Controllable By Variation Of Magnetic Field Applied To Device (epo) Patents (Class 257/E29.323)
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Patent number: 11690229Abstract: A magnetoresistive stack/structure and method of manufacturing same comprising wherein the stack/structure includes a seed region, a fixed magnetic region disposed on and in contact with the seed region, a dielectric layer(s) disposed on the fixed magnetic region and a free magnetic region disposed on the dielectric layer(s). In one embodiment, the seed region comprises an alloy including nickel and chromium having (i) a thickness greater than or equal to 40 Angstroms (+/?10%) and less than or equal to 60 Angstroms (+/?10%), and (ii) a material composition or content of chromium within a range of 25-60 atomic percent (+/?10%) or 30-50 atomic percent (+/?10%).Type: GrantFiled: December 23, 2020Date of Patent: June 27, 2023Assignee: EVERSPIN TECHNOLOGIES, INC.Inventors: Jijun Sun, Sanjeev Aggarwal, Han-Jong Chia, Jon M. Slaughter, Renu Whig
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Patent number: 11678585Abstract: A device is provided that includes a semiconductor substrate on which a free magnetic element is positioned, which has first and second magnetic domains separated by a domain wall. A first magnet is positioned on the substrate near a first end of the free magnetic element, and has a first polarity and a first value of coercivity. A second magnet is positioned on the substrate near a second end of the free magnetic element, and has a second polarity, antiparallel relative to the first polarity, and a second value of coercivity different from the first value of coercivity.Type: GrantFiled: July 21, 2020Date of Patent: June 13, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Mingyuan Song, Chwen Yu, Shy-Jay Lin
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Patent number: 11672182Abstract: A magnetic element is disclosed wherein a composite seed layer such as TaN/Mg enhances perpendicular magnetic anisotropy (PMA) in an overlying magnetic layer that may be a reference layer, free layer, or dipole layer. The first seed layer is selected from one or more of Ta, Zr, Nb, TaN, ZrN, NbN, and Ru. The second seed layer is selected from one or more of Mg, Sr, Ti, Al, V, Hf, B, and Si. A growth promoting layer made of NiCr or an alloy thereof is inserted between the seed layer and magnetic layer. In some embodiments, a first composite seed layer/NiCr stack is formed below the reference layer, and a second composite seed layer/NiCr stack is formed between the free layer and a dipole layer. The magnetic element has thermal stability to at least 400° C.Type: GrantFiled: August 30, 2021Date of Patent: June 6, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Guenole Jan, Ru-Ying Tong
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Patent number: 11665978Abstract: A method for fabricating a semiconductor device includes the steps of: forming a first inter-metal dielectric (IMD) layer on a substrate; forming a first patterned mask on the first IMD layer, in which the first patterned mask includes a first slot extending along a first direction; forming a second patterned mask on the first patterned mask, in which the second patterned mask includes a second slot extending along a second direction and the first slot intersects the second slot to form a third slot; and forming a first metal interconnection in the third slot.Type: GrantFiled: July 15, 2020Date of Patent: May 30, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Jia-Rong Wu, Rai-Min Huang, I-Fan Chang, Ya-Huei Tsai, Yu-Ping Wang
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Patent number: 11600662Abstract: Data storage devices are provided. A data storage device includes a memory transistor on a substrate and a data storage structure electrically connected to the memory transistor. The data storage structure includes a magnetic tunnel junction pattern and a top electrode on the magnetic tunnel junction pattern. The top electrode includes a first top electrode and a second top electrode on the first top electrode, and the first and second top electrodes include the same metal nitride. The first top electrode includes first crystal grains of the metal nitride, and the second top electrode includes second crystal grains of the metal nitride. In a section of the top electrode, the number of the first crystal grains per a unit length is greater than the number of the second crystal grains per the unit length.Type: GrantFiled: January 24, 2022Date of Patent: March 7, 2023Inventors: Junghwan Park, Younghyun Kim, Se Chung Oh, Jungmin Lee, Kyungil Hong
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Patent number: 11600771Abstract: A magnetoresistance effect element has an underlayer, a first ferromagnetic metal layer, a second ferromagnetic metal layer, and a tunnel barrier layer that is sandwiched between the first and second ferromagnetic metal layers. The tunnel barrier layer has a spinel structure and includes at least one lattice-matched portion, and at least one lattice-mismatched portion. The underlayer is made of a nitride layer; a layer having a (001)-oriented tetragonal or cubic structure; or a layer having a stacked structure with a combination of a nitride layer having a (001)-oriented NaCl structure and a layer having a (001)-oriented tetragonal or cubic structure.Type: GrantFiled: May 28, 2021Date of Patent: March 7, 2023Assignee: TDK CORPORATIONInventors: Tomoyuki Sasaki, Katsuyuki Nakada, Tatsuo Shibata
