Color Imager (epo) Patents (Class 257/E27.134)
E Subclasses
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Patent number: 7977677Abstract: In a thin-film transistor (TFT) substrate, a gate insulating layer is disposed on a gate electrode electrically connected to a gate line. A semiconductor layer is disposed on the gate insulating layer. A source electrode is electrically connected to a data line that intersects the gate line. A drain electrode faces the source electrode and defines a channel area of a semiconductor layer. An organic layer is disposed on the data line and has a first opening exposing the channel area. An inorganic insulating layer is disposed on the organic layer. A pixel electrode is disposed on the inorganic insulating layer and electrically connected to the drain electrode. The inorganic insulating layer covers the first opening, and thickness of the inorganic insulating layer is substantially uniform.Type: GrantFiled: August 16, 2007Date of Patent: July 12, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Hye-Young Ryu, Jang-Soo Kim, Su-Hyoung Kang
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Patent number: 7973378Abstract: Provided is a solid-state imaging device that realizes sensitivity improvement while maintaining flare prevention effect even when miniaturization of cell is advanced. The solid-state imaging device according to the present invention includes: light receiving units formed on a semiconductor substrate; an antireflection film arranged above the semiconductor substrate, except above the light receiving units; and microlenses arranged above the light receiving units, in which the antireflection film is formed at a position equal to or higher than a position of the microlenses.Type: GrantFiled: July 8, 2008Date of Patent: July 5, 2011Assignee: Panasonic CorporationInventors: Hiroshi Sakoh, Yoshiaki Nishi, Yasuo Takeuchi
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Publication number: 20110155891Abstract: A semiconductor device includes: a photoelectric conversion layer; a continuous or discontinuous cylindrical metal microstructure embedded in the photoelectric conversion layer; and a dielectric film with which an inner side surface and an outer side surface of the metal microstructure are coated.Type: ApplicationFiled: December 14, 2010Publication date: June 30, 2011Applicant: SONY CORPORATIONInventor: Keiichi Yamamoto
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Patent number: 7968366Abstract: An image sensor and method of manufacturing the same are provided. According to an embodiment, the image sensor comprises: a circuit including an interconnection on a substrate; a lower electrode on the interconnection; a separated intrinsic layer on the lower electrode; a second conductive type conduction layer on the separated intrinsic layer; and an upper electrode on the second conductive type conduction layer. The separated intrinsic layer can have an inwardly sloping sidewall to focus light incident the photodiode for the unit pixel.Type: GrantFiled: March 17, 2008Date of Patent: June 28, 2011Assignee: Dongbu Hitek Co., Ltd.Inventor: Ji Ho Hong
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Publication number: 20110140225Abstract: In a first interlevel insulating film, a first region which is made of the first interlevel insulating film and in which first wiring films are not provided is formed to be located above a first light receiving part of the plurality of light receiving parts, and a second region which is made of the first interlevel insulating film and in which the first wiring films are not provided is formed to be located above a second light receiving part of the plurality of light receiving parts which is adjacent to the first light receiving part. A space between ones of the first wiring films with the first region interposed therebetween is larger than a space between ones of the first wiring films with the second region interposed therebetween.Type: ApplicationFiled: November 19, 2010Publication date: June 16, 2011Inventor: Masafumi TSUTSUI
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Patent number: 7956392Abstract: An imaging element comprises: an optical element substrate part in which the imaging element generates a signal charge by photo-electrically converting an incident light applied from one surface side of the optical element substrate part to read the signal charge from the other surface side of the optical element substrate part and picks up an image; and a CMOS circuit substrate part connected to the other surface side of the optical element substrate part so as to transfer the signal charge generated in the photoelectric conversion layer, wherein the optical element substrate part comprises: a photoelectric conversion layer to generate the signal charge by photo-electrically converting the incident light; a charge storage part that stores the signal charge; and a reading transistor that reads the signal charge stored in the charge storage part.Type: GrantFiled: April 16, 2008Date of Patent: June 7, 2011Assignee: Fujifilm CorporationInventor: Shinji Uya
