With Thin Active Central Semiconductor Portion Surrounded By Thicker Inactive Shoulder (e.g., For Mechanical Support) Patents (Class 257/619)
  • Patent number: 8624358
    Abstract: A semiconductor substrate having a semiconductor device formable area, wherein a reinforcing part, which is thicker than the semiconductor device formable area and has a top part of which surface is flat, is formed on an outer circumference part of the semiconductor substrate, and an inner side surface connecting the top part of the reinforcing part and the semiconductor device formable area has a cross-sectional shape of which inner diameter becomes smaller as being closer to the semiconductor device formable area.
    Type: Grant
    Filed: June 3, 2010
    Date of Patent: January 7, 2014
    Assignee: Mitsumi Electric Co., Ltd.
    Inventor: Mitsuharu Yamazaki
  • Patent number: 8624339
    Abstract: A vibrating device has a package having an accommodating space in the interior thereof and a gyro element and an IC chip accommodated in the accommodating space. The package has a plate-like bottom plate having an IC chip mounting area and a vibrating element mounting area. The IC chip mounting area includes an IC chip mounting surface on which the IC chip is mounted. The vibrating element mounting area is arranged in parallel with the IC chip mounting area and includes a vibrating element mounting surface on which the gyro element is mounted. The thickness of the IC chip mounting area is smaller than that of the vibrating element mounting area. The IC chip mounting surface is located closer to a bottom side than the vibrating element mounting surface.
    Type: Grant
    Filed: July 24, 2012
    Date of Patent: January 7, 2014
    Assignee: Seiko Epson Corporation
    Inventors: Norihito Matsukawa, Atsushi Ono, Mitsuhiro Tateyama, Tsunenori Shibata
  • Patent number: 8569115
    Abstract: A compliant bipolar micro device transfer head array and method of forming a compliant bipolar micro device transfer array from an SOI substrate are described. In an embodiment, a compliant bipolar micro device transfer head array includes a base substrate and a patterned silicon layer over the base substrate. The patterned silicon layer may include first and second silicon interconnects, and first and second arrays of silicon electrodes electrically connected with the first and second silicon interconnects and deflectable into one or more cavities between the base substrate and the silicon electrodes.
    Type: Grant
    Filed: July 6, 2012
    Date of Patent: October 29, 2013
    Assignee: LuxVue Technology Corporation
    Inventors: Dariusz Golda, Andreas Bibl
  • Patent number: 8502350
    Abstract: According to one embodiment, stacked layers of a nitride semiconductor include a substrate, a single crystal layer and a nitride semiconductor layer. The substrate does not include a nitride semiconductor and has a protrusion on a major surface. The single crystal layer is provided directly on the major surface of the substrate to cover the protrusion, and includes a crack therein. The nitride semiconductor layer is provided on the single crystal layer.
    Type: Grant
    Filed: May 6, 2011
    Date of Patent: August 6, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hideto Sugawara, Masaaki Onomura
  • Patent number: 8461665
    Abstract: A wafer is provided that is stacked on and anodically bonded to another wafer to form a plurality of package products each having a cavity in which an operation piece is contained between the wafers. The wafers has a product area in which a plurality of concave portions are formed each of which will be part of the cavity when stacked on the another wafer, and grooves or slits are formed extending from the central portion in radial direction to the outside in radial direction of the wafer and reaching the outside of the product area.
    Type: Grant
    Filed: May 24, 2011
    Date of Patent: June 11, 2013
    Assignee: Seiko Instruments Inc.
    Inventor: Takeshi Sugiyama
  • Patent number: 8455983
    Abstract: Methods of forming microelectronic device wafers include fabricating a plurality of semiconductor dies at an active side of a semiconductor wafer, depositing a mask on the semiconductor wafer, removing a central portion of the mask and the semiconductor wafer, and etching. The semiconductor wafer has an outer perimeter edge and a backside that is spaced from the active side by a first thickness. The mask is deposited on the backside of the semiconductor wafer and has a face that is spaced from the backside by a mask thickness. The thinned portion has a thinned surface that is spaced from the active side by a second thickness that is less than the first thickness, and the thinned surface is etched.
    Type: Grant
    Filed: November 22, 2011
    Date of Patent: June 4, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Alan G. Wood, Ed A. Schrock, Ford B. Grigg
  • Patent number: 8426945
    Abstract: To provide a semiconductor device in which a channel formation region can be thinned without adversely affecting a source region and a drain region through a simple process and a method for manufacturing the semiconductor device. In the method for manufacturing a semiconductor device, a semiconductor film, having a thickness smaller than a height of a projection of a substrate, is formed over a surface of the substrate having the projections; the semiconductor film is etched to have an island shape with a resist used as a mask; the resist is etched to expose a portion of the semiconductor film which covers a top surface of the projection; and the exposed portion of the semiconductor film is etched to be thin, while the adjacent portions of the semiconductor film on both sides of the projection remain covered with the resist.