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Patent number: 11594674Abstract: A tunnel barrier layer includes a non-magnetic oxide, wherein a crystal structure of the tunnel barrier layer includes both an ordered spinel structure and a disordered spinel structure.Type: GrantFiled: March 18, 2020Date of Patent: February 28, 2023Assignee: TDK CORPORATIONInventors: Shinto Ichikawa, Katsuyuki Nakada
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Magnetoresistive effect element containing two non-magnetic layers with different crystal structures
Patent number: 11585873Abstract: A magnetoresistive effect element includes: a first ferromagnetic layer; a second ferromagnetic layer; and a non-magnetic layer provided between the first ferromagnetic layer and the second ferromagnetic layer, wherein the non-magnetic layer includes a first layer and a second layer, and wherein a lattice constant ? of the first layer and a lattice constant ? of the second layer satisfy a relationship of ??0.04×??2×???+0.04×?.Type: GrantFiled: July 8, 2021Date of Patent: February 21, 2023Assignees: TDK CORPORATION, NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Shinto Ichikawa, Katsuyuki Nakada, Hiroaki Sukegawa, Seiji Mitani, Tadakatsu Ohkubo, Kazuhiro Hono -
Patent number: 11569296Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a transistor layer, a memory region over the transistor layer, and a logic region adjacent to the memory region. The memory region includes a first Nth metal line, a magnetic tunneling junction (MTJ) over the first Nth metal line, a cap over the MTJ, a first stop layer on the cap, and a first (N+1)th metal via over the MTJ. The first (N+1)th metal via is laterally surrounded by the cap and the first stop layer. The logic region includes a second Nth metal line, a second stop layer over an (N+1)th metal line, and a second (N+1)th metal via over the (N+1)th metal line. N is an integer greater than or equal to 1.Type: GrantFiled: June 1, 2021Date of Patent: January 31, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chern-Yow Hsu, Yuan-Tai Tseng, Shih-Chang Liu
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Patent number: 11569441Abstract: A magnetic tunnel junction with perpendicular magnetic anisotropy (PMA MTJ) is disclosed wherein a free layer interfaces with a tunnel barrier and has a second interface with an oxide layer. A lattice-matching layer adjoins an opposite side of the oxide layer with respect to the free layer and is comprised of CoXFeYNiZLWMV or an oxide or nitride of Ru, Ta, Ti, or Si, wherein L is one of B, Zr, Nb, Hf, Mo, Cu, Cr, Mg, Ta, Ti, Au, Ag, or P, and M is one of Mo, Mg, Ta, Cr, W, or V, (x+y+z+w+v)=100 atomic %, x+y>0, and each of v and w are >0. The lattice-matching layer grows a BCC structure during annealing thereby promoting BCC structure growth in the oxide layer that results in enhanced free layer PMA and improved thermal stability.Type: GrantFiled: May 18, 2020Date of Patent: January 31, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Huanlong Liu, Yuan-Jen Lee, Jian Zhu, Guenole Jan, Luc Thomas, Po-Kang Wang, Ru-Ying Tong, Jodi Iwata
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Patent number: 11552438Abstract: An apparatus for generation of tunable terahertz radiation is provided. The apparatus comprises: a plurality of terahertz magnon laser generators, whereas at least one such terahertz magnon laser generator comprises a multilayer column, and a terahertz transparent medium separating at least two such terahertz magnon laser generators. At least one such multilayer column further comprises: a substrate, a bottom electrode coupled with the substrate, a bottom layer coupled with the bottom electrode, a tunnel junction coupled with the bottom layer, a top layer coupled with the tunnel junction, a pinning layer coupled with the spin injector, and a top electrode coupled with the pinning layer.Type: GrantFiled: August 25, 2020Date of Patent: January 10, 2023Assignee: Magtera, Inc.Inventors: Nicholas J. Kirchner, Charles Thomas Thurman, Boris G. Tankhilevich
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Patent number: 11545524Abstract: A magnetic memory structure that includes a two-terminal resistive memory element electrically connected with a selector structure. The selector structure includes a semiconductor pillar structure formed on a semiconductor substrate. The selector structure is surrounded by a gate dielectric layer, and the semiconductor pillar structure and gate dielectric layer are surrounded by an electrically conductive gate structure. The semiconductor pillar has first and second dimensions in a plane parallel with the surface of the semiconductor substrate that are unequal with one another. The semiconductor pillar structure can have a cross-section parallel with the semiconductor substrate surface that is in the shape of a: rectangle; oval elongated polygon, etc. The length of the longer dimension can be adjusted to provide a desired amount of current though the semiconductor pillar structure to drive the two-terminal resistive memory element.Type: GrantFiled: January 9, 2020Date of Patent: January 3, 2023Assignee: Integrated Silicon Solution, (Cayman) Inc.Inventors: Andrew J. Walker, Dafna Beery, Peter Cuevas, Amitay Levi
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Patent number: 11469267Abstract: A method includes depositing a plurality of layers, which includes depositing a spin orbit coupling layer, depositing a dielectric layer over the spin orbit coupling layer, depositing a free layer over the dielectric layer, depositing a tunnel barrier layer over the free layer, and depositing a reference layer over the tunnel barrier layer. The method further includes performing a first patterning process to pattern the plurality of layers, and performing a second patterning process to pattern the reference layer, the tunnel barrier layer, the free layer, and the dielectric layer. The second patterning process stops on a top surface of the spin orbit coupling layer.Type: GrantFiled: March 2, 2020Date of Patent: October 11, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wilman Tsai, MingYuan Song, Shy-Jay Lin
