Bipolar Dynamic Random Access Memory Structure (epo) Patents (Class 257/E27.075)
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Patent number: 10340006Abstract: Semiconductor memory is provided wherein a memory cell includes a capacitorless transistor having a floating body configured to store data as charge therein when power is applied to the cell. The cell further includes a nonvolatile memory comprising a resistance change element configured to store data stored in the floating body under any one of a plurality of predetermined conditions. A method of operating semiconductor memory to function as volatile memory, while having the ability to retain stored data when power is discontinued to the semiconductor memory is described.Type: GrantFiled: June 25, 2018Date of Patent: July 2, 2019Assignee: Zeno Semiconductor, Inc.Inventor: Yuniarto Widjaja
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Patent number: 8969941Abstract: According to an embodiment, a semiconductor device, includes a semiconductor substrate, first and second transistors. The first transistor includes a first insulating film provided on the semiconductor substrate, a first conductive film provided on the first insulating film, a second insulating film provided on the first conductive film, and a second conductive film provided on the second insulating film. The second transistor is provided to be separated from the first transistor, the second transistor including a third insulating film provided on the semiconductor substrate, a third conductive film provided on the third insulating film, a fourth insulating film provided on the third conductive film, and a fourth conductive film provided on the fourth insulating film. The third conductive film is thicker than the first conductive film, and the second transistor has a through-portion piercing the fourth insulating film to connect the third conductive film and the fourth conductive film.Type: GrantFiled: February 21, 2013Date of Patent: March 3, 2015Assignee: Kabushiki Kaisha ToshibaInventor: Wataru Sakamoto
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Patent number: 8928060Abstract: Some embodiments of the present disclosure relates to an architecture to create split gate flash memory cell that has lower common source (CS) resistance and a reduced cell size by utilizing isolated source regions that are diffused only in the active regions between the stacked control gate structures. The architecture contains no CS under the isolation region, thus eliminating the effects of CS rounding and CS resistance, resulting in a reduced space between cells in an array. A metal layer is disposed along the semiconductor body above the common source regions to provide potential coupling during programming and erasing and thus electrically connect the common sources of memory cells along a direction that forms a CS line. Hence, this particular architecture reduces the resistance and the metal connection over several cells in an array suppresses the area over head.Type: GrantFiled: May 10, 2013Date of Patent: January 6, 2015Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yong-Shiuan Tsair, Wen-Ting Chu, Po-Wei Liu, Wen-Tuo Huang
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Patent number: 8912576Abstract: A bipolar junction transistor built with a mesh structure of cells provided on a semiconductor body is disclosed. The mesh structure has at least one emitter cell with a first type of implant. At least one emitter cell has at least one side coupled to at least one cell with a first type of implant to serve as collector of the bipolar. The spaces between the emitter and collector cells are the intrinsic base of a bipolar device. At least one emitter cell has at least one vortex coupled to at least one cell with a second type of implant to serve as the extrinsic base of the bipolar. The emitter, collector, or base cells can be arbitrary polygons as long as the overall geometry construction can be very compact and expandable. The implant regions between cells can be separated with a space. A silicide block layer can cover the space and overlap into at least a portion of both implant regions.Type: GrantFiled: March 15, 2013Date of Patent: December 16, 2014Inventor: Shine C. Chung
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Patent number: 8765567Abstract: Nonvolatile memory elements that are based on resistive switching memory element layers are provided. A nonvolatile memory element may have a resistive switching metal oxide layer. The resistive switching metal oxide layer may have one or more layers of oxide. A resistive switching metal oxide may be doped with a dopant that increases its melting temperature and enhances its thermal stability. Layers may be formed to enhance the thermal stability of the nonvolatile memory element. An electrode for a nonvolatile memory element may contain a conductive layer and a buffer layer.Type: GrantFiled: October 24, 2013Date of Patent: July 1, 2014Assignee: Intermolecular, Inc.Inventors: Sandra G Malhotra, Sean Barstow, Tony P. Chiang, Pragati Kumar, Prashant B Phatak, Sunil Shanker, Wen Wu