    Type: Grant
    Filed: September 6, 2011
    Date of Patent: April 23, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Masaharu Nagai, Takafumi Mizoguchi
  • Patent number: 8415768
    Abstract: A compliant monopolar micro device transfer head array and method of forming a compliant monopolar micro device transfer array from an SOI substrate are described. In an embodiment, the micro device transfer head array including a base substrate and a patterned silicon layer over the base substrate. The patterned silicon layer may include a silicon interconnect and an array of silicon electrodes electrically connected with the silicon interconnect. Each silicon electrode includes a mesa structure protruding above the silicon interconnect, and each silicon electrode is deflectable into a cavity between the base substrate and the silicon electrode. A dielectric layer covers a top surface of each mesa structure.
    Type: Grant
    Filed: July 6, 2012
    Date of Patent: April 9, 2013
    Assignee: LuxVue Technology Corporation
    Inventors: Dariusz Golda, Andreas Bibl
  • Patent number: 8415767
    Abstract: A compliant bipolar micro device transfer head array and method of forming a compliant bipolar micro device transfer array from an SOI substrate are described. In an embodiment, a compliant bipolar micro device transfer head array includes a base substrate and a patterned silicon layer over the base substrate. The patterned silicon layer may include first and second silicon interconnects, and first and second arrays of silicon electrodes electrically connected with the first and second silicon interconnects and deflectable into one or more cavities between the base substrate and the silicon electrodes.
    Type: Grant
    Filed: July 6, 2012
    Date of Patent: April 9, 2013
    Assignee: LuxVue Technology Corporation
    Inventors: Dariusz Golda, Andreas Bibl
  • Patent number: 8395240
    Abstract: A method for manufacturing a semiconductor device having improved contact structure includes providing a semiconductor substrate, forming a plurality of gate structures formed on a portion of the substrate, forming an interlayer dielectric layer overlying the gate structures, and forming a first copper interconnect layer overlying the substantially flat surface region of the interlayer dielectric layer. The method further includes forming a dielectric layer overlying the first copper interconnect layer, forming a second copper interconnect layer overlying the dielectric layer, and providing a copper ring structure enclosing an entirety of an inner region of the dielectric layer, the copper ring structure being provided between the first copper interconnect layer and the second copper interconnect layer to maintain the inner region of the dielectric layer. In addition, the method includes forming a bonding pad structure overlying a region within the inner region of the dielectric layer.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: March 12, 2013
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: Xian J. Ning
  • Patent number: 8395239
    Abstract: A semiconductor device includes a substrate having a seal ring region and a circuit region, at least one corner bump disposed in the circuit region, a seal ring structure disposed in the seal ring region, and a connector electrically coupling a metal layer of the seal ring structure to the at least one corner bump. The at least one corner bump is configured to be coupled to a signal ground. A method of fabricating a semiconductor device includes providing a substrate having a seal ring region and a circuit region, providing at least one corner bump in a triangular corner bump zone in the circuit region, providing a seal ring structure in the seal ring region, electrically coupling a metal layer of the seal ring structure to the at least one corner bump, and electrically coupling the at least one corner bump to a signal ground.
    Type: Grant
    Filed: October 29, 2010
    Date of Patent: March 12, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsien-Wei Chen, Chung-Ying Yang
  • Patent number: 8390111
    Abstract: One embodiment of a micro-electronic device includes a substrate including micro-electronic components thereon, and a cover including a ring of sealing material secured to the substrate and a raised ring of material positioned opposite the cover from the ring of sealing material.
    Type: Grant
    Filed: October 23, 2007
    Date of Patent: March 5, 2013
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventor: Kirby Sand
  • Patent number: 8362593
    Abstract: A system and method for stacking semiconductor dies is disclosed. A preferred embodiment comprises forming through-silicon vias through the wafer, protecting a rim edge of the wafer, and then removing the unprotected portions so that the rim edge has a greater thickness than the thinned wafer. This thickness helps the fragile wafer survive further transport and process steps. The rim edge is then preferably removed during singulation of the individual dies from the wafer.
