Amorphous Semiconductor Is Alloy Or Contains Material To Change Band Gap (e.g., Si X Ge 1-x , Sin Y ) Patents (Class 257/63)
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Patent number: 11934758Abstract: A method for dynamically generating or interacting with an electromagnetic field includes providing a spatial array of conductive segments, a switching device operable on each of the conductive segments to either allow or block transmission of an electrical signal and a control device operable on the switching device. A sequence of the conductive segments are connected to form a conductive path where each segments intersects with at least two different ones of the conductive segments at a node. The switching device operates to connect a selected first one of the conductive segments with a selected second one of the conductive segments to form the sequence according to a logic signal from the control device. Power is supplied to the conductive path to produce an electromagnetic field which depends at least in part on the spatial arrangement of the connected sequence of the conductive segments.Type: GrantFiled: February 18, 2021Date of Patent: March 19, 2024Assignee: 11886894 Canada Ltd.Inventors: David Allan Prystupa, John Stephen Pacak, Peter Condie Nell
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Patent number: 11587868Abstract: A semiconductor memory device includes a substrate; a plurality of first conductive layers arranged in a first direction; a first semiconductor column; a first bit line being disposed at a position overlapping the first semiconductor column viewed in the first direction; a first wiring including a part overlapping the first bit line viewed in the first direction; and a second wiring including a part overlapping the first bit line viewed in the first direction. When a period in which a voltage of the first wiring transitions from a high to a low voltage state is assumed to be a first period, and when a period in which a voltage of the second wiring transitions from a low to a high voltage state is assumed to be a second period, at least a part of the second period overlaps at least a part of the first period.Type: GrantFiled: September 2, 2021Date of Patent: February 21, 2023Assignee: KIOXIA CORPORATIONInventor: Koji Tabata
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Patent number: 11367846Abstract: The present disclosure discloses a film layer analysis method for an electroluminescent device. The electroluminescent device includes an anode layer, an electroluminescent material layer, and a silver-bearing cathode layer that are sequentially laminated. The film layer analysis method includes stripping the silver-bearing cathode layer from the electroluminescent device by using a first ion sputtering source to obtain an analysis sample with the electroluminescent material layer exposed, and analyzing the exposed electroluminescent material layer by using a second ion sputtering source; wherein sputtering energy of the first ion sputtering source is greater than sputtering energy of the second ion sputtering source.Type: GrantFiled: November 1, 2019Date of Patent: June 21, 2022Assignees: CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.Inventors: Ying Liu, Yuhang Peng, Congcong Du, Lei Fan, Chunfang Fan, Qi Wu, Xiaozhong Xue, Haoran Qin
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Patent number: 10930499Abstract: Methods, apparatuses, and systems related to semiconductor structure formation are described. An example method includes forming an opening through silicon (Si) material, formed over a semiconductor substrate, to a first depth to form pillars of Si material. The example method further includes depositing an isolation material within the opening to fill the opening between the Si pillars. The example method further includes removing a portion of the isolation material from between the pillars to a second depth to create a second opening between the pillars and defining inner sidewalls between the pillars. The example method further includes depositing an enhancer material over a top surface of the pillars and along the inner sidewalls of the pillars down to a top portion of the isolation material.Type: GrantFiled: April 9, 2019Date of Patent: February 23, 2021Assignee: Micron Technology, Inc.Inventors: Nicholas R. Tapias, Sanjeev Sapra, Anish A. Khandekar, Shen Hu
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Patent number: 10891987Abstract: According to an embodiment, a semiconductor memory device includes a first memory cell, a first interconnect, a first sense amplifier, a second interconnect, and a first latch circuit. The first interconnect is coupled to the first memory cell and extends in a first direction in a first interconnect layer. The first sense amplifier is coupled to the first interconnect. The second interconnect is coupled to the first sense amplifier and extends in the first direction in the first interconnect layer. The first latch circuit is coupled to the second interconnect. An end surface of the first interconnect on a side facing the first direction is opposed to an end surface of the second interconnect on a side facing a direction opposite to the first direction.Type: GrantFiled: August 12, 2019Date of Patent: January 12, 2021Assignee: TOSHIBA MEMORY CORPORATIONInventor: Teruo Takagiwa
