Including Insulator On Semiconductor, E.g. Soi (silicon On Insulator) (epo) Patents (Class 257/E27.112)
  • Patent number: 8796769
    Abstract: A method including introducing a species into a substrate including semiconductor material; and translating linearly focused electromagnetic radiation across a surface of the substrate, the electromagnetic radiation being sufficient to thermally influence the species. An apparatus including an electromagnetic radiation source; a stage having dimensions suitable for accommodating a semiconductor substrate within a chamber; an optical element disposed between the electromagnetic radiation source and the stage to focus radiation from the electromagnetic radiation source into a line having a length determined by the diameter of a substrate to be placed on the stage; and a controller coupled to the electromagnetic radiation source including machine readable program instructions that allow the controller to control the depth into which a substrate is exposed to the radiation.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: August 5, 2014
    Assignee: Applied Matierials, Inc.
    Inventors: Dean C. Jennings, Amir Al-Bayati
  • Patent number: 8796695
    Abstract: A Multi-Gate Field-Effect Transistor includes a fin-shaped structure, a gate structure, at least an epitaxial structure and a gradient cap layer. The fin-shaped structure is located on a substrate. The gate structure is disposed across a part of the fin-shaped structure and the substrate. The epitaxial structure is located on the fin-shaped structure beside the gate structure. The gradient cap layer is located on each of the epitaxial structures. The gradient cap layer is a compound semiconductor, and the concentration of one of the ingredients of the compound semiconductor has a gradient distribution decreasing from bottom to top. Moreover, the present invention also provides a Multi-Gate Field-Effect Transistor process forming said Multi-Gate Field-Effect Transistor.
    Type: Grant
    Filed: June 22, 2012
    Date of Patent: August 5, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Chin-I Liao, Chia-Lin Hsu, Ming-Yen Li, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee
  • Patent number: 8796772
    Abstract: Precision resistors for non-planar semiconductor device architectures are described. In a first example, a semiconductor structure includes first and second semiconductor fins disposed above a substrate. A resistor structure is disposed above the first semiconductor fin but not above the second semiconductor fin. A transistor structure is formed from the second semiconductor fin but not from the first semiconductor fin. In a second example, a semiconductor structure includes first and second semiconductor fins disposed above a substrate. An isolation region is disposed above the substrate, between the first and second semiconductor fins, and at a height less than the first and second semiconductor fins. A resistor structure is disposed above the isolation region but not above the first and second semiconductor fins. First and second transistor structures are formed from the first and second semiconductor fins, respectively.
    Type: Grant
    Filed: September 24, 2012
    Date of Patent: August 5, 2014
    Assignee: Intel Corporation
    Inventors: Jeng-Ya D. Yeh, Peter J. Vandervoorn, Walid M. Hafez, Chia-Hong Jan, Curtis Tsai, Joodong Park
  • Patent number: 8796768
    Abstract: In an organic light-emitting display device and a method of manufacturing the same, the display device may include: a thin-film transistor including an active layer, a gate electrode including a first electrode which includes nano-Ag on an insulating layer formed on the active layer and a second electrode on the first electrode, a source electrode, and a drain electrode; an organic light-emitting device including a pixel electrode electrically connected to the thin-film transistor and formed of the same layer as, and using the same material used to form, the first electrode, an intermediate layer including an emissive layer, and an opposite electrode covering the intermediate layer and facing the pixel electrode; and a pad electrode formed of the same layer as, and using the same material used to form, the first electrode in a pad area located outside of a light-emitting area.
    Type: Grant
    Filed: December 1, 2011
    Date of Patent: August 5, 2014
    Assignee: Samsung Display Co., Ltd.
    Inventor: Chun-Gi You
  • Patent number: 8796811
    Abstract: In a hybrid integrated module, a semiconductor die is mechanically coupled face-to-face to an integrated device in which the substrate has been removed. For example, the integrated circuit may include an optical device fabricated on a silicon-on-insulator (SOI) wafer in which the backside silicon handler has been completely removed, thereby facilitating improved device performance and highly efficient thermal tuning of the operating wavelength of the optical device. Moreover, the semiconductor die may be a VLSI chip that provides power, and serves as a mechanical handler and/or an electrical driver. The thermal tuning efficiency of the substrateless optical device may be enhanced by over 100× relative to an optical device with an intact substrate, and by 5× relative to an optical device in which the substrate has only been removed in proximity to the optical device.
    Type: Grant
    Filed: August 9, 2011
    Date of Patent: August 5, 2014
    Assignee: Oracle International Corporation
    Inventors: Ivan Shubin, Ashok V. Krishnamoorthy, John E. Cunningham
  • Patent number: 8787072
    Abstract: Memory cell structures and biasing schemes are provided. Certain embodiments pertain to a modified floating-body gate cell, which can provide improved retention times. In one embodiment, a gated diode is used to drive the gate of a second transistor structure of a cell. In another embodiment, a body-tied-source (BTS) field effect transistor is used to drive the gate of the second transistor structure of a cell.