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Patent number: 8737124Abstract: There is provided a semiconductor device including a word line, a bit line, a power supply node, a memory element, and a capacitor. The memory element includes at least first and second regions that form a PN junction between the bit line and the power supply node, and a third region that forms a PN junction with the second region. The capacitor includes a first electrode provided independently from the second region of the memory element and electrically connected to the second region of the memory element, and a second electrode connected to the word line.Type: GrantFiled: April 26, 2012Date of Patent: May 27, 2014Inventors: Shuichi Tsukada, Yasuhiro Uchiyama
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Patent number: 8704286Abstract: Methods for fabricating integrated circuits include fabricating a logic device on a substrate, forming an intermediate semiconductor substrate on a surface of the logic device, and fabricating a capacitor-less memory cell on the intermediate semiconductor substrate. Integrated circuits with capacitor-less memory cells formed on a surface of a logic device are also disclosed, as are multi-core microprocessors including such integrated circuits.Type: GrantFiled: September 11, 2012Date of Patent: April 22, 2014Assignee: Micron Technology, Inc.Inventor: Gurtej S. Sandhu
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Patent number: 8592282Abstract: Nonvolatile memory elements that are based on resistive switching memory element layers are provided. A nonvolatile memory element may have a resistive switching metal oxide layer. The resistive switching metal oxide layer may have one or more layers of oxide. A resistive switching metal oxide may be doped with a dopant that increases its melting temperature and enhances its thermal stability. Layers may be formed to enhance the thermal stability of the nonvolatile memory element. An electrode for a nonvolatile memory element may contain a conductive layer and a buffer layer.Type: GrantFiled: October 19, 2012Date of Patent: November 26, 2013Assignee: Intermolecular, Inc.Inventors: Sandra G. Malhotra, Sean Barstow, Tony P. Chiang, Pragati Kumar, Prashant B. Phatak, Sunil Shanker, Wen Wu
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Patent number: 8362535Abstract: A non-volatile memory cell includes a semiconductor substrate with isolation structures formed therein and thereby transistor region and capacitor region are defined therein. A conductor is disposed over the isolation structures, the transistor region and a first-type doped well disposed in the capacitor region. The conductor includes a capacitor portion disposed over the first-type doped well, a transistor portion disposed over the transistor region, a first edge disposed over the isolation structure at a side of the transistor region, and an opposite second edge disposed over the first-type doped well. Two first ion doped wells are disposed in the transistor region and respectively at two sides of the transistor portion, and constitutes a transistor with the transistor portion. A second ion doped region is disposed in the capacitor region excluding the conductor and constitutes a capacitor with the capacitor portion.Type: GrantFiled: September 29, 2009Date of Patent: January 29, 2013Assignee: United Microelectronics Corp.Inventors: Hung-Lin Shih, Jr-Bin Chen, Pei-Ching Yin, Hui-Fang Tsai
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Patent number: 8318573Abstract: Nonvolatile memory elements that are based on resistive switching memory element layers are provided. A nonvolatile memory element may have a resistive switching metal oxide layer. The resistive switching metal oxide layer may have one or more layers of oxide. A resistive switching metal oxide may be doped with a dopant that increases its melting temperature and enhances its thermal stability. Layers may be formed to enhance the thermal stability of the nonvolatile memory element. An electrode for a nonvolatile memory element may contain a conductive layer and a buffer layer.Type: GrantFiled: December 27, 2011Date of Patent: November 27, 2012Assignee: Intermolecular, Inc.Inventors: Sandra G. Malhotra, Pragati Kumar, Sean Barstow, Tony Chiang, Prashant B. Phatak, Wen Wu, Sunil Shanker
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Patent number: 8294219Abstract: Nonvolatile memory elements that are based on resistive switching memory element layers are provided. A nonvolatile memory element may have a resistive switching metal oxide layer. The resistive switching metal oxide layer may have one or more layers of oxide. A resistive switching metal oxide may be doped with a dopant that increases its melting temperature and enhances its thermal stability. Layers may be formed to enhance the thermal stability of the nonvolatile memory element. An electrode for a nonvolatile memory element may contain a conductive layer and a buffer layer.Type: GrantFiled: July 24, 2008Date of Patent: October 23, 2012Assignee: Intermolecular, Inc.Inventors: Sandra G. Malhotra, Pragati Kumar, Sean Barstow, Tony Chiang, Prashant B. Phatak, Wen Wu, Sunil Shanker