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Patent number: 10586795Abstract: A semiconductor device comprises a stack structure comprising decks each comprising a memory level comprising memory elements, a control logic level vertically adjacent and in electrical communication with the memory level and comprising control logic devices configured to effectuate a portion of control operations for the memory level, and an additional control logic level vertically adjacent and in electrical communication with the memory level and comprising additional control logic devices configured to effectuate an additional portion of the control operations for the memory level. A memory device, a method of operating a semiconductor device, and an electronic system are also described.Type: GrantFiled: April 30, 2018Date of Patent: March 10, 2020Assignee: Micron Technology, Inc.Inventors: Scott E. Sills, Kurt D. Beigel
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Patent number: 10580661Abstract: A process for etching a film layer on a semiconductor wafer is disclosed. The process is particularly well suited to etching carbon containing layers, such as hardmask layers, photoresist layers, and other low dielectric films. In accordance with the present disclosure, a reactive species generated from a plasma is contacted with a surface of the film layer. Simultaneously, the substrate or semiconductor wafer is subjected to rapid thermal heating cycles that increase the temperature past the activation temperature of the reaction in a controlled manner.Type: GrantFiled: May 1, 2017Date of Patent: March 3, 2020Assignees: MATTSON TECHNOLOGY, INC., BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTDInventor: Shawming Ma
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Patent number: 9865459Abstract: The present disclosure relates to methods for improving adhesion between a hardmask layer and a subsequent layer on the hardmask layer. Particularly, embodiment of the present disclosure relates to methods for improving adhesion between a metal-doped amorphous carbon layer and a mask layer, such as a silicon oxide layer, a silicon nitride layer, or an amorphous silicon layer. One embodiment of the present disclosure includes performing a plasma treatment to the metal-doped amorphous carbon layer.Type: GrantFiled: April 8, 2016Date of Patent: January 9, 2018Assignee: Applied Materials, Inc.Inventors: Rui Cheng, Pramit Manna, Abhijit Basu Mallick
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Patent number: 9012917Abstract: A combination of a substrate selected from silicon, silicon carbide or a metal and a grapheme precursor having the following properties: (a) an aromatic structure that forms the basis of the graphene structure, said aromatic structure being selected from the group consisting of: benzene, naphthalene, pyrene, anthracene, chrysene, coronene, and phenanthrene, or a cyclic or acyclic structures which can be converted to aromatic structures and (b) functional groups that can react with each other to form additional aromatic structures.Type: GrantFiled: June 3, 2014Date of Patent: April 21, 2015Assignee: HRL Laboratories, LLCInventors: Chaoyin Zhou, Tina T. Salguero
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Patent number: 8963124Abstract: At least first and second Si1-xGex (0?x?1) layers are formed on an insulating film. At least first and second material layers are formed correspondingly to the at least first and second Si1-xGex (0?x?1) layers. A lattice constant of the first Si1-xGex (0?x?1) layer is matched with a lattice constant of the first material layer. A lattice constant of the second Si1-xGex (0?x?1) layer is matched with a lattice constant of the second material layer.Type: GrantFiled: March 17, 2009Date of Patent: February 24, 2015Assignee: Semiconductor Technology Academic Research CenterInventors: Masanobu Miyao, Hiroshi Nakashima, Taizoh Sadoh, Ichiro Mizushima, Masaki Yoshimaru
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Patent number: 8952243Abstract: A stacked structure may include semiconductors or semiconductor layers grown on an amorphous substrate. A light-emitting device and a solar cell may include the stacked structure including the semiconductors grown on the amorphous substrate. A method of manufacturing the stacked structure, and the light-emitting device and the solar cell including the stacked structure may involve growing a crystalline semiconductor layer on an amorphous substrate.Type: GrantFiled: September 25, 2011Date of Patent: February 10, 2015Assignee: Samsung Electronics Co., Ltd.Inventor: Jun-hee Choi
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Patent number: 8860030Abstract: One object of the present invention is reduction of off current of a thin film transistor. Another object of the present invention is improvement of electric characteristics of the thin film transistor. Further, another object of the present invention is improvement of image quality of the display device including the thin film transistor. The thin film transistor includes a semiconductor film containing germanium at a concentration greater than or equal to 5 at. % and less than or equal to 100 at. % or a conductive film which is provided over a gate electrode with the gate insulating film interposed therebetween and which is provided in an inner region of the gate electrode so as not to overlap with an end portion of the gate electrode, a film covering at least a side surface of the semiconductor film containing germanium at a concentration greater than or equal to 5 at. % and less than or equal to 100 at.Type: GrantFiled: June 23, 2011Date of Patent: October 14, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 8842231Abstract: An array substrate comprises: a base substrate; a gate scanning line, a data scanning line, a pixel electrode and a thin film transistor, formed on the base substrate; and a light blocking layer, formed on the base substrate and corresponding to the thin film transistor and the data scanning line.Type: GrantFiled: June 1, 2011Date of Patent: September 23, 2014Assignee: Beijing Boe Optoelectronics Technology Co., Ltd.Inventors: Xiang Liu, Seongyeol Yoo, Jianshe Xue