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Publication number: 20110127410Abstract: An optical sensor that is a transistor which includes a gate electrode including a semiconductor material where the carrier concentration is 1.0×1014/cm3 to 1.0×1017/cm3, an active layer including a semiconductor layer to form a channel by carriers of the same type as the gate electrode, a source electrode, a drain electrode, and a gate insulating film, wherein intensity of irradiated light is detected by a change in a value of current flowing between the source electrode and the drain electrode when the light is irradiated onto a depletion layer formed in the gate electrode; an optical sensor array, an optical sensor driving method, and an optical sensor array driving method are provided.Type: ApplicationFiled: November 23, 2010Publication date: June 2, 2011Inventors: Atsushi Tanaka, Takeshi Hama
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Patent number: 7952158Abstract: An elevated photosensor for image sensors and methods of forming the photosensor. The photosensor may have light sensors having indentation features including, but not limited to, v-shaped, u-shaped, or other shaped features. Light sensors having such an indentation feature can redirect incident light that is not absorbed by one portion of the photosensor to another portion of the photosensor for additional absorption. In addition, the elevated photosensors reduce the size of the pixel cells while reducing leakage, image lag, and barrier problems.Type: GrantFiled: January 24, 2007Date of Patent: May 31, 2011Assignee: Micron Technology, Inc.Inventor: Salman Akram
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Patent number: 7919351Abstract: A CMOS image sensor and a method for fabricating the same for preventing contamination and peeling of an array of micro lenses. The CMOS image sensor includes a plurality of photodiodes formed on and/or over a substrate, an insulating film formed on and/or over an entire surface of the substrate including the photodiodes, color filter layers formed on and/or over the insulating film, a first oxide film formed on and/or over the color filter layers, an ion-rich oxide film formed by injecting silicon ions into the first oxide film, a second oxide film formed on and/or over the ion-rich oxide film, and a micro lens pattern formed corresponding to the photodiodes by patterning the second oxide film.Type: GrantFiled: September 16, 2008Date of Patent: April 5, 2011Assignee: Dongbu HiTek Co., Ltd.Inventor: Jong-Taek Hwang
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Patent number: 7919798Abstract: An image sensor and fabricating method thereof for preventing cross-talk between neighboring pixels by providing at least three light-shield walls combining to extend vertically above a lateral periphery of a photodiode for deflecting light from a microlens array towards the photodiode.Type: GrantFiled: September 5, 2008Date of Patent: April 5, 2011Assignee: Dongbu HiTek Co., Ltd.Inventor: Sun-Chan Lee
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Publication number: 20110057279Abstract: An anti-reflective image sensor and method of fabrication are provided, the sensor including a substrate; first color sensing pixels disposed in the substrate; second color sensing pixels disposed in the substrate; third color sensing pixels disposed in the substrate; a first layer disposed directly on the first, second and third color sensing pixels; a second layer disposed directly on the first layer overlying the first, second and third color sensing pixels; and a third layer disposed directly on portions of the second layer overlying at least one of the first or second color sensing pixels, wherein the first layer has a first refractive index, the second layer has a second refractive index greater than the first refractive index, and the third layer has a third refractive index greater than the second refractive index.Type: ApplicationFiled: July 14, 2010Publication date: March 10, 2011Inventors: Jeong-Ho Lee, Sang-Il Jung
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Publication number: 20110049333Abstract: According to one embodiment, a solid-state imaging device with a plurality of light-receiving layers for acquiring different color signals stacked one on top of another in the optical direction. Each of the light-receiving layers includes a photoelectric conversion part that receives light entering the back side of the layer and generates signal charges and a read transistor that is provided on the front side of the layer and reads the signal charges generated at the photoelectric conversion part. A semiconductor layer is stacked via an insulating film on the front side of the top layer of the plurality of light-receiving layers. At the semiconductor layer, there is provided a signal scanning circuit which processes a signal read by each of the read transistors and outputs a different color signal from each of the light-receiving layers to the outside.Type: ApplicationFiled: August 23, 2010Publication date: March 3, 2011Inventor: Hirofumi YAMASHITA