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Patent number: 11467231Abstract: A first magnetic member is provided in a region farther inward than an outer peripheral edge of a first magnetoresistance element. A second magnetoresistance element is provided in a region farther inward than an inner peripheral edge of the first magnetoresistance element and is covered by the first magnetic member or is provided in a region farther outward than the outer peripheral edge of the first magnetoresistance element and is covered by a second magnetic member. A first conductor includes a first base section and a first narrow section. The area of the exterior surface of the first narrow section as viewed from a direction perpendicular to an insulating layer is smaller than that of the first base section. In the first conductor, the first base section and the first narrow section are arranged side by side in the direction perpendicular to the insulating layer.Type: GrantFiled: June 3, 2020Date of Patent: October 11, 2022Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Hikari Tochishita, Masashi Tsubokawa, Hiroki Tsutsumi
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Patent number: 11456331Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a logic region and a magnetoresistive random access memory (MRAM) region, forming a magnetic tunneling junction (MTJ) on the MRAM region, forming a metal interconnection on the MTJ, forming a dielectric layer on the metal interconnection, patterning the dielectric layer to form openings, and forming the blocking layer on the patterned dielectric layer and the metal interconnection and into the openings.Type: GrantFiled: April 23, 2020Date of Patent: September 27, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Jia-Rong Wu, I-Fan Chang, Rai-Min Huang, Ya-Huei Tsai, Yu-Ping Wang
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Patent number: 11450467Abstract: A magnetoresistive element comprises a novel iPMA cap layer on a surface of a recording layer to induce a giant interfacial perpendicular magnetic anisotropy (G-iPMA) of the recording layer and a method of making the same. The recording layer comprises a first free layer immediately contacting to the tunnel barrier layer and having a body-centered cubic structure with a (100) texture, and a second free layer having a body-centered cubic structure with a (110) texture or a face-centered cubic structure with a (111) texture, and a crystal-breaking layer inserted between the first free layer and the second free layer.Type: GrantFiled: November 25, 2020Date of Patent: September 20, 2022Inventors: Yimin Guo, Rongfu Xiao, Jun Chen
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Patent number: 11430947Abstract: A first conductive layer is patterned and trimmed to form a sub 30 nm conductive via on a first bottom electrode. The conductive via is encapsulated with a first dielectric layer and planarized to expose a top surface of the conductive via. A second conductive layer is deposited over the first dielectric layer and the conductive via. The second conductive layer is patterned to form a sub 60 nm second conductive layer wherein the conductive via and second conductive layer together form a T-shaped second bottom electrode. MTJ stacks are deposited on the T-shaped second bottom electrode and on the first bottom electrode wherein the MTJ stacks are discontinuous. A second dielectric layer is deposited over the MTJ stacks and planarized to expose a top surface of the MTJ stack on the T-shaped second bottom electrode. A top electrode contacts the MTJ stack on the T-shaped second bottom electrode plug.Type: GrantFiled: December 14, 2020Date of Patent: August 30, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yi Yang, Dongna Shen, Yu-Jen Wang
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Patent number: 11417836Abstract: The present invention is directed to a magnetic memory element including a magnetic free layer structure incorporating three magnetic free layers separated by two perpendicular enhancement layers (PELs) and having a variable magnetization direction substantially perpendicular to layer planes thereof; an insulating tunnel junction layer formed adjacent to the magnetic free layer structure; a first magnetic reference layer formed adjacent to the insulating tunnel junction layer opposite the magnetic free layer structure; a second magnetic reference layer separated from the first magnetic reference layer by a third perpendicular enhancement layer; an anti-ferromagnetic coupling layer formed adjacent to the second magnetic reference layer; and a magnetic fixed layer formed adjacent to the anti-ferromagnetic coupling layer. The first and second magnetic reference layers have a first invariable magnetization direction substantially perpendicular to layer planes thereof.Type: GrantFiled: January 23, 2021Date of Patent: August 16, 2022Assignee: Avalanche Technology, Inc.Inventors: Yiming Huai, Zihui Wang
