Complementary Transistors Share Common Active Region (e.g., Integrated Injection Logic, I 2 L) Patents (Class 257/574)
  • Patent number: 11741285
    Abstract: A semiconductor device includes a substrate having an active region, first standard cells arranged in a first row on the active region, second standard cells arranged in a second row on the active region and having a first boundary with the first standard cells, a third standard cells arranged in a third row on the active region and having a second boundary with the first standard cells, and a plurality of power supply lines, respectively arranged along boundaries. Each of the first to third standard cells includes a plurality of fin patterns extending in the first direction, and the plurality of fin patterns are arranged in a second direction, so as not to be disposed on at least one boundary, among the first and second boundaries.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: August 29, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Giyoung Yang, Ingyum Kim
  • Patent number: 11727184
    Abstract: An integrated circuit includes a first column including a plurality of first cells aligned and placed in a plurality of first rows, each first row having a first width and extending in a first horizontal direction, a second column including a plurality of second cells aligned and placed in a plurality of second rows, each second row having a second width and extending in the first horizontal direction, and an interface column extending in a second horizontal direction perpendicular to the first horizontal direction between the first column and the second column, wherein the interface column includes at least one well tap configured to provide a first supply voltage to a well, and at least one substrate tap configured to provide a second supply voltage to a substrate.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: August 15, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Bonghyun Lee, Jungho Do
  • Patent number: 11688740
    Abstract: A semiconductor device including a substrate; first to third active patterns on an upper portion of the substrate, the active patterns being sequentially arranged in a first direction and extending in a second direction crossing the first direction; first to third power rails respectively connected to the first to third active patterns, wherein a width of the second active pattern in the first direction is at least two times a width of the first active pattern in the first direction and is at least two times a width of the third active pattern in the first direction, the first active pattern is not vertically overlapped with the first power rail, the second active pattern is vertically overlapped with the second power rail, and the third active pattern is not vertically overlapped with the third power rail.
    Type: Grant
    Filed: May 10, 2022
    Date of Patent: June 27, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Taehyung Kim, Jinwoo Jeong, Jiwook Kwon, Raheel Azmat, Kwanyoung Chun
  • Patent number: 11508714
    Abstract: A semiconductor device comprising a plurality of cells comprising cells of a first group, a second group and a third group is provided. The cell of the first group comprises a first power supply wiring for supplying a first potential, is located between the two cells of the third group and separated therefrom in a row direction by a distance, and supplies the first potential to the cells of the second group via a wiring on a front-side of the substrate. At least one of the two cells of the third group comprises a second power supply wiring for supplying a second potential having a polarity is opposite the first potential or being a ground. A third power supply wiring on a backside of a substrate supplies the first potential. The first power supply wiring comprises a via coupled to the third power supply wiring.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: November 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventor: Jack Liu
  • Patent number: 11482519
    Abstract: Disclosed a transient voltage suppressor and a method for manufacturing the same. According to the transient voltage suppressor, an additional gate stack layer is introduced based on the prior transient voltage suppressor, and the diffusion isolation regions are reused as the conductive vias, so that, the gate stack layer, the first doped region, the conductive vias, and the second semiconductor layer constitute a MOS transistor being coupled in parallel to the Zener diode or the avalanche diode of the transient voltage suppressor. When the current of the I/O terminal is relatively large, the MOS transistor is turned on to share part of the current of the I/O terminal through the Zener diode or the avalanche diode, thereby protecting the Zener diode or the avalanche diode from being damaged due to excessive current. Thus, the robustness of the transient voltage suppressor is improved without increasing the manufacture cost.
    Type: Grant
    Filed: March 5, 2021
    Date of Patent: October 25, 2022
    Assignee: Silergy Semiconductor Technology (Hangzhou) LTD
    Inventors: Dengping Yin, Shijun Wang, Fei Yao
  • Patent number: 9679897
    Abstract: A nanofluidic structure including a semiconductor substrate and a dielectric layer positioned above and in contact with the semiconductor substrate. A first reservoir and a second reservoir are defined by the semiconductor substrate and the dielectric layer. The second reservoir is spaced apart from the first reservoir. Bottom passage fins protrude from the semiconductor substrate and extend from the first reservoir to the second reservoir. Top passage fins, above and spaced apart from the bottom passage fins, extend from the first reservoir to the second reservoir. Nanofluidic passages between the top and bottom fins connect the first reservoir and the second reservoir. Each of the nanofluidic passages includes a bottom wall, a top wall and sidewalls. The bottom wall is defined by a respective bottom passage fin. The top wall is defined by a respective top passage fin. The sidewalls are defined by the dielectric layer.
    Type: Grant
    Filed: April 4, 2016
    Date of Patent: June 13, 2017
    Assignee: International Business Machines Corporation
    Inventors: Qing Cao, Kangguo Cheng, Zhengwen Li, Fei Liu
  • Patent number: 9263447
    Abstract: A semiconductor device, including: a P-type substrate; an N-type region, contacting with the P-type substrate; a N+-type doped region, disposed in the N-type region; a first P+-type doped region, disposed in the N-type region; a second P+-type doped region, disposed in the N-type region; a P-type buried layer, disposed in the P-type substrate under the N-type region and contacting with the N-type region; and a N-type doped region, disposed in the P-type substrate under a contact surface between the P-type buried layer and the N-type region.
