For Tft (epo) Patents (Class 257/E29.151)
-
Patent number: 12237417Abstract: A FinFET structure with a gate structure having two notch features therein and a method of forming the same is disclosed. The FinFET notch features ensure that sufficient spacing is provided between the gate structure and source/drain regions of the FinFET to avoid inadvertent shorting of the gate structure to the source/drain regions. Gate structures of different sizes (e.g., different gate widths) and of different pattern densities can be provided on a same substrate and avoid inadvertent of shorting the gate to the source/drain regions through application of the notched features.Type: GrantFiled: December 5, 2022Date of Patent: February 25, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chang-Yin Chen, Che-Cheng Chang, Chih-Han Lin, Horng-Huei Tseng
-
Patent number: 12237342Abstract: According to one embodiment, a semiconductor device includes an insulating substrate, a first semiconductor layer located above the insulating substrate, a second semiconductor layer located above the insulating substrate, an insulating layer which covers the first semiconductor layer and the second semiconductor layer, and includes a first contact hole reaching the first semiconductor layer and a second contact hole reaching the second semiconductor layer, a barrier layer which covers one of the first semiconductor layer inside the first contact hole and the second semiconductor layer inside the second contact hole, and a first conductive layer which is in contact with the barrier layer.Type: GrantFiled: November 15, 2023Date of Patent: February 25, 2025Assignee: Japan Display Inc.Inventors: Akihiro Hanada, Masayoshi Fuchi
-
Patent number: 12170326Abstract: A semiconductor device includes a buried power rail (BPR) over a substrate and a semiconductor structure over the BPR. The semiconductor structure is tube-shaped and extends along a vertical direction. The semiconductor structure includes a first source/drain (S/D) region over the BPR, a gate region over the first S/D region, and a second S/D region over the gate region. The semiconductor device includes a first S/D interconnect structure extending from the BPR and further into the semiconductor structure such that a top portion of the first S/D interconnect structure is surrounded by the first S/D region. The semiconductor device includes a gate structure that includes (i) a gate oxide formed along an inner surface of the gate region and (ii) a gate electrode formed along sidewalls of the gate oxide in the gate region. The semiconductor device includes a second S/D interconnect structure positioned over the second S/D region.Type: GrantFiled: November 4, 2021Date of Patent: December 17, 2024Assignee: Tokyo Electron LimitedInventors: Mark I. Gardner, H. Jim Fulford
-
Patent number: 12107168Abstract: A stacked FET structure having independently tuned gate lengths is provided to maximize the benefit of each FET within the stacked FET structure. Notably, a vertically stacked FET structure is provided in which a bottom FET has a different gate length than a top FET. In some embodiments, a dielectric spacer can be present laterally adjacent to the bottom FET and the top FET. In such an embodiment, the dielectric spacer can have a first portion that is located laterally adjacent to the bottom FET that has a different thickness than a second portion of the dielectric spacer that is located laterally adjacent the top FET.Type: GrantFiled: August 25, 2021Date of Patent: October 1, 2024Assignee: International Business Machines CorporationInventors: Ruqiang Bao, Junli Wang, Dechao Guo
-
Patent number: 12099295Abstract: The present invention provides an imprint apparatus forming a pattern of an imprint material on a substrate by using a mold, the imprint apparatus including an optical system applying, to a peripheral region, irradiation light acing to increase viscosity of the imprint material, the peripheral region including an end of a mesa portion of the mold and surrounding the mesa portion in a state in which the mesa portion of the mold is held in contact with the imprint material, and a control unit controlling the optical system such that timings of applying the irradiation light to a plurality of zones in the peripheral region are different from each other, the zones being positioned at different distances from a center of the mesa portion, in the state in which the mesa portion of the mold is held in contact with the imprint material on the substrate.Type: GrantFiled: April 8, 2020Date of Patent: September 24, 2024Assignee: Canon Kabushiki KaishaInventors: Hiroyuki Koide, Tomomi Funayoshi, Kenichi Kobayashi, Tatsuya Hayashi
-
Patent number: 12100766Abstract: An integrated short channel omega gate FinFET and long channel FinFET semiconductor device includes a first fin and second fin on a buried oxide (BOX) layer. The BOX layer includes a fin well outside and substantially adjoining a footprint of a respective fin. A first gate dielectric layer is upon the second fin and a second gate dielectric layer is upon the first dielectric layer. The BOX layer further includes an undercut below the first fin that exposes a portion of a bottom surface of the first fin. An omega-gate is around the first fin. A tri-gate is upon the second gate dielectric layer over the second fin.Type: GrantFiled: November 3, 2021Date of Patent: September 24, 2024Assignee: International Business Machines CorporationInventors: Alexander Reznicek, Oleg Gluschenkov, Ruilong Xie
-