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Patent number: 11411176Abstract: A method includes forming Magnetic Tunnel Junction (MTJ) stack layers, which includes depositing a bottom electrode layer; depositing a bottom magnetic electrode layer over the bottom electrode layer; depositing a tunnel barrier layer over the bottom magnetic electrode layer; depositing a top magnetic electrode layer over the tunnel barrier layer; and depositing a top electrode layer over the top magnetic electrode layer. The method further includes patterning the MTJ stack layers to form a MTJ; and performing a passivation process on a sidewall of the MTJ to form a protection layer. The passivation process includes reacting sidewall surface portions of the MTJ with a process gas comprising elements selected from the group consisting of oxygen, nitrogen, carbon, and combinations thereof.Type: GrantFiled: December 14, 2020Date of Patent: August 9, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tai-Yen Peng, Yu-Shu Chen, Sin-Yi Yang, Chen-Jung Wang, Chien Chung Huang, Han-Ting Lin, Jyu-Horng Shieh, Qiang Fu
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Patent number: 11362269Abstract: A spin-orbit torque device 100 is described. In an embodiment, the spin-orbit torque device 100 comprises: a first pinning region 106 having a first fixed magnetization direction; a second pinning region 108 having a second fixed magnetization direction which is in a different direction to the first fixed magnetization direction; a magnetic layer 102 having a switchable magnetization direction; and a spin source layer 104 configured to generate a spin current for propagating a domain wall between the first and second pinning regions 106, 108 to switch the switchable magnetization direction of the magnetic layer 102 between the first and second fixed magnetization directions.Type: GrantFiled: August 14, 2020Date of Patent: June 14, 2022Assignee: National University of SingaporeInventors: Kaiming Cai, Hyunsoo Yang
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Patent number: 11316102Abstract: The invention comprises a novel composite multi-stack seed layer (CMSL) having lattice constant matched crystalline structure with the Co layer in above perpendicular magnetic pinning layer (pMPL) so that an excellent epitaxial growth of magnetic super lattice pinning layer [Co/(Pt, Pd or Ni)]n along its FCC (111) orientation can be achieved, resulting in a significant enhancement of perpendicular magnetic anisotropy (PMA) for perpendicular spin-transfer-torque magnetic-random-access memory (pSTT-MRAM) using perpendicular magnetoresistive elements as basic memory cells which potentially replace the conventional semiconductor memory used in electronic chips, especially mobile chips for power saving and non-volatility.Type: GrantFiled: May 4, 2020Date of Patent: April 26, 2022Inventors: Yimin Guo, Rongfu Xiao, Jun Chen
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Patent number: 10310029Abstract: A method for determining a magnetic field of a magnet along a surface of the magnet, the method comprising: performing a relative movement between the surface of the magnet and a magnetic camera device; measuring the magnetic field by means of the magnetic camera device, to thereby obtain magnetic field measurements for the surface; wherein the relative movement is a continuous movement which is a combination of a relative translational movement and a relative rotational movement; and apparatus.Type: GrantFiled: March 31, 2015Date of Patent: June 4, 2019Assignee: MAGCAM NVInventors: Koen Vervaeke, Stephan Kliché
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Patent number: 9831419Abstract: A magneto-resistive (MR) device and process for making the MR device are disclosed. The MR device has a pinned layer, a spacer layer proximate to the pinned layer, and a free layer proximate to the spacer layer. The free layer comprises a first magnetic layer proximate to the spacer layer, the first magnetic layer having a positive magnetostriction, a laminate magnetic insertion layer proximate to the first magnetic layer, and a second magnetic layer proximate to the magnetic insertion layer, the second magnetic layer having a negative magnetostriction. The laminate magnetic insertion layer has a first magnetic sublayer and a first non-magnetic sublayer proximate to the first magnetic sublayer. With the disclosed laminate magnetic insertion layer, the free layer has a low overall magnetostriction and results in a MR device with a high MR ratio.Type: GrantFiled: July 13, 2015Date of Patent: November 28, 2017Assignee: Western Digital Technologies, Inc.Inventors: James Freitag, Zheng Gao
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Patent number: 9034679Abstract: A method entails providing a substrate with a structural layer having a thickness. A partial etch process is performed at locations on the structural layer so that a portion of the structural layer remains at the locations. An oxidation process is performed at the locations which consumes the remaining portion of the structural layer and forms an oxide having a thickness that is similar to the thickness of the structural layer. The oxide electrically isolates microstructures in the structural layer, thus producing a structure. A device substrate is coupled to the structure such that a cavity is formed between them. An active region is formed in the device substrate. A short etch process can be performed to expose the microstructures from an overlying oxide layer.Type: GrantFiled: June 25, 2013Date of Patent: May 19, 2015Assignee: FREESCALE SEMICONDUCTOR, INC.Inventor: Lianjun Liu
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Patent number: 9029964Abstract: A method for manufacturing a semiconductor device includes forming plural layers of a MTJ device, depositing a conductive layer over the plural layers, forming a hard mask pattern used for patterning the plural layers over the conductive layer, where the conductive layer is exposed through the hard mask pattern, performing hydrogen peroxide process to volatilize the exposed conductive layer and removing the volatilized conductive layer, and patterning the plural layers by using the hard mask pattern as an etch mask to form the MTJ device.Type: GrantFiled: May 24, 2012Date of Patent: May 12, 2015Assignee: Hynix Semiconductor Inc.Inventors: Ga Young Ha, Ki Seon Park