    Type: Grant
    Filed: December 29, 2009
    Date of Patent: July 22, 2014
    Assignee: University of Florida Research Foundation, Inc.
    Inventors: Jerry G. Fossum, Zhichao Lu
  • Patent number: 8772950
    Abstract: Methods and apparatus for flip chip substrates with guard rings. An embodiment comprises a substrate core with a die attach region for attaching an integrated circuit die; at least one dielectric layer overlying a die side surface of the substrate core; and at least one guard ring formed adjacent a corner of the substrate core, the at least one guard ring comprising: a first trace overlying the dielectric layer having rectangular portions extending in two directions from the corner of the substrate core and in parallel to the edges of the substrate core; a second trace underlying the dielectric layer; and at least one via extending through the dielectric layer and coupling the first and second traces; wherein the first trace, the at least one via, and the second trace form a vertical via stack. Methods for forming the flip chip substrates with the guard rings are disclosed.
    Type: Grant
    Filed: November 7, 2012
    Date of Patent: July 8, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chita Chuang, Yao-Chun Chuang, Chen-Cheng Kuo, Chen-Shien Chen
  • Patent number: 8772897
    Abstract: A thin-film transistor includes a semiconductor pattern, a first gate electrode, a source electrode, a drain electrode and a second gate electrode. The semiconductor pattern is formed on a substrate. A first conductive layer has a pattern that includes the first gate electrode which is electrically insulated from the semiconductor pattern. A second conductive layer has a pattern that includes a source electrode electrically connected to the semiconductor pattern, a drain electrode spaced apart from the source electrode, and a second gate electrode electrically connected to the first gate electrode. The second gate electrode is electrically insulated from the semiconductor pattern, the source electrode and the drain electrode.
    Type: Grant
    Filed: March 16, 2011
    Date of Patent: July 8, 2014
    Assignee: Samsung Display Co., Ltd.
    Inventors: Ki-Won Kim, Kap-Soo Yoon, Woo-Geun Lee, Yeong-Keun Kwon, Hye-Young Ryu, Jin-Won Lee, Hyun-Jung Lee
  • Patent number: 8772766
    Abstract: An organic EL display device of active matrix type wherein insulated-gate field effect transistors formed on a single-crystal semiconductor substrate are overlaid with an organic EL layer; characterized in that the single-crystal semiconductor substrate (413 in FIG. 4) is held in a vacant space (414) which is defined by a bed plate (401) and a cover plate (405) formed of an insulating material, and a packing material (404) for bonding the bed and cover plates; and that the vacant space (414) is filled with an inert gas and a drying agent, whereby the organic EL layer is prevented from oxidizing.
    Type: Grant
    Filed: April 22, 2013
    Date of Patent: July 8, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Yasuyuki Arai
  • Patent number: 8766410
    Abstract: Integrated circuits having combined memory and logic functions are provided. In one aspect, an integrated circuit is provided. The integrated circuit comprises: a substrate comprising a silicon layer over a BOX layer, wherein a select region of the silicon layer has a thickness of between about three nanometers and about 20 nanometers; at least one eDRAM cell comprising: at least one pass transistor having a pass transistor source region, a pass transistor drain region and a pass transistor channel region formed in the select region of the silicon layer; and a capacitor electrically connected to the pass transistor.
    Type: Grant
    Filed: June 6, 2011
    Date of Patent: July 1, 2014
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Josephine Chang, Leland Chang, Brian L. Ji, Steven John Koester, Amlan Majumdar
  • Patent number: 8754478
    Abstract: An organic thin-film transistor includes: a semiconductor layer made of an organic material; a gate electrode; a source electrode and a drain electrode each at least partially provided above the semiconductor layer; and a conductive layer containing an oxide having conductivity that changes due to reduction, the conductive layer being provided in each of a first region and a second region facing the source electrode and the drain electrode provided above the semiconductor layer, respectively.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: June 17, 2014
    Assignee: Sony Corporation
    Inventor: Shinichi Ushikura
  • Patent number: 8748985
    Abstract: A method of forming a semiconductor structure, including forming a channel in a first portion of a semiconductor layer and forming a doped extension region in a second portion of the semiconductor layer abutting the channel on a first side and abutting an insulator material on a bottom side. The first portion of the semiconductor layer is thicker than the second portion of the semiconductor layer.