    Type: Grant
    Filed: April 7, 2015
    Date of Patent: February 16, 2016
    Assignee: NUVOTON TECHNOLOGY CORPORATION
    Inventors: Chia-Wei Chang, Po-An Chen
  • Patent number: 8698205
    Abstract: An integrated circuit layout having a mixed track standard cell configuration that having a mixed track standard cell configuration that includes first well regions of a predetermined height and second well regions of a predetermined height, the first and second well regions are arranged within a substrate, first conductors and second conductors arranged and extending across regions of corresponding first and second well regions, and a plurality of standard cells in multiple rows. The standard cells include a first substantially equal to standard cell having a first cell height substantially equal to I(X+Y)+X or Y, wherein X is one half the predetermined height of the first well region, Y is one half the predetermined height of the second well region, and I is a positive integer.
    Type: Grant
    Filed: May 25, 2012
    Date of Patent: April 15, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jiann-Tyng Tzeng, Chih-Liang Chen, Yi-Feng Chen, Kam-Tou Sio, Shang-Chih Hsieh, Helen Shu-Hui Chang
  • Patent number: 8598678
    Abstract: A parasitic vertical PNP bipolar transistor in BiCMOS process comprises a collector, a base and an emitter. The collector is formed by active region with p-type ion implanting layer (P type well in NMOS). It connects a P-type conductive region, which formed in the bottom region of shallow trench isolation (STI). The collector terminal connection is through the P-type buried layer and the adjacent active region. The base is formed by N type ion implanting layer above the collector which shares a N-type lightly doped drain (NLDD) implanting of NMOS. Its connection is through the N-type poly on the base region. The emitter is formed by the P-type epitaxy layer on the base region with heavy p-type doped, and connected by the extrinsic base region of NPN bipolar transistor device. This invention also includes the fabrication method of this parasitic vertical PNP bipolar transistor in BiCMOS process.
    Type: Grant
    Filed: December 8, 2010
    Date of Patent: December 3, 2013
    Assignee: Shanghai Hua Hong Nec Electronics Company, Limited
    Inventors: Wensheng Qian, Jun Hu, Donghua Liu
  • Patent number: 8569867
    Abstract: According to one embodiment, a semiconductor device that has a rectification element includes a semiconductor substrate, a first well region of a first conductivity type formed on the semiconductor substrate, a second well region of a second conductivity type formed on the semiconductor substrate, and a plurality of fins arranged over the first well region and the second well region at a first pitch in the same direction. In the semiconductor device, the rectification element includes a cathode region, an anode region, a well contact region, and a trigger region that are configured using fins. These regions are connected to each wiring portion to form a PNP-type bipolar transistor and an NPN-type bipolar transistor.
    Type: Grant
    Filed: February 2, 2012
    Date of Patent: October 29, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Patent number: 8415764
    Abstract: An integrated circuit device includes a semiconductor substrate having a top surface; at least one insulation region extending from the top surface into the semiconductor substrate; a plurality of base contacts of a first conductivity type electrically interconnected to each other; and a plurality of emitters and a plurality of collectors of a second conductivity type opposite the first conductivity type. Each of the plurality of emitters, the plurality of collectors, and the plurality of base contacts is laterally spaced apart from each other by the at least one insulation region. The integrated circuit device further includes a buried layer of the second conductivity type in the semiconductor substrate, wherein the buried layer has an upper surface adjoining bottom surfaces of the plurality of collectors.
    Type: Grant
    Filed: March 30, 2010
    Date of Patent: April 9, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tao-Wen Chung, Po-Yao Ke, Wei-Yang Lin, Shine Chung
  • Patent number: 8329529
    Abstract: A method for fabricating an integrated circuit device includes providing a semiconductor substrate having a first region and a second region, e.g., peripheral region. The method forms a stop layer overlying the first and second regions and a low k dielectric layer (e.g., k<2.9) overlying the stop layer in the first and second regions. The method forms a cap layer overlying the low k dielectric layer. In an embodiment, the method initiates formation of a plurality of via structures within a first portion of the low k dielectric layer overlying the first region and simultaneously initiates formation of an isolated via structure for in the second region of the semiconductor substrate, using one or more etching processes. The method includes ceasing formation of the plurality of via structures within the first portion and ceasing formation of the isolated via structure in the second region when one or more portions of stop layer have been exposed.
    Type: Grant
    Filed: September 17, 2010
    Date of Patent: December 11, 2012
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Man Hua Chen, Lien Hung Cheng
  • Publication number: 20120181619
    Abstract: A semiconductor structure contains a bipolar transistor (101) and a spacing structure (265-1 or 265-2). The transistor has an emitter (241), a base (243), and a collector (245). The base is formed with an intrinsic base portion (243I), a base link portion (243L), and a base contact portion (245C). The intrinsic base portion is situated below the emitter and above material of the collector. The base link portion extends between the intrinsic base portion and the base contact portions. The spacing structure includes an isolating dielectric layer (267-1 or 267-2) and a spacing component. The dielectric layer extends along the upper semiconductor surface. The spacing component includes a lateral spacing portion (269-1 or 269-2) of largely non-monocrystalline semiconductor material, preferably polycrystalline semiconductor material, situated on the dielectric layer above the base link portion.