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Patent number: 9024415Abstract: An electrical device includes a current transport layer formed using a layer of a topological material selected from the group of a topological insulator, a quantum anomalous hall (QAH) insulator, a topological insulator variant, and a topological magnetic insulator. In one embodiment, the current transport layer forms a conductive wire on an integrated circuit where the conductive wire includes two spatially separated edge channels, each edge channel carrying charge carriers propagating in one direction only. In other embodiments, an optical device includes an optical layer formed using a layer of the topological material. The optical layer can be a light absorbing layer, a light emitting layer, a light transport layer, or a light modulation layer.Type: GrantFiled: December 6, 2011Date of Patent: May 5, 2015Assignee: The Board of Trustees of the Leland Stanford Junior UniversityInventors: Shoucheng Zhang, Xiao Zhang
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Patent number: 9023662Abstract: A spintronic device and a method for making said spintronic device. The spintronic device includes an epitaxial crystalline ferromagnetic oxide formed directly on the semiconductor material thereby allowing spin-polarized current to be efficiently injected from the ferromagnetic oxide into the semiconductor material. A host crystal lattice includes multiple sets of stacked oxide layers of material A and B of a perovskite structure with a formula of ABO3. After an oxide layer of B is grown, magnetic ions are introduced to intermix with the B material, which may replace some of the ions of the B material. The process of growing additional stacked oxide layers of material A and B and introducing further magnetic ions after the deposition of the oxide layer of B continues until enough magnetic ions are sufficiently close to one another that they align in the same direction thereby forming a ferromagnetic oxide on the semiconductor material.Type: GrantFiled: May 7, 2012Date of Patent: May 5, 2015Assignee: Board of Regents, The University of Texas SystemInventors: Alexander A. Demkov, Agham-Bayan S. Posadas
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Patent number: 9018719Abstract: According to one embodiment, a magnetoresistive element includes a storage layer having a perpendicular and variable magnetization, a reference layer having a perpendicular and invariable magnetization, a shift adjustment layer having a perpendicular and invariable magnetization in a direction opposite to a magnetization of the reference layer, a first nonmagnetic layer between the storage layer and the reference layer, and a second nonmagnetic layer between the reference layer and the shift adjustment layer. A switching magnetic field of the reference layer is equal to or smaller than a switching magnetic field of the storage layer, and a magnetic relaxation constant of the reference layer is larger than a magnetic relaxation constant of the storage layer.Type: GrantFiled: March 19, 2012Date of Patent: April 28, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Katsuya Nishiyama, Hisanori Aikawa, Tadashi Kai, Toshihiko Nagase, Koji Ueda, Hiroaki Yoda
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Patent number: 9006704Abstract: A magnetic element is disclosed wherein first and second interfaces of a free layer with a Hk enhancing layer and tunnel barrier, respectively, produce enhanced surface perpendicular anisotropy to lower switching current or increase thermal stability in a magnetic tunnel junction (MTJ). In a MTJ with a bottom spin valve configuration where the Hk enhancing layer is an oxide, the capping layer contacting the Hk enhancing layer is selected to have a free energy of oxide formation substantially greater than that of the oxide. The free layer may be a single layer or composite comprised of an Fe rich alloy such as Co20Fe60B20. With a thin free layer, the interfacial perpendicular anisotropy may dominate the shape anisotropy to generate a magnetization perpendicular to the planes of the layers. The magnetic element may be part of a spintronic device or serve as a propagation medium in a domain wall motion device.Type: GrantFiled: February 11, 2011Date of Patent: April 14, 2015Assignee: Headway Technologies, Inc.Inventors: Guenole Jan, Ru Ying Tong, Witold Kula, Cheng Horng
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Patent number: 9005997Abstract: Provided are a magneto resistive element and a method of manufacturing the same, and in particular, a magneto resistive element and a method of manufacturing the same that may be applied to a digitizer sensing panel. The magneto resistive element includes a substrate, a first electrode disposed on the substrate, a first hole transport layer disposed on the first electrode, a first magneto resistive layer disposed on the first hole transport layer, wherein the first magneto resistive layer comprises an organic material, a first transport layer disposed on the first magneto resistive layer, a second magneto resistive layer disposed on the first transport layer, wherein the second magneto resistive layer comprises an organic material, a first electron transport layer disposed on the second magneto resistive layer, and a second electrode disposed on the first electron transport layer.Type: GrantFiled: September 10, 2013Date of Patent: April 14, 2015Assignee: Samsung Display Co., Ltd.Inventors: Hyun-Sung Bang, Won-Jong Kim, Ji-Young Choung, Joon-Gu Lee, Jin-Baek Choi, Yeon-Hwa Lee