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Patent number: 7888266Abstract: A complementary metal-oxide-semiconductor (CMOS) optical sensor structure includes a pixel containing a charge collection well of a same semiconductor material as a semiconductor layer in a semiconductor substrate and at least another pixel containing another charge collection well of a different semiconductor material than the material of the semiconductor layer. The charge collections wells have different band gaps, and consequently, generate charge carriers in response to light having different wavelengths. The CMOS sensor structure thus includes at least two pixels responding to light of different wavelengths, enabling wavelength-sensitive, or color-sensitive, capture of an optical data.Type: GrantFiled: June 26, 2008Date of Patent: February 15, 2011Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Toshiharu Furukawa, Robert Robison, William R. Tonti
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Patent number: 7884435Abstract: A pattern mask for forming a microlens includes mask pattern parts alternately arranged and corresponding to pixel regions in a matrix, wherein neighboring corners of the mask pattern parts overlap with each other.Type: GrantFiled: November 26, 2007Date of Patent: February 8, 2011Assignee: Dongbu HiTek Co., Ltd.Inventor: Sung Ho Jun
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Patent number: 7880257Abstract: An image sensor includes a semiconductor layer, and first and second photoelectric converting units including first and second impurity regions in the semiconductor layer that are spaced apart from each other and that are at about an equal depth in the semiconductor layer, each of the impurity regions including an upper region and a lower region. A width of the lower region of the first impurity region may be larger than a width of the lower region of the second impurity region, and widths of upper regions of the first and second impurity regions are equal.Type: GrantFiled: February 3, 2010Date of Patent: February 1, 2011Assignee: Samsung Electronics Co., Ltd.Inventor: Yun-ki Lee
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Publication number: 20110006350Abstract: An integrated structure of MEMS device and CIS device and a fabricating method thereof includes providing a substrate having a CIS region and a MEMS region defined therein with a plurality of CIS devices positioned in the CIS region; performing a multilevel interconnect process to form a multilevel interconnect structure in the CIS region and the MEMS region and a micro-machined mesh metal in the MEMS region on a front side of the substrate; performing a first etching process to form a chamber in MEMS region in the front side of the substrate; forming a first mask pattern and a second mask pattern respectively in the CIS region and the MEMS region on a back side of the substrate; and performing a second etching process to form a plurality of vent holes connecting to the chamber on the back side of the substrate through the second mask pattern.Type: ApplicationFiled: September 23, 2010Publication date: January 13, 2011Inventor: Hui-Shen Shih
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Patent number: 7868366Abstract: An image sensor is disclosed including a second semiconductor substrate including a metal interconnection and a second interlayer dielectric; a second via penetrating the second interlayer dielectric so that the second via is connected to the metal interconnection; a first semiconductor substrate on the second interlayer dielectric, the first semiconductor substrate having a unit pixel; a pre-metal dielectric on the first semiconductor substrate; a first via penetrating the pre-metal dielectric and the first semiconductor substrate, the first via being electrically connected to the second via; a first interlayer dielectric on the pre-metal dielectric including the first via; a metal interconnection on the first interlayer dielectric and connected to the first via and the unit pixel; a conductive barrier layer on the metal interconnection; and a color filter and a microlens on the first interlayer dielectric in each unit pixel.Type: GrantFiled: March 14, 2008Date of Patent: January 11, 2011Assignee: Dongbu Hitek Co., Ltd.Inventor: Min Hyung Lee
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Patent number: 7863633Abstract: The solid-state imaging device of the present invention includes: photodiodes which are two-dimensionally arranged; light condensers each of which condenses light and is provided in a position to correspond to two of the photodiodes which are adjacent to each other; and separating units each of which separates the light entering through the light condensers into first light having a wavelength within a predetermined range, and second light having a wavelength out of the predetermined range, and is provided in a position to correspond to one of the light condensers.Type: GrantFiled: April 6, 2007Date of Patent: January 4, 2011Assignee: PANASONIC CorporationInventor: Yoshiaki Kato
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Patent number: 7859072Abstract: An image sensor and a fabricating method thereof are provided. The image sensor includes a plurality of pixels disposed in an active region and dummy pixels disposed in a peripheral region. An interlayer dielectric layer has a first thickness in the active region and a second thickness thinner than the first thickness in the peripheral region. Color filters are disposed in the active region, and a light blocking member is disposed in the peripheral region. There is substantially no step difference between the color filters and the light blocking member.Type: GrantFiled: August 15, 2007Date of Patent: December 28, 2010Assignee: Dongbu Hitek Co., Ltd.Inventor: Chang Hun Han
