Potential Barrier Working In Avalanche Mode (e.g., Avalanche Photodiode) (epo) Patents (Class 257/E31.063)
  • Publication number: 20110169117
    Abstract: An avalanche photodiode detector is provided with a substrate including an array of avalanche photodiodes. An optical interface surface of the substrate is arranged for accepting external input radiation. There is provided at least one cross-talk blocking layer of material including apertures positioned to allow external input radiation to reach photodiodes and including material regions positioned for attenuating radiation in the substrate that is produced by photodiodes in the array. Alternatively at least one cross-talk blocking layer of material is disposed on the optical interface surface of the substrate to allow external input radiation to reach photodiodes and attenuate radiation in the substrate that is produced by photodiodes in the array. At least one cross-talk filter layer of material can be disposed in the substrate adjacent to the photodiode structures, including a material that absorbs radiation in the substrate that is produced by photodiodes in the array.
    Type: Application
    Filed: April 30, 2010
    Publication date: July 14, 2011
    Applicant: Massachusetts Institute of Technology
    Inventors: K. Alexander McIntosh, David C. Chapman, Joseph P. Donnelly, Douglas C. Oakley, Antonio Napoleone, Erik K. Duerr, Simon Verghese, Richard D. Younger
  • Publication number: 20110121423
    Abstract: A mask for use in making a planar PN junction in a semiconductor device includes a central mask opening and a plurality of spaced apart concentric mask openings surrounding the central mask opening. The concentric mask openings each have a width less than a maximum dimension of the central mask opening. The central mask opening can be circular and the concentric mask openings can have a ring-shape. The mask can be used to form openings in a wafer layer for introducing an impurity to dope that wafer layer.
    Type: Application
    Filed: November 25, 2009
    Publication date: May 26, 2011
    Applicant: Sensors Unlimited, Inc.
    Inventors: Keith Forsyth, Noah Clay
  • Publication number: 20110095388
    Abstract: The invention relates to an avalanche photodiode (1) for detecting radiation, including a semiconductor substrate (11), an upper diode layer (15), an oppositely doped, laterally delimited lower diode layer (16), an avalanche region situated between the upper diode layer (15) and the lower diode layer (16), wherein the radiation to be detected triggers an avalanche breakdown in the avalanche region, and also including a contact-making layer (12) at the underside (10) of the semiconductor substrate (11), a laterally delimited quenching resistance layer (18) arranged in the semiconductor substrate (11) between the lower diode layer (16) and the contact-making layer (12), wherein the quenching resistance layer (18) quenches the radiation-generated avalanche breakdown in the avalanche region, and also including a depletion electrode (15) arranged laterally alongside the laterally delimited lower diode layer (16), such that the depletion electrode (15) depletes the semiconductor substrate (11) laterally alongside t
    Type: Application
    Filed: June 18, 2008
    Publication date: April 28, 2011
    Applicants: Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V., PNSensor GmbH.
    Inventors: Rainer Richter, Ladislav Andricek, Gerhard Lutz
  • Patent number: 7915648
    Abstract: A light-receiving element includes: a first-conductivity-type semiconductor region configured to be formed over an element formation surface; a second-conductivity-type semiconductor region configured to be formed over the element formation surface; an intermediate semiconductor region configured to be formed over the element formation surface between the first-conductivity-type semiconductor region and the second-conductivity-type semiconductor region, and have an impurity concentration lower than impurity concentrations of the first-conductivity-type semiconductor region and the second-conductivity-type semiconductor region. The light-receiving element further includes: a first electrode configured to be electrically connected to the first-conductivity-type semiconductor region; a second electrode configured to be electrically connected to the second-conductivity-type semiconductor region; and a control electrode configured to be formed in an opposed area that exists on the element formation surface.
    Type: Grant
    Filed: December 9, 2008
    Date of Patent: March 29, 2011
    Assignee: Sony Corporation
    Inventors: Natsuki Otani, Tsutomu Tanaka, Masafumi Kunii, Masanobu Ikeda, Ryoichi Ito
  • Publication number: 20110068428
    Abstract: In order to improve reliability by preventing an edge breakdown in a semiconductor photodetector having a mesa structure such as a mesa APD, the semiconductor photodetector comprises a mesa structure formed on a first semiconductor layer of the first conduction type formed on a semiconductor substrate, the mesa structure including a light absorbing layer for absorbing light, an electric field buffer layer for dropping an electric field intensity, an avalanche multiplication layer for causing avalanche multiplication to occur, and a second semiconductor layer of the second conduction type, wherein the thickness of the avalanche multiplication layer at the portion in the vicinity of the side face of the mesa structure is made thinner than the thickness at the central portion of the mesa structure.
