With Specified Impurity Concentration Gradient Patents (Class 257/655)
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Patent number: 8134224Abstract: A semiconductor device receiving as input a radio frequency signal having a frequency of 500 MHz or more and a power of 20 dBm or more is provided. The semiconductor device includes: a silicon substrate; a silicon oxide film formed on the silicon substrate; a radio frequency interconnect provided on the silicon oxide film and passing the radio frequency signal; a fixed potential interconnect provided on the silicon oxide film and placed at a fixed potential; and an acceptor-doped layer. The acceptor-doped layer is formed in a region of the silicon substrate. The region is in contact with the silicon oxide film. The acceptor-doped layer is doped with acceptors.Type: GrantFiled: March 11, 2008Date of Patent: March 13, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Yoshitomo Sagae, Fumio Sasaki, Ryoichi Ohara
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Publication number: 20120056304Abstract: A wafer, a fabricating method of the same, and a semiconductor substrate are provided. The wafer includes a first substrate layer formed at a first surface, a second substrate layer formed at a second surface opposite to the first surface, the second substrate layer having a greater oxygen concentration than the first substrate layer, and an oxygen diffusion protecting layer formed between the first substrate layer and the second substrate layer, the oxygen diffusion protecting layer being located closer to the first surface than to the second surface.Type: ApplicationFiled: July 8, 2011Publication date: March 8, 2012Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sun-Ha Hwang, Young-Soo Park, Sam-Jong Choi, Joon-Young Choi, Tae-Hyoung Koo
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Patent number: 8120058Abstract: A method of forming a semiconductor device having an asymmetrical source and drain. In one embodiment, the method includes forming a gate structure on a first portion of the substrate having a well of a first conductivity. A source region of a second conductivity and drain region of the second conductivity is formed within the well of the first conductivity in a portion of the substrate that is adjacent to the first portion of the substrate on which the gate structure is present. A doped region of a second conductivity is formed within the drain region to provide an integrated bipolar transistor on a drain side of the semiconductor device, in which a collector is provided by the well of the first conductivity, the base is provided by the drain region of the second conductivity and the emitter is provided by the doped region of the second conductivity that is present in the drain region. A semiconductor device formed by the above-described method is also provided.Type: GrantFiled: October 28, 2009Date of Patent: February 21, 2012Assignee: International Business Machines CorporationInventors: Jae-Eun Park, Xinlin Wang, Xiangdong Chen
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Publication number: 20120032305Abstract: A semiconductor device and a manufacturing method thereof is disclosed in which the semiconductor device includes a p-type anode layer formed by a transition metal acceptor transition, and the manufacturing process is significantly simplified without the breakdown voltage characteristics deteriorating. An inversion advancement region inverted to a p-type by a transition metal acceptor transition, and in which the acceptor transition is advanced by point defect layers, is formed on the upper surface of an n-type drift layer. The inversion advancement region configures a p-type anode layer of a semiconductor device of the invention. The transition metal is, for example, platinum or gold. An n-type semiconductor substrate with a concentration higher than that of the n-type drift layer is adjacent to the lower surface of the n-type drift layer.Type: ApplicationFiled: August 4, 2011Publication date: February 9, 2012Applicant: FUJI ELECTRIC CO., LTD.Inventor: Shoji KITAMURA
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Patent number: 8110897Abstract: The semiconductor device of the present invention includes: a gate insulating film formed on a semiconductor region of a first conductivity type; a gate electrode formed on the gate insulating film; and a channel doped layer of the first conductivity type formed in the semiconductor region beneath the gate electrode. The channel doped layer contains carbon as an impurity.Type: GrantFiled: March 3, 2010Date of Patent: February 7, 2012Assignee: Panasonic CorporationInventor: Taiji Noda
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Patent number: 8106472Abstract: The pixel for use in an image sensor comprises a low-doped semiconductor substrate (A). On the substrate (A), an arrangement of a plurality of floating areas, e.g., floating gates (FG2-FG6), is provided. Neighboring floating gates are electrically isolated from each other yet capacitively coupled to each other. By applying a voltage (V2?V1) to two contact areas (FG1, FG7), a lateral steplike electric field is generated. Photogenerated charge carriers move along the electric-field lines to the point of highest potential energy, where a floating diffusion (D) accumulate the photocharges. The charges accumulated in the various pixels are sequentially read out with a suitable circuit known from image-sensor literature, such as a source follower or a charge amplifier with row and column select mechanisms. The pixel of offers at the same time a large sensing area, a high photocharge-detection sensitivity and a high response speed, without any static current consumption.Type: GrantFiled: February 9, 2010Date of Patent: January 31, 2012Assignee: MESA Imaging AGInventors: Rolf Kaufmann, Michael Lehmann, Peter Seitz