    Type: Grant
    Filed: January 10, 2014
    Date of Patent: June 10, 2014
    Assignee: International Business Machines Corporation
    Inventors: Michel J. Abou-Khalil, Robert J. Gauthier, Jr., Tom C. Lee, Junjun Li, Souvick Mitra, Christopher S. Putnam
  • Patent number: 8748890
    Abstract: A method of manufacturing a semiconductor wafer of the present invention includes the steps of: obtaining a composite base by forming a base surface flattening layer having a surface RMS roughness of not more than 1.0 nm on a base; obtaining a composite substrate by attaching a semiconductor crystal layer to a side of the composite base where the base surface flattening layer is located; growing at least one semiconductor layer on the semiconductor crystal layer of the composite substrate; and obtaining the semiconductor wafer including the semiconductor crystal layer and the semiconductor layer by removing the base surface flattening layer by wet etching and thereby separating the semiconductor crystal layer from the base.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: June 10, 2014
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Yuki Seki, Issei Satoh, Koji Uematsu, Yoshiyuki Yamamoto
  • Patent number: 8748294
    Abstract: There is provided an SOS substrate with reduced stress. The SOS substrate is a silicon-on-sapphire (SOS) substrate comprising a sapphire substrate and a monocrystalline silicon film on or above the sapphire substrate. The stress of the silicon film of the SOS substrate as measured by a Raman shift method is 2.5×108 Pa or less across an entire in-plane area of the SOS substrate.
    Type: Grant
    Filed: December 27, 2010
    Date of Patent: June 10, 2014
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventor: Shoji Akiyama
  • Patent number: 8742503
    Abstract: After formation of a gate stack, regions in which a source and a drain are to be formed are recessed through the top semiconductor layer and into an upper portion of a buried single crystalline rare earth oxide layer of a semiconductor-on-insulator (SOI) substrate so that a source trench and drain trench are formed. An embedded single crystalline semiconductor portion epitaxially aligned to the buried single crystalline rare earth oxide layer is formed in each of the source trench and the drain trench to form a recessed source and a recessed drain, respectively. Protrusion of the recessed source and recessed drain above the bottom surface of a gate dielectric can be minimized to reduce parasitic capacitive coupling with a gate electrode, while providing low source resistance and drain resistance through the increased thickness of the recessed source and recessed drain relative to the thickness of the top semiconductor layer.
    Type: Grant
    Filed: October 31, 2011
    Date of Patent: June 3, 2014
    Assignee: International Business Machines Corporation
    Inventors: Geng Wang, Kangguo Cheng, Joseph Ervin, Chengwen Pei, Ravi M. Todi
  • Patent number: 8716810
    Abstract: A memory cell has N?6 transistors, in which two are access transistors, at least one pair [say (N?2)/2] are pull-up transistors, and at least another pair [say (N?2)/2] are pull-down transistors. The pull-up and pull-down transistors are all coupled between the two access transistors. Each of the access transistors and the pull-up transistors are the same type, p-type or n-type. Each of the pull-down transistors is the other type, p-type or n-type. The access transistors are floating body devices. The pull-down transistors are non-floating body devices. The pull-up transistors may be floating or non-floating body devices. Various specific implementations and methods of making the memory cell are also detailed.
    Type: Grant
    Filed: December 14, 2012
    Date of Patent: May 6, 2014
    Assignee: International Business Machines Corporation
    Inventors: Josephine B. Chang, Leland Chang, Steven J. Koester, Jeffrey W. Sleight
  • Patent number: 8709890
    Abstract: An ETSOI transistor and a combination of capacitors, junction diodes, bank end contacts and resistors are respectively formed in a transistor and capacitor region thereof by etching through an ETSOI and BOX layers in a replacement gate HK/MG flow. The capacitor and other devices formation are compatible with an ETSOI replacement gate CMOS flow. A low resistance capacitor electrode makes it possible to obtain a high quality capacitor, and devices. The lack of topography during dummy gate patterning are achieved by lithography in combination accompanied with appropriate etch.
    Type: Grant
    Filed: December 12, 2011
    Date of Patent: April 29, 2014
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Thomas N. Adam, Ali Khakifirooz, Alexander Reznicek
  • Publication number: 20140103436
    Abstract: A structure is provided in which the back gate regions are physically separated from one another as opposed to using reversed biased pn junction diodes. In the present disclosure, the back gate regions can be formed first through a buried dielectric material of an extremely thin semiconductor-on-insulator (ETSOI) substrate. After dopant activation, standard device fabrication processes can be performed. A semiconductor base layer portion of the ETSOI substrate can then be removed from the original ETSOI to expose a surface of the back gates.
    Type: Application
    Filed: October 15, 2012
    Publication date: April 17, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Stephen W. Bedell, Bahman Hekmatshoartabari, Ali Khakifirooz, Ghavam G. Shahidi, Davood Shahrjerdi
  • Patent number: 8686516
    Abstract: Improved silicide formation and associated devices are disclosed. An exemplary semiconductor device includes a semiconductor substrate, a fin structure disposed over the semiconductor substrate and having spaced source and drain regions extending outwardly from a channel region, and a gate structure disposed on a portion of the fin structure, the gate structure engaging the fin structure adjacent to the channel region. The device also includes a first silicide layer disposed on the fin structure, the first silicide layer extending outwardly from the gate structure along a top portion of the source region and a second silicide layer disposed on the fin structure, the second silicide layer extending outwardly from the gate structure along a top portion of the drain region. Further, the device includes a source contact conductively coupled to the first silicide layer and a drain contact conductively coupled to the second silicide layer.