    Type: Application
    Filed: November 22, 2010
    Publication date: March 24, 2011
    Applicant: FUJITSU LIMITED,
    Inventors: Nami Yasuoka, Haruhiko Kuwatsuka, Toru Uchida, Yoshihiro Yoneda
  • Patent number: 7910953
    Abstract: An optical semiconductor device includes a distributed Bragg reflection layer of a first conductivity type, a distortion elaxation layer of the first conductivity type, a light absorbing layer, and a semiconductor layer of a second conductivity type, sequentially arranged on a semiconductor substrate. The distortion relaxation layer the same material as the semiconductor substrate. The total optical length of layers between the distributed Bragg reflection layer and the light absorbing layer is an integer multiple of one-half the wavelength of incident light that is detected.
    Type: Grant
    Filed: November 12, 2008
    Date of Patent: March 22, 2011
    Assignee: Mitsubishi Electric Corporation
    Inventors: Masaharu Nakaji, Eitaro Ishimura, Eiji Yagyu
  • Patent number: 7902570
    Abstract: A single-photon detector is disclosed that provides reduced afterpulsing without some of the disadvantages for doing so in the prior art. An embodiment of the present invention provides a stimulus pulse to the active area of an avalanche photodetector to stimulate charges that are trapped in energy trap states to detrap. In some embodiments of the present invention, the stimulus pulse is a thermal pulse.
    Type: Grant
    Filed: October 9, 2009
    Date of Patent: March 8, 2011
    Assignee: Princeton Lightwave, Inc.
    Inventors: Mark Allen Itzler, Rafael Ben-Michael, Sabbir Sajjad Rangwala
  • Patent number: 7898051
    Abstract: An imaging device is provided and includes: a photoelectric conversion layer that has a silicon crystal structure and generates signal charges upon incidence of light; a multiplication and accumulation layer that multiplies the signal charges by a phenomenon of avalanche electron multiplication; and a wiring substrate that reads the signal charges from the multiplication and accumulation layer and transmits the read signal charges.
    Type: Grant
    Filed: May 2, 2008
    Date of Patent: March 1, 2011
    Assignee: FUJIFILM Corporation
    Inventor: Shinji Uya
  • Publication number: 20110024863
    Abstract: A mesa photodiode which includes a mesa, the side wall of the mesa (a light-receiving region mesa) and at least a shoulder portion of the mesa in an upper face of the mesa are continuously covered with a semiconductor layer of a first conductivity type, a second conductivity type, a semi-insulating type, or an undoped type (an undoped InP layer, for example) that is grown on the side wall and the upper face of the mesa. In the semiconductor layer, a layer thickness D1 of a portion covering the side wall of the mesa is equal to or greater than 850 nm.
    Type: Application
    Filed: June 8, 2010
    Publication date: February 3, 2011
    Applicant: NEC Electronics Corporation
    Inventors: Tomoaki Koi, Isao Watanabe, Takashi Matsumoto
  • Publication number: 20110024768
    Abstract: An avalanche photodiode semiconductor device (20) for converting an impinging photon (22) includes a base n+ doped material layer (52) formed having a window section (72) for passing the photon (22). An n? doped material layer (30) is formed on the n+ doped material layer (52) having a portion of a lower surface (74) suitably exposed. An n+ doped material layer (32) is formed on the n? doped material (30). A p+ layer (24) formed on top of the n+ doped layer (32). At least one guard ring (26) is formed in the n? doped layer (30).
    Type: Application
    Filed: October 16, 2010
    Publication date: February 3, 2011
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventor: John V. Veliadis
  • Patent number: 7880197
    Abstract: In an electron-injection type APD, it is necessary to prevent a dark current increase and to secure the life time of the device. It is demanded to improve reliability of the APD with a lower production cost. With the InP buffer layer having an n-type doping region on the inside of a region defined by an optical absorption layer, a predetermined doping profile is achieved by ion implantation. Thus, electric field concentration in the avalanche multiplication layer is relaxed. Furthermore, a low-concentration second optical absorption layer is provided between the optical absorption layer and the avalanche multiplication layer. Responsivity of the optical absorption layer is maximized, and depletion of the lateral surface of the optical absorption layer is prevented; thus, electric field concentration is prevented. Preventing edge breakdown, the device improves its reliability.
    Type: Grant
    Filed: June 27, 2006
    Date of Patent: February 1, 2011
    Assignees: NTT Electronics Corporation, Nippon Telegraph and Telephone Corporation
    Inventors: Tadao Ishibashi, Seigo Ando, Yukihiro Hirota, Yoshifumi Muramoto
  • Publication number: 20110018086
    Abstract: A system and method providing for the detection of an input signal, either optical or electrical, by using a single independent discrete amplifier or by distributing the input signal into independent signal components that are independently amplified. The input signal can either be the result of photoabsorption process in the wavelengths greater than 950 nm or a low-level electrical signal. The discrete amplifier is an avalanche amplifier operable in a non-gated mode while biased in or above the breakdown region, and includes a composite dielectric feedback layer monolithically integrated with input signal detection and amplification semiconductor layers.