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Patent number: 7851826Abstract: A method manufactures semiconductor chips each comprising a component implanted in the semiconductor. The method includes collectively implanting components onto a front face of a semiconductor wafer and fixing the a plate of a transparent material onto the front face of the wafer. Fixing the plate of transparent material is preceded by a step of depositing, on the front face of the wafer, at least one layer of polymer material forming an optical filter. Application is particularly to the manufacturing of imagers.Type: GrantFiled: July 17, 2007Date of Patent: December 14, 2010Assignee: STMicroelectronics Rousset SASInventor: Caroline Hernandez
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Publication number: 20100276736Abstract: Methods and apparatus for producing a CMOS image sensor result in a plurality of photo sensitive layers, each layer including: a glass or glass ceramic substrate having first and second spaced-apart surfaces; a semiconductor layer disposed on the first surface of the glass or glass ceramic substrate; and a plurality of pixel structures formed in the semiconductor layer, each pixel structure including a plurality of semiconductor islands, at least one island operating as a color sensitive photo-detector sensitive to a respective range of light wavelengths, wherein the plurality of photo sensitive layers are stacked one on the other, such that incident light enters the CMOS image sensor through the first spaced-apart surface of the glass or glass ceramic substrate of one of the plurality of photo sensitive layers, and subsequently passes into further photo sensitive layers if one or more wavelengths of the incident light are sufficiently long.Type: ApplicationFiled: April 30, 2010Publication date: November 4, 2010Inventors: Mark Frederick Bocko, Zeljko Ignjatovic, Carlo Anthony Kosik Williams, Donnell Thaddeus Walton, ChuanChe Wang, James Matthew Zavislan
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Patent number: 7816713Abstract: Provided is a CMOS image sensor that uses thiophene derivatives. The CMOS image sensor includes first through third photoelectric conversion units vertically and sequentially stacked on a semiconductor substrate. The first photoelectric conversion unit detects blue light and comprises a first electrode, a second electrode, and a p-type thiophene derivative layer between the first electrode and the second electrode.Type: GrantFiled: March 24, 2008Date of Patent: October 19, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Kyu-sik Kim, Sang-cheol Park, Young-jun Park, O-hyun Kwon, Jung-gyu Nam, Hye-suk Jo
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Patent number: 7816169Abstract: Disclosed is an ordered microelectronic fabrication sequence in which color filters are formed by conformal deposition directly onto a photodetector array of a CCD, CID, or CMOS imaging device to create a concave-up pixel surface, and, overlayed with a high transmittance planarizing film of specified index of refraction and physical properties which optimize light collection to the photodiode without additional conventional microlenses. The optically flat top surface serves to encapsulate and protect the imager from chemical and thermal cleaning treatment damage, minimizes topographical underlayer variations which would aberrate or cause reflection losses of images formed on non-planar surfaces, and, obviates residual particle inclusions induced during dicing and packaging. A CCD imager is formed by photolithographically patterning a planar-array of photodiodes on a semiconductor substrate. The photodiode array is provided with metal photoshields, passivated, and, color filters are formed thereon.Type: GrantFiled: December 31, 2008Date of Patent: October 19, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yang-Tung Fan, Chiou-Shian Peng, Cheng-Yu Chu, Shih-Jane Lin, Yen-Ming Chen, Fu-Jier Fan, Kuo-Wei Li
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Patent number: 7803652Abstract: Embodiments relate to a semiconductor device for an image sensor method of fabricating a semiconductor device for an image sensor having a micro lens. According to embodiments, the method may include forming a lower insulating film having cavities on a substrate, forming an upper insulating film having cavities on the lower insulating film, forming a protective insulating film having metal films on the upper insulating film, forming a number of color filters having a specified pattern on the protective insulating film, forming a planarization layer having a specified curvature on the color filters to bury the color filters in the planarization layer, and forming a number of micro lenses on the planarization layer at respective positions corresponding to the color filters.Type: GrantFiled: December 21, 2007Date of Patent: September 28, 2010Assignee: Dongbu HiTek Co., Ltd.Inventor: Dong-Bin Park
