent number: 8643142Abstract: Passive devices such as resistors and capacitors are provided for a 3D non-volatile memory device. In a peripheral area of a substrate, a passive device includes alternating layers of a dielectric such as oxide and a conductive material such as heavily doped polysilicon or metal silicide in a stack. The substrate includes one or more lower metal layers connected to circuitry. One or more upper metal layers are provided above the stack. Contact structures extend from the layers of conductive material to portions of the one or more upper metal layers so that the layers of conductive material are connected to one another in parallel, for a capacitor, or serially, for a resistor, by the contact structures and the at least one upper metal layer. Additional contact structures can connect the circuitry to the one or more upper metal layers.Type: GrantFiled: November 21, 2011Date of Patent: February 4, 2014Assignee: SanDisk Technologies Inc.Inventors: Masaaki Higashitani, Peter Rabkin
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Patent number: 8629530Abstract: A process of forming an electronic device can include forming a capacitor dielectric layer over a base region, wherein the base region includes a base semiconductor material, forming a gate dielectric layer over a substrate, forming a capacitor electrode over the capacitor dielectric layer, forming a gate electrode over the gate dielectric layer, and forming an input terminal and an output terminal to the capacitor electrode. The input terminal and the output terminal can be spaced apart from each other and are connected to different components within the electronic device. A filter can include the base region, the capacitor dielectric layer, and the capacitor electrode. A transistor structure can include the gate dielectric layer and the gate electrode. An electronic device can include a low-pass filter and a transistor structure, such as an n-channel transistor or a p-channel transistor.Type: GrantFiled: September 1, 2011Date of Patent: January 14, 2014Assignee: Freescale Semiconductor, Inc.Inventors: Fabio Duarte de Martin, Fabio de Lacerda, Alfredo Olmos
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Patent number: 8629529Abstract: A semiconductor device is produced by fabricating a capacitor element including a lower electrode, a capacitor insulating film, and an upper electrode, and a thin-film resistor element, in the same step. As the lower electrode of the capacitor element is lined with a lower layer wiring layer (Cu wiring), the lower electrode has extremely low resistance substantially. As such, even if the film thickness of the lower electrode becomes thinner, parasitic resistance does not increased. The resistor element is formed to have the same film thickness as that of the lower electrode of the capacitor element. Since the film thickness of the lower electrode is thin, it works as a resistor having high resistance. In the top layer of the passive element, a passive element cap insulating film is provided, which works as an etching stop layer when etching a contact of the upper electrode of the capacitor element.Type: GrantFiled: December 25, 2007Date of Patent: January 14, 2014Assignee: NEC CorporationInventors: Naoya Inoue, Ippei Kume, Jun Kawahara, Yoshihiro Hayashi
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Publication number: 20130341759Abstract: An integrated circuit with a high precision MIM capacitor and a high precision resistor with via etch stop landing pads on the resistor heads that are formed with the capacitor bottom plate material. A process of forming an integrated circuit with a high precision MIM capacitor and a high precision resistor where via etch stop landing pads over the resistor heads are formed using the same layer that is used to form the capacitor bottom plate.Type: ApplicationFiled: June 14, 2013Publication date: December 26, 2013Applicant: Texas Instruments IncorporatedInventors: Imran Mahmood Khan, John Paul Campbell, Neal Thomas Murphy
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Patent number: 8587088Abstract: A die package having a vertical stack of dies and side-mounted circuitry and methods for making the same are disclosed, for use in an electronic device. The side-mounted circuitry is mounted to a vertical surface of the stack, as opposed to a top surface or adjacent of the stack to reduce the volume of the NVM package.Type: GrantFiled: February 17, 2011Date of Patent: November 19, 2013Assignee: Apple Inc.Inventor: Nicholas Seroff
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Publication number: 20130292798Abstract: A resistor and capacitor are provided in respective shallow trench isolation structures. The method includes forming a first and second trench in a substrate and forming a first insulator layer within the first and second trench. The method includes forming a first electrode material within the first and second trench, on the first insulator layer, and forming a second insulator layer within the first and second trench and on the first electrode material. The method includes forming a second electrode material within the first and second trench, on the second insulator layer. The second electrode material pinches off the second trench. The method includes removing a portion of the second electrode material and the second insulator layer at a bottom portion of the first trench, and filling in the first trench with additional second electrode material. The additional second electrode material is in electrical contact with the first electrode material.Type: ApplicationFiled: July 11, 2013Publication date: November 7, 2013Inventors: Timothy W. KEMERER, James S. NAKOS, Steven M. SHANK