Patent number: 12095152Abstract: An electronic device is provided. The electronic device includes a substrate, a conductive layer, an insulating layer, and a modulating material. The conductive layer is disposed on the substrate and has a first opening penetrating through the conductive layer. The insulating layer is disposed on the conductive layer and includes a second opening penetrating through the insulating layer. The first opening of the conductive layer and the second opening of the insulating layer are at least partially overlapped. The modulating material is disposed on the insulating layer.Type: GrantFiled: May 11, 2023Date of Patent: September 17, 2024Assignee: INNOLUX CORPORATIONInventors: Yi-Hung Lin, Tang-Chin Hung, Chia-Chi Ho, I-Yin Li
-
Patent number: 12067934Abstract: Objects are to provide a display device the power consumption of which is reduced, to provide a self-luminous display device the power consumption of which is reduced and which is capable of long-term use in a dark place. A circuit is formed using a thin film transistor in which a highly-purified oxide semiconductor is used and a pixel can keep a certain state (a state in which a video signal has been written). As a result, even in the case of displaying a still image, stable operation is easily performed. In addition, an operation interval of a driver circuit can be extended, which results in a reduction in power consumption of a display device. Moreover, a light-storing material is used in a pixel portion of a self-luminous display device to store light, whereby the display device can be used in a dark place for a long time.Type: GrantFiled: August 25, 2021Date of Patent: August 20, 2024Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Jun Koyama, Hiroyuki Miyake
-
Patent number: 12061402Abstract: Certain aspects pertain to methods of fabricating an optical device on a substantially transparent substrate that include a pre-deposition operation that removes a width of lower conductor layer at a distance from the outer edge of the substrate to form a pad at the outer edge. The pad and any deposited layers of the optical device may be removed in a post edge deletion operation.Type: GrantFiled: June 24, 2021Date of Patent: August 13, 2024Assignee: View, Inc.Inventors: Abhishek Anant Dixit, Todd William Martin, Anshu A. Pradhan
-
Patent number: 12052868Abstract: Semiconductor fabrication methods and semiconductor devices are disclosed. According to some aspects, a memory device includes a memory stack having interleaved a plurality of conductive layers and a plurality of insulating layers on a substrate, and a channel structure extending vertically in the memory stack. The channel structure includes a semiconductor channel extending vertically in the memory stack and conductively connected to a source structure. The semiconductor channel includes polysilicon, and a grain size of the polysilicon ranges from 100 nm to 600 nm.Type: GrantFiled: June 18, 2021Date of Patent: July 30, 2024Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Tuo Li, Hao Pu, Lei Li, Caiyu Wu
-
Patent number: 12002818Abstract: The semiconductor device includes a driver circuit portion including a driver circuit and a pixel portion including a pixel. The pixel includes a gate electrode layer having a light-transmitting property, a gate insulating layer, a source electrode layer and a drain electrode layer each having a light-transmitting property provided over the gate insulating layer, an oxide semiconductor layer covering top surfaces and side surfaces of the source electrode layer and the drain electrode layer and provided over the gate electrode layer with the gate insulating layer therebetween, a conductive layer provided over part of the oxide semiconductor layer and having a lower resistance than the source electrode layer and the drain electrode layer, and an oxide insulating layer in contact with part of the oxide semiconductor layer.Type: GrantFiled: June 29, 2023Date of Patent: June 4, 2024Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Masayuki Sakakura, Yoshiaki Oikawa, Shunpei Yamazaki, Junichiro Sakata, Masashi Tsubuku, Kengo Akimoto, Miyuki Hosoba
-
Patent number: 11997847Abstract: Embodiments herein describe techniques for a semiconductor device including a TFT having a gate electrode with a gate length determined by a spacer. Embodiments may include a gate electrode above a substrate, a channel layer above the gate electrode, and a source electrode, a drain electrode, and a spacer above the channel layer. The drain electrode may be separated from the source electrode by the spacer. The drain electrode and the source electrode may have different widths or include different materials. Furthermore, the spacer may overlap with the gate electrode, hence the gate length of the gate electrode may be determined by the spacer width. Other embodiments may be described and/or claimed.Type: GrantFiled: January 31, 2022Date of Patent: May 28, 2024Assignee: Intel CorporationInventors: Abhishek A. Sharma, Van H. Le, Gilbert Dewey, Shriram Shivaraman, Yih Wang, Tahir Ghani, Jack T. Kavalieros
-
Patent number: 11984154Abstract: A local amplifier circuit includes write control transistors, configured to connect, based on write enable signal, global data line to local data line; column selection transistors, configured to connect, based on column selection signal, bit line to local data line; first control PMOS transistor having gate connected to local data line, one of source or drain connected to global data line, and the other one connected to read control transistor; and second control PMOS transistor having gate connected to complementary local data line, one of source or drain connected to complementary global data line, and the other one connected to read control transistor. Read control transistors are configured to pull up or down levels at terminals of first control PMOS transistor and second control PMOS transistor, each of which is source or drain connected to a respective one of read control transistors, to preset level based on read enable signal.Type: GrantFiled: June 30, 2022Date of Patent: May 14, 2024Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.Inventor: Ying Wang