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Patent number: 7800148Abstract: A CMOS active pixel sensor includes a silicon-on-insulator substrate having a silicon substrate with an insulator layer formed thereon and a top silicon layer formed on the insulator layer. A stacked pixel sensor cell includes a bottom photodiode fabricated on the silicon substrate, for sensing light of a longest wavelength; a middle photodiode fabricated on the silicon substrate, for sensing light of a medium wavelength, which is stacked above the bottom photodiode; and a top photodiode fabricated on the top silicon layer, for sensing light of a shorter wavelength, which is stacked above the middle and bottom photodiodes. Pixel transistor sets are fabricated on the top silicon layer and are associated with each pixel sensor cell by electrical connections which extend between each of the photodiodes and respective pixel transistor(s). CMOS control circuitry is fabricated adjacent to an array of active pixel sensor cells and electrically connected thereto.Type: GrantFiled: July 23, 2008Date of Patent: September 21, 2010Assignee: Sharp Laboratories of America, Inc.Inventors: Jong-Jan Lee, Sheng Teng Hsu, Douglas James Tweet, Jer-Shen Maa
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Patent number: 7768088Abstract: In a solid-state imaging device including an on-chip microlens and a light-receiving part to receive incident light condensed by the on-chip microlens, an optical waveguide extending from an undersurface part of the microlens to the light-receiving part and for guiding the incident light condensed by the microlens to the light-receiving part is formed to be integrated with the microlens. By this, since the incident light condensed by the microlens is incident on the light-receiving part with little loss, the sensitivity is improved.Type: GrantFiled: September 21, 2005Date of Patent: August 3, 2010Assignee: FUJIFILM CorporationInventor: Toshiaki Fukunaga
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Patent number: 7755123Abstract: Method, apparatus, and/or system providing a backside illuminated imaging device. A non-planar metallic or otherwise reflective layer is provided in an image pixel cell at the frontside of the device substrate to capture radiation passing through the device substrate. The non-planar surface is formed to be capable of reflecting substantially all such radiation back to a photosensor located in the same pixel cell.Type: GrantFiled: August 24, 2007Date of Patent: July 13, 2010Assignee: Aptina Imaging CorporationInventors: Thomas E. Dungan, Chintamani Palsule
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Patent number: 7755120Abstract: A semiconductor device is disclosed. The semiconductor device provides a substrate comprising an image sensor region and a circuit region, wherein the circuit region comprises a pad region and a connecting region. A multilayer interconnect structure is formed on the substrate, wherein the multilayer interconnect structure comprises a plurality of dielectric layers, a plurality of lower wirings at the pad region and the connecting region, and a top wiring on at least one of the lower wirings at the connecting region. A passivation layer is formed over the multilayer interconnect structure. A pad structure is formed through the passivation layer and at least one of the dielectric layers on and electrically connected to at least one of the lower wirings at the pad region.Type: GrantFiled: January 22, 2007Date of Patent: July 13, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Chin-Min Lin
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Patent number: 7745857Abstract: The object of the invention is to provide a semiconductor device that can form photodiodes that do not short circuit, without damage that causes leakage, despite formation of the opening part, and its manufacturing method. The second semiconductor layer (12, 16) of the second conductivity type is formed on the main surface of the first semiconductor layer (10, 11) of the first conductivity type. Element-separating regions (13, 14, 15, 17) formed at least on the second semiconductor layer separate the device into the regions of plural photodiodes (PD1-PD4). Conductive layer 18 is formed on the second semiconductor layer 16 in a pattern that is divided for each of the photodiodes and is connected to the second semiconductor layer 16 along the outer periphery with respect to all of the plural photodiodes. Insulation layer (19, 21) is formed on the entire surface to cover conductive layer 18.Type: GrantFiled: March 29, 2006Date of Patent: June 29, 2010Assignee: Texas Instruments IncorporatedInventors: Yohichi Okumura, Hiroyuki Tomomatsu
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Publication number: 20100140731Abstract: An image sensor includes a semiconductor layer, and first and second photoelectric converting units including first and second impurity regions in the semiconductor layer that are spaced apart from each other and that are at about an equal depth in the semiconductor layer, each of the impurity regions including an upper region and a lower region. A width of the lower region of the first impurity region may be larger than a width of the lower region of the second impurity region, and widths of upper regions of the first and second impurity regions are equal.Type: ApplicationFiled: February 3, 2010Publication date: June 10, 2010Inventor: Yun-Ki Lee