    Type: Grant
    Filed: June 17, 2013
    Date of Patent: April 1, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Ming Chen, Chih-Hao Chang, Chih-Hao Yu
  • Patent number: 8686528
    Abstract: A semiconductor device of the present invention includes: a lower electrode (110); a contact layer (130) including a first contact layer (132), a second contact layer (134) and a third contact layer (136) overlapping with a semiconductor layer (120); and an upper electrode (140) including a first upper electrode (142), a second upper electrode (144) and a third upper electrode (146). The second contact layer (134) includes a first region (134a), and a second region (134b) separate from the first region (134a), and the second upper electrode (144) is directly in contact with the semiconductor layer (120) in a region between the first region (134a) and the second region (134b) of the second contact layer (134).
    Type: Grant
    Filed: January 29, 2010
    Date of Patent: April 1, 2014
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Yudai Takanishi, Masao Moriguchi
  • Patent number: 8686506
    Abstract: A CMOS chip comprising a high performance device region and a high density device region includes a plurality of high performance devices comprising n-type field effect transistors (NFETs) and p-type field effect transistors (PFETs) in the high performance device region, wherein the high performance devices have a high performance pitch; and a plurality of high density devices comprising NFETs and PFETs in the high density device region, wherein the high density devices have a high density pitch, and wherein the high performance pitch is about 2 to 3 times the high density pitch; wherein the high performance device region comprises doped source and drain regions, NFET gate regions having an elevated stress induced using stress memorization technique (SMT), gate silicide and source/drain silicide regions, and a dual stressed liner, and wherein the high density device region comprises doped source and drain regions, gate silicide regions, and a neutral stressed liner.
    Type: Grant
    Filed: August 10, 2012
    Date of Patent: April 1, 2014
    Assignee: International Business Machines Corporation
    Inventors: Leland Chang, Isaac Lauer, Jeffrey Sleight
  • Patent number: 8685837
    Abstract: After depressed portions (4) have been formed in advance in that surface of a Si substrate (1) on which Si single films (8) are to be formed, that surface of the Si substrate (1) on which the Si single films are to be formed and an intermediate substrate (5) are bonded together, and elements are separated from each other by grinding the Si substrate (1) from the bottom wall side of the depressed portions (4).
    Type: Grant
    Filed: January 17, 2011
    Date of Patent: April 1, 2014
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Masahiro Mitani
  • Publication number: 20140077296
    Abstract: A structure and method for fabricating finFETs of varying effective device widths is disclosed. Groups of fins are shortened by a predetermined amount to achieve an effective device width that is equivalent to a real (non-integer) number of full-sized fins. The bottom of each group of fins is coplanar, while the tops of the fins from the different groups of fins may be at different levels.
    Type: Application
    Filed: September 20, 2012
    Publication date: March 20, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Tenko Yamashita, Kangguo Cheng, Balasubramanian S. Haran, Shom Ponoth, Theodorus Eduardus Standaert
  • Publication number: 20140070294
    Abstract: A finFET trench circuit is disclosed. FinFETs are integrated with trench capacitors by employing a trench top oxide over a portion of the trench conductor. A passing gate is then disposed over the trench top oxide to form a larger circuit, such as a DRAM array. The trench top oxide is formed by utilizing different growth rates between polysilicon and single crystal silicon.
    Type: Application
    Filed: September 13, 2012
    Publication date: March 13, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Jonathan E. Faltermeier, Veeraraghavan S. Basker, Kangguo Cheng, Theodorus Eduardus Standaert
  • Publication number: 20140061796
    Abstract: Techniques are provided for gate work function engineering in FIN FET devices using a work function setting material an amount of which is provided proportional to fin pitch. In one aspect, a FIN FET device is provided. The FIN FET device includes a SOI wafer having an oxide layer and a SOI layer over a BOX, and a plurality of fins patterned in the oxide layer and the SOI layer; an interfacial oxide on the fins; and at least one gate stack on the interfacial oxide, the gate stack having (i) a conformal gate dielectric layer present, (ii) a conformal gate metal layer, and (iii) a conformal work function setting material layer. A volume of the conformal gate metal layer and a volume of the conformal work function setting material layer present in the gate stack is proportional to a pitch of the fins.
    Type: Application
    Filed: September 12, 2012
    Publication date: March 6, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Josephine B. Chang, Isaac Lauer, Chung-Hsun Lin, Jeffrey W. Sleight
  • Publication number: 20140061801
    Abstract: The present disclosure describes a layout for stress optimization. The layout includes a substrate, at least two fin field effect transistors (FinFET) cells formed in the substrate, a FinFET fin designed to cross the two FinFET cells, a plurality of gates formed on the substrate, and an isolation unit formed between the first FinFET cell and the second FinFET cell. The two FinFET cells include a first FinFET cell and a second FinFET cell. The FinFET fin includes a positive charge FinFET (Fin PFET) fin and a negative charge FinFET (Fin NFET) fin. The isolation unit isolates the first FinFET cell from the second FinFET cell without breaking the FinFET fin.