-
Patent number: 11974456Abstract: A display panel includes a plurality of display elements arranged in a display area, an opening, a multi-layer including a first layer and a second layer disposed on the first layer, and a groove. Each display element includes a pixel electrode, an emission layer disposed on the pixel electrode, and an opposite electrode disposed on the emission layer. The display area surrounds the opening. The groove is located between the opening and the display area. The groove has an undercut cross-section that is concave in a thickness direction of the multi-layer, the second layer includes a pair of tips that protrude toward a center of the groove, and a length of each tip is less than about 2 ?m.Type: GrantFiled: August 4, 2022Date of Patent: April 30, 2024Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Wonwoo Choi, Wooyong Sung, Sooyoun Kim, Junghan Seo, Seoyeon Lee, Hyoungsub Lee, Moonwon Chang, Seunggun Chae
-
Patent number: 11945045Abstract: A thermal processing apparatus and method in which a first laser source, for example, a CO2 emitting at 10.6 ?m is focused onto a silicon wafer as a line beam and a second laser source, for example, a GaAs laser bar emitting at 808 nm is focused onto the wafer as a larger beam surrounding the line beam. The two beams are scanned in synchronism in the direction of the narrow dimension of the line beam to create a narrow heating pulse from the line beam when activated by the larger beam. The energy of GaAs radiation is greater than the silicon bandgap energy and creates free carriers. The energy of the CO2 radiation is less than the silicon bandgap energy so silicon is otherwise transparent to it, but the long wavelength radiation is absorbed by the free carriers.Type: GrantFiled: November 5, 2020Date of Patent: April 2, 2024Assignee: Applied Materials, Inc.Inventors: Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter, Bruce E. Adams, Joseph M. Ranish
-
Patent number: 11925064Abstract: The present disclosure provides a display substrate including: a base substrate, and a thin film transistor, an oxygen supplementing functional layer and an oxygen containing layer formed on the base substrate. The thin film transistor includes: an active layer in direct contact with the oxygen containing layer, and the active layer includes an oxide semiconductor material. The oxygen supplementing functional layer includes a metal oxide material and serves as a first electrode of the display substrate. The oxygen containing layer is between the oxygen supplementing functional layer and the base substrate.Type: GrantFiled: September 7, 2021Date of Patent: March 5, 2024Assignees: FUZHOU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.Inventors: Dapeng Xue, Guangcai Yuan, Xiaochun Xu, Zheng Liu, Liangliang Li, Shuilang Dong, Lizhong Wang, Niangi Yao
-
Patent number: 11923404Abstract: A method of forming ferroelectric hafnium oxide (HfO2) in a substrate processing system includes depositing an HfO2 layer on a substrate, depositing a hafnium nitride (HfN) layer on the HfO2 layer; and annealing the HfO2 layer and the HfN layer to form ferroelectric hafnium HfO2.Type: GrantFiled: March 26, 2019Date of Patent: March 5, 2024Assignee: Lam Research CorporationInventors: Hyungsuk Alexander Yoon, Zhongwei Zhu
-
Patent number: 11832488Abstract: A display device includes a multilayer passivation structure and has an undercut formed in the passivation structure such that a connection between a cathode and an auxiliary wiring is formed inside the undercut, so as to prevent voltage drop of the cathode and influence of hydrogen on thin film transistors and thus to improve reliability of the display device.Type: GrantFiled: July 2, 2021Date of Patent: November 28, 2023Assignee: LG DISPLAY CO., LTD.Inventors: Yong Il Kim, Young Wook Lee, Na Ra Shin
-
Patent number: 11805683Abstract: A display device including a partition wall disposed on a substrate between a first electrode and a second electrode. The partition wall has an opening. A light emitting layer is disposed in the opening. An auxiliary layer having lyophobicity is disposed between the partition wall and the second electrode.Type: GrantFiled: December 8, 2021Date of Patent: October 31, 2023Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Hyung Guen Yoon, Suk Hoon Kang, Hee Ra Kim, Su Ji Park, Beom-Soo Shin, Hong Yeon Lee
-
Patent number: 11799031Abstract: A structure of field-effect transistor includes a silicon layer of a silicon-on-insulator structure. A gate structure layer in a line shape is disposed on the silicon layer, wherein the gate structure layer includes a first region and a second region abutting to the first region. Trench isolation structures in the silicon layer are disposed at two sides of the gate structure layer, corresponding to the second region. The second region of the gate structure layer is disposed on the silicon layer and overlaps with the trench isolation structure. A source region and a drain region are disposed in the silicon layer at the two sides of the gate structure layer, corresponding to the first region. The second region of the gate structure layer includes a conductive-type junction portion.Type: GrantFiled: March 27, 2022Date of Patent: October 24, 2023Assignee: United Microelectronics Corp.Inventors: Su Xing, Chung Yi Chiu, Hai Biao Yao
-
