For Preventing Surface Leakage Due To Surface Inversion Layer (e.g., Channel Stop) (epo) Patents (Class 257/E29.016)
E Subclasses
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Patent number: 8575694Abstract: A high voltage metal-oxide-semiconductor laterally diffused device (HV LDMOS), particularly an insulated gate bipolar junction transistor (IGBT), and a method of making it are provided in this disclosure. The device includes a semiconductor substrate, a gate structure formed on the substrate, a source and a drain formed in the substrate on either side of the gate structure, a first doped well formed in the substrate, and a second doped well formed in the first well. The gate, source, second doped well, a portion of the first well, and a portion of the drain structure are surrounded by a deep trench isolation feature and an implanted oxygen layer in the silicon substrate.Type: GrantFiled: February 13, 2012Date of Patent: November 5, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ker Hsiao Huo, Chih-Chang Cheng, Ru-Yi Su, Jen-Hao Yeh, Fu-Chih Yang, Chun Lin Tsai
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Patent number: 8476685Abstract: An image sensor includes a trench formed by a shallow trench isolation (STI) process, a channel stop layer formed over a substrate in the trench, an isolation structure filled in the trench, and a photodiode formed in the substrate adjacent to a sidewall of the trench. In more detail of the image sensor, a trench is formed in a substrate through a STI process, and a channel stop layer is formed over the substrate in the trench. An isolation structure is formed in the trench, and a photodiode is fanned in the substrate adjacent to a sidewall of the trench.Type: GrantFiled: February 9, 2011Date of Patent: July 2, 2013Assignee: Intellectual Ventures II LLCInventor: Kwang-Ho Lee
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Patent number: 8138581Abstract: A semiconductor device is provided which includes a semiconductor substrate having a first surface, an active area and a peripheral area. The semiconductor device further includes least one channel stop trench formed in the semiconductor substrate, wherein the channel stop trench extends from the first surface at least partially into the semiconductor substrate and is arranged between the active area and the peripheral area. At least one electrode is arranged in the channel stop trench. The semiconductor substrate includes at least a peripheral contact region, which is arranged in the peripheral area at the first surface of the semiconductor substrate. A conductive layer is provided and in electrical contact with the electrode arranged in the channel stop trench and in electrical contact with the peripheral contact region. The conductive layer is electrically connected to the semiconductor substrate merely in the peripheral area and electrically insulated from the semiconductor substrate in the active area.Type: GrantFiled: September 21, 2010Date of Patent: March 20, 2012Assignee: Infineon Technologies Austria AGInventor: Franz Hirler
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Patent number: 8125036Abstract: The Examiner objected to the abstract of the disclosure because it contains the phrase “comprising.” The Abstract does not include the phrase “comprising,” however, please amend the abstract as follows: An integrated circuit having a semiconductor component arrangement and production method is disclosed. The integrated circuit as described includes an oxide layer region is provided as a protection against oxidation in the edge region on the surface region of an underlying semiconductor material region.Type: GrantFiled: March 14, 2007Date of Patent: February 28, 2012Assignee: Infineon Technologies Austria AGInventor: Gerhard Schmidt
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Patent number: 7893469Abstract: An image sensor includes a trench formed by a shallow trench isolation (STI) process, a channel stop layer formed over a substrate in the trench, an isolation structure filled in the trench, and a photodiode formed in the substrate adjacent to a sidewall of the trench. In more detail of the image sensor, a trench is formed in a substrate through a STI process, and a channel stop layer is formed over the substrate in the trench. An isolation structure is formed in the trench, and a photodiode is formed in the substrate adjacent to a sidewall of the trench.Type: GrantFiled: December 7, 2009Date of Patent: February 22, 2011Assignee: Crosstek Capital, LLCInventor: Kwang-Ho Lee
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Publication number: 20110024803Abstract: A channel stop is provided for a semiconductor device that includes at least one active region. The channel stop is configured to surround the semiconductor device, to abut the at least one active region at a periphery of the semiconductor device, and to share an electrical connection with the at least one active region.Type: ApplicationFiled: July 30, 2009Publication date: February 3, 2011Applicant: POLAR SEMICONDUCTOR, INC.Inventors: William Larson, Gregory Michaelson