    Type: Grant
    Filed: June 24, 2011
    Date of Patent: January 29, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ku-Feng Yang, Weng-Jin Wu, Wen-Chih Chiou, Chen-Hua Yu
  • Patent number: 8350364
    Abstract: An electronic component includes a semiconductor chip with an active front face and a passive rear face, with contact connections and contact surfaces respectively being provided on the active front face and/or on the passive rear face, and with conductive connections being provided in the form of structured conductive tracks for providing an electrical connection from the active front face to the passive rear face. An electronic assembly formed of stacked semiconductor chips, and a method for producing the electronic component and the electronic assembly are also provided.
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: January 8, 2013
    Assignee: Qimonda AG
    Inventors: Harry Hedler, Ingo Wennemuth
  • Patent number: 8349707
    Abstract: A process for producing electrical contact connections for a component integrated in a substrate material is provided, the substrate material having a first surface region, and at least one terminal contact being arranged at least partially in the first surface region for each component, which is distinguished in particular by application of a covering to the first surface region and production of at least one contact passage which, in the substrate material, runs transversely with respect to the first surface region, in which process, in order to form at least one contact location in a second surface region which is to be provided, at least one electrical contact connection from the contact location to at least one of the terminal contacts is produced via the respective contact passages.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: January 8, 2013
    Assignee: Wafer-Level Packaging Portfolio LLC
    Inventors: Dipl.-Ing. Florian Bieck, Jürgen Leib
  • Patent number: 8344484
    Abstract: A semiconductor device may include, but is not limited to: a semiconductor substrate having an element formation region and a dicing region; an element layer over the element formation region and the dicing region; and a multi-layered wiring structure over the dicing region. The multi-layered wiring structure extends upwardly from the element layer. The multi-layered wiring structure has a groove penetrating the multi-layered wiring structure.
    Type: Grant
    Filed: December 15, 2010
    Date of Patent: January 1, 2013
    Assignee: Elpida Memory, Inc.
    Inventor: Toyonori Eto
  • Patent number: 8330231
    Abstract: A transistor structure is formed by providing a semiconductor substrate and providing a gate above the semiconductor substrate. The gate is separated from the semiconductor substrate by a gate insulating layer. A source and a drain are provided adjacent the gate to define a transistor channel underlying the gate and separated from the gate by the gate insulating layer. A barrier layer is formed by applying nitrogen or carbon on opposing outer vertical sides of the transistor channel between the transistor channel and each of the source and the drain. In each of the nitrogen and the carbon embodiments, the vertical channel barrier retards diffusion of the source/drain dopant species into the transistor channel. There are methods for forming the transistor structure.
    Type: Grant
    Filed: March 16, 2011
    Date of Patent: December 11, 2012
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Da Zhang, Ning Liu, Mohamed S. Moosa
  • Patent number: 8314449
    Abstract: A MIS transistor, formed on a semiconductor substrate, assumed to comprise a semiconductor substrate (702, 910) comprising a projecting part (704, 910B) with at least two different crystal planes on the surface on a principal plane, a gate insulator (708, 920B) for covering at least a part of each of said at least two different crystal planes constituting the surface of the projecting part, a gate electrode (706, 930B), comprised on each of said at least two different crystal planes constituting the surface of the projecting part, which sandwiches the gate insulator with the said at least two different planes, and a single conductivity type diffusion region (710a, 710b, 910c, 910d) formed in the projecting part facing each of said at least two different crystal planes and individually formed on both sides of the gate electrode. Such a configuration allows control over increase in the element area and increase of channel width.
    Type: Grant
    Filed: October 22, 2009
    Date of Patent: November 20, 2012
    Assignee: Foundation For Advancement Of International Science
    Inventors: Takefumi Nishimuta, Hiroshi Miyagi, Tadahiro Ohmi, Shigetoshi Sugawa, Akinobu Teramoto
  • Patent number: 8310032
    Abstract: In a wafer, a first chip region and a second chip region are separated from each other by a dicing region. The dicing region includes: a first center region; a first intermediate region located on the first chip region's side of the first center region; a second intermediate region located on the second chip region's side of the first center region; a first outer region located on the first chip region's side of the first intermediate region; and a second outer region located on the second chip region's side of the second intermediate region. Surfaces of the first and second intermediate regions are respectively covered by bank-shaped resin films extending in a longitudinal direction of the dicing region. Respective surfaces of the first center region, the first outer region and the second outer region are not covered by resin films.
    Type: Grant
    Filed: October 8, 2010
    Date of Patent: November 13, 2012
    Assignee: Renesas Electronics Corporation
    Inventor: Yoshitsugu Kawashima
  • Patent number: 8309403
    Abstract: A method for encapsulating electronic components, including the steps of: forming, in a first surface of a semiconductor wafer, electronic components; forming, on the first surface, an interconnection stack including conductive tracks and vias separated by an insulating material; forming first and second bonding pads on the interconnection stack; thinning down the wafer, except at least on its contour; filling the thinned-down region with a first resin layer; arranging at least one first chip on the first bonding pads and forming solder bumps on the second bonding pads; depositing a second resin layer covering the first chips and partially covering the solder bumps; bonding an adhesive strip on the first resin layer; and scribing the structure into individual chips.