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Patent number: 8278167Abstract: Methods for fabricating integrated circuits include fabricating a logic device on a substrate, forming an intermediate semiconductor substrate on a surface of the logic device, and fabricating a capacitor-less memory cell on the intermediate semiconductor substrate. Integrated circuits with capacitor-less memory cells formed on a surface of a logic device are also disclosed, as are multi-core microprocessors including such integrated circuits.Type: GrantFiled: December 18, 2008Date of Patent: October 2, 2012Assignee: Micron Technology, Inc.Inventor: Gurtej S. Sandhu
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Patent number: 8247861Abstract: A semiconductor device and method of making a semiconductor device are disclosed. A semiconductor body, a floating gate poly and a source/drain region are provided. A metal interconnect region with a control gate node is provided that capacitively couples to the floating gate poly.Type: GrantFiled: July 18, 2007Date of Patent: August 21, 2012Assignee: Infineon Technologies AGInventors: Georg Tempel, Ernst-Otto Andersen, Achim Gratz
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Patent number: 8183613Abstract: A memory device includes an insulation layer, an active pattern, a gate insulation layer and a gate electrode. The insulation layer is formed on a substrate. The active pattern is formed on the insulation layer, and includes two protrusions and a recess between the protrusions. The active pattern includes a first impurity region and a second impurity region at upper portions of the protrusions distal from the substrate, respectively, and a base region at the other portions serving as a floating body for storing data. The gate insulation layer is formed on a surface of the active pattern. The gate electrode is formed on the gate insulation layer, and surrounds a lower portion of the active pattern and partially fills the recess.Type: GrantFiled: January 6, 2010Date of Patent: May 22, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Hoon Jeong, Yong-Chul Oh, Sung-In Hong, Sung-Hwan Kim, Yong-Lack Choi, Ho-Ju Song
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Patent number: 8143723Abstract: A semiconductor device and its manufacture method wherein the semiconductor substrate has first and second insulating films, the first insulating film being an insulating film other than a silicon nitride film formed at least on a side wall of a conductive pattern including at least one layer of metal or metal silicide, and the second insulating film being a silicon nitride film formed to cover the first insulating film and the upper surface and side wall of the conductive pattern. The first insulating film may be formed to cover the upper surface and side wall of the conductive pattern. A semiconductor device and its manufacture method are provided which can realize high integrated DRAMs of 256 M or larger without degrading reliability and stability.Type: GrantFiled: December 3, 2008Date of Patent: March 27, 2012Assignee: Fujitsu Semiconductor LimitedInventors: Shinichiroh Ikemasu, Narumi Okawa
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Patent number: 7919772Abstract: A nonvolatile memory has a problem in that applied voltage is high. This is because a carrier needs to be injected into a floating gate through an insulating film by a tunneling effect. In addition, there is concern about deterioration of the insulating film by performing such carrier injection. An object of the present invention is to provide a memory in which applied voltage is lowered and deterioration of an insulating film is prevented. One feature is to use a layer in which an inorganic compound having a charge-transfer complex is mixed with an organic compound as a layer functioning as a floating gate of a memory. A specific example is an element having a transistor structure where a layer in which an inorganic compound having a charge-transfer complex is mixed with an organic compound and which is sandwiched between insulating layers is used as a floating gate.Type: GrantFiled: December 8, 2005Date of Patent: April 5, 2011Assignee: Semiconductor Energy laboratory Co., Ltd.Inventors: Shinobu Furukawa, Ryota Imahayashi
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Patent number: 7709876Abstract: A semiconductor structure and a method for forming the same. The structure includes (i) a dielectric layer, (ii) a bottom capacitor plate and an electrically conductive line on the dielectric layer, (iii) a top capacitor plate on top of the bottom capacitor plate, (iv) a gap region, and (v) a solder ball on the dielectric layer. The dielectric layer includes a top surface that defines a reference direction perpendicular to the top surface. The top capacitor plate overlaps the bottom capacitor plate in the reference direction. The gap region is sandwiched between the bottom capacitor plate and the top capacitor plate. The gap region does not include any liquid or solid material. The solder ball is electrically connected to the electrically conductive line. The top capacitor plate is disposed between the dielectric layer and the solder ball.Type: GrantFiled: February 11, 2008Date of Patent: May 4, 2010Assignee: International Business Machines CorporationInventors: Stephen P. Ayotte, Timothy Harrison Daubenspeck, Jeffrey Peter Gambino, Christopher David Muzzy, Wolfgang Sauter