Patent number: 11791165Abstract: A method of etching a copper (Cu) thin film and a Cu thin film prepared therefrom, the method including patterning a hard mask layer on the Cu thin film to form a hard mask on the Cu thin film; forming a plasma of a mixed gas, the mixed gas including an inert gas and an organic chelator material including an amine group, the mixed gas not including a halogen gas or a halide gas; and etching the Cu thin film through the hard mask using the plasma generated in the forming of the plasma of the mixed gas.Type: GrantFiled: August 30, 2021Date of Patent: October 17, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Cheewon Chung, Jaesang Choi
-
Patent number: 11791417Abstract: It is an object to provide a semiconductor device with less power consumption as a semiconductor device including a thin film transistor using an oxide semiconductor layer. It is an object to provide a semiconductor device with high reliability as a semiconductor device including a thin film transistor using an oxide semiconductor layer. In the semiconductor device, a gate electrode layer (a gate wiring layer) intersects with a wiring layer which is electrically connected to a source electrode layer or a drain electrode layer with an insulating layer which covers the oxide semiconductor layer of the thin film transistor and a gate insulating layer interposed therebetween. Accordingly, the parasitic capacitance formed by a stacked-layer structure of the gate electrode layer, the gate insulating layer, and the source or drain electrode layer can be reduced, so that low power consumption of the semiconductor device can be realized.Type: GrantFiled: August 16, 2021Date of Patent: October 17, 2023Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
-
Patent number: 11749686Abstract: A more convenient and highly reliable semiconductor device which has a transistor including an oxide semiconductor with higher impact resistance used for a variety of applications is provided. A semiconductor device has a bottom-gate transistor including a gate electrode layer, a gate insulating layer, and an oxide semiconductor layer over a substrate, an insulating layer over the transistor, and a conductive layer over the insulating layer. The insulating layer covers the oxide semiconductor layer and is in contact with the gate insulating layer. In a channel width direction of the oxide semiconductor layer, end portions of the gate insulating layer and the insulating layer are aligned with each other over the gate electrode layer, and the conductive layer covers a channel formation region of the oxide semiconductor layer and the end portions of the gate insulating layer and the insulating layer and is in contact with the gate electrode layer.Type: GrantFiled: October 4, 2022Date of Patent: September 5, 2023Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
-
Patent number: 11735670Abstract: Integrated circuit transistor structures and processes are disclosed that reduce n-type dopant diffusion, such as phosphorous or arsenic, from the source region and the drain region of a germanium n-MOS device into adjacent channel regions during fabrication. The n-MOS transistor device may include at least 70% germanium (Ge) by atomic percentage. In an example embodiment, source and drain regions of the transistor are formed using a low temperature, non-selective deposition process of n-type doped material. In some embodiments, the low temperature deposition process is performed in the range of 450 to 600 degrees C. The resulting structure includes a layer of doped mono-crystyalline silicon (Si), or silicon germanium (SiGe), on the source/drain regions. The structure also includes a layer of doped amorphous Si:P (or SiGe:P) on the surfaces of a shallow trench isolation (STI) region and the surfaces of contact trench sidewalls.Type: GrantFiled: October 8, 2021Date of Patent: August 22, 2023Assignee: Intel CorporationInventors: Glenn A. Glass, Anand S. Murthy, Karthik Jambunathan, Cory C. Bomberger, Tahir Ghani, Jack T. Kavalieros, Benjamin Chu-Kung, Seung Hoon Sung, Siddharth Chouksey
-
Patent number: 11721550Abstract: A method for depositing III-V alloys on substrates and compositions therefrom. A first layer comprises a Group III element. A second layer comprises a silica. A substrate has a surface. The second layer is deposited onto a first layer. The depositing is performed by a sol-gel method. The second layer is exposed to a precursor that comprises a Group V element. At least one of the precursor or the Group V element diffuse through the silica. The first layer is transformed into a solid layer comprising a III-V alloy, wherein at least a portion of the first layer to a liquid. The silica retains the liquified first layer, enabling at least one of the precursor or the Group V element to diffuse into the liquid, resulting in the forming of the III-V alloy.Type: GrantFiled: October 7, 2021Date of Patent: August 8, 2023Assignee: United States Department of EnergyInventors: Emily Lowell Warren, Jeramy David Zimmerman, Olivia Dean Schneble
-
Patent number: 11688934Abstract: An antenna device is provided. The antenna device includes a first substrate, a first conductive layer, a first insulating structure, a second substrate, a second conductive layer and a liquid-crystal layer. The first conductive layer is disposed on the first substrate. The first insulating structure is disposed on the first conductive layer, and the first insulating structure includes a first region and a second region. The second substrate is disposed opposite to the first substrate. The second conductive layer is disposed on the second substrate. The liquid-crystal layer is disposed between the first conductive layer and the second conductive layer. The thickness of the first region is less than the thickness of the second region, and at least a portion of the first region is disposed in an overlapping region of the first conductive layer and the second conductive layer.Type: GrantFiled: August 31, 2021Date of Patent: June 27, 2023Assignee: INNOLUX CORPORATIONInventors: Yi-Hung Lin, Tang-Chin Hung, Chia-Chi Ho, I-Yin Li