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Publication number: 20110006407Abstract: A semiconductor device is provided which includes a semiconductor substrate having a first surface, an active area and a peripheral area. The semiconductor device further includes least one channel stop trench formed in the semiconductor substrate, wherein the channel stop trench extends from the first surface at least partially into the semiconductor substrate and is arranged between the active area and the peripheral area. At least one electrode is arranged in the channel stop trench. The semiconductor substrate includes at least a peripheral contact region, which is arranged in the peripheral area at the first surface of the semiconductor substrate. A conductive layer is provided and in electrical contact with the electrode arranged in the channel stop trench and in electrical contact with the peripheral contact region. The conductive layer is electrically connected to the semiconductor substrate merely in the peripheral area and electrically insulated from the semiconductor substrate in the active area.Type: ApplicationFiled: September 21, 2010Publication date: January 13, 2011Applicant: Infineon Technologies Austria AGInventor: Franz HIRLER
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Patent number: 7834406Abstract: The present invention pertains to a high-voltage MOS device. The high-voltage MOS device includes a substrate, a first well, a first field oxide layer enclosing a drain region, a second field oxide enclosing a source region, and a third field oxide layer encompassing the first and second field layers with a device isolation region in between. A channel region is situated between the first and second field oxide layers. A gate oxide layer is provided on the channel region. A gate is stacked on the gate oxide layer. A device isolation diffusion layer is provided in the device isolation region.Type: GrantFiled: May 24, 2007Date of Patent: November 16, 2010Assignee: United Microelectronics Corp.Inventor: Chin-Lung Chen
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Patent number: 7829420Abstract: A semiconductor device has a channel termination region for using a trench 30 filled with field oxide 32 and a channel stopper ring 18 which extends from the first major surface 8 through p-well 6 along the outer edge 36 of the trench 30, under the trench and extends passed the inner edge 34 of the trench. This asymmetric channel stopper ring provides an effective termination to the channel 10 which can extend as far as the trench 30.Type: GrantFiled: August 12, 2008Date of Patent: November 9, 2010Assignee: NXP B.V.Inventor: Royce Lowis
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Patent number: 7816229Abstract: A semiconductor device is provided which includes a semiconductor substrate having a first surface, an active area and a peripheral area. The semiconductor device further includes least one channel stop trench formed in the semiconductor substrate, wherein the channel stop trench extends from the first surface at least partially into the semiconductor substrate and is arranged between the active area and the peripheral area. At least one electrode is arranged in the channel stop trench. The semiconductor substrate includes at least a peripheral contact region, which is arranged in the peripheral area at the first surface of the semiconductor substrate. A conductive layer is provided and in electrical contact with the electrode arranged in the channel stop trench and in electrical contact with the peripheral contact region. The conductive layer is electrically connected to the semiconductor substrate merely in the peripheral area and electrically insulated from the semiconductor substrate in the active area.Type: GrantFiled: September 30, 2008Date of Patent: October 19, 2010Assignee: Infineon Technologies Austria AGInventor: Franz Hirler
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Patent number: 7781838Abstract: An integrated circuit including a floating body transistor and method. One embodiment provides a transistor including a body region formed in a first portion and a first and a second source/drain region formed in a second and a third portion. The body region is formed in a semiconductor substrate. The integrated circuit further includes a buried structure disposed at least below the body region and a first and a second insulating structure including an insulating material and being disposed at least between the body region and regions of the second and the third portion below the first and the second source drain region, wherein the first and the second insulating structure contact the buried structure.Type: GrantFiled: April 21, 2008Date of Patent: August 24, 2010Assignee: Qimonda AGInventor: Dongping Wu