    Type: Application
    Filed: June 28, 2010
    Publication date: January 27, 2011
    Inventor: Krishna Linga
  • Patent number: 7875905
    Abstract: A semiconductor optical receiver device is provided, which a mesa comprising a plurality of semiconductor crystal layers formed on a semiconductor substrate including a pn junction having a first conductive semiconductor crystal layer and a second conductive semiconductor crystal layer and including a first contact layer on the semiconductor substrate, a plurality of electrodes to apply electric field to the pn junction are coupled on the semiconductor substrate, a second contact layer is formed on a buried layer in which the mesa is buried, and the electric field is applied to the pn junction through the first and second contact layers.
    Type: Grant
    Filed: April 15, 2008
    Date of Patent: January 25, 2011
    Assignee: Opnext Japan, Inc.
    Inventors: Takashi Toyonaka, Hiroyuki Kamiyama, Kazuhiro Komatsu
  • Patent number: 7875946
    Abstract: In order to improve reliability by preventing edge breakdown in a semiconductor photodetector having a mesa structure such as a mesa APD, the semiconductor photodetector includes a mesa structure formed on a first semiconductor layer of the first conduction type formed on a semiconductor substrate, the mesa structure including a light absorbing layer for absorbing light, an electric field buffer layer for dropping an electric field intensity, an avalanche multiplication layer for causing avalanche multiplication to occur, and a second semiconductor layer of the second conduction type, wherein the thickness of the avalanche multiplication layer at the portion in the vicinity of the side face of the mesa structure is made thinner than the thickness at the central portion of the mesa structure.
    Type: Grant
    Filed: October 27, 2005
    Date of Patent: January 25, 2011
    Assignees: Fujitsu Limited, Eudyna Devices Inc.
    Inventors: Nami Yasuoka, Haruhiko Kuwatsuka, Toru Uchida, Yoshihiro Yoneda
  • Publication number: 20110000528
    Abstract: Methods and devices are provided for avalanche breakdown in a thin-film solar cell.
    Type: Application
    Filed: April 28, 2010
    Publication date: January 6, 2011
    Inventors: Anthony Nicholas Brady Garvan, III, Robert Stancel
  • Patent number: 7863647
    Abstract: An avalanche photodiode semiconductor device (20) for converting an impinging photon (22) includes a base n+ doped material layer (52) formed having a window section (72) for passing the photon (22). An n? doped material layer (30) is formed on the n+ doped material layer (52) having a portion of a lower surface (74) suitably exposed. An n+ doped material layer (32) is formed on the n? doped material (30). A p+ layer (24) formed on top of the n+ doped layer (32). At least one guard ring (26) is formed in the n? doped layer (30).
    Type: Grant
    Filed: March 19, 2007
    Date of Patent: January 4, 2011
    Assignee: Northrop Grumman Systems Corporation
    Inventor: John V. Veliadis
  • Publication number: 20100301194
    Abstract: The present invention enables the detection of light using an APD that has high gain and/or a wide range of operating temperature. A first APD is biased with a voltage bias that is controlled based on the breakdown voltage of a second APD, which is thermally coupled with the first APD. Changes in the breakdown voltage of the second APD due to aging, temperature chances, and the like, are reflective of changes in the breakdown voltage of the first APD. As a result, the first APD can be operated with greater stability and reliability at high gain and over larger temperature excursions than APDs known in the prior art.
    Type: Application
    Filed: May 26, 2010
    Publication date: December 2, 2010
    Applicant: PRINCETON LIGHTWAVE, INC.
    Inventors: Ketan Mukund Patel, Mark Allen Itzler
  • Patent number: 7843030
    Abstract: Here, we demonstrate new material/structures for the photodetectors, using semiconductor material. For example, we present the Tunable Avalanche Wide Base Transistor as a photodetector. Particularly, SiC, GaN, AlN, Si and Diamond materials are given as examples. The desired properties of an optimum photodetector is achieved. Different variations are discussed, both in terms of structure and material.
    Type: Grant
    Filed: March 22, 2007
    Date of Patent: November 30, 2010
    Inventor: Ranbir Singh
  • Patent number: 7829915
    Abstract: The present invention changes layer polarities of an epitaxy structure of an avalanche photodiode into n-i-n-i-p. A transport layer is deposed above an absorption layer to prevent absorbing photon and producing electrons and holes. A major part of electric field is concentrated on a multiplication layer for producing avalanche and a minor part of the electric field is left on the absorption layer for transferring carrier without avalanche. Thus, bandwidth limit from a conflict between RC bandwidth and carrier transferring time is relieved. Meanwhile, active area is enlarged and alignment error is improved without sacrificing component velocity too much.