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Patent number: 9006849Abstract: This invention comprises a method to make small MTJ element using hybrid etching and oxygen plasma immersion ion implantation. The method has no removal of the magnetic free layer (or memory layer) and hence prevents any possible physical damage near the free layer edges. After photolithography patterning, alternative Ta, Ru, Ta etchings are performed before it stops on an MgO intermediate layer above the free layer. Then an oxygen plasma immersion ion implantation is performed to completely oxidize the exposed portion of the free layer, leaving the hard mask covered portion unchanged which define the lateral width of the MTJ element.Type: GrantFiled: March 26, 2014Date of Patent: April 14, 2015Inventor: Yimin Guo
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Patent number: 9000546Abstract: A spin-wave waveguide includes a ferromagnetic thin film resembling a wire in shape. A part of the ferromagnetic thin film, large in film thickness, is formed at one end of the ferromagnetic thin film, and a part of the ferromagnetic thin film, small in film thickness, and a part of the ferromagnetic thin film, large in film thickness, are alternately formed on the same plane, for at least not less than one cycle. A part of the ferromagnetic thin film, large in film thickness, is formed at the other end of the ferromagnetic thin film, wherein an insulating film, and an electrode film are stacked in this order on the ferromagnetic thin film in the part of the ferromagnetic thin film, large in film thickness.Type: GrantFiled: December 4, 2012Date of Patent: April 7, 2015Assignee: Hitachi, Ltd.Inventors: Kenchi Ito, Masaki Yamada, Susumu Ogawa
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Patent number: 9000540Abstract: The performances of semiconductor elements disposed in a multilayer wiring layer are improved. A semiconductor device includes: a first wire disposed in a first wiring layer; a second wire disposed in a second wiring layer stacked over the first wiring layer; a gate electrode arranged between the first wire and the second wire in the direction of stacking of the first wiring layer and the second wiring layer, and not coupled with the first wire and the second wire; a gate insulation film disposed over the side surface of the gate electrode; and a semiconductor layer disposed over the side surface of the gate electrode via the gate insulation film, and coupled with the first wire and the second wire.Type: GrantFiled: January 10, 2013Date of Patent: April 7, 2015Assignee: Renesas Electronics CorporationInventors: Hiroshi Sunamura, Naoya Inoue, Kishou Kaneko
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Patent number: 8994130Abstract: A magnetic memory element includes: a first magnetization free layer formed of a ferromagnetic material having perpendicular magnetic anisotropy; a second magnetization free layer provided near the first magnetization free layer and formed of a ferromagnetic material having in-plane magnetic anisotropy; a reference layer formed of a ferromagnetic material having in-plane magnetic anisotropy; and a non-magnetic layer provided between the second magnetization free layer and the reference layer. The first magnetization free layer includes: a first magnetization fixed region of which magnetization is fixed, a second magnetization fixed region of which magnetization is fixed, and a magnetization free region which is connected to the first magnetization fixed region and the second magnetization fixed region, and of which magnetization can be switched. The second magnetization free layer is included in the first magnetization free layer in a plane parallel to a substrate.Type: GrantFiled: January 28, 2010Date of Patent: March 31, 2015Assignee: NEC CorporationInventors: Shunsuke Fukami, Tetsuhiro Suzuki, Kiyokazu Nagahara, Nobuyuki Ishiwata, Norikazu Ohshima
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Patent number: 8987848Abstract: A MTJ for a spintronic device that is a domain wall motion device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/X)n or (CoX)n composition where n is from 2 to 30, X is one of V, Rh, Ir, Os, Ru, Au, Cr, Mo, Cu, Ti, Re, Mg, or Si, and CoX is a disordered alloy. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof with a thickness from 10 to 100 Angstroms. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.Type: GrantFiled: April 4, 2014Date of Patent: March 24, 2015Assignee: Headway Technologies, Inc.Inventors: Guenole Jan, Ru-Ying Tong, Yu-Jen Wang
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Patent number: 8987847Abstract: A MTJ for a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/X)n or (CoX)n composition where n is from 2 to 30, X is one of V, Rh, Ir, Os, Ru, Au, Cr, Mo, Cu, Ti, Re, Mg, or Si, and CoX is a disordered alloy. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof with a thickness from 10 to 100 Angstroms. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.Type: GrantFiled: April 4, 2014Date of Patent: March 24, 2015Assignee: Headway Technologies, Inc.Inventors: Guenole Jan, Ru-Ying Tong, Yu-Jen Wang
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Patent number: 8987849Abstract: A MTJ for a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/X)n or (CoX)n? composition where n is from 2 to 30, X is one of V, Rh, Ir, Os, Ru, Au, Cr, Mo, Cu, Ti, Re, Mg, or Si, and CoX is a disordered alloy. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof with a thickness from 10 to 100 Angstroms. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.Type: GrantFiled: April 4, 2014Date of Patent: March 24, 2015Assignee: Headway Technologies, Inc.Inventors: Guenole Jan, Ru-Ying Tong, Yu-Jen Wang