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Publication number: 20120018856Abstract: Disclosed is a method of forming a semiconductor device with drift regions of a first doping type and compensation regions of a second doping type, and a semiconductor device with drift regions of a first doping type and compensation regions of a second doping type.Type: ApplicationFiled: July 23, 2010Publication date: January 26, 2012Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Joachim Weyers, Armin Willmeroth, Anton Mauder, Franz Hirler
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Publication number: 20110316128Abstract: Semiconductor wafers of silicon are produced by pulling a single crystal growing on a phase boundary from a melt contained in a crucible and cutting of semiconductor wafers therefrom, wherein during pulling of the single crystal, heat is delivered to a center of the phase boundary and a radial profile of a ratio V/G from the center to an edge of the phase boundary is controlled, G being the temperature gradient perpendicular to the phase boundary and V being the pull rate. The radial profile of the ratio V/G is controlled so that the effect of thermomechanical stress in the single crystal adjoining the phase boundary, is compensated with respect to creation of intrinsic point defects. The invention also relates to defect-free semiconductor wafers of silicon, which can be produced economically by this method.Type: ApplicationFiled: September 6, 2011Publication date: December 29, 2011Applicant: SILTRONIC AGInventors: Andreas Sattler, Wilfried von Ammon, Martin Weber, Walter Haeckl, Herbert Schmidt
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Publication number: 20110298100Abstract: Disclosed are a semiconductor device producing method and a semiconductor device. The semiconductor device producing method is comprised of a step of forming a diffusion suppressing mask composed of at least two of a thick film portion, an opening portion, and a thin film portion, on a surface of a semiconductor substrate; a step of applying dopant diffusing agents containing dopants to the entirety of a surface of the diffusion suppression mask; and a step of diffusing the dopants obtained from the dopant diffusing agents onto the surface of the semiconductor substrate. In the semiconductor device, a high concentration first conductive dopant diffusion layer, a high concentration second conductive dopant diffusion layer, a low concentration first conductive dopant diffusion layer, and a low concentration second conducive dopant diffusion layer are provided on one of the surfaces of the semiconductor substrate.Type: ApplicationFiled: January 25, 2010Publication date: December 8, 2011Inventor: Kyotaro Nakamura
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Patent number: 8063406Abstract: Various illustrative embodiments of methods for manufacturing a semiconductor device are described. These methods may include, for example, forming a first polysilicon layer above a substrate, wherein the first polysilicon layer comprises a doped portion, and forming a second polysilicon layer over a surface of the first polysilicon layer. Also, various illustrative embodiments of semiconductor devices are described that may be manufactured such as by the various methods described herein.Type: GrantFiled: October 22, 2010Date of Patent: November 22, 2011Assignee: Infineon Technologies AGInventors: Haoren Zhuang, Matthias Lipinski, Jingyu Lian, Chandrasekhar Sarma
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Publication number: 20110278702Abstract: A method for producing a dopant profile is provided. The method includes starting from a surface of a wafer-shaped semiconductor component by introducing dopant atoms into the semiconductor component. The dopant-containing layer is produced on or in a region of the surface in order to produce a provisional first dopant profile and then a plurality of semiconductor components having a corresponding layer is subjected to heat treatment on top of one another in the form of a stack in order to produce a second dopant profile having a greater depth in comparison to the first dopant profile.Type: ApplicationFiled: December 3, 2009Publication date: November 17, 2011Inventors: Joerg Horzel, Dieter Franke, Gabriele Blendin, Marco Faber, Wilfried Schmidt
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Patent number: 8049255Abstract: A semiconductor device includes an insulating substrate and a TFT element disposed on the substrate. The TFT element includes a gate electrode, a gate insulating film, a semiconductor layer, and a source electrode and a drain electrode arranged in that order on the insulating substrate. The semiconductor layer includes an active layer composed of polycrystalline semiconductor and a contact layer segment interposed between the active layer and the source electrode and another contact layer segment interposed between the active layer and the drain electrode. The source and drain electrodes each have a first face facing the opposite face of the active layer from the interface with the gate insulating layer and a second face facing an etched side face of the active layer. Each contact layer segment is disposed between the active layer and each of the first and second faces of the source or drain electrode.Type: GrantFiled: June 5, 2008Date of Patent: November 1, 2011Assignee: Hitachi Displays, Ltd.Inventors: Takeshi Sakai, Toshio Miyazawa, Takuo Kaitoh, Hidekazu Miyake
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Patent number: 8049278Abstract: An ESD device includes a low doped well connected to a first contact and a diffusion area connected to a second contact. A substrate between the low doped well and the diffusion area has a dopant polarity that is opposite a dopant polarity of the low doped well and the diffusion area. A distance between the low doped well and the diffusion area determines a triggering voltage of the ESD device. A depletion region is formed between the low doped well and the substrate when a reverse bias voltage is applied to the ESD device. A current discharging path is formed between the first contact and the second contact when the depletion region comes in to contact with the diffusion area. The substrate is biased by a connection to the second contact. Alternatively, an additional diffusion area with the same dopant polarity, connected to a third contact, biases the substrate.Type: GrantFiled: October 10, 2008Date of Patent: November 1, 2011Assignee: Broadcom CorporationInventor: Agnes Neves Woo