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Publication number: 20100144388Abstract: A photodetector including a photodiode formed in a semiconductor substrate and a waveguide element formed of a block of a high-index material extending above the photodiode in a thick layer of a dielectric superposed to the substrate, the thick layer being at least as a majority formed of silicon oxide and the block being formed of a polymer of the general formula R1R2R3SiOSiR1R2R3 where R1, R2, and R3 are any carbonaceous or metal substituents and where one of R1, R2, or R3 is a carbonaceous substituent having at least four carbon atoms and/or at least one oxygen atom.Type: ApplicationFiled: February 12, 2010Publication date: June 10, 2010Applicant: STMICROELECTRONICS S.A.Inventors: CYRIL FELLOUS, NICOLAS HOTELLIER, CHRISTOPHE AUMONT, FRANCOIS ROY
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Patent number: 7732746Abstract: Provided is an image sensor including an overcoating layer and at least two micro lenses formed on the overcoating layer. The image sensor is characterized in that the overcoating layer positioned below a clearance between the micro lenses is etched such that curved surfaces of the micro lenses extend to the etched overcoating layer, and a contamination in the bonding pad can be prevented.Type: GrantFiled: September 30, 2008Date of Patent: June 8, 2010Assignee: Dongbu Electronics Co., Ltd.Inventor: Joon Hwang
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Patent number: 7723763Abstract: The invention discloses the color photodetector with multi-primary is introduced to detect the incident light with specific wavelength regimes. Combining the surface plasma resonance effect with photodetector can be utilized to enhance the photo-responsivity of the demanded light wavelength and also can substitute the conventionally color filter and infrared cutter. In this invention, a novel integrated photo-detector that can be realized in commercial CMOS process for achieving low-cost consideration.Type: GrantFiled: October 30, 2007Date of Patent: May 25, 2010Assignee: National Taiwan UniversityInventors: Hsuen-Li Chen, Kuan-Sheng Lai, Wen-Yun Wang
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Patent number: 7705378Abstract: A CMOS image sensor and fabricating method thereof can enhance the quality of the image sensor by preventing unnecessary diffused reflection of light by providing an opaque filter layer next to a microlens. The CMOS image sensor includes a photodiode, an insulating interlayer, a metal line, a device protecting layer, a microlens on the device protecting layer and overlapped with the photodiode, and an opaque layer pattern on the device protecting layer next to the microlens.Type: GrantFiled: December 29, 2005Date of Patent: April 27, 2010Assignee: Dongbu Electronics Co., Ltd.Inventor: Chang Eun Lee
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Patent number: 7687837Abstract: An image sensor includes a substrate having an active pixel sensor region defined therein, a plurality of first conductivity type photodiodes formed in the active pixel sensor region and a first conductivity-type first deep well formed in the active pixel sensor region in a location which does not include the plurality of the first conductivity-type photodiodes. Moreover, the first deep well is electrically connected to a positive voltage.Type: GrantFiled: October 3, 2006Date of Patent: March 30, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Young-Hoon Park, Jae-Ho Song, Won-Je Park, Jin-Hyeong Park, Jeong-Hoon Bae, Jung-Ho Park
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Patent number: 7687305Abstract: An image sensor include an interlayer dielectric layer formed over a semiconductor substrate; a color filter array formed over the interlayer dielectric layer; a planarization layer formed over the color filter; and a microlens array having a continuous, gapless shape formed over the planarization layer and spatially corresponding to the color filter array. The microlens array is composed of a first dielectric layer and a second dielectric layer formed over the first dielectric layer.Type: GrantFiled: March 11, 2008Date of Patent: March 30, 2010Assignee: Dongbu HiTek Co., LtdInventor: Sang-Wook Ryu
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Patent number: 7682863Abstract: A Complementary Metal Oxide Semiconductor (CMOS) image sensor includes a red photodiode formed in an first epitaxial layer, an isolation layer formed with a contact region left in a partial area of the red photodiode, a green photodiode formed in a surface of the isolation layer, a contact formed in the contact region at a predetermined spatial distance from the green photodiode, a second epitaxial layer formed on the first epitaxial layer in which the green photodiode is formed, a plurality of plugs formed in the second epitaxial layer and electrically connected to the green photodiode and the contact, a device isolation film formed in a surface of the second epitaxial layer, a blue photodiode formed in a surface of the second epitaxial layer above the green photodiode, and a well region formed in the second epitaxial layer inside the plug.Type: GrantFiled: October 9, 2007Date of Patent: March 23, 2010Assignee: Dongbu HiTek Co., Ltd.Inventor: Hyuk Woo