-
Patent number: 11672164Abstract: A method of manufacturing a display apparatus includes forming a first substrate on a support substrate; forming a first barrier layer on the first substrate; and forming a conductive layer by implanting n-type impurities or p-type impurities in the first barrier layer and at least a portion of the first substrate. A display apparatus includes a conductive layer arranged on a substrate and a barrier layer arranged on the conductive layer. The conductive layer is doped with n-type impurities when the first barrier layer is doped with n-type impurities, and the conductive layer is doped with p-type impurities when the first barrier layer is doped with p-type impurities.Type: GrantFiled: October 22, 2020Date of Patent: June 6, 2023Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Minkyung Kang, Byungsoo So, Jaewoo Jeong, Jongjun Baek, Hiroshi Okumura
-
Patent number: 11549179Abstract: A film forming method includes: (a) preparing a substrate having an oxide layer formed on the substrate; (b) supplying a nitrogen-containing gas to the substrate heated by a heater; and (c) forming a molybdenum film on the oxide layer by alternately supplying a raw material gas containing molybdenum and a reducing gas a plurality of times.Type: GrantFiled: May 12, 2021Date of Patent: January 10, 2023Assignee: Tokyo Electron LimitedInventors: Satoshi Wakabayashi, Yuka Goto, Daisuke Hojo
-
Patent number: 11515388Abstract: The present application discloses a semiconductor device with a P-N junction isolation structure and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a first well layer positioned in the substrate and having a first electrical type, a bottom conductive layer positioned in the first well layer and having a second electrical type opposite to the first electrical type, a first insulating layer positioned on the bottom conductive layer, an isolation-mask layer positioned on the substrate and enclosing the first insulating layer, a first conductive line positioned on the first insulating layer, and a bias layer positioned in the first well layer and spaced apart from the bottom conductive layer. The bottom conductive layer, the first insulating layer, and the first conductive line together configure a programmable unit.Type: GrantFiled: December 18, 2020Date of Patent: November 29, 2022Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Hsih-Yang Chiu
-
Patent number: 11508806Abstract: A MOSFET fabricated in a semiconductor substrate, includes: a gate oxide region formed atop the semiconductor substrate; a gate polysilicon region formed on the gate oxide region; a source region of a first doping type formed in the semiconductor substrate and located at a first side of the gate polysilicon region; and a drain region of the first doping type formed in the semiconductor substrate and located at a second side of the gate polysilicon region. The gate polysilicon region has a first sub-region of the first doping type, a second sub-region of the first doping type, and a third sub-region of a second doping type, wherein the first sub-region is laterally adjacent to the source region, the second sub-region is laterally adjacent to the drain region, and the third sub-region is formed laterally between the first and second sub-regions.Type: GrantFiled: May 21, 2021Date of Patent: November 22, 2022Assignee: Monolithic Power Systems, Inc.Inventors: Eric Braun, Joel McGregor
-
Patent number: 11508815Abstract: Provided is a semiconductor device which use a two-dimensional semiconductor material as a channel layer. The semiconductor device includes: a gate electrode on a substrate; a gate dielectric on the gate electrode; a channel layer on the gate dielectric; and a source electrode and a drain electrode that may be electrically connected to the channel layer. The gate dielectric has a shape with a height greater than a width, and the channel layer includes a two-dimensional semiconductor material.Type: GrantFiled: July 14, 2020Date of Patent: November 22, 2022Assignee: Samsung Electronics Co., Ltd.Inventors: Minhyun Lee, Minsu Seol, Yeonchoo Cho, Hyeonjin Shin
-
Patent number: 11469268Abstract: Damascene-based approaches for embedding spin hall MTJ devices into a logic processor, and the resulting structures, are described. In an example, a logic processor includes a logic region including a metallization layer. The logic processor also includes a memory array including a plurality of two-transistor one magnetic tunnel junction (MTJ) spin hall effect electrode (2T-1MTJ SHE electrode) bit cells. The spin hall effect electrodes of the 2T-1MTJ SHE electrode bit cells are disposed in a lower dielectric layer laterally adjacent to the metallization layer of the logic region. The MTJs of the 2T-1MTJ SHE electrode bit cells are disposed in an upper dielectric layer laterally adjacent to the metallization layer of the logic region.Type: GrantFiled: March 18, 2016Date of Patent: October 11, 2022Assignee: Intel CorporationInventors: Kevin J. Lee, Yih Wang
-