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Patent number: 8841673Abstract: A thin-film transistor device includes: a gate electrode above a substrate; a gate insulating film on the gate electrode; a crystalline silicon thin film above the gate insulating film; a first semiconductor film above the crystalline silicon thin film; a pair of second semiconductor films above the first semiconductor film; a source electrode over one of the second semiconductor films; and a drain electrode over an other one of the second semiconductor films. The first semiconductor film is provided on the crystalline silicon thin film. A relationship ECP<EC1 is satisfied where ECP and EC1 denote energy levels at lower ends of conduction bands of the crystalline silicon thin film and the first semiconductor film, respectively.Type: GrantFiled: January 16, 2013Date of Patent: September 23, 2014Assignees: Panasonic Corporation, Panasonic Liquid Crystal Display Co., Ltd.Inventors: Arinobu Kanegae, Takahiro Kawashima, Hiroshi Hayashi, Genshirou Kawachi
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Patent number: 8779177Abstract: A combination of a substrate selected from silicon, silicon carbide or a metal and a graphene precursor having the following properties: (a) an aromatic structure that forms the basis of the graphene structure, said aromatic structure being selected from the group consisting of: benzene, naphthalene, pyrene, anthracene, chrysene, coronene, and phenanthrene, or a cyclic or acyclic structures which can be converted to aromatic structures and (b) functional groups that can react with each other to form additional aromatic structures.Type: GrantFiled: December 2, 2010Date of Patent: July 15, 2014Assignee: HRL Laboratories, LLCInventors: Chaoyin Zhou, Tina T. Salguero
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Patent number: 8766236Abstract: A semiconductor device according to an embodiment includes: a substrate; a first semiconductor layer formed on the substrate and having a strain; a second and a third semiconductor layers formed at a distance from each other on the first semiconductor layer, and having a different lattice constant from a lattice constant of the first semiconductor layer; a gate insulating film formed on a first portion of the first semiconductor layer, the first portion being located between the second semiconductor layer and the third semiconductor layer; and a gate electrode formed on the gate insulating film.Type: GrantFiled: September 19, 2011Date of Patent: July 1, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Koji Usuda, Tsutomu Tezuka
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Patent number: 8742412Abstract: A thin film transistor includes a gate electrode, a gate insulation layer, a channel layer, a source electrode, and a drain electrode formed on a substrate, in which: the channel layer contains indium, germanium, and oxygen; and the channel layer has a compositional ratio expressed by In/(In+Ge) of 0.5 or more and 0.97 or less.Type: GrantFiled: January 30, 2009Date of Patent: June 3, 2014Assignee: Canon Kabushiki KaishaInventors: Amita Goyal, Naho Itagaki, Tatsuya Iwasaki
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Patent number: 8735985Abstract: A graphene substrate is doped with one or more functional groups to form an electronic device.Type: GrantFiled: December 13, 2012Date of Patent: May 27, 2014Assignee: The Invention Science Fund I, LLCInventors: Jeffrey A. Bowers, Roderick A. Hyde, Muriel Y. Ishikawa, Jordin T. Kare, Clarence T. Tegreene, Tatsushi Toyokuni, Richard N. Zare
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Patent number: 8703528Abstract: A method for forming a back-side illuminated image sensor, including the steps of: a) forming, from the front surface, doped polysilicon regions, of a conductivity type opposite to that of the substrate, extending in depth orthogonally to the front surface and emerging into the first layer; b) thinning the substrate from its rear surface to reach the polysilicon regions, while keeping a strip of the first layer; c) depositing, on the rear surface of the thinned substrate, a doped amorphous silicon layer, of a conductivity type opposite to that of the substrate; and d) annealing at a temperature capable of transforming the amorphous silicon layer into a crystallized layer.Type: GrantFiled: April 12, 2012Date of Patent: April 22, 2014Assignees: STMicroelectronics S.A., STMicroelectronics (Crolles 2) SASInventors: Michel Marty, François Roy, Jens Prima