    Type: Application
    Filed: August 4, 2011
    Publication date: July 19, 2012
    Inventors: Jeng-Jiun Yang, Constantin Bulucea
  • Patent number: 8212291
    Abstract: Disclosed is a device structure using an inverse-mode cascoded Silicon-Germanium (SiGe) Heterojunction Bipolar Transistor (HBT) beneficial in applications requiring radiation hardened circuitry. The device comprises a forward-mode common-emitter HBT cascoded with a common-base inverse-mode HBT, sharing a common sub-collector. An exemplary device was measured to have over 20 dB of current gain, and over 30 dB of power gain at 10 GHz, thus demonstrating the use of these circuits for high-frequency circuit applications. In addition, the radiation response and voltage limits were characterized and showed to have negligible performance effects in typical operating conditions. Due to the unique topology, the disclosed device has the benefit of being a more compact cascode design and the additional benefit of providing significantly improved radiation tolerance.
    Type: Grant
    Filed: March 11, 2009
    Date of Patent: July 3, 2012
    Assignee: Georgia Tech Research Corporation
    Inventors: Tushar K. Thrivikraman, Aravind Appaswamy, John D. Cressler
  • Patent number: 8115254
    Abstract: A stack pad layers including a first pad oxide layer, a pad nitride layer, and a second pad oxide layer are formed on a semiconductor-on-insulator (SOI) substrate. A deep trench extending below a top surface or a bottom surface of a buried insulator layer of the SOI substrate and enclosing at least one top semiconductor region is formed by lithographic methods and etching. A stress-generating insulator material is deposited in the deep trench and recessed below a top surface of the SOI substrate to form a stress-generating buried insulator plug in the deep trench. A silicon oxide material is deposited in the deep trench, planarized, and recessed. The stack of pad layer is removed to expose substantially coplanar top surfaces of the top semiconductor layer and of silicon oxide plugs. The stress-generating buried insulator plug encloses, and generates a stress to, the at least one top semiconductor region.
    Type: Grant
    Filed: September 25, 2007
    Date of Patent: February 14, 2012
    Assignee: International Business Machines Corporation
    Inventors: Huilong Zhu, Brian J. Greene, Dureseti Chidambarrao, Gregory G. Freeman
  • Patent number: 7902635
    Abstract: Improved radio frequency gain in a silicon-based bipolar transistor may be provided by adoption of a common-base configuration, preferably together with excess doping of the base to provide extremely low base resistances boosting performance over similar common-emitter designs.
    Type: Grant
    Filed: July 11, 2005
    Date of Patent: March 8, 2011
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: Zhenqiang Ma, Ningyue Jiang
  • Publication number: 20100301453
    Abstract: An integrated circuit device includes a semiconductor substrate having a top surface; at least one insulation region extending from the top surface into the semiconductor substrate; a plurality of base contacts of a first conductivity type electrically interconnected to each other; and a plurality of emitters and a plurality of collectors of a second conductivity type opposite the first conductivity type. Each of the plurality of emitters, the plurality of collectors, and the plurality of base contacts is laterally spaced apart from each other by the at least one insulation region. The integrated circuit device further includes a buried layer of the second conductivity type in the semiconductor substrate, wherein the buried layer has an upper surface adjoining bottom surfaces of the plurality of collectors.
    Type: Application
    Filed: March 30, 2010
    Publication date: December 2, 2010
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tao Wen Chung, Po-Yao Ke, Wei-Yang Lin, Shine Chung
  • Patent number: 7842572
    Abstract: A method of manufacturing a local recess channel transistor in a semiconductor device. A hard mask layer is formed on a semiconductor substrate that exposes a portion of the substrate. The exposed portion of the substrate is etched using the hard mask layer as an etch mask to form a recess trench. A trench spacer is formed on the substrate along a portion of sidewalls of the recess trench. The substrate along a lower portion of the recess trench is exposed after the trench spacer is formed. The exposed portion of the substrate along the lower portion of the recess trench is doped with a channel impurity to form a local channel impurity doped region surrounding the lower portion of the recess trench. A portion of the local channel impurity doped region surrounding the lower portion of the recess trench is doped with a Vth adjusting impurity to form a Vth adjusting impurity doped region inside the local channel impurity doped region. The width of the lower portion of the recess trench is expanded.
    Type: Grant
    Filed: August 3, 2009
    Date of Patent: November 30, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Se-myeong Jang, Yong-chul Oh, Makoto Yoshida
  • Publication number: 20100244143
    Abstract: A semiconductor structure contains a bipolar transistor (101) and a spacing structure (265-1 or 265-2). The transistor has an emitter (241), a base (243), and a collector (245). The base is formed with an intrinsic base portion (243I), a base link portion (243L), and a base contact portion (245C). The intrinsic base portion is situated below the emitter and above material of the collector. The base link portion extends between the intrinsic base portion and the base contact portions. The spacing structure includes an isolating dielectric layer (267-1 or 267-2) and a spacing component. The dielectric layer extends along the upper semiconductor surface. The spacing component includes a lateral spacing portion (269-1 or 269-2) of largely non-monocrystalline semiconductor material, preferably polycrystalline semiconductor material, situated on the dielectric layer above the base link portion.