Patent number: 11469255Abstract: A more convenient and highly reliable semiconductor device which has a transistor including an oxide semiconductor with higher impact resistance used for a variety of applications is provided. A semiconductor device has a bottom-gate transistor including a gate electrode layer, a gate insulating layer, and an oxide semiconductor layer over a substrate, an insulating layer over the transistor, and a conductive layer over the insulating layer. The insulating layer covers the oxide semiconductor layer and is in contact with the gate insulating layer. In a channel width direction of the oxide semiconductor layer, end portions of the gate insulating layer and the insulating layer are aligned with each other over the gate electrode layer, and the conductive layer covers a channel formation region of the oxide semiconductor layer and the end portions of the gate insulating layer and the insulating layer and is in contact with the gate electrode layer.Type: GrantFiled: March 25, 2021Date of Patent: October 11, 2022Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
-
Patent number: 11469283Abstract: A display device is provided. The display device includes a substrate, a first active layer of a first transistor and a second active layer of a second transistor which are disposed on the substrate, a first gate insulating layer disposed on the first active layer, an oxide layer disposed on the first gate insulating layer and including an oxide semiconductor, a first gate electrode disposed on the oxide layer, a second gate insulating layer disposed on the first gate electrode and the second active layer, and a second gate electrode which overlaps the second active layer in a thickness direction of the substrate and is disposed on the second gate insulating layer, where the oxide layer overlaps the first active layer and does not overlap the second active layer in the thickness direction.Type: GrantFiled: November 19, 2020Date of Patent: October 11, 2022Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Myoung Hwa Kim, Joon Seok Park, Tae Sang Kim, Yeon Keon Moon, Geun Chul Park, Sang Woo Sohn, Jun Hyung Lim, Hye Lim Choi
-
Patent number: 11444147Abstract: A display device includes a light emitting diode electrically connected between a driving voltage line and a common voltage line; a driving transistor electrically connected between the driving voltage line and the light emitting diode; a second transistor electrically connected between a first electrode of the driving transistor electrically connected to the driving voltage line and a data line; a first scan line electrically connected to a gate electrode of the second transistor; a third transistor electrically connected between a second electrode of the driving transistor electrically connected to the light emitting diode and a gate electrode of the driving transistor; and a connection electrode that connects the gate electrode of the driving transistor and the third transistor, wherein at least a part of a contact portion where the connection electrode contacts the third transistor does not overlap the first scan line.Type: GrantFiled: April 30, 2021Date of Patent: September 13, 2022Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Min Hee Choi, Ji-Eun Lee, Jin Tae Jeong, Yun Sik Joo
-
Patent number: 11393873Abstract: Approaches for embedding spin hall MTJ devices into a logic processor, and the resulting structures, are described. In an example, a logic processor includes a logic region including fin-FET transistors disposed in a dielectric layer disposed above a substrate. The logic processor also includes a memory array including a plurality of two-transistor one magnetic tunnel junction (MTJ) spin hall electrode (2T1MTJ SHE) bit cells. The transistors of the 2T1MTJ SHE bit cells are fin-FET transistors disposed in the dielectric layer.Type: GrantFiled: March 7, 2016Date of Patent: July 19, 2022Assignee: Intel CorporationInventors: Kevin J. Lee, Yih Wang
-
Patent number: 11362146Abstract: The present application provides a display panel comprising a substrate and a plurality of film layers disposed on the substrate in sequence, and at least one of the film layers having a patterned structure, wherein the display panel has at least a first location and a second location different from the first location, and the film layers arranged in a thickness direction of the display panel at the first location are different from the film layers arranged in a thickness direction of the display panel at the second location, a first optical length L1 at the first location and a second optical length L2 at the second location meet the following conditions: L1=d1*n1+d2*n2+ . . . +di*ni, L2=D1*N1+D2*N2+ . . . +Dj*Nj, (m??)??L1?L2?(m+?)?, wherein ? is a constant between 380 nm and 780 nm; m is a natural number; and ? is a constant between 0 and 0.2.Type: GrantFiled: June 9, 2020Date of Patent: June 14, 2022Assignee: YUNGU (GU'AN) TECHNOLOGY CO., LTD.Inventors: Junhui Lou, Lixiong Xu, Xiaoyang Tong
-
Patent number: 10068809Abstract: The invention provides a manufacturing method for TFT backplane, through forming an oxygen-containing a-Si layer on the buffer layer and an oxygen-free a-Si layer on the oxygen-containing a-Si layer so that when using a boron induced SPC to crystallize the a-Si thin film, the contact interface between the a-Si thin film and the buffer layer is the oxygen-containing a-Si layer; because the nucleation is not easy to occur in oxygen-containing a-Si layer during high temperature crystallization, the nucleation only occurs top-down in the boron doped layer on the upper surface of the a-Si thin film for good die quality and thin film uniformity to achieve improve crystalline quality and uniformity. The TFT backplane provided by the invention is made with simple process, wherein the crystalline quality and uniformity of the polysilicon layer is preferable, and can enhance the TFT performance and the driving effect.Type: GrantFiled: June 22, 2016Date of Patent: September 4, 2018Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventor: Xingyu Zhou
-