    Type: Application
    Filed: August 31, 2012
    Publication date: March 6, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Gerben Doornbos, Mark van Dal
  • Publication number: 20140061793
    Abstract: A dielectric mandrel structure is formed on a single crystalline semiconductor layer. An amorphous semiconductor material layer is deposited on the physically exposed surfaces of the single crystalline semiconductor layer and surfaces of the mandrel structure. Optionally, the amorphous semiconductor material layer can be implanted with at least one different semiconductor material. Solid phase epitaxy is performed on the amorphous semiconductor material layer employing the single crystalline semiconductor layer as a seed layer, thereby forming an epitaxial semiconductor material layer with uniform thickness. Remaining portions of the epitaxial semiconductor material layer are single crystalline semiconductor fins and thickness of these fins are sublithographic. After removal of the dielectric mandrel structure, the single crystalline semiconductor fins can be employed to form a semiconductor device.
    Type: Application
    Filed: August 29, 2012
    Publication date: March 6, 2014
    Applicant: International Business Machines Corporation
    Inventors: Chengwen Pei, Kangguo Cheng, Joseph Ervin, Juntao Li, Ravi M. Todi, Geng Wang
  • Publication number: 20140054698
    Abstract: An electronic device may include a substrate, a buried oxide (BOX) layer overlying the substrate, at least one semiconductor device overlying the BOX layer, and at least one STI region in the substrate and adjacent the at least one semiconductor device. The at least one STI region defines a sidewall surface with the substrate and may include a nitride layer lining a bottom portion of the sidewall surface, an oxide layer lining a top portion of the sidewall surface above the bottom portion, and an insulating material within the nitride and oxide layers.
    Type: Application
    Filed: August 21, 2012
    Publication date: February 27, 2014
    Applicant: STMicroelectronics, Inc.
    Inventors: Qing Liu, Nicolas Loubet, Prasanna Khare
  • Publication number: 20140054706
    Abstract: A multi-fin FINFET device may include a substrate and a plurality of semiconductor fins extending upwardly from the substrate and being spaced apart along the substrate. Each semiconductor fin may have opposing first and second ends and a medial portion therebetween, and outermost fins of the plurality of semiconductor fins may comprise an epitaxial growth barrier on outside surfaces thereof. The FINFET may further include at least one gate overlying the medial portions of the semiconductor fins, a plurality of raised epitaxial semiconductor source regions between the semiconductor fins adjacent the first ends thereof, and a plurality of raised epitaxial semiconductor drain regions between the semiconductor fins adjacent the second ends thereof.
    Type: Application
    Filed: August 21, 2012
    Publication date: February 27, 2014
    Applicant: STMicroelectronics, Inc.
    Inventors: QING LIU, PRASANNA KHARE, NICOLAS LOUBET
  • Publication number: 20140054699
    Abstract: An electronic device may include a substrate, a buried oxide (BOX) layer overlying the substrate, at least one semiconductor device overlying the BOX layer, and at least one shallow trench isolation (STI) region in the substrate and adjacent the at least one semiconductor device. The at least one STI region defines a sidewall surface with the substrate and may include an oxide layer lining a bottom portion of the sidewall surface, a nitride layer lining a top portion of the sidewall surface above the bottom portion, and an insulating material within the nitride and oxide layers.
    Type: Application
    Filed: August 21, 2012
    Publication date: February 27, 2014
    Applicants: STMicroelectronics, Inc., COMMISSARIATE A ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: QING LIU, PRASANNA KHARE, NICOLAS LOUBET, SHOM PONOTH, MAUD VINET, BRUCE DORIS
  • Publication number: 20140054700
    Abstract: Techniques for forming a smooth silicide without the use of a cap layer are provided. In one aspect, a FET device is provided. The FET device includes a SOI wafer having a SOI layer over a BOX and at least one active area formed in the wafer; a gate stack over a portion of the at least one active area which serves as a channel of the device; source and drain regions of the device adjacent to the gate stack, wherein the source and drain regions of the device include a semiconductor material selected from: silicon and silicon germanium; and silicide contacts to the source and drain regions of the device, wherein an interface is present between the silicide contacts and the semiconductor material, and wherein the interface has an interface roughness of less than about 5 nanometers.