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Patent number: 8704229Abstract: Semiconductor devices are formed without zipper defects or channeling and through-implantation and with different silicide thicknesses in the gates and source/drain regions, Embodiments include forming a gate on a substrate, forming a nitride cap on the gate, forming a source/drain region in the substrate on each side of the gate, forming a wet cap fill layer on the source/drain region on each side of the gate, removing the nitride cap from the gate, and forming an amorphized layer in a top portion of the gate. Embodiments include forming the amorphized layer by implanting low energy ions.Type: GrantFiled: July 26, 2011Date of Patent: April 22, 2014Assignee: GlobalFoundries Inc.Inventors: Peter Javorka, Glyn Braithwaite
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Patent number: 8697529Abstract: A method of making a transistor, comprising: providing a semiconductor substrate; forming a gate stack over the semiconductor substrate; forming an insulating layer over the semiconductor substrate; forming a depleting layer over the insulating layer; etching the depleting layer and the insulating layer; forming a metal layer over the semiconductor substrate; performing thermal annealing; and removing the metal layer. As advantages of the present invention, an upper outside part of each of the sidewalls include a material that can react with the metal layer, so that metal on two sides of the sidewalls is absorbed during the annealing process, preventing the metal from diffusing toward the semiconductor layer, and ensuring that the formed Schottky junctions can be ultra-thin and uniform, and have controllable and suppressed lateral growth.Type: GrantFiled: September 28, 2011Date of Patent: April 15, 2014Assignee: Fudan UniversityInventors: Dongping Wu, Jun Luo, Yinghua Piao, Zhiwei Zhu, Shili Zhang, Wei Zhang
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Patent number: 8614007Abstract: The present invention generally comprises a semiconductor film and the reactive sputtering process used to deposit the semiconductor film. The sputtering target may comprise pure zinc (i.e., 99.995 atomic percent or greater), which may be doped with aluminum (about 1 atomic percent to about 20 atomic percent) or other doping metals. The zinc target may be reactively sputtered by introducing nitrogen and oxygen to the chamber. The amount of nitrogen may be significantly greater than the amount of oxygen and argon gas. The amount of oxygen may be based upon a turning point of the film structure, the film transmittance, a DC voltage change, or the film conductivity based upon measurements obtained from deposition without the nitrogen containing gas. The reactive sputtering may occur at temperatures from about room temperature up to several hundred degrees Celsius. After deposition, the semiconductor film may be annealed to further improve the film mobility.Type: GrantFiled: February 12, 2013Date of Patent: December 24, 2013Assignee: Applied Materials, Inc.Inventor: Yan Ye
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Publication number: 20130075740Abstract: The present invention relates to thin films comprising non-stoichiometric monoxides of: copper (OCu2), with embedded cubic metal copper (Cucy) [(OCu2)x+(Cu1-2)y, wherein 0.05?x<1 and 0.01?y?0.9]; of tin (OSn)?x with embedded metal tin (Sn?x) [(OSn)z+(Sn1-2)w wherein 0.05?z<1 and 0.01?w?0.9]; Cucx—Sn?x alloys with embedded metal Sn and Cu [(O—Cu—Sn)a+(Cu?—Sn?)b with 0<?<2 and 0<?<2, wherein 0.05?a<1 and 0.01?b?0.9]; and of nickel (ONi)x with embedded Ni and Sn species [(O—Ni)a+(Ni?—Sn?)b with 0<?<2 and 0<?<2, wherein 0.05?a<1 and 0.01?b?0.Type: ApplicationFiled: April 6, 2011Publication date: March 28, 2013Applicant: Electronic and Telecommunications Research Institu teInventors: Elvira Maria Correia Fortunato, Rodrigo Ferrão De Paiva Martins, Ana Raquel Xarouco De Barros, Nuno Filipe De Oliveira Correia, Vitor Manuel Loureiro Figueireido, Pedro Miguel Cândido Barquinha, Sang-Hee Ko Park, Chi-Sun Hwang
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Semiconductor device with epitaxial crystal layer embedded within susbstrate of dummy pattern region
Patent number: 8390028Abstract: A semiconductor device according to one embodiment includes an element isolation insulating film formed on a substrate, an element region and a dummy pattern region demarcated by the element isolation insulating film on the substrate, a first epitaxial crystal layer formed on the substrate within the element region, and a second epitaxial crystal layer formed on the substrate within the dummy pattern region. The first epitaxial crystal layer is made up of crystals that have a different lattice constant from that of the crystals that constitute the substrate. The second epitaxial crystal layer is made up of the same crystals as the first epitaxial crystal layer. The (111) plane of the substrate that includes any points on the interface between the second epitaxial crystal layer and the substrate is surrounded by the element isolation insulating film in a deeper region than the second epitaxial crystal layer.Type: GrantFiled: March 23, 2011Date of Patent: March 5, 2013Assignee: Kabushiki Kaisha ToshibaInventor: Osamu Fujii -