Patent number: 10026758Abstract: An array substrate, a manufacturing method thereof, a display panel and a display device are disclosed. The manufacturing method includes: forming a first metal wiring, an interlayer insulating film, a second metal wiring and a protecting layer in sequence on a substrate, the second metal wiring is parallel with the first metal wiring and has an overlapped area therewith which is defined as a first zone, and portions of the first and second metal wiring except the first zone are defined as a second zone and a third zone respectively; at least thinning a portion of the interlayer insulating film and/or the protecting layer corresponding to the first zone while leaving portions except those corresponding to the first, second and third zones un-thinned. The manufacturing method can mitigate Zara mura.Type: GrantFiled: October 12, 2017Date of Patent: July 17, 2018Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.Inventors: Ruirui Wang, Huabin Chen, Linlin Wang, Xiaopeng Cui
-
Patent number: 10026754Abstract: The object of the present invention is to make it possible to form an LIPS TFT and an oxide semiconductor TFT on the same substrate. A display device includes a substrate having a display region in which pixels are formed. The pixel includes a first TFT using an oxide semiconductor 109. An oxide film 110 as an insulating material is formed on the oxide semiconductor 109. A gate electrode 111 is formed on the oxide film 110. A first electrode 115 is connected to a drain of the first TFT via a first through hole formed in the oxide film 110. A second electrode 116 is connected to a source of the first TFT via a second through hole formed in the oxide film 110.Type: GrantFiled: May 3, 2017Date of Patent: July 17, 2018Assignee: Japan Dispaly Inc.Inventors: Isao Suzumura, Kazufumi Watabe, Yoshinori Ishii, Hidekazu Miyake, Yohei Yamaguchi
-
Patent number: 9905592Abstract: A method for manufacturing a thin-film transistor (TFT), an array substrate and a display device are disclosed. The manufacturing method includes: forming a photoresist layer provided with a completely retained region, a partially-retained region and a completely removed region on a metal film by a half-tone mask process; forming a source/drain metal layer by etching the metal film under the cover of the photoresist layer; removing the photoresist layer in the partially-retained region; forming an active layer by patterning the semiconductor film; and removing residual photoresist layer.Type: GrantFiled: July 27, 2016Date of Patent: February 27, 2018Assignee: BOE Technology Group Co., Ltd.Inventors: Tongshang Su, Shengping Du, Ning Liu, Dongfang Wang, Guangcai Yuan
-
Patent number: 9391207Abstract: The present invention provides a low-temperature polysilicon thin film transistor and a manufacturing method thereof, an array substrate and a manufacturing method thereof, and a display device. The present invention is related to display technology. The low-temperature polysilicon thin film transistor comprises: an active layer disposed on a substrate, and a source electrode and a drain electrode respectively connected to the active layer, the active layer comprises a source contact region, a drain contact region, and a semiconductor region disposed between the source contact region and the drain contact region, the source contact region and the drain contact region are both conductive, both of the source contact region and the drain contact region include a semiconductor substrate and ions distributed in the semiconductor substrate, the source electrode covers the source contact region directly, and the drain electrode covers the drain contact region directly.Type: GrantFiled: June 12, 2014Date of Patent: July 12, 2016Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Tao Gao, Weifeng Zhou
-
Patent number: 9040992Abstract: A display device includes a laminated wiring formed of a low-resistance conductive film, and a low-reflection film mainly containing Al and functioning as an antireflective film which are sequentially arranged on a transparent substrate, a wiring terminal part provided at an end part of the laminated wiring and has the same laminated structure as that of the laminated wiring, and an insulating film for covering the laminated wiring and the wiring terminal part, in which the insulating film side serves as a display surface side, the wiring terminal part has a first opening part penetrating the insulating film and the low-reflection film and reaching the low-resistance conductive film, and an outer peripheral portion of the first opening part has a laminated structure of the low-resistance conductive film, the low-reflection film, and the insulating film, in at least one part.Type: GrantFiled: April 25, 2013Date of Patent: May 26, 2015Assignee: Mitsubishi Electric CorporationInventors: Masami Hayashi, Kenichi Miyamoto, Kazushi Yamayoshi, Junichi Tsuchimichi
-
Patent number: 9041202Abstract: An object is to provide a semiconductor device with high aperture ratio or a manufacturing method thereof. Another object is to provide semiconductor device with low power consumption or a manufacturing method thereof. A light-transmitting conductive layer which functions as a gate electrode, a gate insulating film formed over the light-transmitting conductive layer, a semiconductor layer formed over the light-transmitting conductive layer which functions as the gate electrode with the gate insulating film interposed therebetween, and a light-transmitting conductive layer which is electrically connected to the semiconductor layer and functions as source and drain electrodes are included.Type: GrantFiled: May 4, 2009Date of Patent: May 26, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Hajime Kimura
-