    Type: Application
    Filed: March 27, 2009
    Publication date: September 30, 2010
    Inventors: Jeng-Jiun Yang, Constantin Bulucea
  • Patent number: 7586150
    Abstract: A method of manufacturing a local recess channel transistor in a semiconductor device. A hard mask layer is formed on a semiconductor substrate that exposes a portion of the substrate. The exposed portion of the substrate is etched using the hard mask layer as an etch mask to form a recess trench. A trench spacer is formed on the substrate along a portion of sidewalls of the recess trench. The substrate along a lower portion of the recess trench is exposed after the trench spacer is formed. The exposed portion of the substrate along the lower portion of the recess trench is doped with a channel impurity to form a local channel impurity doped region surrounding the lower portion of the recess trench. A portion of the local channel impurity doped region surrounding the lower portion of the recess trench is doped with a Vth adjusting impurity to form a Vth adjusting impurity doped region inside the local channel impurity doped region. The width of the lower portion of the recess trench is expanded.
    Type: Grant
    Filed: August 25, 2005
    Date of Patent: September 8, 2009
    Assignee: Samsung Electronic Co., Ltd.
    Inventors: Se-myeong Jang, Yong-chul Oh, Makoto Yoshida
  • Publication number: 20090206335
    Abstract: The invention relates to a BiCMOS device comprising a substrate having a first type of conductivity and a number of active regions that are provided therein and are delimited in a lateral direction by flat field-insulating regions. Vertical npn bipolar epitaxial base transistors are disposed in a first partial number of the active regions while vertical pnp bipolar epitaxial base transistors are arranged in a second partial number of the active regions of the BiCMOS device. One transistor type or both transistor types are provided with both a collector region and a collector contact region in one and the same respective active region. In order to improve the high frequency characteristics, an insulation doping region that is configured so as to electrically insulate the collector and the substrate is provided between the collector region and the substrate exclusively in a first transistor type in which the type of conductivity of the substrate corresponds to that of the collector region.
    Type: Application
    Filed: December 1, 2004
    Publication date: August 20, 2009
    Inventors: Bernd Heinemann, Jürgen Drews, Steffen Marschmayer, Holger Rücker
  • Publication number: 20080253046
    Abstract: A protective SCR integrated circuit device is disclosed built on adjacent N and P wells and defining an anode and a cathode. In addition to the anode and cathode contact structures, the device has an n-type stack (N+/ESD) structure bridging the N-Well and the P-Well, and a p-type stack (P+/PLDD) structure in the P-Well. The separation of the n-type stack structure and the p-type stack structure provides a low triggering voltage, that together with other physical dimensions and processing parameters also provide a relatively high holding voltage. In an embodiment, the triggering voltage may be about 8V while exhibiting a holding voltage, that may be controlled by the lateral dimension of the n-type stack of about 5-7 V.
    Type: Application
    Filed: April 7, 2008
    Publication date: October 16, 2008
    Inventors: Lifang Lou, Jay R. Chapin, Donna Robinson-Hahn
  • Patent number: 7271414
    Abstract: A semiconductor device includes a transistor of a first conductivity type and a transistor of a second conductivity type. The transistor of the first conductivity type includes a first gate portion formed on a first region of a semiconductor substrate, a first sidewall formed on each side face of the first gate portion, a first protecting film formed between the first sidewall and the first gate portion, and an extension diffusion layer of the first conductivity type. The transistor of the second conductivity type includes a second gate portion formed on a second region of the semiconductor substrate, a second sidewall formed on each side face of the second gate portion, a second protecting film having an L-shaped cross-section and formed between the second sidewall and the second gate portion and between the second sidewall and the semiconductor substrate, and an extension diffusion layer of the second conductivity type.
    Type: Grant
    Filed: January 23, 2006
    Date of Patent: September 18, 2007
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Nobuyuki Tamura, Takehisa Kishimoto, Mizuki Segawa
  • Patent number: 7129562
    Abstract: A standard cell architecture with a basic cell that spans multiple rows of the standard cell. This multi-row basic cell may be a dual-height cell that spans two rows, or it may span more than two rows. The multi-row basic cell may be intermixed in a standard cell design with smaller, single-height cells for high-density applications. The single-height cells may be used where possible and higher-drive dual-height basic cells where larger transistors are desired. Other multiple height cells may also be included if even more current is desirable. The power rail may include conductors of varying width.
    Type: Grant
    Filed: October 1, 2004
    Date of Patent: October 31, 2006
    Assignee: Virage Logic Corporation
    Inventors: Tushar R. Gheewala, Michael J. Colwell, Henry H. Yang, Duane G. Breid
  • Patent number: 7109567
    Abstract: The invention relates to a semiconductor device with a heterojunction bipolar, in particular npn, transistor with an emitter region (1), a base region (2), and a collector region (3), which are provided with respectively a first, a second, and a third connection conductor (4, 5, 6), while the bandgap of the base region (2) is lower than that of the collector region (3) or of the emitter region (1), for example owing to the use of a silicon-germanium alloy instead of pure silicon. Such a device is very fast, but its transistor shows a relatively low BVceo. In a device according to the invention, the emitter region (1) or the base region (2) comprises a sub-region (1B, 2B) with a reduced doping concentration, which sub-region (1B, 2B) is provided with a further connection conductor (4B, 5B) which forms a Schottky junction with the sub-region (1B, 2B). Such a device results in a transistor with a particularly high cut-off frequency fT but with no or hardly any reduction of the BVceo.