Patent number: 8386883Abstract: A phase-change memory (PCM) includes a matrix of storage cells, including at least a first group with at least one cell. Each cell includes a phase change material having at least a first resistance value and a second resistance value, such that the first group can have an identical message encoded therein in at least a first way and a second way. The memory also includes a controller configured to encode the identical message in the at least first group the first or second way, based on which way causes the least amount of writing cost, given current levels of the group. Another embodiment of memory includes a matrix of storage cells, including at least a first group with at least one cell. Each of the storage cells has at least two levels, such that each of the storage cells can have an identical message encoded therein in at least a first way and a second way (the cells can be PCM or another technology).Type: GrantFiled: February 24, 2009Date of Patent: February 26, 2013Assignee: International Business Machines CorporationInventors: Michele Franceschini, John Peter Karidis, Luis A Lastras-Montano, Thomas Mittelholzer, Mark N Wegman
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Patent number: 8384080Abstract: A thin film transistor, which is capable of improving carrier mobility, and a display device and an electronic device, each of which uses the thin film transistor, are provided. The thin film transistor includes: a gate electrode; an oxide semiconductor layer including a multilayer film including a carrier travel layer configuring a channel and a carrier supply layer for supplying carriers to the carrier travel layer; a gate insulating film provided between the gate electrode and the oxide semiconductor layer; and a pair of electrodes as a source and a drain. A conduction band minimum level or a valence band maximum level corresponding to a carrier supply source of the carrier supply layer is higher in energy than a conduction band minimum level or a valence band maximum level corresponding to a carrier supply destination of the carrier travel layer.Type: GrantFiled: December 10, 2010Date of Patent: February 26, 2013Assignee: Sony CorporationInventors: Satoshi Taniguchi, Mikihiro Yokozeki, Hiroko Miyashita, Toshi-kazu Suzuki
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Patent number: 8314420Abstract: One exemplary embodiment includes a semiconductor device. The semiconductor device can include a channel including one or more compounds of the formula AxBxOx wherein each A is selected from the group of Ga, In, each B is selected from the group of Ge, Sn, Pb, each O is atomic oxygen, each x is independently a non-zero integer, and each of A and B are different.Type: GrantFiled: March 12, 2004Date of Patent: November 20, 2012Assignee: Hewlett-Packard Development Company, L.P.Inventors: Randy L. Hoffman, Gregory S. Herman, Peter P. Mardilovich
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Patent number: 8288760Abstract: A field effect transistor of an embodiment of the present invention includes, a semiconductor substrate containing Si atoms; a protruding structure formed on the semiconductor substrate; a channel region formed in the protruding structure and containing Ge atoms; an under channel region formed under the channel region in the protruding structure and containing Si and Ge atoms, the Ge composition ratio among Si and Ge atoms contained in the under channel region continuously changing from the channel region side to the semiconductor substrate side; a gate insulating film formed on the channel region; and a gate electrode formed on the gate insulating film on the channel region.Type: GrantFiled: May 10, 2010Date of Patent: October 16, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Tsutomu Tezuka, Toshifumi Irisawa
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Publication number: 20120222732Abstract: A stacked structure may include semiconductors or semiconductor layers grown on an amorphous substrate. A light-emitting device and a solar cell may include the stacked structure including the semiconductors grown on the amorphous substrate. A method of manufacturing the stacked structure, and the light-emitting device and the solar cell including the stacked structure may involve growing a crystalline semiconductor layer on an amorphous substrate.Type: ApplicationFiled: September 25, 2011Publication date: September 6, 2012Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventor: Jun-hee CHOI
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Patent number: 8252638Abstract: A method for forming an empty area under a layer of a given material, including forming on a substrate a stacking of a photosensitive layer and of a layer of the given material; insolating a portion of the photosensitive layer or its complement according to whether the photosensitive layer is positive or negative with an electron beam crossing the layer of the given material; and removing the portion of the photosensitive layer.Type: GrantFiled: February 28, 2007Date of Patent: August 28, 2012Assignee: STMicroelectronics S.A.Inventors: Philippe Coronel, Yves Laplanche, Laurent Pain
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Patent number: 8106466Abstract: A method for fabricating a MOS transistor is disclosed. First, a semiconductor substrate having a gate thereon is provided. A spacer is then formed on the sidewall of the gate, and two recesses are formed adjacent to the spacer and within the semiconductor substrate. Next, the spacer is thinned, and epitaxial layer is grown in each of the two recesses. By thinning the spacer before the epitaxial layer is formed, the present invention could stop the epitaxial layer to grow against the sidewall of the spacer, thereby preventing problem such as Ion degradation.Type: GrantFiled: August 10, 2008Date of Patent: January 31, 2012Assignee: United Microelectronics Corp.Inventors: Po-Lun Cheng, Pin-Chien Chu