    Type: Grant
    Filed: November 16, 2010
    Date of Patent: November 13, 2012
    Assignee: STMicroelectronics (Tours) SAS
    Inventors: Marc Feron, Vincent Jarry, Laurent Barreau
  • Patent number: 8274132
    Abstract: An electrical device with a fin structure, a first section of the fin structure having a first width and a first height, a second section of the fin structure having a second width and a second height, wherein the first width is smaller than the second width and the first height is lower than the second height.
    Type: Grant
    Filed: February 14, 2008
    Date of Patent: September 25, 2012
    Assignee: Infineon Technologies AG
    Inventors: Christian Russ, Gunther Lehmann, Franz Ungar
  • Patent number: 8222810
    Abstract: A substrate board, a fabricating method thereof, and a display using the same are provided. The substrate board includes a substrate having at least a rigid area and at least a flexible area, and at least an electronic component disposed on a surface of the substrate, wherein the rigid area is thicker than the flexible area. A patterned high-extensive material may be additionally disposed on the substrate to improve reliability thereof. The rigid area and the flexible area may be formed by molds or cutters. By using an above structure, the electronic component is less affected when the substrate is under stress, so that good characteristics are maintained.
    Type: Grant
    Filed: April 15, 2009
    Date of Patent: July 17, 2012
    Assignee: Industrial Technology Research Institute
    Inventors: Jing-Yi Yan, Shu-Tang Yeh
  • Patent number: 8217381
    Abstract: In an aspect, the present invention provides stretchable, and optionally printable, components such as semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed, and related methods of making or tuning such stretchable components. Stretchable semiconductors and electronic circuits preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention are adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.
    Type: Grant
    Filed: September 6, 2007
    Date of Patent: July 10, 2012
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: John A. Rogers, Matthew Meitl, Yugang Sun, Heung Cho Ko, Andrew Carlson, Won Mook Choi, Mark Stoykovich, Hanqing Jiang, Yonggang Huang, Ralph G. Nuzzo, Keon Jae Lee, Zhengtao Zhu, Etienne Menard, Dahl-Young Khang, Seong Jun Kang, Jong Hyun Ahn, Hoon-sik Kim
  • Patent number: 8198621
    Abstract: The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.
    Type: Grant
    Filed: March 17, 2009
    Date of Patent: June 12, 2012
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: John A. Rogers, Dahl-Young Khang, Yugang Sun, Etienne Menard
  • Patent number: 8188574
    Abstract: A microelectronic element, e.g., a semiconductor chip having a silicon-on-insulator layer (“SOI layer”) separated from a bulk monocrystalline silicon layer by a buried oxide (BOX) layer in which a crack stop extends in first lateral directions at least generally parallel to the edges of the chip to define a ring-like barrier separating an active portion of the chip inside the barrier with a peripheral portion of the chip. The crack stop can include a first crack stop ring contacting a silicon portion of the chip above the BOX layer; the first crack stop ring may extend continuously in the first lateral directions to surround the active portion of the chip. A guard ring (“GR”) including a GR contact ring can extend downwardly through the SOI layer and the BOX layer to conductively contact the bulk monocrystalline silicon region, the GR contact ring extending at least generally parallel to the first crack stop ring to surround the active portion of the chip.
    Type: Grant
    Filed: February 12, 2010
    Date of Patent: May 29, 2012
    Assignee: International Business Machines Corporation
    Inventors: Matthew S. Angyal, Mahender Kumar, Effendi Leobandung, Jay W. Strane
  • Patent number: 8187907
    Abstract: A method of manufacturing a solar cell by providing a first substrate; depositing on the first substrate a sequence of layers of semiconductor material forming a solar cell including a top subcell and a bottom subcell; forming a metal back contact over the bottom subcell; forming a group of discrete, spaced-apart first bonding elements over the surface of the back metal contact; attaching a surrogate substrate on top of the back metal contact using the bonding elements; and removing the first substrate to expose the surface of the top subcell.
    Type: Grant
    Filed: May 7, 2010
    Date of Patent: May 29, 2012
    Assignee: Emcore Solar Power, Inc.