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Patent number: 8030740Abstract: A microelectronic structure including a layerstack is provided, the layerstack including: (a) a first layer including semiconductor material that is very heavily n-doped before being annealed, having a first-layer before-anneal dopant concentration, the first layer being between about 50 and 200 angstroms thick, wherein the first layer is above a substrate, and wherein the first layer is heavily n-doped after being annealed, having a first-layer after-anneal dopant concentration, the first-layer before-anneal dopant concentration exceeding the first-layer after-anneal concentration; (b) a second layer including semiconductor material that is not heavily doped before being annealed, having a second-layer before-anneal dopant concentration, the second layer being about as thick as the first layer, wherein the second layer is above and in contact with the first layer, and wherein the second layer includes heavily n-doped semiconductor material after being annealed, having a second-layer after-anneal dopant conceType: GrantFiled: December 7, 2009Date of Patent: October 4, 2011Assignee: SanDisk 3D LLCInventor: S. Brad Herner
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Patent number: 7992108Abstract: First and second evaluation substrates are prepared, a direction perpendicular to a surface of the first evaluation substrate being defined by first indices, and the direction defined by the first indices being inclined from a normal direction of a surface of the second evaluation substrate. Ion implantation is performed for the first evaluation substrate in a vertical direction. Ion implantation is performed for the second evaluation substrate by using an ion beam parallel to the direction defined by the first indices. Impurity concentration distributions in a depth direction of the first and second evaluation substrates are measured. A first impurity concentration distribution on an extension line of an ion beam and a second impurity concentration distribution in a direction perpendicular to the extension line are predicted from the measured impurity concentration distributions of the first and second evaluation substrates.Type: GrantFiled: December 26, 2007Date of Patent: August 2, 2011Assignee: Fujitsu LimitedInventor: Kunihiro Suzuki
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Publication number: 20110140246Abstract: Systems and methods for producing high quantum efficiency silicon devices. A silicon MBE has a preparation chamber that provides for cleaning silicon surfaces using an oxygen plasma to remove impurities and a gaseous (dry) NH3+NF3 room temperature oxide removal process that leaves the silicon surface hydrogen terminated. Silicon wafers up to 8 inches in diameter have devices that can be fabricated using the cleaning procedures and MBE processing, including delta doping.Type: ApplicationFiled: December 10, 2010Publication date: June 16, 2011Applicant: California Institute of TechnologyInventors: Michael E. Hoenk, Shouleh Nikzad, Todd J. Jones, Frank Greer, Alexander G. Carver
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Publication number: 20110133314Abstract: A method for producing a semiconductor wafer includes pulling a single crystal of semiconductor material, slicing a semiconductor wafer from the single crystal and polishing the semiconductor wafer with the polishing pad and polishing agent. The polishing agent is free of solid materials having abrasive action and the polishing pad contains fixedly bonded solid materials with abrasive action. During polishing the polishing agent is supplied in a gap between the semiconductor wafer and polishing pad. The polishing agent has a pH value in a range of 9.5 to 12.5.Type: ApplicationFiled: November 4, 2010Publication date: June 9, 2011Applicant: SILTRONIC AGInventors: Georg Pietsch, Walter Haeckl, Juergen Schwandner, Noemi Banos
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Publication number: 20110121437Abstract: A semiconductor device includes a drift zone of a first conductivity type formed within a semiconductor body, wherein one side of opposing sides of the drift zone adjoins a first zone within the semiconductor body and the other side adjoins a second zone within the semiconductor body. First semiconductor subzones of a second conductivity type different from the first conductivity type are formed within each of the first and second zones opposing each other along a lateral direction extending parallel to a surface of the semiconductor body. A second semiconductor subzone is formed within each of the first and second zones and between the first semiconductor subzones along the lateral direction. An average concentration of dopants within the second semiconductor subzone along 10% to 90% of an extension of the second semiconductor subzone along a vertical direction perpendicular to the surface is smaller than the average concentration of dopants along a corresponding section of extension within the drift zone.Type: ApplicationFiled: November 25, 2009Publication date: May 26, 2011Applicant: Infineon Technologies Austria AGInventors: Hans Weber, Gerald Deboy