    Type: Grant
    Filed: August 7, 2008
    Date of Patent: November 9, 2010
    Assignee: National Central University
    Inventors: Jin-Wei Shi, Yen-Hsiang Wu
  • Publication number: 20100276775
    Abstract: The semiconductor light receiving element 1 includes a semiconductor substrate 101, and a semiconductor layer having a photo-absorption layer 105 disposed on the top of the semiconductor substrate 101. The semiconductor layer of the semiconductor light receiving element 1 containing at least the photo-absorption layer 105 has a mesa structure, and a side wall of the mesa is provided with a protective film 113 covering the side wall. The protective film 113 is a silicon nitride film containing hydrogen, and a hydrogen concentration in one surface of the protective film 113 located at the side of the mesa side wall is lower than a hydrogen concentration in the other surface of the protective film 113 located at the side that is opposite to the side of the mesa side wall.
    Type: Application
    Filed: December 25, 2008
    Publication date: November 4, 2010
    Inventor: Emiko Fujii
  • Publication number: 20100279457
    Abstract: Disclosed is a method for manufacturing a semiconductor light-receiving device having high reproducibility and reliability. Specifically disclosed is a semiconductor light-receiving device 100 with a mesa structure wherein a light-absorbing layer 6, an avalanche multiplication layer 4 and an electric-field relaxation layer 5 are formed on a semiconductor substrate 2. The light-absorbing layer 6, avalanche multiplication layer 4 and electric-field relaxation layer 5 exposed in the side wall of the mesa structure are protected by an SiNx film or an SiOyNz film. The hydrogen concentration in the side wall surface of the electric-field relaxation layer 5 is set at not more than 15%, preferably not more than 10% of the carrier concentration of the electric-field relaxation layer 5.
    Type: Application
    Filed: July 20, 2010
    Publication date: November 4, 2010
    Applicant: NEC CORPORATION
    Inventors: Kazuhiro SHIBA, Kikuo Makita, Takeshi Nakata
  • Publication number: 20100271108
    Abstract: An embodiment of a Geiger-mode avalanche photodiode, having: a body made of semiconductor material of a first type of conductivity, provided with a first surface and a second surface and forming a cathode region; and an anode region of a second type of conductivity, extending inside the body on top of the cathode region and facing the first surface. The photodiode moreover has: a buried region of the second type of conductivity, extending inside the body and surrounding an internal region of the body, which extends underneath the anode region and includes the internal region and defines a vertical quenching resistor; a sinker region extending through the body starting from the first surface and in direct contact with the buried region; and a contact region made of conductive material, overlying the first surface and in direct contact with the sinker region.
    Type: Application
    Filed: April 21, 2010
    Publication date: October 28, 2010
    Applicant: STMICROELECTRONICS S.R.L.
    Inventors: Delfo Nunziato SANFILIPPO, Massimo Cataldo Mazzillo, Piero Giorgio Fallica
  • Patent number: 7816755
    Abstract: A pixel space is narrowed without increasing PN junction capacitance. A photoelectric conversion device includes a plurality of pixels arranged therein, each including a first impurity region of a first conductivity type forming a photoelectric conversion region, a second impurity region of a second conductivity type forming a signal acquisition region arranged in the first impurity region, a third impurity region of the first conductivity type and a fourth impurity region of the first conductivity type are arranged in a periphery of each pixel for isolating the each pixel, the fourth impurity region is disposed between adjacent pixels, and an impurity concentration of the fourth impurity region is smaller than an impurity concentration of the third impurity region.
    Type: Grant
    Filed: August 4, 2008
    Date of Patent: October 19, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazuo Yamazaki, Tetsunobu Kochi
  • Publication number: 20100245809
    Abstract: An avalanche photodiode and a sensor array comprising an array of said avalanche photodiodes is disclosed. Then avalanche photodiode comprises a substrate of a first conductivity type; a first well of a second conductivity type formed within the substrate; a second well of the second conductivity type formed substantially overlying and extending into the first well; a heavily doped region of the first conductivity type formed substantially overlying and extending into the first well, the junction between the heavily doped region and the second well forming an avalanche multiplication region; a guard ring formed from a first conductivity material positioned substantially about the periphery of the multiplication region at least partially underlying the heavily doped region; and an outer well ring of the second conductivity type formed about the perimeter of the deep well and the guard ring.
    Type: Application
    Filed: March 17, 2008
    Publication date: September 30, 2010
    Applicant: JOHNS HOPKINS UNIVERSITY
    Inventors: Andreas G. Andreou, Miriam Adlerstein Marwick, Philippe O. Pouliquen
  • Patent number: 7795639
    Abstract: A photodiode designed to capture incident photons includes a stack of at least three superposed layers of semiconductor materials having a first conductivity type. The stack includes: an interaction layer designed to interact with incident photons so as to generate photocarriers; a collection layer to collect the photocarriers; a confinement layer designed to confine the photocarriers in the collection layer. The collection layer has a band gap less than the band gaps of the interaction layer and confinement layer. The photodiode also includes a region which extends transversely relative to the planes of the layers. The region is in contact with the collection layer and confinement layer and has a conductivity type opposite to the first conductivity type so as to form a p-n junction with the stack.