    Inventor: Fred Newman
  • Patent number: 8169019
    Abstract: A metal-oxide-semiconductor chip having a semiconductor substrate, an epitaxial layer, at least a MOS cell, and a metal pattern layer is provided. The epitaxial layer is located on the semiconductor substrate and has an active region, a termination region, and a scribe line preserving region defined on an upper surface thereof. An etched sidewall of the epitaxial layer is located in the scribe line preserving region. The boundary portion of the upper surface of the semiconductor substrate is thus exposed. The MOS cell is located in the active region. The metal pattern layer is located on the epitaxial layer and has a gate pad coupled to the gate of the MOS cell, a source pad coupled to the source of the MOS cell, and a drain pattern, which is partly located on the upper surface of the semiconductor substrate.
    Type: Grant
    Filed: September 10, 2009
    Date of Patent: May 1, 2012
    Assignee: Niko Semiconductor Co., Ltd.
    Inventors: Kuo-Chang Tsen, Kao-Way Tu
  • Patent number: 8143721
    Abstract: Devices and methods for their formation, including electronic assemblies having a shape memory material structure, are described. In one embodiment, a device includes a package substrate and an electronic component coupled to the package substrate. The device also includes a shape memory material structure coupled to the package substrate. In one aspect of certain embodiments, the shape memory material structure is formed from a material selected to have a martensite to austenite transition temperature in the range of 50-300 degrees Celsius. In another aspect of certain embodiments, the shape memory material structure is positioned to extend around a periphery of the electronic component. Other embodiments are described and claimed.
    Type: Grant
    Filed: June 29, 2007
    Date of Patent: March 27, 2012
    Assignee: Intel Corporation
    Inventors: Stewart M. Ongchin, King Gonzalez, Vadim Sherman, Stephen Tisdale, Xiaoqing Ma
  • Publication number: 20120068311
    Abstract: A semiconductor substrate having a semiconductor device formable area, wherein a reinforcing part, which is thicker than the semiconductor device formable area and has a top part of which surface is flat, is formed on an outer circumference part of the semiconductor substrate, and an inner side surface connecting the top part of the reinforcing part and the semiconductor device formable area has a cross-sectional shape of which inner diameter becomes smaller as being closer to the semiconductor device formable area.
    Type: Application
    Filed: June 3, 2010
    Publication date: March 22, 2012
    Inventor: Mitsuharu Yamazaki
  • Patent number: 8124455
    Abstract: A wafer strength reinforcement system is provided including providing a wafer, providing a tape for supporting the wafer, and positioning a wafer edge support material for location between the tape and the wafer.
    Type: Grant
    Filed: December 15, 2005
    Date of Patent: February 28, 2012
    Assignee: STATS ChipPAC Ltd.
    Inventors: Heap Hoe Kuan, Byung Tai Do
  • Patent number: 8111523
    Abstract: A wiring board for use in mounting an electronic component includes a switch element portion interposed in a signal transmission line including a wiring layer linked to an electrode terminal of the electronic component. The switch element portion has such a structure as to change the shape thereof depending on a temperature, and to disconnect the signal transmission line when the temperature exceeds a predetermined temperature. A conductor layer which constitutes a portion of the signal transmission line is formed at the bottom of a cavity formed in an electronic component mounting surface side of the wiring board. One end of the switch element portion is fixedly connected to the wiring layer, and another end thereof is in contact with the conductor layer when the temperature is equal to or lower than the predetermined temperature.
    Type: Grant
    Filed: January 27, 2009
    Date of Patent: February 7, 2012
    Assignee: Shinko Electric Industries Co., Ltd.
    Inventors: Masahiro Sunohara, Kei Murayama
  • Patent number: 8110898
    Abstract: A structure consisting of well-ordered semiconductor structures embedded in a binder material which maintains the ordering and orientation of the semiconductor structures. Methods for forming such a structure include forming the semiconductor structures on a substrate, casting a binder material onto the substrate to embed the semiconductor structures in the binder material, and separating the binder material from the substrate at the substrate. These methods provide for the retention of the orientation and order of highly ordered semiconductor structures in the separated binder material.
    Type: Grant
    Filed: July 18, 2008
    Date of Patent: February 7, 2012
    Assignee: California Institute of Technology
    Inventors: Nathan S. Lewis, Katherine E. Plass, Joshua M. Spurgeon, Harry A. Atwater
  • Patent number: 8092594
    Abstract: The present invention relates to a carbon ribbon for covering in a thin layer of semiconductor material, and to a method of deposited such a layer on a substrate constituted by a carbon ribbon. At least one of the two faces of the carbon ribbon is for covering in a layer of semiconductor material by causing the ribbon to pass substantially vertically upwards through a bath of molten semiconductor material. According to the invention, the two edges of at least one of the two faces of the carbon ribbon project so as to form respective rims.