    Type: Grant
    Filed: November 21, 2002
    Date of Patent: September 19, 2006
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Raymond Josephus Engelbart Hueting, Jan Willem Slotboom, Leon Cornelis Maria Van Den Oever
  • Patent number: 7078766
    Abstract: A transistor structure fabricated on thin SOI is disclosed. The transistor on thin SOI has gated n+ and p+ junctions, which serve as switches turning on and off GIDL current on the surface of the junction. GIDL current will flow into the floating body and clamp its potential and can thus serve as an output node. The transistor can function as an inverter. The body (either n-well or p-well) is isolated from the n+ or P+ “GIDL switches” by a region of opposite doping type, i.e., p-base and n-base. The basic building blocks of logic circuits, e.g., NAND and NOR gates, are easily implemented with such transistors on thin SOI wafers. These new transistors on thin SOI only need contacts and metal line connections on the VCC and VSS. The connection of fan-outs (between the output and input) can be implemented by capacitor coupling. The transistor structure and operation is useful for high-performance, low-voltage, and low-power VLSI circuits on SOI wafers.
    Type: Grant
    Filed: May 24, 2001
    Date of Patent: July 18, 2006
    Assignee: Taiwan Semiconductor Mfg. Corp.
    Inventor: Min-hwa Chi
  • Patent number: 6838713
    Abstract: A standard cell architecture with a basic cell that spans multiple rows of the standard cell. This multi-row basic cell may be a dual-height cell that spans two rows, or it may span more than two rows. The multi-row basic cell may be intermixed in a standard cell design with smaller, single-height cells for high-density applications. The single-height cells may be used where possible and higher-drive dual-height basic cells where larger transistors are desired. Other multiple height cells may also be included if even more current is desirable. The power rail may include conductors of varying width.
    Type: Grant
    Filed: July 12, 1999
    Date of Patent: January 4, 2005
    Assignee: Virage Logic Corporation
    Inventors: Tushar R. Gheewala, Michael J. Colwell, Henry H. Yang, Duane G. Breid
  • Patent number: 6806555
    Abstract: A semiconductor component and a method for fabricating it includes a substrate and an epitaxial layer situated thereon and integrating at least a first and a second bipolar component in the layer. The first and second bipolar components have a buried layer and different collector widths. The buried layer of the second component has a larger layer thickness than that of the first component; exactly one epitaxial layer is provided. The different collector widths produced as a result thereof are influenced by the outdiffusion of the dopant of the buried layers by other substances.
    Type: Grant
    Filed: May 13, 2002
    Date of Patent: October 19, 2004
    Assignee: Infineon Technologies AG
    Inventors: Jakob Huber, Wolfgang Klein
  • Patent number: 6777782
    Abstract: A transistor and method for making the same are disclosed. The transistor is constructed from a collector layer, a base layer, and an emitter layer in a stacked arrangement. The emitter layer is etched to form a mesa on an etched surface, the mesa having a top surface that includes a portion of the emitter layer and an emitter contact and sides joining the top surface with the etched surface. First and second protective layers are then deposited over the emitter contact and etched surface and the portions of these layers that overlie the etched surface are removed. The first protective layer is then preferentially etched thereby undercutting a portion of the first protective layer on the sides of the mesa and creating an overhanging portion of the second protective layer that is utilized to align the deposition of the base contacts.
    Type: Grant
    Filed: February 13, 2003
    Date of Patent: August 17, 2004
    Assignee: Agilent Technologies, Inc.
    Inventor: Gilbert K. Essilfie
  • Patent number: 6770947
    Abstract: A severable horizontal portion of a fuse link is formed relative to a vertically configured structure in an IC to promote separation of the severable portion upon applying energy from a laser beam. The vertically configured structure may be a reduced vertical thickness of the severable portion, an elevated lower surface of the severable portion above adjoining portions of the fuse link, a protrusion which supports the severable portion at a height greater than a height of the adjoining portions of the fuse link, flowing the melted severable portion down sloped surfaces away from a break point, and a propellent material beneath the severable portion which explodes to ablate the severable portion.
    Type: Grant
    Filed: February 12, 2003
    Date of Patent: August 3, 2004
    Assignee: LSI Logic Corporation
    Inventors: Gary K. Giust, Ruggero Castagnetti, Yauh-Ching Liu, Shiva Ramesh
  • Patent number: 6703687
    Abstract: A bipolar transistor and a method for manufacturing the bipolar transistor are provided.
    Type: Grant
    Filed: May 9, 2002
    Date of Patent: March 9, 2004
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventor: Hun Joo Hahm
  • Publication number: 20030102525
    Abstract: A semiconductor device for an integrated injection logic cell having a pnp bipolar transistor structure formed on a semiconductor substrate, wherein at least one layer of insulating films formed on a base region of the pnp bipolar transistor structure is comprised of a silicon nitride film. The semiconductor device of the present invention is advantageous in that the silicon nitride film constituting at least one layer of the insulating films formed on the base region of the pnp bipolar transistor prevents an occurrence of contamination on the surface of the base region, so that both the properties of the pnp bipolar transistor and the operation of the IIL cell can be stabilized. Further, by the process of the present invention, the above-mentioned excellent semiconductor device can be produced.