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Patent number: 7687361Abstract: Disclosed is a method for fabricating a transistor of a memory device capable of preventing voids from being created when forming a low-resistant gate electrode. The method includes the steps of forming an active area by etching a semiconductor substrate, forming a field oxide layer in the semiconductor substrate and forming a recess by etching the field oxide layer. A gate insulation layer is formed along an upper surface of the active area and an exposed portion of the active area. A gate electrode is formed on the field oxide layer such that the gate electrode extends across an upper portion of the active area while being overlapped with a channel area and the recess. The first conductive layer to be patterned has the same thickness, so the low-resistant gate electrode is easily fabricated without forming the voids.Type: GrantFiled: June 17, 2005Date of Patent: March 30, 2010Assignee: Hynix Semiconductor Inc.Inventors: Se Aug Jang, Yong Soo Kim, Jae Geun Oh
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Patent number: 7649261Abstract: A semiconductor device and its manufacture method wherein the semiconductor substrate has first and second insulating films, the first insulating film being an insulating film other than a silicon nitride film formed at least on a side wall of a conductive pattern including at least one layer of metal or metal silicide, and the second insulating film being a silicon nitride film formed to cover the first insulating film and the upper surface and side wall of the conductive pattern. The first insulating film may be formed to cover the upper surface and side wall of the conductive pattern. A semiconductor device and its manufacture method are provided which can realize high integrated DRAMs of 256 M or larger without degrading reliability and stability.Type: GrantFiled: March 28, 2007Date of Patent: January 19, 2010Assignee: Fujitsu Microelectronics LimitedInventors: Shinichiroh Ikemasu, Narumi Okawa
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Patent number: 7608506Abstract: A semiconductor structure for a dynamic random access memory (DRAM) cell array that includes a plurality of vertical memory cells built on a semiconductor-on-insulator (SOI) wafer and a body contact in the buried dielectric layer of the SOI wafer. The body contact electrically couples a semiconductor body with a channel region of the access device of one vertical memory cell and a semiconductor substrate of the SOI wafer. The body contact provides a current leakage path that reduces the impact of floating body effects upon the vertical memory cell. The body contact may be formed by an ion implantation process that modifies the stoichiometry of a region of the buried dielectric layer so that the modified region becomes electrically conductive with a relatively high resistance.Type: GrantFiled: October 26, 2007Date of Patent: October 27, 2009Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Louis Lu-Chen Hsu, Jack Allan Mandelman
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Patent number: 7563684Abstract: A process for manufacturing an array of cells, including: implanting, in a body of semiconductor material of a first conductivity type, a common conduction region of the first conductivity type; forming, in the body, above the common conduction region, a plurality of active area regions of a second conductivity type and a first doping level; forming, on top of the body, an insulating layer having first and second openings; implanting first portions of the active area regions through the first openings with a doping agent of the first conductivity type, thereby forming, in the active area regions, second conduction regions of the first conductivity type; implanting second portions of the active area regions through the second openings with a doping agent of the second conductivity type, thereby forming control contact regions of the second conductivity type and a second doping level, higher than the first doping level; forming, on top of the body, a plurality of storage components, each storage component havinType: GrantFiled: November 1, 2005Date of Patent: July 21, 2009Inventors: Fabio Pellizzer, Giulio Casagrande, Roberto Gastaldi, Loris Vendrame, Augusto Benvenuti, Tyler Lowrey