    Type: Grant
    Filed: June 7, 2006
    Date of Patent: January 10, 2012
    Assignee: SOLARFORCE
    Inventor: Christian Belouet
  • Patent number: 8076169
    Abstract: The invention relates to a method of fabricating an electromechanical device including an active element, wherein the method comprises the following steps: a) making a monocrystalline first stop layer on a monocrystalline layer of a first substrate; b) growing a monocrystalline mechanical layer epitaxially on said first stop layer out of at least one material that is different from that of the stop layer; c) making a sacrificial layer on said active layer out of a material that is suitable for being etched selectively relative to said mechanical layer; d) making a bonding layer on the sacrificial layer; e) bonding a second substrate on the bonding layer; and f) eliminating the first substrate and the stop layer to reveal the surface of the mechanical layer opposite from the sacrificial layer, the active element being made by at least a portion of the mechanical layer.
    Type: Grant
    Filed: June 22, 2009
    Date of Patent: December 13, 2011
    Assignee: Commissariat A L'energie Atomique
    Inventors: Francois Perruchot, Bernard Diem, Vincent Larrey, Laurent Clavelier, Emmanuel Defay
  • Patent number: 8076190
    Abstract: A semiconductor device and a method of fabricating a semiconductor device is disclosed, the method comprises including: forming etching an oxide layer to form a pattern of parallel oxide bars on a substrate; forming nitride spacers on side walls of the parallel oxide bars, with gaps remaining between adjacent nitride spacers; forming silicon pillars in the gaps; removing the nitride spacers to form a plurality of fin bodies; forming an isolation region in between each of the fin bodies; and coating the plurality of fin bodies, the nitride spacers, and the isolation regions with a protective film.
    Type: Grant
    Filed: August 4, 2009
    Date of Patent: December 13, 2011
    Assignee: International Business Machines Corporation
    Inventors: Howard H. Chen, Louis C. Hsu, Jack A. Mandelman, Chun-Yung Sung
  • Patent number: 8067819
    Abstract: The present invention discloses a semiconductor wafer having a scribe line dividing the semiconductor wafer into a matrix of plural semiconductor chips. The semiconductor wafer includes a polysilicon layer, a poly-metal interlayer insulation film formed on the polysilicon layer, and a first metal wiring layer formed on the poly-metal interlayer insulation film. The semiconductor wafer includes a process-monitor electrode pad formed on a dicing area of the scribe line. The process-monitor electrode pad has a width greater than the width of the dicing area. The process-monitor electrode pad includes a contact hole formed in the poly-metal insulation film for connecting the first metal wiring layer to the polysilicon layer.
    Type: Grant
    Filed: November 22, 2006
    Date of Patent: November 29, 2011
    Assignee: Ricoh Company, Ltd.
    Inventors: Masaaki Yoshida, Satoshi Kouno
  • Patent number: 8063488
    Abstract: The semiconductor device comprises a first area and a second area positioned adjacent to the outside of the first area, the semiconductor substrate having a main surface and side surfaces and disposed in such a manner that the main surface is positioned in the first area and each of the side surfaces is positioned at a boundary between the first area and the second area, a plurality of pads formed over the main surface of the semiconductor substrate and a plurality of external connecting terminals formed thereon, which are respectively electrically connected to the pads, a first resin portion which is formed over the main surface of the semiconductor substrate so as to cover the pads and has a main surface and side surfaces, and which is formed in such a manner that the external connecting terminals are exposed from the main surface and each of the side surfaces is positioned at the boundary, and a second resin portion which is positioned in the second area and formed so as to cover the side surfaces of the s
    Type: Grant
    Filed: March 27, 2009
    Date of Patent: November 22, 2011
    Assignee: Oki Semiconductor Co., Ltd.
    Inventors: Yoshio Itoh, Yoshimasa Kushima, Hirokazu Uchida
  • Patent number: 8049308
    Abstract: A semiconductor device having an improved contact structure. The device has a semiconductor substrate and a plurality of gate structures formed on the substrate. The device has a first interlayer dielectric overlying the gate structures. The device has a first copper interconnect layer overlying the first interlayer dielectric layer. The device also has a first low K dielectric layer overlying the first copper interconnect layer. A second copper interconnect layer is overlying the low K dielectric layer. In between the first and second copper layers is a copper ring structure enclosing an entirety of an inner region of the first low K dielectric layer. In a preferred embodiment, the copper ring structure is provided between the first copper interconnect layer and the second copper interconnect layer to maintain the inner region of the first low K dielectric layer. A bonding pad structure is overlying a region within the inner region.