    Type: Application
    Filed: September 12, 2012
    Publication date: February 27, 2014
    Applicant: International Business Machines Corporation
    Inventors: Joseph S. Newbury, Kenneth Parker Rodbell, Zhen Zhang, Yu Zhu
  • Publication number: 20140048881
    Abstract: A semiconductor structure including a body-contacted finFET device and methods form manufacturing the same. The method may include forming one or more semiconductor fins on a SOI substrate, forming a semiconductive body contact region connected to the bottom of the fin(s) in the buried insulator region, forming a sacrificial gate structure over the body region of the fin(s), forming a source region on one end of the fin(s), forming a drain region on the opposite end of the fin(s), replacing the sacrificial gate structure with a metal gate, and forming electrical contacts to the source, drain, metal gate, and body contact region. The method may further include forming a body contact fin contemporaneously with the finFET fins that is in contact with the body contact region, through which electrical contact to the body contact region is made.
    Type: Application
    Filed: August 16, 2012
    Publication date: February 20, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Narasimhulu Kanike, Deleep R. Nair
  • Patent number: 8653596
    Abstract: An integrated circuit includes an SOI substrate with a unitary N+ layer below the BOX, a P region in the N+ layer, an eDRAM with an N+ plate, and logic/SRAM devices above the P region. The P region functions as a back gate of the logic/SRAM devices. An optional intrinsic (undoped) layer can be formed between the P back gate layer and the N+ layer to reduce the junction field and lower the junction leakage between the P back gate and the N+ layer. In another embodiment an N or N+ back gate can be formed in the P region. The N+ back gate functions as a second back gate of the logic/SRAM devices. The N+ plate of the SOI eDRAM, the P back gate, and the N+ back gate can be electrically biased at the same or different voltage potentials. Methods to fabricate the integrated circuits are also disclosed.
    Type: Grant
    Filed: January 6, 2012
    Date of Patent: February 18, 2014
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Bruce B. Doris, Terence B. Hook, Ali Khakifirooz, Pranita Kulkarni
  • Patent number: 8648330
    Abstract: A method for forming a nanowire field effect transistor (FET) device includes forming a nanowire over a substrate, forming a liner material around a portion of the nanowire, forming a capping layer on the liner material, forming a first spacer adjacent to sidewalls of the capping layer and around portions of the nanowire, forming a hardmask layer on the capping layer and the first spacer, removing an exposed portion of the nanowire to form a first cavity partially defined by the gate material, epitaxially growing a semiconductor material on an exposed cross section of the nanowire in the first cavity, removing the hardmask layer and the capping layer, forming a second capping layer around the semiconductor material epitaxially grown in the first cavity to define a channel region, and forming a source region and a drain region contacting the channel region.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: February 11, 2014
    Assignee: International Business Machines Corporation
    Inventors: Sarunya Bangsaruntip, Guy Cohen, Amlan Majumdar, Jeffrey W. Sleight
  • Publication number: 20140035038
    Abstract: The specification and drawings present a new method, ASIC and computer/software related product (e.g., a computer readable memory) are presented for realizing conformal doping in embedded deep trench applications in the ASIC. A common SOI substrate with intrinsic or low dopant concentration is used for manufacturing such ASICs comprising a logic area having MOSFETs utilizing, for example, ultra thin body and box technology and an eDRAM area having deep trench capacitors with the conformal doping.
    Type: Application
    Filed: August 9, 2012
    Publication date: February 6, 2014
    Applicant: International Business Machines Corporation
    Inventors: Veeraraghavan S. Basker, Hemanth Jagannathan, Sivananda Kanakasabapathy, Babar A. Khan
  • Patent number: 8643110
    Abstract: A silicon-on-insulator device has a localized biasing structure formed in the insulator layer of the SOI. The localized biasing structure includes a patterned conductor that provides a biasing signal to distinct regions of the silicon layer of the SOI. The conductor is recessed into the insulator layer to provide a substantially planar interface with the silicon layer. The conductor is connected to a bias voltage source. In an embodiment, a plurality of conductor is provided that respectively connected to a plurality of voltage sources. Thus, different regions of the silicon layer are biased by different bias signals.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: February 4, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Fernando Gonzalez, John K. Zahurak
  • Patent number: 8643106
    Abstract: A transistor capable of adjusting a threshold value is obtained by adjusting an impurity concentration of a silicon substrate supporting an SOI layer and by controlling a thickness of a buried insulating layer formed on a surface of the silicon substrate in contact with the SOI layer.
    Type: Grant
    Filed: June 21, 2007
    Date of Patent: February 4, 2014
    Assignees: National University Corporation Tohoku University, Foundation for Advancement of International Science
    Inventors: Tadahiro Ohmi, Akinobu Teramoto, Cheng Weitao
  • Patent number: 8643117
    Abstract: In an SOI-MISFET that operates with low power consumption at a high speed, an element area is reduced. While a diffusion layer region of an N-conductivity type MISFET region of the SOI type MISFET and a diffusion layer region of a P-conductivity type MISFET region of the SOI type MISFET are formed as a common region, well diffusion layers that apply substrate potentials to the N-conductivity type MISFET region and the P-conductivity type MISFET region are separated from each other by an STI layer. The diffusion layer regions that are located in the N- and P-conductivity type MISFET regions) and serve as an output portion of a CMISFET are formed as a common region and directly connected by silicified metal so that the element area is reduced.