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Patent number: 7943405Abstract: A liquid crystal display panel and a fabricating method thereof comprising an image sensing capability, image scanning, and touch inputting. In the liquid crystal display device, a gate line and a data line are formed to intersect each other on a substrate to define a pixel area in which a pixel electrode is positioned. A first thin film transistor is positioned at an intersection area of the gate line and the data line. A sensor thin film transistor senses light having image information and supplied with a first driving voltage from the data line. A driving voltage supply line is positioned in parallel to the gate line to supply a second driving voltage to the sensor thin film transistor.Type: GrantFiled: May 20, 2010Date of Patent: May 17, 2011Assignee: LG Display Co., Ltd.Inventors: Hee Kwang Kang, Kyo Seop Choo
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Publication number: 20110101501Abstract: A semiconductor device includes first semiconductor zones of a first conductivity type having a first dopant species of the first conductivity type and a second dopant species of a second conductivity type different from the first conductivity type. The semiconductor device also includes second semiconductor zones of the second conductivity type including the second dopant species. The first and second semiconductor zones are alternately arranged in contact with each other along a lateral direction extending in parallel to a surface of a semiconductor body. One of the first and second semiconductor zones constitute drift zones and a diffusion coefficient of the second dopant species is at least twice as large as the diffusion coefficient of the first dopant species. A concentration profile of the first dopant species along a vertical direction perpendicular to the surface of the semiconductor body includes at least two maxima.Type: ApplicationFiled: October 29, 2009Publication date: May 5, 2011Applicant: INFINEON TECHNOLOGIES AGInventor: Hans-Joachim Schulze
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Patent number: 7936051Abstract: A silicon wafer which achieves a gettering effect without occurrence of slip dislocations is provided, and the silicon wafer is subject to heat treatment after slicing from a silicon monocrystal ingot so that a layer which has zero light scattering defects according to the 90° light scattering method is formed in a region at a depth from the wafer surface of 25 ?m or more but less than 100 ?m, and a layer which has a light scattering defect density of 1×108/cm3 or more according to the 90° light scattering method is formed in a region at a depth of 100 ?m from the wafer surface.Type: GrantFiled: February 4, 2008Date of Patent: May 3, 2011Assignee: Sumco CorporationInventors: Toshiaki Ono, Masataka Hourai
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Publication number: 20110068440Abstract: A method of manufacturing a semiconductor device includes providing a semiconductor wafer and forming at least one first trench in the wafer having first and second sidewalls and a first orientation on the wafer. The first sidewall of the at least one first trench is implanted with a dopant of a first conductivity at a first implantation direction. The first sidewall of the at least one first trench is implanted with the dopant of the first conductivity at a second implantation direction. The second implantation direction is orthogonal to the first implantation direction. The first and second implantation directions are non-orthogonal to the first sidewall.Type: ApplicationFiled: October 28, 2010Publication date: March 24, 2011Applicant: Icemos Technology Ltd.Inventors: Takeshi Ishiguro, Hugh J. Griffin, Kenji Sugiura
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Publication number: 20110049682Abstract: Systems and methods for substrate wafer back side and edge cross section seals. In accordance with a first method embodiment, a silicon wafer of a first conductivity type is accessed. An epitaxial layer of the first conductivity type is grown on a front surface of the silicon wafer. The epitaxial layer is implanted to form a region of an opposite conductivity type. The growing and implanting are repeated to form a vertical column of the opposite conductivity type. The wafer may also be implanted to form a region of the opposite conductivity type vertically aligned with the vertical column.Type: ApplicationFiled: August 31, 2010Publication date: March 3, 2011Applicant: VISHAY-SILICONIXInventors: Hamilton Lu, The-Tu Chau, Kyle Terrill, Deva N. Pattanayak, Sharon Shi, Kuo-In Chen, Robert Xu
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Publication number: 20110042791Abstract: A method for treating an oxygen-containing semiconductor wafer, and semiconductor component. One embodiment provides a first side, a second side opposite the first side. A first semiconductor region adjoins the first side. A second semiconductor region adjoins the second side. The second side of the wafer is irridated such that lattice vacancies arise in the second semiconductor region. A first thermal process is carried out the duration of which is chosen such that oxygen agglomerates form in the second semiconductor region and that lattice vacancies diffuse from the first semiconductor region into the second semiconductor region.Type: ApplicationFiled: January 19, 2007Publication date: February 24, 2011Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Hans-Joachim Schulze, Helmut Strack, Anton Mauder
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Patent number: 7880272Abstract: Aspects of the present invention include a semiconductor device and method. In a transition region of a semiconductor material region, a near-surface compensation doping area with a conductivity type, which is different than the conductivity type of a transition doping area of the semiconductor material region, is provided in the surface region of the semiconductor material region. The doping of the near-surface compensation doping area of the semiconductor device at least partially compensates for the doping in the transition doping area.Type: GrantFiled: January 31, 2006Date of Patent: February 1, 2011Assignee: Infineon Technologies AGInventor: Gerhard Schmidt