    Type: Grant
    Filed: June 9, 2006
    Date of Patent: November 1, 2011
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: Xian J. Ning
  • Publication number: 20110260296
    Abstract: A semiconductor wafer (12) with a thinned central portion (2) has a first side (3) and a second side (4) and at least one reinforcement structure for increasing the radial bending resistance of the semiconductor wafer (12). The reinforcement structure provides at least one passage (10) for a fluid flow between an inner face (9) of said one reinforcement structure towards an outer face (8) of the reinforcement structure. The passages (10) are manufactured in a z-direction coming from above the semiconductor wafer (12) in a direction which is essentially perpendicular to the surface, e.g. to the first side (3), of the semiconductor wafer (12).
    Type: Application
    Filed: November 23, 2009
    Publication date: October 27, 2011
    Inventors: Florian Bieck, Carolinda Sukmadevi Asfhandy, Sven-Manfred Spiller
  • Publication number: 20110193198
    Abstract: An integrated circuit structure includes a semiconductor chip, which further includes a corner and a seal ring dispatched adjacent edges of the semiconductor chip; and a corner stress release (CSR) structure adjacent the corner and physically adjoining the seal ring. The CSR structure includes a portion in a top metallization layer. A circuit component selected from the group consisting essentially of an interconnect structure and an active circuit is directly underlying the CSR structure.
    Type: Application
    Filed: February 9, 2010
    Publication date: August 11, 2011
    Applicant: Taiwn Semiconductor Manufacturing Company, Ltd.
    Inventor: Hsien-Wei Chen
  • Patent number: 7994613
    Abstract: A semiconductor device may include a chip including a chip including a silicon substrate having a semiconductor device area, a pad area and a scribe lane defining an outer contour of the chip. A semiconductor device may be formed in the semiconductor device area, and a pad electrically connected with the semiconductor device may be formed in the pad area. A crack prevention pattern may be formed on an outer contour of the chip, such that the crack prevention pattern extends from a lowest portion to a highest portion of the semiconductor device. A crack prevention pattern is manufactured such that chip cracking can be prevented during the sawing process.
    Type: Grant
    Filed: November 3, 2008
    Date of Patent: August 9, 2011
    Assignee: Dongbu HiTek Co., Ltd.
    Inventor: Oh-Jin Jung
  • Patent number: 7956430
    Abstract: An accelerator sensor includes a semiconductor substrate having a main front surface and a main rear surface, a first groove portion being formed along a front surface pattern, in the main front surface, a second groove portion being formed along a rear surface pattern, in the main rear surface, a through-hole being formed because of connection between at least parts of the first groove portion and the second groove portion and at least one groove width variation portion being formed in at least one of inner walls of the first groove portion. An offset of the rear surface pattern to the front surface pattern can be inspected easily by existence of the groove width variation portion.
    Type: Grant
    Filed: September 10, 2009
    Date of Patent: June 7, 2011
    Assignee: Oki Semiconductor Co., Ltd.
    Inventor: Yoshihide Tasaki
  • Patent number: 7948060
    Abstract: An integrated circuit and corresponding method of manufacture. The integrated circuit has a die comprising: an outer strengthening ring around a periphery of the die, the outer ring having one or more gaps; and an inner strengthening ring within the outer ring and around interior circuitry of the die, the inner ring having one or more gaps offset from the gaps of the outer ring. One or more conducting members are electrically isolated from said rings and electrically connected to the interior circuitry, each member passing through a gap of the inner ring and through a gap of the outer ring.
    Type: Grant
    Filed: July 1, 2008
    Date of Patent: May 24, 2011
    Assignee: XMOS Limited
    Inventors: Ken Williamson, Michael David May, Simon Christopher Dequin Clemow
  • Patent number: 7938016
    Abstract: An apparatus and method uses a die having at least one perimeter side with multiple pads. A structure is positioned between the at least one perimeter side and the multiple pads having multiple layers within the die. The structure functions as both a strain gauge and a crack stop. The structure arrests cracks from propagating from the at least one perimeter side to an interior of the die and provides an electrical resistance value as a function of an amount of strain existing where the structure is positioned. In another form the structure is implemented on a substrate such as a printed circuit board rather than in a semiconductor die.
    Type: Grant
    Filed: March 20, 2009
    Date of Patent: May 10, 2011
    Assignee: Freescale Semiconductor, Inc.