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Patent number: 7537939Abstract: In the manufacture of semiconductors, it is often necessary to characterize the effect of line width and line width shape on yield. In an example embodiment, there is a method (200) for randomizing exposure conditions across a substrate. The method comprises generating a list of random numbers (210). A random number is mapped (220) to an exposure field, forming a list of random numbers and corresponding exposure fields. The list or random numbers and corresponding exposure fields is sorted (230) by random number. To each exposure field in the list sorted by random number, an exposure dose is assigned (240). The list is sorted is sorted by exposure field (250).Type: GrantFiled: April 27, 2004Date of Patent: May 26, 2009Assignee: NXP B.V.Inventors: David Ziger, Steven Qian
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Publication number: 20080272424Abstract: Disclosed herein is a nonvolatile memory device that includes a substrate, a tunneling layer over the substrate, a charge trapping layer over the tunneling layer, an insulating layer for improving retention characteristics over the charge trapping layer, a blocking layer over the insulating layer, and a control gate electrode over the blocking layer. Also disclosed herein is a method of making the device.Type: ApplicationFiled: November 15, 2007Publication date: November 6, 2008Applicant: HYNIX SEMICONDUCTOR INC.Inventors: Yong Top Kim, Hong Seon Yang, Tae Yoon Kim, Yong Soo Kim, Seung Ryong Lee, Moon Sig Joo
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Patent number: 7393739Abstract: A demultiplexer using transistors for accessing memory cell arrays. The demultiplexer includes (a) a substrate; (b) 2N semiconductor regions which are parallel to one another and run in a first direction; (c) first N gate electrode lines, which (i) run in a second direction which is perpendicular to the first direction, (ii) are electrically insulated from the 2N semiconductor regions, and (iii) are disposed between the first plurality of memory cells and the contact region; (d) a contact region; (e) a first plurality of memory cells. An intersection transistor exists at each of intersections between the first N gate electrode lines and the 2N semiconductor regions. In response to pre-specified voltage potentials being applied to the contact region and the first N gate electrode lines, memory cells of the first plurality of memory cells disposed on only one of the 2N semiconductor regions are selected.Type: GrantFiled: August 30, 2006Date of Patent: July 1, 2008Assignee: International Business Machines CorporationInventors: Kailash Gopalakrishnan, Rohit Sudhir Shenoy
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Patent number: 7323349Abstract: A method of fabricating resistor memory array includes preparing a silicon substrate; depositing a bottom electrode, a sacrificial layer, and a hard mask layer on a substrate P+ layer; masking, patterning and etching to remove, in a first direction, a portion of the hard mask, the sacrificial material, the bottom electrode; depositing a layer of silicon oxide; masking, patterning and etching to remove, in a second direction perpendicular to the first direction, a portion of the hard mask, the sacrificial material, the bottom electrode;, and over etching to an N+ layer and at least 100 nm of the silicon substrate; depositing of a layer of silicon oxide; etching to remove any remaining hard mask and any remaining sacrificial material; depositing a layer of CMR material; depositing a top electrode; applying photoresist, patterning the photoresist and etching the top electrode; and incorporating the memory array into an integrated circuit.Type: GrantFiled: May 2, 2005Date of Patent: January 29, 2008Assignee: Sharp Laboratories of America, Inc.Inventors: Sheng Teng Hsu, Jong-Jan Lee, Jer-Shen Maa, Douglas J. Tweet, Wei-Wei Zhuang
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Publication number: 20070040209Abstract: The amount of current flowing in the bitline during reading of a memory cell which is in the conductive state, hereinafter called the memory cell current, can be amplified manifold by changing the above mentioned select transistors to a novel device which is described in detail. The increase of the area of the said memory arrays due to the replacement of said select transistor with the novel device is very small. In addition the novel device can be built within the pitch of said select transistor, which is the pitch of the bitline. The novel device can be used in many types of semiconductor memories, as described in the various embodiments.Type: ApplicationFiled: August 17, 2005Publication date: February 22, 2007Inventor: Gregorio Spadea
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Patent number: 7105900Abstract: An SRAM cell that may reduce or eliminate floating body effect when using a SOI and a method for fabricating the same are provided. A floating body of an access transistor of the SRAM is connected to a source region of a driver transistor, for example, through a body extension region extending from an active region. A silicide layer may be formed or a ground line contact may be over-etched to form a conductive contact plug that may provide a current path between the body exterior regions and the source region of the driver transistor.Type: GrantFiled: March 13, 2003Date of Patent: September 12, 2006Assignee: Samsung Electronics Co., Ltd.Inventors: Mu-Kyoung Jung, Young-Wug Kim, Hee-Sung Kang