    Type: Application
    Filed: January 14, 2003
    Publication date: June 5, 2003
    Inventor: Hirokazu Ejiri
  • Patent number: 6489665
    Abstract: A substantially concentric lateral bipolar transistor and the method of forming same. A base region is disposed about a periphery of an emitter region, and a collector region is disposed about a periphery of the base region to form the concentric lateral bipolar transistor of the invention. A gate overlies the substrate and at least a portion of the base region. At least one electrical contact is formed connecting the base and the gate, although a plurality of contacts may be formed. A further bipolar transistor is formed according to the following method of the invention. A base region is formed in a substrate and a gate region is formed overlying at least a portion of the base region. Emitter and collector terminals are formed on opposed sides of the base region. The gate is used as a mask during first and second ion implants.
    Type: Grant
    Filed: December 20, 2000
    Date of Patent: December 3, 2002
    Assignee: Micron Technology, Inc.
    Inventors: Kirk D. Prall, Mike P. Violette
  • Publication number: 20020158308
    Abstract: A semiconductor component and a method for fabricating it includes a substrate and an epitaxial layer situated thereon and integrating at least a first and a second bipolar component in the layer. The first and second bipolar components have a buried layer and different collector widths. The buried layer of the second component has a larger layer thickness than that of the first component; exactly one epitaxial layer is provided. The different collector widths produced as a result thereof are influenced by the outdiffusion of the dopant of the buried layers by other substances.
    Type: Application
    Filed: May 13, 2002
    Publication date: October 31, 2002
    Inventors: Jakob Huber, Wolfgang Klein
  • Publication number: 20020089038
    Abstract: A bipolar transistor structure is described incorporating an emitter, base, and collector having a fully depleted region on an insulator of a Silicon-On-Insulator (SOI) substrate without the need for a highly doped subcollector to permit the fabrication of vertical bipolar transistors on semiconductor material having a thickness of 300 nm or less and to permit the fabrication of SOI BiCMOS. The invention overcomes the problem of requiring a thick semiconductor layer in SOI to fabricate vertical bipolar transistors with low collector resistance.
    Type: Application
    Filed: January 10, 2001
    Publication date: July 11, 2002
    Applicant: International Business Machines Corporation
    Inventor: Tak Hung Ning
  • Patent number: 6414370
    Abstract: A semiconductor circuit or a semiconductor device has the current-voltage characteristic that, in a blocking-state of the semiconductor circuit or the semiconductor device, a current gently flows for values of a voltage equal to or greater than a first voltage value but equal to or smaller than a second voltage value, whereas a current abruptly flows for values of a voltage greater than the second voltage value. Due to the current-voltage characteristic, energy accumulated in an inductance provided within the circuit is consumed by a differential resistance of the semiconductor circuit or a semiconductor, thereby preventing the occurrence of the electromagnetic noise and an excessively large voltage.
    Type: Grant
    Filed: August 17, 2000
    Date of Patent: July 2, 2002
    Assignee: Hitachi, Ltd.
    Inventors: Masahiro Nagasu, Hideo Kobayashi, Hideki Miyazaki, Shin Kimura, Junichi Sakano, Mutsuhiro Mori
  • Patent number: 6335558
    Abstract: An epitaxial layer is formed on a P type silicon substrate in which a plurality of P+ buried layer regions, a plurality of N+ buried layer regions, and a P+ field layer region occupying most of the substrate surface are diffused. The substrate is loaded in a reactor with a carrier gas. The substrate is pre-baked at a temperature of approximately 850° C. As the substrate is heated to a temperature of 1050° C., N+ dopant gas is injected into the carrier gas to suppress autodoping due to P+ atoms that escape from the P+ buried layer regions. The substrate is subjected to a high temperature bake cycle in the presence of the N+ dopant gas. A first thin intrinsic epitaxial cap layer is deposited on the substrate, which then is subjected to a high temperature gas purge cycle at 1080° C. A second thin intrinsic epitaxial cap layer then is deposited on the first, and a second high temperature gas purge cycle is performed at 1080° C.
    Type: Grant
    Filed: May 17, 2000
    Date of Patent: January 1, 2002
    Assignee: Texas Instruments Incorporated
    Inventors: Vladimir F. Drobny, Kevin Bao
  • Patent number: 6326674
    Abstract: A complementary bipolar transistor having a lateral npn bipolar transistor, a vertical and a lateral pnp bipolar transistor, an integrated injection logic, a diffusion capacitor, a polysilicon capacitor and polysilicon resistors are disclosed. The lateral pnp bipolar transistor has an emitter region and a collector region which includes high-density regions and low-density regions, and the emitter region is formed in an n type tub region. In the integrated injection logic circuit, collector regions are surrounded by a high-density p type region, and low-density p type regions are formed under the collector regions. The diffusion capacitor and the polysilicon capacitor are formed in one substrate. The diffusion regions except the regions formed by diffusing the impurities in the polysilicon resistors into the epitaxial layer are formed before forming the polysilicon resistors, and polysilicon electrodes are formed along with the polysilicon resistors.