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Patent number: 8053666Abstract: A p type amorphous silicon layer is stacked, by a CVD method, on a main surface of an n type single-crystalline silicon substrate; an n type amorphous silicon layer is stacked, by the CVD method, on a surface opposite to the surface on which the p type amorphous silicon layer is stacked; and, by using a laser ablation processing method, through-holes are formed in the n type single-crystalline silicon substrate, the p type amorphous silicon layer, and the n type amorphous silicon layer. Subsequently, an insulating layer is formed on an inner wall surface of each of the through-holes, and then a conductive material is filled therein.Type: GrantFiled: May 15, 2008Date of Patent: November 8, 2011Assignee: Sanyo Electric Co., Ltd.Inventor: Yuji Hishida
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Semiconductor device with semiconductor body and method for the production of a semiconductor device
Patent number: 8013340Abstract: A semiconductor device includes a semiconductor body with a front-sided surface. An active cell region with a semiconductor device structure and an edge region surrounding the active cell region are arranged in the semiconductor body. The front-sided surface of the semiconductor body includes a passivation layer over the edge region and over the active cell region. The passivation layer includes a semiconducting insulation layer of a semiconducting material, the bandgap of which is greater than the bandgap of the material of the semiconductor body.Type: GrantFiled: September 30, 2008Date of Patent: September 6, 2011Assignee: Infineon Technologies AGInventor: Gerhard Schmidt -
Patent number: 7999250Abstract: In accordance with one or more embodiments, a semiconductor structure includes a semiconductor substrate, a first semiconductor material over the semiconductor substrate, and a second semiconductor material over a portion the first semiconductor material, wherein the second semiconductor material comprises silicon-germanium-carbon (SiGeC) and wherein the first semiconductor material is a silicon epitaxial layer. The semiconductor structure further includes an active device, wherein a portion of the active device is formed in the second semiconductor material and a dielectric structure extending from the first surface of the first semiconductor material into the semiconductor substrate through the first semiconductor material.Type: GrantFiled: February 27, 2009Date of Patent: August 16, 2011Assignee: HVVi Semiconductors, Inc.Inventors: Bishnu Prasanna Gogoi, Robert Bruce Davies
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Patent number: 7993947Abstract: Highly uniform silica nanoparticles can be formed into stable dispersions with a desirable small secondary particle size. The silican particles can be surface modified to form the dispersions. The silica nanoparticles can be doped to change the particle properties and/or to provide dopant for subsequent transfer to other materials. The dispersions can be printed as an ink for appropriate applications. The dispersions can be used to selectively dope semiconductor materials such as for the formation of photovoltaic cells or for the formation of printed electronic circuits.Type: GrantFiled: January 21, 2011Date of Patent: August 9, 2011Assignee: NanoGram CorporationInventors: Henry Hieslmair, Shivkumar Chiruvolu, Hui Du
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Patent number: 7994508Abstract: The present invention generally comprises TFTs having semiconductor material comprising oxygen, nitrogen, and one or more element selected from the group consisting of zinc, tin, gallium, cadmium, and indium as the active channel. The semiconductor material may be used in bottom gate TFTs, top gate TFTs, and other types of TFTs. The TFTs may be patterned by etching to create both the channel and the metal electrodes. Then, the source-drain electrodes may be defined by dry etching using the semiconductor material as an etch stop layer. The active layer carrier concentration, mobility, and interface with other layers of the TFT can be tuned to predetermined values. The tuning may be accomplished by changing the nitrogen containing gas to oxygen containing gas flow ratio, annealing and/or plasma treating the deposited semiconductor film, or changing the concentration of aluminum doping.Type: GrantFiled: August 1, 2008Date of Patent: August 9, 2011Assignee: Applied Materials, Inc.Inventor: Yan Ye
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Publication number: 20110169007Abstract: A passivated germanium surface that is a germanium carbide material formed on and in contact with the termanium material. An intermediate semiconductor device structure and a semiconductor device structure, each of which comprises the passivated germanium having germanium carbide material thereon, are also disclosed.Type: ApplicationFiled: March 25, 2011Publication date: July 14, 2011Applicant: ROUND ROCK RESEARCH, LLCInventors: Leonard Forbes, Kie Y. Ahn