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Patent number: 7745908Abstract: A Semiconductor component that contains AlxGayIn1-x-yAszSb1-z, whereby the parameters x, y, and z are selected such that a bandgap of less than 350 meV is achieved, whereby it features a mesa-structuring and a passivation layer containing AlnGa1-nAsmSb1-m is applied at least partially on at least one lateral surface of the structuring, and the parameter n is selected in the range of 0.4 to 1 and the parameter m in the range of 0 to 1.Type: GrantFiled: July 25, 2005Date of Patent: June 29, 2010Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.Inventors: Frank Fuchs, Robert Rehm, Martin Walther
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Patent number: 7709906Abstract: A semiconductor device includes a gate insulation film provided on a semiconductor substrate, a gate electrode provided on the gate insulation film, a pair of first diffusion layers, a pair of second diffusion layers which are provided in the semiconductor substrate in such a manner that the gate electrode is interposed between the second diffusion layers, the second diffusion layers have a lower impurity concentration than the first diffusion layers, contact wiring lines provided on the first diffusion layers, respectively, and a first insulation layer which is an insulation layer formed in at least one of the second diffusion layers between the gate electrode and the contact wiring lines, the first insulation layer having a greater depth in the semiconductor substrate than the first diffusion layer and a less depth than the second diffusion layer.Type: GrantFiled: November 30, 2007Date of Patent: May 4, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Teppei Higashitsuji, Toshifumi Minami
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Publication number: 20100078774Abstract: A semiconductor device is provided which includes a semiconductor substrate having a first surface, an active area and a peripheral area. The semiconductor device further includes least one channel stop trench formed in the semiconductor substrate, wherein the channel stop trench extends from the first surface at least partially into the semiconductor substrate and is arranged between the active area and the peripheral area. At least one electrode is arranged in the channel stop trench. The semiconductor substrate includes at least a peripheral contact region, which is arranged in the peripheral area at the first surface of the semiconductor substrate. A conductive layer is provided and in electrical contact with the electrode arranged in the channel stop trench and in electrical contact with the peripheral contact region. The conductive layer is electrically connected to the semiconductor substrate merely in the peripheral area and electrically insulated from the semiconductor substrate in the active area.Type: ApplicationFiled: September 30, 2008Publication date: April 1, 2010Applicant: Infineon Technologies Austria AGInventor: Franz Hirler
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Patent number: 7642597Abstract: A power semiconductor device includes a semiconductor substrate having a plurality of trenches formed in an upper surface thereof; a buried insulating film; a buried field plate electrode; a control electrode; a first main electrode provided on a lower side of the semiconductor substrate; and a second main electrode provided on an upper side of the semiconductor substrate. The semiconductor substrate includes: a first semiconductor; a second semiconductor layer of the first conductivity type and a third semiconductor layer of a second conductivity type; a fourth semiconductor layer; and a fifth semiconductor layer. The buried insulating film is thicker than a gate insulating film. At least one of the second semiconductor layer and the third semiconductor layer has a portion with its sheet dopant concentration varying along a depth direction of the semiconductor substrate.Type: GrantFiled: November 13, 2007Date of Patent: January 5, 2010Assignee: Kabushiki Kaisha ToshibaInventor: Wataru Saito
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Patent number: 7638368Abstract: A reverse blocking semiconductor device that shows no adverse effect of an isolation region on reverse recovery peak current, that has a breakdown withstanding structure exhibiting satisfactory soft recovery, that suppresses aggravation of reverse leakage current, which essentially accompanies a conventional reverse blocking IGBT, and that retains satisfactorily low on-state voltage is disclosed. The device includes a MOS gate structure formed on a n? drift layer, the MOS gate structure including a p+ base layer formed in a front surface region of the drift layer, an n+ emitter region formed in a surface region of the base layer, a gate insulation film covering a surface area of the base layer between the emitter region and the drift layer, and a gate electrode formed on the gate insulation film. An emitter electrode is in contact with both the emitter region and the base layer of the MOS gate structure.Type: GrantFiled: August 22, 2007Date of Patent: December 29, 2009Assignee: Fuji Electric Holdings Co., Ltd.Inventors: Michio Nemoto, Manabu Takei, Tatsuya Naito