Patent number: 9012275Abstract: A method of forming TFT is provided. The TFT includes a gate electrode, a gate insulating layer, a first protective pattern, a second protective pattern, a source electrode, a drain electrode, a semiconductor channel layer, and a passivation layer. The first protective pattern and the second protective pattern are disposed on the gate insulating layer above the gate electrode. The source electrode is disposed on the gate insulating layer and the first protective pattern. The drain electrode is disposed on the gate insulating layer and the second protective pattern. The semiconductor channel layer is disposed on the gate insulating layer, the source electrode, and the drain electrode. In an extending direction from the source electrode to the drain electrode, a length of the first protective pattern is shorter than that of the source electrode, and a length of the second protective pattern is shorter than that of the drain electrode.Type: GrantFiled: December 2, 2013Date of Patent: April 21, 2015Assignee: AU Optronics Corp.Inventors: Chung-Tao Chen, Wu-Hsiung Lin, Po-Hsueh Chen
-
Patent number: 9006799Abstract: Radio frequency and microwave devices and methods of use are provided herein. According to some embodiments, the present technology may comprise an ohmic layer for use in a field effect transistor that includes a plurality of strips disposed on a substrate, the plurality of strips comprising alternating source strips and drain strips, with adjacent strips being spaced apart from one another to form a series of channels, a gate finger segment disposed in each of the series of channels, and a plurality of gate finger pads disposed in an alternating pattern around a periphery of the plurality of strips such that each gate finger segment is associated with two gate finger pads.Type: GrantFiled: November 4, 2014Date of Patent: April 14, 2015Assignee: Sarda Technologies, Inc.Inventor: James L. Vorhaus
-
Patent number: 9006743Abstract: The present invention provides a thin film transistor including a first drain electrode, a second drain electrode, a first source electrode, and a second source electrode, wherein the first drain electrode and the first source electrode jointly define a first U-shaped channel facing toward a first direction. Wherein the second drain electrode and the second source electrode jointly define a second U-shaped channel facing a second direction which is different to the first direction, wherein the bottom width of the second U-shaped channel is larger then the bottom width of the first U-shaped channel. The present invention further provides an array substrate of the thin film transistor, and a method for making the array substrate. By way of the forgoing, short-circuit between the source electrode and the drain electrode resulted from the cleaning agent residue located in the bottom of the U-shaped channel of the thin film transistor can be avoided.Type: GrantFiled: June 28, 2013Date of Patent: April 14, 2015Assignee: Shenzhen China Star Optoelectronics Technology Co., LtdInventor: Jingfeng Xue
-
Patent number: 9000523Abstract: An organic light-emitting display device including a TFT comprising an active layer, a gate electrode comprising a lower gate electrode and an upper gate electrode, and source and drain electrodes insulated from the gate electrode and contacting the active layer; an organic light-emitting device electrically connected to the TFT and comprising a pixel electrode formed in the same layer as where the lower gate electrode is formed; and a pad electrode electrically coupled to the TFT or the organic light emitting device and comprising a first pad electrode formed in the same layer as in which the lower gate electrode is formed, a second pad electrode formed in the same layer as in which the upper gate electrode is formed, and a third pad electrode comprising a transparent conductive oxide, the first, second, and third pad electrodes being sequentially stacked.Type: GrantFiled: December 1, 2011Date of Patent: April 7, 2015Assignee: Samsung Display Co., Ltd.Inventors: Jong-Hyun Choi, Jae-Hwan Oh
-
Patent number: 9000436Abstract: Disclosed is a thin film transistor including an active pattern including a first conductive region, a first channel region adjacent to the first conductive region, a second conductive region spaced apart from the first conductive region, a second channel region spaced apart from the first channel region, and a third conductive region spaced apart from the second conductive region, and a gate electrode positioned on the active pattern and including a first gate region crossing the first channel region, a second gate region crossing the second channel region, and a connection gate region connecting the first gate region. The connection gate region, the first gate region, and the second gate region together surround the second conductive region.Type: GrantFiled: August 9, 2013Date of Patent: April 7, 2015Assignee: Samsung Display Co., Ltd.Inventor: So-Ra Kwon
-
Patent number: 8980665Abstract: It is an object to provide a highly reliable semiconductor device including a thin film transistor whose electric characteristics are stable. In addition, it is another object to manufacture a highly reliable semiconductor device at low cost with high productivity. In a semiconductor device including a thin film transistor, a semiconductor layer of the thin film transistor is formed with an oxide semiconductor layer to which a metal element is added. As the metal element, at least one of metal elements of iron, nickel, cobalt, copper, gold, manganese, molybdenum, tungsten, niobium, and tantalum is used. In addition, the oxide semiconductor layer contains indium, gallium, and zinc.Type: GrantFiled: December 31, 2012Date of Patent: March 17, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Junichiro Sakata