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Patent number: 7875961Abstract: A semiconductor substrate, of GaAs with a semiconductor layer sequence applied on top of the substrate. The semiconductor layer sequence comprises a plurality of semiconductor layers of Al1-yGayAs1-xPx with 0?x?1 and 0?y?1. A number of the semiconductor layers respectively comprising a phosphorus component x which is greater than in a neighboring semiconductor layer lying thereunder in the direction of growth of the semiconductor layer sequence. Two semiconductor layers directly preceding the uppermost semiconductor layer of the semiconductor layer sequence have a smaller lattice constant than the uppermost layer.Type: GrantFiled: November 19, 2009Date of Patent: January 25, 2011Assignee: Osram Opto Semiconductors GmbHInventors: Norbert Linder, Günther Grönninger, Peter Heidborn, Klaus Streubel, Siegmar Kugler
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Publication number: 20100308446Abstract: The first layer is located on the first electrode and has the first conductivity type. The second layer is located on the first layer and has the second conductivity type. The third layer is located on the second layer. The second electrode is located on the third layer. The fourth layer is located between the second layer and the third layer, and has the second conductivity type. The third layer includes the first portion and the second portion. The first portion has the second conductivity type and has a peak value of an impurity concentration higher than the peak value of the impurity concentration in the second layer. The second portion has the first conductivity type. The area of the second portion accounts for not less than 20% and not more than 95% of the total area of the first portion and the second portion.Type: ApplicationFiled: March 3, 2010Publication date: December 9, 2010Applicant: MITSUBISHI ELECTRIC CORPORATIONInventor: Katsumi NAKAMURA
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Publication number: 20100295159Abstract: The present invention provides a method (80) for manufacturing a semiconductor tip. The method comprises obtaining (81) a substrate provided with a layer of tip material, providing (82) a doping profile in the layer of tip material, the doping profile comprising a tapered-shaped region of a first dopant concentration, undoped or lightly doped, e.g. having a dopant concentration of 1017 cm?3 or lower, surrounded by a region of a second dopant concentration, highly doped, e.g. having a dopant concentration above 1017 cm?3 , the first dopant concentration being lower than the second dopant concentration, and isotropically etching (83) the layer of tip material by using an etch chemistry for which the etch rate of tip material with the second dopant concentration is substantially higher than the etch rate of the tip material with the first dopant concentration.Type: ApplicationFiled: August 29, 2008Publication date: November 25, 2010Applicant: IMECInventor: Simone Severi
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Patent number: 7838969Abstract: A diode is disclosed. One embodiment provides a semiconductor body having a front and a back, opposite the front in a vertical direction of the semiconductor body. The semiconductor body contains, successively in the vertical direction from the back to the front, a heavily n-doped zone, a weakly n-doped zone, a weakly p-doped zone and a heavily p-doped zone. In the vertical direction, the weakly p-doped zone has a thickness of at least 25% and at most 50% of the thickness of the semiconductor body.Type: GrantFiled: January 3, 2008Date of Patent: November 23, 2010Assignee: Infineon Technologies AGInventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Reiner Barthelmess
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Patent number: 7834383Abstract: A pixel including a substrate of a first conductivity type and having a surface, a photodetector of a second conductivity type that is opposite the first conductivity type, a floating diffusion region of the second conductivity type, a transfer region between the photodetector and the floating diffusion, a gate positioned above the transfer region and partially overlapping the photodetector, and a pinning layer of the first conductivity type extending at least across the photodetector from the gate.Type: GrantFiled: June 9, 2009Date of Patent: November 16, 2010Assignee: Aptina Imaging CorporationInventors: Chintamani P. Palsule, Changhoon Choi, Fredrick P. LaMaster, John H. Stanback, Thomas E. Dungan, Thomas Joy, Homayoon Haddad
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Publication number: 20100276785Abstract: A system and method for variable doping within a semiconductor structure for improved efficiency is described. One embodiment includes a semiconductor structure comprising a first semiconductor layer comprising a first semiconductor material, and a second semiconductor layer comprising a second semiconductor material, wherein the second semiconductor material is an oppositely-typed semiconductor material from the first semiconductor material, and wherein the second semiconductor layer comprises a first region adjacent to the first semiconductor layer, wherein the first region comprises low-doped second semiconductor material, and a second region adjacent to the first region, wherein the second region comprises highly-doped second semiconductor material to increase a built-in potential of the semiconductor structure.Type: ApplicationFiled: April 30, 2009Publication date: November 4, 2010Inventors: Kishore Kamath, Alan R. DAVIES, Anders OLSSON