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Publication number: 20090127672Abstract: A susceptor for epitaxial layer forming apparatus provided in a layer forming chamber of an epitaxial layer forming apparatus includes: a recessed portion which is provided to accommodate a semiconductor wafer therein and has an approximately circular shape in plan view; and a protruding portion which is provided in the recessed portion in order to support the semiconductor wafer and has an approximately circular shape in plan view. The diameter of the protruding portion is smaller than that of the recessed portion, and the diameter of the protruding portion is set to be a size allowing reaction gas supplied for vapor-phase growth reaction to circulate through an entire boundary between the protruding portion and the semiconductor wafer when the semiconductor wafer is placed in the recessed portion.Type: ApplicationFiled: October 30, 2008Publication date: May 21, 2009Applicant: SUMCO CORPORATIONInventor: Hideaki Kinbara
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Patent number: 7525178Abstract: A termination region of a semiconductor die is provided, which includes one or more field rings arranged in the termination region, one or more metal field plates, and an insulation layer disposed to prevent direct electrical contact between the field rings and the field plate such that the at least one field ring is capacitively coupled with the at least one field plate. Such a termination region may also include a polysilicon plate capacitively coupled with a diffusion region laterally spaced from the field rings, the polysilicon plate being located at an outer surface or directly under a passivation layer at an outer surface of the die. The termination region may also include floating field rings. The insulation layer may be a field oxide layer.Type: GrantFiled: October 25, 2006Date of Patent: April 28, 2009Assignee: International Rectifier CorporationInventor: Lawrence Kulinsky
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Patent number: 7482220Abstract: In one embodiment, a semiconductor device is formed in a body of semiconductor material. The semiconductor device includes a charge compensating trench formed in proximity to active portions of the device. The charge compensating trench includes a trench filled with various layers of semiconductor material including opposite conductivity type layers.Type: GrantFiled: October 19, 2006Date of Patent: January 27, 2009Assignee: Semiconductor Components Industries, L.L.C.Inventors: Gary H. Loechelt, John M. Parsey, Jr., Peter J. Zdebel, Gordon M. Grivna
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Patent number: 7425752Abstract: A semiconductor device has a channel termination region for using a trench (30) filled with field oxide (32) and a channel stopper ring (18) which extends from the first major surface (8) through p-well (6) along the outer edge (36) of the trench (30), under the trench and extends passed the inner edge (34) of the trench. This asymmetric channel stopper ring provides an effective termination to the channel (10) which can extend as far as the trench (30).Type: GrantFiled: October 30, 2003Date of Patent: September 16, 2008Inventor: Royce Lowis
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Patent number: 7307330Abstract: A reverse blocking semiconductor device that shows no adverse effect of an isolation region on reverse recovery peak current, that has a breakdown withstanding structure exhibiting satisfactory soft recovery, that suppresses aggravation of reverse leakage current, which essentially accompanies a conventional reverse blocking IGBT, and that retains satisfactorily low on-state voltage is disclosed. The device includes a MOS gate structure formed on a n? drift layer, the MOS gate structure including a p+ base layer formed in a front surface region of the drift layer, an n+ emitter region formed in a surface region of the base layer, a gate insulation film covering a surface area of the base layer between the emitter region and the drift layer, and a gate electrode formed on the gate insulation film. An emitter electrode is in contact with both the emitter region and the base layer of the MOS gate structure.Type: GrantFiled: April 4, 2006Date of Patent: December 11, 2007Assignee: Fuji Electric Holdings Co., Ltd.Inventors: Michio Nemoto, Manabu Takei, Tatsuya Naito