    Type: Grant
    Filed: January 18, 2010
    Date of Patent: February 4, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Ryuta Tsuchiya, Nobuyuki Sugii, Yusuke Morita, Hiroyuki Yoshimoto, Takashi Ishigaki, Shinichiro Kimura
  • Patent number: 8643108
    Abstract: One embodiment relates to a buffered transistor device. The device includes a buffered vertical fin-shaped structure formed in a semiconductor substrate. The vertical fin-shaped structure includes at least an upper semiconductor layer, a buffer region, and at least part of a well region. The buffer region has a first doping polarity, and the well region has a second doping polarity which is opposite to the first doping polarity. At least one p-n junction that at least partially covers a horizontal cross section of the vertical fin-shaped structure is formed between the buffer and well regions. Other embodiments, aspects, and features are also disclosed.
    Type: Grant
    Filed: August 19, 2011
    Date of Patent: February 4, 2014
    Assignee: Altera Corporation
    Inventors: Irfan Rahim, Jeffrey T. Watt, Yanzhong Xu, Lin-Shih Liu
  • Patent number: 8643120
    Abstract: A method is provided for fabricating a finFET device. Multiple fin structures are formed over a BOX layer, and a gate stack is formed on the BOX layer. The fin structures each include a semiconductor layer and extend in a first direction, and the gate stack is formed over the fin structures and extends in a second direction. The gate stack includes dielectric and polysilicon layers. Gate spacers are formed on vertical sidewalls of the gate stack, and an epi layer is deposited over the fin structures. Ions are implanted to form source and drain regions, and the gate spacers are etched so that their upper surface is below an upper surface of the gate stack. After etching the gate spacers, silicidation is performed to fully silicide the polysilicon layer of the gate stack and to form silicide regions in an upper surface of the source and drain regions.
    Type: Grant
    Filed: January 6, 2012
    Date of Patent: February 4, 2014
    Assignee: International Business Machines Corporation
    Inventors: Ming Cai, Dechao Guo, Chun-chen Yeh
  • Patent number: 8633090
    Abstract: A method for forming an edge-chamfered substrate with a buried insulating layer is provided, which comprises the following steps: providing a first substrate (S10); forming an etching mask layer on surfaces of the first substrate, wherein said etching mask layer is formed on the whole surfaces of the first substrate (S11); chamfering a glazed surface of the first substrate and the etching mask layer thereon by the edge grinding (S12); by rotary etching, etching the first substrate which is exposed by the edge grinding on the etching mask layer (S13); providing a second substrate (S14); and bonding the first substrate to the second substrate with a buried insulating layer (S15). The method avoids the edge collapses and the changes of the warp degree in subsequent processes.
    Type: Grant
    Filed: July 10, 2010
    Date of Patent: January 21, 2014
    Assignees: Shanghai Simgui Technology Co., Ltd., Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
    Inventors: Xiang Wang, Xing Wei, Miao Zhang, Chenglu Lin, Xi Wang
  • Patent number: 8633542
    Abstract: An object is to provide an SOI substrate provided with a semiconductor layer which can be used practically even when a glass substrate is used as a base substrate. Another object is to provide a semiconductor device having high reliability using such an SOI substrate. An altered layer is formed on at least one surface of a glass substrate used as a base substrate of an SOI substrate to form the SOI substrate. The altered layer is formed on at least the one surface of the glass substrate by cleaning the glass substrate with solution including hydrochloric acid, sulfuric acid or nitric acid. The altered layer has a higher proportion of silicon oxide in its composition and a lower density than the glass substrate.
    Type: Grant
    Filed: September 12, 2011
    Date of Patent: January 21, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Tetsuya Kakehata, Hideto Ohnuma, Yoshiaki Yamamoto, Kenichiro Makino
  • Patent number: 8633532
    Abstract: A semiconductor memory device having a floating body capacitor. The semiconductor memory device can perform a memory operation using the floating body capacitor. The semiconductor memory device includes an SOI substrate having a staked structure in which a base substrate having a conducting surface, a buried insulating layer and a device-forming layer are staked, a transistor formed in a portion of the device-forming layer, having a gate, a source region and a drain region, and a capacitor formed by the buried insulating layer, the conducting surface of the base substrate, and accumulated holes generated in the device-forming layer when the transistor is driven.
    Type: Grant
    Filed: November 25, 2011
    Date of Patent: January 21, 2014
    Assignee: SK Hynix Inc.
    Inventor: Jong Su Kim
  • Publication number: 20140015054
    Abstract: A semiconductor device includes a substrate, a fin arranged on the substrate, a first field effect transistor (FET) comprising a first gate stack disposed over the a portion of the fin, the first gate stack including a polysilicon layer and a silicide material disposed on the polysilicon layer, and an epitaxial material disposed over portions of the fin, the epitaxial material defining source and drain regions of the first FET, and a second effect transistor (FET) comprising a second gate stack disposed over the a portion of the fin, the second gate stack including a metal gate material layer, and an epitaxial material disposed over portions of the fin, the epitaxial material defining source and drain regions of the second FET.