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Patent number: 7808174Abstract: A light-emitting diode (1) has a first electrode (3), a second electrode (4), a light-emitting layer (5) which comprises a matrix, and ions. A layer (6) of a cation receptor (CR) is positioned adjacent to the first electrode (3), has captured cations, and has generated immobilized cations (+). A layer (7) of an anion receptor (AR) is positioned adjacent to the second electrode (4), has captured anions, and has generated immobilized anions (?). The ion gradients provide for quick response in emission of light (L) when the diode (1) is exposed to a forward bias. A diode (1) is manufactured by first forming a laminate (2) of the above structure. The laminate (2) is exposed to a forward bias to make the ions become immobilized at respective sites (S1, S2) of the respective receptors (CR, AR).Type: GrantFiled: January 13, 2006Date of Patent: October 5, 2010Assignee: Koninklijke Philips Electronics N.V.Inventors: Eduard Johannes Meijer, Eric Alexander Meulenkamp, Ralph Kurt, Steve Klink
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Patent number: 7807999Abstract: An array substrate includes a gate line, a data line, a switching device, a transmissive electrode, a reflective electrode and a compensating wiring. A pixel region includes first and second regions. The switching device is connected to the gate line and the data line. The transmissive electrode is connected to the switching device. The transmissive electrode is formed in the first region. The reflective electrode is insulated from the transmissive electrode. The reflective electrode is formed in the second region that is adjacent to the first region. The compensating wiring is connected to the switching device. The compensating wiring faces the reflective electrode in the second region with an insulation layer interposed therebetween. Thus, both of a reflectivity of the reflective electrode and a transmissivity of the transmissive electrode are enhanced simultaneously, while the liquid crystal display apparatus maintains a uniform cell gap.Type: GrantFiled: December 17, 2003Date of Patent: October 5, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Hee-Seop Kim, Won-Sang Park, Sang-Il Kim, Dong-Sik Sakong, Young-Chol Yang, Sung-Kyu Hong, Jong-Lae Kim
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Publication number: 20100224968Abstract: This method for manufacturing a high resistivity silicon wafer includes pulling a single crystal such that the single crystal has a p-type dopant concentration at which a wafer surface resistivity becomes in a range of 0.1 to 10 k?cm, an oxygen concentration Oi of 5.0×1017 to 20×1017 atoms/cm3 (ASTM F-121, 1979), and either one of a nitrogen concentration of 1.0×1013 to 10×1013 atoms/cm3 (ASTM F-121, 1979) and a carbon concentration of 0.5×1016 to 10×1016 atoms/cm3 or 0.5×1016 to 50×1016 atoms/cm3 (ASTM F-123, 1981) by using a Czochralski method, processing the single crystal into wafers by slicing the single crystal, and subjecting the wafer to an oxygen out-diffusion heat treatment process in a non-oxidizing atmosphere.Type: ApplicationFiled: March 1, 2010Publication date: September 9, 2010Applicant: SUMCO CORPORATIONInventor: Kazunari Kurita
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Publication number: 20100213582Abstract: Semiconductor-on-insulator (SOI) structures, including large area SOI structures, are provided which have one or more regions composed of a layer (15) of a substantially single-crystal semiconductor (e.g., doped silicon) attached to a support substrate (20) composed of an oxide glass or an oxide glass-ceramic. The oxide glass or oxide glass-ceramic is preferably transparent and preferably has a strain point of less than 1000° C., a resistivity at 250° C. that is less than or equal to 1016 ?-cm, and contains positive ions (e.g., alkali or alkaline-earth ions) which can move within the glass or glass-ceramic in response to an electric field at elevated temperatures (e.g., 300-1000° C.). The bond strength between the semiconductor layer (15) and the support substrate (20) is preferably at least 8 joules/meter2. The semiconductor layer (15) can include a hybrid region (16) in which the semiconductor material has reacted with oxygen ions originating from the glass or glass-ceramic.Type: ApplicationFiled: December 4, 2008Publication date: August 26, 2010Inventors: James G. Couillard, Kishor P. Gadkaree, Joseph F. Mach
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Publication number: 20100200944Abstract: A method for fabricating a back-illuminated semiconductor imaging device on a semiconductor-on-insulator substrate, and resulting imaging device is disclosed. The device includes an insulator layer; a semiconductor substrate, having an interface with the insulator layer; an epitaxial layer grown on the semiconductor substrate by epitaxial growth; and one or more imaging components in the epitaxial layer in proximity to a face of the epitaxial layer, the face being opposite the interface of the semiconductor substrate and the insulator layer, the imaging components comprising junctions within the epitaxial layer; wherein the semiconductor substrate and the epitaxial layer exhibit a net doping concentration having a maximum value at a predetermined distance from the interface of the insulating layer and the semiconductor substrate and which decreases monotonically on both sides of the profile from the maximum value within a portion of the semiconductor substrate and the epitaxial layer.Type: ApplicationFiled: April 15, 2010Publication date: August 12, 2010Inventors: Peter Alan Levine, Pradyumna Swain, Mahalingam Bhaskaran
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Publication number: 20100176375Abstract: In accordance with an embodiment, a diode comprises a substrate, a dielectric material including an opening that exposes a portion of the substrate, the opening having an aspect ratio of at least 1, a bottom diode material including a lower region disposed at least partly in the opening and an upper region extending above the opening, the bottom diode material comprising a semiconductor material that is lattice mismatched to the substrate, a top diode material proximate the upper region of the bottom diode material, and an active diode region between the top and bottom diode materials, the active diode region including a surface extending away from the top surface of the substrate.Type: ApplicationFiled: January 8, 2010Publication date: July 15, 2010Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Anthony J. Lochtefeld