    Type: Grant
    Filed: November 30, 1999
    Date of Patent: December 4, 2001
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-Hwan Kim, Tae-Hoon Kwon, Cheol-Joong Kim, Suk-Kyun Lee
  • Patent number: 6222250
    Abstract: A semiconductor device is provided in which a vertical NPN transistor and a vertical PNP transistor electrically isolated from each other are formed on a p-type semiconductor substrate. An n-type buried separating region of the vertical PNP transistor is formed by high-energy ion implantation prior to formation of the n+ type buried collector region of the vertical NPN transistor, and a p+ type buried collector region of the vertical PNP transistor is formed subsequently to formation of an n-type epitaxial layer and a device separating region is formed in the n-type epitaxial layer whereby the thickness of the n-type epitaxial layer is optimized to a required minimum value. A method for producing a semiconductor device is also provided in which a first vertical bipolar transistor of a first conductivity type and a second vertical bipolar transistor of a second conductivity type, electrically isolated from each other, are formed on a semiconductor substrate having a pre-set conductivity type.
    Type: Grant
    Filed: July 9, 1998
    Date of Patent: April 24, 2001
    Assignee: Sony Corporation
    Inventor: Takayuki Gomi
  • Patent number: 6218725
    Abstract: A bipolar transistor and a method of fabricating the same are provided which are adapted to reduce chip size and production costs. To produce the transistor, a second conductive type well region is formed in a first conductive type semiconductor substrate and isolation trenches are formed at both sides of the well region. A high density second conductive type buried layer is formed in the semiconductor substrate which is formed at the bottom of the isolation trench. The buried layer is formed in two regions surrounding respective bottoms of two adjacent isolation trenches. The two regions are electrically connected with each other and in direct contact with the well region. An extrinsic base region and a device isolation region are formed sequentially onto the semiconductor substrate using a nitration layer pattern as a mask, wherein the nitration layer pattern is formed on the surface of semiconductor substrate.
    Type: Grant
    Filed: August 10, 1999
    Date of Patent: April 17, 2001
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Chang-ki Jeon
  • Patent number: 6166426
    Abstract: A substantially concentric lateral bipolar transistor and the method of forming same. A base region is disposed about a periphery of an emitter region, and a collector region is disposed about a periphery of the base region to form the concentric lateral bipolar transistor of the invention. A gate overlies the substrate and at least a portion of the base region. At least one electrical contact is formed connecting the base and the gate, although a plurality of contacts may be formed. A further bipolar transistor is formed according to the following method of the invention. A base region is formed in a substrate and a gate region is formed overlying at least a portion of the base region. Emitter and collector terminals are formed on opposed sides of the base region. The gage is used as a mask during first and second ion implants.
    Type: Grant
    Filed: January 20, 1999
    Date of Patent: December 26, 2000
    Assignee: Micron Technology, Inc.
    Inventors: Kirk D. Prall, Mike P. Violette
  • Patent number: 6140694
    Abstract: An integrated injection logic device is provided in which each collector of an I2L gate is isolated by a field oxide ("FOX"), or by other suitable isolation such as, for example, an isolation trench. The connection of the base to the collectors, between the base contact region and the bottom of the collectors, is made underneath the field oxide using a buried p type layer (TN3 in the Figures illustrating the invention). Because both silicide and heavy implant p+ implant is present at the base contact point only, the recombination current is reduced. This reduces the current loss when compared to the current loss of the known device. Additionally, current gain is also improved by placing a deep base implant close to the emitter of the upside down NPN transistor in the integrated logic device. The area of the base and the area of the collectors is decoupled, i.e.
    Type: Grant
    Filed: December 30, 1998
    Date of Patent: October 31, 2000
    Assignee: Philips Electronics North America Corporation
    Inventors: Chun-Yu Chen, Gilles Marcel Ferru, Serge Bardy
  • Patent number: 6137154
    Abstract: An improved bipolar transistor (202) has an increased Early voltage and can be integrated on a semiconductor die with MOS transistors (201) and other types of devices to form an integrated circuit (200). A p-type base region (240) is disposed in an n-type collector region (252). An n-type emitter region (244) is disposed within the base region, and a p-type enhancement region (250) is formed to extend under the emitter region to a depth greater than the base depth. The improved bipolar transistor can be fabricated without significantly affecting the operation of other devices on the integrated circuit.
    Type: Grant
    Filed: February 2, 1998
    Date of Patent: October 24, 2000
    Assignee: Motorola, Inc.
    Inventor: Jose M. Capilla
  • Patent number: 6127723
    Abstract: An integrated device in an emitter-switching configuration comprises a first bipolar transistor having a base region, an emitter region, and a collector region, a second transistor having a charge-collection terminal connected to an emitter terminal of the first transistor, and a quenching element having a terminal connected to a base terminal of the first transistor. The quenching element is formed within the base region or the emitter region of the first transistor.
    Type: Grant
    Filed: January 30, 1998
    Date of Patent: October 3, 2000
    Assignee: SGS-Thomson Microelectronics, S.r.l.