    Type: Application
    Filed: July 19, 2012
    Publication date: January 16, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Effendi Leobandung, Junli Wang
  • Patent number: 8629502
    Abstract: MOSFETs and methods for making MOSFETs with a recessed channel and abrupt junctions are disclosed. The method includes creating source and drain extensions while a dummy gate is in place. The source/drain extensions create a diffuse junction with the silicon substrate. The method continues by removing the dummy gate and etching a recess in the silicon substrate. The recess intersects at least a portion of the source and drain junction. Then a channel is formed by growing a silicon film to at least partially fill the recess. The channel has sharp junctions with the source and drains, while the unetched silicon remaining below the channel has diffuse junctions with the source and drain. Thus, a MOSFET with two junction regions, sharp and diffuse, in the same transistor can be created.
    Type: Grant
    Filed: September 7, 2012
    Date of Patent: January 14, 2014
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Bruce Doris, Ali Khakifirooz, Pranita Kulkarni
  • Patent number: 8629501
    Abstract: A stack pad layers including a first pad oxide layer, a pad nitride layer, and a second pad oxide layer are formed on a semiconductor-on-insulator (SOI) substrate. A deep trench extending below a top surface or a bottom surface of a buried insulator layer of the SOI substrate and enclosing at least one top semiconductor region is formed by lithographic methods and etching. A stress-generating insulator material is deposited in the deep trench and recessed below a top surface of the SOI substrate to form a stress-generating buried insulator plug in the deep trench. A silicon oxide material is deposited in the deep trench, planarized, and recessed. The stack of pad layer is removed to expose substantially coplanar top surfaces of the top semiconductor layer and of silicon oxide plugs. The stress-generating buried insulator plug encloses, and generates a stress to, the at least one top semiconductor region.
    Type: Grant
    Filed: February 10, 2012
    Date of Patent: January 14, 2014
    Assignee: International Business Machines Corporation
    Inventors: Huilong Zhu, Brian J. Greene, Dureseti Chidambarrao, Gregory G. Freeman
  • Patent number: 8629504
    Abstract: An electrical device is provided that in one embodiment includes a semiconductor-on-insulator (SOI) substrate having a semiconductor layer with a thickness of less than 10 nm. A semiconductor device having a raised source region and a raised drain region of a single crystal semiconductor material of a first conductivity is present on a first surface of the semiconductor layer. A resistor composed of the single crystal semiconductor material of the first conductivity is present on a second surface of the semiconductor layer. A method of forming the aforementioned electrical device is also provided.
    Type: Grant
    Filed: March 29, 2012
    Date of Patent: January 14, 2014
    Assignee: International Business Machines Corporation
    Inventors: Bruce B. Doris, Kangguo Cheng, Ali Khakifirooz, Ghavam G. Shahidi
  • Publication number: 20140002171
    Abstract: Embodiments include an apparatus, system, and method related to a body-contacted partially depleted silicon on insulator (PDSOI) transistor that may be used in a switch circuit. In some embodiments, the switch circuit may include a discharge transistor to provide a discharge path for a body of a switch transistor. Other embodiments may be described and claimed.
    Type: Application
    Filed: June 27, 2012
    Publication date: January 2, 2014
    Applicant: TRIQUINT SEMICONDUCTOR, INC.
    Inventor: George Nohra
  • Publication number: 20140001554
    Abstract: A method of forming a semiconductor structure includes providing an active layer and forming adjacent gate structures on the active layer. The gate structures each have sidewalls such that first spacers are formed on the sidewalls. A raised region is epitaxially grown on the active layer between the adjacent gate structures and at least one trench that extends through the raised region and through the active region is formed, whereby the at least one trench separates the raised region into a first raised region corresponding to a first transistor and a second raised region corresponding to a second transistor. The first raised region and second raised region are electrically isolated by the at least one trench.
    Type: Application
    Filed: June 27, 2012
    Publication date: January 2, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Thomas N. Adam, Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Alexander Reznicek
  • Patent number: 8618554
    Abstract: The present disclosure, which is directed to ultra-thin-body-and-BOX and Double BOX fully depleted SOI devices having an epitaxial diffusion-retarding semiconductor layer that slows dopant diffusion into the SOI channel, and a method of making these devices. Dopant concentrations in the SOI channels of the devices of the present disclosure having an epitaxial diffusion-retarding semiconductor layer between the substrate and SOI channel are approximately 50 times less than the dopant concentrations measured in SOI channels of devices without the epitaxial diffusion-retarding semiconductor layer.
    Type: Grant
    Filed: November 8, 2010
    Date of Patent: December 31, 2013
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Pranita Kulkarni, Ghavam G. Shahidi