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Patent number: 7973384Abstract: A memory cell includes a first electrode, a second electrode, and a first portion of phase-change material contacting the first electrode. The memory cell includes a second portion of phase-change material contacting the second electrode and a third portion of phase-change material between the first portion and the second portion. A phase-change material composition of the third portion and the second portion gradually transitions from the third portion to the second portion.Type: GrantFiled: November 2, 2005Date of Patent: July 5, 2011Assignee: Qimonda AGInventors: Thomas Happ, Jan Boris Philipp
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Patent number: 7927713Abstract: The present invention generally comprises a semiconductor film and the reactive sputtering process used to deposit the semiconductor film. The sputtering target may comprise pure zinc (i.e., 99.995 atomic percent or greater), which may be doped with aluminum (about 1 atomic percent to about 20 atomic percent) or other doping metals. The zinc target may be reactively sputtered by introducing nitrogen and oxygen to the chamber. The amount of nitrogen may be significantly greater than the amount of oxygen and argon gas. The amount of oxygen may be based upon a turning point of the film structure, the film transmittance, a DC voltage change, or the film conductivity based upon measurements obtained from deposition without the nitrogen containing gas. The reactive sputtering may occur at temperatures from about room temperature up to several hundred degrees Celsius. After deposition, the semiconductor film may be annealed to further improve the film mobility.Type: GrantFiled: July 26, 2007Date of Patent: April 19, 2011Assignee: Applied Materials, Inc.Inventor: Yan Ye
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Patent number: 7884354Abstract: Germanium on insulator (GOI) semiconductor substrates are generally described. In one example, a GOI semiconductor substrate comprises a semiconductor substrate comprising an insulative surface region wherein a concentration of dopant in the insulative surface region is less than a concentration of dopant in the semiconductor substrate outside of the insulative surface region and a thin film of germanium coupled to the insulative surface region of the semiconductor substrate wherein the thin film of germanium and the insulative surface region are simultaneously formed by oxidation anneal of a thin film of silicon germanium (Si1-xGex) deposited to the semiconductor substrate wherein x is a value between 0 and 1 that provides a relative amount of silicon and germanium in the thin film of Si1-xGex.Type: GrantFiled: July 31, 2008Date of Patent: February 8, 2011Assignee: Intel CorporationInventors: Ravi Pillarisetty, Been-Yih Jin, Willy Rachmady, Marko Radosavljevic
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Patent number: 7872249Abstract: Provided is a nonvolatile memory device and method of operating and fabricating the same for higher integration and higher speed, while allowing for a lower operating current. The nonvolatile memory device may include a semiconductor substrate. Resistive layers each storing a variable resistive state may be formed on the surface of the semiconductor substrate. Buried electrodes may be formed on the semiconductor substrate under the resistive layers and may connect to the resistive layers. Channel regions may be formed on the surface of the semiconductor substrate and connect adjacent resistive layers to each other, but not to the buried electrodes. Gate insulating layers may be formed on the channel regions of the semiconductor substrate. Gate electrodes may be formed on the gate insulating layers and extend over the resistive layers.Type: GrantFiled: March 15, 2007Date of Patent: January 18, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Yoon-dong Park, Myoung-jae Lee, Dong-chul Kim, Seung-eon Ahn
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Patent number: 7855127Abstract: A method for manufacturing a semiconductor substrate including: epitaxially growing a silicon germanium (SiGe) film on a silicon (Si) substrate by a chemical vapor deposition method; subjecting a heat treatment to the SiGe film at a temperature of not less than 700° C. and not more than 1200° C.; implanting hydrogen ions into a surface of the SiGe film; subjecting a surface activation treatment to a main surface of at least one of the SiGe film and a support substrate; bonding main surfaces of the SiGe film and the support substrate at a temperature of not less than 100° C. and not more than 400° C.; and applying an external impact to a bonding interface between the SiGe film and the support substrate to delaminate the SiGe crystal along a hydrogen ion implanted interface of the SiGe film, thereby forming a SiGe thin film on the main surface of the support substrate.Type: GrantFiled: January 29, 2008Date of Patent: December 21, 2010Assignee: Shin-Etsu Chemical Co., Ltd.Inventors: Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai, Yuuji Tobisaka