    Type: Grant
    Filed: September 12, 2007
    Date of Patent: September 14, 2010
    Assignee: Commissariat A l'Energie Atomique
    Inventor: Johan Rothman
  • Publication number: 20100189154
    Abstract: A purpose is to provide a semiconductor optical device having good characteristics to be formed on a semi-insulating InP substrate. Firstly, a semi-insulating substrate including a Ru—InP layer on a conductive substrate is used. Secondly, a semi-insulating substrate including a Ru—InP layer on a Ru—InP substrate or an Fe—InP substrate is used and semiconductor layers of an n-type semiconductor layer, a quantum-well layer, and a p-type semiconductor layer are stacked in this order.
    Type: Application
    Filed: December 1, 2009
    Publication date: July 29, 2010
    Inventors: Shigeki Makino, Takeshi Kitatani, Tomonobu Tsuchiya
  • Publication number: 20100181487
    Abstract: A photodetector/imaging device comprises a layer of photoconductive material converting incident electromagnetic radiation into electrical charges, the layer of photoconductive material being capable of avalanche multiplication when an electric field of sufficient magnitude is applied thereacross; a readout layer detecting the electrical charge; and at least one interface layer between the layer of photoconductive material and the readout layer, the interface layer coupling electrical charge to or from the layer of photoconductive material and being configured to inhibit uncontrolled rises in current in the photoconductive material during avalanche multiplication.
    Type: Application
    Filed: June 23, 2009
    Publication date: July 22, 2010
    Inventors: Matthew M. Wronski, Giovanni DeCrescenzo, Alla Reznik, Wei Zhao, Jennifer Ann Segui, John A. Rowlands
  • Publication number: 20100176477
    Abstract: A single-photon avalanche detector is disclosed that is operable at wavelengths greater than 1000 nm and at operating speeds greater than 10 MHz. The single-photon avalanche detector comprises a thin-film resistor and avalanche photodiode that are monolithically integrated such that little or no additional capacitance is associated with the addition of the resistor.
    Type: Application
    Filed: March 24, 2010
    Publication date: July 15, 2010
    Applicant: PRINCETON LIGHTWAVE, INC.
    Inventor: Mark Allen Itzler
  • Publication number: 20100177223
    Abstract: A solid-state imaging device includes: an avalanche photodiode having a structure including an n+ region, a p+ region, and an avalanche region interposed between the n+ region and the p+ region, all of which are formed to extend in a thickness direction of a semiconductor base; and a pixel repeatedly having the structure of the avalanche photodiode.
    Type: Application
    Filed: January 4, 2010
    Publication date: July 15, 2010
    Applicant: Sony Corporation
    Inventor: John Rennie
  • Publication number: 20100163925
    Abstract: In an electron-injection type APD, it is necessary to prevent a dark current increase and to secure the life time of the device. It is demanded to improve reliability of the APD with a lower production cost. With the InP buffer layer having an n-type doping region on the inside of a region defined by an optical absorption layer, a predetermined doping profile is achieved by ion implantation. Thus, electric field concentration in the avalanche multiplication layer is relaxed. Furthermore, a low-concentration second optical absorption layer is provided between the optical absorption layer and the avalanche multiplication layer. Responsivity of the optical absorption layer is maximized, and depletion of the lateral surface of the optical absorption layer is prevented; thus, electric field concentration is prevented. Preventing edge breakdown, the device improves its reliability.
    Type: Application
    Filed: June 27, 2006
    Publication date: July 1, 2010
    Applicants: NTT ELECTRONICS CORPORATION, NIPPON TELEGRAPH AND TELEPHONE CORPORATION
    Inventors: Tadao Ishibashi, Seigo Ando, Yukihiro Hirota, Yoshifumi Muramoto
  • Patent number: 7741657
    Abstract: An avalanche photodetector is disclosed. An apparatus according to aspects of the present invention includes a semiconductor substrate layer including a first type of semiconductor material. The apparatus also includes a multiplication layer including the first type of semiconductor material disposed proximate to the semiconductor substrate layer. The apparatus also includes an absorption layer having a second type of semiconductor material disposed proximate to the multiplication layer such that the multiplication layer is disposed between the absorption layer and the semiconductor substrate layer. The absorption layer is optically coupled to receive and absorb an optical beam. The apparatus also includes an n+ doped region of the first type of semiconductor material defined at a surface of the multiplication layer opposite the absorption layer.