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Patent number: 8987798Abstract: Provided is a magnetic tunneling junction device including a first structure including a magnetic layer; a second structure including at least two extrinsic perpendicular magnetization structures, each including a magnetic layer and; a perpendicular magnetization inducing layer on the magnetic layer; and a tunnel barrier between the first and second structures.Type: GrantFiled: June 17, 2014Date of Patent: March 24, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Jeong Heon Park, Woo Chang Lim, Se Chung Oh, Young Hyun Kim, Sang Hwan Park, Jang Eun Lee
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Patent number: 8981505Abstract: A MTJ is disclosed with a discontinuous Mg or Mg alloy layer having a thickness from 1 to 3 Angstroms between a free layer and a capping layer in a bottom spin valve configuration. It is believed the discontinuous Mg layer serves to block conductive material in the capping layer from diffusing through the free layer and into the tunnel barrier layer thereby preventing the formation of conductive channels that function as electrical shunts within the insulation matrix of the tunnel barrier. As a result, the “low tail” percentage in a plot of magnetoresistive ratio vs Rp is minimized which means the number of high performance MTJ elements in a MTJ array is significantly increased, especially when a high temperature anneal is included in the MTJ fabrication process. The discontinuous layer is formed by a low power physical vapor deposition process.Type: GrantFiled: January 11, 2013Date of Patent: March 17, 2015Assignee: Headway Technologies, Inc.Inventors: Takahiro Moriyama, Yu-Jen Wang, Ru-Ying Tong
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Patent number: 8981508Abstract: A magnetic field sensor having a support with a top side and a bottom side, whereby a Hall plate is provided on the top side of the support and the Hall plate comprises a carbon-containing layer.Type: GrantFiled: December 10, 2013Date of Patent: March 17, 2015Assignee: Micronas GmbHInventor: Joerg Franke
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Patent number: 8982614Abstract: According to one embodiment, a magnetoresistive effect element includes a first ferromagnetic layer, a tunnel barrier provided on the first ferromagnetic layer, and a second ferromagnetic layer provided on the tunnel barrier. The tunnel barrier includes a nonmagnetic mixture containing MgO and a metal oxide with a composition which forms, in a solid phase, a single phase with MgO.Type: GrantFiled: August 8, 2013Date of Patent: March 17, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Makoto Nagamine, Daisuke Ikeno, Katsuya Nishiyama, Katsuaki Natori, Koji Yamakawa
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Patent number: 8981442Abstract: A semiconductor magnetic field sensor comprising a semiconductor well on top of a substrate layer is disclosed. The semiconductor well includes a first current collecting region and a second current collecting region and a current emitting region placed between the first current collecting region and the second current collecting region. The semiconductor well also includes a first MOS structure, having a first gate terminal, located between the first current collecting region and the current emitting region and a second MOS structure, having a second gate terminal, located between the current emitting region and the second current collecting region. In operation, the first gate terminal and the second gate terminal are biased for increasing a deflection length of a first current and of a second current. The deflection length is perpendicular to a plane defined by a surface of the semiconductor magnetic field sensor and parallel to a magnetic field.Type: GrantFiled: December 16, 2013Date of Patent: March 17, 2015Assignee: NXP B.V.Inventors: Victor Zieren, Anco Heringa, Olaf Wunnicke, Jan Slotboom, Robert Hendrikus Margaretha van Veldhoven, Jan Claes
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Patent number: 8975091Abstract: The present disclosure relates to a magnetic tunnel junction (MTJ) device and its fabricating method. Through forming MTJ through a damascene process, device damage due to the etching process and may be avoided. In some embodiments, a spacer is formed between a first portion and a second portion of the MTJ to prevent the tunnel insulating layer of the MTJ from being damaged in subsequent processes, greatly increasing product yield thereby. In other embodiments, signal quality may be improved and magnetic flux leakage may be reduced through the improved cup-shaped MTJ structure of this invention.Type: GrantFiled: September 9, 2014Date of Patent: March 10, 2015Assignee: Semiconductor Manufacturing International (Beijing) CorporationInventors: Min-Hwa Chi, Mieno Fumitake
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Patent number: 8962348Abstract: A method for forming a MTJ in a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/Ni)n composition. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. There may be a Ta insertion layer between the CoFeB layer and laminated layer to promote (100) crystallization in the CoFeB layer. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.Type: GrantFiled: September 20, 2013Date of Patent: February 24, 2015Assignee: Headway Technologies, Inc.Inventors: Guenole Jan, Witold Kula, Ru Ying Tong, Yu Jen Wang