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Patent number: 7750338Abstract: A semiconductor includes a semiconductor substrate, a gate stack on the semiconductor substrate, and a stressor having at least a portion in the semiconductor substrate and adjacent to the gate stack. The stressor includes a first stressor region and a second stressor region on the first stressor region, wherein the second stressor region extends laterally closer to a channel region underlying the gate stack than the first stressor region.Type: GrantFiled: December 5, 2006Date of Patent: July 6, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Yin-Pin Wang
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Patent number: 7728324Abstract: A field effect transistor of an embodiment of the present invention includes, a semiconductor substrate containing Si atoms; a protruding structure formed on the semiconductor substrate; a channel region formed in the protruding structure and containing Ge atoms; an under channel region formed under the channel region in the protruding structure and containing Si and Ge atoms, the Ge composition ratio among Si and Ge atoms contained in the under channel region continuously changing from the channel region side to the semiconductor substrate side; a gate insulating film formed on the channel region; and a gate electrode formed on the gate insulating film on the channel region.Type: GrantFiled: March 20, 2007Date of Patent: June 1, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Tsutomu Tezuka, Toshifumi Irisawa
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Patent number: 7719060Abstract: By embedding a silicon/germanium mixture in a silicon layer of high tensile strain, a moderately high degree of tensile strain may be maintained in the silicon/germanium mixture, thereby enabling increased performance of N-channel transistors on the basis of silicon/germanium material. In other regions, the germanium concentration may be varied to provide different levels of tensile or compressive strain.Type: GrantFiled: April 30, 2008Date of Patent: May 18, 2010Assignee: Advanced Micro Devices, Inc.Inventors: Andy Wei, Karla Romero, Manfred Horstmann
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Patent number: 7700165Abstract: Provided is a deposited film containing microcrystalline silicon by plasma CVD, which includes changing at least one of conditions selected from a high frequency power density, a bias voltage with respect to an interelectrode distance, a bias current with respect to an electrode area, a high frequency power with respect to a source gas flow rate, a ratio of a diluting gas flow rate to a source gas flow rate, a substrate temperature, a pressure, and an interelectrode distance, between conditions for forming a deposited film of a microcrystalline region and conditions for forming a deposited film of an amorphous region; and forming a deposited film under conditions within a predetermined range in the vicinity of boundary conditions under which the crystal system of the deposited film substantially changes between a amorphous state and a microcrystalline state.Type: GrantFiled: January 25, 2007Date of Patent: April 20, 2010Assignee: Canon Kabushiki KaishaInventors: Yasuyoshi Takai, Masafumi Sano, Keishi Saito
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Patent number: 7659537Abstract: A field effect transistor comprises a source and a drain, and a channel layer of Si1-x-yGexCy crystal (1>x>0, 1>y?0). Ge composition increases toward a drain end, in a vicinity of a source end of the channel layer.Type: GrantFiled: January 23, 2006Date of Patent: February 9, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Tsutomu Tezuka, Shinichi Takagi, Tomohisa Mizuno
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Patent number: 7612364Abstract: A semiconductor structure includes a semiconductor substrate; a gate stack on the semiconductor substrate; a stressor having at least a portion in the semiconductor substrate and adjacent to the gate stack, wherein the stressor comprises an impurity of a first conductivity type; and a portion of the semiconductor substrate adjoining the stressor and on an opposite side of the stressor from the gate stack, wherein the portion of the semiconductor substrate is doped with an impurity of the first conductivity type.Type: GrantFiled: November 20, 2006Date of Patent: November 3, 2009Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Harry Chuang, Kong-Beng Thei, Yuan-Chen Sun
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Publication number: 20090189159Abstract: Disclosed herein are devices, methods and systems for implementing gettering layers. Devices including gettering layers can be implemented such that a gettering layer doped with carbon, boron, fluorine or any other appropriate impurity is formed on a semiconductor substrate, a device layer is formed on the gettering layer, and a device region is formed in the device layer having a depth that maintains a distance in the device layer between the gettering layer and the device region.Type: ApplicationFiled: January 28, 2008Publication date: July 30, 2009Applicant: ATMEL CORPORATIONInventors: Darwin Enicks, Mark Good, John Chaffee
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Patent number: 7518212Abstract: The present invention provides a design for a PCRAM element which incorporates multiple metal-containing germanium-selenide glass layers of diverse stoichiometries. The present invention also provides a method of fabricating the disclosed PCRAM structure.Type: GrantFiled: August 3, 2005Date of Patent: April 14, 2009Assignee: Micron Technology, Inc.Inventors: John T. Moore, Terry L. Gilton, Kristy A. Campbell