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Publication number: 20130258627Abstract: Various resistor circuits and methods of making and using the same are disclosed. In one aspect, a method of manufacturing is provided that includes forming a resistor onboard an interposer. The resistor is adapted to dampen a capacitive network. The capacitive network has at least one capacitor positioned external to the interposer.Type: ApplicationFiled: March 30, 2012Publication date: October 3, 2013Inventors: Fei Guo, Feng Zhu, Julius Din, Anwar Kashem, Sally Yeung
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Patent number: 8530323Abstract: A method for fabricating a capacitor is provided. The method for fabricating a capacitor includes forming a dielectric layer over a lower electrode on a substrate, forming an upper electrode over the dielectric layer, forming a hard mask over the upper electrode, etching the hard mask to form a hard mask pattern, etching the upper electrode to make the dielectric layer remain on the lower electrode in a predetermined thickness, forming an isolation layer along an upper surface of the remaining dielectric layer and the hard mask pattern, leaving the isolation layer having a shape of a spacer on one sidewall of the hard mask pattern, the upper electrode, and the dielectric layer, and etching the lower electrode to be isolated.Type: GrantFiled: March 9, 2012Date of Patent: September 10, 2013Assignee: Magnachip Semiconductor, Ltd.Inventors: Jin-Youn Cho, Young-Soo Kang, Jong-Il Kim, Sang-Geun Koo
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Patent number: 8532305Abstract: When two loudspeakers play the same signal, a “phantom center” image is produced between the speakers. However, this image differs from one produced by a real center speaker. In particular, acoustical crosstalk produces a comb-filtering effect, with cancellations that may be in the frequency range needed for the intelligibility of speech. Methods for using phase decorrelation to fill in these gaps and produce a flatter magnitude response are described, reducing coloration and potentially enhancing dialogue clarity. These methods also improve headphone compatibility and reduce the tendency of the phantom image to move toward the nearest speaker.Type: GrantFiled: February 21, 2012Date of Patent: September 10, 2013Assignee: STMicroelectronics, Inc.Inventor: Earl C. Vickers
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Patent number: 8445991Abstract: A semiconductor device and a method of manufacturing the semiconductor device are provided. The semiconductor device includes a lower electrode formed on a substrate, a dielectric layer including an etched dielectric region and an as-grown dielectric region formed on the lower electrode, an upper electrode formed on the as-grown dielectric region, a hardmask formed on the upper electrode, a spacer formed at a side surface of the hardmask and the upper electrode and over a surface of the etched dielectric region, and a buffer insulation layer formed on the hardmask and the spacer.Type: GrantFiled: January 6, 2011Date of Patent: May 21, 2013Assignee: Magnachip Semiconductor, Ltd.Inventors: Jin-Youn Cho, Young-soo Kang, Sang-Geun Koo
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Patent number: 8441102Abstract: It is an object to provide a semiconductor device integrating various elements without using a semiconductor substrate, and a method of manufacturing the same. According to the present invention, a layer to be separated including an inductor, a capacitor, a resistor element, a TFT element, an embedded wiring and the like, is formed over a substrate, separated from the substrate, and transferred onto a circuit board 100. An electrical conduction with a wiring pattern 114 provided in the circuit board 100 is made by a wire 112 or a solder 107, thereby forming a high frequency module or the like.Type: GrantFiled: September 16, 2011Date of Patent: May 14, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Toru Takayama, Junya Maruyama, Yumiko Ohno, Yuugo Goto, Hideaki Kuwabara
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Publication number: 20130093052Abstract: The present application discloses a semiconductor integrated circuit including a substrate having electrical devices formed thereon, a local interconnection layer formed over the substrate, and a global interconnection layer formed over the local interconnection layer. The local interconnection layer has a first set of conductive structures arranged to electrically connect within the individual electrical devices, among one of the electrical devices and its adjacent electrical devices, or vertically between the devices and the global interconnection layer. At least one of the first set of conductive structures is configured to have a resistance value greater than 50 ohms. The global interconnection layer has a second set of conductive structures arranged to electrically interconnect the electrical devices via the first set conductive structures.Type: ApplicationFiled: October 13, 2011Publication date: April 18, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wei Yu MA, Kuo-Ji CHEN, Fang-Tsun CHU, Ta-Pen GUO
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Patent number: 8378453Abstract: Embodiments of the present disclosure include devices or systems that include a composite thermal capacitor disposed in thermal communication with a hot spot of the device, methods of dissipating thermal energy in a device or system, and the like.Type: GrantFiled: April 29, 2011Date of Patent: February 19, 2013Assignee: Georgia Tech Research CorporationInventors: Andrei G. Fedorov, Craig Green, Yogendra Joshi