    Type: Grant
    Filed: July 17, 2006
    Date of Patent: June 22, 2010
    Assignee: Intel Corporation
    Inventors: Alexandre Pauchard, Michael T. Morse
  • Publication number: 20100148040
    Abstract: An embodiment of a Geiger-mode avalanche photodiode includes a body of semiconductor material having a first conductivity type, a first surface and a second surface; a trench extending through the body from the first surface and surrounding an active region; a lateral-isolation region within the trench, formed by a conductive region and an insulating region of dielectric material, the insulating region surrounding the conductive region; an anode region having a second conductivity type, extending within the active region and facing the first surface. The active region forms a cathode region extending between the anode region and the second surface, and defines a quenching resistor. The photodiode has a contact region of conductive material, overlying the first surface and in contact with the conductive region for connection thereof to a circuit biasing the conductive region, thereby a depletion region is formed in the active region around the insulating region.
    Type: Application
    Filed: December 14, 2009
    Publication date: June 17, 2010
    Applicant: STMICROELECTRONICS S.R.L.
    Inventors: Delfo Nunziato SANFILIPPO, Massimo Cataldo MAZZILLO
  • Publication number: 20100140730
    Abstract: A semiconductor device is disclosed. The semiconductor device comprises, a first region of a first conductivity type, a second region of a second conductivity type disposed adjacent to the first region to form a p-n junction structure, a resistance modification region of the second conductivity type, and a field response modification region of the second conductivity type disposed between the resistance modification region and the second region, wherein the field response modification region comprises a varying dopant concentration distribution along a thickness direction of the field response modification region.
    Type: Application
    Filed: December 8, 2008
    Publication date: June 10, 2010
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Stanislav Ivanovich Soloviev, Ho-Young Cha, Peter Micah Sandvik, Alexey Vert, Jody Alan Fronheiser
  • Publication number: 20100133637
    Abstract: An avalanche photodiode comprises: a substrate; a semiconductor layer of a first conductivity type on the substrate; and an avalanche multiplication layer, a light absorption layer, and a window layer which are sequentially formed on the semiconductor layer, wherein apart of the window layer is a region of a second conductivity type, and the light absorption layer includes a first light absorption layer, and a second light absorption layer which has higher electric conductivity than electric conductivity of the first light absorption layer.
    Type: Application
    Filed: November 10, 2009
    Publication date: June 3, 2010
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: EIJI YAGYU, EITARO ISHIMURA, MASAHARU NAKAJI
  • Patent number: 7723206
    Abstract: A photodiode in which increased sensitivity and speed are balanced. The photodiode includes: a semiconductor substrate; a plurality of active regions formed on the substrate by selective epitaxial growth; and a comb electrode provided for each of the plurality of active regions and in communication with each other to electrically connect the active regions together.
    Type: Grant
    Filed: December 5, 2007
    Date of Patent: May 25, 2010
    Assignees: FUJIFILM Corporation, Massachusetts Institute of Technology
    Inventors: Yukiya Miyachi, Wojciech P. Giziewicz, Jurgen Michel, Lionel C. Kimerling
  • Patent number: 7719029
    Abstract: A single-photon avalanche detector is disclosed that is operable at wavelengths greater than 1000 nm and at operating speeds greater than 10 MHz. The single-photon avalanche detector comprises a thin-film resistor and avalanche photodiode that are monolithically integrated such that little or no additional capacitance is associated with the addition of the resistor.
    Type: Grant
    Filed: May 17, 2007
    Date of Patent: May 18, 2010
    Assignee: Princeton Lightwave, Inc.
    Inventor: Mark Allen Itzler
  • Patent number: 7687875
    Abstract: An image sensor includes a semiconductor layer, and first and second photoelectric converting units including first and second impurity regions in the semiconductor layer that are spaced apart from each other and that are at about an equal depth in the semiconductor layer, each of the impurity regions including an upper region and a lower region. A width of the lower region of the first impurity region may be larger than a width of the lower region of the second impurity region, and widths of upper regions of the first and second impurity regions are equal.
    Type: Grant
    Filed: July 25, 2008
    Date of Patent: March 30, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Yun-ki Lee
  • Publication number: 20100072518
    Abstract: Methods of fabricating semiconductor devices using electrode-less wet-etching techniques to reduce defect densities on etched group III-nitride semiconductor surfaces are described herein. The methods generally involve contacting an etched surface of a component of a semiconductor device with a solution comprising a metal hydroxide and an oxidizing agent effective to reduce a roughness of the etched surface, wherein the etched surface is formed from a composition comprising a nitride of a group III element. Improved semiconductor devices are also disclosed.