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Patent number: 7741646Abstract: A liquid crystal display panel and a fabricating method thereof comprising an image sensing capability, image scanning, and touch inputting. In the liquid crystal display device, a gate line and a data line are formed to intersect each other on a substrate to define a pixel area in which a pixel electrode is positioned. A first thin film transistor is positioned at an intersection area of the gate line and the data line. A sensor thin film transistor senses light having image information and supplied with a first driving voltage from the data line. A driving voltage supply line is positioned in parallel to the gate line to supply a second driving voltage to the sensor thin film transistor.Type: GrantFiled: June 13, 2006Date of Patent: June 22, 2010Assignee: LG Display Co., Ltd.Inventors: Hee Kwang Kang, Kyo Seop Choo
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Publication number: 20100148323Abstract: A subject of the present invention is to realize an impurity doping not to bring about a rise of a substrate temperature. Another subject of the present invention is to measure optically physical properties of a lattice defect generated by the impurity doping step to control such that subsequent steps are optimized. An impurity doping method, includes a step of doping an impurity into a surface of a solid state base body, a step of measuring an optical characteristic of an area into which the impurity is doped, a step of selecting annealing conditions based on a measurement result to meet the optical characteristic of the area into which the impurity is doped, and a step of annealing the area into which the impurity is doped, based on the selected annealing conditions.Type: ApplicationFiled: February 23, 2010Publication date: June 17, 2010Applicant: PANASONIC CORPORATIONInventors: Cheng-Guo Jin, Yuichiro Sasaki, Bunji Mizuno
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Publication number: 20100140730Abstract: A semiconductor device is disclosed. The semiconductor device comprises, a first region of a first conductivity type, a second region of a second conductivity type disposed adjacent to the first region to form a p-n junction structure, a resistance modification region of the second conductivity type, and a field response modification region of the second conductivity type disposed between the resistance modification region and the second region, wherein the field response modification region comprises a varying dopant concentration distribution along a thickness direction of the field response modification region.Type: ApplicationFiled: December 8, 2008Publication date: June 10, 2010Applicant: GENERAL ELECTRIC COMPANYInventors: Stanislav Ivanovich Soloviev, Ho-Young Cha, Peter Micah Sandvik, Alexey Vert, Jody Alan Fronheiser
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Publication number: 20100102420Abstract: To provide a semiconductor device in which an interval between first wells can be shortened by improving a separation breakdown voltage between the first wells and a method for manufacturing the same.Type: ApplicationFiled: October 27, 2009Publication date: April 29, 2010Applicant: NEC Electronics CorporationInventors: Hidemitsu Mori, Kazuhiro Takimoto, Toshiyuki Shou, Kenji Sasaki, Yutaka Akiyama
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Publication number: 20100078673Abstract: A semiconductor component in which the active junctions extend perpendicularly to the surface of a semiconductor chip substantially across the entire thickness thereof. The contacts with the regions to be connected are provided by conductive fingers substantially crossing the entire region with which a contact is desired to be established.Type: ApplicationFiled: December 7, 2009Publication date: April 1, 2010Applicant: STMicroelectronics S.A.Inventor: Jean-Luc Morand
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Publication number: 20100078775Abstract: A semiconductor device has a cell field with drift zones of a first type of conductivity and charge carrier compensation zones of a second type of conductivity complementary to the first type. An edge region which surrounds the cell field has a higher blocking strength than the cell field, the edge region having a near-surface area which is undoped to more weakly doped than the drift zones, and beneath the near-surface area at least one buried, vertically extending complementarily doped zone is positioned.Type: ApplicationFiled: September 30, 2008Publication date: April 1, 2010Applicant: Infineon Technologies Austria AGInventors: Anton Mauder, Franz Hirler, Armin Willmeroth, Michael Rueb, Holger Kapels
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Patent number: 7671410Abstract: An improved Fast Recovery Diode comprises a main PN junction defining a central conduction region for conducting high current in a forward direction and a peripheral field spreading region surrounding the central conduction region for blocking high voltage in the reverse direction. The main PN junction has an avalanche voltage equal to or lower than an avalanche voltage of the peripheral field spreading region so substantially the entire said main PN junction participates in avalanche conduction. This rugged FRED structure can also be formed in MOSFETS, IGBTS and the like.Type: GrantFiled: December 21, 2006Date of Patent: March 2, 2010Assignee: Microsemi CorporationInventors: Shanqi Zhao, Dumitru Sdrulla