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Patent number: 8957498Abstract: The present invention relates to an on-chip electronic device and a method for manufacturing the same. The on-chip electronic device according to the present invention comprises a substrate, a porous layer, a plurality of magnetic bodies, and an electronic member layer. The porous layer is disposed on the substrate and has a plurality of voids; each of the plurality of magnetic bodies is disposed in the plurality of voids, respectively; and the electronic member layer is disposed on one side of the porous layer, such as upper side of or lower sider of the porous layer. Because the plurality of magnetic bodies is used as the core of the inductance, the inductance is increased effectively and the area of the on-chip electronic device is reduced. Besides the manufacturing method according to the present invention is simple and compatible with the current CMOS process, the manufacturing cost can be lowered.Type: GrantFiled: May 31, 2012Date of Patent: February 17, 2015Assignee: National Chiao Tung UniversityInventors: Yu-Ting Cheng, Tzu-Yuan Chao, Kuan-Ming Chen, Hsin-Fu Hsu
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Patent number: 8953369Abstract: According to one embodiment, a magnetoresistive element includes first and second magnetic layers and a first nonmagnetic layer. The first magnetic layer has an axis of easy magnetization perpendicular to a film plane, and a variable magnetization. The second magnetic layer has an axis of easy magnetization perpendicular to a film plane, and an invariable magnetization. The first nonmagnetic layer is provided between the first and second magnetic layers. The second magnetic layer includes third and fourth magnetic layers, and a second nonmagnetic layer formed between the third and fourth magnetic layers. The third magnetic layer is in contact with the first nonmagnetic layer and includes Co and at least one of Zr, Nb, Mo, Hf, Ta, and W.Type: GrantFiled: January 20, 2014Date of Patent: February 10, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Toshihiko Nagase, Eiji Kitagawa, Katsuya Nishiyama, Tadashi Kai, Koji Ueda, Daisuke Watanabe
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Patent number: 8952471Abstract: An integrated circuit can have a first substrate supporting a magnetic field sensing element and a second substrate supporting another magnetic field sensing element. The first and second substrates can be arranged in a variety of configurations. Another integrated circuit can have a first magnetic field sensing element and second different magnetic field sensing element disposed on surfaces thereof.Type: GrantFiled: June 14, 2013Date of Patent: February 10, 2015Assignee: Allegro Microsystems, LLCInventors: Michael C. Doogue, William P. Taylor, Vijay Mangtani
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Patent number: 8946836Abstract: In one embodiment a magnetic memory includes a memory device base and a plurality of memory cells disposed on the memory cell base, where each memory cell includes a layer stack comprising a plurality of magnetic and electrically conductive layers arranged in a stack of layers common to each other memory cell. The magnetic memory further includes an implanted matrix disposed between the memory cells and surrounding each memory cell, where the implanted matrix includes component material of the layer stack of each memory cell inter mixed with implanted species, where the implanted matrix comprises a non-conducting material and a non-magnetic material, wherein each memory cell is electrically and magnetically isolated from each other memory cell.Type: GrantFiled: April 29, 2013Date of Patent: February 3, 2015Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Alexander C. Kontos, Steven Sherman, John J. Hautala, Simon Ruffell
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Patent number: 8941195Abstract: In a method for fabricating a semiconductor device, a conductive layer is formed on a substrate, where the substrate has a bottom layer formed thereon. A magnetic tunnel junction layer is formed on the conductive layer. The magnetic tunnel junction layer is patterned using an etching gas containing oxygen. An insulating layer is formed by oxidizing the conductive layer exposed outside the patterned magnetic tunnel junction layer using the etching gas.Type: GrantFiled: December 23, 2011Date of Patent: January 27, 2015Assignee: SK Hynix Inc.Inventors: Min Suk Lee, Bo Kyoung Jung
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Patent number: 8941196Abstract: Orthogonal spin-torque bit cells whose spin torques from a perpendicular polarizer and an in-plane magnetized reference layer are constructively or destructively combined. An orthogonal spin-torque bit cell includes a perpendicular magnetized polarizing layer configured to provide a first spin-torque; an in-plane magnetized free layer and a reference layer configured to provide a second spin-torque. The first spin-torque and the second spin-torque combine and the combined first spin-torque and second spin-torque influences the magnetic state of the in-plane magnetized free layer. The in-plane magnetized free layer and the reference layer form a magnetic tunnel junction. The first spin-torque and second spin-torque can combine constructively to lower a switching current, increase a switching speed, and/or torque decrease an operating energy of the orthogonal spin-torque bit cell.Type: GrantFiled: July 3, 2013Date of Patent: January 27, 2015Assignee: New York UniversityInventors: Daniel Bedau, Huanlong Liu, Andrew David Kent