    Type: Application
    Filed: September 14, 2009
    Publication date: March 25, 2010
    Applicant: Georgia Tech Research Corporation
    Inventors: Shyh-Chiang Shen, Russell Dean Dupuis, Yun Zhang
  • Publication number: 20100065937
    Abstract: Photonic power switch and method of controlling current flow in the photonic power switch, the photonic power switch comprising an avalanche photo diode installed on a switch element, the switch element comprising a carrier donor layer and a channel layer. Photons are injected in the avalanche photo diode for generating electrical charge carriers by photoeffect, and the generated charge carriers are accelerated the by an electric field so as to produce an avalanche effect and are injected from the avalanche photo diode into the carrier donor layer of the switch element. A conduction layer built between the donor layer and the channel layer of the switch element is modulated, thereby modulating a current flow between a drain and a source of the power switch through said conduction layer.
    Type: Application
    Filed: August 26, 2009
    Publication date: March 18, 2010
    Inventor: Wolfgang Templ
  • Publication number: 20100025798
    Abstract: A single-photon detector is disclosed that provides reduced afterpulsing without some of the disadvantages for doing so in the prior art. An embodiment of the present invention provides a stimulus pulse to the active area of an avalanche photodetector to stimulate charges that are trapped in energy trap states to detrap. In some embodiments of the present invention, the stimulus pulse is a thermal pulse.
    Type: Application
    Filed: October 9, 2009
    Publication date: February 4, 2010
    Applicant: PRINCETON LIGHTWAVE, INC.
    Inventors: Mark Allen Itzler, Rafael Ben-Michael, Sabbir Sajjad Rangwala
  • Patent number: 7638857
    Abstract: A silicon controlled rectifier structure is provided in a substrate having a first conductive type. A well region formed within the substrate has a second conductive type. A first dopant region formed within the substrate and the well region has the first conductive type. A second dopant region formed within the substrate and a portion of the well region has the second conductive type. A third dopant region formed under the second dopant region has the first conductive type, in which the second and the third regions form a vertical Zener diode. A fourth dopant region formed within the substrate and separated from the second dopant region by a separation structure has the second conductive type. A fifth dopant region is formed within the substrate in a manner that the fourth dopant region is between the isolation structure and the fifth dopant region, and has the first conductive type.
    Type: Grant
    Filed: May 7, 2008
    Date of Patent: December 29, 2009
    Assignee: United Microelectronics Corp.
    Inventors: Hsin-Yen Hwang, Shu-Hsuan Su, Tien-Hao Tang
  • Patent number: 7605397
    Abstract: An indirect connection to and across a photodiode array. The backside contact is used as one portion which connects to a capacitor. The capacitor forms a shunt across the bulk substrate, thus shunting across the series resistance of the substrate, and reducing the series resistance.
    Type: Grant
    Filed: August 14, 2006
    Date of Patent: October 20, 2009
    Assignee: Digirad Corporation
    Inventors: Joel Kindem, Lars S. Carlson
  • Patent number: 7579668
    Abstract: A method for photo-detecting and an apparatus for the same are provided. The apparatus for photo-detecting includes a first P-N diode and a second P-N diode. The first P-N diode, has a first P-N junction which has a first thickness, by which a first electrical signal is generated when irradiated by light, and the second P-N diode has a second P-N junction which has a second thickness, by which a second electrical signal is generated when irradiated by light. The second thickness is larger than the first thickness and an operation of the first electrical signal and the second electrical signal is proceeded for obtaining a third electrical signal.
    Type: Grant
    Filed: October 19, 2007
    Date of Patent: August 25, 2009
    Assignee: National Taiwan University
    Inventors: Chee-Wee Liu, Chun-Hung Lai, Meng-kun Chen, Wei-Shuo Ho
  • Publication number: 20090206436
    Abstract: An improved semiconductor apparatus that comprises an elongated structure that extends into the substrate. The apparatus comprises a collection contact, a resistive path, a bias connection that creates along the length of the elongated structure, an electric field component that drives signal charge carriers in a direction perpendicular to the elongated structure, and a second bias that generates a current flow that creates within the substrate a constant electric field component to drive signal charge carriers towards the collection contact on the first surface.
    Type: Application
    Filed: December 1, 2006
    Publication date: August 20, 2009
    Inventor: Artto Aurola
  • Publication number: 20090194675
    Abstract: An optical receiver is disclosed, in which no additional photodiode to monitor the optical input level and no temperature control unit are necessary. The receiver of the invention provides an avalanche photodiode (APD) to receiver the first optical signal with the first wavelength and a PIN-PD to receive the second optical signal with the second wavelength. The optical input level for the APD is indirectly determined through the photocurrent generated by the PIN-PD and the bias voltage for the APD is so adjusted that the APD shows an optimum multiplication factor for the optical input level.
    Type: Application
    Filed: January 30, 2009
    Publication date: August 6, 2009
    Applicant: Sumitomo Electric Industries, Ltd.