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Patent number: 7675102Abstract: Embodiments relate to a method of manufacturing an image sensor. According to embodiments, the method may include preparing a semiconductor substrate formed with a plurality of photodiodes, forming an interlayer dielectric layer on the semiconductor substrate, forming a color filter layer on the interlayer dielectric layer, forming a planar layer on the color filter layer, and forming micro-lenses coated with fat-soluble polymer on the planar layer. Since the micro-lens is uniformly formed due to the fat-soluble polymer coated on the micro-lens, the photo-sensitivity and color reproduction of the image sensor are improved, resulting in the high-quality image sensor.Type: GrantFiled: December 27, 2006Date of Patent: March 9, 2010Assignee: Dongbu HiTek Co., Ltd.Inventor: Sang Sik Kim
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Patent number: 7675098Abstract: A complementary metal oxide semiconductor (CMOS) image sensor including a semiconductor substrate having an inclined groove with an inclined surface and a light reception surface perpendicular to the semiconductor substrate, and a device forming area adjacent the light reception surface. A reflection film selectively formed on and/or over the inclined surface, a plurality of photodiodes substantially perpendicular to the surface of the substrate; and at least one MOS transistor formed on the surface of the device forming area.Type: GrantFiled: September 4, 2007Date of Patent: March 9, 2010Assignee: Dongbu HiTek Co., Ltd.Inventor: Jeong Su Park
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Patent number: 7655545Abstract: An image sensor includes a first photodiode formed in a semiconductor substrate at a depth reachable by red light, a second photodiode disposed on or over the first photodiode in the semiconductor substrate at a depth reachable by blue light, a third photodiode disposed adjacent to the second photodiode, a plug connected to the first photodiode, transistor structures on the semiconductor substrate and electrically connected with the first, second and third diodes, an insulating layer covering the transistor structures, and microlenses on the insulating layer.Type: GrantFiled: December 20, 2007Date of Patent: February 2, 2010Assignee: Dongbu HiTek Co., Ltd.Inventor: Joon Hwang
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Patent number: 7652291Abstract: A flat panel display that can prevent a voltage drop of a driving power and, at the same time, minimizes the characteristic reduction of electronic devices located in a circuit region where various circuit devices are located includes: a substrate; an insulating film arranged on the substrate; a pixel region including at least one light emitting diode, the pixel region arranged on the insulating film and adapted to display an image; a circuit region arranged on the insulating film and including electronic devices adapted to control signals supplied to the pixel region; and a conductive film interposed between the substrate and the insulating film in a region corresponding to the pixel region and electrically connected to one electrode of the light emitting diode.Type: GrantFiled: May 24, 2006Date of Patent: January 26, 2010Assignee: Samsung Mobile Display Co., Ltd.Inventors: Jae-Bon Koo, Jae-Kyeong Jeong, Hyun-Soo Shin, Yeon-Gon Mo
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Patent number: 7646047Abstract: The solid-state imaging device includes at least a silicon layer formed with a photo sensor portion and a wiring layer formed on the front-surface side of the silicon layer. Light enters from the rear-surface side opposite to the front-surface side of the silicon layer and the thickness of the silicon layer 4 is 10 ?m or less. The photo sensor portion includes sensors configured to convert the light into signals representing an image.Type: GrantFiled: November 1, 2004Date of Patent: January 12, 2010Assignee: Sony CorporationInventors: Yasushi Maruyama, Hideshi Abe, Hiroyuki Mori
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Patent number: 7633134Abstract: A stratified photodiode for high resolution CMOS image sensors implemented with STI technology is provided. The photodiode includes a semi-conductive layer of a first conductivity type, multiple doping regions of a second conductivity type, multiple doping regions of the first conductivity type, and a pinning layer. The multiple doping regions of the second conductivity type are formed to different depths in the semi-conductive layer. The multiple doping regions of the first conductivity type are disposed between the multiple doping regions of the second conductivity type and form multiple junction capacitances without full depletion. In particular, the stratified doping arrangement allows the photodiode to have a small size, high charge storage capacity, low dark current, and low operation voltages.Type: GrantFiled: May 18, 2006Date of Patent: December 15, 2009Inventor: Jaroslav Hynecek