    Inventor: Thomas H. Koschmieder
  • Patent number: 7923379
    Abstract: A method of forming an integrated circuit structure includes forming an opening in a substrate, with the opening extending from a top surface of the substrate into the substrate. The opening is filled with a filling material until a top surface of the filling material is substantially level with the top surface of the substrate. A device is formed over the top surface of the substrate, wherein the device includes a storage opening adjoining the filling material. A backside of the substrate is grinded until the filling material is exposed. The filling material is removed from the channel until the storage opening of the device is exposed.
    Type: Grant
    Filed: December 31, 2008
    Date of Patent: April 12, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jiou-Kang Lee, Ting-Hau Wu, Shang-Ying Tsai, Jung-Huei Peng, Chun-Ren Cheng
  • Patent number: 7919832
    Abstract: A resistor structure for an integrated circuit includes a first set of contacts connected between a semiconductor layer and a first conductive layer; and a second set of plugs connected between the first conductive layer and a second conductive layer, wherein the first set of contacts and the second set of plugs are coupled together as a first resistor segment to provide a predetermined resistance for the integrated circuit.
    Type: Grant
    Filed: January 11, 2007
    Date of Patent: April 5, 2011
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Fu-Lung Hsueh, Sung-Chieh Lin
  • Patent number: 7911011
    Abstract: Electromechanical non-volatile memory devices are provided including a semiconductor substrate having an upper surface including insulation characteristics. A first electrode pattern is provided on the semiconductor substrate. The first electrode pattern exposes portions of a surface of the semiconductor substrate therethrough. A conformal bit line is provided on the first electrode pattern and the exposed surface of semiconductor substrate. The bit line is spaced apart from a sidewall of the first electrode pattern and includes a conductive material having an elasticity generated by a voltage difference. An insulating layer pattern is provided on an upper surface of the bit line located on the semiconductor substrate. A second electrode pattern is spaced apart from the bit line and provided on the insulating layer pattern. The second electrode pattern faces the first electrode pattern. Related methods are also provided.
    Type: Grant
    Filed: January 26, 2010
    Date of Patent: March 22, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Eun-Jung Yun, Sung-Young Lee, Min-Sang Kim, Sung-Min Kim
  • Patent number: 7872303
    Abstract: At least one gate dielectric, a gate electrode, and a gate cap dielectric are formed over at least one channel region of at least one semiconductor fin. A gate spacer is formed on the sidewalls of the gate electrode, exposing end portions of the fin on both sides of the gate electrode. The exposed portions of the semiconductor fin are vertically and laterally etched, thereby reducing the height and width of the at least one semiconductor fin in the end portions. Exposed portions of the insulator layer may also be recessed. A lattice-mismatched semiconductor material is grown on the remaining end portions of the at least one semiconductor fin by selective epitaxy with epitaxial registry with the at least one semiconductor fin. The lattice-mismatched material applies longitudinal stress along the channel of the finFET formed on the at least one semiconductor fin.
    Type: Grant
    Filed: August 14, 2008
    Date of Patent: January 18, 2011
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Qiqing Christine Ouyang, Dae-Gyu Park, Xinhui Wang
  • Publication number: 20100314620
    Abstract: To suppress or prevent the generation of a crack in an insulating film below an external terminal which could be caused by an external force added to the external terminal of a semiconductor device. A top wiring layer MH of wiring layers formed on a main surface of a silicon substrate has a pad comprising a conductor pattern containing aluminum. On an undersurface of the pad, there are arranged a barrier conductor film formed by laminating, from below, a first barrier conductor film and a second barrier conductor film. Of a fifth wiring layer which is one layer lower than the top wiring layer, in an area overlapping with a probe contact area of the pad in a plane, the conductor pattern is not arranged. Further, the first and second barrier conductor films are the conductor films including titanium and titanium nitride as principal components, respectively. Also, the first barrier conductor film is thicker than the second barrier conductor film.
    Type: Application
    Filed: June 5, 2010
    Publication date: December 16, 2010
    Inventors: Takeshi FURUSAWA, Takao Kamoshima, Hiroki Takewaka
  • Patent number: 7821106
    Abstract: A process for producing electrical contact connections for a component integrated in a substrate material is provided, the substrate material having a first surface region, and at least one terminal contact being arranged at least partially in the first surface region for each component, which is distinguished in particular by application of a covering to the first surface region and production of at least one contact passage which, in the substrate material, runs transversely with respect to the first surface region, in which process, in order to form at least one contact location in a second surface region which is to be provided, at least one electrical contact connection from the contact location to at least one of the terminal contacts is produced via the respective contact passages.
    Type: Grant
    Filed: March 4, 2008
    Date of Patent: October 26, 2010
    Assignee: Schott AG
    Inventors: Florian Bieck, Jürgen Leib