    Inventors: Natale Aiello, Atanasio La Barbera, Stefano Sueri, Sergio Spampinato
  • Patent number: 6049131
    Abstract: A method and the device produced by the method of selective refractory metal growth/deposition on exposed silicon, but not on the field oxide is disclosed. The method includes preconditioning a wafer in a DHF dip followed by the steps of 1) selectively depositing a refractory metal on the exposed surfaces of the silicon substrate by reacting a refractory metal halide with the exposed surfaces of said silicon substrate; 2) limiting silicon substrate consumption by reacting the refractory metal halide with a silicon containing gas; and 3) further increasing the refractory metal thickness by reacting the refractory metal halide with hydrogen. Through an adequate pretreatment and selection of the parameters of 1) temperature; 2) pressure; 3) time; 4) flow and 5) flow ratio during each of the deposition steps, this invention adequately addresses the difficulties of uneven n+ versus p+ (source/drain) growth, deep consumption/encroachment by the refractory metal into silicon regions (e.g.
    Type: Grant
    Filed: July 3, 1997
    Date of Patent: April 11, 2000
    Assignee: International Business Machines Corporation
    Inventors: Stephen Bruce Brodsky, Richard Anthony Conti, Seshadri Subbanna
  • Patent number: 6008524
    Abstract: A logic circuit is formed of an I.sup.2 L cell structure in which a difference of switching speeds at every collector in a multi-collector structure is small. In a semiconductor device in which an integrated injection logic cell including a constant current source transistor and a switch transistor is formed on a common semiconductor substrate, a first semiconductor layer (13) doped with a first conductivity type impurity and a second semiconductor layer (19) doped with a second conductivity impurity are electrically isolated from each other on a semiconductor substrate. A plurality of collector electrodes of the switch transistor and a plurality of collector regions (20) based on diffusion of impurity are formed by the second semiconductor layer (19). The first semiconductor layer (13) includes a base electrode deriving portion, and a direct contact portion which directly contacts with the semiconductor substrate between a plurality of collector regions (20).
    Type: Grant
    Filed: May 15, 1996
    Date of Patent: December 28, 1999
    Assignee: Sony Corporation
    Inventor: Takayuki Gomi
  • Patent number: 6005284
    Abstract: A bipolar semiconductor device includes an npn transistor using a base outlet electrode in the form of a polycrystalline Si film and one or more other devices using an electrode in the form of a polycrystalline Si film supported on a common p-type Si substrate, the sheet resistance of the polycrystalline Si film forming the base outlet electrode of the npn transistor is decreased to two thirds of the sheet resistance of the polycrystalline Si film forming at least one electrode of at least one other device. The base outlet electrode can be made by first making the polycrystalline Si film on the entire surface of the substrate, then applying selective ion implantation of Si to a selective portion of the polycrystalline Si film for making the base outlet electrode to change it into an amorphous state, and then annealing the product to grow the polycrystalline Si film by solid-phase growth.
    Type: Grant
    Filed: May 21, 1997
    Date of Patent: December 21, 1999
    Assignee: Sony Corporation
    Inventors: Hirokazu Ejiri, Hiroyuki Miwa, Hiroaki Ammo
  • Patent number: 5915186
    Abstract: In a semiconductor device manufacturing method for forming first and second bipolar transistors on a semiconductor substrate 1, a link base layer 5 for connecting a graft base layer (graft base layer 8) of the first bipolar transistor and an intrinsic base layer 12 to each other, and at least a part of a base layer 6 of the second bipolar transistor are formed simultaneously with each other, and then the link base layer 5 in a region where the intrinsic base layer 12 will be formed is removed by an etching treatment, and then by a selective epitaxial growth method, the intrinsic base layer 12 is formed in the region where the link base layer 5 is removed.
    Type: Grant
    Filed: December 18, 1997
    Date of Patent: June 22, 1999
    Assignee: Sony Corporation
    Inventor: Takayuki Gomi
  • Patent number: 5693978
    Abstract: A logic circuit (3) comprises IIL aggregates (4a, 4b, 4c) each consisting of a plurality of IIL elements. Each of the IIL aggregates (4a, 4b, 4c) is supplied with an injector current (I.sub.inj) from an injector current source (2) through a wiring (5). A monitoring element (6) is formed by utilizing an IIL element which needs the longest time until the injector current therein attains a predetermined value. When the injector current applied to an injector current input end (9) attains the predetermined value, potentials of an output terminal (10) and a reset signal input terminal (7) fall. Therefore, a reset operation is performed in accordance with the IIL element which needs the longest time until the injector current attains the predetermined value.
    Type: Grant
    Filed: March 5, 1997
    Date of Patent: December 2, 1997
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Koji Kashimoto
  • Patent number: 5641691
    Abstract: A method is described for fabricating a complementary, vertical bipolar semiconducting structure. An N+ silicon island and a P+ silicon island separated by a first oxide layer are formed on a sapphire substrate. An NPN junction device is formed on the N+ silicon island by epitaxially growing an N-type silicon layer on the N+ silicon island. Then, a P region is created in the N-type silicon layer. An N+ region created in the P region completes the NPN junction device. Similarly, a PNP junction device is formed by epitaxially growing a P-type silicon layer on the P+ silicon island. Then, an N region is created in the P-type silicon layer. A P+ region created in the N region completes the PNP junction device.
    Type: Grant
    Filed: April 3, 1995
    Date of Patent: June 24, 1997
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Eric N. Cartagena, Howard W. Walker