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Patent number: 7619267Abstract: A solid-state imaging device comprising a plurality of pixels arrayed on a plane, wherein each of the pixels includes a semiconductor substrate and a plurality of photoelectric conversion devices, the plurality of photoelectric conversion devices include at least one on-substrate photoelectric conversion device stacked in an upper portion of the semiconductor substrate and at least one in-substrate photoelectric conversion device provided within the semiconductor substrate in a lower portion of the on-substrate photoelectric conversion device, and the plurality of photoelectric conversion devices have a different photoelectric conversion sensitivity from each other.Type: GrantFiled: January 22, 2007Date of Patent: November 17, 2009Assignee: FUJIFILM CorporationInventor: Yasushi Araki
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Patent number: 7608903Abstract: An imager pixel utilizing a silicon-on-insulator substrate, a photodiode in said substrate below the buried oxide, and a dual contact to said photodiode and methods of forming said imager pixel. The photodiode has an increased fill factor due to its increased size relative to the pixel.Type: GrantFiled: April 4, 2007Date of Patent: October 27, 2009Assignee: Aptina Imaging CorporationInventor: Chandra Mouli
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Patent number: 7608906Abstract: A multi-color photo sensor having a first photodiode with a first p-type layer and a first n-type layer, the first photodiode generates charge when illuminated with photons of a first wavelength range, a second photodiode with a second p-type layer and a second n-type layer, the second photodiode generates charge when illuminated with photons of a second wavelength range, and a readout integrated circuit electrically coupled to the first n-type layer of the first photodiode via a first metal interconnect and electrically coupled to the second n-type layer of the second photodiode via a second metal interconnect, the second metal interconnect traverses through the first photodiode to contact the second n-type layer of the second photodiode, the second metal interconnect is separated from the first photodiode by a first passivating insulator.Type: GrantFiled: November 13, 2007Date of Patent: October 27, 2009Assignee: Teledyne Licensing, LLCInventor: William Tennant
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Patent number: 7595217Abstract: A CMOS image sensor may include at least one of: a semiconductor substrate over which a photodiode and transistors are formed; passivation layers formed over a semiconductor substrate; and color PRs buried in trenches formed in the passivation layers and formed to be higher than the trenches.Type: GrantFiled: December 21, 2006Date of Patent: September 29, 2009Assignee: Dongbu HiTek Co., Ltd.Inventor: Chee Hong Choi
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Patent number: 7592654Abstract: CMOS image sensor having high sensitivity and low crosstalk, particularly at far-red to infrared wavelengths, and a method for fabricating a CMOS image sensor. A CMOS image sensor has a substrate, an epitaxial layer above the substrate, and a plurality of pixels extending into the epitaxial layer for receiving light. The image sensor also includes at least one of a horizontal barrier layer between the substrate and the epitaxial layer for preventing carriers generated in the substrate from moving to the epitaxial layer, and a plurality of lateral barrier layers between adjacent ones of the plurality of pixels for preventing lateral diffusion of electrons in the epitaxial layer.Type: GrantFiled: November 15, 2007Date of Patent: September 22, 2009Assignee: Aptina Imaging CorporationInventors: Sandeep R. Bahl, Fredrick P. LaMaster, David W. Bigelow
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Patent number: RE41340Abstract: A lock in pinned photodiode photodetector includes a plurality of output ports which are sequentially enabled. Each time when the output port is enabled is considered to be a different bin of time. A specified pattern is sent, and the output bins are investigated to look for that pattern. The time when the pattern is received indicates the time of flight. A CMOS active pixel image sensor includes a plurality of pinned photodiode photodetectors that share buffer transistors. In one configuration, the charge from two or more pinned photodiodes may be binned together and applied to the gate of a shared buffer transistor.Type: GrantFiled: September 21, 2006Date of Patent: May 18, 2010Assignee: Micron Technology, Inc.Inventors: Vladimir Berezin, Alexander Krymski, Eric R. Fossum
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Patent number: RE42292Abstract: A lock in pinned photodiode photodetector includes a plurality of output ports which are sequentially enabled. Each time when the output port is enabled is considered to be a different bin of time. A specified pattern is sent, and the output bins are investigated to look for that pattern. The time when the pattern is received indicates the time of flight. A CMOS active pixel image sensor includes a plurality of pinned photodiode photodetectors that use a common output transistor. In one configuration, the charge from two or more pinned photodiodes may be binned together and applied to the gate of an output transistor.Type: GrantFiled: March 30, 2009Date of Patent: April 12, 2011Assignee: Round Rock Research, LLCInventors: Vladimir Berezin, Alexander I. Krymski, Eric R. Fossum