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Publication number: 20100038757Abstract: A silicon wafer produced from a silicon single crystal ingot grown by Czochralski process is subjected to rapid heating/cooling thermal process at a maximum temperature (T1) of 1300° C. or more, but less than 1380° C. in an oxidizing gas atmosphere having an oxygen partial pressure of 20% or more, but less than 100%. The silicon wafer according to the invention has, in a defect-free region (DZ layer) including at least a device active region of the silicon wafer, a high oxygen concentration region having a concentration of oxygen solid solution of 0.7×1018 atoms/cm3 or more and at the same time, the defect-free region contains interstitial silicon in supersaturated state.Type: ApplicationFiled: July 30, 2009Publication date: February 18, 2010Inventors: Hiromichi Isogai, Takeshi Senda, Eiji Toyoda, Kumiko Murayama, Koji Izunome, Susumu Maeda, Kazuhiko Kashima, Koji Araki, Tatsuhiko Aoki, Haruo Sudo, Yoichiro Mochizuki, Akihiko Kobayashi, Senlin Fu
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Patent number: 7656011Abstract: A diode is disclosed. One embodiment provides a semiconductor body having a front and a back, opposite the front in a vertical direction of the semiconductor body. The semiconductor body contains, successively in the vertical direction from the back to the front, a heavily n-doped zone, a weakly n-doped zone, a weakly p-doped zone and a heavily p-doped zone. In the vertical direction, the weakly p-doped zone has a thickness of at least 25% and at most 50% of the thickness of the semiconductor body.Type: GrantFiled: January 3, 2008Date of Patent: February 2, 2010Assignee: Infineon Technologies AGInventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Reiner Barthelmess
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Publication number: 20100012981Abstract: A semiconductor device includes a substrate portion having a plurality of diffusion regions defined therein in a non-symmetrical manner relative to a virtual line defined to bisect the substrate portion. The semiconductor device includes a gate electrode level region including a number of conductive features defined to extend in only a first parallel direction. Adjacent ones of the number of conductive features that share a common line of extent in the first parallel direction are fabricated from respective originating layout features that are separated from each other by an end-to-end spacing having a size that is substantially equal across the gate electrode level region and is minimized to an extent allowed by a semiconductor device manufacturing capability. The gate electrode level region includes conductive features defined along at least four different virtual lines of extent in the first parallel direction.Type: ApplicationFiled: September 25, 2009Publication date: January 21, 2010Applicant: Tela Innovations, Inc.Inventors: Scott T. Becker, Michael C. Smayling
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Patent number: 7649244Abstract: A vertical semiconductor device comprises a semiconductor body, a first contact and a second contact, wherein a first semiconductor region of a first conductivity type, a second semiconductor region of a second conductivity type and a third semiconductor region of a second conductivity type are formed in the semiconductor body in a direction from the first contact to the second contact, wherein a basic doping density of the second semiconductor region is smaller than a doping density of the third semiconductor region, and wherein in the second semiconductor region a semiconductor zone of the second conductivity type is arranged in which the doping density is increased relative to the basic doping density of the second semiconductor region.Type: GrantFiled: October 11, 2006Date of Patent: January 19, 2010Assignee: Infineon Technologies Austria AGInventors: Franz Josef Niedernostheide, Hans-Joachim Schulze
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Publication number: 20100006901Abstract: A semiconductor device includes a substrate portion having a plurality of diffusion regions defined therein. The plurality of diffusion regions are separated from each other by one or more non-active regions of the substrate portion. The plurality of diffusion regions are defined in a non-symmetrical manner relative to a virtual line defined to bisect the substrate portion. The semiconductor device includes a gate electrode level region formed above the substrate portion to include a number of conductive features defined to extend in only a first parallel direction. Each of the number of conductive features within the gate electrode level region is fabricated from a respective originating rectangular-shaped layout feature. The number of conductive features within the gate electrode level region includes conductive features defined along at least four different virtual lines of extent in the first parallel direction across the gate electrode level region.Type: ApplicationFiled: September 16, 2009Publication date: January 14, 2010Applicant: Tela Innovations, Inc.Inventors: Scott T. Becker, Michael C. Smayling
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Publication number: 20100006897Abstract: A restricted layout region includes a diffusion level layout that includes a number of diffusion region layout shapes to be formed within a portion of a substrate of a semiconductor device. The diffusion region layout shapes define at least one p-type diffusion region and at least one n-type diffusion region. The restricted layout region includes a gate electrode level layout defined to pattern conductive features within a gate electrode level above the portion of the substrate. The gate electrode level layout includes rectangular-shaped layout features placed to extend in only a first parallel direction. Some of the rectangular-shaped layout features form gate electrodes of respective PMOS transistor devices, and some of the rectangular-shaped layout features form gate electrodes of respective NMOS transistor devices. A number of the PMOS transistor devices is equal to a number of the NMOS transistor devices in the restricted layout region of the semiconductor device.Type: ApplicationFiled: September 16, 2009Publication date: January 14, 2010Applicant: Tela Innovations. Inc.Inventors: Scott T. Becker, Michael C. Smayling