    Inventors: Moriyasu ICHINO, Junichi KATAOKA, Seiichi ISHIKURA
  • Patent number: 7560751
    Abstract: In a semiconductor photo-detecting element (an avalanche photodiode), a high-sensitivity element is obtained by incorporating a multiplication layer having high-performance multiplication characteristics. By using a structure which reduces an electric field applied to an etching stopper layer, it is possible to use a multiplication layer having higher-performance multiplication characteristics (a multiplication layer which performs multiplication with a high electric field). The first method to realize this is to use a conductivity type multiplication layer. The second method is to use a structure in which a field buffer layer of the second conductivity type is incorporated. As a result of the use of these methods, a structure which applies an electric field lower than the multiplier electrical field to the etching stopper layer is obtained.
    Type: Grant
    Filed: February 4, 2005
    Date of Patent: July 14, 2009
    Assignees: NEC Corporation, NEC Electronics Corporation
    Inventors: Takeshi Nakata, Kikuo Makita, Atsushi Shono
  • Patent number: 7557387
    Abstract: An ultra high speed APD capable of realizing reduction in an operating voltage and quantum efficiency enhancement at the same time is provided. Under operating conditions APD, a doping concentration distribution of each light absorbing layer is determined so that a p-type light absorbing layer (16) maintains a p-type neutrality except a part thereof, and a low concentration light absorbing layer (15) is depleted. Moreover, a ratio between a layer thickness WAD of the p-type light absorbing layer (16) and a layer thickness WAD of the low concentration light absorbing layer (15) is determined so that WAD>0.3 ?m and a delay time of an element response accompanying a transit of carriers generated in the light absorbing layer by light absorption takes on a local minimum under a condition that a layer thickness WA (=WAN+WAD) of the light absorbing layer is constant.
    Type: Grant
    Filed: February 3, 2005
    Date of Patent: July 7, 2009
    Assignees: Nippon Telegraph and Telephone Corporation, NTT Electronics Corporation
    Inventors: Tadao Ishibashi, Seigo Ando, Yukihiro Hirota
  • Publication number: 20090141262
    Abstract: The present invention proposes a real time active imaging method that is accurate and simple, and able to give distance information concerning the observed objects. More specifically, the invention relates to a method of detecting a light pulse reflected on an object (O1, O2, O3), comprising the following steps: c) emitting a light pulse of known intensity and duration towards the object (O1, O2, O3), then d) detecting a reflection signal (P1, P2, P3, P4, P5) of the light pulse on the object (O1, O2, O3) during a determined integration time (?t), with at least one gain sensor able to amplify the reflection signal, wherein, on detection during the integration time (?t), the gain of the sensor or sensors is varied in a controlled manner in order to know the gain at each instant of the integration time (?t), and which also comprises the following step: i) determining the precise instant of return of the reflection signal by evaluating the amplification gain of the reflection signal.
    Type: Application
    Filed: October 30, 2008
    Publication date: June 4, 2009
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE
    Inventors: Johan Rothman, Eric De Borniol
  • Publication number: 20090121305
    Abstract: The present invention provides a front-illuminated avalanche photodiode (APD) with improved intrinsic responsivity, as well as a method of fabricating such a front-illuminated APD. The front-illuminated APD comprises an APD body of semiconductor material, which includes a substrate and a layer stack disposed on a front surface of the substrate. The layer stack includes an absorption layer, a multiplication layer, and a field-control layer. Advantageously, a back surface of the APD body is mechanically and chemically polished, and a reflector having a reflectance of greater than 90% at the absorption wavelength band is disposed on the back surface of the APD body. Thus, incident light that is not absorbed in a first pass through the absorption layer is reflected by the reflector for a second pass through the absorption layer, increasing the intrinsic responsivity of the front-illuminated APD.
    Type: Application
    Filed: October 29, 2008
    Publication date: May 14, 2009
    Applicant: JDS Uniphase Corporation
    Inventors: Zhong Pan, Craig Ciesla
  • Patent number: 7521737
    Abstract: A method of fabricating light-sensing devices including photodiodes monolithically integrated with CMOS devices. Several types of photodiode devices (PIN, HIP) are expitaxially grown in one single step on active areas implanted in a common semiconductor substrate, the active areas having defined polarities. The expitaxially grown layers for the photodiode devices may be either undoped or in-situ doped with profiles suitable for their respective operation. With appropriate choice of substrate materials, device layers and heterojunction engineering and process architecture, it is possible to fabricate silicon-based and germanium-based multi-spectral sensors that can deliver pixel density and cost of fabrication comparable to the state of the art CCDs and CMOS image sensors. The method can be implemented with epitaxially deposited films on the following substrates: Silicon Bulk, Thick-Film and Thin-Film Silicon-On-Insulator (SOI), Germanium Bulk, Thick-Film and Thin-Film Geranium-On-Insulator (GeOI).
    Type: Grant
    Filed: March 2, 2005
    Date of Patent: April 21, 2009
    Assignee: Quantum Semiconductor LLC
    Inventor: Carlos J. R. P. Augusto